CA1108305A - Electronic circuit device and method of making the same - Google Patents

Electronic circuit device and method of making the same

Info

Publication number
CA1108305A
CA1108305A CA298,234A CA298234A CA1108305A CA 1108305 A CA1108305 A CA 1108305A CA 298234 A CA298234 A CA 298234A CA 1108305 A CA1108305 A CA 1108305A
Authority
CA
Canada
Prior art keywords
resin film
face
electronic circuit
circuit device
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA298,234A
Other languages
French (fr)
Inventor
Masaharu Noyori
Hiroaki Fujimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP52025603A external-priority patent/JPS5826667B2/en
Priority claimed from JP52040022A external-priority patent/JPS5929145B2/en
Priority claimed from JP5562477A external-priority patent/JPS53139972A/en
Priority claimed from JP52114296A external-priority patent/JPS5811113B2/en
Priority claimed from JP52117068A external-priority patent/JPS586951B2/en
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of CA1108305A publication Critical patent/CA1108305A/en
Expired legal-status Critical Current

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Classifications

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    • H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1345—Conductors connecting electrodes to cell terminals
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Abstract

ELECTRONIC CIRCUIT DEVICE AND METHOD OF MAKING
THE SAME
ABSTRACT

Principal faces of semiconductor devices are bonded by means of a bond layer on one face (lower face) of a heat-resistive flexible synthetic resin film, for example, polyimide film, the other face (upper face) of the heat-resistive flexible synthetic resin film has bonded wiring conductor films of a specified wir-ing pattern, and specified parts of electrode metal layers or specified regions on the principal face of the semiconductor devices and specified parts of the wiring conductor films on the resin film are connected by conductor films formed extending between them through through-holes with sloped walls formed on the resin film. Also, a thin reinforcing frame of a metal film, formed on said one (lower) face of the resin film with a specified pattern, may be connected to the wiring conductor films through other through-holes with sloped walls.

Description

The ~resent invention re]ates to electronic circu:it devices haviny increasecl component ancl wiriny density and decreased slze.
According to the invention, such a device comprises a resin f:ilm of heat-resistive ancl ~lexible synthetic resin having wiriny conduc-tors o a speci-Eied pattern on one face thereoE and at least one semiconductor device located on the resin film. The semiconductor device has its principal face secured to the other face of the resin film by means of a bond layer and the resin film has a reinforcing frame formed on -the face to which the device is bonded. A specified number of throuyh-holes are provided having sloped wall profiles, whereby each said through-hole has its larger diame-ter on the face of the resin film having the wiring pattern and its smaller diameter on the other face of the resin film.
Specified electrodes on the principal face of the semiconduc-tor device are con-nected to specified parts of the wiring conductors by means of metal films formed through the sloped-wall through-holes.
Such a device enables an increase in the wiring density oE the device and a decrease in size. Furthermore, the amount oE expensive material and the number of fabrication steps required are siynificantly redùced, as will hereinaeter become apparent.
The invention will now be described further by way of example only and . .
with reference to the accompanying drawings, wherein:
Fig. ] is a sectional elevation oE a part of one example of a convent-ional electronic circuit device made by known wire-bonding technology;
E`ig. 2 is a plan view of a part oE a device made by combining the M.ini-;~ Mod technology and known multi-layered wiring technoloyy;
Fig. 3 is a sectional elevation on -the line A-A o Fig. 2;
~ Fig. 4 is a plan view oE an example of an elec-tronic circuit device in r~ accordance with the present invention;

Fig. 5 is a sectional elevation on the line I-I of Fig. 4;
Fig. 6 is a plan view oE another example of an electronic circuit device .
-2-:: ' :- . ~. `::: ' ;- . :: -.. .. : .: .: , aC:COrdillg ~O t~ el-ltiOIl, which has si.milar structure to that o:E Fig. 4 but comprises more semiconduc~o:r devices;
Figs 7 (a) to (i.) are.sectional elevations illustrating various steps in the man~lfacture of one example of an electronic circuit device in accordance with the present invention;
igs.8 (a) to (f) are sec-tional elevations illustrating various steps in the manufacture oE another example of an electronic circuit devi.ce in accord-ance with the presen-t invention;
Fig. 9 is a sectional elevation of another example oE an electronic circuit device in accordance with the present invention;
Fiy. 10 is a sectional elevation Oe yet ano-ther example of an electronic circuit device in accordance with the present invention;
Fig. 11 (a) is a fragmen-tal perspective view ofanother example of an electronic circuit device in accordance with the present invention;
Fig. l.l (b) is a sectional elevation on the line II-II of Fig. 11 (a);
Fig. 12 (a) is a perspective view of one example of a rein.Eorcing metal frame which may be used in conjunction with a device accordiny to the invention; ..
Fiy. 12 (b) is a perspective view of a heat-resistive and 1exible synthetic resin film with t~e me-tal frame of Pig. 12 (a) bonded to the underside ~ ~
of the resin film; ~. .
Fig. 12 (c) is a perspect.ive view of a semi-manufactured assembly com-prising the resin film of Fig. 12 (b) and a time indica-ting device;
Fig. 13 is a sectional elevation o:E another example of the invention, comprisiny a l.lquid crystal ind:icator;
Fig. 14 is a sectional elevatlon of another example o.E the present:
inven-tion;
' Fiys. 15 (a) to (d) are sectional side views showing various steps in the manufacture of another example of a semiconductor device in accordance with the present invention.

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' ~ ' ' ~ ' ' ' ' ' ':: : ' ` , '' ' . ' Re~errillg now to the drawings, an example of a known electronic circuit device comprisiny one or rnore semlconductor devices, such as inteyrated circuit (lC), is constructed as showrl in Fig. 1, wherein multi-layered wiring conductor films 2 and 3 are formed by utilizing printing technology on one face of a ceramic substrate 1. The w:iring conductors 2 and 3 are isolated by means of insulating layer ~ of for example SiO2, semiconductor devices 5,5 such as ICs are bonded on the semiconductor subs-trate 1, and electrodes 6,6 of the semiconductor devices 5,5 are connected to the wiring conductor 2 or 3 by fine aluminum wires 7 by known wire bonding technology. In such a conventional device, as illustrated in Fiy. 1, because of the many bonding points which are bonded one by one, the manu-facture necessitates many s-teps and takes a long -time for -the bonding of the wires.
Since the bonding of the wires 7,7 are made one point a-t a time, the reliability is unsatisfactory and since the ceramic subs-trate is expensive, the resultan-t ~; device becomes expensive. Furthermore, in designing the ceramic substrate, the wiring conductor pattern and arrangement of the semiconductor devices 5,5 must be made so as to shor-ten the lengths of the bonding wires 7,7, and because of such restriction, the substrate -tends to become large.
Fig. 2 shows another example oE a known electric circui-t device com-prising one or more semiconductor devices, fabricated according to Eilm carrier technology. Representative of film carrier teohnology is the Mini-Mod ~Trade Mark :
of General Electric Company of ~SA) -technolog~t, Fiy. 3 shows a section of a par-t of the electronic circuit device on the line ~-A of F:ig. 2. In the Min:i-Mod technology, by simultaneously bonding many beam leads to the corresponding elect-rodes on the semiconductor device, the electronic circuit device can be made with-out time-cons~mling se~uential bondinys. The beam leads are Eormed on a polyimide film by coating Cu film on the polyimide Eilm and subsequently performing select-ive etching by photolithoyraphy, and the LSI electrodes are bonded -thereon by thermal compression bonding. Fig. 2 shows a part of an electronia circuit device .'~' ~ ' ' . ~ . -: - . :
~: :. ,. ,. :
.: :: . . .:., comprising severa:l. semiconductor devices 14,1~ :in accordance with the Mini-Mod technology applied to multi-tip LSI. In Fig. 2, a polyimide film 8 has a speci-fied number of openings 9,9. seam leads 10 ....... are made by utilizing etching techno:Logy in such manner as to extend from the face of the polyimide film 8 into the openings 9,9, and each beam lead 10 forms a part of -the respective first wiring conductor. Then an insulating layer 11 of a specified pattern is formed on the polyimide film 8 and on the first wiring conductors and second wiring conductors 12 .. ...-are formed on the insula-ting layer 11. Specified ones of ~.
the first wiring conductors 10...... and specifled ones of the second wiring con-ductors 12...... are interconnected by me-tal films being formed by parts of the ~
second wiring conduc-tors extending through the holes 13. ... .:to the first wiring . .
conductors 10... ....In the openings 9,9, semiconductor devices 14,14 are held by bonding -the beam leads 10..... onto the electrodes 15........ o -the semlconductor devices 14,14.
The abovemen-tioned Mini-Mod technology has a disadvantage that, when a large number of semiconductor devices 14...... are bonded to one polyimide film 8, simultaneous bonding of them wi-th high accuracy and high reliability is difficult and the jig required for the simultaneous bonding is complicated.
Since the polyimide resln is very expensive, the conventional thick (about 125~m) :20: ~ resin film 8 used in the Mlni-Mod technology is very expensive. Since the wiring conductor is rather thick (about 35~ ) copper film it is difficult to obtain a :: very fine pattern of the wiring conduc-tor. Since the beam leads 10....... have lengths comparable with those o the fine wires in the wire-bonding technology, it is diEficult to s~lfficien~.ly minimize the sub5trate o:E polyim.ide ~i~m 8.
Moreover, since the Mini-Mod technology requires the semiconductor device to have the e~lectrodes.arrdnged on the perlpheral part thereof for bonding wi.th the beam leads, the semiconductor device necessitates special elec-trode pat-tern. Further ... ... .. .. . - : . . ................................. .. :

