CN101276776B - Chuck worktable mechanism - Google Patents
Chuck worktable mechanism Download PDFInfo
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- CN101276776B CN101276776B CN 200810086968 CN200810086968A CN101276776B CN 101276776 B CN101276776 B CN 101276776B CN 200810086968 CN200810086968 CN 200810086968 CN 200810086968 A CN200810086968 A CN 200810086968A CN 101276776 B CN101276776 B CN 101276776B
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- 230000007246 mechanism Effects 0.000 title claims abstract description 18
- 230000008859 change Effects 0.000 claims abstract description 25
- 238000001514 detection method Methods 0.000 claims description 22
- 239000007921 spray Substances 0.000 claims description 3
- 238000003825 pressing Methods 0.000 abstract description 5
- 238000003754 machining Methods 0.000 abstract 3
- 235000012431 wafers Nutrition 0.000 description 18
- 239000004575 stone Substances 0.000 description 8
- 230000007257 malfunction Effects 0.000 description 3
- 238000012360 testing method Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
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Abstract
This invention discloses a chuck workbench mechanism, through which machining pressure in machining device applied to machining via applying pressure to machined object can be controlled in adoption of mechanism with high reliability and excellent economical efficiency. In the chuck workbench mechanism (2), rotation shaft (21) has back plate (240) provided with orthogonal surface relative to axis. The rotation shaft (21) is supported by centripetal bearing (23) and thrust bearing (24), furthermore, the thrust bearing (24) is equipped with interval corresponding output components (26, 27) for performing output corresponding to the interval between the thrust bearing and the back plate (240), wherein load change is recognized according to output change, and thereby controlling the load.
Description
Technical field
The present invention relates to be installed in the chuck table mechanism on the processing unit (plant).
Background technology
Integrated circuit), LSI (large scaleintegration: the wafer of device such as large scale integrated circuit) be formed with IC (Integrated Circuit: on the surface, be cut after forming predetermined thickness at the grinding back side, thereby be divided into device one by one.
When the grinding of the back side of wafer, under the state that the back side is exposed, wafer is remained on the chuck table of grinding attachment.Then, make the back side of the grinding grinding stone contact wafer that is connected with rotating shaft and rotates, and push wafer, come this back side of grinding thus with predetermined pressure.During grinding, utilize the pressure gauge that sets at the position of support chuck workbench to measure to the chuck table applied pressure.And,, control from the grinding grinding stone to wafer applied pressure (for example, with reference to patent documentation 1) by this measured value being controlled to be the value of expectation.
Patent documentation 1: TOHKEMY 2001-138219 communique
But, because above-mentioned pressure gauge is in the state of always being pushed by chuck table, so exist the possibility height, the measured value that cause malfunction to lack reliability problems.In addition, because the pressure gauge of directly pushing breaks down, needs replacing more continually easily, so also there is uneconomic problem.When such problem was not limited to grinding, it was the problem that generally produces in the processing of using pressing force.
Summary of the invention
Therefore, the problem that the present invention will solve is, in the processing unit (plant) of processing that machined object is exerted pressure, can utilize the mechanism of reliability height and economical to add the pressure control in man-hour.
The present invention relates to a kind of chuck table mechanism, it is at least by constituting with lower member: rotating shaft; Housing, it has radial bearing radially that utilizes the air supporting rotating shaft and the axial thrust bearing that utilizes the air supporting rotating shaft; And maintaining part, it keeps wafer at front end of rotating shaft, and thrust bearing is by constituting with lower member: support plate, it is formed on the rotating shaft, and has the first plate face and the second plate face with the axle center quadrature of rotating shaft; First support portion, it sprays air to the first plate face, and supports the first plate face by air; And second support portion, it is to second plate face ejection air, and support the second plate face by air, on first support portion or second support portion, has corresponding output link at interval, this at interval corresponding output link output is corresponding to the information at the interval between first support portion and the first plate face, perhaps corresponding to the information at the interval between second support portion and the second plate face, at interval be connected with the load change detection means on the corresponding output link, this load change detection means by detecting the interval between first support portion and the first plate face variation or the variation at the interval between second support portion and the second plate face detect the variation that is applied to the load on the rotating shaft.
