CA2420859A1 - Microneedle structure and production method therefor - Google Patents

Microneedle structure and production method therefor Download PDF

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Publication number
CA2420859A1
CA2420859A1 CA002420859A CA2420859A CA2420859A1 CA 2420859 A1 CA2420859 A1 CA 2420859A1 CA 002420859 A CA002420859 A CA 002420859A CA 2420859 A CA2420859 A CA 2420859A CA 2420859 A1 CA2420859 A1 CA 2420859A1
Authority
CA
Canada
Prior art keywords
production method
method therefor
protective layer
etching process
microneedle structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002420859A
Other languages
French (fr)
Other versions
CA2420859C (en
Inventor
Yehoshua Yeshurun
Meir Hefetz
Meint De Boer
J. W. Berenschot
J. G. E. Gardeniers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanopass Ltd
Original Assignee
Nanopass Ltd.
Yehoshua Yeshurun
Meir Hefetz
Meint De Boer
J. W. Berenschot
J. G. E. Gardeniers
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from IL13813100A external-priority patent/IL138131A0/en
Application filed by Nanopass Ltd., Yehoshua Yeshurun, Meir Hefetz, Meint De Boer, J. W. Berenschot, J. G. E. Gardeniers filed Critical Nanopass Ltd.
Publication of CA2420859A1 publication Critical patent/CA2420859A1/en
Application granted granted Critical
Publication of CA2420859C publication Critical patent/CA2420859C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/005—Bulk micromachining
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • A61M2037/003—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles having a lumen
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • A61M2037/0053—Methods for producing microneedles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0361—Tips, pillars

Abstract

A method for processing a wafer to form a plurality of hollow microneedles projecing from a substrate includes forming, by use of a dry etching process, a number of groups of recessed features, each including at least one slot deployed to form an open shape having an included area and at least one hole located within the included area. The internal surfaces of the holes and the slots are then coated with a protective layer. An anisotropic wet etching process is then performed in such a manner as to remove material from outside the included areas while leaving a projecting feature within each of the included areas. The protective layer is then removed to reveal the microneedles.
CA002420859A 2000-08-28 2001-08-28 Microneedle structure and production method therefor Expired - Lifetime CA2420859C (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
IL138131 2000-08-28
IL13813100A IL138131A0 (en) 2000-08-28 2000-08-28 Microneedle structure and production method therefor
US09/677,175 2000-10-02
US09/677,175 US6533949B1 (en) 2000-08-28 2000-10-02 Microneedle structure and production method therefor
PCT/IL2001/000806 WO2002017985A2 (en) 2000-08-28 2001-08-28 Microneedle structure and production method therefor

Publications (2)

Publication Number Publication Date
CA2420859A1 true CA2420859A1 (en) 2002-03-07
CA2420859C CA2420859C (en) 2009-04-14

Family

ID=26323975

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002420859A Expired - Lifetime CA2420859C (en) 2000-08-28 2001-08-28 Microneedle structure and production method therefor

Country Status (6)

Country Link
US (4) US6533949B1 (en)
EP (1) EP1330274B1 (en)
JP (1) JP4750347B2 (en)
AU (2) AU8248901A (en)
CA (1) CA2420859C (en)
WO (1) WO2002017985A2 (en)

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