CA2050374C - Heat sink for electronic circuitry - Google Patents
Heat sink for electronic circuitryInfo
- Publication number
- CA2050374C CA2050374C CA002050374A CA2050374A CA2050374C CA 2050374 C CA2050374 C CA 2050374C CA 002050374 A CA002050374 A CA 002050374A CA 2050374 A CA2050374 A CA 2050374A CA 2050374 C CA2050374 C CA 2050374C
- Authority
- CA
- Canada
- Prior art keywords
- article
- insert
- heat
- sink
- alpha
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3672—Foil-like cooling fins or heat sinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73253—Bump and layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
Abstract
A thermally balanced electronic circuit having an element mounted on a suitable support base, a heat-sink having a bottom portion contacting the element and at least one flange projecting from the bottom portion, and a stress-balancing insert positioned on the bottom portion of the heat-sink and at least partially coextensive with the element, said bottom portion of the heat sink being secured to the element and to the insert by means of an adhesive. The insert is of a material having a coefficient of thermal expansion (TCE), .alpha.1, different from the TCE, .alpha.2, of the heat sink. The TCE of the insert may be intermediate the TCE of the heat sink and the TCE, .alpha.3, of the material of the element. Preferably, the TCE of the insert approximately matches or is equal to the TCE of the material of the element.
The element, the bottom portion of the heat-sink, the insert and the adhesive layers form a balanced "sandwich" structure. Such a structure will exhibit planar thermal expansion equivalent to the outer skins of the sandwich structure, e.g.
of the element and the insert. Expansion of the structure normal to the element and the insert accommodates the balance of the absolute volumetric change of components of the sandwich structure not accounted for in the skins.
The element, the bottom portion of the heat-sink, the insert and the adhesive layers form a balanced "sandwich" structure. Such a structure will exhibit planar thermal expansion equivalent to the outer skins of the sandwich structure, e.g.
of the element and the insert. Expansion of the structure normal to the element and the insert accommodates the balance of the absolute volumetric change of components of the sandwich structure not accounted for in the skins.
Description
1- 205037~
HEAT SINK FOR ELECTRONIC CIRCUITRY
Technical Field This invention relates to heat sinks for the removal of heat from elements of electronic circuits, such as Hybrid Integrated Circuits (HICs).
5 Back~round of the Invention Hybrid Integrated Circuits (HICs) often include active chips, such as Integrated Circuit (IC) chips, or some other electronic and other type of active or passive elements (or devices) which during the operation either generate heat or are subjected to heat generated by other elements of the HIC or the environment. Some 10 of the elements may be susceptible to damage due to this heat, e.g. separation of an element from a support base, fracture of the element, fracture of conductors connecting the element to the support base, changes in operation characteristics, and the like.
To remove the heat from the individual elements of the HIC, at least 15 some of the elements, prone to be affected by the heat, may be selectively provided with a "heat sink" of a high heat conductivity metal to pick up and transfer the heat away from the element.
U.S. Patent 4,408,220 proposes a heat-dissipator (heat-sink) structure including top and bottom plates interconnected by an interm~ te section, which 20 structure is formed so as to be slidably mounted on an IC package which is in turn mounted on a support base, such as a printed circuit board. The top plate is resiliently connected and may contact a heat spreader plate which may be common to a number of such heat-sinks. However, with further mini~t~lrization and au~olllaLion of m~nnf~tnre and assembly, such a mechanically secured heat-sink 25 may prove difficult to use.
It is, thus, desirable to provide HICs in which a heat-sink is secured to a chip or device so as to form a unitized assembly. It is also important that the structure exhibits a minimllm of stress during changes in lempcl~ture.
Summary of the Invention The present invention is an electronic circuit having an element mounted on a suitable support base, a heat-sink having a bottom portion contacting the element and at least one flange projecting from the bottom portion, and a stress-balancing insert positioned on the bottom portion of the heat-sink and at least partially coextensive with the element, said bottom portion of the heat sink being - 2 - 205 037 ~
secured to the element and to the insert by means of an adhesive. The insert is of a material having a coefficient of thermal expansion (TCE), a" different from the TCE, a~, of the heat sink. The TCE of the insert may be intermediate the TCE of the heat sink and the TCE, a3, of the material of the element. Preferably, the TCE of the insert approximately matches the TCE of the material of the element.
