CA1332326C - Preparation of superconducting oxide films on silicon and silicon dioxide substrates - Google Patents

Abstract

Abstract of the Disclosure This invention is directed to a method of preparing a superconducting metal oxide film on silicon and silicon dioxide substrates. More particularly, the method comprises depositing a superconducting metal oxide precursor on the substrate and then subjecting it to annealing in an oxygen atmosphere according to a schedule which is critically defined as to time and temperature.

Description

~332~2~
;i 1 P~EPARATION OF SUPE~CONpUCTING OXID~_FILMS
0~ SIIICON ANL SI~Ico~ ~IOXI~ S~RaT~

Thi~ invention relates to a method of preparing a superconducting metal oxide film on silicon and silicon dioxide substrate~.
The recent discovery of superconducting metal oxides such as YBa2Cu307_y (with y < 0.5) having critical temperatures, Tc, at leasft 10 to 20 K above the temperature of liquid nitrogen (77 X) has created a great deal of excitement. Heretofore known 6upexconduc-ting materials have much lower TC'8. These supercon-ducting metal oxides have vast potential for use in diverse applications in the large number of electrical and electronic devices which can operate at these higher temperatures. One important use of such metal oxides is in electronic components, where the oxide materials would generally be employed as a thin film, usually less than 10 ~m thick, deposited on an appropriate substrate.
During the past 12 months, a great deal off effort has been devoted to the preparation of supercon-ducting films of YBa2Cu307_y on various substrates.
Many different technique~ for depositing the film on a substrate have been explored. The film has been grown (deposited) on substrates by physical deposition techniques including electron beam evaporation, sputt-ring, molccular beam pitaxy, lon beam ::

~J
~,,"",~
.

- - . . . . . . . . .

`

- 2 - ~ 3 3 2 32 deposition, laser deposition and chemical deposition techniques such as metalorganic deposition. However, in general, the as deposited films of such materials are nonsuperconducting. They require a post growth anneal in oxygen to become superconducting. To effect the desired superconducting properties in the film material, they are usually annsaled in oxygen at a temperature of 800-950C
and for a period of a few minutes to a few hours.

If the annealing conditions are excessive, however, they can have an adverse effect on the superconducting properties of the film by causing interdiffusion of elements of the film and the substrate. The interdiffusion can lead to interactions of the elements and result in films having poor or absent superconducting properties. Annealing temperatures and times therefore have to be optimized for a given substrate and thickness of the film.
: .
Recent publications have described various physical deposition techniques and annealing conditions which are reported to have been successfully used to produce superconducting metal oxide films on special substrates such as SrTiO3, ZrO2 and MgO. In ~Preparation Of Y-Ba-Cu-O Thin Films On MgO By dc Magnetron Sputtering From A Stoichiometric YlBa2Cu3O7 ~ Target", Lee et al, Appl. Phys.
Lett. Sl (15), 12 October 1987 it was disclosed that such thin films deposited on MgO substrates, when heated above 900C for 1 minute become superconducting at 60 K. D. K.
Lathrop et al in "Production of YBa2Cu3O7 y Superconducting Thin Films in Situ by High-Pressure Reactive Evaporation and Rapid Thermal Annealing", Appl.
Phys. Lett. 51 (19) 9 November 1987 deposited such films on A12O3, ZrO2 and SrTiO3. They teach therein :
::
~:~

~`, , ~.
~, ~
!~

~ 3 ~ 133232~
that, after deposition, films which did not show good superconducting properties were annealed in flowing oxygen for 1-5 minutes at 700-900C. in an attempt to improve the superconducting properties.

While the above citations are directed to films deposited by physical deposition techniques, the following citation is directed to films deposited by a chemical deposition technique, namely organometallic deposition. In "Versatile New Metalorganic Process For Preparing Superconducting Thin Films," Appl. Phy. Lett.
52 (2), 11 January 1988, M. E. Gross et al disclose depositing LnBa2Cu3O7 x~ (Ln being a rare earth element) films on MgO and ZrO2 by spin coating the film from a solution. It is taught therein that heating in 2 to a maximum temperature of 800-990C followed by annealing at 400C produces supe~conducting behavior in the film at Tc (onset) of 89 K. The high temperature annealing of the film is limited to a maximum of 3 minutes in order to preclude significant interaction of the film with the substrate.
',:
; In all of these citations, the typical annealing schedule consists of a relatively slow heating to a peak temperature in the range of 850 to 950C, annealing in oxygen at this temperature for a time period ranging from , a few minutes to an hour, followed by a slow cooling at a rate of 1 to 3 degrees per minute. Using such an -~ annealing schedule, YBa2Cu3O7 y films having Tc's ;
30 i above 90 K and critical current densities above 10 A/cm2 have been reported in the literature as having been made on the particular substrates mentioned above. ~ -~
,~
For most electronic uses, however, the ~ 35 superconducting films must be grown on substrates :~ :

