CA2137962C - Pressure measuring arrangement - Google Patents
Pressure measuring arrangementInfo
- Publication number
- CA2137962C CA2137962C CA002137962A CA2137962A CA2137962C CA 2137962 C CA2137962 C CA 2137962C CA 002137962 A CA002137962 A CA 002137962A CA 2137962 A CA2137962 A CA 2137962A CA 2137962 C CA2137962 C CA 2137962C
- Authority
- CA
- Canada
- Prior art keywords
- recess
- header
- cross
- diaphragm
- sectional surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/142—Multiple part housings
- G01L19/143—Two part housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
- G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
Abstract
To ensure insensitivity to electromagnetic interference and to charge influences from the oil fill and achieve good long-term stability, this pressure-measuring arrangement comprises: a pressure sensor having a base and an associated diaphragm with strain gages deposited thereon; a header of insulating material with leads and with an oil filler neck, said header of insulating material having the base mounted thereon, and said leads making electrical contacts to the strain gages; a metal body having a first central recess in a first cross-sectional surface, a second central recess in a second cross-sectional surface facing away from the first cross-sectional surface, and a hole connecting the first recess with the second recess, said first cross-sectional surface being tightly joined at its edge to the header of insulating material, and said first recess accommodating the substrate and diaphragm without touching them; an electrically conductive foil having an opening, said foil being disposed in the first recess as close as possible to, and covering but not touching, the strain gages and connected to ground; a metallic separating diaphragm fitted in the second recess and closing the latter at its edge; and an oil fill in the recesses and in the hole.
Description
Pressure-Measuring Arrangement FIELD OF THE INVENTION
En 17 CA
The present invention relates to pressure-measuring arrangements with a pressure sensor having a base and an associated diaphragm with strain gages deposited 0 thereon.
BACKGROUND OF THE INVENTION
Applicant has, for some time, been selling a pressure-.5 measuring arrangement comprising:
- a pressure sensor having a base and an associated diaphragm with strain gages deposited thereon;
- a header of insulating material with leads and with an oil filler neck, '0 -- said header of insulating material having the base mounted thereon, and -- said leads making electrical contacts to the strain gages;
- a metal body having a first central recess in a ?5 first cross-sectional surface, a second central recess in a second cross-sectional surface facing away from the first cross-sectional surface, and a hole connecting the first recess with the second recess, ._ 21 379 62 said first cross-sectional surface being tightly joined at its edge to the header of insulating material, and said first recess accommodating the substrate and diaphragm without touch-ing them; a metallic separating diaphragm fitted in the second recess and closing the latter at its edge; and an oil fill in the recesses and in the hole.
This pressure-measuring arrangement, which is in public use, is in need of further improvement regarding its sensitivity to electromagnetic interference and to charge influences from the oil fill and regarding its long-term stability.
SUMMARY OF THE INVENTION
To attain these objects, the invention provides a pressure-measuring arrangement comprising: a pressure sensor having a base and an associated diaphragm with strain gages attached to said diaphragm; a header of insulating material with leads and with an oil filler neck, said header of insulating material having the base mounted thereon, and said leads making electrical contacts to the strain gages; a metal body having a first central recess in a first cross-sectional surface, a second central recess in a second cross-sectional surface facing away from the first cross-sectional surface, and a hole connecting the first recess with the second recess, 2m79s2 -- said first cross-sectional surface being tightly joined at its edge to the header of insulating material, and -- said first recess accommodating the substrate and diaphragm without touching them;
- an electrically conductive foil having an opening, -- said foil being disposed in the first recess as close as possible to, and covering but not touching, the strain gages and connected to ground;
- a metallic separating diaphragm fitted in the second recess and closing the latter at its edge;
and - an oil fill in the recesses and in the hole.
In a preferred embodiment of the invention, a pressure feed pipe extends through the header of insulating material and the base so as to ensure oil tightness.