As the corresponding output link in interval, can use for example electrostatic transducer.
Constitute in the present invention: on first support portion or second support portion that constitute thrust bearing, be equipped with corresponding output link at interval, this at interval corresponding output link output is corresponding to the information at the interval between first support portion and the first plate face, perhaps corresponding to the information at the interval between second support portion and the second plate face, on the corresponding output link in interval, be connected with the load change detection means, this load change detection means by detecting the interval between first support portion and the first plate face variation or the variation at the interval between second support portion and the second plate face detect the variation that is applied to the load on the rotating shaft, so according to the variation at the interval between first support portion and the first plate face or the variation at the interval between second support portion and the second plate face, come in the load change detection means, to detect variation, and can carry out control based on testing result to the load of rotating shaft.Therefore, do not have pressing force and act directly on corresponding output link in interval and the load change detection means,, can improve reliability so they can not carry out malfunction.In addition, owing to be difficult for breaking down, the necessity of replacing also reduces, so very economical.
Description of drawings
Fig. 1 is the stereogram of an example of expression grinding attachment.
Fig. 2 is the profile of the structure of expression chuck table mechanism.
Label declaration:
1: grinding attachment; 2: chuck table mechanism; 20: maintaining part; 20a: suction road; 21: rotating shaft; 22: housing; 23: radial bearing; 24: thrust bearing; 240a: the first plate face; 240b: the second plate face; 241: the first support portions; 241a: ejiction opening; 241b: lower surface; 242: the second support portions; 242a: ejiction opening; 242b: upper surface; 25: air flow channel; 26: the first corresponding output links in interval; 27: the second corresponding output links in interval; 28: the load change detection means; 3: the grinding member; 30: main shaft; 31: the main shaft housing; 32: wheel seat; 34: the grinding grinding stone; 35: motor; 4: grinding and feeding member 40: ball-screw; 41: pulse motor; 42: guide rail; 43: lifter plate; 44 support portions; 5: control member.
Embodiment
An example as the processing unit (plant) that chuck table mechanism of the present invention has been installed describes grinding attachment shown in Figure 11.This grinding attachment 1 has: the chuck table mechanism 2 that keeps wafer W; The grinding member 3 that the wafer W that remains on the chuck table mechanism 2 is carried out grinding; Grinding member 3 is moved in vertical direction to carry out the grinding and feeding member 4 of grinding and feeding; And the control member 5 of control grinding and feeding member 4.
Chuck table mechanism 2 has the maintaining part 20 that keeps wafer, and maintaining part 20 is rotatable and can move in the horizontal direction.
Grinding member 3 is by constituting with lower member: the main shaft 30 with axle center of vertical direction; Main shaft 30 is supported for rotatable main shaft housing 31; The wheel seat 32 that forms at the front end of main shaft 30; Be fixed on the Grinding wheel 33 on the wheel seat 32; Be fastened on the grinding grinding stone 34 of the lower surface of Grinding wheel 33; And the motor 35 of driving main shaft 30.Motor 35 is driven under the control of control member 5.
Grinding and feeding member 4 is by constituting with lower member: the ball-screw 40 that sets in vertical direction; Be connected in the pulse motor 41 of an end of ball-screw 40; The pair of guide rails 42 that sets abreast with ball-screw 40; Lifter plate 43, its inner nut (not shown) screws togather with ball-screw 40, and its sidepiece and guide rail 42 sliding contacts; And support portion 44, it is connected with lifter plate 43, and supports main shaft housing 31, and this grinding and feeding member 4 is such structure: by being driven by pulse motor 41 ball-screw 40 is rotated, lifter plate 43 is being guided lifting by guide rail 42,3 liftings thereupon of support portion 44 and grinding member.Pulse motor 41 is driven under the control of control member 5.
As shown in Figure 2, chuck table mechanism 2 has: through aspirating the maintaining part 20 that road 20a is communicated with suction source; Rotating shaft 21 with axle center of vertical direction; And rotating shaft 21 is supported for rotatable housing 22.On housing 22, have: with the air radial bearing 23 of supporting rotating shaft 21 diametrically; With with the air thrust bearing 24 of supporting rotating shaft 21 in the axial direction.
