CN100585607C - Methods for configuring plasma cluster tools - Google Patents
Methods for configuring plasma cluster tools Download PDFInfo
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- CN100585607C CN100585607C CN200680006021A CN200680006021A CN100585607C CN 100585607 C CN100585607 C CN 100585607C CN 200680006021 A CN200680006021 A CN 200680006021A CN 200680006021 A CN200680006021 A CN 200680006021A CN 100585607 C CN100585607 C CN 100585607C
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Abstract
A method for configuring a plasma cluster tool is disclosed. The method includes generating a key file from option specifications, the key file encapsulating configuration restrictions specifically imposed on the plasma cluster tool. The method also includes generating at least one system-wide configuration file and at least one component-level configuration file using the key file. The method additionally includes generating run-time executable objects from a database of option definition files, the at least one system-wide configuration file and the at least one component-level configuration file. Furthermore, the method includes employing the run-time executable objects to configure the plasma cluster tool.
Description
Background technology
Plasma process tools is used to handle wafer and other microminiature devices (for example, surface plate, nanometer machine etc.) for a long time.Cluster tool (cluster tool) widespread use of the variant of expression plasma process tools.In cluster tool, a plurality of processing chambers accumulate in around one or more transmission modules.For one or more particular procedure, each processing chamber all is configurable.By Semiconductor substrate is moved to the process chamber of cluster tool from processing chamber, the fabricator can make substrate stand repeatedly to handle and a plurality of technical recipes in quite short time quantum.
In order to help to discuss, Fig. 1 shows cluster tool 100, and it represents senior, the simplification logical diagram of typical cluster tool.Cluster tool 100 comprises front end 102 and rear end 104.Front end 102 can be counted as the part of cluster tool 100, and it is in atmospheric pressure, and just substrate can be inserted and shift out cluster tool by it.Rear end 104 comprises the actual treatment module of handling substrate.
More specifically, the front end 102 of Fig. 1 comprises a plurality of port ones 10,112 and 114, and its expression is used for port that substrate is input to cluster tool 100 and substrate is but gone out from cluster tool 100.Then, substrate enters one of vent plug 120 and 122, and this vent plug is kept the pressure reduction between rear end 104 and the front end 102.Then, substrate is delivered to public transmission module (TM) 130 from vent plug 120 and 122, when substrate moved about between processing module (PM) 140,142,144 and 146, this transmitted module as public transhipment portion.Each processing module all is configured to use special formulation to carry out one or more particular procedure.For example, processing module can be configured being used for the polysilicon etching, and another processing module can be configured being used for nitride deposition, and the configurable metal etch that is used for of another processing module of same cluster tool.Cluster tool 100 can comprise: other modules (for example atmospheric treatment module or abbreviation APM), and other subsystems not shown in Figure 1.Because these and other main subsystems of cluster tool are known in those skilled in the art, so will not list or discuss main subsystem in detail herein.
The master subsystem of cluster tool and another cluster tool quantitatively may different (for example, the quantity of processing module and/or types).In addition, for example, even two cluster tools have the processing module of the same type of equal number, these two cluster tools still may be different, may be different with subassembly because constitute the subsystem of these two cluster tools.For example, two metal etch process modules can have different mass flow controllers or vacuum pump.
For well-designed, the fabricator of cluster tool 100, the Lam research company of California Fremont for example adopts subsystem and parts from the many third parties manufacturer of the cluster tool of making usually.In fact, this convention is a standard in the semiconductor processing equipment field, because it can make company concentrate its energy when giving other companies with the task delegation outside its field or the speciality.
Therefore, use is made cluster tool from the parts and the subsystem of different vendor.The decision-making that will be merged in given cluster tool about which parts or which subsystem is complicated decision process, comprises economics, pricing strategy, technical capability, change technology, customer demand, competitive power location and/or other factors.In addition, every month or with one or more new parts cluster tool to be improved in per season be very common.This factor combines with different customer demand, causes basic similarity, and promptly today may be in some aspects with different by the every other cluster tool of the previous delivery of this supplier by the cluster tool of manufacturer's delivery.Yet, have joint demand: need be configured for suitable configuration software and/or configuration file cluster tool and use for all cluster tools.Because most of subsystem and parts are automatically controlled (all modern hardware all are so usually), therefore, the components/subsystems that needs the single components/subsystems of configuration and also need in the cluster tool of assembling, fit together work.
Traditionally, each cluster tool all is equipped with its oneself configuration software, and this software is for the particular subsystem of the cluster tool that constitutes this assembling and parts customization coding.Yet the process of customization coding is not only consuming time but also expensive.Delay relevant with the customization coding and cost not only all influence the user in the initial purchase stage but also in each the renewal circulation with new subsystem and/or component update cluster tool.Along with the past of time, safeguard the demand of different configuration softwares for the cluster tool of different editions and gradually become the manufacturer of cluster tool and user's etc. burden.For some manufacturer, support the demand of the cluster tool configuration software of hundreds of different editions to become a problem.
Herein, the inventor recognizes that if can create general configuration tool, then the manufacturer of cluster tool and/or user just can dispose and support cluster tool with becoming originally with less time delay.Furthermore, the inventor recognizes herein, and the configuration tool of correct design also may be utilized to prevent in given cluster tool using undelegated components/subsystems, also can support different price structures based on the degree of the configuration flexibility of being authorized, can be used to support the effort of being done in the cluster tool exploitation and/or to be used for aspect the simulation.This application is absorbed in this improved cluster tool configuration tool.
Summary of the invention
In one embodiment, the present invention relates to dispose the method for particular plasma body cluster tool with a plurality of modules.This method comprises provides a pack module option defined file, and this pack module option defined file comprises the general configuration definition that is used for general (generic) plasma cluster tools.The one group of protection information specific to instrument that provides further is provided this method, and this group comprises the data of the particular plasma body cluster tool that concrete this configuration of sign is intended for use specific to the protection information of instrument.This method further comprises provides one group of instrument particular options standard, and this group instrument particular options standard is specified the option that is designated as particular plasma body cluster tool.This method also comprises generation key file (key file), and this key file encapsulation is applied to the configurable limit on the particular plasma body instrument, and during configuration particular plasma body instrument, this key file is configured to needed file.
According to embodiments of the invention, common configuration instrument (UCT) is provided, it allows the manufacturer of cluster tool to adopt identical software to dispose different cluster tools with the user.General configuration tool is had to manufacturer and user by means of freeing the configuration software different, the customization coding when installing and/or upgrade cluster tool valuably.
In another embodiment, improved UCT supports the dirigibility of different stage to adapt to different clients, makes manufacturer that the rank of the configuration flexibility that offers the user can be set effectively, even based on parts of parts.This dirigibility is provided valuably and has not damaged the ability that adopts single software program comprehensively to dispose different cluster tools.
In another embodiment, improved UCT prevents that for the manufacturer of cluster tool provides a kind of uncommitted parts are used for the method for cluster tool.Use uncommitted parts can cause using underproof parts, this makes result fall level and/or has damaged cluster tool.In addition, improved UCT also comprises and is used to prevent the unauthorized of UCT ground own is used for mechanism on the cluster tool except the cluster tool that UCT is authorized to use.This has just prevented that the user from permitting the single copy of UCT and carry out UCT on different cluster tools.
In another embodiment, improved UCT comprises the exploitation auxiliary mechanism that is designed to be able to help to develop new parts and/or performance.In another embodiment, UCT uses different parts to simulate the unrestricted ability of different cluster tools for the user provides, and can investigate different cluster tools to allow the user before buying.
Also be described in more detail in conjunction with the following drawings in the detailed description of these and other features general each embodiment of the present invention below of the present invention.
Description of drawings
Show the present invention by example rather than by qualification in the accompanying drawings, wherein similar reference number is represented similar element, and wherein:
Fig. 1 shows the cluster tool of the senior simplification logical expressions of the typical cluster tool of expression.
Fig. 2 shows the configuration file of the system-wide in one embodiment of the present of invention and specific to the configuration of components file.
The logic diagram of Fig. 3 A shows the configuration file that how to generate the system-wide in one embodiment of the present of invention and specific to the configuration of components file set.
Fig. 3 B shows the example of the user interface in one embodiment of the present of invention, and the user of cluster tool can adopt this interface to use to have one or more options or the parts that hide Options.
Fig. 3 C shows and is used to allow the user processing module to be keyed in the instance user interface of the data relevant with user's input, key file, module option defined file and the file that hides Options.
Fig. 4 shows how to create key file in one embodiment of the invention.
Fig. 5 shows the process flow diagram of the Typical Disposition stream that is used for cluster tool in one embodiment of the invention.
Fig. 6 shows simplified flow chart in one embodiment of the invention, that can carry out object when generating the operation be used to dispose cluster tool.
Fig. 7 shows and is used in one embodiment of the invention the time can carrying out the process flow diagram of object with the configuration cluster tool by using OO method to generate operation.
Fig. 8 shows the logical diagram of hierarchically organized structure of the database of the option defined file after above-mentioned institutional framework according to one embodiment of present invention.
Appendix A provides the tabulation of the example sysconfig.txt file of cluster tool in one embodiment of the invention.
Appendix B provides the tabulation of the example configoptions.txt file of instance processes module in one embodiment of the invention.
Appendix C provides the tabulation of the configuration file (sysconfig.txt) of system-wide in one embodiment of the invention, with the advanced configuration details of expression about the target cluster tool.
Appendix D provides the component-level configuration file (sysconfig.txt) of the transfer chamber that is used for the example cluster tool in one embodiment of the invention.
Appendix E provides the option defined file TMCImage.cfg for the regeneration of example cluster tool in one embodiment of the invention.
Appendix F provides the tabulation of the above-mentioned file TMCImageTMResD3Port.cfg that is used for the example cluster tool in one embodiment of the invention.
Appendix G provides defined file TMCImageTMResD2Port.cfg in one embodiment of the invention
Appendix H provides the option defined file that is used for processing module (pm.cfg) in one embodiment of the invention.
Embodiment
Describe the present invention in detail now with reference to its embodiment more illustrated in the accompanying drawings.In the following description, many details have been set forth, to provide to thorough of the present invention.Yet, clearly,, do not have can implement the present invention in some or all these detail for those skilled in that art yet.In other cases, do not describe known operation and/or structure in detail, to avoid unnecessarily making the present invention unclear.
Each embodiment is described below, comprises method and technology.Should remember that the present invention may also cover the goods that comprise computer-readable medium, on this medium, store the computer-readable instruction of the embodiment that is used to carry out the invention technology.This computer-readable medium can comprise, for example, is used for semiconductor, magnetic, the optomagnetic or other forms of computer-readable medium of storage computation machine readable code.In addition, the present invention also can cover the device that is used to implement the embodiment of the invention.This device can comprise special use and/or programmable circuit, to carry out and embodiment of the invention related task.The dedicated computing device that the example of this device comprises multi-purpose computer and/or can suitably programme, and the combination that can comprise computing machine/calculation element and the special use/programmable circuit that is suitable for the various tasks relevant with the embodiment of the invention.
In order to be easy to discuss, term " parts " refers to atom or many parts assembly (assembly) in the cluster tool.Like this, parts can be as simple the gas line or can be as the entire process module complicated.Many parts parts (for example processing module) can be made up of other many parts parts (for example, vacuum system, gas system, power-supply system etc.), and it can be made up of other many parts or former subassembly again.
As described, a cluster tool can be different at the quantitative aspects of component parts with another cluster tool.Therefore, the cluster tool with four processing modules will need to carry out different configurations with the cluster tool with three processing modules.Based on many different aspects (for example, type, performance, manufacturer, firmware etc.), parts self can be different along with the difference of cluster tool.For example, a vacuum pump may be different with another vacuum pump, this because of manufacturer's (for example the pump vendor A is compared with the B of pump manufacturer), type (for example is, roughing pump is compared with turbopump), performance (for example, the different cubic feet of the per minute of pump capacity), firmware (for example, manufacturer's firmware version 2.0 of operation is compared with 1.7) is different.Therefore, the cluster tool with given vacuum pump may need to carry out different configurations with the cluster tool with another vacuum pump.Above-mentioned example only is exemplary, is not to represent comprehensively.Those skilled in the art will recognize at an easy rate that same consideration can be applied to the miscellaneous part of cluster tool similarly.
In general, each cluster tool is all by two kinds of texts (configuration file of a system-wide and a group specific to the configuration of components file) definition.In the example of this paper Fig. 2, for ease of reference, the configuration file of system-wide is named as " sysconfig.txt ", and is named as " configoptions.txt " specific to the configuration of components file.The configuration file of system-wide (for example, sysconfig.txt), as its name implies, defines the top configuration parameter of whole cluster tool.This paper appendix A provides the list content of the example sysconfig.txt file that is used for the example cluster tool.
Usually each cluster tool all has a sysconfig.txt file, the quantity of the configuration file definition process module of system-wide and type, transmission type of module, cluster tool Control Software etc.Provide anti-tamper mechanism the unwarranted of sysconfig.txt file to be distorted preventing.In one embodiment,, yet the sysconfig.txt file is carried out verification inspection and (checksum) calculating of aspect, to participate in detecting follow-up distorting although may also adopt other anti-tamper configuration.
In one embodiment, the configuration file of system-wide comprises media access controller (MAC) address of control with the main frame of the cluster tool that is configured.The existence of MAC Address in the sysconfig.txt file makes and can detect when UCT carries out on different main frames (it may be relevant with the cluster tool of the cluster tool that is different from expection).This feature prevents the configuration file of user's application error on the cluster tool of mistake, and makes the manufacturer of UCT avoid pirate.Alternatively or additionally, can adopt hard disk ID or digital certificate.In addition, the configuration file of system-wide comprises the term of validity of the anticipation of configuration file, that is, on the date, the configuration file that surpasses this date use cluster tool and/or present system-wide just no longer is authorized to.The MAC Address (and/or hard disk ID and/or digital certificate) and the term of validity constitute the part of protective device, and this protective device designed to be used and adds the license terms that is better than in accordance with cluster tool and/or UCT.
For each module, high-level information such as module type (for example, polysilicon etching or metal etch), communication port (for example, IP address), module is just operating in development mode, module is just operating in simulation model, module will be by automatic or manual startup etc.The filename of the file of the more detailed configuration information that comprises module also is provided.
(for example, configoptions.txt) comprise the more specifically configuration information of parts, for example, processing module (PM), transmit module (TM) or cluster tool Control Software specific to the configuration of components file.This paper appendix B provides the list content of the example configoptions.txt file of instance processes module.
Usually each module all has a configoptions.txt file.Similar with the configuration file of system-wide, its oneself tamper resistant device also can be equipped with specific to the configuration of components file, for example, verification inspection and (check-sum).Processing module specific to the more detailed configuration information definable in the configuration of components file such as the information of the sign identity of critical piece (for example, vacuum pump system, gas system, RF power-supply system, chuck (chuck) system etc.) wherein.For example, against vacuum pumping system, the configoptions.txt file of processing module can identify manufacturer (for example, Alcatel) and type (for example, roughing pump).For example, for gas system, the configoptions.txt file of processing module can identify type (for example, eight pipelines of enhancing), and whether the gas separated injector has been installed, and whether the digital quality stream controller has been installed, or the like.
