CA2038880C - Two-beam interferometer - Google Patents
Two-beam interferometer Download PDFInfo
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- CA2038880C CA2038880C CA002038880A CA2038880A CA2038880C CA 2038880 C CA2038880 C CA 2038880C CA 002038880 A CA002038880 A CA 002038880A CA 2038880 A CA2038880 A CA 2038880A CA 2038880 C CA2038880 C CA 2038880C
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- corner cubes
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- cubes
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- 238000005520 cutting process Methods 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims abstract description 6
- 238000003754 machining Methods 0.000 claims abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
- G01J3/453—Interferometric spectrometry by correlation of the amplitudes
- G01J3/4532—Devices of compact or symmetric construction
Abstract
Two corner cubes are opposed to share one or two mirror surfaces in common thereby integrally forming two mirror groups, and driven to be reciprocatively rotated in a plane including two opposite edges thereof or a symmetry plane including an edge defined by the two common mirror surfaces, while a beam splitter is provided in front of the two corner cubes for reflecting a part of incident light and guiding the same to one of the corner cubes as well as transmitting the remaining part of the incident light and guiding the same to the other one of the corner cubes while causing interference between light components reflected from the corner cubes.
According to the present invention, a moving mechanism may simply cause reciprocative rotation movement about one center of rotation, and adjustment in assembling is extremely simple and easy to allow reduction in manufacturing cost.
A double corner cube member, which can be formed of the same material, is stable against disturbance such as vibration and temperature change.
When plane mirrors for forming the corner cubes are manufactured by machining such as cutting or grinding, it is possible to perform assembling and working in high accuracy.
According to the present invention, a moving mechanism may simply cause reciprocative rotation movement about one center of rotation, and adjustment in assembling is extremely simple and easy to allow reduction in manufacturing cost.
A double corner cube member, which can be formed of the same material, is stable against disturbance such as vibration and temperature change.
When plane mirrors for forming the corner cubes are manufactured by machining such as cutting or grinding, it is possible to perform assembling and working in high accuracy.
Description
~~r3~C)~~
TITLE OF THE INVENTION
Two-Beam Interferometer BACKGROUND OF THE INVENTION
Field of the Invention The present invention relates to a two-beam inter-ferometer, which is applied to a Fourier transform infrared spectrophotometer (FTIR) or the like.
Description of the Background Art A Michelson interferometer, which is formed by two plane mirrors and a beam splitter, is employed as a two-beam interferometer for a Fourier transform infrared spectrophotometer. One of the two plane mirrors is a fixed mirror, and the other one is a moving mirror, which is continuously slidable.
Such a two-beam interferometer is particularly sen-sitive to change in environmental temperature, vibration, and the like. To this end, a dynamic alignment method utilizing a laser beam is employed as one of means for stabilizing interference conditions. However, the dynamic alignment method tends to disadvantageously complicate an apparatus employed therefor.
In another method, a corner cube is employed in place of a mirror, as an optical system which is resistant against vibration. In a conventional two-beam interferometer, a moving mirror for a Michelson interferometer is formed ~b ~ i~l ~) (~
~:~~G!(~~.)C.J
by a corner cube, which is supported by a mechanical bearing and slid in the horizontal direction.
In another conventional two-beam interferometer, two corner cubes are mounted on metal support rods respectively to be obliquely opposite to each other in a plane, and reciprocatively rotated in the plane in the opposite state.
In the aforementioned two-beam interferometer using the mechanical bearing, the summits of the corner cube are varied with respect to an optical axis of incident Light, to inevitably cause discrepancy of inferference conditions.
In the system of rotating the two corner cubes in an opposite state, on the other hand, discrepancy of interference conditions is inevitably caused by assembling conditions for the moving portions.
SUMMARY OF THE INVENTION
An object of the present invention is to provide a two-beam interferometer which is stable against temperature change and disturbance such as vibration, by simplifying adjustment in assembling of an interferometer comprising two opposite corner cubes.
According to the present invention, two corner cubes are integrally formed to be obliquely opposite to each other and to share one mirror surface as a common plane, and the integrated two corner cubes are driven to be Z~~
reciprocatively rotated while unidirectionally maintaining a plane including opposite edges of the corner cubes.