In another preferred embodiment, a caselike extension of the metal body is provided on the. header side.
This preferred embodiment cam be further improved by providing a further electrically conductive foil along the inside of the extension and connecting it to ground.
The invention will become more apparent from the following description of embodiments taken in conjunction with the accompanying schematic drawings, in which like parts are designated by like reference characters.
m 2137962 BRIEF DESCRIPTION OF THE DRAWINGS
In the drawings:
Fig. 1 is a perspective exploded view of those parts of the pressure-measuring arrangement which are essential for the operation of the sensor;
l0 Fig. 2 is a sectional view of a finished pressure-measuring arrangement, and Fig. 3 is a sectional view of a further development of the pressure-measuring arrangement of Fig. 2.
DETAILED DESCRIPTION OF THE DRAWINGS
In Fig. 1, the parts of a pressure-measuring arrangement according to the invention which are essential for the operation of the pressure sensor are shown in a perspective exploded view. A pressure sensor comprises a diaphragm 10 and abase 12. The diaphragm 10 is formed at the center of a substrate 10' by providing the latter with a recess on the bottom side as seen in the drawing, so that the diaphragm 10 represents a thinner central portion of the substrate 10'. The diaphragm 10 has strain gages 11 deposited thereon which are connected by conductive strips to contact pads provided at the edge of the diaphragm.
The diaphragm 10 is made of glass or silicon, for example. The strain gages 11 are of polycrystalline silicon, so-called polysilicon. In the case of a glass 213?9~2 diaphragm, the polysilicon was deposited direct; in the . case of a silicon diaphragm, it was deposited on an SiOz layer provided on the diaphragm. The base 12 is made of glass or silicon, for example.
A header 13 of insulating material is provided with leads 2, 3, 4, 5, 6, 7, 8 and an oil filler neck 1, which is~sealed after the oil has been filled in, cf:
the seal 1' in Figs. 2 and 3. Otherwise the header 13 is of the same design as the header of a conventional TO-8 semiconductor package.
If the pressure-measuring arrangement is designed as a differential-pressure sensor, the header 13 further contains a pressure feed pipe 9, and the base l2 has a central hole 14 in which the pressure feed pipe 9 continues.
The base 12 is mounted at the center of the header 13. Electrical contacts to the strain gages 11 are made by the leads 2, ..., 8 of the header 13, e.g., by means of thermocompression bonding wires.
The substrate 10' is tightly joined to the base l2, e.g., along the two edges, forming a chamber, so that the diaphragm 10 can deflect when pressure acts on it, which produces a change in the resistance of the strain gages.
A part 15 of insulating material is fitted on the leads 2, ..., 8 projecting from the header 13, said leads entering matching holes 2', 3', 4', 5', 6', 7', 8'. The part 15 has a central opening 16 corresponding in shape to the base 12.
~~3~9~~
En 17 CA
The present invention relates to pressure-measuring arrangements with a pressure sensor having a base and an associated diaphragm with strain gages deposited 0 thereon.
BACKGROUND OF THE INVENTION
Applicant has, for some time, been selling a pressure-.5 measuring arrangement comprising:
- a pressure sensor having a base and an associated diaphragm with strain gages deposited thereon;
- a header of insulating material with leads and with an oil filler neck, '0 -- said header of insulating material having the base mounted thereon, and -- said leads making electrical contacts to the strain gages;
- a metal body having a first central recess in a ?5 first cross-sectional surface, a second central recess in a second cross-sectional surface facing away from the first cross-sectional surface, and a hole connecting the first recess with the second recess, ._ 21 379 62 said first cross-sectional surface being tightly joined at its edge to the header of insulating material, and said first recess accommodating the substrate and diaphragm without touch-ing them; a metallic separating diaphragm fitted in the second recess and closing the latter at its edge; and an oil fill in the recesses and in the hole.