~: - ~ : , : :
3~i , disadvarltacJes are that since heat o.E the semiconductor device i5 transmitted only throucJh the beam leacls, heat disslpation oE the device is insu~:Eicient and, finally the ~ini Mod -tec~lno],oyy is not suitable for the installation of electronic devices heavier than semiconductor devices, since the weigh-t of the device is suppor-ted only by the beam leads.
Eirst example of -the present invention is illustrated in rig. 4, which is a plan view of such first example, and Fig. 5 which is a sec~ional elevation on the sectional line I-I of Fig. 4. In .Fiy. 4 and Fig. 5, numeral 16designates a thin resin Eilm o heat-resistive 1exible synthetic resin. A pre-ferred example is 10 pm to 50 ~m thick polyimide film. Also, polyamide film or polyester film of similar thickness can be used. On the lower face o:E the resinfilm 16, a bond layer 17 is formed. For the material of the bond layer 17, FEP
: '(fluorinated ethylene propylene) resin or epoxy resin is preferable. In thi.s invention, it is preferable to employ double or triple- layered composi-te sheets consisti.ng of polyimide :Eilm and F'EP fi.lm marketed as K~PTON ~Trade Mark) from E. I. du Pon~t de Nemours and Company in the USA. For example, 'KAPTON has a triple-layer construction of FEP (2.5 y)-polyimide~25 ym)-FEP(2.5 ~). One face of the : : `
FEP composite layer is removed by etching to form the double layer for -the inven- ,~
tion. The -thickness of the bond layer 17 is from approximately 1 y to 5 ,u and is ~ 20 desirably extremely thin. A CU layer is formed by known deposition techniques on :~ the face of the resin film 16 and a wiring layer 22 oE a specified pa-ttern is , .
~ formed by selectively , :;
. .
: -6 ..
.;,-. , ~.
:: -' ' ~ ' ` :

.: .

:: ' : ,, '' ~ ~ '~ ` ' ' ;

3~i etching the Cu layer by use of known photol~-thogxa~y. Holes on the resin film 16 are formed at specified position by known ,~
chemical e~ching with strong alkali solution. Further, holes on the bond layer 17 are formed by use of the plasma etching, thereby the through hol~s 18, which penetrates both resin film 16 and the bond layer 17, are formed. In the forming of the , j ~
through-holes 18, it is preferable to control the solution concentration, solution temperature and time, in order that :~
walls of the through-holes 18 have slope with angle of 30 - 60 10 against the axis of the holes 18. Semiconductor in-tegrated ~.
circuit chip 19 has the electrodes 20 on one face thereof, and the parts of the face other than the electrodes 20 are covered by known ordinary protection layer 21 of SiO2 formed by CVD .
(chemical vapor deposition).
The semiconductor device 19 is bonded and Eixed by thermal pressing at 300C - 350C on the bond layer 17 a~ter the position adjustment of the electrodes 20 on the through~holes 18. S~nce the resin film 16 is thin and hence the resin film 16 is almosttransparen.t, the position adjustment is easy. It is also quite eEfLcient that a number of semiconductor devices 19 can be bonded at one time.
Tn the .E~guro the top ~ace Qf the resin ~ilm 16 has the w~ring circuit p~ttern 22, ~nd on the opposite ~ace, n~mely on the lower ~ace, several semiconductor devices 19, ... are bonded ~ y the layer of the bond 17~ The wiring pattern layers are ~l : ~' il , . ~.
: t ,.,i ~.~.

, ~. 7 '`:,:' ` ~ '. ' :

. :;: ', ' ' : ' : , ' ' louble layered metal layer~ co~sisting of underlyin~ thin layer of Ti or Cr formed on the resin film 16 and the overlying thicker layer of Cu. The underlying layer of Cr or Ti serves as a contarnination stopping barrier layer which prevents the over-lying Cu from dif`fusing through the Al electrode layer 20 into the semiconductor device 19, and at the same time, the under-lying Cr or Ti layer improves adhesion of the Cu wiring conductor 22 on the resin film 16. For one example, the double layered wiring conductors 22 are formed by known deposition with the temperature of the resin film 16 at 150 - 250C, (followed by) plating for increasing the thickness of the overlying Cu layer.
In this inventionj the deposition implies one method selected from evapora~ion, sputtering, non-electrolytic plating and ion-plating. Either one of the abovementioned methods can be ùsed. Then the double layered oonductor layer is selectively etched to form specified wiring pattern by utili~ing known photo-lithography. This wiring pattern can be formed by use of a metal mask, if the high preciseness i9 not expected. At this stage, the wiring 22 and electrodes 20 of the semiconductor device 19 are connectcd by the do~uble layered metal film formed in the through-holes 18 extending~continuously from the wiring conductor 22 to the part contacting on the electrodes 20. A protection coating layer 23 for the semiconductor device 19 may be formed with silicone resin, epoxy resin or ~ith metal whe,n a heat sink on heat dissipation is considered. This coatin~ layer 23 might not be necessary for some oases. A reinforcing supporter 24 to support the film 16 is formed on the lower face of the resin film 16, namely on the face opposite to that having the wiring , , .. ~ . . . , , ,, . ~ . . ~ . . . ..

- : . .

._ rl conductor 22A The reinforcing suppor-ter 24 consi.sts of metal frame, Eor example, and it is bonded around the device 19 by means of a bonding layer 17. The necesisiity of the taper for the wall of through-hole comes when an electrical connection by use of the through-hole 18 is made between the pattern wiring 22 and some other parts~ Namely the sloped wall having larger diameter of the thro~gh-hole at the upper ~ace o~ wiring 22 than that at the opposite (lower~ face of the resin film 16 enables forming of thicker and more reliable metal film by de- r 10 position and plating in a peripheral part of the through-holes 18. If the slope of the taper is steep, shadow problemi arises i at the forming of the metal film, and also gap problem at the subsequent plating. On the contrary, i~ the slope of the through-hole is too gentle, the diameter at the face of the wiring con-ductor 22 becomes too large, thereby causing connection problem jl with the neighboring through-hole. I
In the practical example of the invention when the semiconductor devices 1~ are bonded and fixed to the resin film 16, a number of semiconductor devices 19 can be bonded through A,~
!j the bond layer 17 at one time. Most convenient way of bonding is to pass the devic~s 19 through the heating furnace while applying e~en pressure to a number of devices 19 with a large ;. , ~, pressure plate after adjusting the position of the semiconductors ii .. ~.^
19 by a simple jig~ When the wiring conductor 22 is fo.rmed by the deposition, connections between the w.iring conductors 22 and ~-~ the electrodes ~1 " `' ~.

