CA2025074A1 - Versatile, overpressure proof, absolute pressure sensor - Google Patents

Versatile, overpressure proof, absolute pressure sensor

Info

Publication number
CA2025074A1
CA2025074A1 CA002025074A CA2025074A CA2025074A1 CA 2025074 A1 CA2025074 A1 CA 2025074A1 CA 002025074 A CA002025074 A CA 002025074A CA 2025074 A CA2025074 A CA 2025074A CA 2025074 A1 CA2025074 A1 CA 2025074A1
Authority
CA
Canada
Prior art keywords
overpressure
versatile
pressure sensor
absolute pressure
proof
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002025074A
Other languages
French (fr)
Other versions
CA2025074C (en
Inventor
Ulrich Bonne
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Publication of CA2025074A1 publication Critical patent/CA2025074A1/en
Application granted granted Critical
Publication of CA2025074C publication Critical patent/CA2025074C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/002Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by thermal means, e.g. hypsometer

Abstract

A non membrane-based overpressure proof gas pressure microsensor. Since it is not a membrane-based microsensor but is based on an open microbridge sensor structure (Fig. 8); it is not subject to breakage caused by overpressure. A method is described to determine gas pressure from thermal conductivity, k, and volumetric specific heat, C pv.
CA002025074A 1989-12-28 1990-09-11 Versatile, overpressure proof, absolute pressure sensor Expired - Fee Related CA2025074C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/458,062 1989-12-28
US07/458,062 US5187674A (en) 1989-12-28 1989-12-28 Versatile, overpressure proof, absolute pressure sensor

Publications (2)

Publication Number Publication Date
CA2025074A1 true CA2025074A1 (en) 1991-06-29
CA2025074C CA2025074C (en) 2002-02-12

Family

ID=23819203

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002025074A Expired - Fee Related CA2025074C (en) 1989-12-28 1990-09-11 Versatile, overpressure proof, absolute pressure sensor

Country Status (6)

Country Link
US (1) US5187674A (en)
EP (1) EP0435611B1 (en)
JP (1) JP2864291B2 (en)
AT (1) ATE126884T1 (en)
CA (1) CA2025074C (en)
DE (1) DE69021853T2 (en)

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Also Published As

Publication number Publication date
DE69021853D1 (en) 1995-09-28
JPH03238334A (en) 1991-10-24
EP0435611A3 (en) 1992-07-29
CA2025074C (en) 2002-02-12
US5187674A (en) 1993-02-16
EP0435611A2 (en) 1991-07-03
JP2864291B2 (en) 1999-03-03
ATE126884T1 (en) 1995-09-15
DE69021853T2 (en) 1996-02-15
EP0435611B1 (en) 1995-08-23

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