CN100584731C - Vortex type non-contact suction cup - Google Patents
Vortex type non-contact suction cup Download PDFInfo
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- CN100584731C CN100584731C CN200810036545A CN200810036545A CN100584731C CN 100584731 C CN100584731 C CN 100584731C CN 200810036545 A CN200810036545 A CN 200810036545A CN 200810036545 A CN200810036545 A CN 200810036545A CN 100584731 C CN100584731 C CN 100584731C
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- cup
- inner chamber
- hydrodynamic form
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- nozzle
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Abstract
The contactless sucker of a kind of spiral-flow type of technical field of manufacturing semiconductors, the present invention includes: cup, inner chamber hydrodynamic form and nozzle, wherein: cup inside is cylindric hole body, the inner chamber hydrodynamic form is located at the bottom of cup, leave the cylindrical toroidal gap between cup and the inner chamber hydrodynamic form, the side of the nearly bottom of cup is provided with nozzle.The present invention can realize not only picking up workpiece but also guarantee workpiece and sucker between discontiguous two kinds of purposes, advantage such as it is simple to have manufacturing process, and air consumption is little, and suction is big.
Description
Technical field
What the present invention relates to is a kind of sucker of load transfer device technical field, specifically is a kind of vortex type non-contact suction cup.
Background technology
Because the development of semicon industry, traditional contact method for carrying has not been suitable for the carrying semiconductor wafer, the plasma display substrate, devices such as liquid crystal display substrate, continuous expansion along with TV LCDs demand size, the increase of dimensional weight specification, the raising of liquid crystal production capacity, traditional mode of movement has not satisfied the needs of carrying, and the raising yield of products is the target that liquid crystal factory is constantly pursued, characteristic according to crystal liquid substrate, contactless load transfer device is entered people people's the visual field, contactless conveying, cleaning becomes necessary way.
Find through literature search prior art, China's utility model patent publication number is CN2269673, this patent is mentioned a kind of pneumatic suction loading machine, it mainly is to be made of changed course device, sucker, diffusion tip, the pressure difference that the pilot hole of changed course device forms when discharging high velocity air makes the suction hole on the sucker and inhales to form negative pressure in the air flue of hole to adsorb spherical part.Because sucker and bulb are in contact with one another under adsorbed state, so can not realize contactless absorption.
Summary of the invention
The objective of the invention is to overcome deficiency of the prior art, a kind of vortex type non-contact suction cup is provided, make it in sucker, produce eddy flow, make that pressure produces vacuum in the sucker, thereby promote workpiece by difference of pressure; The flow through gap of margin of optic cup and workpiece of gas produces static pressure and supports and guarantee that workpiece does not contact with chuck surface on the other hand, thus the function that workpiece is adsorbed in the realization noncontact.
The present invention is achieved by the following technical solutions, the present invention includes: cup, inner chamber hydrodynamic form and nozzle, wherein: cup inside is cylindric hole body, the inner chamber hydrodynamic form is located at the bottom of cup, leave the cylindrical toroidal gap between cup and the inner chamber hydrodynamic form, the side of the nearly bottom of cup is provided with nozzle.
Described nozzle, itself and cup inside face are tangent.
Described inner chamber hydrodynamic form, its height is less than the height of cup.
Described inner chamber hydrodynamic form, it is captiveed joint with bottom of cup by screw thread.
When the present invention works, the pressurized air that will have certain pressure is introduced nozzle, because nozzle and cup inside face are tangent, air-flow will carry out high speed rotary motion around the gap of cup inside face and the formation of inner hydrodynamic form, cause the gas dynamic pressure in the cup to increase, and static pressure reduces, inner hydrodynamic form bottom produces parital vacuum, thereby cause be in the below workpiece and sucker between produce vacuum phenomenon, under vacuum action, workpiece is picked up.After workpiece was picked up, the distance of workpiece and cup lower edge reduced, and caused like this increasing from cup inside to outside effluent air resistance to flow, and the pressure that reaches margin of optic cup in the cup raises, and produces repulsion, stoped workpiece to contact with the sucker cup.Under repulsion and suction maintenance balance, workpiece will be raised under maintenance certain interval situation with sucker.
Advantages such as compared with prior art, the present invention adopts eddy flow to produce vacuum, and utilizes the cup edge to support as static pressure, guarantees workpiece and sucker noncontact again thereby obtain promptly to pick up workpiece, and it is simple to have manufacturing process, and air consumption is little, and suction is big.
Description of drawings
Fig. 1 structural representation of the present invention.
The specific embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, the present embodiment device comprises: cup 1, inner chamber hydrodynamic form 2, nozzle 3, and wherein: cup 1 inside is cylindric hole body 2, and inner chamber hydrodynamic form 2 is located at the bottom of cup 1, leave the cylindrical toroidal gap between cup 1 and the inner chamber hydrodynamic form 2, the side of cup 1 nearly bottom is provided with nozzle 3.
Described nozzle 3, itself and cup 1 inside face are tangent.
Described inner chamber hydrodynamic form 2, its height is less than the height of cup 1.
Described inner chamber hydrodynamic form 2, it is captiveed joint with cup 1 bottom by screw thread.
During present embodiment work, the pressurized air that will have certain pressure is introduced nozzle 3, because nozzle 3 is tangent with cup 1 inside face, air-flow will carry out high speed rotary motion around the gap of cup 1 inside face and 2 formation of inner hydrodynamic form, cause the gas dynamic pressure in the cup 1 to increase, and static pressure reduces, inner hydrodynamic form 2 bottoms produce parital vacuum, thereby cause be in the below workpiece and sucker between produce vacuum phenomenon, under vacuum action, workpiece is picked up.After workpiece was picked up, the distance of workpiece and cup 1 lower edge reduced, and caused like this increasing to outside effluent air resistance to flow from cup 1 inside, and the pressure that reaches margin of optic cup in the cup raises, and produces repulsion, stoped workpiece to contact with cup 1.Under repulsion and suction maintenance balance, workpiece will be raised under maintenance certain interval situation with cup 1.
Advantages such as present embodiment adopts eddy flow to produce vacuum, and utilizes the cup edge to support as static pressure, guarantees workpiece and sucker noncontact again thereby obtain promptly to pick up workpiece, and it is simple to have manufacturing process, and air consumption is little, and suction is big.
Claims (3)
1, a kind of vortex type non-contact suction cup, comprise: cup, it is characterized in that, also comprise: inner chamber hydrodynamic form and nozzle, wherein: cup inside is cylindric hole body, and the inner chamber hydrodynamic form is located at the bottom of cup, leaves the cylindrical toroidal gap between cup and the inner chamber hydrodynamic form, the side of the nearly bottom of cup is provided with nozzle, and nozzle and cup inside face are tangent.
2, vortex type non-contact suction cup according to claim 1 is characterized in that, described inner chamber hydrodynamic form, and its height is less than the height of cup.
3, vortex type non-contact suction cup according to claim 1 and 2 is characterized in that, described inner chamber hydrodynamic form, and it is captiveed joint with bottom of cup by screw thread.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810036545A CN100584731C (en) | 2008-04-24 | 2008-04-24 | Vortex type non-contact suction cup |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810036545A CN100584731C (en) | 2008-04-24 | 2008-04-24 | Vortex type non-contact suction cup |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101264844A CN101264844A (en) | 2008-09-17 |
| CN100584731C true CN100584731C (en) | 2010-01-27 |
Family
ID=39987575
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200810036545A Expired - Fee Related CN100584731C (en) | 2008-04-24 | 2008-04-24 | Vortex type non-contact suction cup |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100584731C (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102101296B (en) * | 2009-12-21 | 2015-05-13 | 柳州市中晶科技有限公司 | Non-contact handling device |
| JP5282734B2 (en) * | 2009-12-28 | 2013-09-04 | 国立大学法人東京工業大学 | Non-contact chuck |
| CN104385285B (en) * | 2013-11-13 | 2016-07-20 | 杭州孚亚科技有限公司 | Adsorber |
| CN110182427B (en) * | 2019-05-15 | 2021-05-25 | 安徽盛烨电子有限公司 | Automatic paper padding equipment |
| CN113482517A (en) * | 2021-07-16 | 2021-10-08 | 郑州科技学院 | Portable elevator for fire control and fixing device for ladder |
| CN115285423A (en) * | 2022-08-05 | 2022-11-04 | 东阳东磁自动化科技有限公司 | Magnetic core rapid collecting device and implementation method thereof |
-
2008
- 2008-04-24 CN CN200810036545A patent/CN100584731C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN101264844A (en) | 2008-09-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100127 Termination date: 20170424 |