Radial bearing 23 is made of a plurality of ejiction openings 230 to the axle center of rotating shaft 21 ejection air on the inner peripheral surface of housing 22, and these ejiction openings 230 are communicated with air flow channel 25.
On the other hand, thrust bearing 24 is by constituting with the lower part: support plate 240, and itself and rotating shaft 21 form as one, and have the first plate face 240a and the second plate face 240b with the axle center quadrature of rotating shaft 21; First support portion 241, it sprays air from ejiction opening 241a to the first plate face 240a of support plate 240, and supports the first plate face 240a by this air; And second support portion 242, it to the second plate face 240b of support plate 240 ejection air, and supports the second plate face 240b by this air from ejiction opening 242a.
Support plate 240 is bigger than the diameter of the column part of rotating shaft 21, and forms discoideusly, also relatively makes diameter become big in the interior week of housing 22 therewith.And the diameter in interior week of housing 22 becomes big part, is formed with ejiction opening 241a, 242a to vertical direction (axis direction of rotating shaft 21) ejection pressure-air.Ejiction opening 241a, 242a are communicated with air flow channel 25, and are communicated with not shown pressure-air supply source by air flow channel 25.First support portion 241 and second support portion 242 be supporting rotating shaft 21 in the axial direction by supporting support plate 240.
On first support portion 241, be equipped with the first corresponding output link 26 at interval, this first at interval corresponding output link 26 be used to measure interval between the lower surface 241b of the first plate face 240a and first support portion 241.On the other hand, on second support portion 242, be equipped with the second corresponding output link 27 at interval, this second at interval corresponding output link 27 be used to measure interval between the upper surface 242b of the second plate face 240b and second support portion 242.
As the corresponding output link 27 of the first corresponding output link 26 in interval and second interval, for example, can use the electrostatic transducer of output and the corresponding voltage of variation of electrostatic capacitance, the information such as voltage that interval D between the upper surface 242b of the lower surface 241b of output and first support portion 241 and the interval D 1 between the first plate face 240a, second support portion 242 and the second plate face 240b 2 is corresponding.This output is being carried out all the time.Have again, in examples shown, have corresponding output link 26,27 at interval on first support portion 241 and second support portion 242 respectively, only on the either party of first support portion 241 or second support portion 242, have corresponding output link at interval but also can constitute.
As shown in Figure 1, the first corresponding output link 26 in interval and second corresponding output link 27 at interval is electrically connected with load change detection means 28, and the information of exporting from the corresponding output link 27 of the first corresponding output link 26 in interval and second interval always is transferred into load change detection means 28.Load change detection means 28 has CPU, memory etc., load change detection means 28 will from first at interval corresponding output link 26 and second at interval the value of the voltage that sends of corresponding output link 27 etc. be stored in the memory, and this stored voltage value and up-to-date magnitude of voltage are compared, under the different situation of two sides value, be judged as interval D shown in Figure 21, D2 variation, variation has taken place in the load that is applied on the rotating shaft 21.
Load change detection means 28 is connected with control member 5, in control member 5, according to the judged result in the load change detection means 28, come 41 pairs of grinding members of control impuls motor 3 to carry out grinding and feeding, make from the value of the first corresponding output link 26 in interval and second at interval corresponding output link 27 outputs to keep constant FEEDBACK CONTROL.
The action of the grinding attachment 1 during to grinding wafer describes, and on maintenance face 20, the state that exposes with the back side keeps the wafer W as the grinding object.Then, the horizontal direction of this wafer W by chuck table 2 move to grinding member 3 under.
Then, under the control of control member 5, thereby drive motor 35 makes main shaft 30 rotations make 34 rotations of grinding grinding stone, and the pulse motor 41 of driving formation grinding and feeding member 4 descends grinding member 3.Under grinding grinding stone 34 state that contact wafer W ground does not rotate, interval D shown in Figure 21 and interval D 2 are remained equal value (for example 10 μ m).
