CA1301239C - Method and arrangement for mechanically moving of a magnetic field generating device in a cathode arc discharge evaporating device - Google Patents
Method and arrangement for mechanically moving of a magnetic field generating device in a cathode arc discharge evaporating deviceInfo
- Publication number
- CA1301239C CA1301239C CA000561505A CA561505A CA1301239C CA 1301239 C CA1301239 C CA 1301239C CA 000561505 A CA000561505 A CA 000561505A CA 561505 A CA561505 A CA 561505A CA 1301239 C CA1301239 C CA 1301239C
- Authority
- CA
- Canada
- Prior art keywords
- magnetic field
- field generating
- generating device
- movement
- spiral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
A B S T R A C T
Method and device for mechanically moving of a magnetic field generating device in a cathode arc discharge evaporating device. To prevent grooves to occur on the cathode surface means are provided to add a further movement to the circular base movement of the magnetic field generating device by which substantially the whole surface area to be consumed is scanned by the arc spot.
Method and device for mechanically moving of a magnetic field generating device in a cathode arc discharge evaporating device. To prevent grooves to occur on the cathode surface means are provided to add a further movement to the circular base movement of the magnetic field generating device by which substantially the whole surface area to be consumed is scanned by the arc spot.
Description
13~239 Method ~nd arran~emen~ f~r mechanlcally moving of a magnetic fi~ld ~enerating devlce in a cathode arc discharae evaporatina device The present invention re.lates to a method for mechanically moving a magnetic field generating device along a path near a cathode plate, said movement comprising a base rotation. Such a device is known wo-A-85/03954 published September 12, 1985 in which a magnetic field generating device is mechanically rotated. Although the axis of the magnetic field generating device does not coincide with the axis of rotation the arc controlled by this magnetic field generating device will follow a substantially circular path. Because of this only along said circular path material of the target cathode will evaporize to the substrate. This means that the cathode might be used (eroded) along said circular path, whilst on other spots of said cathode sufficient material is left. In other words the target surface is very unevenly used.
The invention aims to obviate this drawback and to provide a method by which it is possible to more evenly use the target surface. According to the invention this is realized in that to the base rotation a further movement is added. This movement can comprise all movements known in the art, but preferably this movement is a further rotational movement having an amplitude being smaller than that of said base rotation. It is also preferred to have such further movement that the magnetic field generating device follows a spiral-like path.
Various aspects of this invention are as follows:
Method for mechanically moving a magnetic field generating device along a path near a cathode plate comprising:
rotating ~aid magnetic field generating device relative to said cathode plate according to a first rotational movement;
~., ~ `~,, la simultaneously moving said magnetic field generating device according to a second movement; and wherein said path created by said first and second mov ments creates an erosion pattern over a substantial portion of said cathode plate.
A method of the type set out hereinbefore, wherein said second movement of said magnetic field generating device is a linear movement changing the amplitude of said first rotational movement in such a way that said path is a spiral.
An arrangement for carrying out the method according to claim 3 comprising a base plate having a spiral-like groove and a support member being rotatable with respect to the base plate having pin means being slidable engageable in said groove and being connected with the magnetic field generating device.
Arrangement for mechanically moving a magnetic field generating device along a path near a cathode plate by means of first and second rotational movements, comprising a magnetic field generating device moveable with regard to a cathode plat~ of a cathode arc evaporizing device, arranged eccentrically with regard to the axis of a gear, being able to carry out said second rotation movement, said gear being engageable with a gear ring, being able to carry out the second rotation movement.
It is remarked that from GB-A-2,163,458 published February 26, 1986 it is known to have a magnetic field describing a spiral-like path. However, this spiral-like path is realized without any mechanical means. Inthe embodiment according to the British specification only coils are sued. This is a considerable drawback because by controlling said coils first of all the spiral-like movement has to be obtained and furthermore the magnetic field has also to be optimal in the sense of controlling the arc spot movement. It is of course not possible to optimalize both requirements with one magnetic field generating device only. By using the ~.~
li~
lb 13~1239 mechanically controlled magnetic field generating device according to the invention both functions have been separated and each can be optimized as such, so that it is possible to obtain maximu~ results in both controlling the movement of the ~agnetic field qenerating device and controlling the arc spot on the target surface.
1~ ~
~3Q1~3g It has been found that at describing a spiral-like movement the same lingering period is obtained if the radius vector of a point on the spiral is about proportional to the square root of the angle of the radius vector, in other words P = ~ ~ ~ b. In this expression p is the length of the radius with regard to the centre and ~ the angle.
