CA2135995A1 - TFT with Reduced Parasitic Capacitance - Google Patents
TFT with Reduced Parasitic CapacitanceInfo
- Publication number
- CA2135995A1 CA2135995A1 CA2135995A CA2135995A CA2135995A1 CA 2135995 A1 CA2135995 A1 CA 2135995A1 CA 2135995 A CA2135995 A CA 2135995A CA 2135995 A CA2135995 A CA 2135995A CA 2135995 A1 CA2135995 A1 CA 2135995A1
- Authority
- CA
- Canada
- Prior art keywords
- tft
- electrode
- parasitic capacitance
- reduced parasitic
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003071 parasitic effect Effects 0.000 title 1
- 238000002161 passivation Methods 0.000 abstract 2
- 238000009413 insulation Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78696—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the structure of the channel, e.g. multichannel, transverse or longitudinal shape, length or width, doping structure, or the overlap or alignment between the channel and the gate, the source or the drain, or the contacting structure of the channel
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42384—Gate electrodes for field effect devices for field-effect transistors with insulated gate for thin film field effect transistors, e.g. characterised by the thickness or the shape of the insulator or the dimensions, the shape or the lay-out of the conductor
Abstract
The drain electrode (39) is annular surrounding a round source electrode (40). Pref. both electrodes have a passivation insulating layer and the pixel electrode (50) connected to the source is transparent and is bonded to and crosses over the passivation layer and drain electrode. Gate insulation is located between gate electrode (30) and semiconductor film substrate.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/154,713 | 1993-11-19 | ||
US08/154,713 US5414283A (en) | 1993-11-19 | 1993-11-19 | TFT with reduced parasitic capacitance |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2135995A1 true CA2135995A1 (en) | 1995-05-20 |
CA2135995C CA2135995C (en) | 2000-05-30 |
Family
ID=22552458
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002135995A Expired - Fee Related CA2135995C (en) | 1993-11-19 | 1994-11-16 | Tft with reduced parasitic capacitance |
Country Status (5)
Country | Link |
---|---|
US (2) | US5414283A (en) |
EP (1) | EP0654828B1 (en) |
AT (1) | ATE179832T1 (en) |
CA (1) | CA2135995C (en) |
DE (1) | DE69418283T2 (en) |
Families Citing this family (100)
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JPS63184366A (en) * | 1987-01-26 | 1988-07-29 | Nec Corp | Amplifier circuit |
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JPH0834311B2 (en) * | 1987-06-10 | 1996-03-29 | 日本電装株式会社 | Method for manufacturing semiconductor device |
US5032883A (en) * | 1987-09-09 | 1991-07-16 | Casio Computer Co., Ltd. | Thin film transistor and method of manufacturing the same |
JPS6482674A (en) * | 1987-09-25 | 1989-03-28 | Casio Computer Co Ltd | Thin film transistor |
US4914058A (en) * | 1987-12-29 | 1990-04-03 | Siliconix Incorporated | Grooved DMOS process with varying gate dielectric thickness |
US4859623A (en) * | 1988-02-04 | 1989-08-22 | Amoco Corporation | Method of forming vertical gate thin film transistors in liquid crystal array |
US4949141A (en) * | 1988-02-04 | 1990-08-14 | Amoco Corporation | Vertical gate thin film transistors in liquid crystal array |
JP2740813B2 (en) * | 1988-02-26 | 1998-04-15 | セイコープレシジョン株式会社 | Amorphous silicon thin film transistor array substrate |
DE68917774T2 (en) * | 1988-04-30 | 1995-03-16 | Sharp Kk | Thin film semiconductor device and liquid crystal display made therewith. |
US5237193A (en) * | 1988-06-24 | 1993-08-17 | Siliconix Incorporated | Lightly doped drain MOSFET with reduced on-resistance |
US4853345A (en) * | 1988-08-22 | 1989-08-01 | Delco Electronics Corporation | Process for manufacture of a vertical DMOS transistor |
US4914051A (en) * | 1988-12-09 | 1990-04-03 | Sprague Electric Company | Method for making a vertical power DMOS transistor with small signal bipolar transistors |
JP2558351B2 (en) * | 1989-06-29 | 1996-11-27 | 沖電気工業株式会社 | Active matrix display panel |
US5058995A (en) * | 1990-03-15 | 1991-10-22 | Thomson Consumer Electronics, Inc. | Pixel electrode structure for liquid crystal display devices |
US5073519A (en) * | 1990-10-31 | 1991-12-17 | Texas Instruments Incorporated | Method of fabricating a vertical FET device with low gate to drain overlap capacitance |
JPH05110075A (en) * | 1991-10-15 | 1993-04-30 | Nec Corp | Insulated gate type field effect transistor |
-
1993
- 1993-11-19 US US08/154,713 patent/US5414283A/en not_active Expired - Lifetime
-
1994
- 1994-11-16 CA CA002135995A patent/CA2135995C/en not_active Expired - Fee Related
- 1994-11-17 EP EP94118141A patent/EP0654828B1/en not_active Expired - Lifetime
- 1994-11-17 DE DE69418283T patent/DE69418283T2/en not_active Expired - Fee Related
- 1994-11-17 AT AT94118141T patent/ATE179832T1/en not_active IP Right Cessation
-
1995
- 1995-01-20 US US08/375,658 patent/US5614427A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69418283D1 (en) | 1999-06-10 |
DE69418283T2 (en) | 1999-12-23 |
EP0654828A2 (en) | 1995-05-24 |
CA2135995C (en) | 2000-05-30 |
ATE179832T1 (en) | 1999-05-15 |
EP0654828B1 (en) | 1999-05-06 |
US5614427A (en) | 1997-03-25 |
EP0654828A3 (en) | 1995-08-30 |
US5414283A (en) | 1995-05-09 |
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