;s~ ~

:~ :
' ~ 4 ~ ~ 33232~
employed in integrated circuits, such as Si, SiO2 and Si3N4 substrates. Unfortunately all attempts known to us by others in the past to prepare YBa2Cu3O7 y films by physical deposition techniques on silicon and silicon dioxide substances have given films having poor superconducting properties, i.e., low Tc's. When we used the typical annealing schedule described above to anneal films deposited by a physical deposition on Si and SiO2 as we had used for films deposited, for example, on SrTiO3, we obtained results similar to those reported in the literature, namely, the films had poor superconducting properties. Generally, such films vapor deposited on silicon have a Tc less than 30 K. The poor superconducting properties are attributed to the interdiffusion of one or more of the elements of the film and substrate.
, In a paper presented in November of 1987 by Robert B. Laibowitz and entitled ~Vapor Deposited High Tc Superconducting Oxide Thin Films~' it was reported that thin films of the compound YBa2Cu3Oy were deposited on substrates such as sapphire, MgO, ZrO2, SrTiO3, Si and SiO2. Annealing was carried out in oxygen in a conventional furnace generally at temperatures around 920C for about 4 minutes and the samples were cooled slowly to room temperature in the furnace. The films on all of the substrates of the paper listed above, other than Si and SiO2, were reported to be superconducting. Superconducting properties were not 30 ' reported for films deposited on Si or SiO2 and it must be inferred that Laibowitz was not successful in making superconducting films on the silicon and silicon dioxide substrates. Similarly, in an article in the Detroit Free Press on March 17, 1988, General Electric is quoted as stating that ~Previous attempts to apply a :

F~r~

: ~

1 - 5 - 1 3 3 2 3 2 ~

superconducting film on silicon had failed because the layers mixed in the process of heating the film, known as annealing~. According to that article, scientists at GE
addressed the problem by using a buffer layer of zirconia, a heat resistant metallic oxide. It was reported that superconductive films having a Tc of 87 K
were obtained by using the buffer layer of zirconia between the film and the silicon substrate.

~, 10 In "High Tc Superconducting Films From Metallo-Organic Precursors", W. W. Davison et al, it was reported that films of YBa2Cu307_x deposited on silicon by metalorganic deposition have a Tc of about 80 K. Reportedly, the film was about 0.7~m thick and was annealed in oxygen for one hour at 900C. It was also suggested in this reference that a diffusion barrier such as silver might be used between the film and the silicon. If this work is substantiated, it represents an advance in the art but provides teachings regarding only films deposited by a non-physical deposition technique i.e., a non-vacuum-type metalorganic deposition technique. , It is still desirable, however, to use physical deposition techniques to make good superconducting films of YBaCuO, particularly YBa2Cu307 y, on silicon and silicon dioxide substrates, which films do not require a buffer layer to insure good superconducting properties in -~
the film. It is an object of the invention to provide a method for making high Tc superconducting metal oxide films on silicon and silicon dioxide substrates, wherein the precursor ~non-superconducting) film is deposited on -~
the substrate by physical deposition techniques, which films further do not require a buffer layer between the ~
~-: :
. ~ ~
, ~ ~:

!

q 6 ~33232-~ -,~ .
film and substrate to insure a finished fllm of good superconducting properties.
We have found that in order to produce superconducting metal oxide films from precursor films deposited by physical deposition techniques on silicon or silicon dioxide, which do not require a buffer layer, the heating, annealing and cooling of the film must be critically controlled to periods of time substantially shorter than those now being suggested by others.
This invention relates to a method of making a superconducting metal oxide film on a silicon or silicon dioxide substrate. According to the method, a thin film of a superconducting metal oxide precursor consisting essentially of R, Ba, Cu, and O is deposited by a physical deposition technique onto the substrate in a thickness of between about 0.1 and about 3 pm (microns) to form a film/substrate co~posite, which precursor film can be annealed in an oxygen atmosphere to yield a superconducting metal oxide film. R is selected from the group consisting of rare sarth ; elements and yttrium. As is apparent to one skilled in the art in view of the pre~ent disclosure, R may also be a mixture o~ materials selected from this group.
Preferably, the (atomic) ratio of R:Ba:Cu present in the deposited superconducting metal oxide precursor is about 2:3, i.e~, 0.8-1.2 : 1.8-2.2 : 2.8-3.2, most prefera-~ bly being the stoichiometric 1:2:3. The film/substrate `~composite is heated to a temperature between about 800-C and 950-C, preferably 850-950-C, in less than ~;~j30 about 10 seconds. The film substrate composite is maintained at the temperature in an oxygen atmosphere for between about 5 and 25 seconds to anneal the film.

: ~

f~

~ 7 ~ ~33232~

The "oxygen atmosphere" as that term is used herein, is an atmosphere comprising at least 10% by volume oxygen any remainder other than oxygen being non-reactive gas(es). Preferably, the oxygen atmosphere of the invention consists essentially of oxygen, i.e, is about 100% oxygen. The composite is then cooled to less than about 300C, preferably to room temperature, in less than about 3 minutes, preferably in about 30 to 80 seconds.
Generally, in the cooling of the composite to less than about 300C in less than about 3 minutes, the composite is preferably cooled to less than about 400C in less than 10 seconds. Hereinafter, the heating, annealing and cooling of the metal oxide film according to this invention will be referred to as "rapid thermal lS annealing".
- ,:
If the substrate is silicon, preferably the annealing time (i.e., the time for which the composite is maintained in the oxygen atmosphere at the elevated -~
temperature) is 8 to 12 seconds and if the substrate is silicon dioxide the annealing time preferably is 10 to 15 ~` seconds. ~-,,~
The invention is also directed to an article -~
25 comprising a superconducting metal oxide film on a ~-substrate selected from the group consisting of silicon and silicon dioxide made according to the method ~?~ disclosed~above. As understood herein, the term "superconductor~ with respect to the metal oxide film ~i 30 ' means that it is superconductive at cryogenic -~-temperatures.

