CA1142252A - Semiconductor optoelectronic device package - Google Patents
Semiconductor optoelectronic device packageInfo
- Publication number
- CA1142252A CA1142252A CA000334664A CA334664A CA1142252A CA 1142252 A CA1142252 A CA 1142252A CA 000334664 A CA000334664 A CA 000334664A CA 334664 A CA334664 A CA 334664A CA 1142252 A CA1142252 A CA 1142252A
- Authority
- CA
- Canada
- Prior art keywords
- block
- stud
- tab
- electrically
- package
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 23
- 230000005693 optoelectronics Effects 0.000 title claims abstract description 19
- 238000000034 method Methods 0.000 claims abstract description 22
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000000463 material Substances 0.000 claims abstract description 9
- 229910052751 metal Inorganic materials 0.000 claims abstract description 6
- 239000002184 metal Substances 0.000 claims abstract description 6
- 238000004806 packaging method and process Methods 0.000 claims abstract description 6
- 239000012212 insulator Substances 0.000 claims description 42
- 238000002955 isolation Methods 0.000 claims description 42
- 238000000576 coating method Methods 0.000 claims description 22
- 239000011248 coating agent Substances 0.000 claims description 21
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 15
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 14
- 229910052802 copper Inorganic materials 0.000 claims description 14
- 239000010949 copper Substances 0.000 claims description 14
- 230000008569 process Effects 0.000 claims description 13
- 239000010931 gold Substances 0.000 claims description 12
- 229910052737 gold Inorganic materials 0.000 claims description 10
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 9
- 229910052759 nickel Inorganic materials 0.000 claims description 7
- 239000011572 manganese Substances 0.000 claims description 5
- 230000005855 radiation Effects 0.000 claims description 5
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 4
- 229910052738 indium Inorganic materials 0.000 claims description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 4
- 229910052748 manganese Inorganic materials 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 239000011733 molybdenum Substances 0.000 claims description 4
- 229910000510 noble metal Inorganic materials 0.000 claims description 4
- MDPILPRLPQYEEN-UHFFFAOYSA-N aluminium arsenide Chemical compound [As]#[Al] MDPILPRLPQYEEN-UHFFFAOYSA-N 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims 1
- 239000004593 Epoxy Substances 0.000 description 10
- 238000005476 soldering Methods 0.000 description 9
- 239000000919 ceramic Substances 0.000 description 7
- LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 5
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 4
- 239000002674 ointment Substances 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 244000273618 Sphenoclea zeylanica Species 0.000 description 3
- 239000012777 electrically insulating material Substances 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000005219 brazing Methods 0.000 description 2
- 239000006071 cream Substances 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- SVTBMSDMJJWYQN-UHFFFAOYSA-N 2-methylpentane-2,4-diol Chemical compound CC(O)CC(C)(C)O SVTBMSDMJJWYQN-UHFFFAOYSA-N 0.000 description 1
- BSYNRYMUTXBXSQ-UHFFFAOYSA-N Aspirin Chemical compound CC(=O)OC1=CC=CC=C1C(O)=O BSYNRYMUTXBXSQ-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 241000405070 Percophidae Species 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- AQLMHYSWFMLWBS-UHFFFAOYSA-N arsenite(1-) Chemical compound O[As](O)[O-] AQLMHYSWFMLWBS-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- -1 e.g. Substances 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- QHGVXILFMXYDRS-UHFFFAOYSA-N pyraclofos Chemical compound C1=C(OP(=O)(OCC)SCCC)C=NN1C1=CC=C(Cl)C=C1 QHGVXILFMXYDRS-UHFFFAOYSA-N 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000000638 stimulation Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0203—Containers; Encapsulations, e.g. encapsulation of photodiodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/64—Heat extraction or cooling elements
- H01L33/642—Heat extraction or cooling elements characterized by the shape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/64—Heat extraction or cooling elements
- H01L33/647—Heat extraction or cooling elements the elements conducting electric current to or from the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/4501—Shape
- H01L2224/45012—Cross-sectional shape
- H01L2224/45015—Cross-sectional shape being circular
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00011—Not relevant to the scope of the group, the symbol of which is combined with the symbol of this group
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01015—Phosphorus [P]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01047—Silver [Ag]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1203—Rectifying Diode
- H01L2924/12036—PN diode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12041—LED
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12042—LASER
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Semiconductor Lasers (AREA)
- Led Device Packages (AREA)
- Led Devices (AREA)
Abstract
ABSTRACT OF DISCLOSURE
A new package for semiconductor optoelectronic devices is disclosed which comprises a novel geometrical configuration. The package includes a metal stud which has a pedestal and a screw portion. An elongated insulated tab is mounted on top of the stud. The tab has an opening at the mounted end and an electrically conducting path along the bottom, which path is perpendicular to and in contact with the stud. A block of high conductivity material is mounted through the opening in the tab and attached to the top of the stud to provide electrical and thermal conduc-tivity therebetween. Mounted on the block is an optoelec-tronic semiconductor device.
The patent further describes techniques for packaging the semiconductor optoelectronic device within the apparatus.
Techniques for bonding devices into the package are easily au-tomated and the disclosed apparatus permits the use of the device in a variety of orientations.
A new package for semiconductor optoelectronic devices is disclosed which comprises a novel geometrical configuration. The package includes a metal stud which has a pedestal and a screw portion. An elongated insulated tab is mounted on top of the stud. The tab has an opening at the mounted end and an electrically conducting path along the bottom, which path is perpendicular to and in contact with the stud. A block of high conductivity material is mounted through the opening in the tab and attached to the top of the stud to provide electrical and thermal conduc-tivity therebetween. Mounted on the block is an optoelec-tronic semiconductor device.
The patent further describes techniques for packaging the semiconductor optoelectronic device within the apparatus.
Techniques for bonding devices into the package are easily au-tomated and the disclosed apparatus permits the use of the device in a variety of orientations.
Description
^`` l~'~Z'~52 21. Field of the Invention 3The invention relates to a semiconductor 4 optoelectsonic device (e.g., a laser diode or light emitting diode) package. The device package permits 6 externa~ electrical contact while maintaining a coaxial 7 package geometry convenient for good heat sinking and 8 light coupling to and from device(s) wi~hin the package.
9 2. DescriPtion of the Prior Art Semiconductor optoelectronic devices are bodies 11 of semiconductor material which include regions of oppo-12 site conductivity type forming a p-n ~unction there-13 between. For some classes of devices, such as diode 14 lasers and light emitting diodes, when an external volt-age is properly applied to the p-n junction, light is 16 generated internally through the recombination of pairs 17 of oppositely charged carriers. For other classes of 18 devices, such as photodetectors, when light (photons) 19 stri~e the surface, electron-hole pairs are formed, generating an external voltage.
21 A stud mount coaxial package of the type com-22 monly employed in commercial usage of a semicontuctor 23 optoelectronic device is disclosed in U.S. Patent 24 3,869,702. There, one side of a light emissive semi-conductor device is mounted onto a copper block which in 26 turn is secured on one face of a steel stud having a 27 hole therein. A hollow stem protruding from the oppo-28 site face of the stud permits passage of a wire through 29 the hollow stem for providing the other connection for the semiconductor device. The wire is electrically in-31 sulated from the hollow stem. However, bonding of the 32 device to the wire is generally done by "flying lead"
33 bonding or hand soldering procedures, neither of wh~ch 34 can eas$1y be automated. Second, the package is limited by its geometry in the ways in which it can be 36 mounted on, for example, a printed circuit board or 37 in which it can be adapted to readily available con-38 nectors. Typically, at least one lead of the package ~ .
:;
1 must be soldered to an external connection. Such
9 2. DescriPtion of the Prior Art Semiconductor optoelectronic devices are bodies 11 of semiconductor material which include regions of oppo-12 site conductivity type forming a p-n ~unction there-13 between. For some classes of devices, such as diode 14 lasers and light emitting diodes, when an external volt-age is properly applied to the p-n junction, light is 16 generated internally through the recombination of pairs 17 of oppositely charged carriers. For other classes of 18 devices, such as photodetectors, when light (photons) 19 stri~e the surface, electron-hole pairs are formed, generating an external voltage.
