CA2462397C - Mixing arrangement for atomizing nozzle in multi-phase flow - Google Patents
Mixing arrangement for atomizing nozzle in multi-phase flow Download PDFInfo
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- CA2462397C CA2462397C CA2462397A CA2462397A CA2462397C CA 2462397 C CA2462397 C CA 2462397C CA 2462397 A CA2462397 A CA 2462397A CA 2462397 A CA2462397 A CA 2462397A CA 2462397 C CA2462397 C CA 2462397C
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- 238000012545 processing Methods 0.000 claims abstract description 17
- 239000012530 fluid Substances 0.000 claims description 16
- 238000005304 joining Methods 0.000 claims description 12
- 239000000203 mixture Substances 0.000 claims description 8
- 238000004140 cleaning Methods 0.000 claims description 7
- 238000003780 insertion Methods 0.000 claims 3
- 230000037431 insertion Effects 0.000 claims 3
- 238000000889 atomisation Methods 0.000 abstract description 6
- 230000001154 acute effect Effects 0.000 abstract description 5
- 239000003209 petroleum derivative Substances 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract 1
- 230000010349 pulsation Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 15
- 239000012071 phase Substances 0.000 description 12
- 239000007788 liquid Substances 0.000 description 10
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- 230000015556 catabolic process Effects 0.000 description 1
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- 238000004939 coking Methods 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/20—Jet mixers, i.e. mixers using high-speed fluid streams
- B01F25/23—Mixing by intersecting jets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/26—Nozzle-type reactors, i.e. the distribution of the initial reactants within the reactor is effected by their introduction or injection through nozzles
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10B—DESTRUCTIVE DISTILLATION OF CARBONACEOUS MATERIALS FOR PRODUCTION OF GAS, COKE, TAR, OR SIMILAR MATERIALS
- C10B55/00—Coking mineral oils, bitumen, tar, and the like or mixtures thereof with solid carbonaceous material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F2215/00—Auxiliary or complementary information in relation with mixing
- B01F2215/04—Technical information in relation with mixing
- B01F2215/0413—Numerical information
- B01F2215/0418—Geometrical information
- B01F2215/0422—Numerical values of angles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F2215/00—Auxiliary or complementary information in relation with mixing
- B01F2215/04—Technical information in relation with mixing
- B01F2215/0413—Numerical information
- B01F2215/0436—Operational information
- B01F2215/0481—Numerical speed values
Abstract
The invention relates to an improved mixing arrangement for, primarily, moving bitumen in steam from sources of such bitumen and steam to a reactor or coker for further processing of the bitumen into petroleum products. The invention provides a main conduit connected to an atomizing nozzle mounted in a wall of the reactor and first and second conduits for flowing bitumen and steam respectively into the main conduit. The first conduit is angled relative to the main conduit at an acute angle of about 45° and the second conduit is angled relative to the main conduit at an acute angle of about 30°. The second conduit is positioned upstream of the first conduit by a short distance of about 23mm and may be angled radially relative to the first conduit by any angle, although a 90° angle is preferred. A flow accelerating nozzle is located in the second conduit adjacent the entrance therefrom into the main conduit. The arrangement of the invention improves the flow characteristics of 2-phase material flowing to the atomizing nozzle, reducing pulsations in the main conduit and improving the resulting atomization of the bitumen in the reactor.
Description
MIXING ARRANGEMENT FOR ATOMIZING NOZZLE IN MULTI-PHASE FLOW
The present invention relates to a mixing assembly for an atomizing nozzle used in multi-phase flow and in particular to such an assembly that would be used with oil or bitumen and steam being fed to a coker.
BACKGROUND OF THE INVENTION
When bitumen or heavy oil is extracted from tar sands it is not initially in condition for further processing into usable petroleum products. Usually the bitumen is processed in a reactor or a coker, in which atomized droplets of the bitumen in a carrier such as steam are heated to produce low-boiling petroleum products. The efficiency of the coking process is enhanced if the bitumen droplets are of a uniform small diameter, of the order of 300 pm. In a typical installation the bitumen is introduced into a flowing stream of high pressure steam and preferably is broken down into bubbles or particles as the 2-phase mixture of bitumen and steam flows along a mixing apparatus which then pass through an atomizing nozzle into the interior of the reactor or coker for further processing therein.
One installation for achieving atomized bitumen in steam is found in US Patent No.
6,003,789. It uses a mixing assembly or apparatus as is illustrated in Figure 1 therein, wherein an atomizing nozzle 20 is mounted in the wall of the reactor, a cylindrical conduit 24 is attached to the nozzle and a pair of parallel conduits 25 and 26 are provided for introducing steam and bitumen respectively into the main conduit 24, conduit 26 being downstream of conduit 25. It will be noted that the conduits 25 and 26 meet the conduit 24 generally at right angles with respect thereto. A flow-accelerating nozzle 22 is provided in the conduit 24 between the junctures of the steam and bitumen conduits 25 and 26 with the conduit 24. The nozzle 22 is intended to increase the flow velocity of the steam to improve break-up of the bitumen into bubbles or droplets. A valve is shown at the end of the conduit 24 opposite the atomizing nozzle 20 and upstream of the steam conduit 25, for use in introducing a cleaning rod into the conduit 24. The rod is used to clear blockages within the conduit 24 and the atomizing nozzle 20. It will be apparent that the minimum orifice size of the nozzle 22 cannot be less than the diameter of the cleaning rod, since the nozzle 22 is located within the main conduit 24.
Otherwise, the cleaning rod could not pass along the full length of the main conduit. This places a limitation on the efficiency of the entire apparatus.
The above installation is an improvement over previous installations but it is not without its faults, occasioned primarily by the manner in which the conduits 24, 25 and 26 are arranged relative to each other. There are problems with flows because of the 90 relation between the conduit 24 and each of the conduits 25 and 26. Furthermore, there are problems in arranging the conduits in and around the reactor due to the relative positioning of the various conduits.
SUMMARY OF THE INVENTION
The present invention is intended to overcome the problems associated with the mixing arrangement of the above-identified US patent. This is achieved through re-aligning the bitumen and steam conduits so that they meet the main conduit at acute angles with respect thereto and by removing the flow-accelerating nozzle from the main conduit. There is a smoother transition of bitumen and steam as these products pass from their respective conduits into the main conduit.
Also, with the present invention the flow-accelerating nozzle is moved to the steam conduit and is located therein close to the point at which that conduit meets the main conduit, such that the steam is already accelerating as it enters the main conduit rather than after entering as with the prior art. There is a dramatic improvement in flow characteristics with the mixing arrangement of the present invention as compared to the prior art and the resultant atomized bitumen that enters the reactor is more easily processed into appropriate petroleum products than with the apparatus of the prior art.
The present invention, like the prior art, utilizes the formation of small bubbles of gas (steam) to carry the liquid phase (bitumen) to the atomizing nozzle. The present invention will enhance the formation of bubbles in such multi- or 2-phase flow. Specifically, with the arrangement of the present invention there is enhanced formation of bubbles less than 2mm in diameter that are evenly distributed within the flow downstream of the point at which the gas and liquid phases are mixed. By providing a "bubbly flow" with this arrangement, the liquid is dispersed and is more easily atomized than with other types of 2-phase flow, such as slug or annular flow. The bubbles of gas in the liquid enhance downstream atomization through the exit orifice by the nature of the gas phase compressibility. By producing a uniform distribution of fine bubbles in the flow, the liquid is broken down into small webbed or ligament structures that
The present invention relates to a mixing assembly for an atomizing nozzle used in multi-phase flow and in particular to such an assembly that would be used with oil or bitumen and steam being fed to a coker.
BACKGROUND OF THE INVENTION
When bitumen or heavy oil is extracted from tar sands it is not initially in condition for further processing into usable petroleum products. Usually the bitumen is processed in a reactor or a coker, in which atomized droplets of the bitumen in a carrier such as steam are heated to produce low-boiling petroleum products. The efficiency of the coking process is enhanced if the bitumen droplets are of a uniform small diameter, of the order of 300 pm. In a typical installation the bitumen is introduced into a flowing stream of high pressure steam and preferably is broken down into bubbles or particles as the 2-phase mixture of bitumen and steam flows along a mixing apparatus which then pass through an atomizing nozzle into the interior of the reactor or coker for further processing therein.
One installation for achieving atomized bitumen in steam is found in US Patent No.
6,003,789. It uses a mixing assembly or apparatus as is illustrated in Figure 1 therein, wherein an atomizing nozzle 20 is mounted in the wall of the reactor, a cylindrical conduit 24 is attached to the nozzle and a pair of parallel conduits 25 and 26 are provided for introducing steam and bitumen respectively into the main conduit 24, conduit 26 being downstream of conduit 25. It will be noted that the conduits 25 and 26 meet the conduit 24 generally at right angles with respect thereto. A flow-accelerating nozzle 22 is provided in the conduit 24 between the junctures of the steam and bitumen conduits 25 and 26 with the conduit 24. The nozzle 22 is intended to increase the flow velocity of the steam to improve break-up of the bitumen into bubbles or droplets. A valve is shown at the end of the conduit 24 opposite the atomizing nozzle 20 and upstream of the steam conduit 25, for use in introducing a cleaning rod into the conduit 24. The rod is used to clear blockages within the conduit 24 and the atomizing nozzle 20. It will be apparent that the minimum orifice size of the nozzle 22 cannot be less than the diameter of the cleaning rod, since the nozzle 22 is located within the main conduit 24.
Otherwise, the cleaning rod could not pass along the full length of the main conduit. This places a limitation on the efficiency of the entire apparatus.
The above installation is an improvement over previous installations but it is not without its faults, occasioned primarily by the manner in which the conduits 24, 25 and 26 are arranged relative to each other. There are problems with flows because of the 90 relation between the conduit 24 and each of the conduits 25 and 26. Furthermore, there are problems in arranging the conduits in and around the reactor due to the relative positioning of the various conduits.
SUMMARY OF THE INVENTION
The present invention is intended to overcome the problems associated with the mixing arrangement of the above-identified US patent. This is achieved through re-aligning the bitumen and steam conduits so that they meet the main conduit at acute angles with respect thereto and by removing the flow-accelerating nozzle from the main conduit. There is a smoother transition of bitumen and steam as these products pass from their respective conduits into the main conduit.
Also, with the present invention the flow-accelerating nozzle is moved to the steam conduit and is located therein close to the point at which that conduit meets the main conduit, such that the steam is already accelerating as it enters the main conduit rather than after entering as with the prior art. There is a dramatic improvement in flow characteristics with the mixing arrangement of the present invention as compared to the prior art and the resultant atomized bitumen that enters the reactor is more easily processed into appropriate petroleum products than with the apparatus of the prior art.
The present invention, like the prior art, utilizes the formation of small bubbles of gas (steam) to carry the liquid phase (bitumen) to the atomizing nozzle. The present invention will enhance the formation of bubbles in such multi- or 2-phase flow. Specifically, with the arrangement of the present invention there is enhanced formation of bubbles less than 2mm in diameter that are evenly distributed within the flow downstream of the point at which the gas and liquid phases are mixed. By providing a "bubbly flow" with this arrangement, the liquid is dispersed and is more easily atomized than with other types of 2-phase flow, such as slug or annular flow. The bubbles of gas in the liquid enhance downstream atomization through the exit orifice by the nature of the gas phase compressibility. By producing a uniform distribution of fine bubbles in the flow, the liquid is broken down into small webbed or ligament structures that
2 are more easily broken into droplets when the gas decompresses at the nozzle exit. The uniformity of bubble distribution within the liquid ensures a near constant (with respect to time) gas-to-liquid mass ratio thereby giving consistent atomization (or droplet size). The flow has a minimal pulsing in it, thereby minimizing variations in the atomization over any period of time.
This is in contrast to other designs of 2-phase flow mixing devices that may or may not produce a bubbly flow. For example, if there is a slug type flow, a large variation (with time) of the gas-to-liquid mass ratio at the nozzle tip can result, causing significant degradation in atomization efficiency.
It may be noted that the present invention was developed for applications in which a low gas-to-liquid mass ratio is used, to minimize costs for compressible gas phase use. Typically, the present invention works well for gas-to-liquid (GLR) mass ratios of 0.5% or higher. In actual tests, the GLR has been used as high as 1.5% without encountering a change to slug flow.
In summary of the above, the present invention may be considered as providing an arrangement for feeding a mixture of bitumen and steam to a reactor for further processing of atomized bitumen within the reactor comprising: an atomizing nozzle connected to a wall of the reactor and opening to an interior of the reactor, the nozzle being adapted to atomize bitumen carried by steam into droplets suitable for such further processing; a main conduit having a main axis, connected at a proximal end to the nozzle and including openable closure means at a distal end thereof; a first feed conduit having a first axis and connected to a source of bitumen, the first conduit being in a first plane containing the main and first axes, the first feed conduit joining the main conduit at an angle in the range of 30 to 60 as defined between the main and first axes upstream of the junction between the main and first conduits; a second feed conduit having a second axis and connected to a source of steam, the second conduit being in a second plane containing the main and second axes, the second feed conduit joining the main conduit upstream of the junction between the main and first conduits at an angle in the range of 20 to 40 as defined between the main and second axes upstream of the junction between the main and second conduits; and flow-accelerating nozzle means positioned in the second feed conduit upstream of the juncture between the main and second conduits.
The present invention may also be used with oil and steam processing equipment and can
This is in contrast to other designs of 2-phase flow mixing devices that may or may not produce a bubbly flow. For example, if there is a slug type flow, a large variation (with time) of the gas-to-liquid mass ratio at the nozzle tip can result, causing significant degradation in atomization efficiency.
It may be noted that the present invention was developed for applications in which a low gas-to-liquid mass ratio is used, to minimize costs for compressible gas phase use. Typically, the present invention works well for gas-to-liquid (GLR) mass ratios of 0.5% or higher. In actual tests, the GLR has been used as high as 1.5% without encountering a change to slug flow.
In summary of the above, the present invention may be considered as providing an arrangement for feeding a mixture of bitumen and steam to a reactor for further processing of atomized bitumen within the reactor comprising: an atomizing nozzle connected to a wall of the reactor and opening to an interior of the reactor, the nozzle being adapted to atomize bitumen carried by steam into droplets suitable for such further processing; a main conduit having a main axis, connected at a proximal end to the nozzle and including openable closure means at a distal end thereof; a first feed conduit having a first axis and connected to a source of bitumen, the first conduit being in a first plane containing the main and first axes, the first feed conduit joining the main conduit at an angle in the range of 30 to 60 as defined between the main and first axes upstream of the junction between the main and first conduits; a second feed conduit having a second axis and connected to a source of steam, the second conduit being in a second plane containing the main and second axes, the second feed conduit joining the main conduit upstream of the junction between the main and first conduits at an angle in the range of 20 to 40 as defined between the main and second axes upstream of the junction between the main and second conduits; and flow-accelerating nozzle means positioned in the second feed conduit upstream of the juncture between the main and second conduits.
The present invention may also be used with oil and steam processing equipment and can
3 be used with existing atomizing nozzles already provided within a reactor.
Thus the present invention may also be considered as providing a mixing arrangement for feeding a mixture of oil and steam to an atomizing nozzle connected to a reactor for further processing therein, comprising: a main conduit having a main axis, for connection at a proximal end thereof to the nozzle and including openable closure means at a distal end thereof; a first feed conduit having a first axis and connected to a source of oil, the first conduit being in a first plane containing the main and first axes, the first feed conduit joining the main conduit at an angle in the range of 30 to 60 as defined between the main and first axes upstream of the junction between the main and first conduits; a second feed conduit having a second axis and connected to a source of steam, the second conduit being in a second plane containing the main and second axes, the second feed conduit joining the main conduit upstream of the junction between the main and first conduits at an angle in the range of 20 to 40 as defined between the main and second axes upstream of the junction between the main and second conduits; and flow-accelerating nozzle means positioned in the second feed conduit upstream of the juncture between the main and second conduits.
The invention furthermore can be used with liquid processing equipment in which a heavier, incompressible, fluid is carried by a lighter, compressible, fluid to a location for further processing. Such invention thus may be considered as providing a mixing arrangement for feeding a mixture of a heavier, generally incompressible, fluid and a lighter, compressible, fluid to a location for further processing therein, comprising: a main conduit having a main axis, for connection at a proximal end thereof to processing apparatus at the location;
a first feed conduit having a first axis and connected to a source of the heavier fluid, the first conduit being in a first plane containing the main and first axes, the first feed conduit joining the main conduit at an angle in the range of 30 to 60 as defined between the main and first axes upstream of the junction between the main and first conduits; a second feed conduit having a second axis and connected to a source of the lighter fluid, the second conduit being in a second plane containing the main and second axes, the second feed conduit joining the main conduit upstream of the junction between the main and first conduits at an angle in the range of 20 to 40 as defined between the main and second axes upstream of the junction between the main and second
Thus the present invention may also be considered as providing a mixing arrangement for feeding a mixture of oil and steam to an atomizing nozzle connected to a reactor for further processing therein, comprising: a main conduit having a main axis, for connection at a proximal end thereof to the nozzle and including openable closure means at a distal end thereof; a first feed conduit having a first axis and connected to a source of oil, the first conduit being in a first plane containing the main and first axes, the first feed conduit joining the main conduit at an angle in the range of 30 to 60 as defined between the main and first axes upstream of the junction between the main and first conduits; a second feed conduit having a second axis and connected to a source of steam, the second conduit being in a second plane containing the main and second axes, the second feed conduit joining the main conduit upstream of the junction between the main and first conduits at an angle in the range of 20 to 40 as defined between the main and second axes upstream of the junction between the main and second conduits; and flow-accelerating nozzle means positioned in the second feed conduit upstream of the juncture between the main and second conduits.