,, ~. ; ~ ~ 9 :
.,.................................. ~. , .,.. : . ": . : , .. , ~ , .

3 3 ~ 5 2~ OA the semiconductors 1g are formed through the throu~h-holes 1~.
According to the method of the present lnvention, the number of the proce~s i~ considerably reduced in comparison with the abovementioned Mini~Mod tech~ology~ and reliability is also considerabl~ impro~ed.
- In the Mini-Mod type process, a rather thick polyimide film 8 o~ about 12.5 ~ has been u~ually employed as the film 8 o~ ~IG. 2 and ~IG. 3. Thls is because the film 8 itself needs strength -to support fairly thick copper ~oil of 35 ~ a~ a wiring conductor (fir~t layer) and beam leads 10 on the sur*ace of the polyimide film 8, and because the ~ilm ha~ several large openings 9 for receiving the semi-conductor devloe and ~tlll ha to hold the semiconductor deviceq 9 with the beam leads 10 bonded thereon. In the example of the pre~ent invention shown in FIG. 4 and ~IG~
5, the se~iconductor de~ices 19 and reqin ~ilm 16 are bonded face t~o face with the bondlng layer 17 inbetween, and there are no lar~e opening~ to spoil the strength $n the film 16, and accordingly, the rather thin resin ~ilm 16 o~ 10 ~ - 50 i~ sufficient for this use. ~hi~ enable~ the to tal thiokness of the apparatu~ even thinner and material co~t~, which is mainly oonsistin~ of expensive polyimide ~ilm ~or the resin ~ilm 16, can be ¢onsiderably reduced.
The wi ri n~3; conduc-tors 22 of the practical example of` F~G. 4 and ~IG. 5 are formed ~y the deposition and mostly followed by / C) .,~ , , sub~equent plating, and their thic16ness amounts to 2 ,u - 15 Il, Copper-foil thickness in accordance with the Mini-~od type process is 90 thick as 35 ~, and so, the ruggedness of the surface on the first layer wiring conductor become~ large~
Such rugged face of the Mini Mod de~ice cause a problem that at connection part with the second (overlyi~g) layer wiring conductor 129 that i.s, at cro~s-over place of the ~econd and first wiring conductors a out-of~ is likely to occur~ ~his has been a shortcoming of low reliability of the Mini-Mod device.
On the contrary, in the example o~ the prasent invention, the wiring conductors 22 need not support the weight of the semiconductor de~ices 19, and therefore, the wiring conductors 22 do not have the mechanical stren~th.
Therefore, it i~ ~o~ible to form the wiring conductors 22 with thin metal films. Metal supporter for tha reinforcement, i.e. metal frame 24 extends to peripheral parts of the resin film 16 as shown in ~IG. 4. Thi~ i9 for the purpose to reln~
force the resin film 16 and to prevent its w~rping. When the ~ e,Yt~ o d film area is large, the frame should preferably ~ e*~ to the central parts to surround the periphery of the semioon-ductor device 19 as shown by ~IG. ~.
If the metal frame 24 is ~o oonstructad a~ to surround the semioonductor device 19, thi~ re~ults not only ~ to rein~orce the resin film 16 but also has th~ effeot as a : stopper against ~preadin~ o~ m~lted resin ~lurry, whioh is ~ preferab~y applied continuously to cover ~he 8emloonductor . / / . ~
. ~ .. .

devices l9 and neighborin~ part to form a protection film 23. The thickness of the reinforcing metal frame 24 is ~:
preferably from 30,u to 500 ~, and preferable material of the metal frame 24 is Cu, stainless steel or Fe. :~
The selection of the material depends on the ~;
wiring material D For example, if the material for the wiring conductor 22 is Cu and wiring pattern i~ formed by the photolithography and etching, it i5 necessary to use the metal material such as stainless ~teel which is resistant to the FeCl3 solution as the etching solution for the Cu wiring conductor 22.
. , , ~
When a slim metal frame i5 used as the metal frame . 24, bubbles are not trapped between the film 16 and the metal frame 24 at the bonding process, and the bonding is very strong. Also the slim frame can be easily soldered onto ::
the printed circùit board in a short time, because such s~lim frame does not ~ unnecessarily large heat capaoity.

, . ~ f ~:
. ~ , ~

,;~ /~ .

,~J

~f' .'~ ' : ' ,. . ~ , .
' '. `, . :
. ~ ~' , , , ' ' ~ , ' FIG. 6 ~hows a modified exaslple of the inv~ntion, wherein more than one semi.conduotor device 19 are on the resin ~ilm 16 while basic ~tructure i~ similar to that o~ .
FIG. ~ and FIG. 5. In thi~ ca~e same e~ects as ellucidated for the case of ~IG. 4 and ~IG. 5 can al~o be expected.
As the supporter 24s in~ulation resin, ceramic, etc.
are also usabl e .
As described above, in FI~. 4, ~I~. 5 and ~IG. 6, mor~ than one semiconductor device are bonded and ~1~ed on one of the face~ of the heat resistive and ~lexible resin film 16 throu~h the ~ond layer 17. Multi-layered wiring can be ~ormed on the ~ace which i3 oppo~ite to that havin~
emiconductor devices thereon. Electrodes 20 o~ the semi-conductor de~ices 19 and speci~ied parts o~ the wiring conductor~ 22 are electrically connected by mean~ o~ the metal films formed on the wall of the sloped th~ough~-holes 18. ~Thi~ process provides extremely thin and reliable IC
.
devices on mass production line with reduced working processes.
he invented proce~ss has the advantages that the material cost ~ .
is oheap and large integration can be possible by increasing t~e wiring density.
In ~IG. 4 and ~IG. 5, r~in ~ilm ~ubstrat~ 1~, which alone per se is not eas~ to handle, can be made thinner and -: easy to handle by combinlng~with the supporter 24.

., ,, .

:

.

Especially, when electrical measurement is conductea or the electronlc circuit device of this e~ample is ~ixed to ~ r~,~'/,~
the printed circuit board,le~ficienoy ~P-~e~ i8 improv~d, and hence total costs reduction is pos~ible. Thîs factor largely contributes to the ~emiconductor de~ice assem--blying by the wireless bonding. M~reover, by means o~ the stopping action against melted coating resin the ~tructure of` the present invention with the reinforcing ~rame make~ it possible to produce the eleotronic circuit device w~ith more uniform quality when the resin coatin~ o~ the semiconductor is employed.
According to th~ in~estigation o~ the inventors~
when the wiring 22 is ~ormed on the in~ulating ~ilm by the evaporation, if perlpheral parts of the throu~h-hole 18 in the film 16 has sharp corner, eleotric~l cut-off is likely to occur. To overcome this shortcoming, an acute angle of the peripheral part around the through-hole 18 is chan~ed to the gentle periphery and the: cut-off is avoided. The method to remove the acute edge corner at the pherical place of the ~ ~ .
; through-hole 18 is explained referring to various steps of IG. 7 wh~ch shows se¢tional elevation ~iew o~ variou~ steps of the through-hole part o~ the resin film 16.

.

.:
Y
.
' :

- ., -. , : .

~3~33`'~5i At first, by known method, a photoresist mask 31 of a specified pattern having an openin~ 315 is formed on the resin film 16 as shown by FIG. 7(c)~ Then, the part of the resin film 16 which is exposed through the opening 315 is selectively removed by known etching method to form a through-hole 32 as shown by FIG. 7(d).
The etchant for this proce~s is preferably alkali solution, as typical one, NaOH. The through-hole 32 can be formed by etching for about lO - 15 minutes for the resin film 16 of 25 ~ thickness. And the diameter of the throug~-hole should be about 100 ~ for the semiconductor ICs. FEP
film 17 remains after the etching, since it is not soluble to alkali. The wall of the through-hole 32 should preferably have the angle of 30 to 60 again~t the face of the re~in film 16.
. .
In case, a resin film 16 marketed with a coating of `
thin metal film (for example, 2 - 20 ~ Cu or Ni) as shown by FIG. 7~a) is used as a startin6 materlal, then a photoresist film 31 of a specified pattern is to be formed on the thin metal film 30. Subsequently, the metal film 30 is etched bX utilizing a photoresist mask 31 formed thereon to form an opening 305.
Then, the resin film 16 at the part 165 exposed from the opening 305 is etched away by known art in the similar manner to the case shown by FIG. 7(d).
After the above process, the photo-resist film 31 (and metal film 30 too, in the case of FIG. 7(a) and FIG. 7(b)) is removed as shown by FIG. 7(e).
.

7~ O

:.. :. . .
: '; , ' :' ~: .
. .

~, ~ 3~ ~

Corner 33 of the periphery o~ the through~hole 32 ha~ an acute edge in ~ection and thi~ i~ liable to the electrieal cut-of~f o~ the wiring ~etal film ~ormed later on it. Thereforc, th lS acut~ corner 3~ i~ prefer~bly changed to a round gentle corner in the later ~tage.
Then the ~eniconductor de~ice 19 i~ bonded to the FEP fil~ 17, a bond layer, which is on the opposite ~ace to the through-hole ~2 with respec-t to the resin ~ilm 16 a~
shown in ~IG. 7(f)~ Al wirings 20 have been formed on the bonded surface of the ~emiconductor device 19 prior to the bonding. The semiconductor device 19 is bollded to the FEP
film 16 by applying the pre~aure at about ~00 ~.
Next, a metal mask 34~ ~or masking apeci~ied part ~ :~
against an oxide plasma etchin~, i3 ~ormed on the pol~imide film 16. The aperture ~4' of the ma~k 34 i~ formed to be a littla wider than the diameter of the upper end part o~
.
the previously ~ormed through-hole 32. This mask is adherent :eixed after po~itlon-adjustment with the through-hole ~2. -The suitable material for the mask 34 is stainles~ ~teel whi~h is ox- idation re~isti~e~ and the suitable thickness is 30 ~ - ~00 ~, depending on the diameter. ~hen, a pla~ma etching process follows. If the resin film 16 i~ sufficiently thick, the plasma-etching can be made without the use of the mask 34. There are two ob~ects for this plasma etching process~ One object is ko remove the part of the bonding layer 17 of FEP .film exposed at the bottom of the through-hole 32. The other object is to mak~e the ~

~::

~ . . - . ~ . - . ~................................ . .
,: ,, :. ~ ~ . .

~ 3~

310pe of the peripheral part of the through hole 32 gentler and thereby ~ake the corner round. FIG. 7(h) ~hows the con-dition that after the remo~al of the exposed part of the bondin~ layer 17. As a result o~ the plasma etching, the tapered wall o~ the through-hole -~2 now has two parts, a lower and steeper part 35 and the upper and gentler part, and therefore, the peripheral corner o~ the t~rough-hol~
become roun~ed~
In this masked plasma etchingv the requisite con~
dition is that the metal ma~X 34 is wider tha~ through-hole ~2 and it is important to select suitable vclocity of etching by the oxygen plasma. ~ven if the hole 32 i9 not through-holed remaining a thin layer of the resin ~ilm 16, at the bottom o~
the hole 32, the remaining thin part can be removed by the oxygen plasma etching proces~. Accordingly, it is not important whether the hole ~2 is a through-hole or a bottomed hole.
Finally the metal mask ~4 is removed by known proGess, and a metal wiring film 22 is selecti~ely fo~med on the specified part of the surface:o~ the exposed electrod~ 20 o~ the semicon-ductor 19 and on the tapered wall 35, 36 of the throu~h-hole 32 in the polyimide film 16, by deposition and/or plating process to attain a desired thicknes~. ~he wiring film 22 makes an elec~
trical connection between the electrode~ 20 of the semiconductor device 19 and wiring film ~2. A double layered film consisting o~ underlying ~r or Ti layer and o~erlying Cu layer is suitable for the met~l ~ilm 22.

.
: .
, . . . -, :=, -. -, ~-: . ,~ ....

~ r~ ~ ~3 3~ 5;

In the above method, after forming hole 32 with tapered wall by ~electively etching the resin film 16, the semiconductor device 19 is bonded on the bond layer 17, which is a layer o~ the double layered r~sin ~ilm 16. The part o the bond layer e~posed at the bottom o~ the hole 32 and the part of the film 16 around periphery of the hole are :1~
removed to round the peripheral ed~e of the hole. ~y removing ~ ;
the part o~ the bonding layer 17 a~d roundi.ng the peripheral edge o~ the tapered wall of the hole, cut-off o~ the metal wiring 22 for extern~l connection o~ the semiconductor device ~' 19 can be preventedt and therefore ~abrication o~ the elec~
.¦ tronic circuit device with high reliability is obtainable. ~ :
Re~erring to ~IG. 8, fabricating method of the electronic circuit de~ice comprising the frame 24, more than one semiconductor device 19 and other electronio parts is i explained in the ~ollowing. As shown in FIG. 8(a), at first a resin film 16, as a resin ~ubstrate having a ~ond layer 17 on the lower ~ace thereof ~s bonded to the supporter 24 having large through holes 40. A3 described above,the typlcal material for the resin film 16 is polyimide film, for the . bonding layer 17 ~Er, for the supporter 24 metal such as i copper, iro~l, stainless steel, nickel, etc., or thick pol~-i~ide film or ceramic substrate, respeotively. ~or the heat dissipation effect wit:h cheap costs, suitable material is I iron or copper. FIG. 8(b) shows the state a~ter tha bonding.

'~~

0 7 ' ~ , ~ , . , ' '.', :

~ ' ' ' ' ', ... ' ' ~ ' ~ 3~

The prefcr~ble thickness of the polyim~de film 16 is 15 ~ - 50 ~, that of the ~2P 17 2.5 ~ ~ 12.5 ~, that o~
the supporter 24 100 ~ - 500 ~, respectively. ~he through-holes 40 formed on the supporter 24 may be as the ~a~e siæe with the semiConductor devices or passl~e parts to b~ bonded and fi~ed later, but the hole size is pre~erably to be a little larger than those semiconductor devices and pas ive parts in order to make the insertion o~ the parts easy.
The~ as shown in ~IG. 8(o) through-holes 32 for ths wiring are formed on the resin ~ilm 16 Just like the process o~
; FIG. 7(c). ~he places of the through~holas 32 ~or fixing I the device shall coinoide the po~itions of e~ectrode parts I of the semiconductor de~1ces and pas~i~e parts. ~orming method of the through-hole ~2 is known plasma etchlng or chemical etching.
l~ Subsequently, several device~ 19, ... are bonded to I -the bonding layer 17 a~ter in~erting them into the~through-hole 40 a9 shown in ~IG. ~(d). Po3ition ad~ustment is automatically established to fix the de~ioe~ u~ing the through_holes 40 formed on the supporter 24 as guide means.
I Process of forming the throu~h holes 32 for fixing and that i, of the bondi~g the device~ must ~ot nece~sarily be proceeded ¦ in thls order.

. ~; ' ' ' ' ~ /7 .. . .

~ ' .
, -.
,: :, . . .. .

-Then th~ FEP bond layer 17 exposed at the bottom of the fixing hole 32 i9 removed by the plasma etch proces~
to for~ th~ device of ~I~, 8(e3. This proce~s i~ not always necessary if the plasma etch is already us~d in the above-mentioned step of forming the through-holes 40. However if the chemical etching is employed ln ths proces~ o-~ forming the through-holes 40, the FEP (bond layer) 17 remain~ at the bottom of the thro~gh-hol~s ~2, since the F~P layer 17 i~
stable a~ainst chemicals, a~d hence the plasma etching proce~
i~ necessary to ~ul~ill the wiring condition. Elsctrode wirings 22, ... ~rom the electrode~ of se~eral device~ 199 ~ .
are formed in the hole 32 a~ shown by ~IG. 8(f).
According to the abovementioned proce~s, electrode wirin~s 22, ... can be ~ormed a~ter bonding the electronic parts such a~ device3 t 9, . . on the resin substrate 16. This means that electrode wiring3 o~ al~ electroni~o part~ can be efficiently carried out at one time and position~adjustment :`
of several d~vices is:easily and: correctly done bg utili~ing `~ the ~upporter 24 a~ a jig for the in:sertion.
~ ~IG. 9 illustrate~ another example o~ the invention, ;, where th~ wirings 22 of the film 16 are of multi~layered construction, which i~ elucidated in the ;Pollowing. In this example an insulating layer 50 is~ formed on a ~irst layer - wirings 22 by use Or a ~olution o~ polyimide resin or Parylene ~ . (Trade mark Q~ the uDion Carb_de Carporation), and a co~taot ;: : :

.