21 A stud mount coaxial package of the type com-22 monly employed in commercial usage of a semicontuctor 23 optoelectronic device is disclosed in U.S. Patent 24 3,869,702. There, one side of a light emissive semi-conductor device is mounted onto a copper block which in 26 turn is secured on one face of a steel stud having a 27 hole therein. A hollow stem protruding from the oppo-28 site face of the stud permits passage of a wire through 29 the hollow stem for providing the other connection for the semiconductor device. The wire is electrically in-31 sulated from the hollow stem. However, bonding of the 32 device to the wire is generally done by "flying lead"
33 bonding or hand soldering procedures, neither of wh~ch 34 can eas$1y be automated. Second, the package is limited by its geometry in the ways in which it can be 36 mounted on, for example, a printed circuit board or 37 in which it can be adapted to readily available con-38 nectors. Typically, at least one lead of the package ~ .
:;
1 must be soldered to an external connection. Such
2 soldering, with its attendant heat, can degrade the
3 device.
4 SUMMARY
In accordance with thedisclosure, a package 6 for semiconductor optoelec~ronic devices is disclosed.
7 The package includes a device mount, which provides 8 (1) support for at least one optoelectronic device, 9 (2) electrical connections thereto and (3) means for remov~ng hest generated during operation of the device.
11 The device mount comprises a metallic stud of high 12 thermal conductivity and an elongated insulstor tab, 13 8 portion of the bottom of which is mounted on the top 14 of the stud. The insulator tab is provided with (1) an opening at the mounted end to expose 8 portion of the 16 top of the stud and (2) electrically conducting paths 17 in the elongation direction on both the top ant bottom.
18 The bottom conducting path provides electrical contact 19 to the stud. The top conductlng path terminates at the opening.
21 The package described comprises the 22 device mount, together with (1) a block of high thermal 23 conductivity, which is mounted through the opening in 24 the insulator tab and electrically attached to the top of the stud and (2) an isolstion pad configured on one 26 side of the block, at least a portion of which supports 27 an electrically conducting coating which i9 electrically 28 connected to at least one of the top conducting paths 29 on the insulator tab and electrically insulated from the block. A semiconductor optoelectronic device which 31 has ad~acent regions of opposite conductivity to form 32 a p-n ~unction is mounted on the block above the iso-33 laticn pad, with one of the regions being electrically 34 and thermally connected to the block and the other region being electrically connected by a wire lead 36 to the conducting portion of the isolation pad.
37 The rlght sngle electrical contact between 38 the isolation pad and the top conducting path on the $ "
.
1 insulator tab is one key feature.
2 Geometrical (mechanical) contact is achieved by virtue 3 of the package design. The electrical contact can be 4 made using conductive epoxy, solder cream, or solder preform. This process is a signlfic~nt improvement 6 over hand wire bonding or flying lead techniques, which 7 are not easily automsted, In con~rast, the contact 8 arrangement described can easily be automated.
Further, in practice, the isolation pa~ is 11 first configured on the bloc~ followed by mounting of 12 the device. After attaching the lead, the device csn 13 be readily tested by making connections, such as by 14 test probes, to the block snd isolation pad. In thi~
m~nner, ~uality control of the devices may be effected 16 at an earller stage of packaging than heretofore possible, 17 with consequent savings on process time and energy.
18 Devices whlch pass testlng are then pacXaged by mount-19` ing the block on the stud, as described above.
The package provideq a simple me~ns of main-21 tainlng coaxial geometry. Each step in the assembly 22 of thé package i8 easily automated, and the finished 23 packsge can be mounted in a variety of ways so as to 24 achieve light output in a desired direction while maintalning a coaxial geometry. In particular, the 26 p~ckage described provides plug-in capability, 27 without the need for soldering to leads.
29 FIGS. la and lb illustrate a prior art package for a diode laser;
31 FIG. 2 depicts 8 noveI device mount, 32 comprising a metallic stud and an elongated 33 insulator tab;
34 FIG. 3, in cross-section, depicts A
novel semi-conductor optoelectronic device package, 37 FIG. 4 is an enlarged view of the encircled 38 portion of FIG. 3;
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1 FIG. 5 illustrates a per~pectiva view, 2 partially broken away, of the package shown in FIG.
3 3, with attached cap seal;
4 FIG. 6 depicts an example of mounting the S new package on a printed circuit board 6 for emission (or absorption) of an optical beam per-7 pendicular to the plsne of the circuit board; and 8 FIG. 7 depicts an example of mounting the 9 pflckage on a printed circuit board for emission (or absorption) of an optical beam parallel 11 to the plane of the circuit board.
_ _ 13 The semiconductor optoelectron~c devices 14 which may be beneflcially packaged in accord~nce with this disclosure include those semiconductor devices which 16 either upon electricsl stimulation emit light or upon 17 excitation by incident light generate an electrical 18 ~ignal. The light may be in the W, visible or IR
19` re&ions. E2emplary of the former class of devices are tiode lasers and light emitting diodes. Exemplary 21 of the latter class of devices are photodetectors.
22 The tiscussion which follow~ is given generally in 23 terms relating to llght-emitting devices. However, lt 24 wlll also be understood that the elements of the pflckage described apply as well to light-absorbing 26 devlces.
27 The semlconductor optoelectronic devices 28 espec~ally contemplsted are 29 those light-emitting devices such as diode lasers or high radiance light emitting diodes. As is well-31 known, such devices comprise ad3icent regions o~ oppo-32 site conductivity forming a p-n ~unction. Electrical 33 connection is made to eech of the regions for opera-34 tion of the device. Mbst preferred devices contemplated are the well-known double 36 heterostructure diode lasers formed from multiple 37 layers of galllum arsenide and gallium aluminum 38 arsenite deposited on an n-GaAs substrate. The .~
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as s~ch ¢ 1 processes and various device configurations~are well-2 known and do not form a part of this invention. The 3 substrate and cap p-GaAs layer of such devices are 4 typically metallized. In packaging such devices, the metallized n-GaAs substrate is commonly connected to 6 a first eIectrical connection ~cathode) while the 7 metallized p-GaAs layer is bonded to a second elec-8 trical connection (anode) in conjunction with a heat 9 sink for dissipating heat generated during operation of the device.
11 FIG. la shows a prior art package, shown 12 here about 3x actual size, ~or a diode laser 10. The 13 package includes a wire 11, which serves as a cathode, 14 and a stud 12, to which is attached a hollow, thrested portion 13, which serves as an anode ant through which 16 wire 11 passes. The threadet portion permits easy 17 fitting in a fastening device or otherwise mounting 18 on a circuit board to a first electrical connection.
19 The free end of wire 11 i8 typically soldered to a second electrlcal connection. The package slso includes 21 the semiconductor optoelectronic device 10, such as a 22 gallium aluminum arsenide diode laser, one end 23 (generally p-side) of which is mounted on bloc~ 14.
24 Block 14 is electrically and thermally connected to the top of stud 12. The end of the device not connected 26 to the block (generally n-side) is connected to the 27 wire 11 through lead 15. A glass insulating region 28 16 provites electrical insulation between wire 11 and 29 stud 12.
- In FIG. lb, the package of FIG. la is shown 31 together with a cap 17 fitted wlth a transparent window 32 18, providing a seal around the diode laser. ~he 33 transparent window permits egress of opt~cal radiation 34 19 generated by the diode laser.
Lead 15 is commonly referred to as a "flying 36 lead", inasmuch as two separate steps are required 37 for attsching both ends of the wire. One end is 38 typically bonded at one station, and the other end , "
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ll~Z252 1 is bonded at a second station, due to the requirement 2 of making a right angle connection, as shown in FIG.
3 la, 4 As csn be seen from the prior art device, optical output is approximately coaxial with electrical 6 input, but the package can only be easily mounted such 7 that optical output i8 perpendicular to the mounting 8 surface, such as a printed clrcuit board.
9 A mount, shown here about 3x actual size, for a semiconductor optoelectronic device 11 is illustrated in FIG. 2, which 12 shows a stud 20 comprising a pedestal 21 and ~ screw 13 portion 22. me stud and pedestal form a heat sink 14 for dissipating heat generated by the device during operation, and thus comprise a high thermal conductivity 16 material such as copper. For protection sgainst c~rro-17 aion, the stud may be coated with a noble metal such }8 8s gold or nickel/gold, as is customary in the art.
19 To the top of the pedestal is mounted an elongated insulator tab 23. The insulator tab may be 21 of any electrically insulating material, such 8s ceramic, 22 and i5 preferably electronic grade alumina, A portion 23 of the bottom of the insulator tab is mounted to the 24 stut by brazing or soldering. A portion of the end of the insulator tab which is mounted on the stud is 26 provided with an opening 24 to expose a portion of the 27 top of pedestal 21. The opening is conveniently D-28 shaped.
29 On the bottom surface of the insulator tab 30 i9 formed a conducting surface, or path, 25 which is 31 electrically connected to the stut and may be con-32 xidered to be a ground connection. On the top of 33 the insulator tab i8 formed at least one electrically 34 conducting path 26 which, like path 25, runs in the direction of elongation. The electrical conducting 36 p~th 26 terminates at the rim of opening 24. At least 37 one paeh is required in order to make connection to 38 devices contemplated for packaging . .
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, 1 A second, electrically independent 2 and geometrically parallel path may be provided, as 3 shown, where more than one device is employed, such 8s, 4 for example, where a second device is used for modula-tion or to provide feedback or other related use in 6 con~unction with the first device. Alternatively, the 7 second path may be provided aq a redundant back-up 8 contact. me dimensions of the insulator tab and 9 paths 25 and 26 are conveniently selected for use in edge connectors, which hsve standardized pin spacings.
11 The conductlng paths 25 and 26 are of materials 12 that are either essily solderable or otherwise bonded 13 to in some fashion or else can withstand insertion ~nto 14 wiping contacts such as conventional edge connector pi~ contscts. Reference to use of the package 16 described in connection with either of these approaches 17 is discussed more fully in connection with FIGS. 6 and 18 7 below. A convenient material which meets such re-19 quirements is formed by screening a molybdenum/manganese composition onto the ceramic tab in the desired pattern, 21 firing at an elevated temperature, followed by plflting 22 with gold or nickel/gold. These procedures are well-23 kn~wn in the art.
24 The semiconductor optoelectronic package is formed, as illustrated in FIGS. 3 26 and 4, by mounting a block 30 through opening 24 onto 27 pedestal 21 of the device mount shown in FIG. 2.
28 The block provides a path for both electrical and heat 29 transfer and accordingly is of a high electrical and thermal conductivity material, such as copper, 31 silver or metallizet beryllia. The block i8 attached 32 to the pedestal by well-known bonding techniques 33 which provide paths for both electrical and heat 34 transfer. Examples of such bonding techniques include bonding with conducting epoxy, e.g., silver epoxy, 36 soldering, and brazing.
37 Prior to attaching the block to the pedestal, 38 an isolation pad 31 is configured on the block. The .
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1 pad may be discrete, as shown ~n FIGS. 3 and 4 and 2 may be mounted on a portion of the block by solder, 3 epoxy or similar means. If an electrically insulating, 4 heat conducting ceramic such as beryllia is employed as the block, the isolation pad may be formed by 6 defining an electrically conducting area separate 7 from any other electrically conducting area on the 8 block.
9 A discrete isolation pad may be of any elec-trically insulating material, such as ceramic, and is 11 preferably electronic grade alumina. At least a por-12 tion of one surface (top) is provided with an electrically 13 conducting coating 32; the opposite surface (bottom) 14 may or may not be provided with a metallized coating.
The coatings msy be formed in the same manner and com-16 prise the same materials as the conducting paths 2~ and 17 26 on the insulator tab.
18 On the upper portion of block 30 i8 mounted 19 a semiconductor optoelectronic device 33 having regions of opposite conductivity 33a ant 33b, forming a p-n 21 Junction 33c. The device is mountet in proximity to 22 the isolation pad, usually about 50~ m away, for con-23 venient interconnection.
24 The block is conveniently coated with indium, tin or other low melting metal or alloy (not shown) 26 prior to configuring the isolation pad and mounting 27 the device, since the device (and t~screte isolation 28~ pat, if providet with a metallizet coating on its bottom) 29 may then be easily soldered to the block. The thick-ness of the metallized coating ranges from about 2 to 31 4 ~m. The indium coating renders the soldering opera-32 tion quite reproducible and is readily adaptable to 33 batch processing. The indium or other low melting 34 metal or alloy is applied to the block by electroplat-ing or vapor deposition, over a film of nickel or other 36 barrier metal (about 0.5 ~m) deposited on the block as 37 a barrier layer to prevent diffusion of copper into 38 the device.
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1~42~52 1 If block 30 comprises a heat conducting, 2 electrically insulating material, such as beryllia, 3 then isolation pad 31 may be configured on the bloc~
4 by leaving a portion of the block st the appropriate location uncoated with the solderable film. Alterna-6 t~vely, a portion of the solderable film may be re-7 moved to configure the isolation psd. In any event, 8 a portion of the isolation pad may then be costed with 9 the electrically conducting coating 32, as described above, in such a manner as to be electrically insulated 11 from any conducting coating on the block.
12 Forming both the isolation psd and the device 13 on the block permits essy attachment of lead 34, one 14 end of which is bonded to device 33 and the other end of which is bonded to the conducting portion 32 of 16 the isolation pad. Stsndard wire bonding techniques, 17 such as ultrasonic or thermocompression bonding, are 18 conveniently employed in bonding lead 34. As can be 19 seen from the Figures, both ends of lesd 34 are in psrallel planes in the same dimension and require no 21 reorientation of the package to bond both ends. Con-22 sequently, the bonding operation is readily automated 23 and may be done at one station.
24 Block 30 snd its a~sociated components are then mounted in opening 24, as discussed above. Connec-26 tion of contucting portion 32 to conducting path 26 27 is then made employing electrically conducting means 28 35, such as conducting epoxy, solder cream or solder 29 preform. Details of the mounting of the block and its associsted components are shown more clearly in 31 FIG. 4, which ls an enlargement of the encircled por-32 tion of FIG. 3.
33 As with pr~or art devices, a seal may be 34 provited, as shown in FIG. 5. A cap 36 with window 37, which is substantially transparene to the radia-36 tion emitted (or absorbed) by the device, is centeret 37 sround the periphery of opening 24 and attached, such 38 as with an epoxy. If electrical isolation of a . .
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1 metallic cap from conducting paths 26 is desired, 2 a non-conducting epoxy may be employed. Alternatively~
3 the cap may be of ceramic or other insulative msterial.
4 A hermetic seal may be formed by a slight modificstion of the insulator tab. For example, one 6 modif~cation (not shown) comprises forming a ceramic 7 or other insulating ring arount opening 24, having 8 the same dismeter as cap 36, and crossing over conduct-9 ing paths 26. The top surface of the ring is then metallized by conventional techn~ql~es, and the cap is bonded, as by welding or soldering, to the metsllized 12 ring.
13 The package described provides a 14 simple meanQ of maintalning a substantially coaxial configuration of a semicontuctor optoelectronic device.
16 Stimulated emission 38 (or absorbed radiation) travels 17 in 8 direction perpendicular to the thermal reference 18 plane TT (shown in FIG. 3), which i8 p3rt of 8 heflt 19 s1nk, such as a chassis, conductive circuit board or other heae spreading device. All ~teps in the assembly 21 procedure are easily accomplished and easily automated.
22 Packaging optoelectronic devices as 23 described provides another benefit. In the 24 sequence of processing, the isolation pad 31 is first configured on the block 30, then one portion of the 26 device 33 is bonded to the block above the isolation 27 pad. The lead 34 ls then attachéd connecting the 28 other portion of the device and isolation pad. At this 29 point, the device may be readily tested by making con-nectlons, such ag by test probe~, to the block and 31 isol~t~on pad. Devices which ~ail such testing may 32 thus be screened out earlier than heretofore possible, 33 with consequent savings on process time ant energy.