On the other hand, when grinding member 3 descend make rotation grinding grinding stone 34 contact wafers the back side, when 34 pairs of wafer W of grinding grinding stone apply pressing force and come this back side of grinding, to the rotating shaft 21 that constitutes chuck table mechanism 2 imposed load downwards, so the value of interval D 1 increases to for example 11 μ m, the value of interval D 2 is reduced to for example 9 μ m.The value of keeping interval D 1 be the value of 11 μ m, interval D 2 be 9 μ m state during, carry out under the situation of grinding based on suitable load thinking, as long as grinding member 3 is slowly descended.This moment from the at interval corresponding output link 26 and second at interval the value (hereinafter referred to as " normal value ") of the output of corresponding output link 27 be stored in the load change detection means 28.
When continuing grinding, be that the value of 13 μ m, interval D 2 is 7 μ m for example in the value of interval D 1, the difference of two values becomes under the big situation, from first at interval corresponding output link 26 and second at interval the value of the output of corresponding output link 27 also change, load change detection means 28 recognizes this variation.At this moment, control member 5 carries out the control of grinding and feeding member 4 so that from first at interval corresponding output link 26 and second at interval the value of the output of corresponding output link 27 get back to normal value.Specifically, before the measured value of the corresponding output link 27 of the first corresponding output link 26 in interval and second interval is got back to normal value, control member 5 slows down by making the feed speed based on the grinding member 3 of the driving of pulse motor 41, weakens the pressure to wafer W.By continuing such control, from first at interval corresponding output link 26 and second at interval the value of the output of corresponding output link 27 get back to normal value.And load change detection means 28 is also proceeded same supervision afterwards, makes the output from the corresponding output link 27 of the first corresponding output link 26 in interval and second interval be maintained normal value.
Like this, by being provided in the corresponding output link 26 in first interval on first support portion 241, the corresponding output link 27 in second interval being provided on second support portion 242, variation with test load, can do not make pressing force act directly on first at interval corresponding output link 26 and second adjust pressure at interval under the situation on the corresponding output link 27 to wafer W.Therefore, the first corresponding output link 26 in interval and second corresponding output link 27 at interval can not carry out malfunction, can improve reliability, and because fault reduces, changes the frequency reduction, therefore very economical.
Have again,, except corresponding output link at interval, also can use the transducer that can send laser etc. and obtain distance according to the time till its reverberation arrival as corresponding output link 26,27 at interval.Under this situation, in the corresponding output link 26,27 in interval, can directly obtain interval D 1, D2.Therefore, as long as the operator imports the limiting value of the interval D 1 that needs the load adjustment, D2 in advance and is stored in the load change detection means 28, when the value at the interval that can recognize in the corresponding output link 26,27 in interval reaches the limiting value of storage in advance, utilize control member 5 to carry out the adjustment of grinding and feeding member 4.
In addition, even corresponding output link 26,27 can not directly be obtained under the situation of interval D 1, D2 at the interval, as long as the corresponding relation between the voltage of interval and output is stored in the load change detection means 28 in advance, can need the interval D 1 of load adjustment, the limiting value of D2 to come suitably control load by direct input and storage with above-mentioned the same ground.Have again, if the corresponding relation between the value of interval D 1, D2 and load also is stored in the load change detection means 28, then by importing the load limitation value that needs load control by the operator in advance and it being stored in the load change detection means 28, also can carry out based on the direct control that whether surpasses the limiting value of load.
