CA2271492A1 - Method and system for imaging an object or pattern - Google Patents
Method and system for imaging an object or patternInfo
- Publication number
- CA2271492A1 CA2271492A1 CA002271492A CA2271492A CA2271492A1 CA 2271492 A1 CA2271492 A1 CA 2271492A1 CA 002271492 A CA002271492 A CA 002271492A CA 2271492 A CA2271492 A CA 2271492A CA 2271492 A1 CA2271492 A1 CA 2271492A1
- Authority
- CA
- Canada
- Prior art keywords
- images
- subpictures
- simultaneously obtained
- imaging
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T5/00—Image enhancement or restoration
- G06T5/50—Image enhancement or restoration by the use of more than one image, e.g. averaging, subtraction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T1/00—General purpose image data processing
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T1/00—General purpose image data processing
- G06T1/0007—Image acquisition
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8822—Dark field detection
- G01N2021/8825—Separate detection of dark field and bright field
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
- G01N2021/95646—Soldering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/365—Control or image processing arrangements for digital or video microscopes
- G02B21/367—Control or image processing arrangements for digital or video microscopes providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2200/00—Indexing scheme for image data processing or generation, in general
- G06T2200/32—Indexing scheme for image data processing or generation, in general involving image mosaicing
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30148—Semiconductor; IC; Wafer
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30152—Solder
Abstract
A system for simultaneously obtaining (PD1-n) a plurality of images of an object (501) from a plurality of different viewpoints.
With such a system, bright-field images and dark-field images may be simultaneously obtained. This is accomplished by positioning a plurality of light receiving devices (PD1-n) are spaced substantially equally along at least a portion of a surface of an imaginary hemisphere surrounding the object. Another aspect of the invention generates composite images from simultaneously obtained images. Equivalent regions of each image, corresponding to geographically identical subpictures, are compared. The subpicture having the highest entropy is selected and stored, with the process continuing until all subpictures have been considered.
With such a system, bright-field images and dark-field images may be simultaneously obtained. This is accomplished by positioning a plurality of light receiving devices (PD1-n) are spaced substantially equally along at least a portion of a surface of an imaginary hemisphere surrounding the object. Another aspect of the invention generates composite images from simultaneously obtained images. Equivalent regions of each image, corresponding to geographically identical subpictures, are compared. The subpicture having the highest entropy is selected and stored, with the process continuing until all subpictures have been considered.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/748,040 | 1996-11-12 | ||
US08/748,040 US6075883A (en) | 1996-11-12 | 1996-11-12 | Method and system for imaging an object or pattern |
PCT/US1997/020432 WO1998021687A1 (en) | 1996-11-12 | 1997-11-07 | Method and system for imaging an object or pattern |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2271492A1 true CA2271492A1 (en) | 1998-05-22 |
CA2271492C CA2271492C (en) | 2007-05-29 |
Family
ID=25007738
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002271492A Expired - Fee Related CA2271492C (en) | 1996-11-12 | 1997-11-07 | Method and system for imaging an object or pattern |
Country Status (10)
Country | Link |
---|---|
US (3) | US6075883A (en) |
EP (2) | EP1016028B1 (en) |
AT (2) | ATE342549T1 (en) |
AU (1) | AU5174798A (en) |
CA (1) | CA2271492C (en) |
DE (2) | DE69736818D1 (en) |
DK (1) | DK1016028T3 (en) |
ES (1) | ES2207754T3 (en) |
PT (1) | PT1016028E (en) |
WO (1) | WO1998021687A1 (en) |
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-
1996
- 1996-11-12 US US08/748,040 patent/US6075883A/en not_active Expired - Lifetime
-
1997
- 1997-11-07 EP EP97946611A patent/EP1016028B1/en not_active Expired - Lifetime
- 1997-11-07 DK DK97946611T patent/DK1016028T3/en active
- 1997-11-07 PT PT97946611T patent/PT1016028E/en unknown
- 1997-11-07 AU AU51747/98A patent/AU5174798A/en not_active Abandoned
- 1997-11-07 EP EP03077317A patent/EP1359534B1/en not_active Expired - Lifetime
- 1997-11-07 DE DE69736818T patent/DE69736818D1/en not_active Expired - Fee Related
- 1997-11-07 CA CA002271492A patent/CA2271492C/en not_active Expired - Fee Related
- 1997-11-07 ES ES97946611T patent/ES2207754T3/en not_active Expired - Lifetime
- 1997-11-07 AT AT03077317T patent/ATE342549T1/en not_active IP Right Cessation
- 1997-11-07 WO PCT/US1997/020432 patent/WO1998021687A1/en active IP Right Grant
- 1997-11-07 AT AT97946611T patent/ATE250249T1/en not_active IP Right Cessation
- 1997-11-07 DE DE69725021T patent/DE69725021T2/en not_active Expired - Fee Related
-
2000
- 2000-03-03 US US09/518,559 patent/US6603874B1/en not_active Expired - Fee Related
-
2003
- 2003-03-12 US US10/387,940 patent/US20030215127A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US20030215127A1 (en) | 2003-11-20 |
PT1016028E (en) | 2004-02-27 |
DK1016028T3 (en) | 2004-01-26 |
US6603874B1 (en) | 2003-08-05 |
DE69725021D1 (en) | 2003-10-23 |
US6075883A (en) | 2000-06-13 |
EP1359534B1 (en) | 2006-10-11 |
CA2271492C (en) | 2007-05-29 |
EP1016028B1 (en) | 2003-09-17 |
ATE342549T1 (en) | 2006-11-15 |
EP1016028A1 (en) | 2000-07-05 |
EP1359534A1 (en) | 2003-11-05 |
ATE250249T1 (en) | 2003-10-15 |
DE69725021T2 (en) | 2004-04-22 |
WO1998021687A1 (en) | 1998-05-22 |
DE69736818D1 (en) | 2006-11-23 |
AU5174798A (en) | 1998-06-03 |
EP1016028A4 (en) | 2001-11-21 |
ES2207754T3 (en) | 2004-06-01 |
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