CN100470836C - 晶体管结构、存储单元及其阵列、及存储器制造方法 - Google Patents
晶体管结构、存储单元及其阵列、及存储器制造方法 Download PDFInfo
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- CN100470836C CN100470836C CNB2004100105599A CN200410010559A CN100470836C CN 100470836 C CN100470836 C CN 100470836C CN B2004100105599 A CNB2004100105599 A CN B2004100105599A CN 200410010559 A CN200410010559 A CN 200410010559A CN 100470836 C CN100470836 C CN 100470836C
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- 229910052581 Si3N4 Inorganic materials 0.000 claims description 32
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Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/34—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the transistor being at least partially in a trench in the substrate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
- H10B12/033—Making the capacitor or connections thereto the capacitor extending over the transistor
- H10B12/0335—Making a connection between the transistor and the capacitor, e.g. plug
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/05—Making the transistor
- H10B12/053—Making the transistor the transistor being at least partially in a trench in the substrate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/05—Making the transistor
- H10B12/056—Making the transistor the transistor being a FinFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66787—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel
- H01L29/66795—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/785—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/48—Data lines or contacts therefor
- H10B12/485—Bit line contacts
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/48—Data lines or contacts therefor
- H10B12/488—Word lines
Abstract
Description
Claims (27)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10361695A DE10361695B3 (de) | 2003-12-30 | 2003-12-30 | Transistorstruktur mit gekrümmtem Kanal, Speicherzelle und Speicherzellenfeld für DRAMs sowie Verfahren zur Herstellung eines DRAMs |
DE10361695.0 | 2003-12-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1655364A CN1655364A (zh) | 2005-08-17 |
CN100470836C true CN100470836C (zh) | 2009-03-18 |
Family
ID=33560399
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004100105599A Expired - Fee Related CN100470836C (zh) | 2003-12-30 | 2004-12-30 | 晶体管结构、存储单元及其阵列、及存储器制造方法 |
Country Status (3)
Country | Link |
---|---|
US (2) | US7279742B2 (zh) |
CN (1) | CN100470836C (zh) |
DE (1) | DE10361695B3 (zh) |
Families Citing this family (55)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004006520B4 (de) * | 2004-02-10 | 2010-05-12 | Qimonda Ag | Verfahren zur Herstellung einer DRAM-Speicherzellenanordnung mit Trenchkondensatoren und Stegfeldeffekttransistoren (FinFET) sowie DRAM-Speicherzellenanordnung |
DE102004021052B3 (de) | 2004-04-29 | 2005-12-29 | Infineon Technologies Ag | Verfahren zur Herstellung von Trench-DRAM-Speicherzellen und Trench-DRAM-Speicherzellenfeld mit Stegfeldeffekttransistoren mit gekrümmtem Kanal (CFET) |
US7098105B2 (en) * | 2004-05-26 | 2006-08-29 | Micron Technology, Inc. | Methods for forming semiconductor structures |
DE102004031385B4 (de) * | 2004-06-29 | 2010-12-09 | Qimonda Ag | Verfahren zur Herstellung von Stegfeldeffekttransistoren in einer DRAM-Speicherzellenanordnung, Feldeffekttransistoren mit gekrümmtem Kanal und DRAM-Speicherzellenanordnung |
US7442976B2 (en) * | 2004-09-01 | 2008-10-28 | Micron Technology, Inc. | DRAM cells with vertical transistors |
KR100744068B1 (ko) | 2005-04-29 | 2007-07-30 | 주식회사 하이닉스반도체 | 반도체 소자의 트랜지스터 제조 방법 |
US7473952B2 (en) | 2005-05-02 | 2009-01-06 | Infineon Technologies Ag | Memory cell array and method of manufacturing the same |
US7816262B2 (en) | 2005-08-30 | 2010-10-19 | Micron Technology, Inc. | Method and algorithm for random half pitched interconnect layout with constant spacing |
US7679125B2 (en) * | 2005-12-14 | 2010-03-16 | Freescale Semiconductor, Inc. | Back-gated semiconductor device with a storage layer and methods for forming thereof |
US7371645B2 (en) * | 2005-12-30 | 2008-05-13 | Infineon Technologies Ag | Method of manufacturing a field effect transistor device with recessed channel and corner gate device |