The invention furthermore can be used with liquid processing equipment in which a heavier, incompressible, fluid is carried by a lighter, compressible, fluid to a location for further processing. Such invention thus may be considered as providing a mixing arrangement for feeding a mixture of a heavier, generally incompressible, fluid and a lighter, compressible, fluid to a location for further processing therein, comprising: a main conduit having a main axis, for connection at a proximal end thereof to processing apparatus at the location;
a first feed conduit having a first axis and connected to a source of the heavier fluid, the first conduit being in a first plane containing the main and first axes, the first feed conduit joining the main conduit at an angle in the range of 30 to 60 as defined between the main and first axes upstream of the junction between the main and first conduits; a second feed conduit having a second axis and connected to a source of the lighter fluid, the second conduit being in a second plane containing the main and second axes, the second feed conduit joining the main conduit upstream of the junction between the main and first conduits at an angle in the range of 20 to 40 as defined between the main and second axes upstream of the junction between the main and second
4 conduits; and flow-accelerating nozzle means positioned in the second feed conduit upstream of the juncture between the main and second conduits.
BRIEF DESCRIPTION OF THE DRAWINGS
Figure 1 represents a prior art mixing arrangement as is illustrated in US
Patent No.
6,003,789.
Figure 2 is a perspective view of a mixing arrangement in accordance with the present invention.
Figure 3 is an enlarged cross-sectional view of the mixing arrangement of the present invention at the junctions of the bitumen and steam conduits with the main conduit.
Figures 4A and 4B show by way of end views two of many possible relationships among the conduits of the mixing arrangement.
DESCRIPTION OF THE PREFERRED EMBODIMENT' Figure 1 as discussed above illustrates a prior art mixing arrangement in which both the bitumen and steam conduits (26, 25) meet the main conduit 24 at right angles, the bitumen and steam conduits being generally parallel to each other.
Figure 2 illustrates a mixing arrangement 30 in accordance with the present invention, as utilized with a reactor or coker 32. The mixing arrangement of this invention includes a main conduit 34 connected at a proximal end thereof to an atomizing nozzle 36 that is fixed in a wall 38 of the reactor. The atomizing nozzle 36 does not form a part of the present invention and can be one similar to the one disclosed in the aforementioned US Patent No.
6,003,789. At the distal end of the conduit 34 is a valve or closure member 40 which can be opened to admit a cleaning rod R, used to push any bitumen that might be clogging the conduit 34 through the conduit and the atomizing nozzle into the reactor. Normally the closure member 40 will be closed during operation of the mixing arrangement.
There are two supply or feed conduits connected to the main conduit 34, namely a first or bitumen feed conduit 42 and a second or steam feed conduit 44. Conduit 42 has a longitudinal or first axis 46 and conduit 44 has a longitudinal or second axis 48. The main conduit has its own
BRIEF DESCRIPTION OF THE DRAWINGS
Figure 1 represents a prior art mixing arrangement as is illustrated in US
Patent No.
6,003,789.
Figure 2 is a perspective view of a mixing arrangement in accordance with the present invention.
Figure 3 is an enlarged cross-sectional view of the mixing arrangement of the present invention at the junctions of the bitumen and steam conduits with the main conduit.
Figures 4A and 4B show by way of end views two of many possible relationships among the conduits of the mixing arrangement.
DESCRIPTION OF THE PREFERRED EMBODIMENT' Figure 1 as discussed above illustrates a prior art mixing arrangement in which both the bitumen and steam conduits (26, 25) meet the main conduit 24 at right angles, the bitumen and steam conduits being generally parallel to each other.
Figure 2 illustrates a mixing arrangement 30 in accordance with the present invention, as utilized with a reactor or coker 32. The mixing arrangement of this invention includes a main conduit 34 connected at a proximal end thereof to an atomizing nozzle 36 that is fixed in a wall 38 of the reactor. The atomizing nozzle 36 does not form a part of the present invention and can be one similar to the one disclosed in the aforementioned US Patent No.
6,003,789. At the distal end of the conduit 34 is a valve or closure member 40 which can be opened to admit a cleaning rod R, used to push any bitumen that might be clogging the conduit 34 through the conduit and the atomizing nozzle into the reactor. Normally the closure member 40 will be closed during operation of the mixing arrangement.
There are two supply or feed conduits connected to the main conduit 34, namely a first or bitumen feed conduit 42 and a second or steam feed conduit 44. Conduit 42 has a longitudinal or first axis 46 and conduit 44 has a longitudinal or second axis 48. The main conduit has its own
5 longitudinal or main axis 50. The conduits are set out such that the main and first axes 50, 46 are in a first plane P, and the main and second axes are in a second plane P2.
Furthermore, as seen in the drawings the first conduit 42 intersects the main conduit 34 at an acute angle defined between the main and first axes upstream of the junction between the first and main conduits, while the second conduit 44 intersects the main conduit 34 at an acute angle 13 defined between the main and second axes upstream of the junction between the second and main conduits. It has been found that the angle - preferably will be within the range of 30 to 60 while the angle f3 will be within the range of 20 to 40 . For optimum performance of the mixing arrangement of this invention the angle will be about 45 and the angle 13 will be about 30 .
Depending on the equipment surrounding the reactor 32 the relationship between the planes P, and P2 can be set so as to minimize any interference between the conduits 34, 42 and 44 and such surrounding equipment. Figures 4A and 4B show two possible relationship that could be utilized, it being understood that any number of angular relationships between the planes is possible without detracting from the performance of the mixing arrangement. In Figure 4A the planes P1 and P2 are shown as being coplanar, arranged on opposite sides of the conduit 34. In Figure 4B the planes P, and P2 are shown as being arranged at, generally speaking, 90 to each other.
The interior of the conduit 34 in the vicinity of the junctions of the feed conduits 42 and 44 therewith is shown in Figure 3. There it will be seen that the second conduit 44 is provided with a flow-accelerating nozzle 52 in the form of a reduced diameter section 54 adjacent the entrance from the conduit 44 to the conduit 34. This nozzle accelerates the pressurized steam as it enters the conduit 34 so that it will be more effective in carrying bitumen from the conduit 42 towards the atomizing nozzle 36. Since the nozzle 52 is not located within the main conduit 34 the orifice size thereof is not limited physically as with the prior art arrangement and thus the orifice can be sized for optimum gas bubble production.
Figure 3 also illustrates the dimensional relationship among the components of the present invention in the vicinity of the junctions of the feed conduits 42 and 44 with the main conduit 34. In one advantageous version of the present invention each of the main and first feed conduits has a diameter DI, D2 respectively of about 38mm and the second feed conduit has a
Furthermore, as seen in the drawings the first conduit 42 intersects the main conduit 34 at an acute angle defined between the main and first axes upstream of the junction between the first and main conduits, while the second conduit 44 intersects the main conduit 34 at an acute angle 13 defined between the main and second axes upstream of the junction between the second and main conduits. It has been found that the angle - preferably will be within the range of 30 to 60 while the angle f3 will be within the range of 20 to 40 . For optimum performance of the mixing arrangement of this invention the angle will be about 45 and the angle 13 will be about 30 .
Depending on the equipment surrounding the reactor 32 the relationship between the planes P, and P2 can be set so as to minimize any interference between the conduits 34, 42 and 44 and such surrounding equipment. Figures 4A and 4B show two possible relationship that could be utilized, it being understood that any number of angular relationships between the planes is possible without detracting from the performance of the mixing arrangement. In Figure 4A the planes P1 and P2 are shown as being coplanar, arranged on opposite sides of the conduit 34. In Figure 4B the planes P, and P2 are shown as being arranged at, generally speaking, 90 to each other.
The interior of the conduit 34 in the vicinity of the junctions of the feed conduits 42 and 44 therewith is shown in Figure 3. There it will be seen that the second conduit 44 is provided with a flow-accelerating nozzle 52 in the form of a reduced diameter section 54 adjacent the entrance from the conduit 44 to the conduit 34. This nozzle accelerates the pressurized steam as it enters the conduit 34 so that it will be more effective in carrying bitumen from the conduit 42 towards the atomizing nozzle 36. Since the nozzle 52 is not located within the main conduit 34 the orifice size thereof is not limited physically as with the prior art arrangement and thus the orifice can be sized for optimum gas bubble production.
Figure 3 also illustrates the dimensional relationship among the components of the present invention in the vicinity of the junctions of the feed conduits 42 and 44 with the main conduit 34. In one advantageous version of the present invention each of the main and first feed conduits has a diameter DI, D2 respectively of about 38mm and the second feed conduit has a
6 diameter D3 of about 24mm. The accelerating nozzle 52 had. a diameter D4 of about 10mm. The separation S between the points on the main axis 50 intersected by the first axis 46 and the second axis 48 is about 23mm. It can therefore be seen that the two feed conduits intersect the main conduit much closer than in the prior art arrangement and this also contributes to a more efficient operation of the mixing arrangement of the present invention. In more general terms, for scaling purposes, the diameter D2 of the first feed conduit 42 should be substantially equal to the diameter D i of the main conduit 34, the diameter D3 of the second feed conduit 44 should be about 60% to 65% of the diameter of the first feed conduit, and the diameter D4 of the accelerating nozzle should be about 42% of the diameter of the second feed conduit. The diameter D4 of the accelerating nozzle 52 should also be selected so that the mean gas velocity of the compressible fluid exiting the nozzle is at least 24.4 m/sec.
It should also be understood that the present invention is not restricted to use with bitumen and steam. It can be used in any situation in which a heavier fluid component is to be carried in and by a lighter fluid or gas component to a final location for further processing of the heavier component. The present invention could be used, for example, for the transportation of oil in water or steam if desired. The gas component (the second fluid) could be, for example, steam (as described), pentane, butane, propane, air or a mixture thereof, depending on the end use application. Some of the organic gases have been considered for coker reactor operations as the compressible gas phase since there is often an abundance of such gases at the plant site and, in fact, these gases can be used in a recycle operation that minimizes production of environmental emissions. Of importance is the fact that one phase is incompressible and that it is being dispersed by the introduction of a second, compressible, phase for conditioning the flow for atomization that is effected downstream of the zone at which the gas is mixed with the liquid.
As indicated above, the present invention does not rely on any particular nozzle tip for effective operation. The invention will work with the nozzle tip described in the previously-mentioned US patent or with any other nozzle designed for atomizing multi-phase flow. The present invention will enhance the efficiency of any such nozzle, allowing for the flow to be tuned for optimal performance.
Other modifications to the present invention may present themselves to a skilled person
It should also be understood that the present invention is not restricted to use with bitumen and steam. It can be used in any situation in which a heavier fluid component is to be carried in and by a lighter fluid or gas component to a final location for further processing of the heavier component. The present invention could be used, for example, for the transportation of oil in water or steam if desired. The gas component (the second fluid) could be, for example, steam (as described), pentane, butane, propane, air or a mixture thereof, depending on the end use application. Some of the organic gases have been considered for coker reactor operations as the compressible gas phase since there is often an abundance of such gases at the plant site and, in fact, these gases can be used in a recycle operation that minimizes production of environmental emissions. Of importance is the fact that one phase is incompressible and that it is being dispersed by the introduction of a second, compressible, phase for conditioning the flow for atomization that is effected downstream of the zone at which the gas is mixed with the liquid.
As indicated above, the present invention does not rely on any particular nozzle tip for effective operation. The invention will work with the nozzle tip described in the previously-mentioned US patent or with any other nozzle designed for atomizing multi-phase flow. The present invention will enhance the efficiency of any such nozzle, allowing for the flow to be tuned for optimal performance.
Other modifications to the present invention may present themselves to a skilled person
7 in the art. The protection to be afforded the present invention is to be determined from the scope of the claims appended hereto.
8
Claims (19)
1. An arrangement for feeding a mixture of bitumen and steam to a reactor for further processing of atomized bitumen within the reactor comprising:
an atomizing nozzle connected to a wall of said reactor and opening to an interior of said reactor, said nozzle being adapted to atomize bitumen carried by steam into droplets suitable for such further processing;
a main conduit having a main axis, connected at a proximal end to said nozzle and including openable closure means at a distal end thereof;
a first feed conduit having a first axis and connected to a source of bitumen, said first conduit being in a first plane containing said main and first axes, said first feed conduit joining said main conduit at an angle in the range of 30° to 60° as defined between said main and first axes upstream of the junction between said main and first conduits;
a second feed conduit having a second axis and connected to a source of steam, said second conduit being in a second plane containing said main and second axes, said second feed conduit joining said main conduit upstream of the junction between said main and first conduits at an angle in the range of 20° to 40° as defined between said main and second axes upstream of the junction between said main and second conduits; and flow-accelerating nozzle means positioned in said second feed conduit upstream of the juncture between said main and second conduits.
an atomizing nozzle connected to a wall of said reactor and opening to an interior of said reactor, said nozzle being adapted to atomize bitumen carried by steam into droplets suitable for such further processing;
a main conduit having a main axis, connected at a proximal end to said nozzle and including openable closure means at a distal end thereof;
a first feed conduit having a first axis and connected to a source of bitumen, said first conduit being in a first plane containing said main and first axes, said first feed conduit joining said main conduit at an angle in the range of 30° to 60° as defined between said main and first axes upstream of the junction between said main and first conduits;
a second feed conduit having a second axis and connected to a source of steam, said second conduit being in a second plane containing said main and second axes, said second feed conduit joining said main conduit upstream of the junction between said main and first conduits at an angle in the range of 20° to 40° as defined between said main and second axes upstream of the junction between said main and second conduits; and flow-accelerating nozzle means positioned in said second feed conduit upstream of the juncture between said main and second conduits.
2. The arrangement of claim 1 wherein said first and second planes are coplanar, with said first and second feed conduits being positioned on opposite sides of said main conduit.
3. The arrangement of claim 1 wherein said first and second planes are separated angularly by an angle in the vicinity of 90°.
4. The arrangement of claim 1 wherein said flow accelerating nozzle means is positioned in said second feed conduit adjacent to the junction of said second feed conduit with said main conduit.
5. The arrangement of claim 1 wherein said angle between said main and first axes is about 45° and the angle between said main and second axes is about 30°.
6. The arrangement of claim 1 wherein said closure means is adapted to receive an elongated pusher rod therethrough, which rod is adapted for pushing any bitumen that might clog said main conduit through said main conduit and said atomizing nozzle into said reactor.
7. The arrangement of claim 1 wherein said main conduit has a diameter of about 38mm, said first feed conduit has a diameter of about 38mm, said second feed conduit has a diameter of about 24mm, and said first axis intersects said main axis at a point about 23mm downstream of a point at which said second axis intersects said main axis.
8. The arrangement of claim 7 wherein said flow accelerating nozzle has a minimum diameter of about 10mm
9 The arrangement of claim 1 wherein said main conduit has a diameter D1, said first feed conduit has a diameter D2, said second feed conduit has a diameter D3, and wherein D1 is substantially equal to D2, and D3 is about 60% to 65% of D2.
10. The arrangement of claim 1 wherein said flow-accelerating nozzle has a diameter selected to impart a mean gas velocity of at least 24.4 m/sec to steam exiting therefrom.
11. The arrangement of claim 9 wherein said flow-accelerating nozzle has a diameter D4 which is about 42% of the diameter D3 and wherein said diameter D4 is also selected to impart a mean gas velocity of at least 24.4 m/sec to steam exiting therefrom.
12. The arrangement of claim 1 wherein said closure means is adapted to be opened for insertion of conduit cleaning means into said main conduit.
13. A mixing arrangement for feeding a mixture of oil and steam to an atomizing nozzle connected to a reactor for further processing therein, comprising:
a main conduit having a main axis, for connection at a proximal end to said nozzle and including openable closure means at a distal end thereof;
a first feed conduit having a first axis and connected to a source of oil, said first conduit being in a first plane containing said main and first axes, said first feed conduit joining said main conduit at an angle in the range of 30° to 60° as defined between said main and first axes upstream of the junction between said main and first conduits;
a second feed conduit having a second axis and connected to a source of steam, said second conduit being in a second plane containing said main and second axes, said second feed conduit joining said main conduit upstream of the junction between said main and first conduits at an angle in the range of 20° to 40° as defined between said main and second axes upstream of the junction between said main and second conduits; and flow-accelerating nozzle means positioned in said second feed conduit upstream of the juncture between said main and second conduits.
a main conduit having a main axis, for connection at a proximal end to said nozzle and including openable closure means at a distal end thereof;
a first feed conduit having a first axis and connected to a source of oil, said first conduit being in a first plane containing said main and first axes, said first feed conduit joining said main conduit at an angle in the range of 30° to 60° as defined between said main and first axes upstream of the junction between said main and first conduits;
a second feed conduit having a second axis and connected to a source of steam, said second conduit being in a second plane containing said main and second axes, said second feed conduit joining said main conduit upstream of the junction between said main and first conduits at an angle in the range of 20° to 40° as defined between said main and second axes upstream of the junction between said main and second conduits; and flow-accelerating nozzle means positioned in said second feed conduit upstream of the juncture between said main and second conduits.
14. The arrangement of claim 13 wherein said closure means is adapted to be opened for insertion of conduit cleaning means into said main conduit.
15. A mixing arrangement for feeding a mixture of a heavier, generally incompressible, fluid and a lighter, compressible, fluid to a location for further processing therein, comprising:
a main conduit having a main axis, for connection at a proximal end to processing apparatus at said location;
a first feed conduit having a first axis and connected to a source of said heavier fluid, said first conduit being in a first plane containing said main and first axes, said first feed conduit joining said main conduit at an angle in the range of 30° to 60°
as defined between said main and first axes upstream of the junction between said main and first conduits;
a second feed conduit having a second axis and connected to a source of said lighter fluid, said second conduit being in a second plane containing said main and second axes, said second feed conduit joining said main conduit upstream of the junction between said main and first conduits at an angle in the range of 20° to 40° as defined between said main and second axes upstream of the junction between said main and second conduits; and flow-accelerating nozzle means positioned in said second feed conduit upstream of the juncture between said main and second conduits.
a main conduit having a main axis, for connection at a proximal end to processing apparatus at said location;
a first feed conduit having a first axis and connected to a source of said heavier fluid, said first conduit being in a first plane containing said main and first axes, said first feed conduit joining said main conduit at an angle in the range of 30° to 60°
as defined between said main and first axes upstream of the junction between said main and first conduits;
a second feed conduit having a second axis and connected to a source of said lighter fluid, said second conduit being in a second plane containing said main and second axes, said second feed conduit joining said main conduit upstream of the junction between said main and first conduits at an angle in the range of 20° to 40° as defined between said main and second axes upstream of the junction between said main and second conduits; and flow-accelerating nozzle means positioned in said second feed conduit upstream of the juncture between said main and second conduits.
16. The arrangement of claim 15 wherein said main conduit includes closure means at a distal end thereof, adapted to close said main conduit at said distal end and to open said main conduit for insertion of conduit cleaning means into said main conduit.
17 The arrangement of claim 15 wherein said main conduit has a diameter D1, said first feed conduit has a diameter D2, said second feed conduit has a diameter D3, and wherein D1 is substantially equal to D2, and D3 is about 60% to 65% of D2.
18. The arrangement of claim 15 wherein said flow-accelerating nozzle has a diameter selected to impart a mean gas velocity of at least 24.4 m/sec to lighter fluid exiting therefrom.
19. The arrangement of claim 17 wherein said flow-accelerating nozzle has a diameter D4 which is about 42% of the diameter D3 and wherein said diameter D4 is also selected to impart a mean gas velocity of at least 24.4 m/sec to lighter fluid exiting therefrom.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US45652203P | 2003-03-24 | 2003-03-24 | |
| US60/456,522 | 2003-03-24 |
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| CA2462397A1 CA2462397A1 (en) | 2004-09-24 |
| CA2462397C true CA2462397C (en) | 2010-05-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2462397A Expired - Lifetime CA2462397C (en) | 2003-03-24 | 2004-03-24 | Mixing arrangement for atomizing nozzle in multi-phase flow |
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| Country | Link |
|---|---|
| US (1) | US7140558B2 (en) |
| CA (1) | CA2462397C (en) |
Families Citing this family (225)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060237556A1 (en) * | 2005-04-26 | 2006-10-26 | Spraying Systems Co. | System and method for monitoring performance of a spraying device |
| US20070210182A1 (en) * | 2005-04-26 | 2007-09-13 | Spraying Systems Co. | System and Method for Monitoring Performance of a Spraying Device |
| US7387653B2 (en) * | 2006-03-31 | 2008-06-17 | Jacobson Wayne D | Apparatus and method for removing particulates from a fluid stream |
| US8408480B2 (en) * | 2008-04-25 | 2013-04-02 | Confluent Surgical, Inc. | Self-cleaning spray tip |
| US8033483B2 (en) * | 2008-04-25 | 2011-10-11 | Confluent Surgical Inc. | Silicone spray tip |
| US8210453B2 (en) | 2008-09-12 | 2012-07-03 | Confluent Surgical, Inc. | Spray applicator |
| US8999246B2 (en) | 2010-05-25 | 2015-04-07 | Exxonmobil Research And Engineering Company | Fluid injection nozzle for fluid bed reactors |
| JP5788975B2 (en) * | 2010-06-09 | 2015-10-07 | ザ プロクター アンド ギャンブルカンパニー | Semi-continuous supply production of liquid personal care compositions |
| US20120206993A1 (en) * | 2011-02-16 | 2012-08-16 | Casper Thomas J | Venturi device and method |
| US9522367B1 (en) | 2011-04-27 | 2016-12-20 | Tetra Technologies, Inc. | Multi chamber mixing manifold |
| US8834016B1 (en) | 2011-04-27 | 2014-09-16 | Tetra Technologies, Inc. | Multi chamber mixing manifold |
| US20130023129A1 (en) | 2011-07-20 | 2013-01-24 | Asm America, Inc. | Pressure transmitter for a semiconductor processing environment |
| USD778667S1 (en) | 2012-02-16 | 2017-02-14 | Thomas J Casper | Venturi device |
| US10309430B2 (en) | 2012-08-10 | 2019-06-04 | Confluent Surgical, Inc. | Pneumatic actuation assembly |
| US10714315B2 (en) | 2012-10-12 | 2020-07-14 | Asm Ip Holdings B.V. | Semiconductor reaction chamber showerhead |
| EP2911773B1 (en) * | 2012-10-26 | 2017-10-04 | Blue Cube IP LLC | Mixer and reactor and process incorporating the same |
| US10683571B2 (en) * | 2014-02-25 | 2020-06-16 | Asm Ip Holding B.V. | Gas supply manifold and method of supplying gases to chamber using same |
| US11015245B2 (en) | 2014-03-19 | 2021-05-25 | Asm Ip Holding B.V. | Gas-phase reactor and system having exhaust plenum and components thereof |
| WO2015153828A1 (en) | 2014-04-04 | 2015-10-08 | Hyperbranch Medical Technology, Inc. | Extended tip spray applicator for two-component surgical selant, and methods of use thereof |
| US10128087B2 (en) | 2014-04-07 | 2018-11-13 | Lam Research Corporation | Configuration independent gas delivery system |
| RU2680484C2 (en) | 2014-08-28 | 2019-02-21 | ЭкссонМобил Рисерч энд Энджиниринг Компани | Fluid injection nozzle for fluid bed reactors |
| US10941490B2 (en) | 2014-10-07 | 2021-03-09 | Asm Ip Holding B.V. | Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same |
| US10557197B2 (en) | 2014-10-17 | 2020-02-11 | Lam Research Corporation | Monolithic gas distribution manifold and various construction techniques and use cases therefor |
| US10276355B2 (en) | 2015-03-12 | 2019-04-30 | Asm Ip Holding B.V. | Multi-zone reactor, system including the reactor, and method of using the same |
| US10458018B2 (en) | 2015-06-26 | 2019-10-29 | Asm Ip Holding B.V. | Structures including metal carbide material, devices including the structures, and methods of forming same |
| US10022689B2 (en) * | 2015-07-24 | 2018-07-17 | Lam Research Corporation | Fluid mixing hub for semiconductor processing tool |
| US10211308B2 (en) | 2015-10-21 | 2019-02-19 | Asm Ip Holding B.V. | NbMC layers |
| US11139308B2 (en) | 2015-12-29 | 2021-10-05 | Asm Ip Holding B.V. | Atomic layer deposition of III-V compounds to form V-NAND devices |
| US10215317B2 (en) | 2016-01-15 | 2019-02-26 | Lam Research Corporation | Additively manufactured gas distribution manifold |
| US10529554B2 (en) | 2016-02-19 | 2020-01-07 | Asm Ip Holding B.V. | Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches |
| US10367080B2 (en) | 2016-05-02 | 2019-07-30 | Asm Ip Holding B.V. | Method of forming a germanium oxynitride film |
| US11453943B2 (en) | 2016-05-25 | 2022-09-27 | Asm Ip Holding B.V. | Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor |
| US10612137B2 (en) | 2016-07-08 | 2020-04-07 | Asm Ip Holdings B.V. | Organic reactants for atomic layer deposition |
| US9859151B1 (en) | 2016-07-08 | 2018-01-02 | Asm Ip Holding B.V. | Selective film deposition method to form air gaps |
| US9812320B1 (en) | 2016-07-28 | 2017-11-07 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
| KR102532607B1 (en) | 2016-07-28 | 2023-05-15 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus and method of operating the same |
| US9887082B1 (en) | 2016-07-28 | 2018-02-06 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
| US11532757B2 (en) | 2016-10-27 | 2022-12-20 | Asm Ip Holding B.V. | Deposition of charge trapping layers |
| US10714350B2 (en) | 2016-11-01 | 2020-07-14 | ASM IP Holdings, B.V. | Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
| KR102546317B1 (en) | 2016-11-15 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | Gas supply unit and substrate processing apparatus including the same |
| KR20180068582A (en) | 2016-12-14 | 2018-06-22 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
| US11447861B2 (en) | 2016-12-15 | 2022-09-20 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
| US11581186B2 (en) | 2016-12-15 | 2023-02-14 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus |
| KR20180070971A (en) | 2016-12-19 | 2018-06-27 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
| US10269558B2 (en) | 2016-12-22 | 2019-04-23 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
| US11390950B2 (en) | 2017-01-10 | 2022-07-19 | Asm Ip Holding B.V. | Reactor system and method to reduce residue buildup during a film deposition process |
| US10468261B2 (en) | 2017-02-15 | 2019-11-05 | Asm Ip Holding B.V. | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
| US10529563B2 (en) | 2017-03-29 | 2020-01-07 | Asm Ip Holdings B.V. | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures |
| US10770286B2 (en) | 2017-05-08 | 2020-09-08 | Asm Ip Holdings B.V. | Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
| US11306395B2 (en) | 2017-06-28 | 2022-04-19 | Asm Ip Holding B.V. | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
| KR20190009245A (en) | 2017-07-18 | 2019-01-28 | 에이에스엠 아이피 홀딩 비.브이. | Methods for forming a semiconductor device structure and related semiconductor device structures |
| US10541333B2 (en) | 2017-07-19 | 2020-01-21 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
| US11018002B2 (en) | 2017-07-19 | 2021-05-25 | Asm Ip Holding B.V. | Method for selectively depositing a Group IV semiconductor and related semiconductor device structures |
| US11374112B2 (en) | 2017-07-19 | 2022-06-28 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