Fig. 3 A shows the configuration file (sysconfig.txt) 302 and the logical diagram of this group specific to configuration of components file (configoptions.txt) 304 that how to generate system-wide according to one embodiment of present invention.These configuration files 302 and 304 generate from four basic input sources: the user imports 306, key file 308, module option defined file 310 and the option file 312 hidden.
The input about the suitable configuration of cluster tool that one group of user-in file 306 expression is provided by user's (for example, being responsible for installing and/or upgrading the Account Service Engineer of cluster tool), it comprises arbitrary and all standards, option etc.These are the options that are used for cluster tool, cluster tool become can operate before, this option need the configuration.
Key file 308 (or " .tcf ") is in this example encoded to the restriction of this configuration.In other words, key file 308 helps the security implementation that disposes.Because UCT has the data (this configuration data is stored in the database of the accessible parts of UCT) that the institute that is used for disposing cluster tool might permutations (permutation), so key file 308 has defined the scope of the configurable option of consideration target instrument.
In general, parts or attribute can be not protected, through overprotection or hide.For example, the parts without protection can unrestrictedly be disposed by the user.For instance, if the parts data storehouse comprises six different turbopumps and in key file turbopump be defined as not protected parts, then tool user can adopt UCT to dispose in six turbopumps any.On the other hand, have some restrictions through the parts of overprotection about configuration.By using previous turbopump example, if the license terms of cluster tool and/or UCT only allows tool user configuration to have the cluster tools of the turbopumps of two concrete signs, then key file 308 will comprise licensed-in configurable limit is arrived the only data of the turbopump of two appointments.Certainly, also can be with configurable limit to single particular pump, if want like this.
Parts and be used for to have " hiding " attribute to its option that is configured.Implement to hide attribute so that exploitation becomes easier, this is because it allows authorized user to dispose cluster tool with parts or the config option that other users to user library but " hide ".In an example approach, authorized user (for example, support engineer or the client that is authorized to) is provided as the identity of the config option with hiding attribute.Do not know even that without the user who authorizes like this this option exists, this is even not to be shown as the options that can be used for disposing owing to have the option of hiding attribute in one embodiment.Can make manufacturer optionally only particular customer be disclosed specific (for example existing of hiding Options by providing, for the purpose of developing), the option of hiding is useful for " in the maturation " feature in the software of control visit cluster tool and/or the hardware.
Authorized user can have one or more these options that are used for importing the user the 306 hiding attributes that are configured by providing the component identification identity to specify.Hiding Options participates in exploitation thus, and this is because they make selected user to test cluster tool with the obsolete config option new or not test of other users of user library.312 expressions that hide Options have the specific user and are authorized to call tabulation with the option of the hiding attribute that is configured.
Fig. 3 B is the example of user interface, and the user of cluster tool can use one or more options or the parts with hiding attribute by this interface.In the example of Fig. 3 B, show the active user and be authorized to tabulation with the option of its hiding attribute that is configured.If wanting to permit user capture, manufacturer has another option of hiding attribute so that can adopt extra config option to dispose this cluster tool, then the identity of the option with hiding attribute can be passed on by manufacturer, and the user can will have the title input (for example, by typewriting) of the option of hiding attribute in the dialog box that is close to button " interpolation ".If the identity of being imported and one of option with hiding attribute coupling, then the user can dispose cluster tool with those parts.
Return Fig. 3 A, key file 308 also can comprise the information about the identity of the main frame relevant with the cluster tool that will be configured (for example, MAC Address and/or hard disk ID and/or digital certificate).The identity of main frame is embedded in the configuration file of the system-wide that is generated, and is used for guaranteeing to dispose and is applied to correct cluster tool.The MAC Address that should be noted that main frame only represents how to determine the example of the identity of cluster tool.Except above-mentioned hard disk ID and/or digital certificate, also can adopt other technologies to identify particular cluster instrument (for example, use read or unique recognition data of sensing) from cluster tool.
In addition, key file 308 also can comprise the above-mentioned term of validity.The term of validity is embedded in the configuration file of the system-wide that is generated so that the data about the term of validity of the expection of configuration file to be provided, i.e. date, exceed this date use cluster tool and/or at present the configuration file of system-wide no longer be authorized to.Notice that the term of validity is applied to the option through permission usually; May exist and not be subjected to option that the term of validity influences, unauthorized.In addition, can be different licensed options the different terms of validity is provided.Because key file 308 has encapsulated important restricted information, thus the binary file that key file 308 is normally encrypted, to prevent possible the distorting of licensee/tool user.
310 encapsulation of module option defined file can be used for the different config options of configuration module (for example, processing module, transmission module, atmospheric treatment module or user interface).In other words, module option defined file 310 expression can be used for disposing the database of the option of each module, comprises the option that can be used for disposing the building block in each module.The restriction that is provided with in configuration in response to the config option of being imported in 306 by the user, by key file 308 and hide Options 312, the subclass of these definition is incorporated into configoptions.txt.Similar with key file 308, module option defined file 310 is encrypted to prevent possible the distorting of licensee/tool user usually.