In another aspect of the present invention, two cor-ner cubes are integrally formed to be obliquely opposite to each other and to share two mirror surfaces as common planes, and the integrated two corner cubes are driven to be reciprocatively rotated while unidirectionally main-taming a symmetry plane including an edge which is defined by the two common mirror surfaces.
In order to form the inventive two-beam interfero-meter, a beam splitter is provided in front of the two corner cubes, to reflect a part of incident light and guide the same to one of the corner cubes as well as to transmit the remaining part of the incident light and guide the same to the other corner cube, while causing interference between light components reflected from the two corner cubes.
In order to improve assembling accuracy, the two cor-ner cubes may be manufactured by machining such as cutting or grinding.
When the two corner cubes are rotated in the plane including the opposite edges or the symmetry plane including the edge which is defined by the common two mirror surfaces, optical path difference between two arms of the interfero-meter is changed. The two corner cubes are continuously ~~~~~8~~
reciprocatively rotated, to implement a continous sliding type two-beam interferometer.
Even if the inclident light upon the beam splitter is shifted by disturbance such as vibration, the light components reflected from the two corner cubes interfere with each other through the beam splitter.
These and other objects, features, aspects and advan-tages of the present invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
Fig. 1 is a perspective view showing an essential part of a first embodiment of the present invention;
Fig. 2 is a partially fragmented plan view showing mirrors and a driving mechanism of the first embodiment;
Fig. 3 is a left side elevational view of the part shown in Fig. 2;
Fig. 4 is a front elevational view of the part shown in Fig. 2;
Figs. 5 and 6 schematically illustrate the operation of the first embodiment;
Fig. 7 is a perspective view showing an essential part of a second embodiment;
TITLE OF THE INVENTION
Two-Beam Interferometer BACKGROUND OF THE INVENTION
Field of the Invention The present invention relates to a two-beam inter-ferometer, which is applied to a Fourier transform infrared spectrophotometer (FTIR) or the like.
Description of the Background Art A Michelson interferometer, which is formed by two plane mirrors and a beam splitter, is employed as a two-beam interferometer for a Fourier transform infrared spectrophotometer. One of the two plane mirrors is a fixed mirror, and the other one is a moving mirror, which is continuously slidable.
Such a two-beam interferometer is particularly sen-sitive to change in environmental temperature, vibration, and the like. To this end, a dynamic alignment method utilizing a laser beam is employed as one of means for stabilizing interference conditions. However, the dynamic alignment method tends to disadvantageously complicate an apparatus employed therefor.
In another method, a corner cube is employed in place of a mirror, as an optical system which is resistant against vibration. In a conventional two-beam interferometer, a moving mirror for a Michelson interferometer is formed ~b ~ i~l ~) (~
~:~~G!(~~.)C.J
by a corner cube, which is supported by a mechanical bearing and slid in the horizontal direction.
In another conventional two-beam interferometer, two corner cubes are mounted on metal support rods respectively to be obliquely opposite to each other in a plane, and reciprocatively rotated in the plane in the opposite state.
In the aforementioned two-beam interferometer using the mechanical bearing, the summits of the corner cube are varied with respect to an optical axis of incident Light, to inevitably cause discrepancy of inferference conditions.
In the system of rotating the two corner cubes in an opposite state, on the other hand, discrepancy of interference conditions is inevitably caused by assembling conditions for the moving portions.
SUMMARY OF THE INVENTION
An object of the present invention is to provide a two-beam interferometer which is stable against temperature change and disturbance such as vibration, by simplifying adjustment in assembling of an interferometer comprising two opposite corner cubes.
According to the present invention, two corner cubes are integrally formed to be obliquely opposite to each other and to share one mirror surface as a common plane, and the integrated two corner cubes are driven to be Z~~
reciprocatively rotated while unidirectionally maintaining a plane including opposite edges of the corner cubes.
In another aspect of the present invention, two cor-ner cubes are integrally formed to be obliquely opposite to each other and to share two mirror surfaces as common planes, and the integrated two corner cubes are driven to be reciprocatively rotated while unidirectionally main-taming a symmetry plane including an edge which is defined by the two common mirror surfaces.
In order to form the inventive two-beam interfero-meter, a beam splitter is provided in front of the two corner cubes, to reflect a part of incident light and guide the same to one of the corner cubes as well as to transmit the remaining part of the incident light and guide the same to the other corner cube, while causing interference between light components reflected from the two corner cubes.
