CA2198552A1 - Fabrication process of semiconductor substrate - Google Patents

Fabrication process of semiconductor substrate

Info

Publication number
CA2198552A1
CA2198552A1 CA002198552A CA2198552A CA2198552A1 CA 2198552 A1 CA2198552 A1 CA 2198552A1 CA 002198552 A CA002198552 A CA 002198552A CA 2198552 A CA2198552 A CA 2198552A CA 2198552 A1 CA2198552 A1 CA 2198552A1
Authority
CA
Canada
Prior art keywords
substrate
porous
layer
bonding
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002198552A
Other languages
French (fr)
Other versions
CA2198552C (en
Inventor
Kiyofumi Sakaguchi
Takao Yonehara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CA2198552A1 publication Critical patent/CA2198552A1/en
Application granted granted Critical
Publication of CA2198552C publication Critical patent/CA2198552C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • H01L21/76259—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along a porous layer

Abstract

SOI substrates are fabricated with sufficient quality and with good reproducibility. At the same time, saving of resources and reduction of cost are realized by reuse of wafer and the like.
Carried out to achieve the above are a step of bonding a principal surface of a first substrate to a principal surface of a second substrate, the first substrate being an Si substrate in which at least one layer of non-porous thin film is formed through a porous Si layer, a step of exposing the porous Si layer in a side surface of a bonding substrate comprised of the first substrate and the second substrate, a step of dividing the porous Si layer by oxidizing the bonding substrate, and a step of removing porous Si and oxidized porous Si layer on the second substrate separated by the division of the porous Si layer.
CA002198552A 1996-02-28 1997-02-26 Fabrication process of semiconductor substrate Expired - Fee Related CA2198552C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP04170996A JP3293736B2 (en) 1996-02-28 1996-02-28 Semiconductor substrate manufacturing method and bonded substrate
JP8-41709 1996-02-28

Publications (2)

Publication Number Publication Date
CA2198552A1 true CA2198552A1 (en) 1997-08-28
CA2198552C CA2198552C (en) 2002-03-26

Family

ID=12615961

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002198552A Expired - Fee Related CA2198552C (en) 1996-02-28 1997-02-26 Fabrication process of semiconductor substrate

Country Status (8)

Country Link
US (3) US6294478B1 (en)
EP (1) EP0793263A3 (en)
JP (1) JP3293736B2 (en)
KR (1) KR100238571B1 (en)
CN (1) CN1135601C (en)
CA (1) CA2198552C (en)
SG (1) SG55280A1 (en)
TW (1) TW333711B (en)

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Also Published As

Publication number Publication date
CN1169025A (en) 1997-12-31
US20010024876A1 (en) 2001-09-27
CN1135601C (en) 2004-01-21
US6294478B1 (en) 2001-09-25
KR970063766A (en) 1997-09-12
US20010053607A1 (en) 2001-12-20
CA2198552C (en) 2002-03-26
KR100238571B1 (en) 2000-01-15
JPH09237884A (en) 1997-09-09
US6350702B2 (en) 2002-02-26
TW333711B (en) 1998-06-11
SG55280A1 (en) 1998-12-21
JP3293736B2 (en) 2002-06-17
EP0793263A3 (en) 1998-07-08
EP0793263A2 (en) 1997-09-03

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