Advantageously metal oxide films made on silicon `~ according to this invention have shown zero resistance near 50 K, as compared to prior art films made on silicon '~

8 1 33232~
by conventional annealing schedules which have zero resistance below 30 K. The superconducting metal oxide film, according to this invention after annealing in an oxygen atmosphere, preferably consists essentially of S RBa2CU36.5-7 In the description which follows, reference is made to the accompanying drawings, wherein:
Figure 1 is a graphical representation of the re~i~tivity versus temperature for a Y/Ba/Cu/0 film on sapphire substrate which was annealed in an oxygen atmosphere according to conventional annealing schedules;
Figure 2 is a graphical representation of resistance versus temperature for a Y/Ba/Cu/0 film on a silicon substrate which was annealed in oxygen :: according to conventional annealing schedules;
Figure 3 is a graphical representation of the :~ resistance versus temperature for a Y/Ba/Cu/0 film on a silicon substrate annealed in an oxygen atmosphere by the rapid thermal annealing oP the invention method;
. Figure 4 is a graphical representation of the ~; room temperature resistance of Y/Ba/CuJ0 films on ;~ silicon substrates as a function of annealing time in an oxygen atmosphere; and Figure 5 is a graphical representation of the resistance versus temperature for Y/Ba/Cu/0 film on a silicon dioxide substrate annealed in an oxygen ~ atmosphere by the rapid thermal annealing of the ; invention method.
This invention is directed to a method of making a superconducting metal oxide film on silicon and ~ silicon dioxide substrates. The method comprises `~ depositing a thin film of a superconducting metal oxide precursor on silicon or silicon dioxide substrates by physical deposition techniques and then subjecting the `~ film to rapid thermal annealing in an oxygen atmosphere ,~"~
"", ~

9 ~3~232~
to make it superconducting. The 6teps of the method will hereinafter be described in greater detail.
The silicon and silicon dioxide substrates may be of any type of such material and in any desired shape. If the film/substratQ is intended for use in electronic device~, however, the substrate would probably be in the form of a wafer as is commonly used in the electronics industry. A wafer of silicon may be in the shape of a disc having two broad $aces and a thin cylindrical edge surface or may be a rectangular solid having two broad faces and four thin edge surfaces. The silicon substrate may be, e.g., intrinsic, p-type or n-type, and have doping levels as are commonly used in the 6emiconductor industry. Generally, for ~lectronic use the 6ubstrate would be a wafer of single crystal ~ilicon, most preferably being single crystal silicon of (100) or (110) orientation, or be a wafer of single crystal silicon on which a silicon dioxide layer has been grown.
Prior to dQposition of a film onto a silicon substrate, the surface of the silicon is preferably cleaned to remove any contaminants, e.g., organic or inorganic impurities, which may interfere with the adhesion of the film to the substrate or the electrical , :~.
`~

- lo 1332326 conductivity at the film/substrate interface. Such cleaning is routinely carried out by, e.g., using vapors of isopropyl alcohol or a solution of H2O2 and H2SO9j followed by a deionized water rinse. In the case of silicon, the substrate may subsequently be etched in buffered HF to remove any native oxide and then rinsed in deionized water. Thereafter, the silicon may be spin-dried in a nitrogen atmosphere. For optimal adhesion of the film to the silicon substrate surface, however, the chemically cleaned substrate surface is also preferably glow discharged sputter-cleaned in the deposition chamber prior to deposition of the metal oxide film.

The silicon dioxide may be formed by oxidizing a silicon substrate (which technique is well known in the art). One technique for growing the silicon dioxide Gn ,~
the silicon substrate by oxidizing a silicon substrate (which technique was employed in the examples below) is hereinafter described. Generally the surface of the silicon would be cleaned first according to the cleaning procedures described above. Thereafter, to grow the silicon dioxide layer, the silicon substrate is loaded into a furnace in a nitrogen atmosphere at an elevated temperature, e.g., 800C. The temperature is raised to e.g., 1000C, and the nitrogen gas is replaced with dry oxygen gas. After sufficient oxidation of the silicon to form a silicon dioxide film on the silicon wafer, the gas is switched back to nitrogen and the substrate is annealed, preferably for about 30 minutes. It is preferable when using as the silicon dioxide substrate a silicon dioxide film grown on silicon in this manner to ; saturate the oxide film by further exposure to another oxygen anneal for times much shorter (approximately 30 ~`~ 35 seconds) than the actual oxidation times. Following this ~33232~

