CA1209091A

CA1209091A - Photo and heat assisted chemical vapour deposition

Info

Publication number: CA1209091A
Application number: CA000428153A
Authority: CA
Inventors: Lee Walter; David D. Allred; Stanford R. Ovshinsky; Jaime M. Reyes
Original assignee: Energy Conversion Devices Inc
Current assignee: Energy Conversion Devices Inc
Priority date: 1982-05-13
Filing date: 1983-05-13
Publication date: 1986-08-05
Also published as: JPS5964770A; EP0095275B1; MX163318A; AU555506B2; IL68590A; AU1430683A; US4435445A; EP0095275A2; ATE26469T1; EP0095275A3; IN159155B; BR8302417A; PH18523A; DE3370832D1; IL68590A0; ZA833368B

Abstract

ABSTRACT OF THE DISCLOSURE

A process and apparatus for depositing a film from a gas comprising silane and germane involves intro-ducing the gas to a deposition environment containing a substrate, heating the substrate, and irradiating the gas with radiation having a preselected energy spectrum, such that a silicon and germanium alloy film is deposited onto the substrate. In a preferred embodiment, the energy spectrum of the radiation is below or approximately equal to that required to photochemically decompose the gas.
In another embodiment, the gas is irradiated through a transparent member exposed at a first surface thereof to the deposition environment, and a flow of substantially inert gaseous material is passed along the first surface to minimize deposition thereon.

Description

107l This invention relates generally to the art of depositing films and, ~nore particularly, to an improved process and apparatus for photo-assisted chemical vapor deposition.
Thin silicon and germanium films have been formed by chemical vapor deposition (CVD) tech-niques which involve bringing SiH4 or GeH4, re-spectively, in contact with a hot substrate. Some of the gas molecules pyrolize, releasing Si and Ge atoms which remain on the surface and H2 molecules which are carried away by the gas stream. This pyrolysis reaction, like other reactions used in CVD, is an "activated" process. That is, it pro-ceeds more slowly as temperatures are decreased.
Substantial deposition rates can therefore be achieved with CVD only at temperatures on the order of 400 degrees Celsius or higher.
In many cases, it is desirable to minimize deposition temperatures. For example; some depo-sited films, particularly amorphous ones, are ad-versely affected by the temperatures required for conventional CVD. A substrate or device onto which a film is deposited can also be harmed by these temperatures.

-2-Plasmas or ~low discharges have been used to facilitate deposition at lower temperatures, with some success. ~oweverl the existence of the plasma places an entirely different set of con-straints on a deposition environment, includingsubstantial temperatures~ In some cases, the ion bombardment which occurs in plasma deposition can be deleterious to film properties.
In a somewhat different context, ultraviolet (UV) radiation has been used to decompose gases by photolysis, causing deposition of ~lements from the gases. Examples of this work are found in A.
Perkins et al., "The 147-nm Photolysis of Monosilane", Journal of the American Chemiral Society, 101:5, 1979, and W.C. Rrene "Photolysis of Diborane at 1849A~, Journal of Chemical Physics, Vol. 37, No. 2, 1962, wherein UV radia-tion having a wavelength less than 2,000 angstroms is used to decompose SiH4 and B2~6, respectively~
However, UV radiation of less than 2,000 angstroms can be destru~tive to the constituent elements of many films, and to the deposited films themselves.
Therefore, in many applications it is desir-able to deposit films at low temperatures, free of plasma~sustaining conditions and without sub~ect---3--ing the deposition gases or the films to energetic short wavelength radiation.
We have found that the above disadvantages may be overcome by depositing a material onto a substrate from a gas containing at least one con-stituent element of the material while irradiating the gas with radiation having an energy spectrum above a threshold energy level and heating the substrate. Preferably, the energy spectrum of the radiation is below that required to photochemical-ly decompose the gas. The present invention thus combines the decomposing effects of heat and radi-ation to deposit semiconductor or metallic films at relatively low temperatures. The adverse ef-fects of elevated temperatures are thereforeavoided.
The present invention comprises a process and apparatus for depositing a material onto a sub-strate from a gas containing at least one constit-uent element of the material, comprising: intro-ducing a gas to a deposition environment contain-ing the substrate; heating the substrate; and ir-radiating the gas with radiation having an en~rgy spectrum above a threshold energy level, such that a film containing the material is deposited onto ., ~2~9~;