The element, the bottom portion of the heat-sink, the insert and the adhesive layers form a balanced "sandwich" skucture. Such a structure will exhibit planar thermal expansion equivalent to the outer skins of the sandwich structure, e.g. of the element and the insert. Expansion of the structure normal to the element and the insert accommodates the balance of the absolute volumetric change of components of the sandwich structure not accounted for in the skins.
Brief Description of the Drawin~
The sole FIGURE is a cross-sectional view showing an exemplary device constructed in accordance with the present invention.
Detailed Description Reference numeral I designates an exemplary eleckonic circuit, such as Hybrid Integrated Circuit (HIC) only a portion of which is shown. Reference numeral 2 designates a support base made of a suitable material such as ceramic, semiconductor (e.g. silicon), glass, plastic (e.g. epoxy), glass fiber-reinforced epoxy, resin-coated metal (e.g. epoxy coated aluminum), molded circuit board or other suitable materials.
An element, 3, is mounted on the support base in a suitable manner. In an exemplary embodiment, element 3 is an active semiconductor chip, such as an Integrated Circuit (IC) chip. Further examples of element 3 are passive semiconductor chips, oscillators, optical devices and optical fiber interconnections. Chip 3 is mounted on the support base in a so-called "flip-chip" manner in conductive contact between circuitry on the chip and conductive leads and pads (not shown) on the support base. The chip is secured to the support base, e.g. at 4, in a conventional manner such as by solder, alloying, gold eutectic bonding, conductive adhesive, non-conductive adhesive and the like.
In an exemplary embodiment, heat-sink 6 is attached to an upper surface of chip 3, that is to that surface of the chip which is opposite to the surface facing the support base. Heat sink, 6, has a bottom portion, 7, contacting the element and at least ~A
~ - 2a - ~0~37i'1 one flange, 8, projecting from the bottom portion, for conducting the heat away from the element. The heat-sink is of a suitable metal or alloy having high heat conductivity, such as aluminum, copper, nickel, their alloys, brass, bronze, stainless steel. Noble metals or their alloys such as gold, palladium, platinum, silver, can be S used. The metal should not lead to cont~min~tion of the element. The free end of said at least one flange 8 may freely project from the heat sink. Alternatively, the ~ ~
~ ^3~ ~050374 free end may be provided with a heat-dissipating portion (not shown). Also, the free end may be in contact with a common heat spreader (not shown) which is either provided specifically for dissipating the heat tr~n~mitted by each flange or forms a part of a metallic housing about the circuit.
Flange 8 may be a single flange, or it may include at least two flanges.
Alternatively, flange 8 may form walls of a cup-shaped heat-sink. Also, the heatsink may contact more than one element and, conveniently, may have more than oneflange projecting from the bottom portion.
In the exemplary embodiment, the heat-sink has a U-shaped 10 configuration with bottom portion 7 and flanges 8. The bottom portion is secured to the upper surface of chip 3 by means of an adhesive, 9, having suitable temperature resistance and processing characteristics. Typically, adhesives selected from silicone, polyimide, acrylic, and epoxy resins may be used in HIC devices. An epoxy resin, such as Epon 828 (Shell Chemical Company) cured with 2 ethyl 4 15 methyl imid~ole (Pacific Anchor Corp.) or with other curing agents such as nadic-methyl anhydride (Miller-Stephenson Corp.) is useful. However, conventional attachment of the heat-sink to the element, e.g. a chip, by means of an adhesive, leads to a strained unbalanced structure. This may lead to significant thermally-in(l~lced stresses in the chip due to differences in respective coefficients of thermal 20 e~rp~n~ion (TCEs) of the components of the structure. For example a TCE of anepoxy adhesive may vary from 15 to 60 ppm/C, of a silicone rubber from 150-350 ppm/C and polyimide resin from 10 to 20 ppm/C while the TCE of a silicon elçm~nt may be only 2 to 3 ppm/C and the metals of the heat-sink may have a TCEwithin a range of from 1 to 13 ppm/C.