34 Devices which pass such testing may then be packaged by mounting the block onto pedestal 21, as descrlbet 36 above.
37 The plug-in capability provided by the 38 package permits mounting the package in a , ,' ~ ' :'' , : . . .;; . . .
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li~Z;~52 1 number of different orientations. FIGS. 6 and 7 demon-2 strate two pos~ible ways of mounting the package, al-3 though there are other ways as well. For example, as 4 shown in FIG. 6, the package may be bolted to a printed circuit board 50 and at least one lead 51 conventionally 6 bonded between at least one contucting path 26 and a 7 first electrical contact 52 to make electrical connec-8 tion thereto. Conducting path 25 on the bottom of in-9 sulator tab 23 may make compressive contact to a second electrical contact 53 on the printed circuit board to 11 complete the circuit. A heat sink 54 may be employed 12 as part of the attachment to screw portion 22. Output 13 (or incident) beam 38 is then perpendicular to the 14 plane of the printed circuit board.
Another configuration more convenient for 16 changing components is shown in FIG. 7. A conventional 17 edge connector 60 is attached to printed circuit board 18 50 with circuit paths (not shown). Such conneetors 19 comprise a plurality of wiping contacts for insertion of devices and a corresponding plurality of pin connec-21 tions for external electrical connection, as is well-22 known. In this configuration, the output (or input) 23 beam 38 i8 emitted (or absorbed) parallel to the plane 24 of the printed circuit board, which is convenient for the usual stacked parallel array of printed circuit 26 boards. A heat sink 53 can also be attached to screw 27 portion 22 as desired.
29 An elongated insulator tab of electronic grade A1203 having the configuration shown in FIG. 2 31 was constructed with a D-shaped opening at one end.
32 me top and bottom of the tab were metallized in the 33 pattern depicted ln FIG. 2, employing a layer of Mb-Mn 34 of 0.5 mils thick formed by firing directly on the ceramic, followed by a platet layer of at least 1 x 36 10 4 inch Ni and a plated layer of at least 5 x 10 5 37 inch Au. A copper stud, comprising pedestal and screw 38 portions ant coated by plated layers of Ni and Au of ~ i .
about the same thickness as above, was silver brazed to the bottom of the insulator tab, such that a portion of the top of the pedestal was exposed through the opening.
A copper block was plated with 0.5 µ m Ni, followed by 2 µ m In. An isolation pad of electronic grade Al2O3, metallized top and bottom with nickel and gold, of about the same thicknesses as the metallized layers on the insulator tab, was attached to the block by soldering. The p-side of a (Ga,Al)As double hetero-structure diode laser was attached by soldering to the top edge of the copper block, on the same side as the isolation pad, about 50 µ m away. One end of a wire lead (Au; diameter 1 mil) was attached to the n-side of the device, and the other end to the exposed top of the isolation pad, employing conventional ultrasonic wire bonding.
The copper block, with mounted device connected to isolation pad, was placed in a jig provided with two test probes for making contact to the copper blaock and isolation pad. Following successful evaluation of the device, the block was mounted through the opening of the insulator tab on the top of the copper stud using silver epoxy, with the block and associated components substantially configured as shown in FIGS. 3 and 4.
Electrical connection was made between the isolation pad and the metallized paths on top of the insulated tab using silver epoxy.
Finally, a metal cap having a transparent window on top was attached around the opening of the insulator tab, employing a non-conducting epoxy. The completed package was then mounted in an edge connector similar to that shown in FIG. 7 and to which electrical connection was made. The packageed diode laser was then subjected to further testing and evaluation.
In accordance with thedisclosure, a package 6 for semiconductor optoelec~ronic devices is disclosed.
7 The package includes a device mount, which provides 8 (1) support for at least one optoelectronic device, 9 (2) electrical connections thereto and (3) means for remov~ng hest generated during operation of the device.
11 The device mount comprises a metallic stud of high 12 thermal conductivity and an elongated insulstor tab, 13 8 portion of the bottom of which is mounted on the top 14 of the stud. The insulator tab is provided with (1) an opening at the mounted end to expose 8 portion of the 16 top of the stud and (2) electrically conducting paths 17 in the elongation direction on both the top ant bottom.
18 The bottom conducting path provides electrical contact 19 to the stud. The top conductlng path terminates at the opening.
21 The package described comprises the 22 device mount, together with (1) a block of high thermal 23 conductivity, which is mounted through the opening in 24 the insulator tab and electrically attached to the top of the stud and (2) an isolstion pad configured on one 26 side of the block, at least a portion of which supports 27 an electrically conducting coating which i9 electrically 28 connected to at least one of the top conducting paths 29 on the insulator tab and electrically insulated from the block. A semiconductor optoelectronic device which 31 has ad~acent regions of opposite conductivity to form 32 a p-n ~unction is mounted on the block above the iso-33 laticn pad, with one of the regions being electrically 34 and thermally connected to the block and the other region being electrically connected by a wire lead 36 to the conducting portion of the isolation pad.
37 The rlght sngle electrical contact between 38 the isolation pad and the top conducting path on the $ "
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1 insulator tab is one key feature.
2 Geometrical (mechanical) contact is achieved by virtue 3 of the package design. The electrical contact can be 4 made using conductive epoxy, solder cream, or solder preform. This process is a signlfic~nt improvement 6 over hand wire bonding or flying lead techniques, which 7 are not easily automsted, In con~rast, the contact 8 arrangement described can easily be automated.
Further, in practice, the isolation pa~ is 11 first configured on the bloc~ followed by mounting of 12 the device. After attaching the lead, the device csn 13 be readily tested by making connections, such as by 14 test probes, to the block snd isolation pad. In thi~
m~nner, ~uality control of the devices may be effected 16 at an earller stage of packaging than heretofore possible, 17 with consequent savings on process time and energy.
18 Devices whlch pass testlng are then pacXaged by mount-19` ing the block on the stud, as described above.
The package provideq a simple me~ns of main-21 tainlng coaxial geometry. Each step in the assembly 22 of thé package i8 easily automated, and the finished 23 packsge can be mounted in a variety of ways so as to 24 achieve light output in a desired direction while maintalning a coaxial geometry. In particular, the 26 p~ckage described provides plug-in capability, 27 without the need for soldering to leads.
29 FIGS. la and lb illustrate a prior art package for a diode laser;
31 FIG. 2 depicts 8 noveI device mount, 32 comprising a metallic stud and an elongated 33 insulator tab;
34 FIG. 3, in cross-section, depicts A
novel semi-conductor optoelectronic device package, 37 FIG. 4 is an enlarged view of the encircled 38 portion of FIG. 3;
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1 FIG. 5 illustrates a per~pectiva view, 2 partially broken away, of the package shown in FIG.
3 3, with attached cap seal;
4 FIG. 6 depicts an example of mounting the S new package on a printed circuit board 6 for emission (or absorption) of an optical beam per-7 pendicular to the plsne of the circuit board; and 8 FIG. 7 depicts an example of mounting the 9 pflckage on a printed circuit board for emission (or absorption) of an optical beam parallel 11 to the plane of the circuit board.
_ _ 13 The semiconductor optoelectron~c devices 14 which may be beneflcially packaged in accord~nce with this disclosure include those semiconductor devices which 16 either upon electricsl stimulation emit light or upon 17 excitation by incident light generate an electrical 18 ~ignal. The light may be in the W, visible or IR
19` re&ions. E2emplary of the former class of devices are tiode lasers and light emitting diodes. Exemplary 21 of the latter class of devices are photodetectors.
22 The tiscussion which follow~ is given generally in 23 terms relating to llght-emitting devices. However, lt 24 wlll also be understood that the elements of the pflckage described apply as well to light-absorbing 26 devlces.