anneal, the gas is again switched back to nitrogen while the temperature is lowered. Other techniques for growing silicon dioxide layers on silicon will be apparent to those skilled in the art in view of the present disclosure. A cleaned silicon substrate and the silicon substrate on which has been grown a silicon dioxide layer generally would be stored in air-tight containers prior to deposition thereon of the superconducting metal oxide precursor film. While one technique for obtaining a -silicon dioxide substrate, i.e., oxidizing silicon, has been described as suitable for obtaining a silicon dioxide substrate, the silicon dioxide substrate of the invention is not limited to silicon dioxide substrates obtained in this way. For example, quartz, a commercially available form of silicon dioxide, may also be used as the silicon dioxide substrate.
~':
The superconducting metal oxide precursor film deposited on the silicon or silicon dioxide substrate 20 according to the invention disclosed herein consists -essentially of R, Ba, Cu and O. Preferably, the atomic ratio of R:Ba:Cu in the precursor film is about 1:2:3, most preferably being the stoichiometric 1:2:3. R is selected from the group of elements consisting essentially of rare earth elements and yttrium. The rare earth elements are well known to those skilled in the art .~-and include such elements as europium and neodymium.
'~
The superconducting metal oxide precursor film is deposited on the silicon or silicon dioxide substrate by any of the various physical deposition techniques well known in the art. Exemplary of physical deposition techniques are listed above. According to such techniques, the superconducting metal oxide precursor is 35 deposited from a target or targets in a gas atmosphere -~: , .

ï ~

!i ` ' ;3 - 12 - 133~32~

wherein the target comprises one of the component materials of the film or a composite of the components of the film. The target may be in powder or compacted form. If it comprises a composite of the components of the film, they may be reacted or unreacted. In certain of the examples below wherein the precursor film was deposited by triode sputtering techniques, a target was prepared by hot pressing unreacted Y2O3, BaC03 and CuO powders. As would be apparent to those skilled in the art in view of the present disclosure, other materials such as BaO2, Cu2O, BaO, acetates of R, Ba, Cu, etc, may be used in making the target. In embodiments of the deposition technique wherein the target material is an oxide~ the gas atmosphere may be selected from (i) inert gases, (ii) oxygen and (iii) a mixture of inert gas(es) and oxygen (a reactive gas). In those instances, wherein the targets are non-oxygen materials, e.g., Y, Ba and Cu, the gas atmosphere would - necessarily comprise oxygen so as to deposit an RBaCuO
material on the substrate. Preferably, during deposition o the precursor film, oxygen is present in the gas ~ atmosphere. The amount of oxygen in the gas atmosphere - is generally limited somewhat by the deposition techniques employed. Generally, in the physical deposition techniques discussed herein, the inert gas employed is preferably argon.
,,~
In the triode sputtering technique used to deposit a film on silicon and silicon dioxide substrates , 30 in Examples 1-5, a magnetically enhanced triode sputter ~; gun was employed utilizing a single, compressed composite target of unreacted materials. This target was semi-insulating and therefore required radio frequency (rf) sputtering electronics. In triode sputtering, electrons are generated by a Joule heated filament.

! ;

- 13 - ~3323~

These electrons are attracted to a positively charged anode (of about 50-60 volts) situated across from the filament. Inert gas, in the examples herein being argon, was admitted between the filament and anode. The inert gas is ionized by the accelerated electrons creating a plasma of electrons and positively charged inert gas ions. The target is situated just below the plasma and a transverse magnetic field confines the plasma near the target surface. The sputtering process begins when rf power is applied to the target causing it to become negatively biased (up to several hundred volts) with respect to the plasma. The positive inert gas ions are attracted to the negatively charged target such that atoms from the target or atom complexes are physically removed via momentum transfer. These target atoms are redeposited on any substrate in its line of sight. Due to different sputtering yields for each different specie in the composite target, a substantial presputtering -~
period (up to 20 hours) is usually needed to reach equilibrium for a new target. During this presputtering period, a shutter is utilized to prevent deposition onto the substrates. After this equilibrium is attained, subsequent presputtering of the target prior to deposition of other films from the target is generally only necessary for about 10 to lS minutes to remove any surface contamination. Oxygen gas, which is reactive with the film materials, can be admitted near the ~; substrate to insure essentially complete oxidation of the film. Flow meters regulate t~e amount of inert gas and 30 ' reactive gas (oxygen) admitted into the system and the vacuum pumping system can be throttled to permit operation at a prescribed pressure developed by the gas~es). A usual operating pressure is 0.5 to 5.0 millitorr, but it can be as high as 20 millitorr. Flow rates are selected based on the size of the chamber and ,~ .

~ ' 1 ~
,~`~. ~, ~, ~ , .` - `'` :

~ :.. ~. , : ` ` - .. :

`

the pumping rate of the vacuum system employed. For e~ample, the argon flow rates for the sputtering chamber having a volume of 100 liters (employed in the examples below) are optimally in the range of 10.0 to 35.0 standard cubic centimeters per minute (sccm); typically, 30.0 sccm is used for a chamber of that volume. The oxygen flow rate in the sputtering chamber of the examples is typically 0.1 to 5.0 sccm corresponding to a partial oxygen atmosphere of 1-3 ~.
The silicon or silicon dioxide substrate is placed opposite the target at a particular distance. The actual distance depends on the desired sputtering rate and thic~ness uniformity and also the necessary substrate isolation to prevent excessive substrate heating and ion bombardment. In the triode sputtering technique employed in the examples, this distance lies in the range of 25 to 150 mm with a typical distance being 60 mm. The substrates can also be mounted on a resistive heater which can heat the substrates during the deposition process, generally up to a temperature of less than about 650C. The actual temperature to which the substrate might be heated prior to film deposition depends e.g., on the substrate used and the particular post growth annealing schedule. In the case of a silicon substrate on which the superconducting metal oxide precursor film has been deposited by the triode sputtering technique of ~; the examples and annealed in oxygen at 900C for 10 seconds according to the invention method, we have found that it is preferable that the substrate (silicon) be unheated so as to promote better adhesion of the deposited film.

