CN100499958C - Signal transmitting device for electrostatic cartridge - Google Patents
Signal transmitting device for electrostatic cartridge Download PDFInfo
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- CN100499958C CN100499958C CNB2005101264436A CN200510126443A CN100499958C CN 100499958 C CN100499958 C CN 100499958C CN B2005101264436 A CNB2005101264436 A CN B2005101264436A CN 200510126443 A CN200510126443 A CN 200510126443A CN 100499958 C CN100499958 C CN 100499958C
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- radio frequency
- conducting body
- electrostatic chuck
- frequency conducting
- signal transmitting
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Abstract
A signal transmission device used on static flange is prepared as connecting one end of radio frequency conductor to static flange and another end being with connector of radio frequency conductor, setting shield tube on external of radio frequency conductor and setting shield end cover on connector end as well as setting a number of insulation rings between shield tube and radio frequency conductor.
Description
Technical field
The present invention relates to semiconductor etching device, be used for the signal transmitting apparatus of electrostatic chuck in particularly a kind of semiconductor etching device.
Background technology
In semiconductor equipments such as etching, oxidation and chemical vapor deposition (CVD), use the plasma treatment semiconductor wafer.Fig. 1 is a kind of plasma processing apparatus, and 15 is the gas inlet among the figure, and 2 is plasma-reaction-chamber, and 16 is plasma, and 17 is semiconductor wafer, and 2 is electrostatic chuck, and 18 is rf input port.The gas that injects plasma reaction chamber forms plasma under the effect of radiofrequency signal.Wherein the radio-frequency power of radio freqnency generator generation will be sent to plasma-reaction-chamber through transmitting device.Traditional signal transmitting apparatus that is used for electrostatic chuck is a cable, and an end of cable connects radio freqnency generator, and the other end is connected to the rf input port 18 of plasma-reaction-chamber.The shortcoming of this traditional structure is:
1. the cable syndeton is not compact, installs, dismantles inconvenience, and repeatedly easy disassembling damages the cable adapter part.
2. the specification of cable is along with the power of radiofrequency signal is different and different.
3. the shielding action of cable is limited, is subjected to the interference of other signals of system easily, perhaps produces the interference to other signals of system, reduces system reliability.
Summary of the invention
(1) technical problem that will solve
The objective of the invention is at above-mentioned the deficiencies in the prior art, a kind of reliability height, the signal transmitting apparatus that is used for electrostatic chuck applied widely are provided.
(2) technical scheme
For achieving the above object, the present invention adopts following technical scheme:
The present invention is used for the signal transmitting apparatus of electrostatic chuck, comprise radio frequency conducting body and radiofrequency signal generating means that an end is connected with electrostatic chuck, the other end of radio frequency conducting body is provided with radio frequency conducting body joint, described radio frequency conducting body joint is connected with the radiofrequency signal generating means, the external shielded-plate tube that is provided with of described radio frequency conducting, the joint end is provided with the shielding end cap, is provided with some dead rings between described radio frequency conducting body and the shielded-plate tube.
Wherein said radio frequency conducting body is " L " shape, and described shielded-plate tube comprises the vertical shielded-plate tube I that links together, vertical shielded-plate tube II and the horizontal shielded-plate tube that is connected with vertical shielded-plate tube II tube wall.
Wherein said radio frequency conducting body is a hollow tubular.
The outer surface of wherein said radio frequency conducting body is coated with gold or silver.
Wherein the electrostatic chuck bottom is provided with the groove that cooperates with radio frequency conducting body, with groove fit the radio frequency connecting ring is housed partly on the radio frequency conducting body.
Wherein also comprise the dc wire that is connected with electrostatic chuck, this lead upper end is connected on the interior electrostatic chuck of radio frequency conducting body, and radio frequency conducting body is stretched out in the bottom, is provided with insulator between dc wire and radio frequency conducting body.
Wherein said dc wire upper end is connected with the direct current probe, and the direct current probe is connected with electrostatic chuck.
Wherein be connected with adapter sleeve between radiofrequency signal generating means and the shielding end cap with central through hole, described radio frequency conducting body joint is provided with the radio frequency transmission handle with its one, the central through hole that this radio frequency transmission handle passes adapter sleeve extend in the radiofrequency signal generating means, is provided with locking nut between the coupling part of described adapter sleeve and radiofrequency signal generating means.
(3) beneficial effect
The advantage that is used for the signal transmitting apparatus of electrostatic chuck of the present invention is with good effect: the present invention is connected radiofrequency signal generating means and plasma-reaction-chamber, compact conformation, and easy accessibility, repeatedly dismounting is not easy to damage; Radio frequency conducting body does not change with the change of radio frequency signal power, and is applied widely.Owing to be provided with shielding end cap and shielded-plate tube separately, radiofrequency signal is had good shielding action, make system safety reliable.
Description of drawings
Fig. 1 is the structural representation of existing plasma-reaction-chamber;
Fig. 2 is the structural representation of first kind of embodiment of the signal transmitting apparatus that is used for electrostatic chuck of the present invention;
Fig. 3 is an A part structure for amplifying schematic diagram among Fig. 2;
Fig. 4 is a B part structure for amplifying schematic diagram among Fig. 2;
Fig. 5 is the structural representation of second kind of embodiment of the signal transmitting apparatus that is used for electrostatic chuck of the present invention.
Among the figure: 1. plasma-reaction-chamber; 2. electrostatic chuck; 3. radio frequency conducting body; 4. dead ring; 5. vertical shielded-plate tube I; 6. vertical shielded-plate tube II; 7. horizontal shielded-plate tube; 8. shielding end cap; 9. radio frequency conducting body joint; 10. radiofrequency signal generating means; 11. dc wire; 12. insulator; 13. pedestal; 14. radio frequency connecting ring; 15. gas inlet; 16. plasma; 17. semiconductor wafer; 18. rf input port; 19. radio frequency transmission handle; 20. adapter sleeve; 21. locking nut.
Embodiment
Below in conjunction with accompanying drawing, further describe the embodiment that the present invention is used for the signal transmitting apparatus of electrostatic chuck, but be not used for limiting protection scope of the present invention.
Referring to Fig. 2, Fig. 3 and Fig. 4.The structure of first kind of embodiment of the signal transmitting apparatus that is used for electrostatic chuck of the present invention, it comprise "
" shape radio frequency conducting body 3 and radiofrequency signal generating means 10.Wherein the electrostatic chuck bottom is provided with groove, and the upper end of radio frequency conducting body 3 is engaged in this groove, and with groove fit the radio frequency connecting ring is housed partly on radio frequency conducting body 3.The radio frequency connecting ring can be selected the BAND8 type for use, also can select other models for use, and it mainly acts on is to strengthen the compactness that radio frequency conducting body 3 is connected with electrostatic chuck, increases the conducting area.The bottom of radio frequency conducting body 3 is provided with radio frequency conducting body joint 9.Radio frequency conducting body joint 9 is connected with radiofrequency signal generating means 10; The radio frequency conducting body 3 outer shielded-plate tubes that are provided with, joint 9 ends are provided with shielding end cap 8.Processing for convenience, shielded-plate tube is made up of the vertical shielded-plate tube I5 of split, vertical shielded-plate tube II6, horizontal shielded-plate tube 7 three parts, wherein vertically shielded-plate tube I5 is connected by screw or other modes with plasma reaction chamber, vertically shielded-plate tube I5 and vertical shielded-plate tube II6 end link together, horizontal shielded-plate tube 7 ends link together with vertical shielded-plate tube II6 tube wall, in order to play better shield effectiveness, can suitably strengthen the thickness of each shielded-plate tube and shielding end cap 8.At radio frequency conducting body 3 and vertically between the shielded-plate tube I5, be provided with a dead ring 4 separately between radio frequency conducting body 3 and the horizontal shielded-plate tube 7, the quantity of dead ring is not limited to two, and the size that concrete basis is used for