How the key file 308 that Fig. 4 shows Fig. 3 according to one embodiment of present invention is created.As described, the restriction that key file 308 is implemented configuration file, and prevent the unwarranted execution/piracy of configuration software.Key file 308 generates the data source from three separation: a pack module option defined file 402, specific to the option standard 404 of instrument and specific to the protection information 406 of instrument.
Module option defined file 402 expression is used for all modules configured defined files (for example, processing module, transmit module, cluster tool Control Software, etc.).Therefore, show processing module option defined file 402a, transmission module option defined file 402b and cluster tool Control Software option defined file 402c.Interested especially for the establishment of key file 308 is shielded option in module option defined file 402, and this is because according to definition, not protected option is unrestricted.For the particular cluster instrument, shielded option has the protection domain by key file 308 definition.Have a pack module option defined file 402, it can be used for disposing all cluster tools.When adding new config option and removing old config option, this pack module option defined file 402 is continuously updated.
Option standard 404 specific to instrument can be from customer order data storehouse 404a or from the specified input 404b of factory.Option standard 404 specific to instrument is specified the configuration of components option that is used for particular tool or a plurality of config option that is allowed.For example, the client can buy option so that nearly three different turbopump models to be installed.The option standard of being bought by the client specific to instrument that is used for cluster tool then will comprise the config option that is used for all three turbopumps.
In one embodiment, adopt the customer order software of SAP to accept customer order, the option of the parts of the interesting cluster tool of buying of customer order given client.Information about the desired option of client can obtain from customer order software, and can be used as the option that appointment will be provided the parts of cluster tool.Alternatively or additionally, the option standard that is used for cluster tool can be from the manufacturer of cluster tool.In this case, for example, can discuss by potential buyer and obtain standard with cluster tool.Again for example, can import this standard with the field engineer who solves particular problem by the cluster tool of managing to upgrade the client.
Be provided for implementing preventing the information of the unwarranted execution/piracy of resulting software specific to the protection information 406 of instrument.As seen, comprise the MAC Address (and/or hard disk ID and/or digital certificate) of control specific to the protection information 406 of instrument with the main frame of the cluster tool that is configured.For example, can obtain this MAC Address (and/or hard disk ID and/or digital certificate) from the client in advance.In case this MAC Address (and/or hard disk ID and/or digital certificate) is included in the key file 308, key file 308 can not be used to the main frame with different MAC Address (and/or hard disk ID and/or digital certificate) is configured.Similarly, the key file (its for configuration needed file) that lacks match address (and/or hard disk ID and/or digital certificate) can not be used to dispose given cluster tool.
Further comprise specific to the protection information 406 of instrument being used to specify the option whether resulting configuration software is in simulation model, Total Options are all available in this pattern, but only are used for simulation.Also be provided with and be used to remove or start the sign that all shielded options are protected.Should provide whether (for example to be used for overall situation appointment by " protection " sign in accordance with protection; producing under the situation of configuration software) or do not ignore protection (for example, when resulting configuration file be for the inside of cluster tool manufacturer is used production and when not needing protection) a kind of method.The term of validity of resulting configuration software and host IP address also can be arranged in the protection information 406 specific to instrument.The term of execution, check that these fields are to guarantee to observe the permission regulations at current date and the host IP address that obtained.Host address and/or MAC Address (and/or hard disk ID and/or digital certificate) help also to guarantee that the cluster tool to expection is configured and other cluster tools is not configured.
In one embodiment, adopt security application 420 handle this pack module option defined file 402, specific to the option standard 404 of instrument and specific to the protection information 406 of instrument, to generate key file 308.In one embodiment, security application 420 is based on network, so that the global access ability to be provided, although always do not need security application network this on the one hand.
Fig. 5 shows the process flow diagram of the Typical Disposition stream of cluster tool.In step 502, obtain tool order from the client.In step 504, can adopt the config option of being bought to generate key file then.The generation of key file is discussed in conjunction with Fig. 4 in according to one embodiment of present invention in front.
In case generated key file, just key file can be installed on the cluster tool (step 506) and (507) one be used from configuration cluster tool (step 508) with hiding Options.Use this key file, module option defined file, hiding option and user to import config option and carry out configuring application program, this just causes creating the configuration file of system-wide and this group specific to the configuration of components file.In general, each cluster tool is all by the definition of two types text, and the configuration file of system-wide and one group are specific to the configuration of components file.The configuration file of these system-wide and this group are discussed in conjunction with Fig. 3 in according to one embodiment of present invention specific to the generation of configuration of components file.
If the client wishes to change one or more config options in the scope of the config option of being bought, then the client can adopt identical key file to reconfigure the cluster tool of being revised.This more new route illustrate by arrow 510.Yet if the client wishes that being different from the hiding Options of having bought of those options by option or utilization revises cluster tool, path 512 makes the new key file be generated so that the user can reconfigure the cluster tool of being revised.Under typical situation, the generation of new key file makes reconfiguring of client to occur between the starting period when not implementing protection.
Be appreciated that the invention enables from above-mentioned and can adopt a single group application program and a pack module option defined file to dispose the cluster tool of wide region, each cluster tool all has specific config option.The needs that customize coding and safeguard a large amount of configuration software application programs have been removed thus from.Use key file that dirigibility just is provided in the above described manner and for control of the height of cluster tool and protection.Dirigibility is provided, and this is because the cluster tool client can freely re-execute configuring application program to adopt different config options in the config option scope of having bought.By using simulation model that dirigibility further is provided, the sign of this simulation model has been cancelled the institute that is arranged on the configurability restricted (because the price structure perhaps can be former thereby be applied this restriction) to allow client and/or user with " virtual " cluster tool analog configuration and/or operation.Use development mode to obtain similar dirigibility, development mode can be set by global flag or a plurality of sign.
Control is provided highly, this be because only in the binary file of encrypting the option of appointment can be used for given cluster tool client and be configured.Protection is provided, and this is because resulting configuration file can only be carried out on the cluster tool of the MAC Address with expection and/or hard disk ID and/or digital certificate and/or host IP address.
Use hides Options and about the shielded/not protected sign of option, this also supports exploitation and simulation needs.Other information in the key file, for example the data of the term of validity and/or other support permission enforcements also can be provided.In one embodiment, can hide Options by use keeps secret with proprietary algorithm, parts and other resources, and does not damage following principle: promptly, can dispose all cluster tools and needn't adopt or a plurality of versions of maintain configuration executable application programs.For example, if plan resource is maintained secrecy to particular customer, then relevant with this resource option is marked as hides sign, and if know title accurately, then the client can only activate this resource.In one embodiment, resource or the secret resource of plan that can use password to protect activation/configuration to hide, this password only offers authorized user by the manufacturer of cluster tool.
Should remember, though dirigibility becomes the configuration file (sysconfig.txt) that is used to generate system-wide and this group ingredient specific to the algorithm of configuration of components file (configoptions.txt), not all client needs high degree of flexibility to use.In one embodiment, key file (.tcf) is created on client's authority data (it specifies in needed option in the resulting cluster tool) automatically.Client's authority data even can be extracted from is automatically sold or the customer order data storehouse, for example by the database that provides such as SAP (SAP.com).In one embodiment, client's standard can directly be appointed as a file by the client, to be used to generate key file.
In case obtained key file (.tcf), then key file just is installed on the cluster tool hardware, and this hardware limits this configuring application program in the configuration file (sysconfig.txt) of system-wide and the generative process of this group specific to configuration of components file (configoptions.txt).As described, the configuration file of system-wide (sysconfig.txt) and this group are specified configurable option on target is trooped machine tool (machine) specific to configuration of components file (configoptions.txt).In one embodiment, if the option of hiding also is provided in the configuring application program with key file, then these authorized options can comprise foregoing hiding Options.
Then, handle the configuration file (sysconfig.txt) of system-wide and this group specific to configuration of components file (configoptions.txt) at option defined file (in one embodiment for .cfg file), can carry out the instantiation of object during with generating run.The database of option defined file represents to can be used for the storage vault of the Total Options of all cluster-tool type and parts.Configuration file (sysconfig.txt) by handling system-wide at the database of option defined file and this group be specific to configuration of components file (configoptions.txt), can carry out object when having only the option that has been authorized to produce to be used to the operation of disposing cluster tool parts hardware.
In this way, the manufacturer of cluster tool can adopt identical sets of applications (can carry out those of instantiation etc. of object when for example, being used to generate the configuration file of key file, system-wide and this group specific to configuration of components file, operation) to dispose any cluster tool with any parts option standard.In addition, have to unique individual data storehouse of maintenance option defined file (.cfg file) of manufacturer, this option defined file can be used as general, all (sysconfig.txt) and for all unique this group that is generated of each cluster tool specific to the configuration of components file.
In one embodiment, Fig. 6 shows the simplified flow chart that can carry out object when generating the operation be used to dispose cluster tool.In step 602, adopt parts option standards (for example, it can obtain from client's cluster tool purchase order) to generate key file (604).Then, the key file that is generated is installed in the target cluster tool (606).Again, the configuring application program of target cluster tool is by using key file and using hide Options (610) that provided to generate the configuration file of (608) system-wide and this group specific to the configuration of components file alternatively.
Then, handle the configuration file of system-wide and this group specific to the configuration of components file, can carry out the instantiation of object during with generating run and dispose cluster tool at the database (612) of option defined file.
In one embodiment, use suitable OO method and adopt suitable environment able to programme (for example, Smalltalk (www.smalltalk.org)) can carry out the generation of object when realizing moving.Fig. 7 shows when being used to use OO method to generate operation according to one embodiment of present invention can carry out the process flow diagram of object with the configuration cluster tool.In step 702, create one or more internal data structures specific to the selected/mandate of configuration of components file (704) with the configuration file and the option of this group of internal representation from system-wide.In step 706, create one or more internal data structures with internal representation from the database (708) of option defined file might resource/component/object option information.In step 710, will be selected at expression/data structure of the option of authorizing handles this group data structure of the option information of all possible resource/component/object of expression.Step 710 expression is removed about not organizing the option information of the resource/component/object of data structure selection/mandate from resulting this.In step 712, can carry out object when instantiation moves from remaining option definition.
