CA2205169A1 - Capacitive absolute pressure sensor and method - Google Patents

Capacitive absolute pressure sensor and method

Info

Publication number
CA2205169A1
CA2205169A1 CA002205169A CA2205169A CA2205169A1 CA 2205169 A1 CA2205169 A1 CA 2205169A1 CA 002205169 A CA002205169 A CA 002205169A CA 2205169 A CA2205169 A CA 2205169A CA 2205169 A1 CA2205169 A1 CA 2205169A1
Authority
CA
Canada
Prior art keywords
substrate
diaphragm
capacitance
pressure sensor
absolute pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002205169A
Other languages
French (fr)
Other versions
CA2205169C (en
Inventor
Wen H. Ko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Case Western Reserve University
Original Assignee
Wen H. Ko
Case Western Reserve University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wen H. Ko, Case Western Reserve University filed Critical Wen H. Ko
Publication of CA2205169A1 publication Critical patent/CA2205169A1/en
Application granted granted Critical
Publication of CA2205169C publication Critical patent/CA2205169C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Abstract

A capacitive absolute pressure sensor (10) includes a substrate (14) having an electrode (24) deposited thereon and a diaphragm assembly (12) disposed on the substrate (14). As pressure increases, the diaphragm (16) deflects, touches the electrode (24) (in the touch mode), and changes the capacitance of the sensor (10). The changed capacitance is sensed to thus sense pressure changes.
A burried feedthrough is used to sense the change in a capacitance in a chamber (34) under the diaphragm (16) and thus determine the pressure sensed.
A vacuum in the chamber (34) is maintained by proper selection of a thickness of a sensing electrode and an insulating layer (32), exposition thereof to a thermal cycle, and the hermetic bonding of the diaphragm assembly (12) to the substrate (14).
CA002205169A 1994-11-22 1995-11-09 Capacitive absolute pressure sensor and method Expired - Fee Related CA2205169C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/343,712 US5528452A (en) 1994-11-22 1994-11-22 Capacitive absolute pressure sensor
US08/343,712 1994-11-22
PCT/US1995/014770 WO1996016418A1 (en) 1994-11-22 1995-11-09 Capacitive absolute pressure sensor and method

Publications (2)

Publication Number Publication Date
CA2205169A1 true CA2205169A1 (en) 1996-05-30
CA2205169C CA2205169C (en) 2002-10-15

Family

ID=23347305

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002205169A Expired - Fee Related CA2205169C (en) 1994-11-22 1995-11-09 Capacitive absolute pressure sensor and method

Country Status (13)

Country Link
US (2) US5528452A (en)
EP (2) EP1286147A1 (en)
JP (1) JPH10509241A (en)
KR (1) KR100355421B1 (en)
CN (1) CN1092836C (en)
AU (1) AU686916B2 (en)
BR (1) BR9509747A (en)
CA (1) CA2205169C (en)
DE (2) DE818046T1 (en)
ES (1) ES2118672T1 (en)
PL (1) PL179139B1 (en)
RU (1) RU2171455C2 (en)
WO (1) WO1996016418A1 (en)

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Also Published As

Publication number Publication date
CA2205169C (en) 2002-10-15
CN1092836C (en) 2002-10-16
JPH10509241A (en) 1998-09-08
AU686916B2 (en) 1998-02-12
ES2118672T1 (en) 1998-10-01
WO1996016418A1 (en) 1996-05-30
DE69529477D1 (en) 2003-02-27
KR100355421B1 (en) 2002-12-18
EP0818046A1 (en) 1998-01-14
AU4158196A (en) 1996-06-17
RU2171455C2 (en) 2001-07-27
US5528452A (en) 1996-06-18
EP0818046A4 (en) 1998-12-02
US5585311A (en) 1996-12-17
PL320670A1 (en) 1997-10-27
DE818046T1 (en) 1998-07-16
EP0818046B1 (en) 2003-01-22
PL179139B1 (en) 2000-07-31
KR987000672A (en) 1998-03-30
EP1286147A1 (en) 2003-02-26
MX9703726A (en) 1998-07-31
DE69529477T2 (en) 2003-07-31
BR9509747A (en) 1997-10-21
CN1172547A (en) 1998-02-04

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