This pressure-measuring arrangement, which is in public use, is in need of further improvement regarding its sensitivity to electromagnetic interference and to charge influences from the oil fill and regarding its long-term stability.
SUMMARY OF THE INVENTION
To attain these objects, the invention provides a pressure-measuring arrangement comprising: a pressure sensor having a base and an associated diaphragm with strain gages attached to said diaphragm; a header of insulating material with leads and with an oil filler neck, said header of insulating material having the base mounted thereon, and said leads making electrical contacts to the strain gages; a metal body having a first central recess in a first cross-sectional surface, a second central recess in a second cross-sectional surface facing away from the first cross-sectional surface, and a hole connecting the first recess with the second recess, 2m79s2 -- said first cross-sectional surface being tightly joined at its edge to the header of insulating material, and -- said first recess accommodating the substrate and diaphragm without touching them;
- an electrically conductive foil having an opening, -- said foil being disposed in the first recess as close as possible to, and covering but not touching, the strain gages and connected to ground;
- a metallic separating diaphragm fitted in the second recess and closing the latter at its edge;
and - an oil fill in the recesses and in the hole.
In a preferred embodiment of the invention, a pressure feed pipe extends through the header of insulating material and the base so as to ensure oil tightness.
In another preferred embodiment, a caselike extension of the metal body is provided on the. header side.
This preferred embodiment cam be further improved by providing a further electrically conductive foil along the inside of the extension and connecting it to ground.
The invention will become more apparent from the following description of embodiments taken in conjunction with the accompanying schematic drawings, in which like parts are designated by like reference characters.
m 2137962 BRIEF DESCRIPTION OF THE DRAWINGS
In the drawings:
Fig. 1 is a perspective exploded view of those parts of the pressure-measuring arrangement which are essential for the operation of the sensor;
l0 Fig. 2 is a sectional view of a finished pressure-measuring arrangement, and Fig. 3 is a sectional view of a further development of the pressure-measuring arrangement of Fig. 2.
DETAILED DESCRIPTION OF THE DRAWINGS
In Fig. 1, the parts of a pressure-measuring arrangement according to the invention which are essential for the operation of the pressure sensor are shown in a perspective exploded view. A pressure sensor comprises a diaphragm 10 and abase 12. The diaphragm 10 is formed at the center of a substrate 10' by providing the latter with a recess on the bottom side as seen in the drawing, so that the diaphragm 10 represents a thinner central portion of the substrate 10'. The diaphragm 10 has strain gages 11 deposited thereon which are connected by conductive strips to contact pads provided at the edge of the diaphragm.
The diaphragm 10 is made of glass or silicon, for example. The strain gages 11 are of polycrystalline silicon, so-called polysilicon. In the case of a glass 213?9~2 diaphragm, the polysilicon was deposited direct; in the . case of a silicon diaphragm, it was deposited on an SiOz layer provided on the diaphragm. The base 12 is made of glass or silicon, for example.
A header 13 of insulating material is provided with leads 2, 3, 4, 5, 6, 7, 8 and an oil filler neck 1, which is~sealed after the oil has been filled in, cf:
the seal 1' in Figs. 2 and 3. Otherwise the header 13 is of the same design as the header of a conventional TO-8 semiconductor package.
If the pressure-measuring arrangement is designed as a differential-pressure sensor, the header 13 further contains a pressure feed pipe 9, and the base l2 has a central hole 14 in which the pressure feed pipe 9 continues.
The base 12 is mounted at the center of the header 13. Electrical contacts to the strain gages 11 are made by the leads 2, ..., 8 of the header 13, e.g., by means of thermocompression bonding wires.
The substrate 10' is tightly joined to the base l2, e.g., along the two edges, forming a chamber, so that the diaphragm 10 can deflect when pressure acts on it, which produces a change in the resistance of the strain gages.
A part 15 of insulating material is fitted on the leads 2, ..., 8 projecting from the header 13, said leads entering matching holes 2', 3', 4', 5', 6', 7', 8'. The part 15 has a central opening 16 corresponding in shape to the base 12.