27 The semlconductor optoelectronic devices 28 espec~ally contemplsted are 29 those light-emitting devices such as diode lasers or high radiance light emitting diodes. As is well-31 known, such devices comprise ad3icent regions o~ oppo-32 site conductivity forming a p-n ~unction. Electrical 33 connection is made to eech of the regions for opera-34 tion of the device. Mbst preferred devices contemplated are the well-known double 36 heterostructure diode lasers formed from multiple 37 layers of galllum arsenide and gallium aluminum 38 arsenite deposited on an n-GaAs substrate. The .~
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as s~ch ¢ 1 processes and various device configurations~are well-2 known and do not form a part of this invention. The 3 substrate and cap p-GaAs layer of such devices are 4 typically metallized. In packaging such devices, the metallized n-GaAs substrate is commonly connected to 6 a first eIectrical connection ~cathode) while the 7 metallized p-GaAs layer is bonded to a second elec-8 trical connection (anode) in conjunction with a heat 9 sink for dissipating heat generated during operation of the device.
11 FIG. la shows a prior art package, shown 12 here about 3x actual size, ~or a diode laser 10. The 13 package includes a wire 11, which serves as a cathode, 14 and a stud 12, to which is attached a hollow, thrested portion 13, which serves as an anode ant through which 16 wire 11 passes. The threadet portion permits easy 17 fitting in a fastening device or otherwise mounting 18 on a circuit board to a first electrical connection.
19 The free end of wire 11 i8 typically soldered to a second electrlcal connection. The package slso includes 21 the semiconductor optoelectronic device 10, such as a 22 gallium aluminum arsenide diode laser, one end 23 (generally p-side) of which is mounted on bloc~ 14.
24 Block 14 is electrically and thermally connected to the top of stud 12. The end of the device not connected 26 to the block (generally n-side) is connected to the 27 wire 11 through lead 15. A glass insulating region 28 16 provites electrical insulation between wire 11 and 29 stud 12.
- In FIG. lb, the package of FIG. la is shown 31 together with a cap 17 fitted wlth a transparent window 32 18, providing a seal around the diode laser. ~he 33 transparent window permits egress of opt~cal radiation 34 19 generated by the diode laser.
Lead 15 is commonly referred to as a "flying 36 lead", inasmuch as two separate steps are required 37 for attsching both ends of the wire. One end is 38 typically bonded at one station, and the other end , "
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ll~Z252 1 is bonded at a second station, due to the requirement 2 of making a right angle connection, as shown in FIG.
3 la, 4 As csn be seen from the prior art device, optical output is approximately coaxial with electrical 6 input, but the package can only be easily mounted such 7 that optical output i8 perpendicular to the mounting 8 surface, such as a printed clrcuit board.
9 A mount, shown here about 3x actual size, for a semiconductor optoelectronic device 11 is illustrated in FIG. 2, which 12 shows a stud 20 comprising a pedestal 21 and ~ screw 13 portion 22. me stud and pedestal form a heat sink 14 for dissipating heat generated by the device during operation, and thus comprise a high thermal conductivity 16 material such as copper. For protection sgainst c~rro-17 aion, the stud may be coated with a noble metal such }8 8s gold or nickel/gold, as is customary in the art.
19 To the top of the pedestal is mounted an elongated insulator tab 23. The insulator tab may be 21 of any electrically insulating material, such 8s ceramic, 22 and i5 preferably electronic grade alumina, A portion 23 of the bottom of the insulator tab is mounted to the 24 stut by brazing or soldering. A portion of the end of the insulator tab which is mounted on the stud is 26 provided with an opening 24 to expose a portion of the 27 top of pedestal 21. The opening is conveniently D-28 shaped.
29 On the bottom surface of the insulator tab 30 i9 formed a conducting surface, or path, 25 which is 31 electrically connected to the stut and may be con-32 xidered to be a ground connection. On the top of 33 the insulator tab i8 formed at least one electrically 34 conducting path 26 which, like path 25, runs in the direction of elongation. The electrical conducting 36 p~th 26 terminates at the rim of opening 24. At least 37 one paeh is required in order to make connection to 38 devices contemplated for packaging . .
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, 1 A second, electrically independent 2 and geometrically parallel path may be provided, as 3 shown, where more than one device is employed, such 8s, 4 for example, where a second device is used for modula-tion or to provide feedback or other related use in 6 con~unction with the first device. Alternatively, the 7 second path may be provided aq a redundant back-up 8 contact. me dimensions of the insulator tab and 9 paths 25 and 26 are conveniently selected for use in edge connectors, which hsve standardized pin spacings.
11 The conductlng paths 25 and 26 are of materials 12 that are either essily solderable or otherwise bonded 13 to in some fashion or else can withstand insertion ~nto 14 wiping contacts such as conventional edge connector pi~ contscts. Reference to use of the package 16 described in connection with either of these approaches 17 is discussed more fully in connection with FIGS. 6 and 18 7 below. A convenient material which meets such re-19 quirements is formed by screening a molybdenum/manganese composition onto the ceramic tab in the desired pattern, 21 firing at an elevated temperature, followed by plflting 22 with gold or nickel/gold. These procedures are well-23 kn~wn in the art.
24 The semiconductor optoelectronic package is formed, as illustrated in FIGS. 3 26 and 4, by mounting a block 30 through opening 24 onto 27 pedestal 21 of the device mount shown in FIG. 2.
28 The block provides a path for both electrical and heat 29 transfer and accordingly is of a high electrical and thermal conductivity material, such as copper, 31 silver or metallizet beryllia. The block i8 attached 32 to the pedestal by well-known bonding techniques 33 which provide paths for both electrical and heat 34 transfer. Examples of such bonding techniques include bonding with conducting epoxy, e.g., silver epoxy, 36 soldering, and brazing.
37 Prior to attaching the block to the pedestal, 38 an isolation pad 31 is configured on the block. The .
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1 pad may be discrete, as shown ~n FIGS. 3 and 4 and 2 may be mounted on a portion of the block by solder, 3 epoxy or similar means. If an electrically insulating, 4 heat conducting ceramic such as beryllia is employed as the block, the isolation pad may be formed by 6 defining an electrically conducting area separate 7 from any other electrically conducting area on the 8 block.
9 A discrete isolation pad may be of any elec-trically insulating material, such as ceramic, and is 11 preferably electronic grade alumina. At least a por-12 tion of one surface (top) is provided with an electrically 13 conducting coating 32; the opposite surface (bottom) 14 may or may not be provided with a metallized coating.
The coatings msy be formed in the same manner and com-16 prise the same materials as the conducting paths 2~ and 17 26 on the insulator tab.
18 On the upper portion of block 30 i8 mounted 19 a semiconductor optoelectronic device 33 having regions of opposite conductivity 33a ant 33b, forming a p-n 21 Junction 33c. The device is mountet in proximity to 22 the isolation pad, usually about 50~ m away, for con-23 venient interconnection.
24 The block is conveniently coated with indium, tin or other low melting metal or alloy (not shown) 26 prior to configuring the isolation pad and mounting 27 the device, since the device (and t~screte isolation 28~ pat, if providet with a metallizet coating on its bottom) 29 may then be easily soldered to the block. The thick-ness of the metallized coating ranges from about 2 to 31 4 ~m. The indium coating renders the soldering opera-32 tion quite reproducible and is readily adaptable to 33 batch processing. The indium or other low melting 34 metal or alloy is applied to the block by electroplat-ing or vapor deposition, over a film of nickel or other 36 barrier metal (about 0.5 ~m) deposited on the block as 37 a barrier layer to prevent diffusion of copper into 38 the device.
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1~42~52 1 If block 30 comprises a heat conducting, 2 electrically insulating material, such as beryllia, 3 then isolation pad 31 may be configured on the bloc~
4 by leaving a portion of the block st the appropriate location uncoated with the solderable film. Alterna-6 t~vely, a portion of the solderable film may be re-7 moved to configure the isolation psd. In any event, 8 a portion of the isolation pad may then be costed with 9 the electrically conducting coating 32, as described above, in such a manner as to be electrically insulated 11 from any conducting coating on the block.