Other physical deposition methods suitable for use in this invention for applying the film onto the , ~
, ~

~:
~'`"' !~

F ,~

~ - 15 - ~3323~ :

substrate are described in "Deposition Technologies For Films And Coatings", R. F. Bunshah, Editor, Noyes Publications, Parkridge, NJ, 1982, which text is hereby expressly incorporated by reference for its teachings relative to physical deposition techniques. Still other physical deposition methods, suitable for applying the film to the substrate are known to those skilled in the art and would be apparent in view of the present disclosure. For example, the film can be deposited by 10 e-beam evaporation, ion-beam deposition, laser deposition -~
and molecular beam epitaxy (MBE). In any method of depositing the superconducting metal oxide precursor film onto the substrate, including the preferred rf triode -~
sputtering method, the conditions are most advantageously arranged so as to produce, after annealing, a film consisting essentially of a stoichiometric RBa2Cu3O6 5 7. For a given target composition, parameters such as gas pressure, gas flow rate, power input, distance from target to the substrate can be varied and optimized to effect the formation of essentially stoichiometric metal oxide. Such optimization would be within the skill of those in the art in view of the present disclosure.
:' ,.
The precursor film deposited on the silicon or silicon dioxide substrate according to this invention is deposited in a thickness of between about 0.1 and about 3 ~m. The optimal thickness of the film to be deposited would depend on its desired use. Selection of the thickness of the film deposited according to this .~ invention would be within the skill of those in the art in view of the present disclosure. It is possible to vary the physical methods and conditions of deposition over a considerable range while producing R/Ba/Cu/O films which may be subjected to the rapid thermal annealing ~' ' ' 1~

~.. ,,~,., ~ ,:, .": ,: . . ~ ~ ,,, ~ - :, ~ ~ . - ~ .
~, ~

', :' .':'. ~

-- 16 - 1332~2~

conditions of the invention. Additionally, while it is not necessary according to the disclosed invention to provide a buffer layer of another material between the substrate and the superconducting metal oxide film as has been suggested, e.g., by the above mentioned General Electric article, use of such an intermediate layer or layers in intimate contact with the substrate and film is not precluded in the invention. Use of an intermediate layer may serve, e.g., to improve adhesion, coverage, etc.

As discussed above, we have found that if we apply a special annealing schedule to the precursor films deposited on silicon and silicon dioxide substrates, the films have, after annealing in an oxygen atmosphere, substantially improved properties. This annealing procedure comprises heating the film to an annealing temperature in seconds rather than in minutes as has been commonly done, annealing ~he film in an oxygen atmosphere for seconds rather than the conventional minutes or even hours and subsequently rapidly cooling the film to less than 300C in less than 3 minutes, again more rapidly than that which has been previously suggested.

According to the method of the invention, the film/substrate composite is heated to a temperature between about 800C to 950C, preferably 850-950C, in ;~ less than about 10 seconds. Most preferably, the annealing temperature is 900 - 920C. The composite may be heated, e.g., in an oxygen atmosphere. The composite ~; is maintained at the temperature in an oxygen atmosphere ~ for between about 5 and 25 seconds to anneal the film.
- The optimal annealing time would be dependent on the thickness of the film, thicker films generally requiring longer annealing times than thinner films. The composite .
;:: -'~

,... ., ,.., "
, .. .
. ;
i ~
. .

,., . ~.. . .

` - 17 ~ ~3323~

is then cooled to less than about 300C, preferably to room temperature, in less than about 3 minutes, preferably in about 30 to 80 seconds. Generally, when cooling the composite to less than about 300C in less .~ 5 than about 3 minutes, the composite is preferably cooled ~;
to less than about 400C in less than 10 seconds. If the substrate is silicon, preferably the annealing time is 8 to 12 seconds and if the substrate is silicon dioxide the annealing time preferably is 10 to 15 seconds.
One way to carry out such rapid steps is by means of a rapid thermal processor such as one used in silicon device technology. It has the capability through high intensity lamps to raise the temperature of the lS substrate to temperatures higher than 900C in less than 10 seconds, and after annealing, it has the capability to cool the substrate rapidly, e.g., from 950C to 200-300C
in less than one minute. When using such apparatus to carry out the method of this inventiôn, the metal oxide films/silicon or silicon dioxide substrate composite is placed in the processor, such as the AG Associates Model No. 410, which is programmed to carry out an embodiment of the rapid thermal annealing schedule of the invention disclosed herein.
The invention will be further understood by ~; referring to the following detailed examples. It should be understood that the subject examples are presented by way of illustration and not by way of limitation.
i 30 Exam~les In all of the examples, the following substrate materials, processing techniques and testing procedures ~; 35 were used unless otherwise noted.