| US10590535B2 (en) | 2017-07-26 | 2020-03-17 | Asm Ip Holdings B.V. | Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
| US10770336B2 (en) | 2017-08-08 | 2020-09-08 | Asm Ip Holding B.V. | Substrate lift mechanism and reactor including same |
| US10692741B2 (en) | 2017-08-08 | 2020-06-23 | Asm Ip Holdings B.V. | Radiation shield |
| US11139191B2 (en) | 2017-08-09 | 2021-10-05 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
| US11769682B2 (en) | 2017-08-09 | 2023-09-26 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
| US11830730B2 (en) | 2017-08-29 | 2023-11-28 | Asm Ip Holding B.V. | Layer forming method and apparatus |
| KR102491945B1 (en) | 2017-08-30 | 2023-01-26 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
| US11056344B2 (en) | 2017-08-30 | 2021-07-06 | Asm Ip Holding B.V. | Layer forming method |
| US11295980B2 (en) | 2017-08-30 | 2022-04-05 | Asm Ip Holding B.V. | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
| US10658205B2 (en) | 2017-09-28 | 2020-05-19 | Asm Ip Holdings B.V. | Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
| US10403504B2 (en) | 2017-10-05 | 2019-09-03 | Asm Ip Holding B.V. | Method for selectively depositing a metallic film on a substrate |
| US11022879B2 (en) | 2017-11-24 | 2021-06-01 | Asm Ip Holding B.V. | Method of forming an enhanced unexposed photoresist layer |
| US11639811B2 (en) | 2017-11-27 | 2023-05-02 | Asm Ip Holding B.V. | Apparatus including a clean mini environment |
| CN111316417B (en) | 2017-11-27 | 2023-12-22 | 阿斯莫Ip控股公司 | Storage device for storing wafer cassettes for use with batch ovens |
| US10872771B2 (en) | 2018-01-16 | 2020-12-22 | Asm Ip Holding B. V. | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
| CN111630203A (en) | 2018-01-19 | 2020-09-04 | Asm Ip私人控股有限公司 | Method for depositing gap filling layer by plasma auxiliary deposition |
| TW202325889A (en) | 2018-01-19 | 2023-07-01 | 荷蘭商Ａｓｍ 智慧財產控股公司 | Deposition method |
| US11081345B2 (en) | 2018-02-06 | 2021-08-03 | Asm Ip Holding B.V. | Method of post-deposition treatment for silicon oxide film |
| US10896820B2 (en) | 2018-02-14 | 2021-01-19 | Asm Ip Holding B.V. | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
| CN116732497A (en) | 2018-02-14 | 2023-09-12 | Asm Ip私人控股有限公司 | Method for depositing ruthenium-containing films on substrates by cyclical deposition processes |
| KR102636427B1 (en) | 2018-02-20 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing method and apparatus |
| US10975470B2 (en) | 2018-02-23 | 2021-04-13 | Asm Ip Holding B.V. | Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment |
| US11473195B2 (en) | 2018-03-01 | 2022-10-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus and a method for processing a substrate |
| US11629406B2 (en) | 2018-03-09 | 2023-04-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate |
| US11114283B2 (en) | 2018-03-16 | 2021-09-07 | Asm Ip Holding B.V. | Reactor, system including the reactor, and methods of manufacturing and using same |
| KR102646467B1 (en) | 2018-03-27 | 2024-03-11 | 에이에스엠 아이피 홀딩 비.브이. | Method of forming an electrode on a substrate and a semiconductor device structure including an electrode |
| US11230766B2 (en) | 2018-03-29 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
| US11088002B2 (en) | 2018-03-29 | 2021-08-10 | Asm Ip Holding B.V. | Substrate rack and a substrate processing system and method |
| TWI811348B (en) | 2018-05-08 | 2023-08-11 | 荷蘭商Ａｓｍ 智慧財產控股公司 | Methods for depositing an oxide film on a substrate by a cyclical deposition process and related device structures |
| KR102596988B1 (en) | 2018-05-28 | 2023-10-31 | 에이에스엠 아이피 홀딩 비.브이. | Method of processing a substrate and a device manufactured by the same |
| TW202013553A (en) | 2018-06-04 | 2020-04-01 | 荷蘭商Ａｓｍ 智慧財產控股公司 | Wafer handling chamber with moisture reduction |
| US11718913B2 (en) | 2018-06-04 | 2023-08-08 | Asm Ip Holding B.V. | Gas distribution system and reactor system including same |
| US11286562B2 (en) | 2018-06-08 | 2022-03-29 | Asm Ip Holding B.V. | Gas-phase chemical reactor and method of using same |
| US10797133B2 (en) | 2018-06-21 | 2020-10-06 | Asm Ip Holding B.V. | Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
| KR102568797B1 (en) | 2018-06-21 | 2023-08-21 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing system |
| WO2020002995A1 (en) | 2018-06-27 | 2020-01-02 | Asm Ip Holding B.V. | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
| KR20210027265A (en) | 2018-06-27 | 2021-03-10 | 에이에스엠 아이피 홀딩 비.브이. | Periodic deposition method for forming metal-containing material and film and structure comprising metal-containing material |
| US10612136B2 (en) | 2018-06-29 | 2020-04-07 | ASM IP Holding, B.V. | Temperature-controlled flange and reactor system including same |
| US10755922B2 (en) | 2018-07-03 | 2020-08-25 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
| US10388513B1 (en) | 2018-07-03 | 2019-08-20 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
| US11053591B2 (en) | 2018-08-06 | 2021-07-06 | Asm Ip Holding B.V. | Multi-port gas injection system and reactor system including same |
| US11430674B2 (en) | 2018-08-22 | 2022-08-30 | Asm Ip Holding B.V. | Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
| US11024523B2 (en) | 2018-09-11 | 2021-06-01 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
| KR20200030162A (en) | 2018-09-11 | 2020-03-20 | 에이에스엠 아이피 홀딩 비.브이. | Method for deposition of a thin film |
| US11049751B2 (en) | 2018-09-14 | 2021-06-29 | Asm Ip Holding B.V. | Cassette supply system to store and handle cassettes and processing apparatus equipped therewith |
| CN110970344A (en) | 2018-10-01 | 2020-04-07 | Asm Ip控股有限公司 | Substrate holding apparatus, system including the same, and method of using the same |
| US11232963B2 (en) | 2018-10-03 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
| KR102592699B1 (en) | 2018-10-08 | 2023-10-23 | 에이에스엠 아이피 홀딩 비.브이. | Substrate support unit and apparatuses for depositing thin film and processing the substrate including the same |
| KR102605121B1 (en) | 2018-10-19 | 2023-11-23 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus and substrate processing method |
| KR102546322B1 (en) | 2018-10-19 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus and substrate processing method |
| USD948463S1 (en) | 2018-10-24 | 2022-04-12 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate supporting apparatus |
| US11087997B2 (en) | 2018-10-31 | 2021-08-10 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
| KR20200051105A (en) | 2018-11-02 | 2020-05-13 | 에이에스엠 아이피 홀딩 비.브이. | Substrate support unit and substrate processing apparatus including the same |
| US11572620B2 (en) | 2018-11-06 | 2023-02-07 | Asm Ip Holding B.V. | Methods for selectively depositing an amorphous silicon film on a substrate |
| US11031242B2 (en) | 2018-11-07 | 2021-06-08 | Asm Ip Holding B.V. | Methods for depositing a boron doped silicon germanium film |
| US10818758B2 (en) | 2018-11-16 | 2020-10-27 | Asm Ip Holding B.V. | Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
| US10847366B2 (en) | 2018-11-16 | 2020-11-24 | Asm Ip Holding B.V. | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process |
| US11217444B2 (en) | 2018-11-30 | 2022-01-04 | Asm Ip Holding B.V. | Method for forming an ultraviolet radiation responsive metal oxide-containing film |
| KR102636428B1 (en) | 2018-12-04 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | A method for cleaning a substrate processing apparatus |
| US11158513B2 (en) | 2018-12-13 | 2021-10-26 | Asm Ip Holding B.V. | Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
| TW202037745A (en) | 2018-12-14 | 2020-10-16 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method of forming device structure, structure formed by the method and system for performing the method |
| TWI819180B (en) | 2019-01-17 | 2023-10-21 | 荷蘭商Ａｓｍ 智慧財產控股公司 | Methods of forming a transition metal containing film on a substrate by a cyclical deposition process |
| KR20200091543A (en) | 2019-01-22 | 2020-07-31 | 에이에스엠 아이피 홀딩 비.브이. | Semiconductor processing device |
| CN111524788B (en) | 2019-02-01 | 2023-11-24 | Asm Ip私人控股有限公司 | Method for topologically selective film formation of silicon oxide |
| KR102638425B1 (en) | 2019-02-20 | 2024-02-21 | 에이에스엠 아이피 홀딩 비.브이. | Method and apparatus for filling a recess formed within a substrate surface |
