CN101027375B - 抗静电处理剂,使用该处理剂的抗静电膜、涂布件和图案形成方法 - Google Patents
抗静电处理剂,使用该处理剂的抗静电膜、涂布件和图案形成方法 Download PDFInfo
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- CN101027375B CN101027375B CN2005800319463A CN200580031946A CN101027375B CN 101027375 B CN101027375 B CN 101027375B CN 2005800319463 A CN2005800319463 A CN 2005800319463A CN 200580031946 A CN200580031946 A CN 200580031946A CN 101027375 B CN101027375 B CN 101027375B
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- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
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- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
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- 239000003456 ion exchange resin Substances 0.000 description 1
- 229920003303 ion-exchange polymer Polymers 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- JJWLVOIRVHMVIS-UHFFFAOYSA-N isopropylamine Chemical compound CC(C)N JJWLVOIRVHMVIS-UHFFFAOYSA-N 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 125000001160 methoxycarbonyl group Chemical group [H]C([H])([H])OC(*)=O 0.000 description 1
- CXHHBNMLPJOKQD-UHFFFAOYSA-M methyl carbonate Chemical compound COC([O-])=O CXHHBNMLPJOKQD-UHFFFAOYSA-M 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- 125000001421 myristyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- XCVNDBIXFPGMIW-UHFFFAOYSA-N n-ethylpropan-1-amine Chemical compound CCCNCC XCVNDBIXFPGMIW-UHFFFAOYSA-N 0.000 description 1
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- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
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- 150000002825 nitriles Chemical class 0.000 description 1
- 125000001400 nonyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 125000004043 oxo group Chemical group O=* 0.000 description 1
- 125000005702 oxyalkylene group Chemical group 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 125000000913 palmityl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- WTSXICLFTPPDTL-UHFFFAOYSA-N pentane-1,3-diamine Chemical compound CCC(N)CCN WTSXICLFTPPDTL-UHFFFAOYSA-N 0.000 description 1
- QQVIHTHCMHWDBS-UHFFFAOYSA-N perisophthalic acid Natural products OC(=O)C1=CC=CC(C(O)=O)=C1 QQVIHTHCMHWDBS-UHFFFAOYSA-N 0.000 description 1
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 150000003014 phosphoric acid esters Chemical group 0.000 description 1
- 239000003504 photosensitizing agent Substances 0.000 description 1
- 239000002798 polar solvent Substances 0.000 description 1
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- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920000193 polymethacrylate Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920000128 polypyrrole Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- PZZICILSCNDOKK-UHFFFAOYSA-N propane-1,2,3-triamine Chemical compound NCC(N)CN PZZICILSCNDOKK-UHFFFAOYSA-N 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 229910021653 sulphate ion Inorganic materials 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- YBRBMKDOPFTVDT-UHFFFAOYSA-N tert-butylamine Chemical compound CC(C)(C)N YBRBMKDOPFTVDT-UHFFFAOYSA-N 0.000 description 1
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 1
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- 125000003944 tolyl group Chemical group 0.000 description 1
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- 238000009736 wetting Methods 0.000 description 1
- 239000004711 α-olefin Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/06—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances
- H01B1/12—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances organic substances
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/16—Anti-static materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/18—Layered products comprising a layer of synthetic resin characterised by the use of special additives
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/093—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antistatic means, e.g. for charge depletion
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/18—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances
- H01B3/30—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes
- H01B3/38—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes condensation products of aldehydes with amines or amides
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G2261/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
- C08G2261/30—Monomer units or repeat units incorporating structural elements in the main chain
- C08G2261/31—Monomer units or repeat units incorporating structural elements in the main chain incorporating aromatic structural elements in the main chain
- C08G2261/312—Non-condensed aromatic systems, e.g. benzene
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31855—Of addition polymer from unsaturated monomers
Abstract
Description
Claims (20)
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
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JP276069/2004 | 2004-09-22 | ||
JP2004276071 | 2004-09-22 | ||
JP2004276070 | 2004-09-22 | ||
JP2004276069 | 2004-09-22 | ||
JP276071/2004 | 2004-09-22 | ||
JP276070/2004 | 2004-09-22 | ||
PCT/JP2005/017909 WO2006033455A1 (en) | 2004-09-22 | 2005-09-21 | Antistatic treatment agent, and antistatic film, coated article and pattern forming method using the agent |
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Application Number | Title | Priority Date | Filing Date |
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CN200910253990A Division CN101870860A (zh) | 2004-09-22 | 2005-09-21 | 抗静电处理剂,使用该处理剂的抗静电膜、涂布件和图案形成方法 |
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CN101027375A CN101027375A (zh) | 2007-08-29 |
CN101027375B true CN101027375B (zh) | 2010-12-22 |
Family
ID=38156784
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CN200910253990A Pending CN101870860A (zh) | 2004-09-22 | 2005-09-21 | 抗静电处理剂,使用该处理剂的抗静电膜、涂布件和图案形成方法 |
CN2005800319463A Active CN101027375B (zh) | 2004-09-22 | 2005-09-21 | 抗静电处理剂,使用该处理剂的抗静电膜、涂布件和图案形成方法 |
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CN200910253990A Pending CN101870860A (zh) | 2004-09-22 | 2005-09-21 | 抗静电处理剂,使用该处理剂的抗静电膜、涂布件和图案形成方法 |
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US (3) | US20070252111A1 (zh) |
EP (1) | EP1807477B1 (zh) |
JP (1) | JP5063882B2 (zh) |
KR (1) | KR100914637B1 (zh) |
CN (2) | CN101870860A (zh) |
TW (1) | TW200619301A (zh) |
WO (1) | WO2006033455A1 (zh) |
Families Citing this family (14)
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---|---|---|---|---|
EP2207185A1 (en) * | 2004-03-24 | 2010-07-14 | Showa Denko Kabushiki Kaisha | Crosslinked self-doping type electrically conducting polymer, production process thereof, product coated with the polymer and electronic device |
TWI345681B (en) * | 2006-02-08 | 2011-07-21 | Showa Denko Kk | Antistatic agent, antistatic film and articles coated with antistatic film |
JP5024293B2 (ja) * | 2006-09-27 | 2012-09-12 | Jsr株式会社 | 上層膜形成用組成物およびフォトレジストパターン形成方法 |
JP5394016B2 (ja) * | 2008-07-03 | 2014-01-22 | 三菱レイヨン株式会社 | レジストパターン形成方法 |
US8178281B2 (en) | 2008-08-20 | 2012-05-15 | Showa Denko K.K. | Method for improving sensitivity of resist |
JP5368392B2 (ja) | 2010-07-23 | 2013-12-18 | 信越化学工業株式会社 | 電子線用レジスト膜及び有機導電性膜が積層された被加工基板、該被加工基板の製造方法、及びレジストパターンの形成方法 |
JP5708522B2 (ja) * | 2011-02-15 | 2015-04-30 | 信越化学工業株式会社 | レジスト材料及びこれを用いたパターン形成方法 |
JP5831845B2 (ja) * | 2012-02-17 | 2015-12-09 | 日産化学工業株式会社 | 帯電防止膜形成組成物 |
CN103507352A (zh) * | 2012-06-20 | 2014-01-15 | 苏州金海薄膜科技发展有限公司 | 一种无静电屏幕保护膜及其制作方法 |
JP5830444B2 (ja) * | 2012-07-02 | 2015-12-09 | 信越ポリマー株式会社 | 導電性高分子組成物、該組成物より得られる帯電防止膜が設けられた被覆品、及び前記組成物を用いたパターン形成方法。 |
KR101968436B1 (ko) | 2012-07-24 | 2019-04-11 | 미쯔비시 케미컬 주식회사 | 도전체, 도전성 조성물, 및 적층체 |
JP6451203B2 (ja) * | 2014-10-21 | 2019-01-16 | 三菱ケミカル株式会社 | レジストパターンの形成方法、パターンが形成された基板の製造方法 |
JP6543928B2 (ja) * | 2014-12-24 | 2019-07-17 | 三菱ケミカル株式会社 | レジストのパターン形成方法 |
KR102589137B1 (ko) * | 2016-12-29 | 2023-10-12 | 코오롱인더스트리 주식회사 | 대전방지 필름 |
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- 2005-09-21 WO PCT/JP2005/017909 patent/WO2006033455A1/en active Application Filing
- 2005-09-21 CN CN200910253990A patent/CN101870860A/zh active Pending
- 2005-09-21 JP JP2005273462A patent/JP5063882B2/ja active Active
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US20070252111A1 (en) | 2007-11-01 |
KR100914637B1 (ko) | 2009-08-28 |
EP1807477A4 (en) | 2010-07-14 |
EP1807477B1 (en) | 2013-08-07 |
CN101027375A (zh) | 2007-08-29 |
JP5063882B2 (ja) | 2012-10-31 |
WO2006033455A1 (en) | 2006-03-30 |
US20090123771A1 (en) | 2009-05-14 |
CN101870860A (zh) | 2010-10-27 |
EP1807477A1 (en) | 2007-07-18 |
TW200619301A (en) | 2006-06-16 |
JP2006117925A (ja) | 2006-05-11 |
US9023247B2 (en) | 2015-05-05 |
KR20070047824A (ko) | 2007-05-07 |
US20110097671A1 (en) | 2011-04-28 |
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