, ~ ~ .
~, .-. :.- - i : - ,: -, .,:.. ~. ~ ~.... .. : . .

- - 133232~

Silicon P-type (100) single crysta~ silicon wafers having a thickness of 400 ~m with resistivities of 20-30 ohm-cm were used as the silicon substrate and as the substrate on which was grown silicon dioxide as described below.

Cleaninq Procedure Circular wafers (i.e., disc-shaped wafers) of silicon having a diameter of 4" were first cleaned in a solution of H2O2 and H2SO4 (mixed in the ratio of 1:2 by volume) for 10 minutes. This step was followed by a 5 minute rinse in deionized water. Thereafter the native oxide was removed by a 30 second etch in buffered HF and the wafers were rinsed again in deionized water for 15 minutes after which they were spin-dried in a N2 atmosphere.

Silicon Dioxide Growth A silicon wafer cleaned by the above mentioned procedure was loaded into a furnace in a N2 atmosphere at 800C. The furnace temperature was then raised to 1000C and then the gas was changed from N2 to dry oxygen. After 60 minutes of oxidation time the gas flow was switched back to N2 and the wafer was annealed in ~2 for 30 minutes. This step was followed by an 2 anneal for 30 seconds at 1000C to saturate the oxide layer. Finally, the temperature was decreased to 800C
in the ~2 atmosphere and the wafer was removed from the furnace.

:~
~:
.~ ~

, C~ .!.
'''i :~ ' `~ ~ ` ',"'~ ., ' ' '.'.,;' ` ': ' .~`. :',~':`'~ ''. `, `. .' "`' '' ~ ~33232~ ~
- 19 - ~
. ~:
Wafer Transport I The cleaned silicon wafer and the oxidized ¦ silicon wafer, having a thickness of (50 nm) were ¦ 5 fractured into 2~ x 2~ samples, sealed in plastic boxes, -~
and then transported to a sputtering system located outside the cleanroom.

S~utterina The substrate samples were loaded into the sputtering system generally within about ten minutes after their removal from the cleanroom. The sputtering target was prepared by hot pressing at 900C and 8000 psi unreacted Y2O3, BaCO3 and CuO powders in proportions corresponding to the stoichiometric YBa2Cu3Ox composition. The powders remained essentially unreacted but were highly compacted with less than 5% porosity. Argon with 1 to 3% oxygen was used as the sputtering gas at a pressure in the range of 1 to 10 mTorr. The deposition rate was on the order of 100A/min. The films were characterized by x-ray diffraction, scanning electron microscopy (SEM), transmission electron microscopy (TEM) and x-ray ~ 25 fluorescence.
:~
:::
Oxyqen Anneal of Metal Oxide Film A light-powered rapid thermal processor (AG
Associates Model 410) was used for the oxygen anneal of ;~ the metal oxide film according to the method of the ~ invention. An atmosphere of pure oxygen (industrial .-grade) was used in the annealing process.
'~ ~, ~ 35 ~ ' :: :

l ~
i . } . . .

. ~
- 20 _ ~ 3 3 2 32~

Electrical Measurements The resistance of the films was measured by standard four-contact dc and ac techniques. Currents in the range of 1 to 100 ~A were used and the minimum voltage detectable was on the order of 10 nv. Our zero resistivity corresponds to resistivity values of less than 10 ohm~cm. The resistance at room temperature is measured by a multimeter at two points about 3mm apart.

Exam~le 1 This example compares the superconducting properties of metal oxide films made on sapphire and silicon substrates by conventional oxygen annealing schedules.
:' (a) The triode sputtering system described above was used to deposit a superconducting metal oxide film on single crystal sapphire as follows. After cleaning, the sapphire substrate was mounted on a resistive heater, the deposition chamber was closed and ~ the vacuum pumping system was turned on to evacuate the ;~ 25 chamber to low pressures, below about 10 6 torr. The target was formed as described above. A shutter was ;~ placed between the substrate and the target, the ~- sputtering gas was admitted into the chamber and the triode gun was turned on. The power to the heater was also turned on to heat the substrate to a temperature of 440C. After a few minutes of presputtering, the shutter was removed and the deposition of the Y/Ba/Cu/O film on the sapphire substrate began. After a time period of 200 minutes, a Y/Ba/Cu/O film 2 ~m thick was deposited on the sapphire substrate. Subsequently, the sputter gun ~,# ':~
~ ~:~

~ :.~ :,~ . ,' ~', '. ~':- .' ~, :

~ "''~
':'1;

?
1¦ 21 - 1 3 3 2 3 2 6 was turned off, the chamber was brought to atmospheric pressure and the substrate with the film was removed.
The as-deposited film on the sapphire was amorphous and highly resistive (nonsuperconducting). The film was subsequently annealed in oxygen in a quartz tube placed inside a resistive tubular furnace, the temperature of which was controlled by conventional means. The oxygen was passed through the tube at a flow rate of 50 sccm.
The annealing temperature was about 870C. After -annealing for about 1 hour, and cooling at a rate of 3C/minute, the film was black and highly conducting. As described above, this annealing schedule is similar to ones commonly used in the art area for films on sapphire substrates. Figure 1 shows the temperature dependence of the resistivity of the Y/Ba/Cu/O film on sapphire. The onset for superconductivity occurs above 90 K, but zero resistance is obtained at a considerably lower ~ temperature of about 65 K. These results are similar to ;~ those obtained by the prior art annealing techniques on sapphire substrates. Higher annealing temperatures, e.g.
~ abo~e 870C for films on sapphire make the ¦~ superconducting transition broader.
, ~-, :~:
I ~ ~ X-ray diffraction showed that the film on sapphire was polycrystalline. It contained mostly the orthorhombic YBa2Cu3O7 y phase and small amounts of other phases~such as Y2BaCuO5. X-ray fluorescence study revealed that the film was deficient in Cu by about 20%. The Cu deficiency appears to be the main reason for 30 ' the relatively low temperatures for which the resistance of;these films becomes zero (Tc(O)). It is expected that when the Cu content in the films is increased, for example by increasing the Cu content in the target, the Tc(O) will become larger, approaching the 85-90 K
reported in the literature.

~"

.;,~

j~.. ,. ~. ,. .,, ~ .~.. ., , ~ . ~ ~ ~ .

- 22 - ~33232~

(b) When the same physical deposition technique and oxygen anneal procedure described in Example l(a) for a sapphire substrate was employed for a similar film deposited on a silicon substrate, it was found that the film after annealing in oxygen for only 10 minutes did not show a transition to the superconducting state (zero resistance3 at any temperature down to liquid helium temperature (4.2 K). Instead, as shown in Fig. 2, the resistance of this film showed a semiconducting behavior, rapidly increasing with decreasing temperature.
Annealing for a longer period of time was found to increase the resistance of the film even further. This behavior is similar to that described in the literature for metal oxide films deposited on silicon and silicon dioxide substrates and annealed in oxygen according to conventional schedules. As recognized in the literature, this behavior arises from the rapid interdiffusion of Cu, Ba and Si during annealing.
Exam~le 2 :: ~
- In this example, a film of superconducting metal oxide on silicon was prepared according to the method of `~ 25 the invention. A film 2 ~m thick was deposited on a cleaned silicon wafer by the triode sputtering system described above. According the the annealing procedure of this invention, the film was heated to 920C in 5 seconds in oxygen, annealed in the oxygen for 10 ` ~ ~ 30 ' seconds at 920C and cooled to room temperature in 80 ;~ seconds by means of a AG Associates model 410 rapid the~rmal processor. The film was superconducting, having a Tc(O) = 46 K. Fig. 3 shows the resistance versus temperature of the metal oxide film on the silicon sub trate.
'~
,~:
'~

~' , , ,~ .,~
3 ~ ; ~
.
,."j . , . . i- .
.,~,~ ~.:,: . - -,: :i :~-:: - ~, ~.

~`

, - 23 -133232~

Examplç 3 In this example, four samples were prepared of a superconducting metal oxide film on a silicon substrate were prepared according to the method of the invention.
Each of the samples was made by depositing a metal oxide film, 2~m thick, on a silicon wafer by the triode sputtering system described above. The samples were annealed in oxygen by means of a AG Associates model 410 rapid thermal processor. For each sample the film was heated to 900C in 5 seconds in oxygen. The annealing time of the samples was varied with each sample, i.e., 5, 10, 15 and 30 seconds. The samples were all cooled to room temperature in 80 seconds. The room temperature resistance of the films on the samples as a function of the duration of the annealing period with the constant temperature of 900C is shown graphically in Fig. 4. It can be seen from Fig. 4 that the room temperature resistance of these films increases dramatically for films which were annealed less than five seconds and more than about 20 seconds. It has been shown by the prior art, that lower values of the room temperature resistivity generally correlate with better ; ~ 25 superconducting properties in YBa2Cu30y materials.

Example 4 In this example, a film of superconducting metal 30' oxide on silicon dioxide was prepared according to the ~P~ method of the invention. The silicon dioxide was grown on a wafer of silicon and exposed to oxygen as described above. The metal oxide film was deposited in a thickness of 2 ~m by the triode sputtering system techniques of Esample 2. The film was then processed by means of a AG

`,' ~
~: .

~.....

;'"~
.~

2 ~

Associates model 410 rapid thermal processor according to the following schedule. The film was heated to 920C in 5 seconds in oxygen, annealed at that temperature for 10 seconds and cooled to room temperature in R0 seconds.
The film had a TC(0) = 50 X. The resistance of the film versus temperature of the metal oxide film on the silicon dioxide substrate after annealing is shown in Fig. 5.

ExamPle 5 In this example, films (having thicknesses of 1 and 2 ~m~ of superconducting metal oxide on silicon are prepared as described in Example 2 and subjected to annealing in oxygen according to the method of the invention. The films are annealed at 920C according to the following schedule and the resultant films are superconducting.

l~m 2~m Heating 5 sec 5 sec Annealing 8 sec 10 sec Cooling 80 sec 80 sec :' .
As can be seen from the annealing times and film thickness, optimally thicker films are annealed for longer periods of time.
,:
ExamPle 6 The same rapid annealing procedure described above for films of YBaCuO deposited on silicon and silicon dioxide substrates by the triode sputtering system is applicable to films of other members of the RBaCuO superconducting oxides deposited on these types of :~ -~ .
~:

;,, ", : . ~.. :~ :.. , : - :::
, .