~~3~9~~
In the sectional view of a finished pressure-measuring arrangement shown in Fig. 2, a metal body 17 can be seen which has a first central recess 1,.8 extending inwardly from a first outer cross-sectional surface 19.
At its edge, the first cross-sectional surface 19 is tightly joined to the header 13.
A second cross-sectional surface 20, which faces away from the first cross-sectional surface 19, is provided with a second central recess 21 which is very shallow compared with the first recess 18. The two recesses 18, 21 communicate by means of a hole 22 in the metal body 17.
The first recess 18 accommodates the base 12 with the substrate 10' and the diaphragm 10 as well as the part 15 of insulating material in such a way that these parts are not in contact with the inside walls of the recess 18.
In the first recess 18, an electrically conductive foil 23 with a central opening 24 is disposed as close as possible to the strain gages 11 so that it covers at least the strain gages 11, but preferably the entire substrate 10' with the diaphragm 10, without touching these parts.
The foil 23, together with an electric connection of the substrate 10', must be connected to ground. This can be done, for example, by conductively bonding the foil 23 to metal areas 4", 5", 8~~ of the part 15, which are associated with the leads 4, 5, 8 (see Fig. 1). The ~1~~9~~
_,_ leads have to be connected to ground at the place where the pressure-measuring arrangement is used.
A metallic separating diaphragm 25 is fitted in the second recess 21 and is tightly joined to the latter at its edge. Both recesses 20, 21 and the hole 22 are filled with oil through the oil filler neck 1. The oil serves as a means for transmitting the pressure existing outside the separating diaphragm 25 to the diaphragm 10.
Although in the arrangement according to the invention, like in the arrangement in public use, the filled-in oil covers the strain gages 11 because of the afore-mentioned opening 24 in the foil 23, the invention has the unexpected and surprising effect that it not only eliminates electromagnetic interference but also ?0 largely avoids influences on the pressure-dependent resistance changes of the strain gages, which are .
attributable to the property of the oil fill as a very good electric nonconductor and to the electric charging of the oil fill.
'.5 Fig. 3 shows a further development of the arrangement of Fig. 2, also in a sectional view. The metal body 17 has, on the header side, a caselike extension 17' which accommodates a circuit board 26 connected to the strain 30 gages 11. The circuit board contains a compensation circuit, particularly a temperature compensation circuit.
In a preferred embodiment of the invention, a further 35 electrically conductive foil 23' is provided along the inside of the extension 17'. This foil, like the foil 23, has to be connected to ground.
At its edge, the first cross-sectional surface 19 is tightly joined to the header 13.
A second cross-sectional surface 20, which faces away from the first cross-sectional surface 19, is provided with a second central recess 21 which is very shallow compared with the first recess 18. The two recesses 18, 21 communicate by means of a hole 22 in the metal body 17.
The first recess 18 accommodates the base 12 with the substrate 10' and the diaphragm 10 as well as the part 15 of insulating material in such a way that these parts are not in contact with the inside walls of the recess 18.
In the first recess 18, an electrically conductive foil 23 with a central opening 24 is disposed as close as possible to the strain gages 11 so that it covers at least the strain gages 11, but preferably the entire substrate 10' with the diaphragm 10, without touching these parts.
The foil 23, together with an electric connection of the substrate 10', must be connected to ground. This can be done, for example, by conductively bonding the foil 23 to metal areas 4", 5", 8~~ of the part 15, which are associated with the leads 4, 5, 8 (see Fig. 1). The ~1~~9~~
_,_ leads have to be connected to ground at the place where the pressure-measuring arrangement is used.
A metallic separating diaphragm 25 is fitted in the second recess 21 and is tightly joined to the latter at its edge. Both recesses 20, 21 and the hole 22 are filled with oil through the oil filler neck 1. The oil serves as a means for transmitting the pressure existing outside the separating diaphragm 25 to the diaphragm 10.