the signal transmitting apparatus of electrostatic chuck is decided.Dead ring 4 not only plays the effect of insulation, installs stable but also help radio frequency conducting body 3.Because radiofrequency signal transmits in surface of conductors, so radio frequency conducting body 3 is designed to hollow tubular, made by materials such as copper, aluminium or steel.At this moment radio frequency conducting body joint 9 is engaged in the endoporus of radio frequency conducting body 3, and on the radio frequency conducting body joint 9 of the two part that cooperatively interacts, install two radio frequency connecting rings 14 additional, radio frequency connecting ring 14 can be selected the BAND8 type for use, also can select other models for use, it mainly acts on is to make radio frequency conducting body joint 9 be connected closelyr with radio frequency conducting body 3, increase the conducting area, improve the radio frequency transmission quality.Hollow tubular radio frequency conducting body 3 can alleviate the weight that the present invention is used for the signal transmitting apparatus of electrostatic chuck, save material, and transmission quality can not be affected." L " shape radio frequency conducting body 3 can obtain by whole machining, also can obtain with welding processing by two parts or many parts.In order further to improve the transmission quality of radio frequency conducting body 3, the surface of radio frequency conducting body 3 can be by electroplating or additive method obtain the good material of one deck conductance, such as gold, silver etc.Among the present invention, the installation of miscellaneous parts such as water route, gas circuit has been installed in pedestal 13 in reative cell 1 for convenience, and electrostatic chuck 2 is seated on the pedestal 13.
As shown in Figure 4, be connected with adapter sleeve 20 between radiofrequency signal generating means 10 among the present invention and the shielding end cap 8 with central through hole, radio frequency conducting body joint 9 is provided with the radio frequency transmission handle 19 with its one, the central through hole that this radio frequency transmission handle 19 passes adapter sleeve 20 extend in the radiofrequency signal generating means 10, is provided with locking nut 21 between the coupling part of adapter sleeve 20 and radiofrequency signal generating means 10.Radiofrequency signal generating means 10 closely contacts with radio frequency conducting body joint 9 with locking nut 21 by adapter sleeve 20, to guarantee the good transmission of radiofrequency signal.Can certainly use other connected mode.
Referring to Fig. 5.Structure and first kind of example structure of second kind of embodiment of the signal transmitting apparatus that is used for electrostatic chuck of the present invention are basic identical, difference only is to have increased dc wire 11 on the original structure basis, be used to transmit dc signal, produce absorption affinity wafer.One end of dc wire 11 is connected on the electrostatic chuck in the radio frequency conducting body 3, and dc wire 11 upper ends are connected with direct current probe 22, and direct current probe 22 is connected with electrostatic chuck, and radio frequency conducting body 3 is stretched out in the lower end of dc wire 11.The effect of direct current probe 22 is can guarantee direct current signal safety, be delivered on the DC electrode of electrostatic chuck reliably.Between dc wire 11 and radio frequency conducting body 3, be provided with insulator 12, be used for isolated DC signal and radiofrequency signal.The direct current signal line is installed in the radio frequency conduction pipe, can improves fail safe, save the space.
More than be preferred forms of the present invention, according to content disclosed by the invention, some identical, replacement schemes that those of ordinary skill in the art can expect apparently all should fall into the scope of protection of the invention.
Claims (8)
1. the signal transmitting apparatus that is used for electrostatic chuck, it is characterized in that the radio frequency conducting body (3) and the radiofrequency signal generating means (10) that comprise that an end is connected with electrostatic chuck, the other end of radio frequency conducting body (3) is provided with radio frequency conducting body joint (9), described radio frequency conducting body joint (9) is connected with radiofrequency signal generating means (10), the outer shielded-plate tube that is provided with of described radio frequency conducting body (3), joint (9) end is provided with shielding end cap (8), is provided with some dead rings (4) between described radio frequency conducting body (3) and the shielded-plate tube.