~ ~r~ 3 ~'~

opening 51 i9 forr.ed by selectively etching the layer 50.
A second la~er wirings 52 are formed by the similar method for the first layer wirings on the insulation layer 50, and are consisting o~ Cu~ Ni, A1, ~u, etc. ~he ~econd l~yer wirings 52 and first layer wirings 22 are connected through the openings 51 on the insulation layer 50, the open~ngs being formed at the cross points of the fir~t and the second wirings .
A protection la~er~ 53 ~ormed at the back ~ace o~
the devices 19,19 are not alway~ necessary. Large lntegration is easily established by use o~ the multi-layered wiring structure described above, as ex~mple~ o~ the invention.
Another example i~ shown by FI~. 10, wherein a transistor 19 is employed a~ a semiconductor de~ice 19 and a collector region 60 o~ the tran~istor 19 is co~nected to the wiring conductor 22 and a ~etal ~ilm 63 through a through-; hole 1~'. The tra~sistor 19 ha~ the collector region 60 on the lower part, the base region 61 and the emitter r~gion 62 on t~e upper part. And the collector re~lon 60 is connected to the wiring conductor 22 by a metal ~ilm 63 which i3 formed to co~er the lower face o~ the transi~tor t9 and extends to underneath part of the through-hole 18' under the bonding layer 17, and ~urther to the wirin~ conductor 22 throueh the through-hole 18'. The electrode 66 o~ the base regio~ ~
61 a~d the electrode 67 of the emitter reg~on 62 are connected .~s ~
~ ~.~ I ~i _ .~0 ' ~ ' : ' . . .

:: -; . -.

~ 3 ~

by the metal ~ilm~ 64 and 65 formed in the through-holes to specified wiring conductors on the upper face Q~ the lilm 16. T~e connecting metal film~ 22, 64 and 65 arc formed at the s ~e time. In thi3 exampls, wireles~ bonding is also applicable for such ~emiconductor de~ices that ha~ elec~
trode metal filr.ls o~ both sides thereof. The electrode 63 is extended away to the bond~ng layer 17 ~nd hence can be used ~or a hea~ di~sipating means. This is convenient when employing so~e power devices as the ~emiconductor ~evice 19.
This electrode 63 al90 serve~ a~ a wiring conductor since it is connected with the w~ring conductor 22 by means of a metal film through anothe~ through-hole 18 ' .
Another example i9 explai~ed re~erring to FIG. 11 (a) and FlG. 11(b), wherein a metal frame 24 provided as a rein~orcin~ supporter is also used as another wiring con-ductor on the back face. l~Yiring conductors 22a and 22b of specified conductor areformed by deposition on ~ resin film ~;
16. ~he conductor 22a is con~ected to the s~miconductor device 19 by through-holes 18a. The wiring conductor 22b is electrically connected to the suitable place o~ a rein- ~
forcing metal supporting frame 24 at the back ~ace o the ~.
film 16 by a through-hole 18b formed at the predete ~ined part o~ the ~ilm 16. In this structure the frame 24 can be used a~ the wiri~g conductor,and this leads to attainment of a larger densitg o~ i~tegration. Withi~ the regions shown ' ~
~4~-'~"

.' ' ` ~

, - : . .
~- . : : .: . , ~. .

~ 3'~'~

by the broken lines 70 and 71 of FIG. 1l(a~, a semiconductor device 19 an~ other electronic parts 72' are bonded and fixed, respectively. When a number o~ electric parts are bonded ant1 ~ixed on the resin fil~ 1~, installation in a large-integration scale i~ possible in the structure o~ FIG.
11, where the metal lrame 24 ~or the reinforcing supporter car~ be used as the wiring conductor of a multilayered wiring structure. In this multi-layered wiring structure, the con_ nection of th~ reinforcine supporter 24 and wirlng pattern 22 is carried out by the t~lrou~h-holes 18a at the same time with the forming of the deposition wiring conductors 22(a) and 22(b), so the structure can correctly be realiæed without repeating several deposition etchings.
A concrete e~ample fabricated by the structure of ~I~. 11(a) and FIG. 11(b) are explained re~erring to FIG.
12(a), ~IG. 12~b) and ~IG. 12(c). ~IG. 12(c) shows a thin electronic circuit apparatus (applied to a ~aking o~ a liquid crystal indicator) provided with a number o~ electronic parts with high density. ~IG. 12~(a) a~d FIG. 12(b) illu~trate the steps in production process.
12(a) shows a framed supporter 240 where many metal frames 24 are formed in a square peripheral ~rame. A
part o~ the supporter that is ln ide the region shown by broken lines 80 is bonded on the back face of a resin film - 16, and the ~rames 24, to be u~ed as wiring conductors, are ~' ' - . .

.
.

., ~ . , .
.

33!~5 subsequently separated into s0veral part~, as shown by FIG~
12(b) by cutting off the peripheral square part 240 (o~ ~IG.
12(a)) of the lr~e. Electronic parts are to be installed on the back face of the resin ~ilm 16 at the po ition show~
by broken lincs.
FIG. t2(b) shows the state~ where the reinforcing frame 24 is bonded on the back face of the resin ~ilm 16. In FIG.
12(b), the electronic ~artst scmiconductor ~e~iCe 19 such as ~SI, a chip resistor 81 and a chip napacitor 8~ are bo~ded on the same principal face (lower face) of the resi~ ~ilm 16 to which face the ~r~e 24 has been bonded.
In the ~ollowing,the production process up to the state of FIG. 12(b) is explained. On one o~ the principal faces (lower face) of a polyimide film 16 of 10 ~m - 50 ~m is installed a bond layer 17 of ~EP resin or epoxy~resin.
Supporter frame 24 o~ about 150 ~ thick shown in FIG. 12(a~ of nickel, stainles~:steel or Xoyar (alloy of ~e-Ni-~o) are bollded by pressing at a raised temperature o~
about 300 C
. ~he expansion coefficient of the in~ulati~g resin ~ilm 16 1s lar~er than that of the supporting metal frame :~
24~ and BO~ :the insulating resin ~îlm 16 shrinXs when it~
temperature comes back to the room temperature after the bonding process. ~his enables to obtain a taut resin ~ilm sur~ace, and this is a quite important ~actor for the following process. ~:

. . . - . . ~ ~ ~ . ...................... .
- ~ . . . . . .
.~ . . . , ~ .

~ y selectively etchings the speci-~ied places b~
the chemical etching and plasma etching, a preset number of through_holes 18 having sloped wallP are formed in the insulating resin ~ilm 16 and the underlying bond layer 17.
The semiconductor device 19 and chip resistor 81 are pressed at a raised temperature on the bond layer 17. The insulating resin ~ilm 16 and the bond layer t7 e~ the substrate is transparent, and hence, the posltion ad~ustment of the through-hole 18 with the eIectrodes o~ the sem1conductor device 19 is easy to carry out. The thickneRs of the rein-forcing supporter 24 amount~ to 50 ~m ~ 250 ~m. It is desirable to be thick on the grounds o~ the mechanical strength. When the electronic parts such as semiconductor device 19 and the reinforcing supporter 24 lie on the same side o~ the bond layer 17 like the abo~ementioned example9 it is desirable for the sake of working process ~hat the thickness of the reinforcing supporter 24 is thinner than that o~ electronic parts.
Cr or Ti nnd Cu to form the wiring conductors 22 in tlle later stage are continuously ~apor-deposited (in the same ~acuum state~ in deposition on all the way of the ~ace of the insulating resin fil~ 16 which face is opposite to the face o~ supporter fixin~. Subsequently, i~ a thicker wiring c~nductor is neceasary, plating treatment follow~.

