CA1159702A - Method for making photoconductive surface layer on a printing drum for electrostatic photocopying - Google Patents
Method for making photoconductive surface layer on a printing drum for electrostatic photocopyingInfo
- Publication number
- CA1159702A CA1159702A CA000313556A CA313556A CA1159702A CA 1159702 A CA1159702 A CA 1159702A CA 000313556 A CA000313556 A CA 000313556A CA 313556 A CA313556 A CA 313556A CA 1159702 A CA1159702 A CA 1159702A
- Authority
- CA
- Canada
- Prior art keywords
- silicon
- printing drum
- hydrogen
- added
- doping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/02—Charge-receiving layers
- G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
- G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
- G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
- G03G5/08214—Silicon-based
- G03G5/08278—Depositing methods
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/02—Charge-receiving layers
- G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
- G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
- G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
- G03G5/08214—Silicon-based
- G03G5/08221—Silicon-based comprising one or two silicon based layers
Abstract
ABSTRACT
Disclosed is a method for producing a light-sensitive, elect-rically chargeable surface layer on a printing drum for electrostatic photocopying comprising introducing a gaseous compound containing silicon and hydrogen into an evacuated receptacle in which a low pressure glow discharge is maintained between the printing drum that is to be coated, situated in the interior of the receptacle, and a counter electrode dis-posed concentrically thereto, so that the gaseous compound containing silicon and hydrogen decomposes under the effect of the glow discharge plasma, depositing amorphous silicon on the printing drum. During the deposition the surface of the printing drum is held at a temperature of 200 to 300°C.
Disclosed is a method for producing a light-sensitive, elect-rically chargeable surface layer on a printing drum for electrostatic photocopying comprising introducing a gaseous compound containing silicon and hydrogen into an evacuated receptacle in which a low pressure glow discharge is maintained between the printing drum that is to be coated, situated in the interior of the receptacle, and a counter electrode dis-posed concentrically thereto, so that the gaseous compound containing silicon and hydrogen decomposes under the effect of the glow discharge plasma, depositing amorphous silicon on the printing drum. During the deposition the surface of the printing drum is held at a temperature of 200 to 300°C.
Description
l 15~7~2 This invention relates to a method for producing a light-sensitive, electrically chargeable surface layer on a printing drum for use in electrostatic photocopying. From the state of the art it is known to utilize printing drums for electrostatic photocopy methods. These printing drums have a surface layer consisting of light-sensitive, charge-able material such as selenium or chalcogenide glasses (arsenic-selenium alloys and compounds). It is also known to utilize organic photoconductors therefor, for example, PVK.
The printing drums mentioned are used to photograph an image of the pattern to be copied, which is projected onto the surface of the drum after a charge resulting from a corona discharge. This image is an electrostatic charge image, which by using a toner powder, subsequently is formed on a printing drum coated with printing ink. The actual printing process is carried out by means of letting paper and a surface of the printing drum run one atop the other.
The following requirements result for devices of this known copying method. The material of the surface layer of the printing drum must have a high light sensitivity, and indeed in the spectral range of technologically conventional light sources. The material must have a specific electric impedance in darkness of magnitude ~>- 1012 ohm-cm. The material must also exhibit properties which remain unaltered with a contin-uous load, i.e. which operate in a fatigue-proof manner and which is suf-ficiently resistant to abrasion for the copying.
It is an object of the present invention to provide such a material for the surface layer of a printing drum which fulfills all the above-mentioned requirements together.
According to the invention there is provided a method for producing a light-sensitive, electrically chargeable surface layer on a printing drum for electrostatic photocopying methods, characterized in that a gaseous compound containing silicon and hydrogen is introduced into an evacuated receptacle, that a low pressure glow discharge is maintained ~, 1 15~7~)2 between the printing drum that is to be coated, situated in the interior t~ e~ d of the receptacle, and a counter electrode disposed concentricallyAthere-~L~h so that the gaseous compound containing silicon and hydrogen decom-poses under the effect of the glow discharge plasma, deposi~ing amorphous silicon on the printing drum, and that during the deposition the surface of the printing drum is held at a temperature of 200 to 300 C.