In order to improve assembling accuracy, the two cor-ner cubes may be manufactured by machining such as cutting or grinding.
When the two corner cubes are rotated in the plane including the opposite edges or the symmetry plane including the edge which is defined by the common two mirror surfaces, optical path difference between two arms of the interfero-meter is changed. The two corner cubes are continuously ~~~~~8~~
reciprocatively rotated, to implement a continous sliding type two-beam interferometer.
Even if the inclident light upon the beam splitter is shifted by disturbance such as vibration, the light components reflected from the two corner cubes interfere with each other through the beam splitter.
These and other objects, features, aspects and advan-tages of the present invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
Fig. 1 is a perspective view showing an essential part of a first embodiment of the present invention;
Fig. 2 is a partially fragmented plan view showing mirrors and a driving mechanism of the first embodiment;
Fig. 3 is a left side elevational view of the part shown in Fig. 2;
Fig. 4 is a front elevational view of the part shown in Fig. 2;
Figs. 5 and 6 schematically illustrate the operation of the first embodiment;
Fig. 7 is a perspective view showing an essential part of a second embodiment;
~~~~~~~a Fig. 8 is a plan view showing a mirror portion of the second embodiment;
Fig. 9 is a front elevational view of the mirror por-tion shown in Fig. 8; and Fig. 10 is a left side elevational view of the mirror portion shown in Fig. 9.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
Figs. 1 to 4 illustrate a first embodiment of the inventive two-beam interferometer, which employs a double corner cube member 2, dissimilarly to an ordinary Michelson interferometer.
The double corner cube member 2 is assembled by bonding or screwing five cut plane mirrors in all. A first corner cube 4 is formed by plane mirrors 4a, 4b and 6, and a second corner cube 8 is formed by plane mirrors 8a, 8b and 6.
The plane mirror 6 is common to the first and second corner cubes 4 and 8.
Adjacent surfaces of the corner cubes 4 and 8 are at right angles to each other, and an error in assembling accuracy from the right angle is within a range of about 2 to 5 seconds (angle). According to the existing technique, it is easy to work the mirrors in such high accuracy.
An edge 10 which is defined by the two mirror surfaces 4a and 4b of the first corner cube 4 and an edge 12 which is defined by the two mirror surfaces 8a and 8b of the second corner cube 8 are parallel to each other, while an end of a connecting rod 16 is screwed on a back surface of the mirror surface 6, which is common to the two corner cubes 4 and 8, in a plane 14 including the two,edges 10 and 12. A rotary bearing 18 is embedded in the connecting rod 16 to be rotatable in the plane 14 (horizontal plane in this embodiment) including the two edges 10 and 12, whereby the two corner cubes 4 and 8 can be freely rotated while maintaining the plane 14 at the same position.
A movable portion 20 of a linear motor is screwed on the other end of the connecting rod 16, and a coil 22 is wound on the movable portion 20. This movable portion is combined with a stator 24 of the linear motor. A
current is fed to the coil 22 to cause Lorentz's force 15 between the stator 24 and the movable portion 20, whereby the movable portion 20 is reciprocated in a limited range.
This reciprocation rotates the connecting rod 16 about the rotary bearing 18 in a reciprocative manner, as shown in Fig. 2 by an arrow.
20 As shown in Fig. 1, a beam splitter 26~and a compen-sator 28 are provided in front of a central portion of the double corner cube member 2, in order to form an interferometer. A part 32 of an incident ray 30 is ref-lected by the beam splitter 26 to be incident upon the first corner cube 4, and reflected by the first. corner ~J
cube 4 to be again incident upon the beam splitter 26.
In the incident ray 30, a ray 34 transmitted through the beam splitter 26 is incident upon the second corner cube 8, and reflected by the second corner cube 8 to be again incident upon the beam splitter 26. The rays reflected from the corner cubes 4 and 8 form interferent light 36, and guided to a sample chamber.
The operation of this embodiment is now described.
Fig. 5 shows such a state that no optical path dif-ference is caused between two arms of the interferometer.
On the other hand, Fig. 6 shows such a state that the double corner cube member 2 (corner cubes 4 and 8) is rotated about the rotary bearing 18, to cause optical path difference between the two arms. Due to such reciprocative rotation movement about the rotary bearing 18, a continuous sliding type two-beam interferometer is defined. Figs.