Appendix C (it comprises a page C1, C2 and C3) shows the list content of the configuration file (sysconfig.txt) of system-wide according to one embodiment of the invention, and expression is about the advanced configuration details of target cluster tool.Portion's 1002 representation element data portion, it has such as the term of validity of the data of the ethernet address of the main frame of control cluster tool, configuration file, protective emblem, phantom load, expiration warning or the like.These metadata have been discussed in the front.It is " #Domino3Ports " that portion 1002 also indicates the cluster tool platform.This platform sign is discussed in the back in this literary composition.
Also show a plurality of image portion.But the carries out image relevant with these ones is attached to the image (PM1 image, PM2 image, PM3 image, PM4 image) of the image (main frame image) of main frame, four processing modules, and the image (TMC image) that transmits module.
In these images each all comprises various data fields, for example whether IP address, the hardware relevant with image exist, the defined file (.cfg) of the mark of filename (if applicable words can find the cluster tool Control Software at this), communication port, image, image, image file name, self-starting sign (it reconfigures when powering up automatically), the script (if any) that is used for carries out image, phantom load, exploitation sign, displaying scheme (it comprise location, color, icon, etc.).
For the purpose of discussing, select the image relevant further to discuss with transmitting module.Appendix D shows (it comprises two pages of D1, D2) the component-level configuration file (configoptions.txt) of the transfer chamber that is used for an example cluster tool.Portion 1002 shows the metadata that is used for the transfer chamber, comprises IP address (it is complementary with IP address in the metadata portion 1002 of appendix C), the term of validity (in the metadata portion 1002 of itself and appendix C the term of validity being shown is complementary), module marks " transfer chamber " (it is matched with the mark relevant with the TMC image of appendix C) and platform " #Domino3Ports " (platform shown in the metadata portion 1002 of itself and appendix C is complementary).
In appendix D, that left column shows is selected/and the option of authorizing, right row show all available options (wherein some may be authorized to/select be used for specific objective troop instrument).For example, the available selection that is used for port PDO 1 is #BrooksV4, #BrooksV3, #BrooksV2, #ErgoPD0, #ErgoPD0V1, the #Ergo200 shown in right-hand column.The left hand row show that available/selected option is #BrooksV4.Other selected option is explained voluntarily.
Notice that the image relevant with transmission module in the appendix C shows that the option defined file name of transfer chamber is " TMCImage.cfg ".For the example cluster tool is regenerated this option defined file TMCImage.cfg as appendix E (it comprises three pages, E1, E2 and E3).This option defined file comprises the configuration information of the Total Options that may be used to transmit module.In order to be easy to safeguard and upgrade that the configuration information details can further be encapsulated in other modularization option defined files.For example, because the platform of example cluster tool is #Domino3Ports (sees the metadata portion 1002 of appendix C and appendix D 1102), the page or leaf E3 of appendix E shows can obtain extra configuration detail in the defined file with title " TMCImageTMResD3Port.cfg ".
Appendix F shows the list content of the above-mentioned file TMCImageTMResD3Port.cfg of example cluster tool according to an embodiment.For relatively, also comprised defined file TMCImageTMResD2Port.cfg (appendix G), if platform has been chosen as #Domino (according to the page or leaf E3 of appendix E), then will adopt and/or consider this defined file.Equally for purpose relatively, the option defined file (pm.cfg) (appendix H) that has also comprised processing module as an example, with adopt and/or consider this option defined file with the configuration detail of the processing module of determining the target cluster tool (based on as the component-level configuration file configoptions.txt of the configuration file sysconfig.txt of system-wide and processing module (for example PM1, PM2, PM3, PM4) in the option of the selected/mandate of indicating.
As described, the database of option defined file comprises that institute might configuration of components information.In order to be easy to reference, this paper will adopt term " resource " to refer to be configured in any software or the hardware in the cluster tool and/or handle relevant feature.For example, single hardware component can have the different parameters that can be configured.In these configurable parameters each is all represented a kind of resource.
One of challenge of creating the common configuration structure relate to storage be used for the configuration data of all possible resource selected to satisfy/needs of the option of authorizing, make simultaneously and become efficient by the process (this filter process is the part that can carry out the process of object when creating operation for the option of selected/mandate) of using selected option file (for example, the configuration file of system-wide and this group component-level configuration file) filtered data base.Because the software/hardware resource is changing all the time, and cause new definition to be merged in database and old definition is therefrom deleted to the renewal of software/hardware parts, institute is so that challenge becomes complicated more.
According to one embodiment of present invention, by the form of classification come in the tissue database resources definition with basic reflection have all possible mandate/institutional framework of the general cluster tool of the option selected.For example, the applicable resources definition of all the sensors of a given matching system is considered to be had by (on the entitlement meaning) this matching system.Same one-level in this level, the applicable resource of the All Drives of matching system all is considered to be had by this matching system.In next higher level, all matching systems all are considered to be had by RF (radio frequency) system.Same one-level in this level, all RF electrodes all are considered to be had by the RF system.More senior at the next one, all radio systems all are considered to be had by processing module.Same one-level in this level, all chuck systems are considered to be had by processing module.In next higher level, all processing modules all are considered to be had by cluster tool.Same rank in this level is transmitted module and also is considered to be had by cluster tool.
