CA2108909A1 - Apparatus for optically detecting contamination in particles of low optical loss material - Google Patents

Apparatus for optically detecting contamination in particles of low optical loss material

Info

Publication number
CA2108909A1
CA2108909A1 CA002108909A CA2108909A CA2108909A1 CA 2108909 A1 CA2108909 A1 CA 2108909A1 CA 002108909 A CA002108909 A CA 002108909A CA 2108909 A CA2108909 A CA 2108909A CA 2108909 A1 CA2108909 A1 CA 2108909A1
Authority
CA
Canada
Prior art keywords
particles
light
laser beam
laser
integrating chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002108909A
Other languages
French (fr)
Other versions
CA2108909C (en
Inventor
William Edward Wolf
Robert Hubbard Livermore
David Daniel Dreyfuss
Thomas William Simpson, Iii
John Joseph Majeski, Iii
Eugene Francis Palecki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EIDP Inc
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2108909A1 publication Critical patent/CA2108909A1/en
Application granted granted Critical
Publication of CA2108909C publication Critical patent/CA2108909C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
    • G01N21/53—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N2021/845—Objects on a conveyor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G01N2021/8592—Grain or other flowing solid samples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/064—Stray light conditioning
    • G01N2201/0642—Light traps; baffles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/065—Integrating spheres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/108—Miscellaneous
    • G01N2201/1087—Focussed scan beam, e.g. laser

Abstract

An apparatus for optically detecting light-absorbing contami-nation in at least one particle of low optical-loss material comprises an optical integrating chamber for containing the particles. A laser for emitting a laser beam to illuminate the particles is mounted in the plane of rotation of a rotating mir-ror such that the laser beam scans in a fan scan. A scanning assembly is mounted in optical alignment with the laser for reflecting the la-ser beam and for causing the laser beam to scan the particles in the optical integrating chamber. A fo-cusing assembly is mounted in opti-cal alignment with the laser For fo-cusing the scanning laser beam on-to the particles in the chamber, the focusing assembly operating in conjunction with the scanning as-sembly so that light from the laser beam is reflected from the particles and is repeatedly scattered onto the interior walls of the integrating chamber. A light sensing assembly is mounted on the integrating chamber for receiving the repeatedly scattered light from the interior walls of the integrating chamber and for generating a signal indicative of the intensity of the repeatedly scattered light. A decrease in the intensity of the repeatedly scattered light is a function of the presence of light-absorbing contamination in the material.
CA002108909A 1991-04-30 1992-04-29 Apparatus for optically detecting contamination in particles of low optical loss material Expired - Fee Related CA2108909C (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US69352491A 1991-04-30 1991-04-30
US69352391A 1991-04-30 1991-04-30
US07/693,524 1991-04-30
US07/693,523 1991-04-30
US07/863,961 US5256886A (en) 1991-04-30 1992-04-10 Apparatus for optically detecting contamination in particles of low optical-loss material
US07/863,961 1992-04-10
PCT/US1992/003320 WO1992019958A1 (en) 1991-04-30 1992-04-29 Apparatus for optically detecting contamination in particles of low optical-loss material

Publications (2)

Publication Number Publication Date
CA2108909A1 true CA2108909A1 (en) 1992-10-31
CA2108909C CA2108909C (en) 2003-09-23

Family

ID=27418580

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002108909A Expired - Fee Related CA2108909C (en) 1991-04-30 1992-04-29 Apparatus for optically detecting contamination in particles of low optical loss material

Country Status (6)

Country Link
US (1) US5256886A (en)
EP (1) EP0582669B1 (en)
JP (1) JP3167329B2 (en)
CA (1) CA2108909C (en)
DE (1) DE69226771T2 (en)
WO (1) WO1992019958A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5874397A (en) * 1995-07-11 1999-02-23 Hoechst Aktiengesellschaft Granular detergent builder