5 and 6 are two-dimensional model diagrams.
Fig. 5 also shows shifting of the incident ray 30 which is caused by disturbance such as vibration. Also in this case, interferent light can be stably obtained by virtue of the corner cubes 4 and 8.
A second embodiment of the present invention is now described with reference to Figs. 7 to 10.
A double corner cube member 42 is assembled by four cut plane mirrors in all. A first corner cube 44 is formed ~'~~~5 by plane mirrors 45, 46 and 47, and a second corner cube 49 is formed by plane mirrors 46, 47 and 48. The plane mirrors 46 and 47, which are common to the first and second corner cubes 44 and 49, are perpendicular to each other.
Both the plane mirrors 45 and 48 are perpendicular to the common plane mirrors 46 and 47. A connecting rod 56 is mounted on back surfaces of the two plane mirrors 46 and 47 in a vertical symmetry plane 54 including an edge 50 which is defined by the two common plane mirrors 46 and 47. A rotary bearing 58 is embedded in the connecting rod 56, so that the double corner cube member 42 is ro-tatable in the symmetry plane 54 (horizontal plane in this embodiment). Thus, the two corner cubes 44 and 49 can be freely rotated about the rotary bearing 58, while main-to ming the plane 54 in the same position.
The connecting rod 56 is provided on its other end with the same driving mechanism as that shown in Figs.
2 and 3.
As shown in Fig. 7, a beam splitter 26 and a compen-Bator 28 are provided in front of a central portion of the double corner cube member 42, to form an interferometer.
The operation of the interferometer according to the embodiment shown in Fig. 7 is identical to that of the embodiment shown in Fig. 1.
_ g -~~~l~~~JC);
2 ~ !. U C Vii) While the double corner cube member 2 is assembled by five cut plane mirrors in the first embodiment and the double corner cube member 42 is assembled by four cut plane mirrors in the second embodiment, it is also possible to manufacture an integrated double corner cube from the first stage by cutting a single base material. Such a method of cutting a single base material requires no assembling step, and reduces individual difference.
Although the plane including the opposite edges of the two corner cubes or the symmetry plane including the edge defined by the two common mirror surfaces is hori-zontally arranged in each of the embodiment, such a plane may not necessarily be maintained in the horizontal state but may be arranged along any arbitrary direction such as a vertical direction.
Further, although the connecting rod 16 or 56 is pro-vided in the plane 14 including the opposite edges 10 and 12 or the plane 54 including the edge 50, such a connecting rod 16 or 56 may be provided in a plane which is parallel to the plane 14 or 54.
According to the present invention, two mirror groups are integrally formed by oppositely arranging two corner cubes to share one or two mirror surfaces in common, and reciprocative rotation movement is made in a plane including two opposite.edges or a symmetry plane including an edge _ g _ ~~ ~a defined by the two common mirror surfaces, whereby a moving mechanism may simply cause reciprocative rotation movement about one center of rotation, and adjustment in assembling is extremely simple and easy. Thus, the two-beam inter-s ferometer can be manufactured at a low cost.
Since the double corner cube member can be formed of the same material, the interferometer is stable against temperature change. Further, the inventive interferometer is also stable against disturbance such as vibration.
When plane mirrors for forming corner cubes are manu-factured by machining such as cutting or grinding, it is possible to assemble and work the interferometer in high accuracy.
The invention may be embodied in other specific forms without departing from the spirit or essential character-istics thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing des-cription and all changes which come within the meaning and range of equivalency of the claims are therefore in-tended to be embraced therein.
Fig. 9 is a front elevational view of the mirror por-tion shown in Fig. 8; and Fig. 10 is a left side elevational view of the mirror portion shown in Fig. 9.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
Figs. 1 to 4 illustrate a first embodiment of the inventive two-beam interferometer, which employs a double corner cube member 2, dissimilarly to an ordinary Michelson interferometer.
The double corner cube member 2 is assembled by bonding or screwing five cut plane mirrors in all. A first corner cube 4 is formed by plane mirrors 4a, 4b and 6, and a second corner cube 8 is formed by plane mirrors 8a, 8b and 6.
The plane mirror 6 is common to the first and second corner cubes 4 and 8.
Adjacent surfaces of the corner cubes 4 and 8 are at right angles to each other, and an error in assembling accuracy from the right angle is within a range of about 2 to 5 seconds (angle). According to the existing technique, it is easy to work the mirrors in such high accuracy.
An edge 10 which is defined by the two mirror surfaces 4a and 4b of the first corner cube 4 and an edge 12 which is defined by the two mirror surfaces 8a and 8b of the second corner cube 8 are parallel to each other, while an end of a connecting rod 16 is screwed on a back surface of the mirror surface 6, which is common to the two corner cubes 4 and 8, in a plane 14 including the two,edges 10 and 12. A rotary bearing 18 is embedded in the connecting rod 16 to be rotatable in the plane 14 (horizontal plane in this embodiment) including the two edges 10 and 12, whereby the two corner cubes 4 and 8 can be freely rotated while maintaining the plane 14 at the same position.
A movable portion 20 of a linear motor is screwed on the other end of the connecting rod 16, and a coil 22 is wound on the movable portion 20. This movable portion is combined with a stator 24 of the linear motor. A
current is fed to the coil 22 to cause Lorentz's force 15 between the stator 24 and the movable portion 20, whereby the movable portion 20 is reciprocated in a limited range.
This reciprocation rotates the connecting rod 16 about the rotary bearing 18 in a reciprocative manner, as shown in Fig. 2 by an arrow.
20 As shown in Fig. 1, a beam splitter 26~and a compen-sator 28 are provided in front of a central portion of the double corner cube member 2, in order to form an interferometer. A part 32 of an incident ray 30 is ref-lected by the beam splitter 26 to be incident upon the first corner cube 4, and reflected by the first. corner ~J
cube 4 to be again incident upon the beam splitter 26.
In the incident ray 30, a ray 34 transmitted through the beam splitter 26 is incident upon the second corner cube 8, and reflected by the second corner cube 8 to be again incident upon the beam splitter 26. The rays reflected from the corner cubes 4 and 8 form interferent light 36, and guided to a sample chamber.
The operation of this embodiment is now described.
Fig. 5 shows such a state that no optical path dif-ference is caused between two arms of the interferometer.
On the other hand, Fig. 6 shows such a state that the double corner cube member 2 (corner cubes 4 and 8) is rotated about the rotary bearing 18, to cause optical path difference between the two arms. Due to such reciprocative rotation movement about the rotary bearing 18, a continuous sliding type two-beam interferometer is defined. Figs.
5 and 6 are two-dimensional model diagrams.
Fig. 5 also shows shifting of the incident ray 30 which is caused by disturbance such as vibration. Also in this case, interferent light can be stably obtained by virtue of the corner cubes 4 and 8.
A second embodiment of the present invention is now described with reference to Figs. 7 to 10.
A double corner cube member 42 is assembled by four cut plane mirrors in all. A first corner cube 44 is formed ~'~~~5 by plane mirrors 45, 46 and 47, and a second corner cube 49 is formed by plane mirrors 46, 47 and 48. The plane mirrors 46 and 47, which are common to the first and second corner cubes 44 and 49, are perpendicular to each other.
Both the plane mirrors 45 and 48 are perpendicular to the common plane mirrors 46 and 47. A connecting rod 56 is mounted on back surfaces of the two plane mirrors 46 and 47 in a vertical symmetry plane 54 including an edge 50 which is defined by the two common plane mirrors 46 and 47. A rotary bearing 58 is embedded in the connecting rod 56, so that the double corner cube member 42 is ro-tatable in the symmetry plane 54 (horizontal plane in this embodiment). Thus, the two corner cubes 44 and 49 can be freely rotated about the rotary bearing 58, while main-to ming the plane 54 in the same position.
The connecting rod 56 is provided on its other end with the same driving mechanism as that shown in Figs.
2 and 3.
As shown in Fig. 7, a beam splitter 26 and a compen-Bator 28 are provided in front of a central portion of the double corner cube member 42, to form an interferometer.
The operation of the interferometer according to the embodiment shown in Fig. 7 is identical to that of the embodiment shown in Fig. 1.
_ g -~~~l~~~JC);
2 ~ !. U C Vii) While the double corner cube member 2 is assembled by five cut plane mirrors in the first embodiment and the double corner cube member 42 is assembled by four cut plane mirrors in the second embodiment, it is also possible to manufacture an integrated double corner cube from the first stage by cutting a single base material. Such a method of cutting a single base material requires no assembling step, and reduces individual difference.
Although the plane including the opposite edges of the two corner cubes or the symmetry plane including the edge defined by the two common mirror surfaces is hori-zontally arranged in each of the embodiment, such a plane may not necessarily be maintained in the horizontal state but may be arranged along any arbitrary direction such as a vertical direction.
Further, although the connecting rod 16 or 56 is pro-vided in the plane 14 including the opposite edges 10 and 12 or the plane 54 including the edge 50, such a connecting rod 16 or 56 may be provided in a plane which is parallel to the plane 14 or 54.
According to the present invention, two mirror groups are integrally formed by oppositely arranging two corner cubes to share one or two mirror surfaces in common, and reciprocative rotation movement is made in a plane including two opposite.edges or a symmetry plane including an edge _ g _ ~~ ~a defined by the two common mirror surfaces, whereby a moving mechanism may simply cause reciprocative rotation movement about one center of rotation, and adjustment in assembling is extremely simple and easy. Thus, the two-beam inter-s ferometer can be manufactured at a low cost.
Since the double corner cube member can be formed of the same material, the interferometer is stable against temperature change. Further, the inventive interferometer is also stable against disturbance such as vibration.
When plane mirrors for forming corner cubes are manu-factured by machining such as cutting or grinding, it is possible to assemble and work the interferometer in high accuracy.
The invention may be embodied in other specific forms without departing from the spirit or essential character-istics thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing des-cription and all changes which come within the meaning and range of equivalency of the claims are therefore in-tended to be embraced therein.
Claims (12)
1. A two-beam interferometer comprising:
two corner cubes integrally formed to be obliquely opposite to each other and to share one mirror surface as a common plane, said integrated two corner cubes being driven to be reciprocatively rotated in a plane including opposite edges of said two corner cubes; and a beam splitter provided in front of said two corner cubes for reflecting a part of incident light and guiding the same to one of said corner cubes as well as transmitting the remaining part of said incident light and guiding the same to the other one of said corner cubes while causing interference between light components reflected from said corner cubes.
two corner cubes integrally formed to be obliquely opposite to each other and to share one mirror surface as a common plane, said integrated two corner cubes being driven to be reciprocatively rotated in a plane including opposite edges of said two corner cubes; and a beam splitter provided in front of said two corner cubes for reflecting a part of incident light and guiding the same to one of said corner cubes as well as transmitting the remaining part of said incident light and guiding the same to the other one of said corner cubes while causing interference between light components reflected from said corner cubes.
2. A two-beam interferometer in accordance with claim 1, wherein said two corner cubes are formed by assembling cut plane mirrors manufactured by machining.
3. A two-beam interferometer in accordance with claim 2, wherein an error of an angle formed between adjacent surfaces from the right angle is within five seconds in each said corner cube.
4. A two-beam interferometer in accordance with claim 1, wherein said two corner cubes are manufactured in the form of an integrated corner cube member from the first stage by cutting a single base material.
5. A two-beam interferometer in accordance with claim 1, wherein an end of a connecting rod is mounted on a back surface of said common mirror surface in the plane including opposite edges of said two corner cubes or a plane which is parallel thereto in order to rotatingly drive said two corner cubes, while a driving source is mounted on the other end of said connecting rod and a center of rotation is provided at the central portion of said connecting rod.
6. A two-beam interferometer in accordance with claim 5, wherein said driving source is a linear motor.
7. A two-beam interferometer comprising:
two corner cubes integrally formed to be obliquely opposite to each other and to share two mirror surfaces as common planes, said integrated two corner cubes being driven to be reciprocatively rotated in a symmetry plane including an edge defined by said common two mirror surfaces;
and a beam splitter provided in front of said two corner cubes for reflecting a part of incident light and guiding the same to one of said corner cubes as well as transmitting the remaining part of said incident light and guiding the same to the other one of said corner cubes while causing interference between light components reflected from said two corner cubes.
two corner cubes integrally formed to be obliquely opposite to each other and to share two mirror surfaces as common planes, said integrated two corner cubes being driven to be reciprocatively rotated in a symmetry plane including an edge defined by said common two mirror surfaces;
and a beam splitter provided in front of said two corner cubes for reflecting a part of incident light and guiding the same to one of said corner cubes as well as transmitting the remaining part of said incident light and guiding the same to the other one of said corner cubes while causing interference between light components reflected from said two corner cubes.