| KR20200102357A (en) | 2019-02-20 | 2020-08-31 | 에이에스엠 아이피 홀딩 비.브이. | Apparatus and methods for plug fill deposition in 3-d nand applications |
| KR102626263B1 (en) | 2019-02-20 | 2024-01-16 | 에이에스엠 아이피 홀딩 비.브이. | Cyclical deposition method including treatment step and apparatus for same |
| TW202104632A (en) | 2019-02-20 | 2021-02-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Cyclical deposition method and apparatus for filling a recess formed within a substrate surface |
| TW202100794A (en) | 2019-02-22 | 2021-01-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Substrate processing apparatus and method for processing substrate |
| KR20200108243A (en) | 2019-03-08 | 2020-09-17 | 에이에스엠 아이피 홀딩 비.브이. | Structure Including SiOC Layer and Method of Forming Same |
| KR20200108242A (en) | 2019-03-08 | 2020-09-17 | 에이에스엠 아이피 홀딩 비.브이. | Method for Selective Deposition of Silicon Nitride Layer and Structure Including Selectively-Deposited Silicon Nitride Layer |
| US11742198B2 (en) | 2019-03-08 | 2023-08-29 | Asm Ip Holding B.V. | Structure including SiOCN layer and method of forming same |
| KR20200116033A (en) | 2019-03-28 | 2020-10-08 | 에이에스엠 아이피 홀딩 비.브이. | Door opener and substrate processing apparatus provided therewith |
| KR20200116855A (en) | 2019-04-01 | 2020-10-13 | 에이에스엠 아이피 홀딩 비.브이. | Method of manufacturing semiconductor device |
| KR20200123380A (en) | 2019-04-19 | 2020-10-29 | 에이에스엠 아이피 홀딩 비.브이. | Layer forming method and apparatus |
| KR20200125453A (en) | 2019-04-24 | 2020-11-04 | 에이에스엠 아이피 홀딩 비.브이. | Gas-phase reactor system and method of using same |
| KR20200130118A (en) | 2019-05-07 | 2020-11-18 | 에이에스엠 아이피 홀딩 비.브이. | Method for Reforming Amorphous Carbon Polymer Film |
| KR20200130121A (en) | 2019-05-07 | 2020-11-18 | 에이에스엠 아이피 홀딩 비.브이. | Chemical source vessel with dip tube |
| KR20200130652A (en) | 2019-05-10 | 2020-11-19 | 에이에스엠 아이피 홀딩 비.브이. | Method of depositing material onto a surface and structure formed according to the method |
| JP2020188255A (en) | 2019-05-16 | 2020-11-19 | エーエスエム アイピー ホールディング ビー．ブイ． | Wafer boat handling device, vertical batch furnace, and method |
| USD975665S1 (en) | 2019-05-17 | 2023-01-17 | Asm Ip Holding B.V. | Susceptor shaft |
| USD947913S1 (en) | 2019-05-17 | 2022-04-05 | Asm Ip Holding B.V. | Susceptor shaft |
| USD935572S1 (en) | 2019-05-24 | 2021-11-09 | Asm Ip Holding B.V. | Gas channel plate |
| USD922229S1 (en) | 2019-06-05 | 2021-06-15 | Asm Ip Holding B.V. | Device for controlling a temperature of a gas supply unit |
| KR20200141002A (en) | 2019-06-06 | 2020-12-17 | 에이에스엠 아이피 홀딩 비.브이. | Method of using a gas-phase reactor system including analyzing exhausted gas |
| KR20200143254A (en) | 2019-06-11 | 2020-12-23 | 에이에스엠 아이피 홀딩 비.브이. | Method of forming an electronic structure using an reforming gas, system for performing the method, and structure formed using the method |
| USD944946S1 (en) | 2019-06-14 | 2022-03-01 | Asm Ip Holding B.V. | Shower plate |
| USD931978S1 (en) | 2019-06-27 | 2021-09-28 | Asm Ip Holding B.V. | Showerhead vacuum transport |
| KR20210005515A (en) | 2019-07-03 | 2021-01-14 | 에이에스엠 아이피 홀딩 비.브이. | Temperature control assembly for substrate processing apparatus and method of using same |
| JP2021015791A (en) | 2019-07-09 | 2021-02-12 | エーエスエム アイピー ホールディング ビー．ブイ． | Plasma device and substrate processing method using coaxial waveguide |
| CN112216646A (en) | 2019-07-10 | 2021-01-12 | Asm Ip私人控股有限公司 | Substrate supporting assembly and substrate processing device comprising same |
| KR20210010307A (en) | 2019-07-16 | 2021-01-27 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
| KR20210010816A (en) | 2019-07-17 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | Radical assist ignition plasma system and method |
| KR20210010820A (en) | 2019-07-17 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | Methods of forming silicon germanium structures |
| US11643724B2 (en) | 2019-07-18 | 2023-05-09 | Asm Ip Holding B.V. | Method of forming structures using a neutral beam |
| TW202121506A (en) | 2019-07-19 | 2021-06-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method of forming topology-controlled amorphous carbon polymer film |
| CN112309843A (en) | 2019-07-29 | 2021-02-02 | Asm Ip私人控股有限公司 | Selective deposition method for achieving high dopant doping |
| CN112309899A (en) | 2019-07-30 | 2021-02-02 | Asm Ip私人控股有限公司 | Substrate processing apparatus |
| CN112309900A (en) | 2019-07-30 | 2021-02-02 | Asm Ip私人控股有限公司 | Substrate processing apparatus |
| US11227782B2 (en) | 2019-07-31 | 2022-01-18 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
| US11587814B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
| US11587815B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
| KR20210018759A (en) | 2019-08-05 | 2021-02-18 | 에이에스엠 아이피 홀딩 비.브이. | Liquid level sensor for a chemical source vessel |
| US11911787B1 (en) | 2019-08-16 | 2024-02-27 | Gary Hammerlund | Split manifold and method for multiple part fluid applications |
| USD965044S1 (en) | 2019-08-19 | 2022-09-27 | Asm Ip Holding B.V. | Susceptor shaft |
| USD965524S1 (en) | 2019-08-19 | 2022-10-04 | Asm Ip Holding B.V. | Susceptor support |
| JP2021031769A (en) | 2019-08-21 | 2021-03-01 | エーエスエム アイピー ホールディング ビー．ブイ． | Production apparatus of mixed gas of film deposition raw material and film deposition apparatus |
| USD940837S1 (en) | 2019-08-22 | 2022-01-11 | Asm Ip Holding B.V. | Electrode |
| KR20210024423A (en) | 2019-08-22 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | Method for forming a structure with a hole |
| USD930782S1 (en) | 2019-08-22 | 2021-09-14 | Asm Ip Holding B.V. | Gas distributor |
| USD979506S1 (en) | 2019-08-22 | 2023-02-28 | Asm Ip Holding B.V. | Insulator |
| USD949319S1 (en) | 2019-08-22 | 2022-04-19 | Asm Ip Holding B.V. | Exhaust duct |
| KR20210024420A (en) | 2019-08-23 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | Method for depositing silicon oxide film having improved quality by peald using bis(diethylamino)silane |
| US11286558B2 (en) | 2019-08-23 | 2022-03-29 | Asm Ip Holding B.V. | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
| KR20210029090A (en) | 2019-09-04 | 2021-03-15 | 에이에스엠 아이피 홀딩 비.브이. | Methods for selective deposition using a sacrificial capping layer |
| KR20210029663A (en) | 2019-09-05 | 2021-03-16 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
| US11562901B2 (en) | 2019-09-25 | 2023-01-24 | Asm Ip Holding B.V. | Substrate processing method |
| CN112593212B (en) | 2019-10-02 | 2023-12-22 | Asm Ip私人控股有限公司 | Method for forming topologically selective silicon oxide film by cyclic plasma enhanced deposition process |
| TW202129060A (en) | 2019-10-08 | 2021-08-01 | 荷蘭商Ａｓｍ Ｉｐ控股公司 | Substrate processing device, and substrate processing method |
| TW202115273A (en) | 2019-10-10 | 2021-04-16 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method of forming a photoresist underlayer and structure including same |
| KR20210045930A (en) | 2019-10-16 | 2021-04-27 | 에이에스엠 아이피 홀딩 비.브이. | Method of Topology-Selective Film Formation of Silicon Oxide |
| US11637014B2 (en) | 2019-10-17 | 2023-04-25 | Asm Ip Holding B.V. | Methods for selective deposition of doped semiconductor material |
| KR20210047808A (en) | 2019-10-21 | 2021-04-30 | 에이에스엠 아이피 홀딩 비.브이. | Apparatus and methods for selectively etching films |
| US11646205B2 (en) | 2019-10-29 | 2023-05-09 | Asm Ip Holding B.V. | Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same |
| KR20210054983A (en) | 2019-11-05 | 2021-05-14 | 에이에스엠 아이피 홀딩 비.브이. | Structures with doped semiconductor layers and methods and systems for forming same |
| US11501968B2 (en) | 2019-11-15 | 2022-11-15 | Asm Ip Holding B.V. | Method for providing a semiconductor device with silicon filled gaps |
| KR20210062561A (en) | 2019-11-20 | 2021-05-31 | 에이에스엠 아이피 홀딩 비.브이. | Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure |
| CN112951697A (en) | 2019-11-26 | 2021-06-11 | Asm Ip私人控股有限公司 | Substrate processing apparatus |
| US11450529B2 (en) | 2019-11-26 | 2022-09-20 | Asm Ip Holding B.V. | Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface |
| CN112885693A (en) | 2019-11-29 | 2021-06-01 | Asm Ip私人控股有限公司 | Substrate processing apparatus |
| CN112885692A (en) | 2019-11-29 | 2021-06-01 | Asm Ip私人控股有限公司 | Substrate processing apparatus |
| JP2021090042A (en) | 2019-12-02 | 2021-06-10 | エーエスエム アイピー ホールディング ビー．ブイ． | Substrate processing apparatus and substrate processing method |
