CA2482566A1 - Gradient structures interfacing microfluidics and nanofluidics, methods for fabrication and uses thereof - Google Patents
Gradient structures interfacing microfluidics and nanofluidics, methods for fabrication and uses thereof Download PDFInfo
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- CA2482566A1 CA2482566A1 CA002482566A CA2482566A CA2482566A1 CA 2482566 A1 CA2482566 A1 CA 2482566A1 CA 002482566 A CA002482566 A CA 002482566A CA 2482566 A CA2482566 A CA 2482566A CA 2482566 A1 CA2482566 A1 CA 2482566A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/6486—Measuring fluorescence of biological material, e.g. DNA, RNA, cells
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502746—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means for controlling flow resistance, e.g. flow controllers, baffles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
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- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
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- G01N33/487—Physical analysis of biological material of liquid biological material
- G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
- G01N33/48721—Investigating individual macromolecules, e.g. by translocation through nanopores
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2008—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the reflectors, diffusers, light or heat filtering means or anti-reflective means used
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- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/02—Adapting objects or devices to another
- B01L2200/026—Fluid interfacing between devices or objects, e.g. connectors, inlet details
- B01L2200/027—Fluid interfacing between devices or objects, e.g. connectors, inlet details for microfluidic devices
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- B01L2200/06—Fluid handling related problems
- B01L2200/0647—Handling flowable solids, e.g. microscopic beads, cells, particles
- B01L2200/0663—Stretching or orienting elongated molecules or particles
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B01L2300/00—Additional constructional details
- B01L2300/06—Auxiliary integrated devices, integrated components
- B01L2300/0627—Sensor or part of a sensor is integrated
- B01L2300/0654—Lenses; Optical fibres
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0896—Nanoscaled
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502715—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
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- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/05—Microfluidics
- B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
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- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
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- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0156—Lithographic techniques
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- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
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- B81C2201/0156—Lithographic techniques
- B81C2201/0159—Lithographic techniques not provided for in B81C2201/0157
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T436/00—Chemistry: analytical and immunological testing
- Y10T436/14—Heterocyclic carbon compound [i.e., O, S, N, Se, Te, as only ring hetero atom]
- Y10T436/142222—Hetero-O [e.g., ascorbic acid, etc.]
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Abstract
The present invention relates to a device for interfacing nanofluidic and microfluidic components suitable for use in performing high throughput macromolecular analysis. Diffraction gradient lithography (DGL) is used to form a gradient interface between a microfluidic area and a nanofluidic area.
The gradient interface area reduces the local entropic barrier to anochannels formed in the nanofluidic area. In one embodiment, the gradient interface area is formed of lateral spatial gradient structures for narrowing the cross section of a value from the micron to the nanometer length scale. In another embodiment, the gradient interface area is formed of a vertical sloped gradient structure. Additionally, the gradient structure can provide both a lateral and vertical gradient.
The gradient interface area reduces the local entropic barrier to anochannels formed in the nanofluidic area. In one embodiment, the gradient interface area is formed of lateral spatial gradient structures for narrowing the cross section of a value from the micron to the nanometer length scale. In another embodiment, the gradient interface area is formed of a vertical sloped gradient structure. Additionally, the gradient structure can provide both a lateral and vertical gradient.
Claims (69)
1. A method for fabricating a fluidic device comprising the steps of:
forming a nanofluidic area on a substrate;
forming a microfluidic area on said substrate; and forming a gradient interface area between said nanofluidic area and said microfluidic area.
forming a nanofluidic area on a substrate;
forming a microfluidic area on said substrate; and forming a gradient interface area between said nanofluidic area and said microfluidic area.
2. The method of claim 1 wherein said gradient interface area comprises a plurality of gradient structures, and a lateral distance between said gradient structures is decreased towards said nanofluidic area.
3. The method of claim 2 wherein said distance between said gradient structures is reduced below about 500 nanometers.
4. The method of claim 2 wherein said distance between said gradient structures is reduced below about 10 nm.
5. The method of claim 2 wherein said distance between said gradient structures is reduced to a distance substantially of a diameter of a biopolymer.
6. The method of claim 2 wherein said gradient structures have a gradual vertical elevation from said microfluidic area to said nanofluidic area.
7. The method of claim 2 wherein said gradient structures are branched channels.
8. The method of claim 1 wherein said gradient interface provides a gradual increase in vertical elevation from said microfluidic area to said nanofluidic area.
9. The method of claim 1 wherein said steps of forming said gradient interface area and forming said microfluidic area are formed simultaneously by the steps of:
coating photoresist over said substrate;
providing a photomask over said photoresist, said photomask patterning said microfluidic area and said gradient interface area;
providing a blocking mask over said photomask, said blocking mask extending over a portion of said photomask applied over said nanofluidic area; and exposing said photomask to light.
coating photoresist over said substrate;
providing a photomask over said photoresist, said photomask patterning said microfluidic area and said gradient interface area;
providing a blocking mask over said photomask, said blocking mask extending over a portion of said photomask applied over said nanofluidic area; and exposing said photomask to light.
10. The method of claim 9 wherein said blocking mask causes light diffraction along an edge of said blocking mask.
11. The method of claim 10 further comprising the step of:
selecting said edge of blocking mask for controlling said light diffraction.
selecting said edge of blocking mask for controlling said light diffraction.
12. The method of claim 9 wherein said blocking mask is formed of a material which is opaque to light.
13. The method of claim 9 wherein said blocking mask is formed of a metal.
14. The method of claim 9 wherein said blocking mask is formed of aluminum foil.
15. The method of claim 9 further comprising the step of:
developing said photoresist after said step of placing said blocking mask over said photomask, wherein said photoresist has a gradient of undeveloped photoresist along a light diffraction area, said light diffraction area caused by an edge of said blocking mask.
developing said photoresist after said step of placing said blocking mask over said photomask, wherein said photoresist has a gradient of undeveloped photoresist along a light diffraction area, said light diffraction area caused by an edge of said blocking mask.
16. The method of claim 9 wherein said photomask has a thickness in a range of about 1 mm to about 10 mm.
17. The method of claim 9 wherein said blocking mask has a thickness in the range of about 1 mm to about 12 mm.
18. The method of claim 9 wherein said step of providing a blocking mask over said photomask further comprises the step of:
controlling a distance between said blocking mask and said photomask, wherein said distance controls an amount light diffraction along an edge of said blocking mask.
controlling a distance between said blocking mask and said photomask, wherein said distance controls an amount light diffraction along an edge of said blocking mask.
19. The method of claim 1 wherein said nanofluidic area comprises a nanofluidic structure selected from the group consisting of nanopillars, nanopores and nanochannels.
20. The method of claim 19 wherein said nanofluidic structure comprises nanochannels, said nanochannels being formed by: nanoimprint lithography, interference lithography, self assembled copolymer pattern transfer, spin coating, electron beam lithography, focused ion beam milling, photolithography, reactive ion-etching, wet-etching, plasma-enhanced chemical vapor deposition, electron beam evaporation, sputter deposition, and combinations thereof.
21. A fluidic device formed by the method of claim 1.
22. A method for forming a microfluidic/nanofluidic device comprising the steps of:
forming a nanofluidic area on a substrate;
coating photoresist on said substrate;
providing a blocking mask over said photoresist, said blocking mask extending over a portion of said photoresist; and exposing said blocking mask to light, wherein said photoresist has a gradient of undeveloped photoresist along a light diffraction area forming a gradient interface area, said light diffraction area caused by an edge of said blocking mask.
forming a nanofluidic area on a substrate;
coating photoresist on said substrate;
providing a blocking mask over said photoresist, said blocking mask extending over a portion of said photoresist; and exposing said blocking mask to light, wherein said photoresist has a gradient of undeveloped photoresist along a light diffraction area forming a gradient interface area, said light diffraction area caused by an edge of said blocking mask.
23. The method of claim 22 wherein after said step of coating photoresist on said substrate further comprising the step of:
providing a photomask over said photoresist, said photomask patterning said microfluidic area and said gradient interface area.
providing a photomask over said photoresist, said photomask patterning said microfluidic area and said gradient interface area.
24. The method of claim 23 wherein in said step of providing a blocking mask, said blocking mask is coated on said photoresist.
25. The method of claim 23 wherein said step of providing a blocking mask over said photomask further comprises the step of:
controlling a distance between said blocking mask and said photomask, wherein said distance controls an amount light diffraction.
controlling a distance between said blocking mask and said photomask, wherein said distance controls an amount light diffraction.
26. A fluidic device formed by the method of claim 22.
27. A system for fabricating a fluidic device comprising:
means for forming a nanofluidic area on a substrate;
means for forming a microfluidic area on said substrate; and means for forming a gradient interface area between said nanofluidic area and said microfluidic area.
means for forming a nanofluidic area on a substrate;
means for forming a microfluidic area on said substrate; and means for forming a gradient interface area between said nanofluidic area and said microfluidic area.
28. The system of claim 27 wherein said gradient interface area comprises a plurality of gradient structures, and a lateral distance between said gradient structures is decreased towards said nanofluidic area.
29. The system of claim 28 wherein said distance between said gradient structures is reduced below 500 nanometers.
30. The system of claim 28 wherein said distance between said gradient structures is reduced below about 10 nm.
31. The system of claim 28 wherein said distance between said gradient structures is reduced to a distance substantially a diameter of a biopolymer.
32. The system of claim 28 wherein said gradient structures are branched channels.
33. The system of claim 28 wherein said gradient structures have a gradual vertical elevation from said substrate to said nanofluidic area.
34. The system of claim 28 wherein said gradient interface provides a gradual increase in vertical elevation from said microfluidic area to said nanofluidic area.
35. The system of claim 27 wherein said means for forming a gradient interface area comprises:
means for applying photoresist over said substrate;
means for applying a photomask over said photoresist;
means for providing a blocking mask over said photomask, said blocking mask extending over a portion of said nanofluidic area; and means for exposing said photomask to light.
means for applying photoresist over said substrate;
means for applying a photomask over said photoresist;
means for providing a blocking mask over said photomask, said blocking mask extending over a portion of said nanofluidic area; and means for exposing said photomask to light.
36. The system of claim 35 wherein said blocking mask causes light diffraction along an edge of said blocking mask.
37. The system of claim 36 wherein said edge of blocking mask is selected to control said light diffraction.
38. The system of claim 35 wherein said blocking mask is formed of a material which is opaque to light.
39. The system of claim 35 wherein said blocking mask is formed of a metal.
40. The system of claim 35 wherein said blocking mask is formed of aluminum foil.
41. The system of claim 35 further comprising:
means for developing said photoresist, wherein said photoresist has a gradient of undeveloped photoresist along a light diffraction area, said light diffraction area caused by an edge of said blocking mask.
means for developing said photoresist, wherein said photoresist has a gradient of undeveloped photoresist along a light diffraction area, said light diffraction area caused by an edge of said blocking mask.
42. The system of claim 35 wherein said photomask has a thickness in a range of about 1 mm to about 10 mm.
43. The system of claim 3 S wherein said nanofluidic area comprises nanofluidic structures selected from the group consisting of nanopillars, nanopores and nanochannels.
44. The system of claim 43 wherein said plurality of channels are formed by:
nanoimprint lithography, interference lithography, self-assembled copolymer pattern transfer, spin coating, electron beam lithography, focused ion beam milling, photolithography, reactive ion-etching, wet-etching, plasma-enhanced chemical vapor deposition, electron beam evaporation, sputter deposition, and combinations thereof.
nanoimprint lithography, interference lithography, self-assembled copolymer pattern transfer, spin coating, electron beam lithography, focused ion beam milling, photolithography, reactive ion-etching, wet-etching, plasma-enhanced chemical vapor deposition, electron beam evaporation, sputter deposition, and combinations thereof.
45. A fluidic chip comprising:
a surface having a nanofluidic area formed in the material of the surface;
a microfluidic area on said surface;
a gradient interface area between said nanofluidic area and said microfluidic area, at least one sample reservoir in fluid communication with said microfluidic area, said sample reservoir capable of receiving a fluid; and at least one waste reservoir in fluid communication with at least one of said channels, said waste reservoir capable of receiving a fluid.
a surface having a nanofluidic area formed in the material of the surface;
a microfluidic area on said surface;
a gradient interface area between said nanofluidic area and said microfluidic area, at least one sample reservoir in fluid communication with said microfluidic area, said sample reservoir capable of receiving a fluid; and at least one waste reservoir in fluid communication with at least one of said channels, said waste reservoir capable of receiving a fluid.