Stresses caused by differences in TOE may lead to an improper operation of the device or may render the device inoperable, especially if the stresses result in a fracture of the device (e.g. of a chip) or of conductors connecting the device to a ~ ;uiL~ on the support base or both. Because respective TCEs of adhesive 9, chip 3 and heat-sink 6 differ each from another, this type of a structure 30 could lead to ~ignific~nt thermally in~1ced stresses which may result from subsequent manufacturing steps involving heat, such as a curing step, a soldering step and the like, and/or may arise due to the heat produced by the element itself during the operation of the device, by some other elements located in the vicinity of chip 3 or by an environment. Such stresses may lead to reduced efficiency of 35 operation of the IC chip, damage of the IC chip and interconnections, separation of the chip from the support base and/or the heat-sink and even fracture of the chip.
_ 4 2050374 This problem has been solved by providing a balanced "sandwich"-like structure shown schematically in the FIGURE. Reference 11 denotes a stress-balancing insert, TCE of which, a" is different from the TCE, a2, of the heat sink. The TCE of the insert, a" may be intermediate the TCE of the heat sink, a2, and the TCE, a3, of 5 element 3. Preferably, the TCE of the insert is matched to the TCE of element 3, and may be equal to the TCE of the element.
In the exemplary embodiment, the stress-balancing insert is a semiconductor chip, placed within the U-shape of heat-sink 6 in contact with an inside surface of the bottom portion 7 of the heat-sink. Insert 11 (made from ceramic, glass 10 or reinforced epoxy, for example) is secured to the heat-sink with an adhesive, 12, which is, preferably, of the same type as adhesive 9 which secures heat-sink 6 to active chip 3. Insert 11 may be, for example, an inexpensive "dummy" semiconductor chip, that is one without any dopants and circuitry. The TCE of the dummy chip is selected to closely match those of active chip 3. Insert 11 may also be provided with circuitry 15 on an upper surface thereof for interconnection with some other circuitry or element(s) of the HIC.
Chip 3, bottom portion 7 of the heat sink, insert chip 11 and the two layers of adhesive, 9 and 12, form a TCE balanced "sandwich"-like structure. Such a structure is expected to exhibit planar thermal expansions equivalent to the outer parts 20 (skins) of the sandwich structure. Expansion of the sandwich structure normal to the element and the insert accommodates the balance of the absolute volumetric change of the components of the sandwich structure not accounted for in the outer parts.
It is to be understood that the above-described embodiments are simply illustrative of the principles of the invention. Various other modifications and changes 25 may be devised by those of average skill in the art, which will embody the principles of the invention and fall within the scope and spirit thereof.
HEAT SINK FOR ELECTRONIC CIRCUITRY
Technical Field This invention relates to heat sinks for the removal of heat from elements of electronic circuits, such as Hybrid Integrated Circuits (HICs).
5 Back~round of the Invention Hybrid Integrated Circuits (HICs) often include active chips, such as Integrated Circuit (IC) chips, or some other electronic and other type of active or passive elements (or devices) which during the operation either generate heat or are subjected to heat generated by other elements of the HIC or the environment. Some 10 of the elements may be susceptible to damage due to this heat, e.g. separation of an element from a support base, fracture of the element, fracture of conductors connecting the element to the support base, changes in operation characteristics, and the like.
To remove the heat from the individual elements of the HIC, at least 15 some of the elements, prone to be affected by the heat, may be selectively provided with a "heat sink" of a high heat conductivity metal to pick up and transfer the heat away from the element.
U.S. Patent 4,408,220 proposes a heat-dissipator (heat-sink) structure including top and bottom plates interconnected by an interm~ te section, which 20 structure is formed so as to be slidably mounted on an IC package which is in turn mounted on a support base, such as a printed circuit board. The top plate is resiliently connected and may contact a heat spreader plate which may be common to a number of such heat-sinks. However, with further mini~t~lrization and au~olllaLion of m~nnf~tnre and assembly, such a mechanically secured heat-sink 25 may prove difficult to use.
It is, thus, desirable to provide HICs in which a heat-sink is secured to a chip or device so as to form a unitized assembly. It is also important that the structure exhibits a minimllm of stress during changes in lempcl~ture.