2. the signal transmitting apparatus that is used for electrostatic chuck according to claim 1, it is characterized in that described radio frequency conducting body (3) is " ┗ " shape, described shielded-plate tube comprises the vertical shielded-plate tube I (5) that links together, vertical shielded-plate tube II (6) and the horizontal shielded-plate tube (7) that is connected with vertical shielded-plate tube II (6) tube wall.
3. the signal transmitting apparatus that is used for electrostatic chuck according to claim 1 is characterized in that described radio frequency conducting body (3) is a hollow tubular.
4. the signal transmitting apparatus that is used for electrostatic chuck according to claim 1 is characterized in that the outer surface of described radio frequency conducting body (3) is coated with gold or silver.
5. the signal transmitting apparatus that is used for electrostatic chuck according to claim 1 is characterized in that the electrostatic chuck bottom is provided with the groove that cooperates with radio frequency conducting body (3), and radio frequency conducting body (3) is gone up and groove fit partly is equipped with the radio frequency connecting ring.
6. the signal transmitting apparatus that is used for electrostatic chuck according to claim 1, it is characterized in that also comprising the dc wire (11) that is connected with electrostatic chuck, this lead upper end is connected on the interior electrostatic chuck of radio frequency conducting body (3), radio frequency conducting body (3) is stretched out in the bottom, is provided with insulator (12) between dc wire (11) and radio frequency conducting body (3).
7. the signal transmitting apparatus that is used for electrostatic chuck according to claim 1 is characterized in that described dc wire (11) upper end is connected with direct current probe (22), and direct current probe (22) is connected with electrostatic chuck.
8. according to the described signal transmitting apparatus that is used for electrostatic chuck of arbitrary claim in the claim 1～7, it is characterized in that being connected with adapter sleeve (20) between described radiofrequency signal generating means (10) and the shielding end cap (8) with central through hole, described radio frequency conducting body joint (9) is provided with the radio frequency transmission handle (19) with its one, the central through hole that this radio frequency transmission handle (19) passes adapter sleeve (20) extend in the radiofrequency signal generating means (10), is provided with locking nut (21) between the coupling part of described adapter sleeve (20) and radiofrequency signal generating means (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101264436A CN100499958C (en) | 2005-12-09 | 2005-12-09 | Signal transmitting device for electrostatic cartridge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101264436A CN100499958C (en) | 2005-12-09 | 2005-12-09 | Signal transmitting device for electrostatic cartridge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1849033A CN1849033A (en) | 2006-10-18 |
| CN100499958C true CN100499958C (en) | 2009-06-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101264436A Active CN100499958C (en) | 2005-12-09 | 2005-12-09 | Signal transmitting device for electrostatic cartridge |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100499958C (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104167343B (en) * | 2013-05-17 | 2016-07-13 | 中微半导体设备(上海)有限公司 | Plasma processing apparatus and radio-frequency shielding fence thereof |
| CN104332378B (en) * | 2013-07-22 | 2016-09-07 | 中微半导体设备(上海)有限公司 | Plasma processing apparatus and temperature testing device thereof |
| CN106816397A (en) * | 2015-12-01 | 2017-06-09 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Bottom electrode assembly and semiconductor processing equipment |
| CN107093545B (en) | 2017-06-19 | 2019-05-31 | 北京北方华创微电子装备有限公司 | The bottom electrode mechanism and reaction chamber of reaction chamber |
| CN109994356B (en) * | 2017-12-29 | 2022-03-22 | 北京北方华创微电子装备有限公司 | Reaction chamber and semiconductor processing equipment |
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2005
- 2005-12-09 CN CNB2005101264436A patent/CN100499958C/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN1849033A (en) | 2006-10-18 |
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Address after: 100176 8 Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100016 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
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