46. The fluidic chip of claim 45 wherein said gradient interface area comprises branched fluidic channels having reduced lateral distance between adjacent channels toward said nanofluidic area.
47. A method of analyzing at least one macromolecule, comprising the steps of:
providing a surface having a nanofluidic area formed of a plurality of channels in the material of the surface;
a microfluidic area on said surface;
a gradient interface area between said nanofluidic area and said microfluidic area, at least one sample reservoir in fluid communication with said microfluidic area, said sample reservoir capable of receiving a fluid;
at least one waste reservoir in fluid communication with said nanofluidic area, said waste reservoir capable of receiving a fluid;
providing the at least one sample reservoir with at least one fluid, said fluid comprising at least one macromolecule;
transporting the at least one macromolecule between said microfluidic area and said nanofluidic area to elongate said at least one macromolecule;
detecting at least one signal transmitted from the at least one elongated macromolecule; and correlating the detected signal to at least one property of the at least one macromolecule.
providing a surface having a nanofluidic area formed of a plurality of channels in the material of the surface;
a microfluidic area on said surface;
a gradient interface area between said nanofluidic area and said microfluidic area, at least one sample reservoir in fluid communication with said microfluidic area, said sample reservoir capable of receiving a fluid;
at least one waste reservoir in fluid communication with said nanofluidic area, said waste reservoir capable of receiving a fluid;
providing the at least one sample reservoir with at least one fluid, said fluid comprising at least one macromolecule;
transporting the at least one macromolecule between said microfluidic area and said nanofluidic area to elongate said at least one macromolecule;
detecting at least one signal transmitted from the at least one elongated macromolecule; and correlating the detected signal to at least one property of the at least one macromolecule.
48. The method according to claim 47 wherein the detected signal is correlated to at least one of the following properties: length, conformation, physical and chemical attachment such as a bound marker or tagging and chemical composition.
49. The method according to claim 47 wherein the macromolecule is a synthetic polymer or biopolymer.
50. The method of claim 49 wherein the biopolymer is at least one of: a protein, a polypeptide, and a nucleic acid.
51. The method of claim 50 wherein the nucleic acid is DNA and the detected signals are correlated to the base pair sequence of said DNA.
52. The method of claim 49 wherein the biopolymers are at least substantially unfolded in the channels.
53. The method of claim 47 wherein the concentration of the macromolecules in the fluid is at least one attogram per milliliter.
54. The method of claim 47 wherein the concentration of the macromolecules in the fluid is at least one femtogram per milliliter.
55. The method of claim 47 wherein the concentration of the macromolecules in the fluid is at least one picogram per milliliter.
56. The method of claim 47 wherein the concentration of the macromolecules in the fluid is less than 5 micrograms per milliliter.
57. The method of claim 47 wherein the concentration of the macromolecules in the fluid is less than 0.5 micrograms per milliliter.
58. The method of claim 47 wherein the macromolecules have an elongated length in the channels of greater than 150 nanometers.
59. The method of claim 47 wherein the macromolecules have an elongated length in the channels of greater than 500 nanometers.
60. The method of claim 47 wherein the macromolecules have an elongated length in the channels of greater than 1 micron.
61. The method of claim 47 wherein the macromolecules have an elongated length in the channels of greater than 10 microns.
62. The method of claim 47 wherein the macromolecules are DNA having greater than 100 base pairs.
63. The method of claim 47 wherein the macromolecules are DNA having greater than 1,000 base pairs.
64. The method of claim 47 wherein the macromolecules are DNA having greater than 10,000 base pairs.
65. The method of claim 47 wherein the macromolecules are DNA having greater than 100,000 base pairs.
66. The method of claim 47 wherein the macromolecules are DNA having greater than 1,000,000 base pairs.
67. The method of claim 47 wherein the at least one macromolecule is a chromosome.
68. The method of claim 67 wherein the at least one chromosome is analyzed to determine the presence of at least one single nucleotide polymorphism.
69. A cartridge comprising at least one fluidic chip, said cartridge capable of being inserted and removed from a system for carrying out macromolecular analysis, said at least one fluidic chip comprising at least one nanochannel array, said nanochannel array comprising:
a surface having a nanofluidic area formed in the material of the surface;
a microfluidic area on said surface;
a gradient interface area between said nanofluidic area and said microfluidic area, at least one sample reservoir in fluid communication with said microfluidic area, said sample reservoir capable of receiving a fluid;
at least one waste reservoir in fluid communication with at least one of said channels, said waste reservoir capable of receiving a fluid; and an apparatus for detecting at least one signal transmitted from the at least one fluid in said at least one channel.
a surface having a nanofluidic area formed in the material of the surface;
a microfluidic area on said surface;
a gradient interface area between said nanofluidic area and said microfluidic area, at least one sample reservoir in fluid communication with said microfluidic area, said sample reservoir capable of receiving a fluid;
at least one waste reservoir in fluid communication with at least one of said channels, said waste reservoir capable of receiving a fluid; and an apparatus for detecting at least one signal transmitted from the at least one fluid in said at least one channel.