Summary of the Invention The present invention is an electronic circuit having an element mounted on a suitable support base, a heat-sink having a bottom portion contacting the element and at least one flange projecting from the bottom portion, and a stress-balancing insert positioned on the bottom portion of the heat-sink and at least partially coextensive with the element, said bottom portion of the heat sink being - 2 - 205 037 ~
secured to the element and to the insert by means of an adhesive. The insert is of a material having a coefficient of thermal expansion (TCE), a" different from the TCE, a~, of the heat sink. The TCE of the insert may be intermediate the TCE of the heat sink and the TCE, a3, of the material of the element. Preferably, the TCE of the insert approximately matches the TCE of the material of the element.
The element, the bottom portion of the heat-sink, the insert and the adhesive layers form a balanced "sandwich" skucture. Such a structure will exhibit planar thermal expansion equivalent to the outer skins of the sandwich structure, e.g. of the element and the insert. Expansion of the structure normal to the element and the insert accommodates the balance of the absolute volumetric change of components of the sandwich structure not accounted for in the skins.
Brief Description of the Drawin~
The sole FIGURE is a cross-sectional view showing an exemplary device constructed in accordance with the present invention.
Detailed Description Reference numeral I designates an exemplary eleckonic circuit, such as Hybrid Integrated Circuit (HIC) only a portion of which is shown. Reference numeral 2 designates a support base made of a suitable material such as ceramic, semiconductor (e.g. silicon), glass, plastic (e.g. epoxy), glass fiber-reinforced epoxy, resin-coated metal (e.g. epoxy coated aluminum), molded circuit board or other suitable materials.
An element, 3, is mounted on the support base in a suitable manner. In an exemplary embodiment, element 3 is an active semiconductor chip, such as an Integrated Circuit (IC) chip. Further examples of element 3 are passive semiconductor chips, oscillators, optical devices and optical fiber interconnections. Chip 3 is mounted on the support base in a so-called "flip-chip" manner in conductive contact between circuitry on the chip and conductive leads and pads (not shown) on the support base. The chip is secured to the support base, e.g. at 4, in a conventional manner such as by solder, alloying, gold eutectic bonding, conductive adhesive, non-conductive adhesive and the like.
In an exemplary embodiment, heat-sink 6 is attached to an upper surface of chip 3, that is to that surface of the chip which is opposite to the surface facing the support base. Heat sink, 6, has a bottom portion, 7, contacting the element and at least ~A
~ - 2a - ~0~37i'1 one flange, 8, projecting from the bottom portion, for conducting the heat away from the element. The heat-sink is of a suitable metal or alloy having high heat conductivity, such as aluminum, copper, nickel, their alloys, brass, bronze, stainless steel. Noble metals or their alloys such as gold, palladium, platinum, silver, can be S used. The metal should not lead to cont~min~tion of the element. The free end of said at least one flange 8 may freely project from the heat sink. Alternatively, the ~ ~
~ ^3~ ~050374 free end may be provided with a heat-dissipating portion (not shown). Also, the free end may be in contact with a common heat spreader (not shown) which is either provided specifically for dissipating the heat tr~n~mitted by each flange or forms a part of a metallic housing about the circuit.
Flange 8 may be a single flange, or it may include at least two flanges.
Alternatively, flange 8 may form walls of a cup-shaped heat-sink. Also, the heatsink may contact more than one element and, conveniently, may have more than oneflange projecting from the bottom portion.
In the exemplary embodiment, the heat-sink has a U-shaped 10 configuration with bottom portion 7 and flanges 8. The bottom portion is secured to the upper surface of chip 3 by means of an adhesive, 9, having suitable temperature resistance and processing characteristics. Typically, adhesives selected from silicone, polyimide, acrylic, and epoxy resins may be used in HIC devices. An epoxy resin, such as Epon 828 (Shell Chemical Company) cured with 2 ethyl 4 15 methyl imid~ole (Pacific Anchor Corp.) or with other curing agents such as nadic-methyl anhydride (Miller-Stephenson Corp.) is useful. However, conventional attachment of the heat-sink to the element, e.g. a chip, by means of an adhesive, leads to a strained unbalanced structure. This may lead to significant thermally-in(l~lced stresses in the chip due to differences in respective coefficients of thermal 20 e~rp~n~ion (TCEs) of the components of the structure. For example a TCE of anepoxy adhesive may vary from 15 to 60 ppm/C, of a silicone rubber from 150-350 ppm/C and polyimide resin from 10 to 20 ppm/C while the TCE of a silicon elçm~nt may be only 2 to 3 ppm/C and the metals of the heat-sink may have a TCEwithin a range of from 1 to 13 ppm/C.