Although in the arrangement according to the invention, like in the arrangement in public use, the filled-in oil covers the strain gages 11 because of the afore-mentioned opening 24 in the foil 23, the invention has the unexpected and surprising effect that it not only eliminates electromagnetic interference but also ?0 largely avoids influences on the pressure-dependent resistance changes of the strain gages, which are .
attributable to the property of the oil fill as a very good electric nonconductor and to the electric charging of the oil fill.
'.5 Fig. 3 shows a further development of the arrangement of Fig. 2, also in a sectional view. The metal body 17 has, on the header side, a caselike extension 17' which accommodates a circuit board 26 connected to the strain 30 gages 11. The circuit board contains a compensation circuit, particularly a temperature compensation circuit.
In a preferred embodiment of the invention, a further 35 electrically conductive foil 23' is provided along the inside of the extension 17'. This foil, like the foil 23, has to be connected to ground.
Claims (4)
1. A pressure-measuring arrangement comprising:
a pressure sensor having a base and an associated diaphragm with strain gages attached to said diaphragm;
a header of insulating material with leads and with an oil filler neck, said header of insulating material having the base mounted thereon, and said leads making electrical contacts to the strain gages;
a metal body having a first central recess in a first cross-sectional surface, a second central recess in a second cross-sectional surface facing away from the first cross-sectional surface, and a hole connecting the first recess with the second recess, said first cross-sectional surface being tightly joined at its edge to the header of insulating material, and said first recess accommodating the substrate and the diaphragm without touching them;
an electrically conductive foil having an opening, said foil being disposed in the first recess as close as possible to, and covering but not touching, the strain gages and connected to ground;
a metallic separating diaphragm fitted in the second recess and closing the latter at its edge; and an oil fill in the recesses and in the hole.
a pressure sensor having a base and an associated diaphragm with strain gages attached to said diaphragm;
a header of insulating material with leads and with an oil filler neck, said header of insulating material having the base mounted thereon, and said leads making electrical contacts to the strain gages;
a metal body having a first central recess in a first cross-sectional surface, a second central recess in a second cross-sectional surface facing away from the first cross-sectional surface, and a hole connecting the first recess with the second recess, said first cross-sectional surface being tightly joined at its edge to the header of insulating material, and said first recess accommodating the substrate and the diaphragm without touching them;
an electrically conductive foil having an opening, said foil being disposed in the first recess as close as possible to, and covering but not touching, the strain gages and connected to ground;
a metallic separating diaphragm fitted in the second recess and closing the latter at its edge; and an oil fill in the recesses and in the hole.
2. A pressure-measuring arrangement as claimed in claim 1, comprising a pressure feed pipe extending through the header of insulating material and the base.
3. A pressure-measuring arrangement as claimed in claim 1 or 2, comprising a caselike extension of the metal body on the header side.