, ' :

~. . ~ - .
.:

. :

.
- - .~ : ~- : - -- - . . :

3'~'~

In this stage electrodes of the semiconductor device 19, terminalS o~ a ch~p resistor ~1 and som~ parts of th~ ?
supporters 24 are connected to th~ CVD fo~med metal con-ductors throu~h the through-hole~ 18 and 18'. Then a specified wiring pattern 22 i8 ~ormed by etchin~ unnecessary parts OI the deposition ~etal ~i:Lm by known photochemical etching process. The preferable width o~ each of the wiring conductors 22 o~ the wiring pattern is about 75 ~m and the :~
preferable average separation width is 75 ~m.
Though the present exa~ple utilizes deposition to connect the conductor~ on the front face and back ~ace of the insulating resin film 16 through the throu~h-holes 18 and 18', other means of conncction, for example, soldering, u~e of conducti~e paste, or non-electrol.ytic plating is also acceptable.
According to the pr~sent invention, as ellucidated in the above, the multi-layered wiring structure i~ easily obtainable with considcra~ly few steps, since the e}eetric connection across both side~ of the resin film 16 can be made simultaneously with forming of the wiring conduotor film.
:, .
The thickness of th~ support:ing ~rame 24 can be extremely thin to: stand under the mechanical Iorc~, by originally shaping it in a form havin~ a fairly wide square peripheral ~rame 240 at the most e~ternal part as shown by FIG. 12(a). ~his lead~ to easy and safs handling.

~ }- :~

:. . - , ~ : :, :
:

At the end of the productlon process, the fr~me i~ cut at the broken lin~ 80, for example, a9 shown by FIG. 12(b), to form the ~inished resin film sheet with wiring oonductor and re:inforcing supporter.
.~s clearly seen from the drawing, parts. of the rein~orcing supporter 24 extend outward~ from the insulating resin film 16, and they c~n be used a~ outward terminals of the ~pparatus, si~ce it is connected with the wlring pattern 22 through the through-holes. The apparatus obtains humidity resistance i~ a coating film o~ silicon rubber is ~ormed at the side of the electronic device In the above example, the reln~orcing supporter 24 serves as the reinforcing ~ra~e at the production time alld thereafter, and also parts o~ it can be used for the wiring. This fact indicates that a multi-layered wiring, whi.ch is indispensable to the case when a number of semi-conductor devicels 19 are used, and resultant-large sca}e integration are easily realizable. ~or the multi-layered .
tructure, the conne~ctien between the layers of different ` levels are made~through the throu~h-holes 18 at the same time when the evaporation layer is formed on one ~ace the insulating resin film 16. This ~ormin~ s.easll~ and correctly carried out without changing pattern ~asXs several ti~eg, or without repeating the deposition and etching.
:. :

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~ 3~

The reinforcing supporter ~4 are firmly bonded in ~ co~plicated fo~m on one face o~ the insulatin~ resin fil~ l6 after they are cut out from the frams, and ~o the supporter o, the finished apparatus shown by FIG. 12(b) has enou~h strength, and it hardly bend or break in handling.
It is also quite practical that a part of the reinforcing supporter 24 serves a~.outward terminals o~ the apparatus.
FIG. 12(c) shows the ca~e that a liquid crystal indicator 90, whicn co~sists of the pr$noipal glass plate 90 and a lar~er o~erlaying glas~ plate,-91 (shown by ohain line) :~
i~ installed in a manner that the principal glas~ plate 92 is received in the cut plaoe 85 of the re~in film 16 ~hown in ~IG. 12(b). l'he o~erlying glass plate 91 has transparent electrodes ~or numeral indication over the place where the liquid crystal segments 93 are disposed on the underlylng ~.
glass substrate 92, and the llquid~ crystal segments 93 are sealed between two glass plates 91 and 92. The resin ~ilm 16 is bonded on the lower ~ace of the gl~ss plate~91. Another gIass plate 94 (shown b~ chain line), which constitutes another liquid crystal indicator together witho~erl~ing glass plate 91, is also in~talled to the resin ~ilm 16. The liquid crystal indication panel 92 can be fixed at the cut place 85 of the resin film 16, by connecting and ~ixing the electrode ~ .
95 ~ormed on the glass aubstrate:92 and the conductar-supporter 2~ with solder, conductive past, etc.

æ~

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The appar~-ltus o~ thi~ ex~.~ple i8 characterized in that the electronic devices are installed on one (lower) face of the thin resin film 16, the wiring pattern 22 i~
formed on tne other (upper) face of the resin film 16, the connection between them is established through the through-hole 18 fo~ned in the resin film 16, the metal supporter 24 is formed on ~t least one face of the ~ilm 16, part o~ the suppor~er is used ~or wirin~ or lead te~minal~, and hence the ~ulti-layered wiring i~ realized with a thin ~ini~hed thickness o~ several hundred ~m.
~ hus it becomes po~sible to fabricate the electronic clrcuit apparatus including the liquid crystal to bc compact and thinl by connecting the rein~orcin ~rame 24 with several electrodes 95 of the liquid crystal element 90 on the glass substrate 92 for the liquid crystsl. It i~ also easy to h~ndle the device on the resin film 16, eince it hardly , . .
~ break, and therefore it i~ not ~eces~ary to seal it in a : ~ :
ceramic package in the con~entionaI way.
~: mhe app~ratus of the abovementioned ex~mple only occupy an area as large as the total area o~ the electronic devices~namely total of the semiconductor device 19 and chip , - resi~tor~ 819 and hence, is quite small comparing with the -~ concantional electronic circuit devices using a ceramic : :
. package in the conventional way, and ~urth~r it does not ~.
:: cost much.

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Thc liquid cry~t~l indication device 90 a~d the devices on the resin ~ilm 16 are connected and ~ixed by the fle~ible met~l films of lead terminals 95 and 24, and there~ore, ther~al expan~ion and shrinkage o~ the~e devices do not give unnecessary di~tortion by the strain to these device, unlike the prior art, In the prior art using a ceramic package fcr the electronic circuit part, a gla~s substrate hol~ing the indicating device a~d the ceramic package are overlapped, and electrode~ on the bottom ~ace o~ the cer~mic package are connected on the electrodes on t~e glass substrate~ In such con~entional.device, the def`ormation force due to the di~erence of thermal e~pansion ~
coefficients o~ glas~ and cer~mic, applies to~thè connection ;~.
place directly? and this causes troubles such as remo~al o~
the wiring connection, cut~o~f, imper~ection of the wiring, etc. In the abovementioned practical example, such troubles at the connection place~ hardly ari~e on the structural grounds, wnd the reliability is high.

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.-In the practieal example of FIG~ 12, the supporter 24ie formed only on one o~ the face~ o~ the in~ulating resln ~ilm 16~ but this supporter 24 can be formed on both ~ace8 Namely, a bonding layer 17 ~uch as FEP resin can ~e ~ormed on both faces of an in~ulating re~in film 169 and a rein~orcing supporter 24 of nickel is bonded on the back ~ace (lower ~ace)O
On the other hand on the ~ront ~ac~ (upper ~ace) ~ thin copper Ioil i~ pre~ed and bonded all the way vn the ~ront face. And etching i~ carried out to retain a 8peoi~ied pattorn ior the upper ~aoe supportar~
~hen the upper-~ace bonding layer of th~ part~ oth5r than covered b~ the retained upper ~upporting ~ace are removed by plasma etching~
The subsequent proce~e~ a~ter making oi throu~h-hole~
~, 78 are ~imilar to the ~oregoi~g e~ampl~s.
Partial photo etching ls al30 appli~able ana preo~ ~e ; .
~` wiring pattem is obtainable.
~ There~ore it is possible to realiæe an ln~tallatlon : - with a higher density.
~; ` The apparatus of ~I~. 12~c~ comprise~ ~he resin ~ilm 16, the frame ~: 17,whlch reinforces the inæulating resin:~ilm 16 ~or~ed on one of or both o~ the:facas of the ~n~ulatlng resin iilm 16~ ele¢tronic devioeS such:as~ ed on one prlnclpal face o~ the substrate,and the wlring layer ~eleotlvely ~ormed with a speci~ied pattern on the other ~ace o~ the resin ~ilm 16.Speci~ied termlnal~ o~ ~he eleotronic devices and wiring layer~are connected through the through-hols . 3f ~ :~