12 Forming both the isolation psd and the device 13 on the block permits essy attachment of lead 34, one 14 end of which is bonded to device 33 and the other end of which is bonded to the conducting portion 32 of 16 the isolation pad. Stsndard wire bonding techniques, 17 such as ultrasonic or thermocompression bonding, are 18 conveniently employed in bonding lead 34. As can be 19 seen from the Figures, both ends of lesd 34 are in psrallel planes in the same dimension and require no 21 reorientation of the package to bond both ends. Con-22 sequently, the bonding operation is readily automated 23 and may be done at one station.
24 Block 30 snd its a~sociated components are then mounted in opening 24, as discussed above. Connec-26 tion of contucting portion 32 to conducting path 26 27 is then made employing electrically conducting means 28 35, such as conducting epoxy, solder cream or solder 29 preform. Details of the mounting of the block and its associsted components are shown more clearly in 31 FIG. 4, which ls an enlargement of the encircled por-32 tion of FIG. 3.
33 As with pr~or art devices, a seal may be 34 provited, as shown in FIG. 5. A cap 36 with window 37, which is substantially transparene to the radia-36 tion emitted (or absorbed) by the device, is centeret 37 sround the periphery of opening 24 and attached, such 38 as with an epoxy. If electrical isolation of a . .
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1 metallic cap from conducting paths 26 is desired, 2 a non-conducting epoxy may be employed. Alternatively~
3 the cap may be of ceramic or other insulative msterial.
4 A hermetic seal may be formed by a slight modificstion of the insulator tab. For example, one 6 modif~cation (not shown) comprises forming a ceramic 7 or other insulating ring arount opening 24, having 8 the same dismeter as cap 36, and crossing over conduct-9 ing paths 26. The top surface of the ring is then metallized by conventional techn~ql~es, and the cap is bonded, as by welding or soldering, to the metsllized 12 ring.
13 The package described provides a 14 simple meanQ of maintalning a substantially coaxial configuration of a semicontuctor optoelectronic device.
16 Stimulated emission 38 (or absorbed radiation) travels 17 in 8 direction perpendicular to the thermal reference 18 plane TT (shown in FIG. 3), which i8 p3rt of 8 heflt 19 s1nk, such as a chassis, conductive circuit board or other heae spreading device. All ~teps in the assembly 21 procedure are easily accomplished and easily automated.
22 Packaging optoelectronic devices as 23 described provides another benefit. In the 24 sequence of processing, the isolation pad 31 is first configured on the block 30, then one portion of the 26 device 33 is bonded to the block above the isolation 27 pad. The lead 34 ls then attachéd connecting the 28 other portion of the device and isolation pad. At this 29 point, the device may be readily tested by making con-nectlons, such ag by test probe~, to the block and 31 isol~t~on pad. Devices which ~ail such testing may 32 thus be screened out earlier than heretofore possible, 33 with consequent savings on process time ant energy.
34 Devices which pass such testing may then be packaged by mounting the block onto pedestal 21, as descrlbet 36 above.
37 The plug-in capability provided by the 38 package permits mounting the package in a , ,' ~ ' :'' , : . . .;; . . .
. , . , ;
li~Z;~52 1 number of different orientations. FIGS. 6 and 7 demon-2 strate two pos~ible ways of mounting the package, al-3 though there are other ways as well. For example, as 4 shown in FIG. 6, the package may be bolted to a printed circuit board 50 and at least one lead 51 conventionally 6 bonded between at least one contucting path 26 and a 7 first electrical contact 52 to make electrical connec-8 tion thereto. Conducting path 25 on the bottom of in-9 sulator tab 23 may make compressive contact to a second electrical contact 53 on the printed circuit board to 11 complete the circuit. A heat sink 54 may be employed 12 as part of the attachment to screw portion 22. Output 13 (or incident) beam 38 is then perpendicular to the 14 plane of the printed circuit board.
Another configuration more convenient for 16 changing components is shown in FIG. 7. A conventional 17 edge connector 60 is attached to printed circuit board 18 50 with circuit paths (not shown). Such conneetors 19 comprise a plurality of wiping contacts for insertion of devices and a corresponding plurality of pin connec-21 tions for external electrical connection, as is well-22 known. In this configuration, the output (or input) 23 beam 38 i8 emitted (or absorbed) parallel to the plane 24 of the printed circuit board, which is convenient for the usual stacked parallel array of printed circuit 26 boards. A heat sink 53 can also be attached to screw 27 portion 22 as desired.
29 An elongated insulator tab of electronic grade A1203 having the configuration shown in FIG. 2 31 was constructed with a D-shaped opening at one end.
32 me top and bottom of the tab were metallized in the 33 pattern depicted ln FIG. 2, employing a layer of Mb-Mn 34 of 0.5 mils thick formed by firing directly on the ceramic, followed by a platet layer of at least 1 x 36 10 4 inch Ni and a plated layer of at least 5 x 10 5 37 inch Au. A copper stud, comprising pedestal and screw 38 portions ant coated by plated layers of Ni and Au of ~ i .
about the same thickness as above, was silver brazed to the bottom of the insulator tab, such that a portion of the top of the pedestal was exposed through the opening.
A copper block was plated with 0.5 µ m Ni, followed by 2 µ m In. An isolation pad of electronic grade Al2O3, metallized top and bottom with nickel and gold, of about the same thicknesses as the metallized layers on the insulator tab, was attached to the block by soldering. The p-side of a (Ga,Al)As double hetero-structure diode laser was attached by soldering to the top edge of the copper block, on the same side as the isolation pad, about 50 µ m away. One end of a wire lead (Au; diameter 1 mil) was attached to the n-side of the device, and the other end to the exposed top of the isolation pad, employing conventional ultrasonic wire bonding.
The copper block, with mounted device connected to isolation pad, was placed in a jig provided with two test probes for making contact to the copper blaock and isolation pad. Following successful evaluation of the device, the block was mounted through the opening of the insulator tab on the top of the copper stud using silver epoxy, with the block and associated components substantially configured as shown in FIGS. 3 and 4.
Electrical connection was made between the isolation pad and the metallized paths on top of the insulated tab using silver epoxy.
Finally, a metal cap having a transparent window on top was attached around the opening of the insulator tab, employing a non-conducting epoxy. The completed package was then mounted in an edge connector similar to that shown in FIG. 7 and to which electrical connection was made. The packageed diode laser was then subjected to further testing and evaluation.
Claims (19)
PROPERTY OF PRIVILEGE IS CLAIMED ARE DEFINED AS FOLLOWS:
1. A semiconductor optoelectronic device package comprising:
(a) a metallic stud comprising pedestal and screw portions of high thermal conductivity material;
(b) an elongated insulator tab, a portion of the bottom of which is mounted on top of said stud, said in-sulator tab provided with (1) an opening therethrough at the mounted end, (2) an electrically conducting path along the bottom of said insulator tab, perpendicular to and making electrical contact to said stud and (3) at least one elec-trically conducting path on the top of said insulator tab, perpendicular to an axial plane of said stud, terminating at said opening;
(c) a block comprising high thermal conduc-tivity material including (1) at least one isolation pad confi-gured on said block, at least a portion of which supports an electrically conducting coating, insulated from said block and (2) at least one optoelectronic semicon-ductor device comprising adjacent regions of opposite conduc-tivity forming at least one p-n junction and mounted on said block, one of said regions being electrically and thermally connected to said block, another of said regions being elec-trically connected to said conductive portion of said isola-tion pad, said block being mounted through the opening in the insulator tab and attached to the top of said stud to provide electrical and thermal conductivity therebetween, said block being posi-tioned relative to said stud to provide light propagation to or from said semiconductor device in a direction substantially coaxial with the stud and positioned relative to said insulator tab such that at least one of the top conducting paths is proxi-mate to the conductive layer on said isolation pad.