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10722888B2 (en) | 2015-07-16 | 2020-07-28 | The Hong Kong University Of Science And Technology | Dynamic formation of nanochannels for single-molecule DNA analysis |
Families Citing this family (147)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2264523A3 (en) * | 2000-07-16 | 2011-11-30 | Board Of Regents, The University Of Texas System | A method of forming a pattern on a substrate in imprint lithographic processes |
JP2004505273A (en) * | 2000-08-01 | 2004-02-19 | ボード・オブ・リージエンツ,ザ・ユニバーシテイ・オブ・テキサス・システム | Method for highly accurate sensing of gap and orientation between transparent template and substrate for transfer lithography |
US20050274219A1 (en) * | 2004-06-01 | 2005-12-15 | Molecular Imprints, Inc. | Method and system to control movement of a body for nano-scale manufacturing |
WO2002044425A2 (en) * | 2000-12-01 | 2002-06-06 | Visigen Biotechnologies, Inc. | Enzymatic nucleic acid synthesis: compositions and methods for altering monomer incorporation fidelity |
US7668697B2 (en) * | 2006-02-06 | 2010-02-23 | Andrei Volkov | Method for analyzing dynamic detectable events at the single molecule level |
US20050064344A1 (en) * | 2003-09-18 | 2005-03-24 | University Of Texas System Board Of Regents | Imprint lithography templates having alignment marks |
CA2454570C (en) | 2001-07-25 | 2016-12-20 | The Trustees Of Princeton University | Nanochannel arrays and their preparation and use for high throughput macromolecular analysis |
US9678038B2 (en) | 2001-07-25 | 2017-06-13 | The Trustees Of Princeton University | Nanochannel arrays and their preparation and use for high throughput macromolecular analysis |
US7652574B2 (en) * | 2002-04-08 | 2010-01-26 | Sayegh Adel O | Article surveillance tag having a vial |
JP4799861B2 (en) | 2002-04-16 | 2011-10-26 | プリンストン ユニバーシティ | Gradient structure for interface between microfluidic and nanofluid, and its manufacturing and use |
US7169251B2 (en) * | 2002-05-13 | 2007-01-30 | The Regents Of The University Of Michigan | Method of forming nanofluidic channels |
US7019819B2 (en) * | 2002-11-13 | 2006-03-28 | Molecular Imprints, Inc. | Chucking system for modulating shapes of substrates |
US7070405B2 (en) * | 2002-08-01 | 2006-07-04 | Molecular Imprints, Inc. | Alignment systems for imprint lithography |
US7027156B2 (en) * | 2002-08-01 | 2006-04-11 | Molecular Imprints, Inc. | Scatterometry alignment for imprint lithography |
US8349241B2 (en) * | 2002-10-04 | 2013-01-08 | Molecular Imprints, Inc. | Method to arrange features on a substrate to replicate features having minimal dimensional variability |
US7323130B2 (en) * | 2002-12-13 | 2008-01-29 | Molecular Imprints, Inc. | Magnification correction employing out-of-plane distortion of a substrate |
US20040203126A1 (en) * | 2003-04-08 | 2004-10-14 | Yokogawa Electric Corporation | Method and apparatus for separating and purifying biopolymers |
US7150622B2 (en) * | 2003-07-09 | 2006-12-19 | Molecular Imprints, Inc. | Systems for magnification and distortion correction for imprint lithography processes |
US7136150B2 (en) * | 2003-09-25 | 2006-11-14 | Molecular Imprints, Inc. | Imprint lithography template having opaque alignment marks |
SE0400662D0 (en) * | 2004-03-24 | 2004-03-24 | Aamic Ab | Assay device and method |
US20050212022A1 (en) * | 2004-03-24 | 2005-09-29 | Greer Edward C | Memory cell having an electric field programmable storage element, and method of operating same |
US20050275311A1 (en) * | 2004-06-01 | 2005-12-15 | Molecular Imprints, Inc. | Compliant device for nano-scale manufacturing |
US20050270516A1 (en) * | 2004-06-03 | 2005-12-08 | Molecular Imprints, Inc. | System for magnification and distortion correction during nano-scale manufacturing |
US7768624B2 (en) * | 2004-06-03 | 2010-08-03 | Board Of Regents, The University Of Texas System | Method for obtaining force combinations for template deformation using nullspace and methods optimization techniques |
KR101175108B1 (en) * | 2004-06-03 | 2012-08-21 | 더 보드 오브 리전츠 오브 더 유니버시티 오브 텍사스 시스템 | System and method for improvement of alignment and overlay for microlithography |
US7785526B2 (en) | 2004-07-20 | 2010-08-31 | Molecular Imprints, Inc. | Imprint alignment method, system, and template |
US7630067B2 (en) | 2004-11-30 | 2009-12-08 | Molecular Imprints, Inc. | Interferometric analysis method for the manufacture of nano-scale devices |
US7292326B2 (en) * | 2004-11-30 | 2007-11-06 | Molecular Imprints, Inc. | Interferometric analysis for the manufacture of nano-scale devices |
US20070231421A1 (en) * | 2006-04-03 | 2007-10-04 | Molecular Imprints, Inc. | Enhanced Multi Channel Alignment |
WO2006060758A2 (en) * | 2004-12-01 | 2006-06-08 | Molecular Imprints, Inc. | Methods of exposure for the purpose of thermal management for imprint lithography processes |
US20070228608A1 (en) * | 2006-04-03 | 2007-10-04 | Molecular Imprints, Inc. | Preserving Filled Features when Vacuum Wiping |
US7947485B2 (en) * | 2005-06-03 | 2011-05-24 | Hewlett-Packard Development Company, L.P. | Method and apparatus for molecular analysis using nanoelectronic circuits |
US20060275779A1 (en) * | 2005-06-03 | 2006-12-07 | Zhiyong Li | Method and apparatus for molecular analysis using nanowires |
US20070009821A1 (en) * | 2005-07-08 | 2007-01-11 | Charlotte Cutler | Devices containing multi-bit data |
US8921102B2 (en) * | 2005-07-29 | 2014-12-30 | Gpb Scientific, Llc | Devices and methods for enrichment and alteration of circulating tumor cells and other particles |
WO2007041621A2 (en) * | 2005-10-03 | 2007-04-12 | Xingsheng Sean Ling | Hybridization assisted nanopore sequencing |
US7835870B2 (en) * | 2005-11-01 | 2010-11-16 | Georgia Institute Of Technology | Methods and systems for evaluating the length of elongated elements |