Claims (2)
1. chuck table mechanism, it is at least by constituting with lower member: rotating shaft; Housing, it has and utilizes air to support the radial bearing radially of above-mentioned rotating shaft and utilize air to support the axial thrust bearing of above-mentioned rotation; And maintaining part, its front end at above-mentioned rotating shaft keeps wafer, it is characterized in that,
Above-mentioned thrust bearing is by constituting with lower member: support plate, and it is formed on the above-mentioned rotating shaft, and has the first plate face and the second plate face with the axle center quadrature of above-mentioned rotating shaft; First support portion, it sprays air to the above-mentioned first plate face, and supports the above-mentioned first plate face by this air; And second support portion, it is to above-mentioned second plate face ejection air, and supports the above-mentioned second plate face by this air,
On above-mentioned first support portion or above-mentioned second support portion, has corresponding output link at interval, this at interval corresponding output link output is corresponding to the information at the interval between above-mentioned first support portion and the above-mentioned first plate face, perhaps corresponding to the information at the interval between above-mentioned second support portion and the above-mentioned second plate face
On the corresponding output link in above-mentioned interval, be connected with the load change detection means, this load change detection means by detecting the interval between above-mentioned first support portion and the above-mentioned first plate face variation or the variation at the interval between above-mentioned second support portion and the above-mentioned second plate face detect the variation that is applied to the load on the above-mentioned rotating shaft.
2. chuck table mechanism according to claim 1 is characterized in that,
The corresponding output link in described interval is made of electrostatic transducer.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007091263A JP2008246628A (en) | 2007-03-30 | 2007-03-30 | Chuck table mechanism |
| JP2007-091263 | 2007-03-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101276776A CN101276776A (en) | 2008-10-01 |
| CN101276776B true CN101276776B (en) | 2011-06-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200810086968 Active CN101276776B (en) | 2007-03-30 | 2008-03-28 | Chuck worktable mechanism |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2008246628A (en) |
| CN (1) | CN101276776B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5335448B2 (en) * | 2009-01-19 | 2013-11-06 | 株式会社ディスコ | Processing equipment |
| CN102269310A (en) * | 2010-06-03 | 2011-12-07 | 北京中电科电子装备有限公司 | Rotating joint |
| JP6018459B2 (en) * | 2012-08-13 | 2016-11-02 | 株式会社ディスコ | Grinding equipment |
| JP6885732B2 (en) * | 2017-01-17 | 2021-06-16 | 株式会社ディスコ | Grinding device |
| JP7235587B2 (en) * | 2019-05-14 | 2023-03-08 | 株式会社ディスコ | Load sensor voltage adjustment method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1498415A (en) * | 2000-10-13 | 2004-05-19 | ��ķ�о�����˾ | Infrared end-point detecting system |
| CN1526163A (en) * | 2001-11-30 | 2004-09-01 | ���������ƴ���ʽ���� | Probe device and probe testing method |
| US6927587B2 (en) * | 2002-08-23 | 2005-08-09 | Tokyo Electron Limited | Probe apparatus |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07259855A (en) * | 1994-03-17 | 1995-10-09 | Hitachi Ltd | Gas bearing turbine with thrust balance chamber |
| AT404192B (en) * | 1996-05-02 | 1998-09-25 | Anton Paar Gmbh | ROTATIONAL VISCOSIMETER |
| JPH1044017A (en) * | 1996-08-01 | 1998-02-17 | Shibayama Kikai Kk | Surface grinding device |
| US6083082A (en) * | 1999-08-30 | 2000-07-04 | Lam Research Corporation | Spindle assembly for force controlled polishing |
| JP2001138219A (en) * | 1999-11-19 | 2001-05-22 | Disco Abrasive Syst Ltd | Grinding apparatus |
| JP4372603B2 (en) * | 2004-04-09 | 2009-11-25 | 三菱原子燃料株式会社 | Method and apparatus for measuring bending of rod-shaped body |
| JP4639644B2 (en) * | 2004-05-26 | 2011-02-23 | 三菱電機株式会社 | Machining apparatus with evacuation function and evacuation method |
-
2007
- 2007-03-30 JP JP2007091263A patent/JP2008246628A/en active Pending
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2008
- 2008-03-28 CN CN 200810086968 patent/CN101276776B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1498415A (en) * | 2000-10-13 | 2004-05-19 | ��ķ�о�����˾ | Infrared end-point detecting system |
| CN1526163A (en) * | 2001-11-30 | 2004-09-01 | ���������ƴ���ʽ���� | Probe device and probe testing method |
| US6927587B2 (en) * | 2002-08-23 | 2005-08-09 | Tokyo Electron Limited | Probe apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101276776A (en) | 2008-10-01 |
| JP2008246628A (en) | 2008-10-16 |
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