US7842558B2 (en) * | 2006-03-02 | 2010-11-30 | Micron Technology, Inc. | Masking process for simultaneously patterning separate regions |
US7476933B2 (en) | 2006-03-02 | 2009-01-13 | Micron Technology, Inc. | Vertical gated access transistor |
TWI300975B (en) * | 2006-06-08 | 2008-09-11 | Nanya Technology Corp | Method for fabricating recessed-gate mos transistor device |
US20080061363A1 (en) * | 2006-09-08 | 2008-03-13 | Rolf Weis | Integrated transistor device and corresponding manufacturing method |
US7834395B2 (en) | 2007-02-13 | 2010-11-16 | Qimonda Ag | 3-D channel field-effect transistor, memory cell and integrated circuit |
DE102007009876A1 (de) | 2007-02-28 | 2008-09-11 | Qimonda Ag | Anordnung von Speicherzellen umfassend Doppel-Gate-Transistoren mit gebogenem Stromfluss, sowie Verfahren zum Betrieb und zur Herstellung derselben |
US7732888B2 (en) | 2007-04-16 | 2010-06-08 | Qimonda Ag | Integrated circuit, method for manufacturing an integrated circuit, memory cell array, memory module, and device |
US7923373B2 (en) | 2007-06-04 | 2011-04-12 | Micron Technology, Inc. | Pitch multiplication using self-assembling materials |
DE102007035858A1 (de) * | 2007-07-31 | 2009-02-05 | Qimonda Ag | Integrierte Schaltung, Verfahren zum Herstellen einer integrierten Schaltung, Speicherzellenarray, Speichermodul sowie Vorrichtung |
US7683417B2 (en) * | 2007-10-26 | 2010-03-23 | Texas Instruments Incorporated | Memory device with memory cell including MuGFET and fin capacitor |
US7742324B2 (en) * | 2008-02-19 | 2010-06-22 | Micron Technology, Inc. | Systems and devices including local data lines and methods of using, making, and operating the same |
US9190494B2 (en) * | 2008-02-19 | 2015-11-17 | Micron Technology, Inc. | Systems and devices including fin field-effect transistors each having U-shaped semiconductor fin |
US8866254B2 (en) * | 2008-02-19 | 2014-10-21 | Micron Technology, Inc. | Devices including fin transistors robust to gate shorts and methods of making the same |
US7915659B2 (en) | 2008-03-06 | 2011-03-29 | Micron Technology, Inc. | Devices with cavity-defined gates and methods of making the same |
US7808042B2 (en) | 2008-03-20 | 2010-10-05 | Micron Technology, Inc. | Systems and devices including multi-gate transistors and methods of using, making, and operating the same |
US7898857B2 (en) | 2008-03-20 | 2011-03-01 | Micron Technology, Inc. | Memory structure having volatile and non-volatile memory portions |
US8546876B2 (en) * | 2008-03-20 | 2013-10-01 | Micron Technology, Inc. | Systems and devices including multi-transistor cells and methods of using, making, and operating the same |
US7969776B2 (en) | 2008-04-03 | 2011-06-28 | Micron Technology, Inc. | Data cells with drivers and methods of making and operating the same |
US8076229B2 (en) * | 2008-05-30 | 2011-12-13 | Micron Technology, Inc. | Methods of forming data cells and connections to data cells |
US7824983B2 (en) * | 2008-06-02 | 2010-11-02 | Micron Technology, Inc. | Methods of providing electrical isolation in semiconductor structures |
US8101497B2 (en) | 2008-09-11 | 2012-01-24 | Micron Technology, Inc. | Self-aligned trench formation |
US8148776B2 (en) | 2008-09-15 | 2012-04-03 | Micron Technology, Inc. | Transistor with a passive gate |
US8278691B2 (en) * | 2008-12-11 | 2012-10-02 | Micron Technology, Inc. | Low power memory device with JFET device structures |
KR20100071200A (ko) * | 2008-12-19 | 2010-06-29 | 삼성전자주식회사 | 멀티플렉서 및 이의 제조 방법 |
US8143121B2 (en) * | 2009-10-01 | 2012-03-27 | Nanya Technology Corp. | DRAM cell with double-gate fin-FET, DRAM cell array and fabrication method thereof |
US8399931B2 (en) * | 2010-06-30 | 2013-03-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Layout for multiple-fin SRAM cell |
US9202921B2 (en) | 2010-03-30 | 2015-12-01 | Nanya Technology Corp. | Semiconductor device and method of making the same |
EP2393118A1 (en) * | 2010-06-02 | 2011-12-07 | Nanya Technology Corporation | Single-gate FinFET and fabrication method thereof |
US8294511B2 (en) | 2010-11-19 | 2012-10-23 | Micron Technology, Inc. | Vertically stacked fin transistors and methods of fabricating and operating the same |
US8846472B2 (en) * | 2011-02-28 | 2014-09-30 | Hynix Semiconductor Inc. | Method for fabricating semiconductor device |
CN102760735B (zh) * | 2011-06-21 | 2015-06-17 | 钰创科技股份有限公司 | 动态记忆体结构 |
US9941271B2 (en) | 2013-10-04 | 2018-04-10 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Fin-shaped field effect transistor and capacitor structures |
CN104752432B (zh) * | 2013-12-27 | 2017-11-03 | 中芯国际集成电路制造(上海)有限公司 | 嵌入式动态随机存储器单元及其形成方法 |
CN104865761B (zh) * | 2014-02-25 | 2018-06-08 | 群创光电股份有限公司 | 显示面板及显示装置 |
US9773888B2 (en) | 2014-02-26 | 2017-09-26 | Micron Technology, Inc. | Vertical access devices, semiconductor device structures, and related methods |
KR102316119B1 (ko) * | 2015-04-02 | 2021-10-21 | 삼성전자주식회사 | 반도체 장치 |
US20160336324A1 (en) * | 2015-05-15 | 2016-11-17 | Qualcomm Incorporated | Tunnel field effect transistor and method of making the same |
KR102427133B1 (ko) * | 2015-08-31 | 2022-08-01 | 삼성전자주식회사 | 반도체 장치 및 이의 제조 방법 |
TWI567941B (zh) * | 2015-10-29 | 2017-01-21 | 華邦電子股份有限公司 | 半導體裝置及其製造方法 |
US10008504B1 (en) * | 2016-12-27 | 2018-06-26 | Micron Technology, Inc. | Memory arrays |
US10692887B2 (en) * | 2017-08-29 | 2020-06-23 | Micron Technology, Inc. | Methods used in forming an array of memory cells |
US10283621B2 (en) * | 2017-09-20 | 2019-05-07 | Globalfoundries Inc. | Method of forming vertical field effect transistors with self-aligned gates and gate extensions and the resulting structure |
US10014390B1 (en) | 2017-10-10 | 2018-07-03 | Globalfoundries Inc. | Inner spacer formation for nanosheet field-effect transistors with tall suspensions |
US11404460B2 (en) * | 2020-01-07 | 2022-08-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Vertical gate field effect transistor |
KR20230124701A (ko) * | 2020-12-25 | 2023-08-25 | 유니산티스 일렉트로닉스 싱가포르 프라이빗 리미티드 | 반도체 소자를 사용한 메모리 장치 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5145707A (en) * | 1991-12-12 | 1992-09-08 | Kraft General Foods, Inc. | Salt enhancer |
US5920088A (en) * | 1995-06-16 | 1999-07-06 | Interuniversitair Micro-Electronica Centrum (Imec Vzw) | Vertical MISFET devices |
US5909618A (en) * | 1997-07-08 | 1999-06-01 | Micron Technology, Inc. | Method of making memory cell with vertical transistor and buried word and body lines |
US5945707A (en) * | 1998-04-07 | 1999-08-31 | International Business Machines Corporation | DRAM cell with grooved transfer device |
US6229173B1 (en) * | 1999-06-23 | 2001-05-08 | International Business Machines Corporation | Hybrid 5F2 cell layout for buried surface strap aligned to vertical transistor |
US6562665B1 (en) * | 2000-10-16 | 2003-05-13 | Advanced Micro Devices, Inc. | Fabrication of a field effect transistor with a recess in a semiconductor pillar in SOI technology |
US6413802B1 (en) * | 2000-10-23 | 2002-07-02 | The Regents Of The University Of California | Finfet transistor structures having a double gate channel extending vertically from a substrate and methods of manufacture |
DE10203674A1 (de) * | 2002-01-30 | 2003-08-14 | Infineon Technologies Ag | Halbleiterbaustein mit einer Isolationsschicht und Verfahren zur Herstellung eines Halbleiterbausteins mit Isolationsschicht |
JP2004214379A (ja) * | 2002-12-27 | 2004-07-29 | Toshiba Corp | 半導体装置、ダイナミック型半導体記憶装置及び半導体装置の製造方法 |
JP2004281761A (ja) * | 2003-03-17 | 2004-10-07 | Seiko Epson Corp | 半導体装置およびその製造方法 |
US6844238B2 (en) * | 2003-03-26 | 2005-01-18 | Taiwan Semiconductor Manufacturing Co., Ltd | Multiple-gate transistors with improved gate control |
JP2005086024A (ja) * | 2003-09-09 | 2005-03-31 | Toshiba Corp | 半導体装置及びその製造方法 |
KR100691006B1 (ko) * | 2005-04-29 | 2007-03-09 | 주식회사 하이닉스반도체 | 메모리 소자의 셀 트랜지스터 구조 및 그 제조방법 |
-
2003
- 2003-12-30 DE DE10361695A patent/DE10361695B3/de not_active Expired - Fee Related
-
2004
- 2004-12-30 US US11/024,935 patent/US7279742B2/en active Active
- 2004-12-30 CN CNB2004100105599A patent/CN100470836C/zh not_active Expired - Fee Related
-
2006
- 2006-11-06 US US11/592,955 patent/US20070052040A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US7279742B2 (en) | 2007-10-09 |
DE10361695B3 (de) | 2005-02-03 |
CN1655364A (zh) | 2005-08-17 |
US20050151206A1 (en) | 2005-07-14 |
US20070052040A1 (en) | 2007-03-08 |
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