WO2007065025A2 (en) * | 2005-11-29 | 2007-06-07 | Wisconsin Alumni Research Foundation | Method of dna analysis using micro/nanochannel |
WO2007117524A2 (en) | 2006-04-03 | 2007-10-18 | Molecular Imprints, Inc. | Method of concurrently patterning a substrate having a plurality of fields and alignment marks |
AU2007338862B2 (en) * | 2006-07-19 | 2014-02-06 | Bionano Genomics, Inc. | Nanonozzle device arrays: their preparation and use for macromolecular analysis |
JP5027468B2 (en) * | 2006-09-15 | 2012-09-19 | 日本ミクロコーティング株式会社 | Probe cleaning or probe processing sheet and probe processing method |
KR100785033B1 (en) * | 2006-12-06 | 2007-12-12 | 삼성전자주식회사 | Information storage device using magnetic domain wall moving and method for manufacturing the same |
US20080186801A1 (en) * | 2007-02-06 | 2008-08-07 | Qisda Corporation | Bubble micro-pump and two-way fluid-driving device, particle-sorting device, fluid-mixing device, ring-shaped fluid-mixing device and compound-type fluid-mixing device using the same |
JP5491378B2 (en) * | 2007-03-28 | 2014-05-14 | バイオナノ ジェノミックス、インク. | Macromolecular analysis method using nanochannel array |
DE102007027414B3 (en) | 2007-06-11 | 2009-01-22 | Berliner Elektronenspeicherring-Gesellschaft für Synchrotronstrahlung mbH | Micro- and Nanofluidsystem for the dynamic structural analysis of linear macromolecules and their applications |
WO2009046094A1 (en) | 2007-10-01 | 2009-04-09 | Nabsys, Inc. | Biopolymer sequencing by hybridization of probes to form ternary complexes and variable range alignment |
US8951731B2 (en) * | 2007-10-15 | 2015-02-10 | Complete Genomics, Inc. | Sequence analysis using decorated nucleic acids |
US8008032B2 (en) * | 2008-02-25 | 2011-08-30 | Cellective Dx Corporation | Tagged ligands for enrichment of rare analytes from a mixed sample |
KR20170094003A (en) | 2008-06-06 | 2017-08-16 | 바이오나노 제노믹스, 인크. | Integrated nanofluidic analysis devices, fabrication methods and analysis techniques |
CA3062190C (en) | 2008-06-30 | 2023-03-28 | Bionano Genomics, Inc. | Methods and devices for single-molecule whole genome analysis |
WO2010002939A2 (en) * | 2008-06-30 | 2010-01-07 | Life Technologies Corporation | Methods for real time single molecule sequencing |
US9650668B2 (en) | 2008-09-03 | 2017-05-16 | Nabsys 2.0 Llc | Use of longitudinally displaced nanoscale electrodes for voltage sensing of biomolecules and other analytes in fluidic channels |
US8262879B2 (en) | 2008-09-03 | 2012-09-11 | Nabsys, Inc. | Devices and methods for determining the length of biopolymers and distances between probes bound thereto |
JP5717634B2 (en) * | 2008-09-03 | 2015-05-13 | ナブシス, インコーポレイテッド | Use of longitudinally displaced nanoscale electrodes for voltage sensing of biomolecules and other analytes in fluid channels |
EP2370594B1 (en) | 2008-11-18 | 2014-01-08 | BioNano Genomics, Inc. | Polynucleotide mapping and sequencing |
WO2010111605A2 (en) * | 2009-03-27 | 2010-09-30 | Nabsys, Inc. | Devices and methods for analyzing biomolecules and probes bound thereto |
WO2010111686A2 (en) | 2009-03-27 | 2010-09-30 | Life Technologies Corp | Labeled enzyme compositions, methods & systems |
US8455260B2 (en) * | 2009-03-27 | 2013-06-04 | Massachusetts Institute Of Technology | Tagged-fragment map assembly |
US8246799B2 (en) * | 2009-05-28 | 2012-08-21 | Nabsys, Inc. | Devices and methods for analyzing biomolecules and probes bound thereto |
US20100330557A1 (en) * | 2009-06-30 | 2010-12-30 | Zohar Yakhini | Genomic coordinate system |
WO2011032040A1 (en) | 2009-09-10 | 2011-03-17 | Centrillion Technology Holding Corporation | Methods of targeted sequencing |
US10174368B2 (en) | 2009-09-10 | 2019-01-08 | Centrillion Technology Holdings Corporation | Methods and systems for sequencing long nucleic acids |
US20120282709A1 (en) * | 2009-09-14 | 2012-11-08 | Byung Chul Lee | Method and device for dna sequence analysis using multiple pna |
US8969007B2 (en) | 2009-11-06 | 2015-03-03 | University Of Notre Dame Du Lac | Microchamber electrochemical cell having a nanoslot |
US8187979B2 (en) * | 2009-12-23 | 2012-05-29 | Varian Semiconductor Equipment Associates, Inc. | Workpiece patterning with plasma sheath modulation |
WO2011108540A1 (en) | 2010-03-03 | 2011-09-09 | 国立大学法人大阪大学 | Method and device for identifying nucleotide, and method and device for determining nucleotide sequence of polynucleotide |
KR20110100963A (en) * | 2010-03-05 | 2011-09-15 | 삼성전자주식회사 | Microfluidic device and method for deterimining sequences of target nucleic acids using the same |
US8535544B2 (en) | 2010-07-26 | 2013-09-17 | International Business Machines Corporation | Structure and method to form nanopore |
US8138068B2 (en) | 2010-08-11 | 2012-03-20 | International Business Machines Corporation | Method to form nanopore array |
US8715933B2 (en) | 2010-09-27 | 2014-05-06 | Nabsys, Inc. | Assay methods using nicking endonucleases |
GB201017905D0 (en) * | 2010-10-25 | 2010-12-01 | Mir Kalim U | Preparation and analysis of samples |
US8815145B2 (en) | 2010-11-11 | 2014-08-26 | Spirit Aerosystems, Inc. | Methods and systems for fabricating composite stiffeners with a rigid/malleable SMP apparatus |
US8974217B2 (en) | 2010-11-11 | 2015-03-10 | Spirit Aerosystems, Inc. | Reconfigurable shape memory polymer tooling supports |
US8734703B2 (en) | 2010-11-11 | 2014-05-27 | Spirit Aerosystems, Inc. | Methods and systems for fabricating composite parts using a SMP apparatus as a rigid lay-up tool and bladder |
US8945325B2 (en) | 2010-11-11 | 2015-02-03 | Spirit AreoSystems, Inc. | Methods and systems for forming integral composite parts with a SMP apparatus |