8. A two-beam interferometer in accordance with claim 7, wherein said two corner cubes are formed by assembling cut plane mirrors manufactured by machining.
9. A two-beam interferometer in accordance with claim 7, wherein an error of an angle formed between adjacent surfaces from the right angle is within five seconds in each said corner cube.
10. A two-beam interferometer in accordance with claim 7, wherein said two corner cubes are manufactured in the form of an integrated corner cube member from the first stage by cutting a single base material.
11. A two-beam interferometer in accordance with claim 7, wherein an end of a connecting rod is mounted on back surfaces of said common mirror surfaces in the symmetry plane including the edge defined by the common two mirror surfaces or a plane which is parallel thereto in order to rotatingly drive said two corner cubes, while a driving source is mounted on the other end of said connecting rod and a center of rotation is provided at the central portion of said connecting rod.
12. A two-beam interferometer in accordance with claim 7, wherein said driving source is a linear motor.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP261576/1990 | 1990-09-29 | ||
| JP26157690 | 1990-09-29 | ||
| JP339548/1990 | 1990-11-30 | ||
| JP33954890A JPH0723857B2 (en) | 1990-09-29 | 1990-11-30 | Two-beam interferometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2038880A1 CA2038880A1 (en) | 1992-03-30 |
| CA2038880C true CA2038880C (en) | 2001-01-02 |
Family
ID=26545137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002038880A Expired - Lifetime CA2038880C (en) | 1990-09-29 | 1991-03-22 | Two-beam interferometer |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US5243404A (en) |
| EP (1) | EP0478880B1 (en) |
| CN (1) | CN1025757C (en) |
| CA (1) | CA2038880C (en) |
| DE (1) | DE69106470T2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20000035968A (en) | 1996-09-04 | 2000-06-26 | 그레이스 스티븐 에스. | Floor, wall or ceiling covering |
| US6504614B1 (en) * | 1999-10-08 | 2003-01-07 | Rio Grande Medical Technologies, Inc. | Interferometer spectrometer with reduced alignment sensitivity |
| US6842252B1 (en) | 2000-11-15 | 2005-01-11 | Burleigh Products Group, Inc. | Laser wavelength meter |
| US7742172B2 (en) * | 2002-09-18 | 2010-06-22 | Teraview Limited | Apparatus for varying the path length of a beam of radiation |
| WO2013078281A2 (en) * | 2011-11-23 | 2013-05-30 | Ftrx Llc | Quasi- translator, fourier modulator, fourier spectrometer, motion control system and methods for controlling same, and signal processor circuit |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3005520C2 (en) * | 1980-02-14 | 1983-05-05 | Kayser-Threde GmbH, 8000 München | Two-beam interferometer for Fourier spectroscopy |
| EP0171836B1 (en) * | 1984-07-18 | 1992-04-01 | Philips Electronics Uk Limited | Interferometer |
| DE3736694A1 (en) * | 1987-10-29 | 1989-06-01 | Kayser Threde Gmbh | METHOD AND DEVICE FOR THE CONTACTLESS DRIVE OF A DOUBLE PENDULUM INTERFEROMETER |
-
1991
- 1991-03-22 CA CA002038880A patent/CA2038880C/en not_active Expired - Lifetime
- 1991-03-26 US US07/675,180 patent/US5243404A/en not_active Expired - Lifetime
- 1991-03-27 EP EP91104927A patent/EP0478880B1/en not_active Expired - Lifetime
- 1991-03-27 DE DE69106470T patent/DE69106470T2/en not_active Expired - Fee Related
- 1991-09-28 CN CN91109595A patent/CN1025757C/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE69106470T2 (en) | 1995-05-11 |
| EP0478880B1 (en) | 1995-01-04 |
| US5243404A (en) | 1993-09-07 |
| EP0478880A1 (en) | 1992-04-08 |
| CN1025757C (en) | 1994-08-24 |
| DE69106470D1 (en) | 1995-02-16 |
| CN1062037A (en) | 1992-06-17 |
| CA2038880A1 (en) | 1992-03-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed | ||
| MKEC | Expiry (correction) |
Effective date: 20121202 |