(a) a metallic stud comprising pedestal and screw portions of high thermal conductivity material;
(b) an elongated insulator tab, a portion of the bottom of which is mounted on top of said stud, said in-sulator tab provided with (1) an opening therethrough at the mounted end, (2) an electrically conducting path along the bottom of said insulator tab, perpendicular to and making electrical contact to said stud and (3) at least one elec-trically conducting path on the top of said insulator tab, perpendicular to an axial plane of said stud, terminating at said opening;
(c) a block comprising high thermal conduc-tivity material including (1) at least one isolation pad confi-gured on said block, at least a portion of which supports an electrically conducting coating, insulated from said block and (2) at least one optoelectronic semicon-ductor device comprising adjacent regions of opposite conduc-tivity forming at least one p-n junction and mounted on said block, one of said regions being electrically and thermally connected to said block, another of said regions being elec-trically connected to said conductive portion of said isola-tion pad, said block being mounted through the opening in the insulator tab and attached to the top of said stud to provide electrical and thermal conductivity therebetween, said block being posi-tioned relative to said stud to provide light propagation to or from said semiconductor device in a direction substantially coaxial with the stud and positioned relative to said insulator tab such that at least one of the top conducting paths is proxi-mate to the conductive layer on said isolation pad.
2. The package of Claim 1 further comprising a cap with a window substantially transparent to radiation emitted or absorbed by said at least one device, said cap secured to said insulator tab around said opening to form a sealed enclosure for said device.
3. The package of Claim 1 in which said stud and said block consist essentially of copper.
4. The package of Claim 3 in which said stud is coated with at least one conducting metallic film comprising a noble metal.
5. The package of Claim 1 in which at least a portion of said block is coated with at least one film com-prising a solderable metal.
6. The package of Claim 1 in which said insula-tor tab consists essentially of alumina.
7. The package of Claim 1 in which said elec-trically conducting paths along said top and bottom of said insulator tab and in which said conducting coating on said isolation pad comprise at least one film comprising a noble metal.
8. The package of Claim 1 in which said isolation paid comprises a body consisting essentially of alumina, the bottom of which is mounted on one side of said block and at least a portion of the top of which supports said electrically conducting coating.
9. The package of Claim 1 in which said at least one device comprises a multi-layer double heterostructure gal-lium aluminum arsenide light-emitting device.
10. A light-emitting device package comprising:
(a) a copper stud comprising a pedestal and screw portion plated with a first film consisting essentially of nickel and a second film over said first film consisting essentially of gold;
(b) an elongated insulator tab consisting essentially of alumina, a portion of the bottom of which is mounted on top of said stud, said insulator tab provided with (a) an opening therethrough at the mounted end, (2) an electrically conducting path consisting essentially of a gold film over a layer consisting essentially of molybdenum/manganese along the bottom of said insulator tab making electrical contact to said top of said stud (3) at least one elect-rically conducting path consisting essentially of a gold film over a layer consisting essentially of molybdenum/manganese along the top of said insulator tab in the direction of elongation and term-inating at said opening;
(c) a copper block coated with a solderable film con-sisting essentially of indium over a layer consisting essentially of nickel mounted through said opening in said insulator tab and electrically attached to the top of said stud;
(d) an isolation pad consisting essentially of alumina, the bottom of which is mounted on one side of said block and at least a portion of the top of which supports an electrically con-ducting coating consisting essentially of a gold film over a layer consisting essentially of molybdenum/manganese which is electrically connected to at least one of said top conducting layers on said insulation tab and electrically isolated from said block together with said pad being positioned such that the top electrically con-ducting path on said insulator tab is proximate and perpendicular to the conducting coating on said isolation pad;
(e) a multi-layer semiconductor light-emitting device having regions of opposite conductivity forming a p-n junction mounted on said block in proximity to said isolation pad, one of said regions being electrically and thermally con-nected to said block, the other of said regions being elec-trically connected to said electrically conducting coating on said isolation pad, said light emitting device positioned to provide light propagation to or from said device in a direction substantially coaxial to said stud;
(f) a cap with a window substantially trans-parent to radiation emitted by said device, said cap secured to said insulator tab around said opening to form a sealed enclosure for said device.
(a) a copper stud comprising a pedestal and screw portion plated with a first film consisting essentially of nickel and a second film over said first film consisting essentially of gold;
(b) an elongated insulator tab consisting essentially of alumina, a portion of the bottom of which is mounted on top of said stud, said insulator tab provided with (a) an opening therethrough at the mounted end, (2) an electrically conducting path consisting essentially of a gold film over a layer consisting essentially of molybdenum/manganese along the bottom of said insulator tab making electrical contact to said top of said stud (3) at least one elect-rically conducting path consisting essentially of a gold film over a layer consisting essentially of molybdenum/manganese along the top of said insulator tab in the direction of elongation and term-inating at said opening;
(c) a copper block coated with a solderable film con-sisting essentially of indium over a layer consisting essentially of nickel mounted through said opening in said insulator tab and electrically attached to the top of said stud;
(d) an isolation pad consisting essentially of alumina, the bottom of which is mounted on one side of said block and at least a portion of the top of which supports an electrically con-ducting coating consisting essentially of a gold film over a layer consisting essentially of molybdenum/manganese which is electrically connected to at least one of said top conducting layers on said insulation tab and electrically isolated from said block together with said pad being positioned such that the top electrically con-ducting path on said insulator tab is proximate and perpendicular to the conducting coating on said isolation pad;
(e) a multi-layer semiconductor light-emitting device having regions of opposite conductivity forming a p-n junction mounted on said block in proximity to said isolation pad, one of said regions being electrically and thermally con-nected to said block, the other of said regions being elec-trically connected to said electrically conducting coating on said isolation pad, said light emitting device positioned to provide light propagation to or from said device in a direction substantially coaxial to said stud;
(f) a cap with a window substantially trans-parent to radiation emitted by said device, said cap secured to said insulator tab around said opening to form a sealed enclosure for said device.
11. The package of Claim 10 in which the p-side of said device is connected to said block and the n-side is connected to said electrically conducting coating on said isolation pad.
12. A process for packaging at least one semicon-ductor optoelectronic device, said at least one device com-prising adjacent regions of opposite conductivity forming a p-n junction, said process comprising:
(a) mounting said at least one device on a block of high thermal conductivity by electrically and ther-mally connecting one of said regions of said at least one device to a portion of said block;
(b) configuring an isolation pad on a portion of said block in proximity to said at least one device, at least a portion of which isolation pad is coated with an elec-trically conducting coating, which is electrically insulated from said block;
(c) attaching one end of an electrically con-ducting lead to the other of said regions of said at least one device and the other end of said lead to said electrically con-ducting coating on said isolation pad;
(d) mounting said block on a device mount com-prising:
(1) a metallic stud comprising pedestal and screw portions of high thermal conductivity and (2) an elongated insulator tab, a por-tion of the bottom of which is mounted on top of said pedestal portion of stud, said insulator tab being provided with (a) an opening therethrough at the mounted end, (b) an electrically conducting layer along the bottom of said insulator tab making electrical contact to said stud and (3) at least one electric-ally conducting layer along the top of said insulator tab, terminating at said opening, said block electrically attached to the top surface of said pedestal of said stud through said openings, said block con-figured so that said isolation pad is in juxtaposition with at least one electrically conducting layer on top of said insulator tab; and (e) forming an electrical connection between said electrically conducting coating on said isolation pad and said at least one electrically conducting layer on top of said insulator tab.
(a) mounting said at least one device on a block of high thermal conductivity by electrically and ther-mally connecting one of said regions of said at least one device to a portion of said block;
(b) configuring an isolation pad on a portion of said block in proximity to said at least one device, at least a portion of which isolation pad is coated with an elec-trically conducting coating, which is electrically insulated from said block;
(c) attaching one end of an electrically con-ducting lead to the other of said regions of said at least one device and the other end of said lead to said electrically con-ducting coating on said isolation pad;
(d) mounting said block on a device mount com-prising:
(1) a metallic stud comprising pedestal and screw portions of high thermal conductivity and (2) an elongated insulator tab, a por-tion of the bottom of which is mounted on top of said pedestal portion of stud, said insulator tab being provided with (a) an opening therethrough at the mounted end, (b) an electrically conducting layer along the bottom of said insulator tab making electrical contact to said stud and (3) at least one electric-ally conducting layer along the top of said insulator tab, terminating at said opening, said block electrically attached to the top surface of said pedestal of said stud through said openings, said block con-figured so that said isolation pad is in juxtaposition with at least one electrically conducting layer on top of said insulator tab; and (e) forming an electrical connection between said electrically conducting coating on said isolation pad and said at least one electrically conducting layer on top of said insulator tab.