WO2012067911A1 (en) | 2010-11-16 | 2012-05-24 | Nabsys, Inc. | Methods for sequencing a biomolecule by detecting relative positions of hybridized probes |
US11274341B2 (en) | 2011-02-11 | 2022-03-15 | NABsys, 2.0 LLC | Assay methods using DNA binding proteins |
US20120252682A1 (en) | 2011-04-01 | 2012-10-04 | Maples Corporate Services Limited | Methods and systems for sequencing nucleic acids |
CN103998932B (en) | 2011-06-29 | 2017-06-06 | 中央研究院 | Capture, purifying and release using face coat to biological substance |
US11053535B2 (en) | 2011-09-12 | 2021-07-06 | The University Of North Carolina At Chapel Hill | Devices with a fluid transport nanochannel intersected by a fluid sensing nanochannel and related methods |
EP2570488A1 (en) | 2011-09-16 | 2013-03-20 | Centre National de la Recherche Scientifique (C.N.R.S) | Method for longitudinal macromolecule spreading and method for analyzing macromolecules |
KR101284274B1 (en) * | 2011-12-12 | 2013-07-08 | 한국과학기술원 | Sensor Having Nano Channel Structure and Method for Preparing the Same |
JP2015511812A (en) * | 2011-12-28 | 2015-04-23 | アジレント・テクノロジーズ・インクAgilent Technologies, Inc. | Two-dimensional nanofluidic CCD array for manipulating charged molecules in solution |
US9989515B2 (en) | 2012-02-10 | 2018-06-05 | The University Of North Carolina At Chapel Hill | Devices with fluidic nanofunnels, associated methods, fabrication and analysis systems |
KR101349332B1 (en) | 2012-08-03 | 2014-01-13 | 한국해양과학기술원 | Protein biosensor comprising pore structure using diffusive flow and fabricating method thereof |
EP2887058B1 (en) | 2012-08-17 | 2017-11-29 | Quantum Biosystems Inc. | Sample analysis method |
US9409173B2 (en) * | 2012-11-30 | 2016-08-09 | The Arizona Board Of Regents On Behalf Of The University Of Arizona | Method and device for generating a tunable array of fluid gradients |
US9914966B1 (en) | 2012-12-20 | 2018-03-13 | Nabsys 2.0 Llc | Apparatus and methods for analysis of biomolecules using high frequency alternating current excitation |
JP6282036B2 (en) | 2012-12-27 | 2018-02-21 | クオンタムバイオシステムズ株式会社 | Method and control apparatus for controlling movement speed of substance |
US10040018B2 (en) | 2013-01-09 | 2018-08-07 | Imagine Tf, Llc | Fluid filters and methods of use |
WO2014113557A1 (en) | 2013-01-18 | 2014-07-24 | Nabsys, Inc. | Enhanced probe binding |
WO2014134095A1 (en) | 2013-02-28 | 2014-09-04 | The University Of North Carolina At Chapel Hill | Nanofluidic devices with integrated components for the controlled capture, trapping, and transport of macromolecules and related methods of analysis |
US9255288B2 (en) | 2013-03-13 | 2016-02-09 | The University Of North Carolina At Chapel Hill | Nanofluidic devices for the rapid mapping of whole genomes and related systems and methods of analysis |
US20150064153A1 (en) | 2013-03-15 | 2015-03-05 | The Trustees Of Princeton University | High efficiency microfluidic purification of stem cells to improve transplants |
US10324011B2 (en) | 2013-03-15 | 2019-06-18 | The Trustees Of Princeton University | Methods and devices for high throughput purification |
EP2971287B1 (en) | 2013-03-15 | 2019-08-14 | GPB Scientific, LLC | On-chip microfluidic processing of particles |
ES2897575T3 (en) * | 2013-06-03 | 2022-03-01 | Lumicks Dsm Holding B V | Method and system for imaging a molecular strand |
US9364832B2 (en) | 2013-07-17 | 2016-06-14 | International Business Machines Corporation | Nanofluidic channels with gradual depth change for reducing entropic barrier of biopolymers |
KR20160079780A (en) | 2013-09-18 | 2016-07-06 | 퀀텀 바이오시스템즈 가부시키가이샤 | Biomolecule sequencing devices, systems and methods |
CN103638558B (en) * | 2013-09-30 | 2015-04-29 | 中国人民解放军第三军医大学第二附属医院 | In vitro construction method for bionic ligament-bone tissue engineering connector |
JP2015077652A (en) | 2013-10-16 | 2015-04-23 | クオンタムバイオシステムズ株式会社 | Nano-gap electrode and method for manufacturing same |
WO2015126840A1 (en) | 2014-02-18 | 2015-08-27 | Bionano Genomics, Inc. | Improved methods of determining nucleic acid structural information |
US9322061B2 (en) | 2014-03-06 | 2016-04-26 | International Business Machines Corporation | Nanochannel device with three dimensional gradient by single step etching for molecular detection |
TW201623605A (en) | 2014-04-01 | 2016-07-01 | 中央研究院 | Methods and systems for cancer diagnosis and prognosis |
US10438811B1 (en) | 2014-04-15 | 2019-10-08 | Quantum Biosystems Inc. | Methods for forming nano-gap electrodes for use in nanosensors |
US9861920B1 (en) | 2015-05-01 | 2018-01-09 | Imagine Tf, Llc | Three dimensional nanometer filters and methods of use |
US9658184B2 (en) | 2014-05-07 | 2017-05-23 | International Business Machines Corporation | Increasing the capture zone by nanostructure patterns |
WO2015170782A1 (en) * | 2014-05-08 | 2015-11-12 | Osaka University | Devices, systems and methods for linearization of polymers |
KR101647095B1 (en) * | 2014-05-19 | 2016-08-11 | 한국과학기술원 | Microfluidic system, manufacturing method thereof and method of cell encapsulation in hydrogel |
US10730047B2 (en) | 2014-06-24 | 2020-08-04 | Imagine Tf, Llc | Micro-channel fluid filters and methods of use |
DE102014109468B3 (en) * | 2014-07-07 | 2015-08-06 | Stiftung Caesar Center Of Advanced European Studies And Research | Culture chamber device for generating flowless and time stable gradients |
US9228994B1 (en) | 2014-08-06 | 2016-01-05 | Globalfoundries Inc. | Nanochannel electrode devices |
EP2998026B1 (en) | 2014-08-26 | 2024-01-17 | Academia Sinica | Collector architecture layout design |
US10124275B2 (en) | 2014-09-05 | 2018-11-13 | Imagine Tf, Llc | Microstructure separation filters |
CN107110763B (en) | 2014-11-03 | 2020-12-15 | 通用医疗公司 | Sorting particles in a microfluidic device |