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2722362B2 (en) * 1992-03-27 1998-03-04 三井金属鉱業株式会社 Method and apparatus for measuring particle or defect size information
US5619253A (en) * 1993-06-25 1997-04-08 Miranda, Jr.; Henry A. Video display of indicia
US5504332A (en) * 1994-08-26 1996-04-02 Merck & Co., Inc. Method and system for determining the homogeneity of tablets
GB9422317D0 (en) * 1994-11-04 1994-12-21 Vector Computers Limited Separation of materials
US5663997A (en) * 1995-01-27 1997-09-02 Asoma Instruments, Inc. Glass composition determination method and apparatus
JP2000502468A (en) * 1995-12-26 2000-02-29 クセロス・インク Compact document scanner or printer engine
US5929981A (en) * 1996-06-18 1999-07-27 Ohmeda Inc. System for monitoring contamination of optical elements in a Raman gas analyzer
US6570177B1 (en) 2000-01-31 2003-05-27 Dcs Corporation System, apparatus, and method for detecting defects in particles
WO2002044692A1 (en) * 2000-11-28 2002-06-06 Imeco Automazioni S.R.L. Apparatus for analyzing the characteristics of ground products
EP1273901A1 (en) * 2001-07-02 2003-01-08 Université de Liège Method and apparatus for automatic measurement of particle size and form
EP1432972A1 (en) * 2001-09-07 2004-06-30 Inficon, Inc. Signal processing method for in-situ, scanned-beam particle monitoring
US6870610B1 (en) 2002-05-07 2005-03-22 Dcs Corporation Method and apparatus for detecting defects in a material in a liquid bath
US8014975B2 (en) * 2007-09-28 2011-09-06 Hitachi Global Storage Technologies, Netherlands B.V. FTIR and EDX spectrum library of contaminants found on a HDD and their potential sources
JP5471157B2 (en) * 2009-08-21 2014-04-16 セントラル硝子株式会社 Method and apparatus for detecting adhering matter on glass plate surface
EP2516996A1 (en) * 2009-12-22 2012-10-31 Bühler AG Assembly and method for measuring pourable products
JP5641958B2 (en) * 2011-01-31 2014-12-17 ギガフォトン株式会社 Chamber apparatus and extreme ultraviolet light generation apparatus including the same
JP2012242340A (en) * 2011-05-24 2012-12-10 Mitsubishi Engineering Plastics Corp Quality determination method for polycarbonate resin for infrared filter
EP2923197B1 (en) * 2012-11-20 2020-06-24 GrainSense Oy An optical sampling apparatus and method for utilizing the sampling apparatus
US10329917B2 (en) 2013-03-05 2019-06-25 United Technologies Corporation Gas turbine engine component external surface micro-channel cooling
US10073031B2 (en) 2013-11-14 2018-09-11 Grainsense Oy Optical analyzer, optical analyzing method and sample preparation device
DE102015205688A1 (en) * 2015-03-30 2016-10-06 Zumtobel Lighting Gmbh Method and system for generating light staging
KR101726809B1 (en) * 2015-04-15 2017-04-17 (주)엔클로니 Drugs supply unit and apparatus for inspecting appearance of drugs having the same
JP6022645B1 (en) * 2015-07-14 2016-11-09 イシカワ技研株式会社 Attachment for sleeve-out type fixtures
KR101756198B1 (en) * 2015-07-14 2017-07-10 이경환 Combination structure of shelf for bed
JP2017173168A (en) * 2016-03-24 2017-09-28 日本ゼオン株式会社 Method and device for detecting foreign matter, and method and device for manufacturing elastomer
EP3511692A4 (en) * 2016-09-06 2020-04-29 The University Of Tokyo Flow cytometer
US11200698B2 (en) 2017-06-01 2021-12-14 Germaine Laboratories, Inc. Devices and systems for data-based analysis of objects
US10275681B2 (en) 2017-06-01 2019-04-30 Germaine Laboratories, Inc. Devices and systems for image-based analysis of test media
US9983117B1 (en) * 2017-06-01 2018-05-29 Germaine Laboratories, Inc. Devices and systems for image-based analysis of test media
JP2021516343A (en) * 2018-03-14 2021-07-01 グラインセンス オーワイＧｒａｉｎｓｅｎｓｅ Ｏｙ Sample containers and tools for use in integration cavities
CN111579449B (en) * 2020-04-21 2023-04-07 泛测（北京）环境科技有限公司 Atmospheric particulate pollutant space scanning early warning method and device

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3549263A (en) * 1968-01-24 1970-12-22 Tokyo Shibaura Electric Co Apparatus for detecting foreign matters mixed with powdered or granular materials
US3920336A (en) * 1974-05-21 1975-11-18 Us Air Force System for intensification of weak absorption and collection of weak light emission
ZA765149B (en) * 1976-08-27 1978-04-26 De Beers Ind Diamond Measurement of optical properties
US4422760A (en) * 1981-02-20 1983-12-27 Pacific Scientific Instruments Company Optical analyzing instrument having vibrating trough
JPS5877637A (en) * 1981-11-02 1983-05-11 Satake Eng Co Ltd Continuous measuring apparatus of polishing degree of grain
EP0146005B1 (en) * 1983-11-26 1991-08-28 Kabushiki Kaisha Toshiba Surface defect inspecting apparatus
US4601576A (en) * 1983-12-09 1986-07-22 Tencor Instruments Light collector for optical contaminant and flaw detector
KR910000794B1 (en) * 1985-03-28 1991-02-08 가부시끼가이샤 도오시바 Method and apparatus inspecting the surface of substrate
GB2195438A (en) * 1986-09-26 1988-04-07 Pilkington Brothers Plc Detecting unwanted materials among cullet
US4740708A (en) * 1987-01-06 1988-04-26 International Business Machines Corporation Semiconductor wafer surface inspection apparatus and method
JPS6428543A (en) * 1987-07-23 1989-01-31 Shizuoka Seiki Co Ltd Quality judging apparatus for unhulled rice
US4965454A (en) * 1988-01-21 1990-10-23 Hitachi, Ltd. Method and apparatus for detecting foreign particle
EP0407429A4 (en) * 1988-03-30 1991-08-21 Martin Terence Cole Fluid pollution monitor
US4885473A (en) * 1988-04-29 1989-12-05 Shofner Engineering Associates, Inc. Method and apparatus for detecting particles in a fluid using a scanning beam
JPH0748065B2 (en) * 1988-05-27 1995-05-24 信越化学工業株式会社 Method and device for inspecting colored foreign matter in white powder
FR2632723B1 (en) * 1988-06-08 1991-11-15 Commissariat Energie Atomique DETECTION SYSTEM FOR PHOTOMETER
US4892409A (en) * 1988-07-14 1990-01-09 Smith Harry F Photometric apparatus for multiwell plates having a positionable lens assembly
US4972258A (en) * 1989-07-31 1990-11-20 E. I. Du Pont De Nemours And Company Scanning laser microscope system and methods of use
US4988875A (en) * 1988-12-13 1991-01-29 At&T Bell Laboratories Near infrared polyethylene inspection system and method
DE9005845U1 (en) * 1990-05-23 1990-07-26 Fa. Carl Zeiss, 7920 Heidenheim, De

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5874397A (en) * 1995-07-11 1999-02-23 Hoechst Aktiengesellschaft Granular detergent builder

Also Published As

Publication number Publication date
US5256886A (en) 1993-10-26
WO1992019958A1 (en) 1992-11-12
DE69226771T2 (en) 1999-04-22
EP0582669A1 (en) 1994-02-16
JP3167329B2 (en) 2001-05-21
CA2108909C (en) 2003-09-23
DE69226771D1 (en) 1998-10-01
JPH07503533A (en) 1995-04-13
EP0582669B1 (en) 1998-08-26

Similar Documents

Publication Publication Date Title
CA2108909A1 (en) Apparatus for optically detecting contamination in particles of low optical loss material
US4652750A (en) Optical device for detecting coded symbols
JP2513442B2 (en) Coded code detector
US5406060A (en) Bar code reader for sensing at an acute angle
EP1063512A3 (en) Method and apparatus for particle assessment using multiple scanning beam reflectance
EP0384955A3 (en) Laser scanner for reading two dimensional bar codes
DE3879224D1 (en) DEVICE FOR OPTICALLY SCANNING THE SURFACE OF AN OBJECT.
EP0360126A3 (en) Operation method for an optical smoke detector and smoke detector for carrying out the method
AU637214B2 (en) Light emitting diode scanner
WO1998052025A1 (en) Surface inspection instrument and surface inspection method
DE3785435D1 (en) SCANNER FOR OPTICAL SCANING OF OBJECTS, IN PARTICULAR RECORDING PLATES.
KR890010554A (en) Photoelectric particle detector
TW247951B (en)
EP0813719B1 (en) Reflection control apparatus
EP0772064A3 (en) Optical device having an optical film with an incident angle thereupon variable
US4812664A (en) Apparatus for scanning a flat surface to detect defects
EP0935131A3 (en) Surface plasmon resonance sensor with wavelength-stabilized laser light source
EP0244102A1 (en) Inspection apparatus
US5877887A (en) Light beam deflection means
EP1003321A2 (en) Integrated chamber illumination system
EP0297462B1 (en) Tape defect detecting system
DE8707858U1 (en)
KR920008545Y1 (en) Bar code scanner
KR930002268Y1 (en) Bae code scanner
EP0352797A3 (en) A method for detecting defects on specular surfaces and device operating according to this method

Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed