CN100498276C - MEMS stretching twisted fatigue feature testing apparatus - Google Patents
MEMS stretching twisted fatigue feature testing apparatus Download PDFInfo
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- CN100498276C CN100498276C CNB2006101144354A CN200610114435A CN100498276C CN 100498276 C CN100498276 C CN 100498276C CN B2006101144354 A CNB2006101144354 A CN B2006101144354A CN 200610114435 A CN200610114435 A CN 200610114435A CN 100498276 C CN100498276 C CN 100498276C
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Abstract
The invention relates to MEMS drawing torsion fatigue characteristic experimental apparatus. It includes parallel plate capacitance driver and transducer, comb type capacitance driver and transducer, earthed electrode, drawing and torsion driving electrodes, drawing and torsion detecting electrodes. While in experiment, the drawing and torsion driving electrodes are respectively supplied alternating current signal to parallel plate and comb type capacitance drivers to make the fatigue testing specimen suffer alternating drawing and torsion stress at the same time. The parallel plate and comb type capacitance transducers are electrified direct current respectively by drawing and torsion detecting electrodes to detect fatigue testing specimen drawing and torsion amplitude. The invention has the advantages of easy processing, convenient operation, and high use value for MEMS structural strength study.
Description
Technical field
The present invention relates to a kind of MEMS stretching twisted fatigue feature testing apparatus, be used for (the Micro-Electro-Mechanical System of MEMS under the multiaxis ambient stress, MEMS (micro electro mechanical system)) research of polysilicon structure fatigue properties belongs to micro-nano-scale material behavior fundamental research field.
Background technology
Discover that the silicon that belongs to hard brittle material under macrostate can produce fatigue properties under micro-nano-scale, also not too clear and definite at present for the mechanism that this variation takes place.Understand this mechanism and measure the fatigue properties parameter of silicon under micro-meter scale and have great significance for MEMS reliability design and life prediction.
Under the yardstick that current MEMS can reach, because size is dwindled the influence (ScalingEffects) that brings, many physical phenomenons and macrocosm have very big difference, therefore are necessary oligodynamics, microfluid mechanics, microthermodynamics, little tribology, micro-optic and microstructure are carried out deep research.Though this research on the one hand comes into one's own, difficulty is bigger.
Torture test under the traditional macro yardstick is generally undertaken by the fatigue test of materials machine of special use, mainly contains type of drive such as hydraulic pressure, electromagnetism, and standard sample is clamped in wherein with dop.But this method also is not suitable for the research of MEMS fatigue properties, and at first, the type of drive of hydraulic pressure, electromagnetic force is inapplicable under micron order size state, and secondly, the clamping of micron-scale sample and centering operate extremely difficult, even may not finish.Stretch and reverse under the multiaxis stress state of effect simultaneously in view of micro-mechanical component often works in, be necessary to design a kind of stretching that is used for little component fatigue characteristic research and reverse pulling multiaxle fatigue experimental device, and this device can be processed by existing MEMS job operation.
Summary of the invention
Basic goal of the present invention is: the MEMS that the horizontal driving of comprehensive electrostatic comb drive and the characteristics of parallel plate capacitor driver vertical drive design a kind of integrated electrostatic comb drive and parallel plate capacitor driver stretches and reverses multiaxis fatigue properties experimental provision.Utilize parallel plate capacitor sensor and comb capacitance Fundamentals of Sensors simultaneously,, obtain the amplitude that sample stretches and reverses by changes in capacitance in the test experience process.
Basic ideas of the present invention are as follows:
The reasonable combination of this device by parallel plate capacitor and broach electric capacity drives the stretched vertically of parallel plate capacitor and the driving of reversing of comb capacitance is carried out simultaneously in same device and is independent of each other.Reached fatigue testing specimen is in simultaneously stretch and the distorting stress effect under purpose.This device chief component has: the parallel plate capacitor driver, and the parallel plate capacitor sensor, the comb capacitance driver, the comb capacitance sensor, ground-electrode, tensile drive electrode reverses drive electrode, and tensile test electrode reverses detecting electrode.Test test 11 is made up of two different right cylinders of radius up and down, two right cylinders connect vertically, be equivalent to the effect of traditional fatigue testing specimen breach at the step 71 of two right cylinder joints, its lower surface face is fixed, and upper surface and driver and sensor are connected as one.In the experimentation, by tensile drive electrode with reverse that drive electrode is respectively the parallel plate capacitor driver and the comb capacitance driver provides ac signal, sample is stretched and distorting stress simultaneously.Parallel plate capacitor sensor and comb capacitance sensor be respectively by tensile test electrode with reverse detecting electrode and connect direct current, stretching and torsional amplitude that can test samples.
The concrete technical scheme that is adopted is as follows.Fatigue testing specimen 11 is positioned at circle centre position, the upper surface of fatigue testing specimen 11 is supported with four fan-shaped flat boards that suspend that along the circumferential direction distribute, promptly first dull and stereotyped 40, second the dull and stereotyped the 44, the 3rd the dull and stereotyped the 42, the 4th suspend dull and stereotyped 301, four suspend dull and stereotyped and the fatigue testing specimens 11 that suspend that suspend that suspend are as a whole and link to each other and ground connection with ground-electrode 1 by fatigue testing specimen 11 following hearth electrodes; Wherein: suspending first is provided with the first corresponding with it hearth electrode 41 below dull and stereotyped 40, constitute first plane-parallel capacitor 4; Suspending second is provided with the second corresponding with it hearth electrode 45 below dull and stereotyped 44, constitute second plane-parallel capacitor 13; Suspending the 3rd is provided with the 3rd corresponding with it hearth electrode 43 below dull and stereotyped 42, constitute the 3rd plane-parallel capacitor 8.The hearth electrode of first plane-parallel capacitor 4 and second plane-parallel capacitor 13 connects alternating current by tensile drive electrode 14, constitutes pair of parallel plate electric capacity driver, makes fatigue testing specimen 11 be subjected to drawing stress; The hearth electrode 43 of the 3rd parallel plate capacitor 8 links to each other with amplitude detecting circuit by tensile test electrode 7 and constitutes the parallel plate capacitor sensor, is used to detect the amplitude that fatigue testing specimen 11 stretches; Suspend dull and stereotyped 42 the 3rd, the 4th two sides along radial direction that suspend flat board 301 are respectively arranged with the 3rd suspension comb 304, first suspension comb 306, second suspension comb 302 and the 4th suspension comb 308, the 3rd suspension comb 304 cooperates formation the 3rd comb capacitance 5 with the 3rd fixed fingers 400, first suspension comb 306 cooperates formation second comb capacitance 9 with first fixed fingers 404, second suspension comb 302 cooperates formation first comb capacitance 2, the four suspension combs 308 to cooperate formation the 4th comb capacitance 15 with the 4th fixed fingers 406 with second fixed fingers 402.Wherein, first fixed fingers 404 and second fixed fingers 402 connect alternating current by reversing drive electrode 10, make the comb capacitance 2 of winning, second comb capacitance 9 constitute a pair of comb capacitance driver, make fatigue testing specimen 11 be subjected to distorting stress; The 3rd comb capacitance 5, the 4th comb capacitance 15 constitute a pair of comb capacitance sensor, by connecing amplitude detecting circuit with the detecting electrode 6 that reverses that the 3rd fixed fingers 400 links to each other with the 4th fixed fingers 406, are used to detect the degree of reversing of fatigue testing specimen 11.
At the trial, the top crown of parallel plate capacitor and the suspension comb of comb capacitance apply alternating current all by hearth electrode ground connection by the hearth electrode to the parallel plate capacitor driver, make its top crown (fan-shaped flat board suspends) be subjected to the electrostatic force of vertical direction; Fixed fingers part to comb actuator also applies the identical alternating current of frequency simultaneously, makes suspension comb and the coupled fan-shaped flat board that suspends be subjected to circumferential driving force.After this electric signal frequency reaches dull and stereotyped natural frequency, flat board will resonate, and the fatigue testing specimen that links to each other with flat board under the drive of flat board is in typical stretching with regard to the effect that has been subjected to stretching and distorting stress simultaneously and reverses under the multiaxis ambient stress.Simultaneously also utilize parallel plate capacitor sensor and comb capacitance Fundamentals of Sensors,, obtain the amplitude that sample stretches and reverses by changes in capacitance in the test experience process.
The present invention compared with prior art has remarkable advantages and beneficial effect:
1, the present invention has fully utilized the characteristics of horizontal driving of electrostatic comb drive and parallel plate capacitor driver vertical drive.Rational by both in conjunction with making fatigue testing specimen be in stretching and reversing the multi-axis stress state of effect simultaneously.Customer service the existing apparatus deficiency that only can structure use vertical drive separately or laterally drive.
2, the present invention utilizes parallel plate capacitor sensor and comb capacitance Fundamentals of Sensors respectively, by changes in capacitance in the test experience process, obtains the amplitude that sample stretches and reverses.
3, parallel plate capacitor sensor and pectination electrostatic transducer cooperating and be independent of each other in this device.
4, in order to make fatigue phenomenon be easy to observe, consider the requirement of processing technology aspect again, fatigue testing specimen 11 is made up of two right cylinders that join vertically, the step between two right cylinders is equivalent to the effect of breach in traditional fatigue testing specimen.
Characteristics such as 5, sample and driving and pick-up unit are connected in one, have removed the trouble of clamping and centering from, have handling ease, and be easy and simple to handle.
6, it is simple that this device has processing, easy to operate, obtains true experimental data easily, the characteristics such as multiaxis ambient stress of real simulation MEMS member, and therefore the torsional fatigue The Characteristic Study to the MEMS member that is in microscale has very high value.
Description of drawings
The positive overall situation figure of Fig. 1 MEMS stretching twisted fatigue feature testing apparatus
Wherein: 1, ground-electrode, 2, first comb capacitance, 3, reverse the detection ring arm, 4, first parallel plate capacitor, the 5, the 3rd comb capacitance, 6, reverse detecting electrode, 7, tensile test electrode, the 8, the 3rd parallel plate capacitor, 9, second comb capacitance, 10, reverse drive electrode, 11, fatigue testing specimen, 12, stretching driving ring arm, 13, second parallel plate capacitor, 14, tensile drive electrode, the 15, the 4th comb capacitance, 16, reverse the driving ring arm;
Fig. 2 MEMS stretching twisted fatigue feature testing apparatus three-dimensional structure diagram
Wherein: 25, the metal level of ground-electrode, 26, the structural sheet of ground-electrode, 27, the fixed bed of ground-electrode, 20, the bottom electrode layer of ground-electrode, 21, reverse the metal level of detecting electrode, 22, reverse the structural sheet of detecting electrode, 23, reverse the fixed bed of detecting electrode, 24, reverse the bottom electrode layer of detecting electrode, 28, the metal level of tensile drive electrode, 29, the structural sheet of tensile drive electrode, 30, the fixed bed of tensile drive electrode, 31, the bottom electrode layer of tensile drive electrode, 32, reverse the metal level of drive electrode, 33, reverse the structural sheet of drive electrode, 34, reverse the fixed bed of drive electrode, 35, reverse the bottom electrode layer of drive electrode, 36, the metal level of tensile test electrode, 37, the structural sheet of tensile test electrode, 38, the fixed bed of tensile test electrode, 39, the bottom electrode layer of tensile test electrode, 40, first flat board that suspends, 41, first hearth electrode, 42, the 3rd flat board that suspends, 43, the 3rd hearth electrode, 44, second flat board that suspends, 45, second hearth electrode;
Fig. 3 MEMS stretching twisted fatigue feature testing apparatus dull and stereotyped three-dimensional structure diagram that suspends
Wherein: 301, the 4th flat board that suspends, 302, second suspension comb, the 304, the 3rd suspension comb, 304, first suspension comb, the 308, the 4th suspension comb;
Fig. 4 MEMS stretching twisted fatigue feature testing apparatus sample part three-dimensional structure diagram
Wherein: 400, the 3rd fixed fingers, 402, second fixed fingers, 404, first fixed fingers, the 406, the 4th fixed fingers;
Fig. 5 MEMS stretching twisted fatigue feature testing apparatus electrode cut-open view
Fig. 6 MEMS stretching twisted fatigue feature testing apparatus fatigue testing specimen structural drawing
Wherein: 70, the fixed bed below the experimental sample, 71, step;
Fig. 7 MEMS stretching twisted fatigue feature testing apparatus test assembling synoptic diagram
Embodiment
Be illustrated below in conjunction with 1～5 pair of specific embodiments of the invention of accompanying drawing:
The major function of present embodiment is realized by broach electric capacity and parallel plate capacitor.According to the difference that plays a role in experimentation, these two kinds of electric capacity have been divided into driver and sensor again.Wherein driver comprises: 4,13 among 2,9 among comb capacitance driver such as Fig. 1 and parallel plate capacitor driver such as Fig. 1.Sensor comprises: among 5,15 among comb capacitance sensor such as Fig. 1 and parallel-plate capacitive transducer such as Fig. 18.
Each comb capacitance driver and sensor all are made up of two groups of mutual broach.Wherein one group of broach is fixed, and Dui Ying one group of broach suspends with it.Fixed fingers as comb capacitance driver among Fig. 12,9 and comb capacitance sensor 5,15 partly is 402,404 and 400,406 among Fig. 4.Suspension comb partly is 302,306 and 304,308 among Fig. 3.
Each parallel plate capacitor driver and sensor all are made up of two pole plates up and down.Bottom crown (hearth electrode) is fixing, last step (flat board suspends) be positioned at bottom crown directly over, and it is unsettled under the support of the upper surface of test sample 11, as parallel plate capacitor driver among Fig. 14,13 and parallel-plate capacitive transducer 8, wherein 40 among Fig. 2,44,42 is respectively its top crown (flat board suspends), and 41,45,43 for being fixed on suprabasil bottom crown (hearth electrode).
The fatigue testing specimen 11 of this experiment is made up of two right cylinders that join vertically, and the step between two right cylinders is equivalent to the effect of breach in traditional fatigue testing specimen, as shown in Figure 6.The part (as Fig. 3) that suspends of its upper surface and whole device is connected as a single entity.Be provided with fixed bed 70 and hearth electrode 20 below the lower surface, and link to each other with ground-electrode 1 by hearth electrode 20.Whole device suspend the part and fatigue testing specimen 11 unsettled under the support of the fixed bed 70 of the lower surface of test sample 11.
In the process of the test, tensile drive electrode 14 connects ac signal by probe.Ac signal is delivered to the bottom crown 41,45 of parallel plate capacitor driver 4,13 by stretching driving ring arm 12.This moment, the top crown 40,41 of the parallel plate capacitor driver of ground connection just was subjected to the alternation electrostatic force of vertical direction, when the frequency of this ac signal when suspending natural frequency dull and stereotyped, this flat board will resonate.Under the drive of flat board, support the drawing stress that this dull and stereotyped fatigue testing specimen just has been subjected to alternation.
Reverse detecting electrode 6 and connect amplitude detecting circuit by probe.Because the suspension comb 304,308 of comb capacitance sensor 5,15 and dull and stereotyped 42,301 supports by fatigue testing specimen 11 that suspend are suspended in the air, so work as the time spent of doing that fatigue testing specimen is subjected to distorting stress, the suspension comb that can drive the comb capacitance sensor rotates.The electric capacity of comb capacitance sensor will change like this, and amplitude detecting circuit sends detected capacitance variations data to computing machine, and computing machine calculates the torsional amplitude of fatigue testing specimen by processing.
The structure of whole device and the size of each member all meet the technology of existing surface micromachined to be asked, form by the standard MEMS processes, and from top to bottom by metal level, the polysilicon structure layer, fixed bed and bottom electrode layer are formed.Suspend part 40,42,44,301,302,304,306,308 and the fatigue testing specimen 11 of device all are positioned at the polysilicon structure layer.The layer structure of five electrodes is identical, is that example describes with the tensile test electrode.Fig. 5 is the plane view of tensile test electrode, and wherein uppermost is the electric conductivity that metal level 36 is used for intensifier electrode, is polysilicon structure layer 37 below the metal level, is fixed bed 38 below the polysilicon structure layer, is bottom electrode layer 39 below the fixed bed.
As shown in Figure 7, utilize the designed multi-axle micromechanic fatigue properties testing program of above-mentioned MEMS stretching twisted fatigue feature testing apparatus.This scheme synoptic diagram is referring to Fig. 7, mainly by MEMS stretching twisted fatigue feature testing apparatus operator's console 60, terminal control mechanism 61, the signal generator 62 that is connected with terminal control mechanism, the power amplifier 63 that amplifies with signal with signal generator, and the amplitude measurement circuit 62 that links to each other with the terminal control mechanism input end is formed.
MEMS stretching twisted fatigue feature testing apparatus chip is put on the operator's console, and its circuit connects to be provided by probe on the operator's console 64, and the fatigue testing specimen top is placed with microscope 68, is provided with the situation of carrying out that ccd video camera 69 is used for observation experiment on microscope 68.The sinusoidal signal with fixed frequency that signal generator 62 produces is amplified the MEMS stretching twisted fatigue feature testing apparatus is inserted in the back by probe 64 electrode by power amplifier 63, detection signal is drawn by probe 66, insert amplitude measurement circuit 67, last entry terminal control device carries out analyzing and processing.Need to prove that terminal control mechanism can be that computing machine also can be the single card microcomputer microprocessor.
It should be noted that at last: above embodiment only in order to the explanation the present invention and and unrestricted technical scheme described in the invention; Therefore, although this instructions has been described in detail the present invention with reference to each above-mentioned embodiment,, those of ordinary skill in the art should be appreciated that still and can make amendment or be equal to replacement the present invention; And all do not break away from the technical scheme and the improvement thereof of the spirit and scope of utility model, and it all should be encompassed in the middle of the claim scope of the present invention.
Claims (2)
1, MEMS draws and turns round the fatigue properties experimental provision, it is characterized in that: fatigue testing specimen (11) is positioned at circle centre position, the upper surface of fatigue testing specimen (11) is supported with four fan-shaped flat boards that suspend that along the circumferential direction distribute, i.e. first flat board (40), second flat board (44), the 3rd flat board (42), the 4th flat board (301) that suspends that suspends that suspends that suspends, four suspend dull and stereotyped as a whole with fatigue testing specimen (11) and link to each other and ground connection with ground-electrode (1) by the following hearth electrodes of fatigue testing specimen (11); Wherein: suspending first is provided with corresponding with it first hearth electrode (41) below the flat board (40), constitutes first plane-parallel capacitor (4); Suspending second is provided with corresponding with it second hearth electrode (45) below the flat board (44), constitutes second plane-parallel capacitor (13); Suspending the 3rd is provided with corresponding with it the 3rd hearth electrode (43) below the flat board (42), constitutes the 3rd plane-parallel capacitor (8); The hearth electrode of first plane-parallel capacitor (4) and second plane-parallel capacitor (13) connects alternating current by tensile drive electrode (14), constitutes pair of parallel plate electric capacity driver, makes fatigue testing specimen (11) be subjected to drawing stress; The hearth electrode (43) of the 3rd parallel plate capacitor (8) links to each other with amplitude detecting circuit by tensile test electrode (7) and constitutes the parallel plate capacitor sensor, is used to detect the amplitude that fatigue testing specimen (11) stretches; At the 3rd flat board (42) that suspends, the 4th two sides along radial direction that suspend flat board (301) are respectively arranged with the 3rd suspension comb (304), first suspension comb (306), second suspension comb (302) and the 4th suspension comb (308), the 3rd suspension comb (304) cooperates formation the 3rd comb capacitance (5) with the 3rd fixed fingers (400), first suspension comb (306) cooperates formation second comb capacitance (9) with first fixed fingers (404), second suspension comb (302) cooperates formation first comb capacitance (2) with second fixed fingers (402), the 4th suspension comb (308) cooperates formation the 4th comb capacitance (15) with the 4th fixed fingers (406); Wherein, first fixed fingers (404) and second fixed fingers (402) connect alternating current by reversing drive electrode (10), make the comb capacitance of winning (2), second comb capacitance (9) constitute a pair of comb capacitance driver, make fatigue testing specimen (11) be subjected to distorting stress; The 3rd comb capacitance (5), the 4th comb capacitance (15) constitute a pair of comb capacitance sensor, by connecing amplitude detecting circuit, be used to detect the degree of reversing of fatigue testing specimen (11) with the detecting electrode (6) that reverses that the 3rd fixed fingers (400) links to each other with the 4th fixed fingers (406).
2, MEMS according to claim 1 draws and turns round the fatigue properties experimental provision, it is characterized in that: described test sample (11) is made up of two different right cylinders of radius up and down, two right cylinders connect vertically, are equivalent to the effect of traditional fatigue testing specimen breach at the step (71) of two right cylinder joints.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104502193A (en) * | 2014-12-12 | 2015-04-08 | 东南大学 | Structure for testing micro-beam breaking strength based on longitudinal comb-tooth-type capacitor |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104483196B (en) * | 2014-12-12 | 2017-02-22 | 东南大学 | Test structure of micro-beam fracture strength based on lateral comb tooth type capacitance |
| CN105021454B (en) * | 2015-08-12 | 2017-12-26 | 天津大学 | A kind of micron order sized samples tension-torsion experiment on fatigue properties fixture |
| CN108982206B (en) * | 2018-08-27 | 2020-09-25 | 北京工业大学 | Strain-controlled tension-torsion thermal mechanical fatigue test method |
| CN109761185B (en) * | 2019-01-25 | 2020-09-29 | 山东大学 | MEMS driver based on zipper comb teeth and working method thereof |
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2006
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Non-Patent Citations (2)
| Title |
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| 表面微机械静电梳状驱动结构的研究. 吴徽等.清华大学学报(自然科学版)，第39卷第S1期. 1999 |
| 表面微机械静电梳状驱动结构的研究. 吴徽等.清华大学学报(自然科学版)，第39卷第S1期. 1999 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104502193A (en) * | 2014-12-12 | 2015-04-08 | 东南大学 | Structure for testing micro-beam breaking strength based on longitudinal comb-tooth-type capacitor |
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