4. A pressure-measuring arrangement as claimed in claim 3, comprising a further electrically conductive foil which is provided along the inside of the extension and connected to ground.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP93810874.3 | 1993-12-14 | ||
| EP93810874A EP0658754B1 (en) | 1993-12-14 | 1993-12-14 | Pressure measuring arrangement |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2137962A1 CA2137962A1 (en) | 1995-06-15 |
| CA2137962C true CA2137962C (en) | 1999-10-05 |
Family
ID=8215088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002137962A Expired - Fee Related CA2137962C (en) | 1993-12-14 | 1994-12-13 | Pressure measuring arrangement |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US5551303A (en) |
| EP (1) | EP0658754B1 (en) |
| JP (1) | JPH08110278A (en) |
| CN (1) | CN1055158C (en) |
| CA (1) | CA2137962C (en) |
| DE (1) | DE59307025D1 (en) |
| DK (1) | DK0658754T3 (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DK0780674T3 (en) * | 1995-12-22 | 2000-04-03 | Envec Mess Und Regeltechn Gmbh | Pressure measuring device with screen electrode |
| DE59605469D1 (en) * | 1996-12-18 | 2000-07-27 | Wika Alexander Wiegand Gmbh | Diaphragm for a diaphragm seal |
| KR20040024324A (en) * | 2002-09-13 | 2004-03-20 | 주식회사 케이이씨 | Pressure sensor package |
| JP2004294413A (en) * | 2003-02-12 | 2004-10-21 | Pacific Ind Co Ltd | Pressure sensor, transmitter, and tire condition monitor |
| JP2005257497A (en) * | 2004-03-12 | 2005-09-22 | Denso Corp | Sensor device and connection structure of same |
| DE102008043175A1 (en) * | 2008-10-24 | 2010-04-29 | Endress + Hauser Gmbh + Co. Kg | Relative pressure sensor |
| DE102009028488A1 (en) | 2009-08-12 | 2011-02-17 | Endress + Hauser Gmbh + Co. Kg | Relative pressure sensor |
| JP5833936B2 (en) * | 2012-01-17 | 2015-12-16 | 株式会社不二工機 | Pressure sensor |
| DE102013110376A1 (en) | 2013-09-19 | 2015-03-19 | Endress + Hauser Gmbh + Co. Kg | Measuring device with a semiconductor sensor and a metallic support body |
| CN105319002A (en) * | 2015-11-27 | 2016-02-10 | 上海立格仪表有限公司 | Natural ventilation pressure measuring instrument |
| JP6527193B2 (en) * | 2017-04-07 | 2019-06-05 | 株式会社鷺宮製作所 | Pressure sensor |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57197435A (en) * | 1981-05-29 | 1982-12-03 | Hitachi Ltd | Semiconductor pressure converter |
| DE3569824D1 (en) * | 1985-09-11 | 1989-06-01 | Kunz Manfred | Pressure sensor |
| JPS63122926A (en) * | 1986-11-13 | 1988-05-26 | Nippon Denso Co Ltd | Piezoelectric pressure detector |
| JPH01147331A (en) * | 1987-12-03 | 1989-06-09 | Ngk Insulators Ltd | Pressure detector |
| JP2600863B2 (en) * | 1988-11-22 | 1997-04-16 | 株式会社デンソー | Mounting structure of high pressure semiconductor type pressure sensor |
| US4970898A (en) * | 1989-09-20 | 1990-11-20 | Rosemount Inc. | Pressure transmitter with flame isolating plug |
| JPH06132545A (en) * | 1992-10-19 | 1994-05-13 | Mitsubishi Electric Corp | Pressure detector |
-
1993
- 1993-12-14 DE DE59307025T patent/DE59307025D1/en not_active Expired - Lifetime
- 1993-12-14 EP EP93810874A patent/EP0658754B1/en not_active Expired - Lifetime
- 1993-12-14 DK DK93810874.3T patent/DK0658754T3/en active
-
1994
- 1994-12-05 US US08/349,608 patent/US5551303A/en not_active Expired - Lifetime
- 1994-12-13 CA CA002137962A patent/CA2137962C/en not_active Expired - Fee Related
- 1994-12-13 CN CN94119306.3A patent/CN1055158C/en not_active Expired - Lifetime
- 1994-12-14 JP JP6310980A patent/JPH08110278A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US5551303A (en) | 1996-09-03 |
| CN1109971A (en) | 1995-10-11 |
| DK0658754T3 (en) | 1998-03-02 |
| EP0658754A1 (en) | 1995-06-21 |
| EP0658754B1 (en) | 1997-07-30 |
| CN1055158C (en) | 2000-08-02 |
| JPH08110278A (en) | 1996-04-30 |
| CA2137962A1 (en) | 1995-06-15 |
| DE59307025D1 (en) | 1997-09-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed |