CN101098734B - 微型浮质喷流和浮质喷流阵列 - Google Patents
微型浮质喷流和浮质喷流阵列 Download PDFInfo
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- A—HUMAN NECESSITIES
- A62—LIFE-SAVING; FIRE-FIGHTING
- A62C—FIRE-FIGHTING
- A62C31/00—Delivery of fire-extinguishing material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/28—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with integral means for shielding the discharged liquid or other fluent material, e.g. to limit area of spray; with integral means for catching drips or collecting surplus liquid or other fluent material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/02—Spray pistols; Apparatus for discharge
- B05B7/06—Spray pistols; Apparatus for discharge with at least one outlet orifice surrounding another approximately in the same plane
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/02—Spray pistols; Apparatus for discharge
- B05B7/12—Spray pistols; Apparatus for discharge designed to control volume of flow, e.g. with adjustable passages
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D11/00—Burners using a direct spraying action of liquid droplets or vaporised liquid into the combustion space
- F23D11/10—Burners using a direct spraying action of liquid droplets or vaporised liquid into the combustion space the spraying being induced by a gaseous medium, e.g. water vapour
- F23D11/16—Burners using a direct spraying action of liquid droplets or vaporised liquid into the combustion space the spraying being induced by a gaseous medium, e.g. water vapour in which an emulsion of water and fuel is sprayed
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/02—Spray pistols; Apparatus for discharge
- B05B7/04—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge
- B05B7/0416—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/02—Spray pistols; Apparatus for discharge
- B05B7/08—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point
- B05B7/0884—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point the outlet orifices for jets constituted by a liquid or a mixture containing a liquid being aligned
Abstract
一种用于引导各种成烟雾状散开的材料打印的微型浮质喷流或微型浮质喷流阵列。在最常用的实施例中,集中浮质流并将其沉积在平面或非平面目标上,形成被热处理或光化学处理以获得接近于对应的块材的物理、光学、和/或电气特性的图案。该设备使用浮质喷流沉积头,以形成由外部的鞘流和内部的充满浮质的载体流构成的环状传播喷流。沉积头的小型化便于成阵列的沉积头的制造和操作,能够使浮质喷流阵列的构成和操作能够独立运动和沉积。成阵列的浮质喷流提供了增加的沉积速率、成阵列的沉积和多种材料的沉积。
Description
相关申请的交叉引用
本申请主张于2004年12月13日提交的名为“Miniature Aerosol Jet andAerosol Jet Array”的美国临时专利申请第60/635,847号、和于2005年4月8日提交的名为“Atomizer Chamber and Aerosol Jet Array”的美国临时专利申请第60/669,748号的权益,该申请的说明书和权利要求书在此并入本文供参考。
技术领域
本发明涉及使用微型浮质喷流或微型浮质喷流阵列的各种成烟雾状散开的材料的直接打印。更具体地,本发明涉及在平面或非平面表面上的无掩模、非接触式打印。本发明也可被用于在大气状态下执行将材料打印在热敏目标上,并且能够进行具有微米尺寸特征的沉积。
发明内容
本发明提供了一种用于将材料沉积到目标上的沉积头组件,包含沉积头的所述沉积头组件包括:通道,所述通道用于输送包括材料的浮质;一个或多个入口,所述入口用于将鞘气(sheath gas)引入所述沉积头中;连接至所述入口的第一室;紧靠所述通道的出口的区域,所述区域用于将浮质与所述鞘气相结合,从而形成包括围绕内部浮质流的外部鞘流(sheathflow)的环状喷流;以及伸长管嘴。沉积头组件优选具有小于大约1cm的直径。所述入口优选沿圆周布置在所述通道的周围。所述区域可选地包括第二室。
所述第一室可选地在所述沉积头的外部,且在所述鞘气与所述浮质相结合前,所述第一室绕着所述通道形成鞘气压力的圆柱形对称分布。所述第一室优选地足够长以在所述鞘气与所述浮质相结合前,足以绕着所述通道形成鞘气压力的圆柱形对称分布。沉积头组件可选地进一步包括用于从所述第一室接收鞘气的第三室,所述第三室帮助所述第一室在所述鞘气与所述浮质相结合前绕着所述通道形成鞘气压力的圆柱形对称分布。所述第三室优选通过多个通道被连接至所述第一室,其中所述通道平行且沿圆周设置在所述通道周围。所述沉积头组件优选包括用于使所述沉积头相对于所述目标平移或倾斜的一个或多个致动器。
本发明还是一种用于将材料沉积在目标上的设备,所述设备包括:多个通道,所述多个通道用于输送包括材料的浮质;围绕所述通道的鞘气室;紧靠各所述通道的出口的区域,所述区域用于使浮质与所述鞘气相结合,从而形成用于每一个通道的环状喷流,所述喷流包括围绕内部浮质流的外部鞘流;以及与每一个所述通道相对应的伸长管嘴。所述多个通道优选形成阵列。所述浮质可选地从共用室进入每一个所述通道。所述浮质优选地被单独供给到至少一个所述通道。第二成烟雾状散开的材料可选地被供给到至少一个所述通道。在至少一个通道中的浮质的质量流量优选地可单独控制。所述设备优选包括用于使一个或多个所述通道和伸长管嘴相对于目标平移或倾斜的一个或多个致动器。
所述设备优选地进一步包括雾化器,所述雾化器包括:用于保持材料的圆柱形腔室;设置在所述腔室的底部上的薄聚合物膜;超声波池,所述超声波池用于容纳所述腔室且将超声波能量向上引导穿过所述膜;载体管,所述载体管用于将载体气体引入到所述腔室中;以及一个或多个抽取管,所述抽取管用于将浮质发送至所述多个通道。所述载体管优选包括一个或多个开口。所述设备优选进一步包括连接至所述管的漏斗,用于使材料的大液滴再循环。额外的材料可选地被持续地提供至雾化器以替换被传送至所述多个通道的材料。
本发明的一个目的是提供一种用于使材料在目标上沉积的微型沉积头。
本发明的一个优点在于该微型沉积头易于组合成紧凑的阵列,该阵列允许平行的执行多元沉积,因此大幅度减少了沉积时间。
本发明的其它目的、优点和新颖性、以及进一步的应用范围将结合附图在以下详细的说明中部分地阐述,并且将部分地对本领域的普通技术人员在以下的审查中变得明显,或可以通过本发明的实践而获悉。本发明的目的和优点可通过附加权利要求中具体指出的手段和组合而实现及获得。
附图说明
组成及形成说明书的一部分的附图与说明一起说明本发明的几个实施例,用于解释本发明的原理。图式只是用于说明本发明的优选实施例,且不被认为对本发明的限定。在图式中:
图1a是本发明的微型沉积头的横截面;
图1b显示了从六个平均分隔开的通道中引入鞘气的可供选择的微型沉积头的等距视图和横截面图;
图1c示出了具有随附的外部鞘式充气室的图1b的沉积头的等距视图和横截面图;
图1d示出了从沿该头的轴的管道中引入浮质和鞘气的沉积头结构的等距视图和横截面图;
图1e示出了使用内部充气室并经由将该头连接至安装组件的端口引入鞘式空气的沉积头结构的等距视图和横截面图;
图1f示出了为最大程度的小型化提供的不使用充气室的沉积头的等距视图和横截面图;
图2是在可移动台架上安装的单个微型沉积头的示意图;
图4a是多头设计的示意图;
图4b是具有单独供给管嘴的多头设计的示意图;
图5a示出了可使该头关于两个正交轴倾斜的结构中的微型浮质喷流;
图5b示出了压电驱动式微型浮质喷流阵列;以及
图6示出了使用微型浮质喷流阵列的雾化器组件的透视图和剖面图。
具体实施方式
本发明通常涉及用于利用空气动力集中的液体和液体-颗粒悬浮液的高溶解、无掩模式沉积的设备和方法。在最常用的实施例中,浮质流被集中且被沉积在平面或非平面的目标上以形成图案,该图案被热处理或光化学处理以获得接近于对应的块材(bulk material)的物理、光学、和/或电气特性。这种工艺称为-无掩模中尺度材料沉积,且被用于使具有线幅(linewidth)的成烟雾状散开的材料沉积,其中该线幅为小于传统厚膜工艺的沉积线的数量级。在不使用掩模的情况下执行沉积。术语中尺度是指大约1微米到1毫米的尺寸,并且覆盖通过传统薄膜和厚膜工艺沉积的几何结构之间的范围。另外,根据处理后的激光处理,工艺能够将具有宽度的线限定为小到1微米。
设备优选使用浮质喷流沉积头,以形成由外部的鞘流和内部的充满浮质的载体流构成的环状传播喷流。在环状浮质喷射工艺中,浮质流优选在雾化工艺后或通过加热器组件后直接进入沉积头,并沿装置的轴朝向沉积头孔口引导浮质流。质量通过量优选由浮质载体气体质量流量控制器控制。在沉积头内,浮质流优选经通过毫米尺寸的孔口而初始校准。然后射出的颗粒流优选与环状鞘气结合。载体气体和鞘气多数通常包括压缩空气或惰性气体,其中一者或两者都可以含有改良的溶剂蒸气物质。例如,当浮质从水溶液中形成时,水蒸气可被加入到载体气体或鞘气以防止液滴蒸发。
鞘气优选进入通过浮质入口之下的鞘式空气入口,并形成具有浮质流的环状流。如同浮质载体气体,鞘气流量优选由质量流量控制器控制。混合流通过在目标处引导的孔口离开伸长管嘴。该环状流将浮质流集中在目标上,并允许进行具有尺寸小到大约为5微米的特征的沉积。
在方法中,当鞘气与浮质流相结合时,该流不需要为了使次毫米线幅沉积而通过多于一个的孔口。对于该“单级”沉积,在10微米线的沉积中,方法典型地获得大约250的流量直径收缩,且可能能够收缩超过1000。不使用轴向收缩,且该流典型地不会达到超声流速,从而防止可以潜在导致该流完全收缩的紊流的形成。
通过将伸长管嘴连接至沉积头而获得增强的沉积特征。优选利用气动配合和紧固螺母将管嘴连接至沉积头的下部腔室,且所述管嘴优选长大约0.95到1.9厘米。管嘴降低了射出流的直径,并将该流校准为在超过管嘴出口大约3至5毫米的距离处为管嘴孔口直径的若干分之几。管嘴的孔口直径的尺寸是根据沉积材料的理想线幅的范围而选取的。出口孔口可具有从大约50到500微米范围的直径。沉积的线幅可小到大约为孔口直径的尺寸的二十分之一,或大到孔口直径。使用相同的沉积设备,可拆卸式伸长管嘴的使用还能够将沉积结构的尺寸从小至几微米改变为大至1毫米的若干分之几。射出流的直径(且因此使沉积的线幅)由出口孔口尺寸、鞘气的流量与载体气体的流量的比率、以及孔口和目标之间的距离来控制。还可使用伸长管嘴获得增强沉积,该伸长管嘴被加工到沉积头的主体中。这种伸长管嘴在2004年12月13日提交的名为“Annular Aerosol Jet DepositionUsing An Extended Nozzle”的共同拥有的美国专利申请第11/011,366号中有更详细的说明,该申请在此整体并入本文供参考。
在许多应用中,有利的是由多个沉积头执行沉积。可通过使用微型沉积头以增加每单位面积的管嘴数量,使用于引导打印应用的多个沉积头的使用变得更便利。微型沉积头优选包括与标准头相同的基本内部几何结构,相同之处在于环状流以相似于标准沉积头的结构形成在浮质和鞘气之间。沉积头的小型化还帮助在移动台架上安装沉积头和在固定目标上沉积材料的直接写入过程。
微型浮质喷流沉积头和喷流阵列
沉积头的小型化可以通过多于一个的数量级减少装置的重量,因此而帮助可移动台架上的安装和平移。小型化还帮助成阵列的沉积头的制造和操作,能够构成和操作能够独立运动和沉积的浮质喷流阵列。成阵列的浮质喷流提供了增加的沉积率、成阵列的沉积和多种材料的沉积。成阵列的浮质喷流对于高溶解的直接写入应用还设置用于增加的管嘴密度,并且可制成具有用于特殊沉积应用的定制的喷流空间和结构。管嘴结构包括但不限于线性、矩形、圆形、多边形和各种非线性排列。
即使两者不相同,微型沉积头与标准沉积头的功能也会相似,但所述微型沉积头的直径是较大单元的直径的约五分之一。因此微型沉积头的直径或宽度优选是大约1cm,但是也可以更小或更大。本申请中详述的几个实施例公开了鞘气被引入沉积头内并进行分送的各种方法、以及结合鞘气流与浮质流的方法。鞘气流在沉积头之中的发展对系统的沉积特征是至关重要的,用来确定喷射的浮质流的最终宽度以及沉积到一次沉积边界外的卫星液滴(satellite droplet)的量和分送,并且通过在孔口壁和充满浮质的载体气体之间形成的屏障使出口孔口的阻塞最小化。
微型沉积头的横截面在图1a中被示出。充满浮质的载体气体通过浮质端口102进入沉积头,并且沿装置的轴进行引导。惰性鞘气通过连接至上部充气室104的端口侧向地进入沉积头。充气室绕着沉积头的轴产生鞘气压力的圆柱形对称式分布。鞘气流至圆锥形下部充气室106,并与浮质流在结合室108中相结合,形成由内部的充满浮质的载体气流和外部惰性鞘气流组成的环状流。环状流通过伸长管嘴110传播,并在管嘴孔口112处退出。
图1b示出了从六个平均分隔开的通道引入鞘气的可选实施例。该结构不包含图1a中描绘的沉积头的内部充气室。鞘气通道114优选绕着装置的轴平均地间隔开。该设计可以使沉积头124的尺寸减小,且使装置更容易被制造。鞘气与浮质载体气体在沉积头的结合室108中相结合。如同前述的设计,该混合流接着进入伸长管嘴110并从管嘴孔口112退出。由于该沉积头不包括充气室,因此鞘气压力的圆柱形对称分布优选地在鞘气被注入到沉积头之前而形成。图1c示出了用于使用外部充气室116产生所需的鞘气压力分布的结构。在该结构中,鞘气从位于腔室一侧上的端口118进入充气室,且向上流至鞘气通道114。
图1d示出了从沿沉积头的轴而行的管道中引入浮质和鞘气的沉积头结构的等距视图和横截面图。在该结构中,圆柱形对称压力分布通过使鞘气优选通过在沉积头的轴上中心处的圆盘122中的平均分隔开的孔120而获得。鞘气接着与浮质载体气体在结合室108中相结合。
图1e示出了本发明的沉积头的结构的等距视图和横截面图,其中所述沉积头使用内部充气室,并经由优选将该头连接至安装组件的端口118引入鞘式空气。如图1a的结构中,鞘气进入上部充气室104,然后在流至结合室108之前流至下部充气室106。然而在该情况下,上部及下部充气室之间的距离被减小,以使沉积头能够进一步小型化。
图1f示出了为最大程度的小型化提供的不使用充气室的沉积头的等距视图和横截面图。浮质通过浮质管102的顶部中的开口进入鞘气室210。鞘气通过输入端口118进入该头,其中所述输入端口可选地被垂直定向至浮质管102,并与浮质流在浮质管102的底部处相结合。浮质管102可部分或全部地延伸至鞘气室210的底部。鞘气室210的长度应该足够长,以确保在两者结合之前,鞘气的流动大致平行于浮质流,从而产生优选为圆柱形对称的鞘气压力分布。鞘气然后与浮质载体气体在鞘气室210的底部处或鞘气室210的底部附近相结合,且该混合气流通过收敛管嘴220被引入伸长管嘴230。
图2示出了在可移动台架126上安装的单个微型沉积头124的示意图。系统优选包括对准照相机128和处理激光器130。处理激光器可以是基于光纤的激光器。在该结构中,识别和对准、沉积、以及激光处理以连续方式执行。该结构明显地减少系统的沉积和处理模块的重量,并为中尺度结构的无掩模、非接触打印问题提供了便宜的解决方案。
沉积头的小型化能够实现多头设计的制造。这种装置的示意图在图4a中被示出。在该结构中,装置为整体式,并且浮质流通过浮质气体端口102进入浮质充气室103,并接着进入十头阵列,尽管可以使用任何数量的头。鞘气流通过至少一个鞘气端口118进入鞘式充气室105。在该整体结构中,该头以阵列形式同时沉积一种材料。整体结构可与固定目标一起被安装在双轴式台架上,或者系统可与在与台架的运动正交的方向上供给的目标一起被安装在单轴式台架上。
图4b示出了用于多头的第二结构。该视图示出了十个成线性阵列的管嘴(尽管任何数量的管嘴都可排列成一维或两维图案中的任何图案),每一个管嘴由单独的浮质端口134供给。该结构允许每一个管嘴之间的质量流量一致。假设雾化源在空间上一致,发送至每一个管嘴的浮质量取决于流量控制器或多个流量控制器的质量流量,而与阵列中的管嘴的位置无关。图4b的结构还允许从单个沉积头沉积超过一种的材料。这些不同的材料可以可选地以任何所需图案或次序被同时沉积或顺序地沉积。在这种应用中,不同材料可被发送至每一个管嘴,且每一种材料通过相同的雾化单元和控制器或通过单独的雾化单元和控制器被雾化并发送。
图5a示出了允许头围绕两个正交轴倾斜的结构中的微型浮质喷流。图5b是压电驱动式微型浮质喷流的阵列的图式。该阵列能够沿一个轴平移。浮质喷流通过弯曲安装件优选连接至支架。通过使用压电致动器施加横向力、或可供选择地通过致动一个或多个(优选是两个)检流计而使头倾斜。浮质充气装置可被替换为每一个供给单独沉积头的束管。在该结构中,浮质喷流能够进行独立沉积。
用于浮质喷流阵列的雾化室
浮质喷流阵列需要与标准的系统中使用的雾化器明显不同的雾化器。图6示出了具有足以将成烟雾状散开的薄雾供应给十个或更多个成阵列或非阵列的管嘴的能力的雾化器的剖面图。雾化器组件包括优选为玻璃缸的雾化室136,所述雾化室的底部上优选地设置优选包括的薄聚合物膜。雾化器组件优选被设置在具有向上引导通过膜的超声波能量的超声波雾化池内。该膜将超声波能量传送至功能墨,然后该功能墨被雾化以产生浮质。
容纳漏斗138优选在雾化室136内的中心处,且被连接至载体气体端口140,所述载体气体端口优选包括从雾化室136的顶部延伸出的空心管。端口140优选包括恰好位于漏斗138之上的一个或更多个狭槽或凹口200,所述狭槽或凹口允许载体气体进入雾化室136。漏斗138包含在雾化期间形成的大液滴并使所述液滴沿管子向下至雾化池以被再循环。较小的液滴夹带在载体气体中,且作为浮质或薄雾经由优选安装在漏斗138周围的一个或更多个抽取管142发送。
用于雾化器组件的浮质输出的数量优选是可变化的,并且取决于多管嘴阵列的尺寸。垫衬材料优选地作为密封件被定位在雾化室136的顶部上,并且优选地被夹在两片金属之间。垫衬材料在抽取管142和载体气体端口140周围产生密封。尽管要雾化的所需量的材料可以放置在用于分批操作的雾化组件中,然而材料可以优选通过诸如注射泵的装置经由一个或多个材料入口被持续地供给到雾化器组件中,其中所述材料入口优选被设置成穿过垫衬材料中的一个或多个孔。供给速率优选与从雾化器组件将材料移除的速率相同,因此保持雾化室中的墨或其它材料的恒定体积。
关闭和浮质输出平衡
微型喷流或微型喷流阵列的关闭可以通过使用定位在浮质气体输入管道上的夹管阀(pinch valve)来实现。当致动时,夹管阀压缩管道,且使到沉积头的浮质的流动停止。当阀门打开时,恢复浮质到沉积头的流动。当保持关闭能力时,夹管阀关闭配置使管嘴可以下降到凹入特征内,且能够使沉积进入这种特征内。
另外,在多管嘴阵列的运行中,从个别管嘴的浮质输出的平衡可能是必要的。浮质输出平衡可以通过压缩通向个别管嘴的浮质输入管来实现,使得可以校正管嘴的相关浮质输出,从而使每个管嘴的质量通量一致。
包括微型浮质喷流或微型浮质喷流阵列的应用包括,但不局限于,大面积打印、成阵列的沉积、多种材料沉积、和在利用4/5轴运动的三维物体上的保形打印。
尽管参照特别优选且可供选择的实施例对本发明进行了详细的描述,然而本领域的普通技术人员将理解,在不背离如下的权利要求的本质和范围的前提下,可进行各种修改和提高,且其它实施例也可获得相同的结果。以上所揭露的各种结构意指对读者进行关于优选和可供选择的实施例的教授,但不意指限制本发明的限度或权利要求的范围。本发明的变更和修改对本领域的技术人员是显而易见的,且意指覆盖全部这种修改和等效配置。所有上述引用的专利和公开出版物的全部公开内容因此将并入本文供参考。
Claims (20)
1.一种用于将材料沉积到目标上的沉积头组件,所述沉积头组件用于非接触打印,包含沉积头的所述沉积头组件包括:
通道,所述通道用于输送包括所述材料的浮质;
一个或多个入口,所述入口用于将鞘气引入所述沉积头中;
连接至所述入口的第一室;
紧靠所述通道的出口的区域,所述区域用于将所述浮质与所述鞘气相结合,从而形成包括围绕内部浮质流的外部鞘流的环状喷流;以及
伸长管嘴,所述伸长管嘴延伸自所述区域以减少所述环状喷流的直径。
2.根据权利要求1所述的沉积头组件,具有小于1cm的直径。
3.根据权利要求1所述的沉积头组件,其中所述入口沿圆周布置在所述通道的周围。
4.根据权利要求1所述的沉积头组件,其中所述区域包括第二室。
5.根据权利要求1所述的沉积头组件,其中所述第一室在所述沉积头的外部,且在所述鞘气与所述浮质相结合前,所述第一室绕着所述通道形成鞘气压力的圆柱形对称分布。
6.根据权利要求1所述的沉积头组件,其中所述第一室足够长以在所述鞘气与所述浮质相结合前,足以绕着所述通道形成鞘气压力的圆柱形对称分布。
7.根据权利要求1所述的沉积头组件,进一步包括用于从所述第一室接收鞘气的第三室,所述第三室帮助所述第一室在所述鞘气与所述浮质相结合前绕着所述通道形成鞘气压力的圆柱形对称分布。
8.根据权利要求7所述的沉积头组件,其中所述第三室通过多个通道被连接至所述第一室,其中所述多个通道平行于所述通道且沿圆周设置在所述通道周围。
9.根据权利要求1所述的沉积头组件,包括用于使所述沉积头相对于所述目标平移或倾斜的一个或多个致动器。
10.一种用于将材料沉积在目标上的设备,所述设备用于非接触打印,所述设备包括:
多个通道,所述多个通道用于输送包括所述材料的浮质;
围绕所述通道的鞘气室;
紧靠各所述通道的出口的区域,所述区域用于使所述浮质与鞘气相结合,从而形成用于每一个所述通道的环状喷流,所述喷流包括围绕内部浮质流的外部鞘流;以及
与每一个所述通道相对应的伸长管嘴,所述伸长管嘴延伸自所述区域,每个所述伸长管嘴减少所述环状喷流的直径。
11.根据权利要求10所述的设备,其中所述多个通道形成阵列。
12.根据权利要求10所述的设备,其中所述浮质从共用室进入每一个所述通道。
13.根据权利要求10所述的设备,其中所述浮质被单独供给到至少一个所述通道。
14.根据权利要求13所述的设备,其中第二材料成烟雾状散开并随后被供给到至少一个所述通道。
15.根据权利要求10所述的设备,其中在至少一个所述通道中的浮质的质量流量可单独控制。
16.根据权利要求10所述的设备,包括用于使一个或多个所述通道和伸长管嘴相对于所述目标平移或倾斜的一个或多个致动器。
17.根据权利要求10所述的设备,进一步包括雾化器,所述雾化器包括:
用于保持所述材料的圆柱形腔室;
设置在所述腔室的底部上的薄聚合物膜;
超声波池,所述超声波池用于容纳所述腔室且将超声波能量向上引导穿过所述膜;
载体管,所述载体管用于将载体气体引入到所述腔室中;以及
一个或多个抽取管,所述抽取管用于将所述浮质发送至所述多个通道。
18.根据权利要求17所述的设备,其中所述载体管包括一个或多个开口。
19.根据权利要求17所述的设备,进一步包括连接至所述载体管的漏斗,用于使所述材料的大液滴再循环。
20.根据权利要求17所述的设备,其中额外的材料被持续地提供至所述雾化器,以替换被传送至所述多个通道的材料。
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US63584704P | 2004-12-13 | 2004-12-13 | |
US60/635,847 | 2004-12-13 | ||
US66974805P | 2005-04-08 | 2005-04-08 | |
US60/669,748 | 2005-04-08 | ||
US11/302,091 US7938341B2 (en) | 2004-12-13 | 2005-12-12 | Miniature aerosol jet and aerosol jet array |
US11/302,091 | 2005-12-12 | ||
PCT/US2005/045394 WO2006065978A2 (en) | 2004-12-13 | 2005-12-13 | Miniature aerosol jet and aerosol jet array |
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CN201210461251.0A Active CN103009812B (zh) | 2004-12-13 | 2005-12-13 | 微型浮质喷嘴和浮质喷嘴阵列 |
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Country Status (7)
Country | Link |
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US (3) | US7938341B2 (zh) |
EP (1) | EP1830927B1 (zh) |
JP (1) | JP5213451B2 (zh) |
KR (1) | KR101239415B1 (zh) |
CN (2) | CN101098734B (zh) |
SG (1) | SG158137A1 (zh) |
WO (1) | WO2006065978A2 (zh) |
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US7674671B2 (en) * | 2004-12-13 | 2010-03-09 | Optomec Design Company | Aerodynamic jetting of aerosolized fluids for fabrication of passive structures |