The silicon, in particular, can be doped, whereby the conduct-ance behavior is influenced in the known manner.
Some time ago the properties of amorphous silicon had already been examined relative to photoconductance and absorption. The invention builds on this knowledge. An exceptionally high-ohmic material having a specific impedance of up to 1014 ohm-cm is available with the amorphous silicon. If during the production, by means of depositing a layer of amorphous silicon on a substrate member, the surface temperature of said member is held at approximately 270 C., an amorphous silicon layer can be obtained which --as was determined-- has an effectiveness of the photo current of 50%. A maximum effectiveness therefore lies in the range of a wavelength of approximately 600 nm. It is important that the electrons and holes in the silicon have an approximately equally greater mobility in accordance with the invention. This condition in the invention is utilized to obtain a chargeable layer which exhibits practically no electric fatigue as has been known for years with the materials utilized.
Amorphous layers consisting of sillcon have a great resistance to abrasion which is of great importance in conjunction with the invention.
A printing drum produced according to the invention has an increased life - ~ span.
The invention will now be further described in con~unction with the accompanying drawing showing apparatus for carrying out the method according to the invention.
The sy~bol 1 characterizes a receptacle which can be evacuated with the aid of a pump, i.e. air atmosphere contained therein can be re-s'` '~
i~
1 1597t)2 moved. The receptacle 1 can be sealed with a cover 3. A printing drum 2, to be provided with a layer according to the invention can be inserted into the receptacle 1 through the opening before it is sealed with cover 3. 5 characterizes a system of feed lines through which a gaseous material such as, for example, hydrosilicon SiH4 containing the elements silicon and hydrogen can be inserted into the interior of receptacle 1.
In the space around the surface 21 of drum 2 in ~he interior of receptacle 1, a low pressure glow or luminous discharge is maintained.
The printing drum 2 with its surface 21 is thereby used as the one electrode which is connected to a high frequency generator 60 via a high frequency feed line 6. Electrode 8 which, for example, is an envelope or sheathing consisting of electrically conductive material is arranged about the out-side of receptacle 1 and is used as the respective counter electrode. The glow discharge then burns in the interior of receptacle 1 between the sur-face 21 and the interior wall 11 of the receptacle. The pressure of the reaction gas, primarily of the hydrosilicon, is held at between 0.01 mbar and 2 mbar for the glow discharge. The electrical output of the glow discharge is apportioned such that no interfacing sputtering or scattering on the electrodes and/or the receptacle walls occurs. However, a decom-position of the added gas containing the silicon and hydrogen occurs, namely, a decomposition to an amorphous silicon having hydrogen included in the deposition. The decomposition i9 accordingly performed to such an extent that not all of the hydrosilicon molecules, for example, are com-pletely decomposed. Rather, the decomposition is performed such that sili-con atoms are still present to which individual hydrogen atoms are bound so that approximately 1 to 20 and preferably 10 atom percent of hydrogen content is present.
( `
The surface of the printing drum 20 can be brought to a tem-perature of approximately 270 C., in particular, with the aid of a heating system schematically indicated and referenced 7. With the setting of the temperature, the amount of the hydrogen in the amorphously deposited silicon can be controlled.
; ~! 3 1 15g7~2 Details of a deposieion of amorphous silicon in a low pressure glow discharge can be concluded from "J. Non-Cryst. Sol.", Vol. 3 (1970), Page 255. A gas pressure of 0.05 to 5 mbar in the interior of the re-ceptacle 1 is advantageous. A time length of approximately 1 to 5 hours is selected for the deposition of a sufficiently thick layer of the i~ven-~ively provided silicon. A layer thickness in the range of lO~m to lOO~(m is advantageous for the inventively provided amorphous silicon.
A particular doping in an amorphous silicon layer produced according to the invention has a particularly advantageous influence. A
doping is first undertaken during the deposit. This doping leads to a conductivity type of either N or P conductance. The doping material, pre-ferably diborane for P conductance or preferably phosphine for N conduct-ance is added and mixed as a gas to the supplied silicon M containing gas 5 in a corresponding amount of 10 4 to 10 1% by volume, for example, so that the layer portions 41, 42 of layer 4 are formed.
During the execution of the inventive method, i.e. during the forming of the hydrogen containing amorphous silicon layer deposited on the printing drum, one goes from a doping first carried out for one con-ductivity type to a doping for the other conductivity type by a change in the doping material. This change of the doping then leads to a P-N tran-sition which is formed over practically the entire surface in the amorphous layer and parallel to the surface of the printing drum. Therefore, an ~increase of the electric impedance of the layer is obtained for the operat-ing situation in which the polarity of the charging-up resulting from the corona-spraying leads to a blocking potential in the P-N transition layer (the P-N transition is operated in a blocking direction).
In a silicon layer produced according to the invention, doped as described above, the layer thickness on the printing drum can be made small .
The layer on the printing drum has the advantage that it can ,, 1 :, ~
1 15~ 7~)2 be exposed to relatively high temperatures in comparison to the state of the art without suffering any structural alterations.
A certain upper limit for the applied temperature is the value of the temperature at which the deposit of the silicon resulted on the surface 21. Advantageously, the crystallization temperature of the silicon lies at temperatures of approximately 1000C.
Although various minor modifications might be suggested by those versed in the art, it should be understood that I wish to embody within the scope of the patent warranted hereon all such modifications as 10reasonably and properly come within the scope of my contribution to the art.
~:
;-'; ' : -5-
The printing drums mentioned are used to photograph an image of the pattern to be copied, which is projected onto the surface of the drum after a charge resulting from a corona discharge. This image is an electrostatic charge image, which by using a toner powder, subsequently is formed on a printing drum coated with printing ink. The actual printing process is carried out by means of letting paper and a surface of the printing drum run one atop the other.
The following requirements result for devices of this known copying method. The material of the surface layer of the printing drum must have a high light sensitivity, and indeed in the spectral range of technologically conventional light sources. The material must have a specific electric impedance in darkness of magnitude ~>- 1012 ohm-cm. The material must also exhibit properties which remain unaltered with a contin-uous load, i.e. which operate in a fatigue-proof manner and which is suf-ficiently resistant to abrasion for the copying.
It is an object of the present invention to provide such a material for the surface layer of a printing drum which fulfills all the above-mentioned requirements together.
According to the invention there is provided a method for producing a light-sensitive, electrically chargeable surface layer on a printing drum for electrostatic photocopying methods, characterized in that a gaseous compound containing silicon and hydrogen is introduced into an evacuated receptacle, that a low pressure glow discharge is maintained ~, 1 15~7~)2 between the printing drum that is to be coated, situated in the interior t~ e~ d of the receptacle, and a counter electrode disposed concentricallyAthere-~L~h so that the gaseous compound containing silicon and hydrogen decom-poses under the effect of the glow discharge plasma, deposi~ing amorphous silicon on the printing drum, and that during the deposition the surface of the printing drum is held at a temperature of 200 to 300 C.
The silicon, in particular, can be doped, whereby the conduct-ance behavior is influenced in the known manner.
Some time ago the properties of amorphous silicon had already been examined relative to photoconductance and absorption. The invention builds on this knowledge. An exceptionally high-ohmic material having a specific impedance of up to 1014 ohm-cm is available with the amorphous silicon. If during the production, by means of depositing a layer of amorphous silicon on a substrate member, the surface temperature of said member is held at approximately 270 C., an amorphous silicon layer can be obtained which --as was determined-- has an effectiveness of the photo current of 50%. A maximum effectiveness therefore lies in the range of a wavelength of approximately 600 nm. It is important that the electrons and holes in the silicon have an approximately equally greater mobility in accordance with the invention. This condition in the invention is utilized to obtain a chargeable layer which exhibits practically no electric fatigue as has been known for years with the materials utilized.
Amorphous layers consisting of sillcon have a great resistance to abrasion which is of great importance in conjunction with the invention.
A printing drum produced according to the invention has an increased life - ~ span.
The invention will now be further described in con~unction with the accompanying drawing showing apparatus for carrying out the method according to the invention.
The sy~bol 1 characterizes a receptacle which can be evacuated with the aid of a pump, i.e. air atmosphere contained therein can be re-s'` '~
i~
1 1597t)2 moved. The receptacle 1 can be sealed with a cover 3. A printing drum 2, to be provided with a layer according to the invention can be inserted into the receptacle 1 through the opening before it is sealed with cover 3. 5 characterizes a system of feed lines through which a gaseous material such as, for example, hydrosilicon SiH4 containing the elements silicon and hydrogen can be inserted into the interior of receptacle 1.
In the space around the surface 21 of drum 2 in ~he interior of receptacle 1, a low pressure glow or luminous discharge is maintained.
The printing drum 2 with its surface 21 is thereby used as the one electrode which is connected to a high frequency generator 60 via a high frequency feed line 6. Electrode 8 which, for example, is an envelope or sheathing consisting of electrically conductive material is arranged about the out-side of receptacle 1 and is used as the respective counter electrode. The glow discharge then burns in the interior of receptacle 1 between the sur-face 21 and the interior wall 11 of the receptacle. The pressure of the reaction gas, primarily of the hydrosilicon, is held at between 0.01 mbar and 2 mbar for the glow discharge. The electrical output of the glow discharge is apportioned such that no interfacing sputtering or scattering on the electrodes and/or the receptacle walls occurs. However, a decom-position of the added gas containing the silicon and hydrogen occurs, namely, a decomposition to an amorphous silicon having hydrogen included in the deposition. The decomposition i9 accordingly performed to such an extent that not all of the hydrosilicon molecules, for example, are com-pletely decomposed. Rather, the decomposition is performed such that sili-con atoms are still present to which individual hydrogen atoms are bound so that approximately 1 to 20 and preferably 10 atom percent of hydrogen content is present.
( `
The surface of the printing drum 20 can be brought to a tem-perature of approximately 270 C., in particular, with the aid of a heating system schematically indicated and referenced 7. With the setting of the temperature, the amount of the hydrogen in the amorphously deposited silicon can be controlled.
; ~! 3 1 15g7~2 Details of a deposieion of amorphous silicon in a low pressure glow discharge can be concluded from "J. Non-Cryst. Sol.", Vol. 3 (1970), Page 255. A gas pressure of 0.05 to 5 mbar in the interior of the re-ceptacle 1 is advantageous. A time length of approximately 1 to 5 hours is selected for the deposition of a sufficiently thick layer of the i~ven-~ively provided silicon. A layer thickness in the range of lO~m to lOO~(m is advantageous for the inventively provided amorphous silicon.
A particular doping in an amorphous silicon layer produced according to the invention has a particularly advantageous influence. A
doping is first undertaken during the deposit. This doping leads to a conductivity type of either N or P conductance. The doping material, pre-ferably diborane for P conductance or preferably phosphine for N conduct-ance is added and mixed as a gas to the supplied silicon M containing gas 5 in a corresponding amount of 10 4 to 10 1% by volume, for example, so that the layer portions 41, 42 of layer 4 are formed.
During the execution of the inventive method, i.e. during the forming of the hydrogen containing amorphous silicon layer deposited on the printing drum, one goes from a doping first carried out for one con-ductivity type to a doping for the other conductivity type by a change in the doping material. This change of the doping then leads to a P-N tran-sition which is formed over practically the entire surface in the amorphous layer and parallel to the surface of the printing drum. Therefore, an ~increase of the electric impedance of the layer is obtained for the operat-ing situation in which the polarity of the charging-up resulting from the corona-spraying leads to a blocking potential in the P-N transition layer (the P-N transition is operated in a blocking direction).
In a silicon layer produced according to the invention, doped as described above, the layer thickness on the printing drum can be made small .
The layer on the printing drum has the advantage that it can ,, 1 :, ~
1 15~ 7~)2 be exposed to relatively high temperatures in comparison to the state of the art without suffering any structural alterations.
A certain upper limit for the applied temperature is the value of the temperature at which the deposit of the silicon resulted on the surface 21. Advantageously, the crystallization temperature of the silicon lies at temperatures of approximately 1000C.
Although various minor modifications might be suggested by those versed in the art, it should be understood that I wish to embody within the scope of the patent warranted hereon all such modifications as 10reasonably and properly come within the scope of my contribution to the art.
~:
;-'; ' : -5-
Claims (8)
PROPERTY OR PRIVILEGE IS CLAIMED ARE DEFINED AS FOLLOWS:
1. A method for producing a light-sensitive, electrically charge-able surface layer on a printing drum for electrostatic photocopying methods, characterized in that a gaseous compound containing silicon and hydrogen is introduced into an evacuated receptacle, that a low pressure glow discharge is maintained between the printing drum that is to be coated situated in the interior of the receptacle, and a counter elect-rode disposed concentrically therearound so that the gaseous compound containing silicon and hydrogen decomposes under the effect of the glow discharge plasma, depositing amorphous silicon on the printing drum, and that during the deposition the surface of the printing drum is held at a temperature of 200 to 300°C.
2. A method according to claim 1, characterized in that hydro-silicon (SiH4) is used as the compound containing silicon and hydrogen.
3. A method according to claim 2, characterized in that the temperature of the surface of the drum is held at about 270°C.
4. A method according to claim 1, 2 or 3, characterized in that during the deposition the gaseous atmosphere is adjusted to a pressure of 0.05 to 5 mbar.
5. A method according to claim 1, 2 or 3, characterized in that during deposition of the silicon on the printing drum a material doping the silicon for one conductivity type is added in addition to the gaseous compound containing silicon and hydrogen and during deposition the first source of doping material is switched off and a material doping the silicon to a conductivity type opposite the first conductivity type is added so that a sheet-like pn-transition extending parallel to the surface of the printing drum forms within the layer.
6. A method according to claim 1, 2 or 3, characterized in that during deposition of the silicon on the printing drum a material doping the silicon for one conductivity type is added in addition to the gaseous compound containing silicon and hydrogen and during deposition the first source of doping material is switched off and a material doping the silicon to a conductivity type opposite the first conductivity type is added so that a sheet-like pn-transition extending parallel to the surface of the printing drum forms within the layer, and in that diborane is added as doping material for the formation of the p-conductive layer portion and, for formation of the n-conductive layer portion, phosphine is added to the gaseous compound containing silicon and hydrogen.
7. A method according to claim 1, 2 or 3, characterized in that an envelope of electrically conductive material surrounding the receptacle which contains the glow discharge plasma is used as the counter electrode.
8. A method according to claim 1, 2 or 3, characterized in that during deposition of the silicon on the printing drum a material doping the silicon for one conductivity type is added in addition to the gaseous compound containing silicon and hydrogen and during deposition the first source of doping material is switched off and a material doping the silicon to a conductivity type opposite the first conductivity type is added so that a sheet-like pn-transition extending parallel to the surface of the printing drum forms within the layer, in that diborane is added as doping material for the formation of the p-conductive layer portion and for formation of the n-conductive layer portion phosphine is added to the gase-ous compound containing silicon and hydrogen, and in that an envelope of electrically conductive material surrounding the receptacle which contains the glow discharge plasma is used as the counter electrode.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2746967A DE2746967C2 (en) | 1977-10-19 | 1977-10-19 | Electrophotographic recording drum |
| DEP2746967.6 | 1977-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1159702A true CA1159702A (en) | 1984-01-03 |
Family
ID=6021787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000313556A Expired CA1159702A (en) | 1977-10-19 | 1978-10-17 | Method for making photoconductive surface layer on a printing drum for electrostatic photocopying |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4225222A (en) |
| EP (1) | EP0001549B1 (en) |
| JP (1) | JPS5478135A (en) |
| AT (1) | AT359828B (en) |
| CA (1) | CA1159702A (en) |
| DE (2) | DE2746967C2 (en) |
| IT (1) | IT1100321B (en) |
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|---|---|---|---|---|
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| DE2954551C2 (en) * | 1978-03-03 | 1989-02-09 | Canon K.K., Tokio/Tokyo, Jp | |
| JPS54132016U (en) * | 1978-03-06 | 1979-09-13 | ||
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| US4471042A (en) * | 1978-05-04 | 1984-09-11 | Canon Kabushiki Kaisha | Image-forming member for electrophotography comprising hydrogenated amorphous matrix of silicon and/or germanium |
| JPS55127561A (en) * | 1979-03-26 | 1980-10-02 | Canon Inc | Image forming member for electrophotography |
| JPS55166647A (en) * | 1979-06-15 | 1980-12-25 | Fuji Photo Film Co Ltd | Photoconductive composition and electrophotographic receptor using this |
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| JPS5624354A (en) * | 1979-08-07 | 1981-03-07 | Fuji Photo Film Co Ltd | Electrophotographic receptor |
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| JPS5662254A (en) * | 1979-10-24 | 1981-05-28 | Canon Inc | Electrophotographic imaging material |
| DE3040972A1 (en) * | 1979-10-30 | 1981-05-14 | Fuji Photo Film Co. Ltd., Minami-Ashigara, Kanagawa | ELECTROPHOTOGRAPHIC LIGHT SENSITIVE MATERIAL AND METHOD FOR THE PRODUCTION THEREOF |
| US5382487A (en) * | 1979-12-13 | 1995-01-17 | Canon Kabushiki Kaisha | Electrophotographic image forming member |
| JPS5713777A (en) | 1980-06-30 | 1982-01-23 | Shunpei Yamazaki | Semiconductor device and manufacture thereof |
| JPS56146142A (en) * | 1980-04-16 | 1981-11-13 | Hitachi Ltd | Electrophotographic sensitive film |
| JPS56150752A (en) * | 1980-04-25 | 1981-11-21 | Hitachi Ltd | Electrophotographic sensitive film |
| DE3117037A1 (en) * | 1980-05-08 | 1982-03-11 | Takao Sakai Osaka Kawamura | ELECTROPHOTOGRAPHIC, LIGHT SENSITIVE ELEMENT |
| JPS56156834A (en) * | 1980-05-08 | 1981-12-03 | Minolta Camera Co Ltd | Electrophotographic receptor |
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| JPS574172A (en) * | 1980-06-09 | 1982-01-09 | Canon Inc | Light conductive member |
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| US5859443A (en) * | 1980-06-30 | 1999-01-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
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| FR2490246A1 (en) * | 1980-09-17 | 1982-03-19 | Cit Alcatel | CHEMICAL DEPOSITION DEVICE ACTIVATED UNDER PLASMA |
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| US4490453A (en) * | 1981-01-16 | 1984-12-25 | Canon Kabushiki Kaisha | Photoconductive member of a-silicon with nitrogen |
| US4464451A (en) * | 1981-02-06 | 1984-08-07 | Canon Kabushiki Kaisha | Electrophotographic image-forming member having aluminum oxide layer on a substrate |
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| JPH0629977B2 (en) * | 1981-06-08 | 1994-04-20 | 株式会社半導体エネルギー研究所 | Electrophotographic photoconductor |
| US4438188A (en) | 1981-06-15 | 1984-03-20 | Fuji Electric Company, Ltd. | Method for producing photosensitive film for electrophotography |
| DE3124810A1 (en) * | 1981-06-24 | 1983-01-13 | Siemens AG, 1000 Berlin und 8000 München | Process for producing amorphous selenium layers with and without doping additions, and a surface layer of a photoconducting drum produced by the process |
| US4343881A (en) * | 1981-07-06 | 1982-08-10 | Savin Corporation | Multilayer photoconductive assembly with intermediate heterojunction |
| JPS5862658A (en) * | 1981-10-08 | 1983-04-14 | Fuji Electric Co Ltd | Electrophotographic process |
| JPS58102970A (en) * | 1981-12-16 | 1983-06-18 | Konishiroku Photo Ind Co Ltd | Laser recorder |
| US4532196A (en) * | 1982-01-25 | 1985-07-30 | Stanley Electric Co., Ltd. | Amorphous silicon photoreceptor with nitrogen and boron |
| US4501766A (en) * | 1982-02-03 | 1985-02-26 | Tokyo Shibaura Denki Kabushiki Kaisha | Film depositing apparatus and a film depositing method |
| US4452874A (en) * | 1982-02-08 | 1984-06-05 | Canon Kabushiki Kaisha | Photoconductive member with multiple amorphous Si layers |
| US4452875A (en) * | 1982-02-15 | 1984-06-05 | Canon Kabushiki Kaisha | Amorphous photoconductive member with α-Si interlayers |
| DE3308165A1 (en) * | 1982-03-08 | 1983-09-22 | Canon K.K., Tokyo | Photoconductive recording element |
| DE3309240A1 (en) * | 1982-03-15 | 1983-09-22 | Canon K.K., Tokyo | Photoconductive recording element |
| US4795688A (en) * | 1982-03-16 | 1989-01-03 | Canon Kabushiki Kaisha | Layered photoconductive member comprising amorphous silicon |
| US4617246A (en) * | 1982-11-04 | 1986-10-14 | Canon Kabushiki Kaisha | Photoconductive member of a Ge-Si layer and Si layer |
| US4466380A (en) * | 1983-01-10 | 1984-08-21 | Xerox Corporation | Plasma deposition apparatus for photoconductive drums |
| JPS59207620A (en) * | 1983-05-10 | 1984-11-24 | Zenko Hirose | Amorphous silicon film forming apparatus |
| DE3448369C2 (en) * | 1983-05-18 | 1992-03-05 | Kyocera Corp., Kyoto, Jp | |
| US4576698A (en) * | 1983-06-30 | 1986-03-18 | International Business Machines Corporation | Plasma etch cleaning in low pressure chemical vapor deposition systems |
| JPH0627948B2 (en) * | 1983-07-15 | 1994-04-13 | キヤノン株式会社 | Photoconductive member |
| US4572882A (en) * | 1983-09-09 | 1986-02-25 | Canon Kabushiki Kaisha | Photoconductive member containing amorphous silicon and germanium |
| DE3575211D1 (en) * | 1984-03-28 | 1990-02-08 | Mita Industrial Co Ltd | COPIER WITH REDUCED IMAGE STORAGE TIME. |
| US4602352A (en) * | 1984-04-17 | 1986-07-22 | University Of Pittsburgh | Apparatus and method for detection of infrared radiation |
| US4603401A (en) * | 1984-04-17 | 1986-07-29 | University Of Pittsburgh | Apparatus and method for infrared imaging |
| US4619877A (en) * | 1984-08-20 | 1986-10-28 | Eastman Kodak Company | Low field electrophotographic process |
| US4540647A (en) * | 1984-08-20 | 1985-09-10 | Eastman Kodak Company | Method for the manufacture of photoconductive insulating elements with a broad dynamic exposure range |
| JPH071395B2 (en) * | 1984-09-27 | 1995-01-11 | 株式会社東芝 | Electrophotographic photoreceptor |
| NL8500039A (en) * | 1985-01-08 | 1986-08-01 | Oce Nederland Bv | ELECTROPHOTOGRAPHIC METHOD FOR FORMING A VISIBLE IMAGE. |
| US4818651A (en) | 1986-02-07 | 1989-04-04 | Canon Kabushiki Kaisha | Light receiving member with first layer of A-SiGe(O,N)(H,X) and second layer of A-SiC wherein the first layer has unevenly distributed germanium atoms and both layers contain a conductivity controller |
| US4925276A (en) * | 1987-05-01 | 1990-05-15 | Electrohome Limited | Liquid crystal light valve utilizing hydrogenated amorphous silicon photodiode |
| US5082760A (en) * | 1987-11-10 | 1992-01-21 | Fuji Xerox Co., Ltd. | Method for preparing an electrophotographic photoreceptor having a charge transporting layer containing aluminum oxide |
| JPH0810332B2 (en) * | 1988-02-10 | 1996-01-31 | 富士ゼロックス株式会社 | Method for manufacturing electrophotographic photoreceptor |
| US5284730A (en) * | 1990-10-24 | 1994-02-08 | Canon Kabushiki Kaisha | Electrophotographic light-receiving member |
| JP2876545B2 (en) * | 1990-10-24 | 1999-03-31 | キヤノン株式会社 | Light receiving member |
| ATE157178T1 (en) * | 1991-05-30 | 1997-09-15 | Canon Kk | LIGHT SENSITIVE ELEMENT |
| JP3229002B2 (en) * | 1992-04-24 | 2001-11-12 | キヤノン株式会社 | Light receiving member for electrophotography |
| EP0605972B1 (en) * | 1992-12-14 | 1999-10-27 | Canon Kabushiki Kaisha | Light receiving member having a multi-layered light receiving layer with an enhanced concentration of hydrogen or/and halogen atoms in the vicinity of the interface of adjacent layers |
| US6365308B1 (en) | 1992-12-21 | 2002-04-02 | Canon Kabushiki Kaisha | Light receiving member for electrophotography |
| JP3102722B2 (en) * | 1993-03-23 | 2000-10-23 | キヤノン株式会社 | Method of manufacturing amorphous silicon electrophotographic photoreceptor |
| EP0957405B1 (en) * | 1998-05-14 | 2009-10-21 | Canon Kabushiki Kaisha | Image forming apparatus |
| DE69929371T2 (en) * | 1998-05-14 | 2006-08-17 | Canon K.K. | Electrophotographic image forming apparatus |
| KR100455430B1 (en) * | 2002-03-29 | 2004-11-06 | 주식회사 엘지이아이 | Cooling apparatus for surface treatment device of heat exchanger and manufacturing method thereof |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3172828A (en) * | 1961-05-29 | 1965-03-09 | Radiation-responsive element | |
| SE362508B (en) * | 1968-12-30 | 1973-12-10 | Commw Of Australia | |
| GB1321769A (en) * | 1970-12-04 | 1973-06-27 | Rca Corp | Electrophotographic recording element |
| AU503228B2 (en) * | 1975-07-28 | 1979-08-30 | Rca Corp. | Semiconductor device |
| US4064521A (en) * | 1975-07-28 | 1977-12-20 | Rca Corporation | Semiconductor device having a body of amorphous silicon |
-
1977
- 1977-10-19 DE DE2746967A patent/DE2746967C2/en not_active Expired
-
1978
- 1978-08-31 DE DE7878100799T patent/DE2862016D1/en not_active Expired
- 1978-08-31 EP EP78100799A patent/EP0001549B1/en not_active Expired
- 1978-10-16 AT AT741178A patent/AT359828B/en not_active IP Right Cessation
- 1978-10-17 US US05/952,066 patent/US4225222A/en not_active Expired - Lifetime
- 1978-10-17 CA CA000313556A patent/CA1159702A/en not_active Expired
- 1978-10-17 IT IT28816/78A patent/IT1100321B/en active
- 1978-10-19 JP JP12904678A patent/JPS5478135A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| AT359828B (en) | 1980-12-10 |
| IT7828816A0 (en) | 1978-10-17 |
| DE2746967A1 (en) | 1979-04-26 |
| JPS5478135A (en) | 1979-06-22 |
| DE2746967C2 (en) | 1981-09-24 |
| ATA741178A (en) | 1980-04-15 |
| US4225222A (en) | 1980-09-30 |
| IT1100321B (en) | 1985-09-28 |
| EP0001549A1 (en) | 1979-05-02 |
| EP0001549B1 (en) | 1982-09-01 |
| DE2862016D1 (en) | 1982-10-28 |
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