Notice that some in this resource can suitably be associated with the resource of higher level or be had by the resource of higher level, but also can not be associated or had by the resource of higher level with the resource of higher level.For example, the RF system can be had by the processing module of induction coupling, but can also be had by the microwave treatment module inadequately or be associated with the microwave treatment module.When in higher level resource and level, creating link in than the database between the low level resource, should consider detail about these resources.
Fig. 8 shows the logical diagram of hierarchical organization of the database of option defined file according to an embodiment after above-mentioned institutional framework.
In one embodiment, in possessory text, comprise the filename of the configuration definition of " ownee " by reference, formed the entitlement link.Met the example of this link in the appendix in front, thus, the option defined file name of transfer chamber, TMCImage.cfg will see in the text of the configuration file sysconfig.txt of the system-wide of appendix C.When needs upgraded detail about " ownee ", the file relevant with " ownee " resource can be by the file replacement of the identical name that comprises the configuration information that upgraded.When providing new option when being used to select for cluster tool, can be kept in the file in the database about the configuration detail of new option, and the title of new option file can be provided in the possessory main body as another option that is used for possible selection.Out-of-date and when being removed, the file relevant with this option can be removed from database, and can be deleted from its possessory main body to its any link when option.
In this way, in view of changing resources definition, database can be safeguarded effectively.In addition, the hierarchical organization structure make its become efficiently with the database at the option defined file come treatment of selected fixed/option of authorizing (as shown in the configuration file sysconfig.tx of system-wide and component-level configuration file configoptions.txt).In one embodiment, this processing procedure is followed the tree ergodic algorithm, and the minimum rank top-down search of this algorithm in from the higher level to the level is resolved up to all configuration definitions.
For example, if cluster tool has only a metal etch process module and does not have other modules, then this metal etch process modules configured definition is by top-down search, begin up to all configuration definitions resolved (that is, the filename that drills through downwards in the path is quoted all resolved) from the configuration file sysconfig.tx of system-wide and the component-level configuration file configoptions.txt of this metal etch process module.In case they are resolved, this algorithm continues by beginning to resolve the definition of transmission modules configured by top-down search from the configuration file sysconfig.tx of system-wide and the component-level configuration file configoptions.txt of this transmission module.
Notice that this tree ergodic algorithm will be avoided the details of non-existent polysilicon etch processes module is carried out top-down search.In addition, when having resolved All Files when quoting, the tree ergodic algorithm will stop.When the given path of top-down search, the configuration detail relevant with the branch of tree is by bypass, and wherein Shu branch is relevant with unchecked or undelegated option.In this way, can be by coming the hierarchical database of Treatment Options defined file with quick acquisition configuration file at the selected/option of authorizing of in the configuration file sysconfig.tx of system-wide and component-level configuration file configoptions.txt, indicating.Object when then, adopting the operation that these configuration details are used to dispose the target cluster tool with establishment.
Though described the present invention according to several embodiment, also had and fall into variation, the displacement in the scope of the invention and be equal to replacement.Should also be noted that the other method that has many enforcements method and apparatus of the present invention.Therefore, appended claim should be understood to include all these and falls into variation, the displacement in aim of the present invention and the scope and be equal to replacement.
Claims (7)
1. method that is used to dispose particular plasma body cluster tool with a plurality of modules,
Comprise:
One pack module option defined file is provided, and a described pack module option defined file comprises the general configuration definition that is used for general plasma cluster tools;
One group of protection information specific to instrument is provided, described one group of protection information specific to instrument comprise the described layoutprocedure of concrete sign at the data of described particular plasma body cluster tool;
One group of option standard specific to instrument is provided, specifies at described particular plasma body cluster tool and the option of appointment specific to the option standard of instrument for described one group; And
Generate key file, described key file encapsulates the configurable limit that is applied on the described particular plasma body cluster tool, and described key file is configured to needed file during the described particular plasma body of described configuration cluster tool.
2. method according to claim 1, wherein, described key file comprises that the described layoutprocedure of restriction is only at the first information of described particular plasma body cluster tool.
3. method according to claim 2, wherein, the described first information comprises the MAC relevant with main frame (media access controller) address, described main frame is configured to the described particular plasma body cluster tool of control in production environment.
4. method according to claim 2, wherein, the described first information comprises the Internet protocol relevant with main frame (IP) address, described main frame is configured to the described particular plasma body cluster tool of control in production environment.
5. method according to claim 2, wherein, described key file comprises the information of when expiring of licensing of specifying described particular plasma body cluster tool.
6. method according to claim 2, wherein, described key file comprises the information of when expiring of licensing of the specific features of specifying described particular plasma body cluster tool.
7. method according to claim 1, wherein, described one group specific in the calm family of at least a portion form ordering system of the option standard of instrument by Automatic Extraction.
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| US65686205P | 2005-02-25 | 2005-02-25 | |
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| JPH11194928A (en) * | 1997-12-29 | 1999-07-21 | Tokyo Electron Ltd | Controller |
| JP4545252B2 (en) * | 1999-09-01 | 2010-09-15 | 東京エレクトロン株式会社 | Semiconductor manufacturing equipment |
| US6694210B1 (en) * | 2002-08-08 | 2004-02-17 | Applied Materials, Inc. | Process recipe modification in an integrated circuit fabrication apparatus |
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