,- ~ . ,.

~ ~ \
l~ - 25 - ~3323~
-substrates by other physical deposition methods. An example is given hereunder for a EuBa2Cu3Ox film deposited on silicon by an electron beam deposition system.
Three separate e-guns are used, each for one of the metallic elements EU, Ba, and Cu. The guns are placed at an angle with respect to each other in a vacuum chamber so that all of them point toward the silicon substrate. A shutter is placed between the three guns and the silicon substrate, the power to each of the guns is turned on and the fluxes of Eu, Ba and Cu are individually measured by separate crystal thickness monitors. The three fluxes are then adjusted (based on previous calibrations) to supply an overall particle flux at the silicon substrate that results in a EuBaCuO film with the desired stoichiometric 1:2:3 Eu:Ba:Cu composition. For this deposition on silicon, the substrate is not heated with the substrate heater. After the adjustment of the deposition rates from the three guns, the shutter is removed and the film deposition begins. Oxygen is introduced through a capillary, ~ preferably in the vicinity of the substrate. The oxygen ¦ reacts with the incoming Eu, Ba and Cu as they are being ¦ 25 deposited on the substrate. The fluxes from the three guns are continuously monitored and maintained constant through appropriate adjustment of the power to each of ;~ the e-guns by means of a simple feedback electronic ; circuit. For typical deposition rates of 400 A/min, a 3-micron thick film is grown in about 80 minutes. After the completion of the deposition, the film on silicon is removed and placed in the rapid thermal processor for the post-growth anneal in o~ygen. The time to heat the film/substrate combination to 920C is 5 seconds, the annFaling time at 920C is 12 seconds and the cooling ,,...:

~ ?~, ~... '.`.` :..- - . :~` ~

- 26 - ~33232~

time to 200C is 30 seconds. The film has an onset for superconductivity of about 95 K and a Tc(O) of about 50 K.

In view of the disclosure, many modifications of this invention will be apparent to those skilled in the art. It is intended that all such modifications which fa'l within the true scope o this invention be included within the terms of the appended claims.

:
:

:~
~: ~

3o 3s :
~ , ..' , ~ .-. ~ .... .. . -`: ~
'~
, ,S ,;,, i., '.: . ' `~!, . ' ' ' ' ~ i ' ~

~ ,', ' . ' '' ~' . ~ . ' ., ' ~ '~ ' ' ' ' : ' ' '

Claims (11)

1. A method of making a superconducting metal oxide film on a substrate selected from the group consisting of silicon and silicon dioxide, said method comprising:
depositing a thin film of a superconducting metal oxide precursor consisting essentially of R, Ba, Cu, and O by a physical deposition technique onto said substrate in a thickness between about 0.1 and 3µm to form a film/substrate composite, wherein R is selected from the group consisting of rare earth elements and yttrium, which precursor film can be annealed in an oxygen atmosphere to yield a superconducting metal oxide film;
then heating said film/substrate composite to a temperature between about 800°C and 950°C in less than about 10 seconds;
then maintaining said film/substrate composite at said temperature in an oxygen atmosphere for between about 5 and 25 seconds to anneal said film; and then cooling said film/substrate composite to less than 300°C in less than about 3 minutes.

2. The method-according to claim 1, wherein the ratio of R:Ba:Cu present in said superconducting metal oxide precursor is 0.8-1.2 : 1.8-2.2 : 2.8-3.2.

3. The method according to claim 2, wherein said ratio of R:Ba:Cu is 1:2:3.

4. The method according to claim 1, wherein said film of said superconducting metal oxide consists essentially of RBa2Cu3O6.5-7Ø

5. The method according to claim 1, wherein said substrate is silicon and said film is annealed in said oxygen atmosphere for between about 8 and about 12 seconds.

6. The method according to claim 1, wherein said substrate is silicon dioxide and said film is annealed in said oxygen atmosphere for between about 10 and 15 seconds.

7. The method according to claim 1, wherein said film is deposited by a sputtering technique.

8. The method according to claim 1, wherein said film is annealed in said atmosphere comprising oxygen at a temperature between about 850°C and 950°C.

9. The method according to claim 1, wherein said method further comprises depositing a layer of a material on said substrate prior to depositing said thin film of said superconducting metal oxide precursor, which layer is in intimate contact with said substrate and said superconducting metal oxide precursor.

10. The method according to claim 1, wherein R is yttrium.

11. A method of making a superconducting metal oxide film on a substrate selected from the group consisting of silicon and silicon dioxide, said method comprising:
depositing a thin film of a superconducting metal oxide precursor consisting essentially of R, Ba, Cu, and O by a sputtering technique onto said substrate in a thickness between about 0.1 and 3µm to form a film/substrate composite, wherein R is selected from the group consisting of rare earth elements and yttrium, which precursor film can be annealed in an oxygen atmosphere to yield a superconducting metal oxide film;
then heating said film/substrate composite to a temperature between about 850°C and 950°C in an oxygen atmosphere in less than about 10 seconds;
then maintaining said film/substrate composite at said temperature in said oxygen atmosphere for between about 5 and 25 seconds to anneal said film; and then cooling said film/substrate composite to less than 300°C in less than about 3 minutes.