To prevent the erosion of the target becoming more considerable in the centre of the cathode than near its edge, optimum results are obtained if ~ = ~ ~ + b, wherein 2 ~ x ~ 2,5. To prevent a more considerable erosion in the centre of the cathode than at its edge, the magnetic field has to move much faster near the centre than at its edge. To vary the speed of the movement with the distance from the centre to keep the lingering time of the arc as constant as possible p is a higher order goniometric function, e.g.~ = f(~ )t. Besides this spiral-like movement, the magnetic field can also describe a further periodical movement sub-stantially perpendicular to the target surface. This can compriserotation in a magnetic field being not rotational symmetric.
The invention also relates to an arrangement for carrying out the method as described above, more particular being able to perform a base rotation to which a further rotation, having a smaller amplitude, is added. This arrangement comprises a magnetic field generating device moveable with regard to the cathode plate of P cathode arc evaporation device excentrically arranged with regard to the centre of a gear, which can carry out said further rotational movement, said gear being in en-gagement with a gear ring, being able to perform the base rotation. By having both gears independently drivable all places on the cathode sur-face can be touched by the arc such that the cathode can be consumed evenly. A preferred means for controlling the drives of both gears com-prises a microprocessor means. An arrangement for carrying out above method wherein a spiral-like path is described by the magnetic field generating device comprises according to a prefered embodiment a base plate having a spiral-like groove and a support member having slidable arranged pin means, being engageable in said grooves, being connected with said magnetic field generating device. This base plate can also be rotatable. According to a preferred embodiment this base plate is ar-ranged rotatably in a sense opposite to the sense of movement of thesupport member. By this it is possible to have the arc spot describe several times a spiral-like path over the cathode surface. Said spiral-like path being different everytime.
~L3(~1~39 The magnetic field generating device can comprise electromagnetic coils possibly controlled by microprocessor means. These coils can perform a modulating movement of the arc trajectory.
The invention will be further elucidated with reference to embodiments described below which are given as example only and shown in the drawing, in which:
Fig~re 1 shows a detail of an cathode arc evaporating arrangement provided with magnetic field generating means, being moveable along a spiral-like path;
Figure 2 shows a detail of the magnetic field generating device from Fig. 1;
Figure 3 shows the path described by the magnetic field generating device for carrying out the method according to the invention;
Figure 4 shows a cross-section of a further embodiment of the arrangement shown in Fig. 1 and Figure 5 shows an embodiment in which another kind of movement is realized for the magnetic field generating device.
In Fig. 1 an arrangement is shown for mechanically moving a magnetic field generating device 13. This arrangement can be incorporated in the device according 25 to aforementioned WO-A-85/03954. In Fig. 1 the cathode plate is referred to with 11 and comprises material to be evaporized. For the substrate on which the material has to be deposited, or the anode reference is made to above WO-publication. However, it is of importance that the arc being drawn between the anode (not shown) and cathode plate 11 describes such a path over the cathode plate 11, that it is consumed as evenly as possible. To this end under cathode plate 11 at the site removed from the substrate to be processed, an arrangement is shown generally referred to with 12, comprising a magnetic field generating device 13 as well as means for describing a spiral-like path for the magnetic field ..
13(~1Z3$~
generating device. This means comprise a rotating slide rail 14 r in which the magnetic field generating device can be moved to and fro through a slot 15 (shown in Fig. 3~ in the direction of arrow 16. Pin 17 of the magnetic field generating member f its in a spiral-like groove 18 provided in base plate lg. This base plate can be stationary, but in the embodiment shown it i5 connected with drive means 29 through the gear 20. By relative movement of the rotating slide rail 14 and base plate 19 different paths can be ~130~Z39 obtained, of which as an example path 30 is shown in Fig. 3. It is clear that a spiral-like movement is described, wherein the surface of the cathode plate 11 is described as evenly as possible. Through the inward and outward movement of the magnetic field generating member by changing the relative movement of rotation of the slide rail ]4 and base plate 19, all of the cathode surface can be subsequently scanned with different kinds of spiral-like paths.
In Fig. 2 an example of a magnetic field generating member is shown. It comprises a soft iron part 22 and a ring pole 24 being ~0 integral and permanent magnet 23, the poles 23 and 24 having opposite polarity. Magnet 23 can comprise an assembly of different poles. It has to be understood that this is only an example and that it is possible to embody the magnetic field generating device as electromagnets or a combination of electromagnets and permanent magnets.