US10058895B2 (en) | 2014-11-26 | 2018-08-28 | International Business Machines Corporation | Continuous flow, size-based separation of entities down to the nanometer scale using nanopillar arrays |
US9835538B2 (en) | 2014-11-26 | 2017-12-05 | International Business Machines Corporation | Biopolymer separation using nanostructured arrays |
US9636675B2 (en) | 2014-11-26 | 2017-05-02 | International Business Machines Corporation | Pillar array structure with uniform and high aspect ratio nanometer gaps |
US10758849B2 (en) | 2015-02-18 | 2020-09-01 | Imagine Tf, Llc | Three dimensional filter devices and apparatuses |
US10156568B2 (en) | 2015-04-30 | 2018-12-18 | International Business Machines Corporation | Immunoassay for detection of virus-antibody nanocomplexes in solution by chip-based pillar array |
US10471428B2 (en) | 2015-05-11 | 2019-11-12 | The University Of North Carolina At Chapel Hill | Fluidic devices with nanoscale manifolds for molecular transport, related systems and methods of analysis |
US10118842B2 (en) | 2015-07-09 | 2018-11-06 | Imagine Tf, Llc | Deionizing fluid filter devices and methods of use |
US10479046B2 (en) | 2015-08-19 | 2019-11-19 | Imagine Tf, Llc | Absorbent microstructure arrays and methods of use |
US10976232B2 (en) | 2015-08-24 | 2021-04-13 | Gpb Scientific, Inc. | Methods and devices for multi-step cell purification and concentration |
US9700891B2 (en) * | 2015-11-13 | 2017-07-11 | International Business Machines Corporation | Integrated nanofluidic arrays for high capacity colloid separation |
US9719926B2 (en) | 2015-11-16 | 2017-08-01 | International Business Machines Corporation | Nanopillar microfluidic devices and methods of use thereof |
US9733232B1 (en) | 2016-01-25 | 2017-08-15 | International Business Machines Corporation | Nanopillar arrays with interfaces for controlled polymer stretching and effective translocation into nanochannels |
US10640822B2 (en) | 2016-02-29 | 2020-05-05 | Iridia, Inc. | Systems and methods for writing, reading, and controlling data stored in a polymer |
US10859562B2 (en) | 2016-02-29 | 2020-12-08 | Iridia, Inc. | Methods, compositions, and devices for information storage |
US10438662B2 (en) | 2016-02-29 | 2019-10-08 | Iridia, Inc. | Methods, compositions, and devices for information storage |
US10107726B2 (en) | 2016-03-16 | 2018-10-23 | Cellmax, Ltd. | Collection of suspended cells using a transferable membrane |
US9993750B2 (en) | 2016-03-16 | 2018-06-12 | International Business Machines Corporation | Clog-resistant serpentine pillar filters and bladed loading structures for microfluidics |
US10465706B2 (en) * | 2016-04-19 | 2019-11-05 | Garrett Transportation I Inc. | Adjustable-trim centrifugal compressor for a turbocharger |
US10639634B2 (en) | 2016-06-01 | 2020-05-05 | Government Of The United States Of America, As Represented By The Secretary Of Commerce | Vacuum compatible fluid sampler |
KR101711792B1 (en) * | 2016-06-27 | 2017-03-06 | 한국기계연구원 | High throughput micro-fluidic device |
CN106744668A (en) * | 2017-03-10 | 2017-05-31 | 浙江工业大学 | Double layer heterojunction structure mould, manufacture method and its preparing the application of micro Nano material |
EP3675876A4 (en) | 2017-09-01 | 2021-06-02 | GPB Scientific, Inc. | Methods for preparing therapeutically active cells using microfluidics |
WO2019083507A1 (en) | 2017-10-24 | 2019-05-02 | Hewlett-Packard Development Company, L.P. | Surface enhanced luminescence nano pillar stage |
US11161281B2 (en) | 2017-12-22 | 2021-11-02 | International Business Machines Corporation | Structure and method for monitoring directed self-assembly pattern formation |
US10830724B2 (en) | 2017-12-22 | 2020-11-10 | International Business Machines Corporation | Micro-capacitance sensor array containing spaced apart first and second overlapping and parallel electrode plates for sensing analytes |
CN107930712A (en) * | 2017-12-22 | 2018-04-20 | 厦门百恩芯科技有限公司 | Biomedical detecting system based on nano impression micro flow chip and preparation method thereof |
US10961563B1 (en) * | 2019-12-19 | 2021-03-30 | Robert Bosch Gmbh | Nanoscale topography system for use in DNA sequencing and method for fabrication thereof |
WO2021253014A1 (en) * | 2020-06-12 | 2021-12-16 | Biofluidica, Inc. | Dual-depth thermoplastic microfluidic device and related systems and methods |
US11837302B1 (en) | 2020-08-07 | 2023-12-05 | Iridia, Inc. | Systems and methods for writing and reading data stored in a polymer using nano-channels |
KR102458206B1 (en) * | 2020-09-28 | 2022-10-24 | 한양대학교 산학협력단 | Concentration gradient generator |
EP3984640A1 (en) * | 2020-10-16 | 2022-04-20 | Universität Hamburg | An autonomous nanofluidic analysis device and a method for the analysis of dna molecules |
WO2023122088A2 (en) * | 2021-12-20 | 2023-06-29 | The General Hospital Corporation | Microfluidic systems and methods for isolating target entities |
Family Cites Families (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3973121A (en) * | 1972-12-29 | 1976-08-03 | Fite Wade L | Detector for heavy ions following mass analysis |
US4283276A (en) * | 1980-02-29 | 1981-08-11 | E. I. Du Pont De Nemours And Company | Rotor for sedimentation field flow fractionation |
US5772905A (en) | 1995-11-15 | 1998-06-30 | Regents Of The University Of Minnesota | Nanoimprint lithography |
US6482742B1 (en) | 2000-07-18 | 2002-11-19 | Stephen Y. Chou | Fluid pressure imprint lithography |
US6518189B1 (en) | 1995-11-15 | 2003-02-11 | Regents Of The University Of Minnesota | Method and apparatus for high density nanostructures |
US6309580B1 (en) | 1995-11-15 | 2001-10-30 | Regents Of The University Of Minnesota | Release surfaces, particularly for use in nanoimprint lithography |
AU719454B2 (en) | 1995-12-01 | 2000-05-11 | Innogenetics N.V. | Impedimetric detection system and method of production thereof |