Stresses caused by differences in TOE may lead to an improper operation of the device or may render the device inoperable, especially if the stresses result in a fracture of the device (e.g. of a chip) or of conductors connecting the device to a ~ ;uiL~ on the support base or both. Because respective TCEs of adhesive 9, chip 3 and heat-sink 6 differ each from another, this type of a structure 30 could lead to ~ignific~nt thermally in~1ced stresses which may result from subsequent manufacturing steps involving heat, such as a curing step, a soldering step and the like, and/or may arise due to the heat produced by the element itself during the operation of the device, by some other elements located in the vicinity of chip 3 or by an environment. Such stresses may lead to reduced efficiency of 35 operation of the IC chip, damage of the IC chip and interconnections, separation of the chip from the support base and/or the heat-sink and even fracture of the chip.
_ 4 2050374 This problem has been solved by providing a balanced "sandwich"-like structure shown schematically in the FIGURE. Reference 11 denotes a stress-balancing insert, TCE of which, a" is different from the TCE, a2, of the heat sink. The TCE of the insert, a" may be intermediate the TCE of the heat sink, a2, and the TCE, a3, of 5 element 3. Preferably, the TCE of the insert is matched to the TCE of element 3, and may be equal to the TCE of the element.
In the exemplary embodiment, the stress-balancing insert is a semiconductor chip, placed within the U-shape of heat-sink 6 in contact with an inside surface of the bottom portion 7 of the heat-sink. Insert 11 (made from ceramic, glass 10 or reinforced epoxy, for example) is secured to the heat-sink with an adhesive, 12, which is, preferably, of the same type as adhesive 9 which secures heat-sink 6 to active chip 3. Insert 11 may be, for example, an inexpensive "dummy" semiconductor chip, that is one without any dopants and circuitry. The TCE of the dummy chip is selected to closely match those of active chip 3. Insert 11 may also be provided with circuitry 15 on an upper surface thereof for interconnection with some other circuitry or element(s) of the HIC.
Chip 3, bottom portion 7 of the heat sink, insert chip 11 and the two layers of adhesive, 9 and 12, form a TCE balanced "sandwich"-like structure. Such a structure is expected to exhibit planar thermal expansions equivalent to the outer parts 20 (skins) of the sandwich structure. Expansion of the sandwich structure normal to the element and the insert accommodates the balance of the absolute volumetric change of the components of the sandwich structure not accounted for in the outer parts.
It is to be understood that the above-described embodiments are simply illustrative of the principles of the invention. Various other modifications and changes 25 may be devised by those of average skill in the art, which will embody the principles of the invention and fall within the scope and spirit thereof.
Claims (19)
1. An article comprising an element mounted on a surface of a support base, a heat-sink of a high heat conductivity material having a bottom portion attached to an upper surface of the element and at least one flange projecting from the bottom portion, and a stress-balancing insert positioned on the bottom portion, the bottom portion of the heat-sink being secured to the element and to the insert by means of an adhesive, and the insert being of a material having coefficient of thermal expansion, .alpha.1, which is different from the coefficient of thermal expansion of the heat sink, .alpha.2.
2. An article of claim 1 in which the coefficient of thermal expansion of the material of the insert, .alpha.1, is intermediate the coefficient of thermal expansion of the heat sink, .alpha.2, and the coefficient of thermal expansion of the material of the element, .alpha.3.
3. An article of claim 1 in which the coefficient of thermal expansion of the material of the insert, .alpha.1, is matched with the coefficient of thermal expansion of the material of the element, .alpha.3.
4. An article of claim 3 in which the coefficient of thermal expansion of the material of the insert, .alpha.1, is equal to the coefficient of thermal expansion of the material of the element, .alpha.3.
