CN100468785C - 具有颗粒半导体材料的应力半导体器件结构 - Google Patents
具有颗粒半导体材料的应力半导体器件结构 Download PDFInfo
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- CN100468785C CN100468785C CNB2004800333678A CN200480033367A CN100468785C CN 100468785 C CN100468785 C CN 100468785C CN B2004800333678 A CNB2004800333678 A CN B2004800333678A CN 200480033367 A CN200480033367 A CN 200480033367A CN 100468785 C CN100468785 C CN 100468785C
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- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/665—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using self aligned silicidation, i.e. salicide
Abstract
Description
Claims (20)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US10/707,018 | 2003-11-14 | ||
US10/707,018 US7122849B2 (en) | 2003-11-14 | 2003-11-14 | Stressed semiconductor device structures having granular semiconductor material |
Publications (2)
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CN1879227A CN1879227A (zh) | 2006-12-13 |
CN100468785C true CN100468785C (zh) | 2009-03-11 |
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CNB2004800333678A Expired - Fee Related CN100468785C (zh) | 2003-11-14 | 2004-11-09 | 具有颗粒半导体材料的应力半导体器件结构 |
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US (2) | US7122849B2 (zh) |
EP (1) | EP1683187B1 (zh) |
JP (1) | JP4843498B2 (zh) |
KR (1) | KR100946038B1 (zh) |
CN (1) | CN100468785C (zh) |
AT (1) | ATE512465T1 (zh) |
WO (1) | WO2005050701A2 (zh) |
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- 2004-11-09 EP EP04810633A patent/EP1683187B1/en not_active Not-in-force
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2006
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Also Published As
Publication number | Publication date |
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KR20070015499A (ko) | 2007-02-05 |
EP1683187B1 (en) | 2011-06-08 |
ATE512465T1 (de) | 2011-06-15 |
CN1879227A (zh) | 2006-12-13 |
KR100946038B1 (ko) | 2010-03-09 |
WO2005050701A2 (en) | 2005-06-02 |
EP1683187A2 (en) | 2006-07-26 |
JP2007511909A (ja) | 2007-05-10 |
WO2005050701A8 (en) | 2005-11-03 |
JP4843498B2 (ja) | 2011-12-21 |
US7488658B2 (en) | 2009-02-10 |
US7122849B2 (en) | 2006-10-17 |
WO2005050701A3 (en) | 2006-01-05 |
US20050106799A1 (en) | 2005-05-19 |
EP1683187A4 (en) | 2008-08-27 |
US20080064172A1 (en) | 2008-03-13 |
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