US5867266A (en) | 1996-04-17 | 1999-02-02 | Cornell Research Foundation, Inc. | Multiple optical channels for chemical analysis |
US6165688A (en) | 1996-05-15 | 2000-12-26 | The United States Of America, As Represented By The Secretary Of Commerce | Method of fabricating of structures by metastable atom impact desorption of a passivating layer |
US6403311B1 (en) | 1997-02-12 | 2002-06-11 | Us Genomics | Methods of analyzing polymers using ordered label strategies |
CA2281205A1 (en) | 1997-02-12 | 1998-08-13 | Eugene Y. Chan | Methods and products for analyzing polymers |
US6316213B1 (en) | 1997-03-19 | 2001-11-13 | The Board Of Trustees Of The University Of Arkansas | Methods for the early diagnosis of ovarian, breast and lung cancer |
US6235471B1 (en) * | 1997-04-04 | 2001-05-22 | Caliper Technologies Corp. | Closed-loop biochemical analyzers |
US6083758A (en) | 1997-04-09 | 2000-07-04 | California Institute Of Technology | Method for screening peptides for metal coordinating properties and fluorescent chemosensors derived therefrom |
EP0988529B1 (en) * | 1997-04-25 | 2013-06-12 | Caliper Life Sciences, Inc. | Microfluidic devices incorporating improved channel geometries |
DE69823347T2 (en) * | 1997-05-16 | 2005-05-12 | Alberta Research Council, Edmonton | MICROFLUIDIC SYSTEM AND METHOD FOR THE OPERATION THEREOF |
US6969488B2 (en) * | 1998-05-22 | 2005-11-29 | Solexa, Inc. | System and apparatus for sequential processing of analytes |
US5882465A (en) * | 1997-06-18 | 1999-03-16 | Caliper Technologies Corp. | Method of manufacturing microfluidic devices |
GB9715101D0 (en) * | 1997-07-18 | 1997-09-24 | Environmental Sensors Ltd | The production of microstructures for analysis of fluids |
JP4065468B2 (en) * | 1998-06-30 | 2008-03-26 | キヤノン株式会社 | Exposure apparatus and device manufacturing method using the same |
US6263286B1 (en) | 1998-08-13 | 2001-07-17 | U.S. Genomics, Inc. | Methods of analyzing polymers using a spatial network of fluorophores and fluorescence resonance energy transfer |
CN1323355A (en) | 1998-08-13 | 2001-11-21 | 美国吉诺米克斯公司 | Optically characterizing polymers |
US6210896B1 (en) | 1998-08-13 | 2001-04-03 | Us Genomics | Molecular motors |
US6713238B1 (en) | 1998-10-09 | 2004-03-30 | Stephen Y. Chou | Microscale patterning and articles formed thereby |
US6438279B1 (en) | 1999-01-07 | 2002-08-20 | Cornell Research Foundation, Inc. | Unitary microcapiliary and waveguide structure and method of fabrication |
EP1157144A4 (en) * | 1999-01-13 | 2010-04-28 | Cornell Res Foundation Inc | Monolithic fabrication of fluidic structures |
US6334960B1 (en) | 1999-03-11 | 2002-01-01 | Board Of Regents, The University Of Texas System | Step and flash imprint lithography |
US6515751B1 (en) | 1999-03-11 | 2003-02-04 | Cornell Research Foundation Inc. | Mechanically resonant nanostructures |
US6616821B2 (en) | 1999-06-08 | 2003-09-09 | Broadley Technologies Corporation | Reference electrode having a microfluidic flowing liquid junction |
AU6771100A (en) * | 1999-08-13 | 2001-03-13 | U.S. Genomics, Inc. | Methods and apparatuses for stretching polymers |
US6927065B2 (en) | 1999-08-13 | 2005-08-09 | U.S. Genomics, Inc. | Methods and apparatus for characterization of single polymers |
US6762059B2 (en) | 1999-08-13 | 2004-07-13 | U.S. Genomics, Inc. | Methods and apparatuses for characterization of single polymers |
AU4504001A (en) | 1999-11-04 | 2001-06-04 | Princeton University | Electrodeless dielectrophoresis for polarizable particles |
US6534425B1 (en) | 1999-12-02 | 2003-03-18 | Seagate Technology Llc | Mask design and method for controlled profile fabrication |
EP1255995A2 (en) | 2000-02-16 | 2002-11-13 | Wisconsin Alumni Research Foundation | Method and apparatus for detection of microscopic pathogens |
US6491061B1 (en) * | 2000-02-25 | 2002-12-10 | University Of New Mexico | Stimuli responsive hybrid materials containing molecular actuators and their applications |
US6643010B2 (en) | 2000-08-07 | 2003-11-04 | Royce Technologies Llc | Multiple microchannels chip for biomolecule imaging |
WO2002065515A2 (en) * | 2001-02-14 | 2002-08-22 | Science & Technology Corporation @ Unm | Nanostructured devices for separation and analysis |
US7316769B2 (en) | 2001-03-19 | 2008-01-08 | Cornell Research Foundation, Inc. | Length-dependent recoil separation of long molecules |
AU2002311885A1 (en) * | 2001-05-03 | 2002-11-18 | Colorado School Of Mines | Devices employing colloidal-sized particles |
US6743570B2 (en) | 2001-05-25 | 2004-06-01 | Cornell Research Foundation, Inc. | Method of using heat-depolymerizable polycarbonate sacrificial layer to create nano-fluidic devices |
CA2454570C (en) * | 2001-07-25 | 2016-12-20 | The Trustees Of Princeton University | Nanochannel arrays and their preparation and use for high throughput macromolecular analysis |
US20030080472A1 (en) | 2001-10-29 | 2003-05-01 | Chou Stephen Y. | Lithographic method with bonded release layer for molding small patterns |
CN100373528C (en) | 2002-03-15 | 2008-03-05 | 普林斯顿大学 | Laser assisted direct imprint lithography |
JP4799861B2 (en) | 2002-04-16 | 2011-10-26 | プリンストン ユニバーシティ | Gradient structure for interface between microfluidic and nanofluid, and its manufacturing and use |
US20050023156A1 (en) * | 2003-07-30 | 2005-02-03 | Ramsey J. Michael | Nanostructured material transport devices and their fabrication by application of molecular coatings to nanoscale channels |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10722888B2 (en) | 2015-07-16 | 2020-07-28 | The Hong Kong University Of Science And Technology | Dynamic formation of nanochannels for single-molecule DNA analysis |
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