In Fig. 4 a further embodiment is shown in which the drawback has been removed that the magnetic field generating device 13 cannot be moved beyond the centre of the cathode plate 11. As is clear in Fig. I
shaft 25 obstructs any further movement of the magnetic field generating device 13 to the centre of the cathode plate 11. In the embodiment according to Fig. 4 the rotating slide rail is embodied as rotating cylindrical sleeve 26 being provided with a slot in the way shown in Figure 3. Now it is possible to provide the base plate 19 of a groove 18 extending through said plate 19. Also in this embodiment it is possible to use for magnetic field generating device 13 all magnets and magnets assemblies both permanent and electrical being known in the art. If electrical magnets are used all means known in the art for controlling them can be used, more particular microprocessors.
In Fig. 5 another arrangement is shown for moving a magnetic field generating device, in this figure indicated with 31. In the arrangement according to the Fig. 5 embodiment, magnetic field generating device 31 is mounted on gear wheel 32 excentrically with regard to the axis 33 of this gear wheel 32. Gear wheel 32 can rotate around shaft 34 and engages ring gear 35. ~ing gear 35 is connected through sleeve 36 pulleys 37, 38 and belt 39 with motor drive 40. Gear wheel 32 is connected through arm 41, shaft 42, pulleys 43 and 44 and belt 45 with motor 46. When motor 46 is blocked and motor 40 drives ring gear 35, magnetic field generating device 31 will perform a rotation around axis 33. When ring gear 35 is 13~239 blocked and motor 46 is driven magnetic field 8enerating device 3I will describe a movement comprising a combination of a base rotation (described by axis 33) and further rotation around axis 33. When driving both motors 46 and 40 simultaneously or intermittently in the same or opposite directions many kinds of movements are possible. Controlling of the motors is preferably realized by a microprocessor means schematical-ly referred to with 48. The magnetic field generating device 31 according to Fig. 5 com~rises an electromagnetical coil 5 surrounding a soft iron piece 3. In the centre of the soft iron piece a permanent mag-]O net 6 is provided having e.g. its north pole as shown in the figure.
By using one of the embodiments shown above the arc controlled bythe magnetic field generating device will not only describe a circular path but added to this movement a further path. By this groove-like erosion of only a limited portion of cathode plate ]] is obviated. Al-though the embodiments shown are preferred embodiments, it will be clearto a person skilled in the art that many modifications and other embodi-ments can be realired in which a further movement is added to a circular movement. It is envisaged that all these embodiments are within the scope of protection as described in the following claims.
The invention aims to obviate this drawback and to provide a method by which it is possible to more evenly use the target surface. According to the invention this is realized in that to the base rotation a further movement is added. This movement can comprise all movements known in the art, but preferably this movement is a further rotational movement having an amplitude being smaller than that of said base rotation. It is also preferred to have such further movement that the magnetic field generating device follows a spiral-like path.
Various aspects of this invention are as follows:
Method for mechanically moving a magnetic field generating device along a path near a cathode plate comprising:
rotating ~aid magnetic field generating device relative to said cathode plate according to a first rotational movement;
~., ~ `~,, la simultaneously moving said magnetic field generating device according to a second movement; and wherein said path created by said first and second mov ments creates an erosion pattern over a substantial portion of said cathode plate.
A method of the type set out hereinbefore, wherein said second movement of said magnetic field generating device is a linear movement changing the amplitude of said first rotational movement in such a way that said path is a spiral.
An arrangement for carrying out the method according to claim 3 comprising a base plate having a spiral-like groove and a support member being rotatable with respect to the base plate having pin means being slidable engageable in said groove and being connected with the magnetic field generating device.
Arrangement for mechanically moving a magnetic field generating device along a path near a cathode plate by means of first and second rotational movements, comprising a magnetic field generating device moveable with regard to a cathode plat~ of a cathode arc evaporizing device, arranged eccentrically with regard to the axis of a gear, being able to carry out said second rotation movement, said gear being engageable with a gear ring, being able to carry out the second rotation movement.
It is remarked that from GB-A-2,163,458 published February 26, 1986 it is known to have a magnetic field describing a spiral-like path. However, this spiral-like path is realized without any mechanical means. Inthe embodiment according to the British specification only coils are sued. This is a considerable drawback because by controlling said coils first of all the spiral-like movement has to be obtained and furthermore the magnetic field has also to be optimal in the sense of controlling the arc spot movement. It is of course not possible to optimalize both requirements with one magnetic field generating device only. By using the ~.~
li~
lb 13~1239 mechanically controlled magnetic field generating device according to the invention both functions have been separated and each can be optimized as such, so that it is possible to obtain maximu~ results in both controlling the movement of the ~agnetic field qenerating device and controlling the arc spot on the target surface.