5. An article of claim 1 in which said element is selected from the group consisting of active and passive semiconductor chips, semiconductor devices, capacitors, resistors, oscillators, optical devices and optical fiber interconnections.
6. An article of claim 5 in which the element is a semiconductor chip.
7. An article of claim 1 in which the insert comprises a material selected from the group consisting of ceramic, semiconductor, glass and reinforced epoxy.
8. An article of claim 7 in which the material of the insert is a semiconductor.
9. An article of claim 1 in which the insert is in the form of a platelet.
10. An article of claim 1 in which the heat-sink has a U-shaped cross-section.
11. An article of claim 1 in which said heat-sink has a plurality of said flanges.
12. An article of claim 1 in which said heat-sink has a cup-like configuration.
13. An article of claim 1 in which the area of the bottom portion of the heat sink contacting the element is essentially equal to the area of said upper surface of the element.
14. An article of claim 1 in which said heat-conducting material is a metal.
15. An article of claim 14 in which said heat sink comprises a metal selected from the group consisting of aluminum, copper, nickel and their alloys,brass, bronze, gold, silver, palladium, platinum.
16. An article of claim 1 in which said support base comprises a material selected from the group consisting of ceramic, glass, semiconductor, plastic, composite material, resin-reinforced fibers and resin-coated metal.
17. An article of claim 1 in which said adhesive comprises a resin selected from the group of polymers consisting of silicone, polyimide, epoxy, and acrylic resins.
18. An article of claim 17 in which said adhesive comprises an epoxy resin.
19. An article of claim 1 in which said article forms a part of a Hybrid Integrated Circuit (HIC).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US599,947 | 1990-10-19 | ||
| US07/599,947 US5049981A (en) | 1990-10-19 | 1990-10-19 | Heat sink for electronic circitry |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2050374A1 CA2050374A1 (en) | 1992-04-20 |
| CA2050374C true CA2050374C (en) | 1996-06-25 |
Family
ID=24401772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002050374A Expired - Fee Related CA2050374C (en) | 1990-10-19 | 1991-08-30 | Heat sink for electronic circuitry |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US5049981A (en) |
| EP (1) | EP0481721B1 (en) |
| JP (1) | JP3046416B2 (en) |
| KR (1) | KR100231222B1 (en) |
| CN (1) | CN1060924A (en) |
| CA (1) | CA2050374C (en) |
| DE (1) | DE69129888T2 (en) |
| HK (1) | HK1003462A1 (en) |
| SG (1) | SG46633A1 (en) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2708191B2 (en) * | 1988-09-20 | 1998-02-04 | 株式会社日立製作所 | Semiconductor device |
| KR0158868B1 (en) * | 1988-09-20 | 1998-12-01 | 미다 가쓰시게 | Semiconductor device |
| GB9014491D0 (en) * | 1990-06-29 | 1990-08-22 | Digital Equipment Int | Mounting silicon chips |
| US5434524A (en) * | 1992-09-16 | 1995-07-18 | International Business Machines Corporation | Method of clocking integrated circuit chips |
| US5313097A (en) * | 1992-11-16 | 1994-05-17 | International Business Machines, Corp. | High density memory module |
| US5299090A (en) * | 1993-06-29 | 1994-03-29 | At&T Bell Laboratories | Pin-fin heat sink |
| US5550326A (en) * | 1994-07-13 | 1996-08-27 | Parker-Hannifin Corporation | Heat dissipator for electronic components |
| US5745344A (en) * | 1995-11-06 | 1998-04-28 | International Business Machines Corporation | Heat dissipation apparatus and method for attaching a heat dissipation apparatus to an electronic device |