US20080013299A1 (en) | 2004-12-13 | 2008-01-17 | Optomec, Inc. | Direct Patterning for EMI Shielding and Interconnects Using Miniature Aerosol Jet and Aerosol Jet Array |
US7393559B2 (en) | 2005-02-01 | 2008-07-01 | The Regents Of The University Of California | Methods for production of FGM net shaped body for various applications |
US20070154634A1 (en) | 2005-12-15 | 2007-07-05 | Optomec Design Company | Method and Apparatus for Low-Temperature Plasma Sintering |
TWI482662B (zh) | 2007-08-30 | 2015-05-01 | Optomec Inc | 機械上一體式及緊密式耦合之列印頭以及噴霧源 |
TW200918325A (en) | 2007-08-31 | 2009-05-01 | Optomec Inc | AEROSOL JET® printing system for photovoltaic applications |
TWI538737B (zh) | 2007-08-31 | 2016-06-21 | 阿普托麥克股份有限公司 | 材料沉積總成 |
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2005
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- 2005-12-13 EP EP05854164.0A patent/EP1830927B1/en active Active
- 2005-12-13 WO PCT/US2005/045394 patent/WO2006065978A2/en active Application Filing
- 2005-12-13 KR KR1020077015799A patent/KR101239415B1/ko active IP Right Grant
- 2005-12-13 SG SG200908303-1A patent/SG158137A1/en unknown
- 2005-12-13 CN CN2005800463750A patent/CN101098734B/zh active Active
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Also Published As
Publication number | Publication date |
---|---|
CN103009812A (zh) | 2013-04-03 |
SG158137A1 (en) | 2010-01-29 |
KR101239415B1 (ko) | 2013-03-18 |
US20100192847A1 (en) | 2010-08-05 |
WO2006065978A2 (en) | 2006-06-22 |
JP5213451B2 (ja) | 2013-06-19 |
US7938341B2 (en) | 2011-05-10 |
KR20070093101A (ko) | 2007-09-17 |
US20060175431A1 (en) | 2006-08-10 |
JP2008522814A (ja) | 2008-07-03 |
EP1830927A2 (en) | 2007-09-12 |
US8132744B2 (en) | 2012-03-13 |
CN101098734A (zh) | 2008-01-02 |
CN103009812B (zh) | 2015-03-25 |
US20100173088A1 (en) | 2010-07-08 |
US8640975B2 (en) | 2014-02-04 |
WO2006065978A3 (en) | 2006-10-19 |
EP1830927A4 (en) | 2014-11-19 |
EP1830927B1 (en) | 2016-03-09 |
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