13. The process of Claim 12 further comprising bonding a cap around said opening, said cap having a window substantially transparent to radiation emitted or absorbed by said device.
14. The process of Claim 12 in which said at least one device comprises a multi-layer double heterostructure gal-lium aluminum arsenide light-emitting device.
15. The process of Claim 12 in which a solderable coating is formed on said block prior to mounting said at least one device thereon.
16. The process of Claim 12 in which said stud and said block consist essentially of copper.
17. The process of Claim 12 in which said insula-tor tab consists essentially of alumina.
18. The process of Claim 12 in which said isola-tion pad comprises a body consisting essentially of alumina, the bottom of which is mounted on a portion of said block in proximity to said at least one device and at least a portion of the top of which supports said electrically conducting coating.
19. The process of Claim 12 in which said elec-tircally conducting layers along said top and bottom of said insulator tab and said conducting coating on said isolation pad comprise at least one film comprises a noble metal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA000406067A CA1149500A (en) | 1978-09-28 | 1982-06-25 | Optoelectric device mount |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/946,592 US4240098A (en) | 1978-09-28 | 1978-09-28 | Semiconductor optoelectronic device package |
| US946,592 | 1978-09-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1142252A true CA1142252A (en) | 1983-03-01 |
Family
ID=25484703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000334664A Expired CA1142252A (en) | 1978-09-28 | 1979-08-29 | Semiconductor optoelectronic device package |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US4240098A (en) |
| JP (1) | JPS5546599A (en) |
| BE (1) | BE879033A (en) |
| CA (1) | CA1142252A (en) |
| DE (1) | DE2939497A1 (en) |
| FR (1) | FR2437696A1 (en) |
| GB (1) | GB2032688B (en) |
| IL (1) | IL58313A0 (en) |
| IT (1) | IT1123356B (en) |
| NL (1) | NL7907254A (en) |
| SE (1) | SE7908022L (en) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4544989A (en) * | 1980-06-30 | 1985-10-01 | Sharp Kabushiki Kaisha | Thin assembly for wiring substrate |
| JPS5717167U (en) * | 1980-07-03 | 1982-01-28 | ||
| JPS5759468U (en) * | 1980-09-27 | 1982-04-08 | ||
| JPS5821193A (en) * | 1981-07-31 | 1983-02-07 | 三菱原子力工業株式会社 | Nuclear fuel assembly |
| JPS58145169A (en) * | 1982-02-23 | 1983-08-29 | Nec Corp | Optical semiconductor device |
| JPS58168289A (en) * | 1982-03-30 | 1983-10-04 | Mitsubishi Electric Corp | Laser diode package |
| US4490694A (en) * | 1982-07-28 | 1984-12-25 | Eaton Corporation | Microwave switch wherein PIN diode is mounted orthogonal to microstrip substrate |
| US4726507A (en) * | 1984-08-29 | 1988-02-23 | The United States Of America As Represented By The Secretary Of The Air Force | Cryogenic glass-to-metal seal |
| US4797728A (en) * | 1986-07-16 | 1989-01-10 | General Electric Company | Semiconductor device assembly and method of making same |
| US4820659A (en) * | 1986-07-16 | 1989-04-11 | General Electric Company | Method of making a semiconductor device assembly |
| US5252856A (en) * | 1990-09-26 | 1993-10-12 | Nec Corporation | Optical semiconductor device |
| EP0533110B1 (en) * | 1991-09-19 | 1995-03-15 | Eastman Kodak Company | Laser diode with card-edge connector |
| US5347247A (en) * | 1993-06-02 | 1994-09-13 | The United States Of America As Represented By The United States Department Of Energy | Electro-optic component mounting device |
| US6375365B1 (en) * | 2000-02-28 | 2002-04-23 | Onix Microsystems, Inc. | Apparatus and packaging method to assemble optical modules to a common substrate with adjustable plugs |
| US20030058650A1 (en) * | 2001-09-25 | 2003-03-27 | Kelvin Shih | Light emitting diode with integrated heat dissipater |
| US20040240188A1 (en) * | 2003-05-28 | 2004-12-02 | Cromwell Stephen Daniel | Protective coating for attach hardware for circuits |
| CN101997066A (en) * | 2009-08-26 | 2011-03-30 | 李东明 | High-power light-emitting diode (LED) package structure |
| DE102019202902A1 (en) * | 2019-03-04 | 2020-09-10 | Abb Schweiz Ag | Direct cooling of a converter using an embossed plate |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3577181A (en) * | 1969-02-13 | 1971-05-04 | Rca Corp | Transistor package for microwave stripline circuits |
| GB1327352A (en) * | 1971-10-02 | 1973-08-22 | Kyoto Ceramic | Semiconductor device |
| US3857115A (en) * | 1972-05-30 | 1974-12-24 | Marconi Co Ltd | Semiconductor device mounting arrangements |
| US3946416A (en) * | 1973-04-24 | 1976-03-23 | The United States Of America As Represented By The Secretary Of The Army | Low impedance diode mounting structure and housing |
| US3946428A (en) * | 1973-09-19 | 1976-03-23 | Nippon Electric Company, Limited | Encapsulation package for a semiconductor element |
| US3913040A (en) * | 1974-05-03 | 1975-10-14 | Rca Corp | Microstrip carrier for high frequency semiconductor devices |
| US3908188A (en) * | 1974-08-14 | 1975-09-23 | Us Air Force | Heat sink for microstrip circuit |
| GB1487010A (en) * | 1975-04-01 | 1977-09-28 | Standard Telephones Cables Ltd | Laser stud mounts |
| US4150393A (en) * | 1975-09-29 | 1979-04-17 | Motorola, Inc. | High frequency semiconductor package |
| GB1544241A (en) * | 1976-05-11 | 1979-04-19 | Standard Telephones Cables Ltd | Injection laser mount |
-
1978
- 1978-09-28 US US05/946,592 patent/US4240098A/en not_active Expired - Lifetime
-
1979
- 1979-08-29 CA CA000334664A patent/CA1142252A/en not_active Expired
- 1979-09-25 IL IL58313A patent/IL58313A0/en unknown
- 1979-09-27 FR FR7924090A patent/FR2437696A1/en active Pending
- 1979-09-27 BE BE0/197345A patent/BE879033A/en unknown
- 1979-09-27 IT IT26067/79A patent/IT1123356B/en active
- 1979-09-27 SE SE7908022A patent/SE7908022L/en not_active Application Discontinuation
- 1979-09-28 JP JP12525279A patent/JPS5546599A/en active Pending
- 1979-09-28 NL NL7907254A patent/NL7907254A/en not_active Application Discontinuation
- 1979-09-28 GB GB7933821A patent/GB2032688B/en not_active Expired
- 1979-09-28 DE DE19792939497 patent/DE2939497A1/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| FR2437696A1 (en) | 1980-04-25 |
| NL7907254A (en) | 1980-04-01 |
| GB2032688A (en) | 1980-05-08 |
| DE2939497A1 (en) | 1980-04-10 |
| SE7908022L (en) | 1980-03-29 |
| JPS5546599A (en) | 1980-04-01 |
| US4240098A (en) | 1980-12-16 |
| IL58313A0 (en) | 1979-12-30 |
| IT7926067A0 (en) | 1979-09-27 |
| IT1123356B (en) | 1986-04-30 |
| BE879033A (en) | 1980-03-27 |
| GB2032688B (en) | 1983-07-27 |
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Legal Events
| Date | Code | Title | Description |
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| MKEX | Expiry | ||
| MKEX | Expiry |
Effective date: 20000301 |