| US5778523A (en) * | 1996-11-08 | 1998-07-14 | W. L. Gore & Associates, Inc. | Method for controlling warp of electronic assemblies by use of package stiffener |
| US6705388B1 (en) | 1997-11-10 | 2004-03-16 | Parker-Hannifin Corporation | Non-electrically conductive thermal dissipator for electronic components |
| US6177728B1 (en) * | 1998-04-28 | 2001-01-23 | International Business Machines Corporation | Integrated circuit chip device having balanced thermal expansion |
| US20080019097A1 (en) * | 2005-10-11 | 2008-01-24 | General Electric Company | Thermal transport structure |
| US7440280B2 (en) * | 2006-03-31 | 2008-10-21 | Hong Kong Applied Science & Technology Research Institute Co., Ltd | Heat exchange enhancement |
| US20070230185A1 (en) * | 2006-03-31 | 2007-10-04 | Shuy Geoffrey W | Heat exchange enhancement |
| US7593229B2 (en) * | 2006-03-31 | 2009-09-22 | Hong Kong Applied Science & Technology Research Institute Co. Ltd | Heat exchange enhancement |
| EP2232656A4 (en) | 2007-12-17 | 2014-04-16 | Ii Vi Laser Entpr Gmbh | Laser emitter modules and methods of assembly |
| US8804246B2 (en) | 2008-05-08 | 2014-08-12 | Ii-Vi Laser Enterprise Gmbh | High brightness diode output methods and devices |
| US20100177796A1 (en) * | 2009-01-09 | 2010-07-15 | Newport Corporation | Laser device and heat sink with core to manage stress due to thermal expansion |
| JP5740654B2 (en) | 2010-01-22 | 2015-06-24 | トゥー−シックス レイザー エンタープライズ ゲーエムベーハー | Homogenization of far-field fiber-coupled radiation |
| JP5384443B2 (en) * | 2010-07-28 | 2014-01-08 | 日東電工株式会社 | Flip chip type semiconductor back film, dicing tape integrated semiconductor back film, semiconductor device manufacturing method, and flip chip type semiconductor device |
| US8644357B2 (en) | 2011-01-11 | 2014-02-04 | Ii-Vi Incorporated | High reliability laser emitter modules |
| CN103369745B (en) * | 2012-03-30 | 2015-09-02 | 张鸿鸣 | Corrosion-resistant fin and corrosion-resistant fever tablet |
| CN110447166B (en) | 2017-04-10 | 2022-03-29 | 株式会社村田制作所 | Thermoelectric conversion element module |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4227036A (en) * | 1978-09-18 | 1980-10-07 | Microwave Semiconductor Corp. | Composite flanged ceramic package for electronic devices |
| US4408220A (en) * | 1981-01-29 | 1983-10-04 | Calabro Anthony Denis | Heat dissipator for a dual in line integrated circuit package |
| GB8818957D0 (en) * | 1988-08-10 | 1988-09-14 | Marconi Electronic Devices | Semiconductor devices |
-
1990
- 1990-10-19 US US07/599,947 patent/US5049981A/en not_active Expired - Lifetime
-
1991
- 1991-08-30 CA CA002050374A patent/CA2050374C/en not_active Expired - Fee Related
- 1991-10-14 CN CN91109921A patent/CN1060924A/en active Pending
- 1991-10-15 SG SG1996006896A patent/SG46633A1/en unknown
- 1991-10-15 EP EP91309475A patent/EP0481721B1/en not_active Expired - Lifetime
- 1991-10-15 KR KR1019910018080A patent/KR100231222B1/en not_active IP Right Cessation
- 1991-10-15 DE DE69129888T patent/DE69129888T2/en not_active Expired - Fee Related
- 1991-10-18 JP JP3269908A patent/JP3046416B2/en not_active Expired - Lifetime
-
1998
- 1998-03-24 HK HK98102489A patent/HK1003462A1/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| DE69129888D1 (en) | 1998-09-03 |
| CN1060924A (en) | 1992-05-06 |
| EP0481721B1 (en) | 1998-07-29 |
| KR920008902A (en) | 1992-05-28 |
| JP3046416B2 (en) | 2000-05-29 |
| US5049981A (en) | 1991-09-17 |
| HK1003462A1 (en) | 1998-10-30 |
| DE69129888T2 (en) | 1998-12-24 |
| SG46633A1 (en) | 1998-02-20 |
| KR100231222B1 (en) | 1999-11-15 |
| JPH04298068A (en) | 1992-10-21 |
| CA2050374A1 (en) | 1992-04-20 |
| EP0481721A1 (en) | 1992-04-22 |
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| EEER | Examination request | ||
| MKLA | Lapsed |