1~ ~
~3Q1~3g It has been found that at describing a spiral-like movement the same lingering period is obtained if the radius vector of a point on the spiral is about proportional to the square root of the angle of the radius vector, in other words P = ~ ~ ~ b. In this expression p is the length of the radius with regard to the centre and ~ the angle.
To prevent the erosion of the target becoming more considerable in the centre of the cathode than near its edge, optimum results are obtained if ~ = ~ ~ + b, wherein 2 ~ x ~ 2,5. To prevent a more considerable erosion in the centre of the cathode than at its edge, the magnetic field has to move much faster near the centre than at its edge. To vary the speed of the movement with the distance from the centre to keep the lingering time of the arc as constant as possible p is a higher order goniometric function, e.g.~ = f(~ )t. Besides this spiral-like movement, the magnetic field can also describe a further periodical movement sub-stantially perpendicular to the target surface. This can compriserotation in a magnetic field being not rotational symmetric.
The invention also relates to an arrangement for carrying out the method as described above, more particular being able to perform a base rotation to which a further rotation, having a smaller amplitude, is added. This arrangement comprises a magnetic field generating device moveable with regard to the cathode plate of P cathode arc evaporation device excentrically arranged with regard to the centre of a gear, which can carry out said further rotational movement, said gear being in en-gagement with a gear ring, being able to perform the base rotation. By having both gears independently drivable all places on the cathode sur-face can be touched by the arc such that the cathode can be consumed evenly. A preferred means for controlling the drives of both gears com-prises a microprocessor means. An arrangement for carrying out above method wherein a spiral-like path is described by the magnetic field generating device comprises according to a prefered embodiment a base plate having a spiral-like groove and a support member having slidable arranged pin means, being engageable in said grooves, being connected with said magnetic field generating device. This base plate can also be rotatable. According to a preferred embodiment this base plate is ar-ranged rotatably in a sense opposite to the sense of movement of thesupport member. By this it is possible to have the arc spot describe several times a spiral-like path over the cathode surface. Said spiral-like path being different everytime.
~L3(~1~39 The magnetic field generating device can comprise electromagnetic coils possibly controlled by microprocessor means. These coils can perform a modulating movement of the arc trajectory.
The invention will be further elucidated with reference to embodiments described below which are given as example only and shown in the drawing, in which:
Fig~re 1 shows a detail of an cathode arc evaporating arrangement provided with magnetic field generating means, being moveable along a spiral-like path;
Figure 2 shows a detail of the magnetic field generating device from Fig. 1;
Figure 3 shows the path described by the magnetic field generating device for carrying out the method according to the invention;
Figure 4 shows a cross-section of a further embodiment of the arrangement shown in Fig. 1 and Figure 5 shows an embodiment in which another kind of movement is realized for the magnetic field generating device.
In Fig. 1 an arrangement is shown for mechanically moving a magnetic field generating device 13. This arrangement can be incorporated in the device according 25 to aforementioned WO-A-85/03954. In Fig. 1 the cathode plate is referred to with 11 and comprises material to be evaporized. For the substrate on which the material has to be deposited, or the anode reference is made to above WO-publication. However, it is of importance that the arc being drawn between the anode (not shown) and cathode plate 11 describes such a path over the cathode plate 11, that it is consumed as evenly as possible. To this end under cathode plate 11 at the site removed from the substrate to be processed, an arrangement is shown generally referred to with 12, comprising a magnetic field generating device 13 as well as means for describing a spiral-like path for the magnetic field ..
13(~1Z3$~
generating device. This means comprise a rotating slide rail 14 r in which the magnetic field generating device can be moved to and fro through a slot 15 (shown in Fig. 3~ in the direction of arrow 16. Pin 17 of the magnetic field generating member f its in a spiral-like groove 18 provided in base plate lg. This base plate can be stationary, but in the embodiment shown it i5 connected with drive means 29 through the gear 20. By relative movement of the rotating slide rail 14 and base plate 19 different paths can be ~130~Z39 obtained, of which as an example path 30 is shown in Fig. 3. It is clear that a spiral-like movement is described, wherein the surface of the cathode plate 11 is described as evenly as possible. Through the inward and outward movement of the magnetic field generating member by changing the relative movement of rotation of the slide rail ]4 and base plate 19, all of the cathode surface can be subsequently scanned with different kinds of spiral-like paths.
In Fig. 2 an example of a magnetic field generating member is shown. It comprises a soft iron part 22 and a ring pole 24 being ~0 integral and permanent magnet 23, the poles 23 and 24 having opposite polarity. Magnet 23 can comprise an assembly of different poles. It has to be understood that this is only an example and that it is possible to embody the magnetic field generating device as electromagnets or a combination of electromagnets and permanent magnets.
In Fig. 4 a further embodiment is shown in which the drawback has been removed that the magnetic field generating device 13 cannot be moved beyond the centre of the cathode plate 11. As is clear in Fig. I
shaft 25 obstructs any further movement of the magnetic field generating device 13 to the centre of the cathode plate 11. In the embodiment according to Fig. 4 the rotating slide rail is embodied as rotating cylindrical sleeve 26 being provided with a slot in the way shown in Figure 3. Now it is possible to provide the base plate 19 of a groove 18 extending through said plate 19. Also in this embodiment it is possible to use for magnetic field generating device 13 all magnets and magnets assemblies both permanent and electrical being known in the art. If electrical magnets are used all means known in the art for controlling them can be used, more particular microprocessors.
In Fig. 5 another arrangement is shown for moving a magnetic field generating device, in this figure indicated with 31. In the arrangement according to the Fig. 5 embodiment, magnetic field generating device 31 is mounted on gear wheel 32 excentrically with regard to the axis 33 of this gear wheel 32. Gear wheel 32 can rotate around shaft 34 and engages ring gear 35. ~ing gear 35 is connected through sleeve 36 pulleys 37, 38 and belt 39 with motor drive 40. Gear wheel 32 is connected through arm 41, shaft 42, pulleys 43 and 44 and belt 45 with motor 46. When motor 46 is blocked and motor 40 drives ring gear 35, magnetic field generating device 31 will perform a rotation around axis 33. When ring gear 35 is 13~239 blocked and motor 46 is driven magnetic field 8enerating device 3I will describe a movement comprising a combination of a base rotation (described by axis 33) and further rotation around axis 33. When driving both motors 46 and 40 simultaneously or intermittently in the same or opposite directions many kinds of movements are possible. Controlling of the motors is preferably realized by a microprocessor means schematical-ly referred to with 48. The magnetic field generating device 31 according to Fig. 5 com~rises an electromagnetical coil 5 surrounding a soft iron piece 3. In the centre of the soft iron piece a permanent mag-]O net 6 is provided having e.g. its north pole as shown in the figure.
By using one of the embodiments shown above the arc controlled bythe magnetic field generating device will not only describe a circular path but added to this movement a further path. By this groove-like erosion of only a limited portion of cathode plate ]] is obviated. Al-though the embodiments shown are preferred embodiments, it will be clearto a person skilled in the art that many modifications and other embodi-ments can be realired in which a further movement is added to a circular movement. It is envisaged that all these embodiments are within the scope of protection as described in the following claims.
Claims (18)
1. Method for mechanically moving a magnetic field generating device along a path near a cathode plate comprising:
rotating said magnetic field generating device relative to said cathode plate according to a first rotational movement;
simultaneously moving said magnetic field generating device according to a second movement: and wherein said path created by said first and second movements creates an erosion pattern over a substantial portion of said cathode plate.
rotating said magnetic field generating device relative to said cathode plate according to a first rotational movement;
simultaneously moving said magnetic field generating device according to a second movement: and wherein said path created by said first and second movements creates an erosion pattern over a substantial portion of said cathode plate.
2. Method according to claim 1, wherein said second movement of said magnetic field generating device is a rotational movement having an amplitude smaller than that of said first rotational movement.
3. Method according to claim 1, wherein said second movement of said magnetic field generating device is a linear movement changing the amplitude of said first rotational movement in such a way that said path is a spiral.
4. Method according to claim 3, wherein the radius vector on the spiral is substantially proportional with the square root of the angle of the radius vector.
5. Method according to claim 3, wherein said spiral satisfies p = a ? ? in which 2 ? X ? 2.5, p and ? being polycoordinates and ? being a function of time.
6. Method according to claim 3, wherein the rate of the movement of the magnetic field near the center of the spiral is larger than at the outer end of said spiral.
7. Method according to claim 6, characterized in that the rate of the movement is determined according to the amplitude of a goniometric function.