the substrate. In a preferred embodiment, the energy spectrum of the radiation is below that re-quired to photochemically decompose the gas, i.e., below the "photodissociation limit" of the gas, and the radiation is ultraviolet light. In another embodiment, the radiation is passed through a transparent member exposed at a first surface thereof to the deposition environment, and a flow of substantially inert gaseous material is established along the first surface to minimize deposition thereon~ The deposition gas may com~
prise any of a wide variety of metal or semicon-ductor containing gases, including a number of metal carbonyls, silane and germane. When silane, germane, or a combination thereof is used, the deposited film will typically be amorphous sili-con, germanium, or amorphous Ge-Si, respectively.
The present invention thus combines the de r composing effects of heat and ultraviolet radia-tion to deposit semiconductor or metallic films atrelatively low temperatures. The adverse effects of elevated temperatures are therefore avoided.
This is accomplished without constraining the deposition environment to that able to support a plasma or, in the preferred embodiment in which ~2~

the radiation lacks the energy to photochemically decompose the gas, without suhjecting the deposit-ed film or the substrate to the more energetic short wavelength radiation. Photoionization and bombardment of the film with ions are also avoid-ed.
Because irradiation is accomplished through a transparent portion of a deposition chamber, the process of the present invention can be severely limited by deposition of the film material onto the transparent portion. If material is allowed to deposit on the window, it eventually becomes opaque and blocks out the radiation entirely.
However, the buildup of such material is limited in the present invention by establishing a flow of substantially inert gaseous material along the inner surface of the transparent portion. Chemi-cal vapor in the area of the transparent portion is carried away by the inert gaseous material be-fore it can deposit thereon. Substantially thick-er films are obtainable in this way.
It is contemplated that radiation having an energy spectrum below the photodissociation limit of the deposition gas will be used in the practice of the present invention most often when relative---5--ly thin films are desired. This is because depo-sition rates at these energy levels are somewhat less than those obtainable in some other forms of deposition. However~ in many cases it is desir-able to provide relatively thin films at low tem-peratures, and without subjecting the sample to high energy radiation. In such cases, the present invention can provide high quality films of sever-al hundred angstroms or less.
The above and other objects of the present invention may be more fully understood from the following detailed description, taken together with the accompanying drawings, wherein similar reference characters refer to similar elements throughout and in which:
FIG. 1 is a fragmentary vertical sectional view of a substrate upon which a film has been deposited in accordance with the present inven-tion;
~0 FI~. 2 is a perspective view of a deposition apparatus constructed in accordance with a pre-ferred embodiment of the present invention and FIG. 3 is a vertical sectional view taken along the line 3-3 of Fig. 2.

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Referring now to the dra~ings, there is il-lustrated in Figs. 2 and 3 a deposition apparatus embodying the present invention, generally desig-nated 10. The apparatus 10 comprises a transpar-ent tubular chamber 12 containing a substrate 14.
The substrate is heated by a radiant heater 16 as the chamber is irradiated by a light source 17.
Molecules of deposition gas passing from an inlet 18 to an outlet 20 at opposite ends of the chamber 12 receive photon energy from the light source 17 in the area of the substrate. Many of the gas molecules also collide with the substrate 14, re-ceiving thermal energy therefrom. It is the com-bination of energy from these sources which causes the molecules to decompose in the area of the sub-strate, releasing semiconductor or metal atoms for formation of a film 22. In a preferred embodi-ment, the photon energy of the light source is below the photodissociation limit of the deposi-tion gases (in the absence of heat) and the tem-perature of the substrate is below the minimum re-quired for pyrolysis of the gases. Each energy source, working alone, is then incapable of caus-ing the gas to di~sociate and deposit onto the ~5 substrate. However, the combined effects of the light source 17 and the radiant heater 16 permit the deposition process to proceed. During t'ne process, the substrate 14 and the film 22 are spared from the damaging effects of high energy radiation and high deposition temperatures.
The film 22 deposited in accordance with the present invention is depicted generally in Fig. 1, in conjunction with the substrate 14. Although the film 22 may in some cases be crystalline, it will most commonly be an amorphous ~also designat-ed "a") semiconductive or metallic film. For ex-ample, the ~ilm 22 may be a-Si, a-Ge, a-GeSi, or a suitable amorphous metallic film. Of these, it is believed that a-GeSi and many amorphous metallic films have not previously been produced by CVD
processes because the temperature of prior art processes has been too nigh.
While in some cases it is desirable to pro-duce a film 22 having a thickness in the tens of angstroms, it is anticipated that films produced in accordance with the present invention will more commonly have thicknesses in the hundreds of ang-stroms. The substrate 14 may be made of glass or other suitable material, or may be part of an electronic device in an unfinished state. In the ~2~

latter case it may be desirable to mask certain portions of the device to produce a discontinuous film thereon.
Referring now to Figs. 2 and 3 in greater de-tail, the tubular chamber 12 comprises a centralquartz portion 24 having relatively short quartz portions 26 of somewhat greater diameter at oppo-site ends thereof. The outer ends 28 of the quartz portions 26 are closed by a pair of end fittings 30 and 32 to complete the chamber. Each of the end fittings includes a sleeve portion 34 extending from a closed end 36 to an open end por-tion 38. The open end portion is provided with a region of somewhat increased diameter for recep-tion of one of the quartz portions 26, and isthreaded to receive a collar 40 having an inwardly extending annular flange 42 at one end thereof.
An o-ring 44 is confined in a space between the flange 42 and the end portion 38 for compression thereof against the quartz portion 26. An air-tight seal is provided in this way between the end fittings 30 and 32 and the tubular chamber 12.
The end fittings 30 and 32 are pref~rably made of stainless steel or other suitable noncor~
rosive metal, ~ith the closed ends 36 being welded - 1 o -or otherwise permanently joined to the sleeve por-tions 34. The closed end 36 of the end fitting 32 is provided with an inert gas inlet 46 and a ther-mocouple inlet 48 in addition to the deposition gas inlet 18 described above. The inlets 18 and 48 may terminate at the inner wall of the closed end 36, while the inlet 46 preferably extends sub-stantially longitudinally into the chamber 12 to a location short of the substrate 14. The gas inlet 46 includes a first region 50 of circular cross section, a flattened region 52 and a nozzle 54.
The nozzle 54 defines at least one orifice 56 located adjacent to an inner surface 58 of the chamber. Inert gas introduced through the inlet 46 is emitted along the surface 58 by the nozzle 54, at a locatlon between the substrate 14 and the light source 17. This gas flow establishes a cur-tain 60 of inert gas, as indicated in Figs. 2 and

3, which acts as a barrier between the deposition gas and the portion of the chamber surface 58 through which light is passed. The inert gas car-ries away deposition gas molecules to minimize deposition on that portion of the chamber surface.
The gas inlets 18 and 46 are preferably con-5 nected to a conventional gas rack (not shown) for establishing regulated flows of deposition gas andinert gas~ respectively, therein. A thermocouple 62 extends through the inlet 48 for monitoring the gas temperature within the chamber. The outlet 20 is provided at the closed end 36 of the end fitt-ing 30 for initial evacuation of the chamber and withdrawal of inert and deposition gas during operation.
The central portion 24 of the tubular chamber 1Q 12 preferably comprises a length of synthetic quartz tubing having an outside diameter of ap-proximately one and one-half inches. A suitable synthetic quartz tubing is manufactured by American Quartz under the name Suprasil. The rel-atively short portions 26 may then comprise less expensive ordinary quartz tubing fused to opposite ends of the lengths 24. The portions 26 are pref-erably 2" in outside diameter for connection to the end fittings 30 and 32. Synthetic quartz is used for the central length 24 because it has a very low alumina content and is much more trans-parent than ordinary quartz to light having a wavelength of less than 3000 angstromsO
The light source 17 preerably comprises a Hg vapor lamp 64 positioned within a reflective hous-ing 66 for concentra~ion of UV light onto the chamber 12. Although the light source is illu-strated in Figs. 2 and 3 as being spaced somewhat from the chamber, in practice ~he light source is placed as close as possible to the chamber to max-imize transmission of its output to the deposition gas. From a practical standpoint, the minimum distance between the lamp 64 and the chamber is established by design of the housing 66 to be be-tween two and one-half and three inches. When used in an air atmosphere, the most energetic spectral line reaching the deposition gas from the lamp 64 is the 2537 angstrom line of Hg~ The 1849 angstrom line of the lamp is more energetic and penetrates synthetic quartz well, but is strongly absorbed by air. In cases in which it is desired to irradiate the deposition gas with 1849 angstrom light, the light source 17 and the chamber 12 can be placed within an optional dry nitrogep environ-ment 68, as indicated diagrammatically by thebroken line of Fig. 2. This increases the trans-mission of the more energetic photons into the tube.
The radiant heater 16 preferably comprises a conventional resistive or tungsten/halogen lamp.

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Heat is transmitted to the substrate 14 and the chamber 12 by radiation, without significant di-rect heating of the deposition gas. Alternative-ly, a resistive heating arrangement (not shown) may be provided within the chamber 12 for heating the substrate 14. In that case, power lines for the heating element would be passed through the closed end 36 of one of the end fittings.
The deposition apparatus 10 may be operated in either a "static" mode, in ~hich the chamber 12 is closed off during deposition, or a "dynamic"
mode, in which a continuous flow of reactant depo-sition gas is established through the charnber 12 from the inlet 18 to the outlet 20. The gas cur-tain 60 is preferably established in the dynamicmode to prevent the light path through the quartz chamber from being obscured by deposition thereon.
In the static mode, the tubular chamber 12 is initially evacuated through the outlet 20 and back-filled with deposition gas to a desired pres-sure~ typically between 100 and 140 Torr. The chamber is then closed off and heated with the radiant heater 16 until a desired deposition tem-perature is reached. The light source 18 is turned on to begin the deposition reaction. Basic ~z~

operating parameters of the apparatus 10 in the static mode are listed in Table 1 ~or a number of different film depositions. The characteristics of films produced under the conditions of Table 1 are shown in Table 2. Each of the films was found to be amorphous, and the letters "PAC" preceding the numbers of the films signify that they were produced by photoassisted CVD.
With reference to Table 1, it can be seen that PAC films have been deposited according to the present invention at temperatures of between 100 and 162 degrees Celsius less than the thres-hold temperature at which conventional CVD pro-cesses are possible. Thus, while conventional CVD
depositions of Si involving a pyrolysis of silane gas require temperatures on the order of 400 de-gress C., photoassisted CVD of Si has been achieved at temperatures as low as 300 degrees C.
Similarly, while conventional CVD of Ge requires a substrate temperature of approximately 362 degrees C., photoassisted CVD of Ge has been achieved at 200 degrees C. Amorphous Ge-Si films have also been produced by photoassisted CVD at as low as 250 degrees C.~ whereas applicants are not aware of amorphous Ge-Si films ever being deposited by conventional CVD.

With reference to Table 2~ the film composi-tions shown therein were determined by electron spectroscopy (ESCA)~ The oxygen and carbon con-tents seen in the Si depositions of the first series may be real, that i5, built into the film from oxygen and other elements in the chamber dur-ing deposition, or they may be nothing more than contamination of the upper or lower surfaces of film. The Mg and Cl in the film PAC 0 is from the substrate, a sodalime microscope slide.
The Ge-Si films were deposited from a mixture of silane and germane in the static system. Ger-manium is preferentially deposited, probably be-cause the 2537 angstrom UV light is more strongly absorbed by germane than by silane.
The dark and light conductivities of the deposited films are also shown in Table 2. The majority of the films exhibited photothermal ac-tion. However, the conductivity values listed in Table 2 were measured in a gap geometry such that a surface current, if any, would contribute to the measured current.
In the static mode, a typical deposition run was begun at low temperature. If no film was de-posited in a few minutes, the temperature was in-~z~

creased by 25 to 50 degrees Celsius and the ir-radiation cycle was repeated. Once the tempera-ture threshold for film growth was established, the substrates were removed and characterized. In subsequent depositions using the same gas composi-tion, the substrate temperature was maintained at or above the threshold. In this context, it was discovered that the radiation was essential for deposition. Even with the temperature maintained at the threshold level, no film could be deposited until the chamber was illuminated. This result, in combination with the fact that the threshold temperature was substantially below that required for conventional CVD, shows that the depositions of Tables 1 and 2 involve true photoassisted CVD.
~ owever, the static mode of operation de-scribed above is a self-limiting process because deposition is allowed to occur on the interior walls of the chamber 12 as well as on the sample.
The transparent l'window" provided by the quartz tube 24 between the light source 17 and the sub-strate 14 thus gradually becomes opaque as the film deposited thereon becomes thicker. The ab-sorption coefficient of both silicon and germanium at 2537 angstroms is greater than 1.0 x 106 per centimeter, indicating that virtually all of the light would be absorbed by a film on the order of 10 nanometers thick. In practice, it has been found that film deposition ceases in the static S mode after the film on the substrate has kecome approximately 15 to 20 nanometers thick. At that point, no more UV radiation can enter the chamber to excite the deposition gas. In Table 2, the thickest GeSi film is the product of a number of sequential depositions.
The gas curtain 60 used in the dynamic mode of the apparatus 10 is designed to carry the ex-cited deposition atoms away from the "window" area of the chamber 12, minimizing deposition thereon.
The window thus remains unobscured for a much longer time, pexmitting deposition of much thicker films.
Operation of the apparatus 10 in the dynamic mode is initiated by evacuation of the chamber 12 through the outlet 20. A flow of deposition gas from the inlet 18 to the outlet 20 is then initi-ated, preferably along with a flow of inert gas through the inlet 46. The chamber 12 and the sub-strate 14 are then heated to the desired tempera-ture by the radiant heater 16 and the chamber is irradiated by the light source 17. A number of operating parameters of the apparatus 10 in the dynamic mode are shown in Table 3. As seen in Table 3, amorphous germanium, boron, and molyb-denum films have been deposited in this mode withtotal chamber pressures between 16.8 and 65.2 Torr. As described above in relation to the static mode of operation, dynamic photoassisted CVD has been accomplished at temperatures substan-tially below those required for conventional CVD.Thus, temperatures differences (T) of between 60 and 102 degrees Celsius have been achieved.
When a low pressure 100 watt Hg vapor lamp is used in the light source 17, the most energetic spectral line produced by the lamp is the 1849 angstrom line of Hg. However, light of this wave-length is absor~ed strongly by air, preventing it from reaching the chamber 12. The most energetic line reaching the gas inside the tube is therefore the 2537 angstrom line of Hg. However, the op tional dry nitrogen environment 68 of Fig. 2 may be used, if desired, to prevent absorption of the 1849 angstrom radiation. Although radiation of that wavelength is not essential for the deposi-tions of Tables 1 through 3, it may be desired insome cases.

It will be understood that while the discus-sion herein primarily involves the deposition of Si, Ge, Ge-Si, B and ~o, the process and apparatus of the present invention ~re applicable to deposi-tion of a wide variety of semiconductor and metal-lic compounds from a large number of deposition gases. The gases considered most useful for depo sition in the context of the present invention are, without limitation SiH4, GeH4~ B2H6' Mo(CO)6, W(CO)~, Cr(CO~6, Co(NO)(CO)3, PH3, NH3, H4, C2H2, N2O, NoCl, H~S and NCl3.
Each of the gases listed above has a charac-teristic photodissociation limit, which is ex-pressed as a minimum energy level or maximum wave-length of light required to dissociate the gas byphotolysis in the absence of external heating.
The photodissociation limits of these gases can be determined by experiment in a manner well known to those skilled in the art. In many cases it will be desired to deposit films in accordance with the present invention using radiation having wave-lengths somewhat greater than the dissociation limit while simultaneously heating the substrateO
The major concern in choosing a gas for photoassisted deposition of a film according to -2~-the present invention is that the light or other radia-tion adequately "couple" or be absorbed by the particular gas. If the gas does not absorb the radiation, the deposition process will not be assisted thereby. Similarly, a different source of radiation can be substituted for the Hg vapor lamp of the light source 17, but only if the depo-sition gas or gases will absorb radiation within the spectral range of the source and derive suffi-cient energy from it to aid in deposition. Thechoices of deposition gases and radiation sources to be used in the practice of the invention are therefore interdependent, requiring a matching of absorption characteristics to radiation outputO
From the above, it can be seen that there has been provided a process and apparatus for deposit-ing films from deposition gases without subjecting the gases or the substrates to the temperatures required for pyrolysis or the radiant energy levels required for photolysis.

9~

OPERATING PARAMETERS (STATIC MODE) System System Temperature Rate Of Pressure (C) ~T Deposition (torr) (PAC) (CVD) (C) (nm/min) si PAC 1A 100 300 400100 .07 PAC 1B 100 325 75 .083 PAC 1C 100 350 50 .4 10 PAC 0 100 400 0 1.9 Ge PAC 2A 100 200 362162 .13 PAC 2 100 250 112 .33 Ge-Si 15 PAC 3C 140 250 400150 .1 PAC 3B 140 325 75 1.33 PAC 3A 140 325 75 1.33 I ~ I In u~ In ol o l l l I`~ O ~ O O O
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Claims

THE EMBODIMENTS OF THE INVENTION IN WHICH AN EXCLUSIVE
PROPERTY OR PRIVILEGE IS CLAIMED ARE DEFINED AS FOLLOWS:

1. A process for making an amorphous silicon-germanium alloy film comprising:
providing a gas comprising silane and germane in a deposition environment containing a substrate;
heating the substrate below the temperature required for pyrolysis of the silane and germane;
irradiating the silane and germane with radiation below an energy level required to photo-chemically decompose the gases, wherein the combination of heat and radiation causes deposi-tion of an amorphous silicon and germanium alloy film on the substrate.

2. The process of claim 1, wherein the substrate is heated to a temperature of at least about 250 C.

3. The process of claim 1, wherein the radiation is ultraviolet light.

4. The process of claim 3, wherein the ultra-violet light has a wavelength greater than 2,000 A.

5. The process of claim 1, wherein the radiation is passed through a transparent member exposed at a first surface thereof to the deposition environment, and the process further comprises establishing a flow of substant-ially inert gaseous material along the first surface to minimize deposition thereon.

6. The process of claim 5, wherein the step of establishing the flow comprises producing a laminar gas curtain along the first surface.

7. The process of claim 1, wherein the gas in the deposition environment consists essentially of silane and germane.