| KR20210070898A (en) | 2019-12-04 | 2021-06-15 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
| TW202125596A (en) | 2019-12-17 | 2021-07-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method of forming vanadium nitride layer and structure including the vanadium nitride layer |
| US11527403B2 (en) | 2019-12-19 | 2022-12-13 | Asm Ip Holding B.V. | Methods for filling a gap feature on a substrate surface and related semiconductor structures |
| KR20210095050A (en) | 2020-01-20 | 2021-07-30 | 에이에스엠 아이피 홀딩 비.브이. | Method of forming thin film and method of modifying surface of thin film |
| TW202130846A (en) | 2020-02-03 | 2021-08-16 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method of forming structures including a vanadium or indium layer |
| TW202146882A (en) | 2020-02-04 | 2021-12-16 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method of verifying an article, apparatus for verifying an article, and system for verifying a reaction chamber |
| US11776846B2 (en) | 2020-02-07 | 2023-10-03 | Asm Ip Holding B.V. | Methods for depositing gap filling fluids and related systems and devices |
| TW202146715A (en) | 2020-02-17 | 2021-12-16 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method for growing phosphorous-doped silicon layer and system of the same |
| KR20210116240A (en) | 2020-03-11 | 2021-09-27 | 에이에스엠 아이피 홀딩 비.브이. | Substrate handling device with adjustable joints |
| US11876356B2 (en) | 2020-03-11 | 2024-01-16 | Asm Ip Holding B.V. | Lockout tagout assembly and system and method of using same |
| KR20210124042A (en) | 2020-04-02 | 2021-10-14 | 에이에스엠 아이피 홀딩 비.브이. | Thin film forming method |
| TW202146689A (en) | 2020-04-03 | 2021-12-16 | 荷蘭商Ａｓｍ Ｉｐ控股公司 | Method for forming barrier layer and method for manufacturing semiconductor device |
| TW202145344A (en) | 2020-04-08 | 2021-12-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Apparatus and methods for selectively etching silcon oxide films |
| US11821078B2 (en) | 2020-04-15 | 2023-11-21 | Asm Ip Holding B.V. | Method for forming precoat film and method for forming silicon-containing film |
| KR20210132600A (en) | 2020-04-24 | 2021-11-04 | 에이에스엠 아이피 홀딩 비.브이. | Methods and systems for depositing a layer comprising vanadium, nitrogen, and a further element |
| KR20210132605A (en) | 2020-04-24 | 2021-11-04 | 에이에스엠 아이피 홀딩 비.브이. | Vertical batch furnace assembly comprising a cooling gas supply |
| KR20210132576A (en) | 2020-04-24 | 2021-11-04 | 에이에스엠 아이피 홀딩 비.브이. | Method of forming vanadium nitride-containing layer and structure comprising the same |
| KR20210134869A (en) | 2020-05-01 | 2021-11-11 | 에이에스엠 아이피 홀딩 비.브이. | Fast FOUP swapping with a FOUP handler |
| KR20210141379A (en) | 2020-05-13 | 2021-11-23 | 에이에스엠 아이피 홀딩 비.브이. | Laser alignment fixture for a reactor system |
| KR20210143653A (en) | 2020-05-19 | 2021-11-29 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
| KR20210145078A (en) | 2020-05-21 | 2021-12-01 | 에이에스엠 아이피 홀딩 비.브이. | Structures including multiple carbon layers and methods of forming and using same |
| TW202201602A (en) | 2020-05-29 | 2022-01-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Substrate processing device |
| TW202218133A (en) | 2020-06-24 | 2022-05-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method for forming a layer provided with silicon |
| TW202217953A (en) | 2020-06-30 | 2022-05-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Substrate processing method |
| KR20220010438A (en) | 2020-07-17 | 2022-01-25 | 에이에스엠 아이피 홀딩 비.브이. | Structures and methods for use in photolithography |
| TW202204662A (en) | 2020-07-20 | 2022-02-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method and system for depositing molybdenum layers |
| KR20220027026A (en) | 2020-08-26 | 2022-03-07 | 에이에스엠 아이피 홀딩 비.브이. | Method and system for forming metal silicon oxide and metal silicon oxynitride |
| USD990534S1 (en) | 2020-09-11 | 2023-06-27 | Asm Ip Holding B.V. | Weighted lift pin |
| USD1012873S1 (en) | 2020-09-24 | 2024-01-30 | Asm Ip Holding B.V. | Electrode for semiconductor processing apparatus |
| TW202229613A (en) | 2020-10-14 | 2022-08-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method of depositing material on stepped structure |
| TW202217037A (en) | 2020-10-22 | 2022-05-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method of depositing vanadium metal, structure, device and a deposition assembly |
| TW202223136A (en) | 2020-10-28 | 2022-06-16 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method for forming layer on substrate, and semiconductor processing system |
| KR20220076343A (en) | 2020-11-30 | 2022-06-08 | 에이에스엠 아이피 홀딩 비.브이. | an injector configured for arrangement within a reaction chamber of a substrate processing apparatus |
| CN114639631A (en) | 2020-12-16 | 2022-06-17 | Asm Ip私人控股有限公司 | Fixing device for measuring jumping and swinging |
| TW202231903A (en) | 2020-12-22 | 2022-08-16 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Transition metal deposition method, transition metal layer, and deposition assembly for depositing transition metal on substrate |
| USD980813S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas flow control plate for substrate processing apparatus |
| USD980814S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas distributor for substrate processing apparatus |
| USD981973S1 (en) | 2021-05-11 | 2023-03-28 | Asm Ip Holding B.V. | Reactor wall for substrate processing apparatus |
| USD990441S1 (en) | 2021-09-07 | 2023-06-27 | Asm Ip Holding B.V. | Gas flow control plate |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3789A (en) * | 1844-10-12 | Machine fob cutting tallow | ||
| US3615202A (en) * | 1969-11-28 | 1971-10-26 | David R Stern | Process for the manufacture of titanium dioxide |
| US4377257A (en) * | 1977-02-10 | 1983-03-22 | Sealed Air Corporation | Material fluidizing apparatus |
| US4306961A (en) * | 1977-08-27 | 1981-12-22 | Alberta Oil Sands Technology And Research Authority | Process for recovery of hydrocarbons from inorganic host materials |
| CA1096630A (en) * | 1978-05-26 | 1981-03-03 | David J. Tookey | Static mixer |
| US4648920A (en) * | 1981-05-19 | 1987-03-10 | Henry Sperber | Process for manufacturing batt-type insulation from loose fibrous particles |
| US4768710A (en) * | 1987-03-02 | 1988-09-06 | Henry Sperber | Fibrous blown-in insulation having homogenous density |
| US4961882A (en) * | 1988-06-23 | 1990-10-09 | Exxon Research And Engineering Company | Fine bubble generator and method |
| US4913648A (en) * | 1988-12-27 | 1990-04-03 | The United States Of America As Represented By The Secretary Of The Navy | Quartz burner for use in an atomic absorption spectrometer for the analysis of organometal compounds via hydride derivatization |
| US5129583A (en) * | 1991-03-21 | 1992-07-14 | The Babcock & Wilcox Company | Low pressure loss/reduced deposition atomizer |
| US5289976A (en) * | 1991-12-13 | 1994-03-01 | Mobil Oil Corporation | Heavy hydrocarbon feed atomization |
| TW297422U (en) * | 1993-05-12 | 1997-02-01 | Grace W R & Co | Apparatus for spray applying fireproofing compositions |
| US5484107A (en) * | 1994-05-13 | 1996-01-16 | The Babcock & Wilcox Company | Three-fluid atomizer |
| US5565241A (en) * | 1994-08-10 | 1996-10-15 | Usbi Co. | Convergent end-effector |
| US5678764A (en) * | 1995-02-28 | 1997-10-21 | Glas-Craft, Inc. | Internal mix spraying system |
| US5618001A (en) * | 1995-03-20 | 1997-04-08 | Binks Manufacturing Company | Spray gun for aggregates |
| DE19730617A1 (en) * | 1997-07-17 | 1999-01-21 | Abb Research Ltd | Pressure atomizer nozzle |
| US6042717A (en) * | 1997-12-05 | 2000-03-28 | Uop Llc | Horizontal FCC feed injection process |
| US6003789A (en) * | 1997-12-15 | 1999-12-21 | Aec Oil Sands, L.P. | Nozzle for atomizing liquid in two phase flow |
| US6093310A (en) * | 1998-12-30 | 2000-07-25 | Exxon Research And Engineering Co. | FCC feed injection using subcooled water sparging for enhanced feed atomization |
-
2004
- 2004-03-24 US US10/807,511 patent/US7140558B2/en active Active
- 2004-03-24 CA CA2462397A patent/CA2462397C/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US7140558B2 (en) | 2006-11-28 |
| US20050001062A1 (en) | 2005-01-06 |
| CA2462397A1 (en) | 2004-09-24 |
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