8. Method according to claim 1, wherein the perpendicular component of a magnetic field created by said magnetic field generating device describes a further periodic movement substantially perpendicular to a target surface, by which a cathode arc trajectory is changed.
9. Method according to claim 5, wherein the rate of said spiral is determined by a higher order function.
10. Method according to claim 1, further comprising rotating said magnetic field generating device around its axis.
11. Arrangement for carrying out the method according to claim 3 comprising a base plate having a spiral-like groove and a support member being rotatable with respect to the base plate having pin means being slidable engageable in said groove and being connected with the magnetic field generating device.
12. Device according to claim 11, wherein the base plate is rotatable in a direction opposite to the direction of movement of said support member.
13. Arrangement for carrying out the method according to claim 11, wherein the magnetic field generating device comprises electromagnetic coils and a control circuitry.
14. Arrangement according to claim 13 wherein said coils can be modulated.
15. Arrangement according to claim 13, wherein said control circuitry is embodied in a microprocessor.
16. Arrangement for mechanically moving a magnetic field generating device along a path near a cathode plate by means of first and second rotational movements, comprising a magnetic field generating device moveable with regard to a cathode plate of a cathode arc evaporizing device, arranged eccentrically with regard to the axis of a gear, being able to carry out said second rotation movement, said gear being engageable with a gear ring, being able to carry out the second rotation movement.
17. Arrangement according to claim 16, wherein said gears are independently drivable.
18. Arrangement according to claim 16 comprising microprocessor means for controlling the drive of the gears.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL8700621A NL8700621A (en) | 1987-03-16 | 1987-03-16 | Mechanically moving magnetic field generator relative to cathode - using spirally grooved rotating baseplate to mechanically impose spiral path on base rotation of field generator |
| NL8700621 | 1987-03-16 | ||
| NL8700619 | 1987-03-16 | ||
| NL8700619A NL8700619A (en) | 1987-03-16 | 1987-03-16 | Mechanically moving magnetic field generator relative to cathode - using spirally grooved rotating baseplate to mechanically impose spiral path on base rotation of field generator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1301239C true CA1301239C (en) | 1992-05-19 |
Family
ID=26646220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000561505A Expired - Fee Related CA1301239C (en) | 1987-03-16 | 1988-03-15 | Method and arrangement for mechanically moving of a magnetic field generating device in a cathode arc discharge evaporating device |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4902931A (en) |
| EP (1) | EP0283095A1 (en) |
| JP (1) | JPS64262A (en) |
| CA (1) | CA1301239C (en) |
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| DE2862315D1 (en) * | 1977-12-20 | 1983-10-13 | Nat Res Dev | Electric arc apparatus and method for treating a flow of material by an electric arc |
| US4556471A (en) * | 1983-10-14 | 1985-12-03 | Multi-Arc Vacuum Systems Inc. | Physical vapor deposition apparatus |
| JPS61501328A (en) * | 1984-03-02 | 1986-07-03 | リ−ジェンツ・オブ・ザ・ユニヴァ−シティ・オブ・ミネソタ | Material Deposition Method and Apparatus by Controlled Vacuum Arc |
| US4552639A (en) * | 1984-07-20 | 1985-11-12 | Varian Associates, Inc. | Magnetron sputter etching system |
| US4724058A (en) * | 1984-08-13 | 1988-02-09 | Vac-Tec Systems, Inc. | Method and apparatus for arc evaporating large area targets |
| US4631106A (en) * | 1984-09-19 | 1986-12-23 | Hitachi, Ltd. | Plasma processor |
| JPS6260866A (en) * | 1985-08-02 | 1987-03-17 | Fujitsu Ltd | Magnetron sputtering device |
| JPS6247478A (en) * | 1985-08-26 | 1987-03-02 | バリアン・アソシエイツ・インコ−ポレイテツド | Planer magnetron sputtering apparatus wherein circular motion and radial motion of magnetic field are combined |
-
1988
- 1988-03-15 EP EP88200483A patent/EP0283095A1/en not_active Withdrawn
- 1988-03-15 US US07/168,439 patent/US4902931A/en not_active Expired - Fee Related
- 1988-03-15 CA CA000561505A patent/CA1301239C/en not_active Expired - Fee Related
- 1988-03-16 JP JP63063064A patent/JPS64262A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JPS64262A (en) | 1989-01-05 |
| US4902931A (en) | 1990-02-20 |
| EP0283095A1 (en) | 1988-09-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKLA | Lapsed |