.,.. ,, , , ,, , ~ , , , 33~
formed in the insulating resin film 16.
Also, speci~ied terminal3 o~ th~ ~lectro~ic ~evices or the wirin~3 layer are conneoted to ~pe¢i~ied parts o~ the . 9upporter.
~ i~ connectio~ method redu~e8 ~h~ produ~tion c08t~
by using the q~ thin ~ub~tra~e, and a~ure3 the ~u~icLent 3tren~gth~
Moreover" multi1 la~rerQd wirlng ~t~u~ture oan ea~ily be Iorm~d a~d it i~ pb~ible to in~l;al1 ths ele~tronic part~ with a hi~her de~it~

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FIG. 13 ~how~ another in~tallation example using a liquid cry~tal :indication panel. Therein, an eleotrode3 95 on one (lower).face o~ the ~la~s substrate~ 91 o~ the liquid crystal indication devicc and a wiri~ conduotors 22 on a ~llm 16 are eloctrically ¢onnected with each other by an elastic connector 100, ~or example, conduct~e ruhber.
Speaking to ~urther d~tail~, the resin ~ilm 16 1~ positioned below the liqui.d cry~tal device ~0, and the de~ic~ 90 and the ~ilm 16 are pressed and ~1xad by a ~prlng (~ot ~hown) to ~ach other, and electricall~ connectad through the ela~tic connector 100 disposed inbetween,j.and thereby the electrical connection is made by the elastic conns¢tor 100 b~tween the electrode~ ~5 on the glas~ plate 90 and the wiring conductor~ 22 on the ~ilm 16.
The thickne~3 ln total oi the finished whole part of the apparatus can be made 2-~ mm, which i~ o~ly ~lightly thicker than the one of FXG~ 12~ but the apparatu3 o~ thi~
e~ample i~ ea~y to a~cmble or dismantle it~ since ths electrical conncc~ion is:made by~the eIastic connector 100~
The device o~ FI~. 13 i~ ln~talled, ~or example, at a cut (indent~) plac:e Or a printed ~ubstrate ~not ~ho~n) and ale~tricaIly co~nected bg ~upporter~ 24 with a printed ~ub~trate. An in~ulating re~in layer 101 i~ ~or protecting the back face o~ device~ 19 and 82~again~t humidity or contaiminating ga~
:
Another ex~mple o~ ths:invention i~ show~ by ~IG~ 14. '~:
:i~ ` A semiconductor de~ice 19 and other kind o~ elactronic device 111 are *ixed sn the ~ama ~ac~ o~ a re3in ~ilm 16 : ~ .
through a:bonding layer 17, ~nd their eleotric connection~ :
:
.. ~ to the wirlng conductor~2~ are made by conneeting the 3~

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terminala of the semiconductor device 19 and the electronic part~ 111 through a metal -~ilm ~ormed through throug~-holes ~ormed on the ~ilm 16. The ~orming o~ the metal ~ilm through the throu~h-holes i~ made during ~ormlng proce~ o~ the wlring pattern on the resin ~ilm 16. Ii the electrodes o~ chip resi~tor~ of electronic parts are dip soldered, the ~older i~ likely to flow from the through-holes o~ the resin ~ilm 16 and make the wiring conductor~ 22 electrically shorted, durlng tho while the temperature o~ the device is rai3ed at 250 o - 350 c ~n the later proce~ o~ ther~all~
fi~ing the electronlc parts on a ~ondlng layer 17;
Thi~ problem oan be overcome by empl~yin~ a modi~ied ~tructure shown by FIG, 14, wherein the elsctro~ic device 19 and metal blocks 110, ~or example, gold plated ~i or ~u plated ~i or Au plat~d Cu, are bonded on the bond-layer 17~ ;
and the larger p~rts 111 are ~oldered to the metal blocks 110 by use o~ khe solder layer 112. ~e metal blocks 110 are selected to have the ~a~ure of easy and 3table bonding on the bond layer 17. ~y use o~ ~uch metal block 110 between the electrode~ ll4 o~ the electronic parts 111 and .

-~ the e~tended part;o~the me~al ~ilm ~2 ~or~ed through the through-holes 18, it~i~ pre~ented that the solder 112 flow~
_ up through the through~hole 18 to tha wiring conductor ~2.
In this structure the metal block~ 110 can be well bonded with electronic parts, even ~or ~ome kind o~ electronio ~: part5 that have dl~iculty to be bonded to the bond layer 17 , . . , - ~ ~

~ :,: . ' . . . - - .

and a ~trong installation i9 po~sible t I~ nece~sary, the ~lectrode 114 o~ the chip resistor can b~ ~ixed to the reinforcing supporter 24 by soldering.
~ inally, the invention i~ explained ~or the example that iB an appl~cation to ~n apparatu~ o~ flip~chip type in the wir~le~ bondlng proc~ss. ~he pre~ent in~ention iæ
also e~ective to the application ~or the ~lip-chip type device~
A~ shown by FIG~ 15 (a), a 3emioonductor dcvice 1~ iY
; bonded on the bond layer 17 which i~ bonded ~n o~ ~ace o~ :
the resln ~ilm 16 wlth ~evaral through-holes 18~ ~he semi-conductor device 19 ig ~o di~posed that ~peci~ied electrode~
20 thereof meets predetermined corre~ponding through~holeR 18.
: A~ter forming condueti~e wir~ngs 122 o~ ~paci~ied pattern on the resin film 16 a~ shown by. ~IG. 15(b3 9 whole ¦'~ face o~ the re~in film 16 i8 oo~ered b~ a metal plate 120 ~ as sho~n by FIG, 15(c).
: ~ Then~ utili~lng the semiconductor device 19 a~ an etchi~
mask, a plasmaletching i~ carried out by a pla3ma emanating upwardt ~o as to remove the ~ilm 16 and the bond layer 17 ;~ which are not covered b~ the ~emiconductor dev~ce 19.
The wiring metal la~ers 122 ara retained a~ter the pla3ma ~ etching, and therefore, e~ternal connecting lead wire 122, : ~ which are extending outward ~rom the device are ~ormed a3 shown b~ FIG~ 15(d).
~: In the method o~ FIG. 15, etchi~g~ o~ the resin film 16 and bond layer 17 are carr~ed out by using the semi-:~ ~ conductor dev~ce l9:a~ a mask ~o make the externa~ lead , ,.., ,i~ ,~,S~ ~ ' :

wires 122. ~hus 3 t~e proce~ o~ the etching~ to iorm the external laad and to remove the films 16 and layer 17 oan be ~impli~i~d. Moreover~ since the semiconductor device 19 itsel~ is u~ed a3 ~he etch~ng ma~k, t~e 8iZ~ a~d ~hape of the retained re~in ~ilm 16 and the bond layer 17 has accurate ~iæe, whl~h i~ the same ~i~h or smaller than that o~ the ~emiconductor de~icQ 19. Thore~ore, the ~ize o~ the Pinished device can be u~ed as a ~e~y compact xa with external connectio~ electrode~.
According to the ~tructure o~ ~IG. 15~d), the ordinar,y t~pe semiconductor devlce i~ usable, and there i~ ~o use o~
forming bump on pad.
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. . . .
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Claims (32)

THE EMBODIMENTS OF THE INVENTION IN WHICH AN EXCLUSIVE
PROPERTY OR PRIVILEGE IS CLAIMED ARE DEFINED AS FOLLOWS:
1. An electronic circuit device comprising a resin film of heat-resistive and flexible synthetic resin having wiring conductors of a specified pattern on one face thereof, at least one semiconductor device held on said resin film, characterized in that said semiconductor device is secured bonding its principal face by means of a bond layer on the other face of said resin film, said resin film has a reinforcing frame formed on said other face and a specified number of through-holes with sloped wall thereby said through-hole having the larger diameter on said one face of the resin film and its smaller diameter on said other face of said resin film and, specified electrodes on said principal face of said semi-conductor device are connected to specified parts of said wiring conductors by means of metal films formed through said through-holes with sloped wall.
2. An electronic circuit device of claim 1, further characterized in that said reinforcing frame is made of a metal and is electrically connected to said wiring conductor through at least a through-hole with sloped wall with its larger diameter on said one face of the resin film and its smaller diameter on said other face of the resin film.
37
4. An electronic circuit device of claim 1, further characterized in that at least one other electric part is bonded by means of a bond layer on said the other face of said resin film, and specified electrodes of said electric part are connected to specified part of said wiring conductors by means of metal films formed through through-holes with sloped wall formed on said resin film.
5. An electronic circuit device of claim 1, further characterized in that at least one other electric part is electrically connected to conductors on the resin film through at least one elastic conductor.
6. An electronic circuit device of claim 1, further characterized in that said resin has at least one block of conductor, to which at least one other electric part is electrically and mechanically connected.
7. An electronic circuit device of claim 1, further characterized in that said resin film has over said wiring conductors at least another wiring conductor with insulating layer disposed inbetween.
8. An electronic circuit device of claim 1, further characterized in that at least one other wiring conductor is formed extending from the opposite face of said semi-conductor device to said the other face of said resin film, and said one other wiring conductor is connected to said wiring conductors by means of metal films formed through through-holes with sloped wall formed on said resin film.
9. An electronic circuit device of claim 1, further characterized in that said semiconductor device is covered by a protecting layer.
10. An electronic circuit device of claim 1, further characterized in that said bond layer is one selected from the group consisting of fluorinated ethylene propylene and epoxy resin.
11. An electronic circuit device of claim 1, further characterized in that said resin film is one selected from the group consisting of polyimide film, polyamide film and polyester film.
12. An electronic circuit device of claim 11, further characterized in that said reinforcing frame is made of a metal and is electrically connected to said wiring conductor through at least a through-hole with sloped wall with its larger diameter on said one face of the resin film and its smaller diameter on said other face of the resin film.
13. An electronic circuit device of claim 11, further characterized in that the reinforcing frame is formed to surround said semiconductor device.
14. An electronic circuit device of claim 11, further characterized in that at least one other electric part is bonded by means of a bond layer on said the other face of said resin film, and specified electrodes of said electric part are connected to specified part of said wiring conductors by means of metal films formed through through-holes with sloped wall formed on said resin film.
15. An electronic circuit device of claim 11, further characterized in that at least one other electric part is electrically connected to conductors on the resin film through at least one elastic conductors.
16. An electronic circuit device of claim 11, further characterized in that said resin has at least one block of conductor to which at least one other electric part is electrically and mechanically connected.
17. An electronic circuit device of claim 11, further characterized in that said resin film has over said wiring conductors at least another wiring conductor with insulating layer disposed inbetween.
18. An electronic circuit device of claim 11, further characterized in that at least one other wiring conductor is formed extending from the opposite face of said semi-conductor device to said the other face of said resin film.

and said one other wiring conductor is connected to said wiring conductors by means of metal films formed through through-holes with sloped walls for on said resin film.
19. An electronic circuit device of claim 11, further character-ized in that said semiconductor device is covered by a protecting layer.
20. An electronic circuit device of claim 11, further character-ized in that said bond layer is one selected from the group con-sisting of fluorinated ethylene propylene and epoxy resin.
21. An electronic circuit device of claim 2, further character-ized in that a liquid crystal indicator is coupled to said resin film in a manner that its electrodes are connected to specified parts of said reinforcing frame.
22. An electronic circuit device of claim 5, further character-ized in that at least one of said other electric part is a liquid crystal indicator having connecting means comprising elastic conductors.
23. An electronic circuit device comprising:
a resin film of heat-resistive and flexible synthetic resin having at least one semiconductor device; principal face of which having electrodes, are bonded on one face of said resin film by a bond layer disposed inbetween, said resin film having specified number of wiring conductors on said the other face, said resin film and said bond layer having a specified num-ber of common through-holes.

characterized in that each of said through-holes having sloped walls in a manner to have larger diameter on said the other face of said resin film and smaller diameter on said bond layer, said resin film has external lead conductors formed on said the other face thereof, said external lead conductors extending from specified positions on said resin film passing periphery of said resin film and outward by a specified length and being connected to specified electrodes of said semiconductor device by metal films formed through said through-holes.
24. A method of making a electronic circuit device comprising the steps of:
forming an etching mask of a specified pattern on a first resin film of a composite resin film comprising said first resin film and a second resin film, said first resin film and said second resin film having different etchant respectively, selectively etching said first resin film by utilizing said etching mask thereby forming recesses or holes, bonding at least one semiconductor device on said second resin film at the part where said recesses or holes are formed on the opposite side of the composite resin film by utilizing said second resin film as a bonding film, etching said second resin film exposed from said recesses or holes by means of plasma etching, thereby forming through-holes with a sloped wall with round peripheral part, and forming a wiring conductor of a metal film of a specified pattern on said first resin film and continuously into said through-holes thereby electrically connecting specified parts of said semiconductor device and said wiring conductor.
25. A method of making an electronic circuit device in accordance with claim 24, wherein said composite resin film is etched by plasma etching and utilizing said semiconductor device as an etching mask.
26. A method of making an electronic circuit device in accordance with claim 24 and further comprising the step of bonding said first resin film through said second resin film onto a reinforcing frame.
27. A method of making an electronic circuit device in accordance with claim 26 wherein said reinforcing frame is of metal.
28. A method of making an electronic circuit device in accordance with claim 24 further comprising the step of coating the rear side of said semiconductor device with resin.
29. A method of making an electronic circuit device in accordance with claim 24 further comprising the step of disposing another electronic device on a principal face of said first resin film opposite to the bonding face with said second resin film.
30. An electronic circuit device comprising a resin film of heat-resistive and flexible synthetic resin having wiring conductors of a specified pattern on one face thereof, at least one electronic device held on said resin film, characterized in that said electronic device is secured bonding its principal face by means of a bond layer on the other face of said resin film, said resin film has a reinforcing frame formed on said other face and a specified number of through-holes with sloped wall thereby said through-hole having the larger diameter on said one face of the resin film and its smaller diameter on said other face of said resin film and, specified electrodes on said principal face of said electronic device are connected to specified parts of said wiring conductors by means of metal films formed through said through-holes with sloped wall.
31. An electronic circuit device of claim 30, further characterized in that said resin film is one selected from the group consisting of polyimide film, polyamide film and polyester film.
32. An electronic circuit device of claim 31, further characterized in that said bond layer is one selected from the group consisting of fluorinated ethylene propylene and epoxy resin.
CA298,234A 1977-03-08 1978-03-06 Electronic circuit device and method of making the same Expired CA1108305A (en)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JPSHO52-25603 1977-03-08
JP52025603A JPS5826667B2 (en) 1977-03-08 1977-03-08 semiconductor equipment
JPSHO52-40022 1977-04-07
JP52040022A JPS5929145B2 (en) 1977-04-07 1977-04-07 How to install electronic parts
JP5562477A JPS53139972A (en) 1977-05-13 1977-05-13 Production of semiconductor device
JPSHO52-55624 1977-05-13
JP52114296A JPS5811113B2 (en) 1977-09-21 1977-09-21 electronic circuit equipment
JPSHO52-114296 1977-09-21
JP52117068A JPS586951B2 (en) 1977-09-28 1977-09-28 electronic circuit equipment
JPSHO52-117068 1977-09-28

Publications (1)

Publication Number Publication Date
CA1108305A true CA1108305A (en) 1981-09-01

Family

ID=27520752

Family Applications (1)

Application Number Title Priority Date Filing Date
CA298,234A Expired CA1108305A (en) 1977-03-08 1978-03-06 Electronic circuit device and method of making the same

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US (2) US4246595A (en)
CA (1) CA1108305A (en)
DE (1) DE2810054A1 (en)
GB (1) GB1588377A (en)

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US4246595A (en) 1981-01-20
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