CN101468506A - Bulk production method of micro-fluidic chip - Google Patents

Bulk production method of micro-fluidic chip Download PDF

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CN101468506A
CN101468506A CNA2008101151412A CN200810115141A CN101468506A CN 101468506 A CN101468506 A CN 101468506A CN A2008101151412 A CNA2008101151412 A CN A2008101151412A CN 200810115141 A CN200810115141 A CN 200810115141A CN 101468506 A CN101468506 A CN 101468506A
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micro
mould
fluidic chip
quiet
core rod
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CN101468506B (en
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邹明强
李勐
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Chinese Academy of Inspection and Quarantine CAIQ
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Abstract

The invention relates to a batch production method for a micro-flow control chip. The method comprises: a mould core made of a hard alloy material is selected; the temperature of a left movable mould core part, a left static mould core part, a right movable mould core part, a right static mould core part, a movable mould and a static mould is kept at a temperature of between 85 and 115 DEG C; a superpolymer material is evenly spread according to the thickness of between 1 and 5 centimeters and is dried for 6 to 8 hours at a temperature of between 70 and 75 DEG C; in a cleaning room with 10 thousand level to 100 thousand level at ambient temperature of between 20 and 25 DEG C, a material in a molten state is injected into the middle parts between the left movable mould core part and the left static mould core part and between the right movable mould core part and the right static mould core part; under the conditions at a speed of between 80 and 100 mm/s and pressure of between 40 and 60 MPa, the superpolymer material is injected; the whole injection time is between 27 and 33 seconds; the chip is taken out and is disinfected and sterilized; and finally, a left micro-flow control chip and a right micro-flow control chip are bonded. The method can manufacture the micro-flow control chip in large batch and promote application of micro-flow control chip technology and industrialized development.

Description

The batch manufacturing method of micro-fluidic chip
Technical field
The present invention relates to a kind of batch manufacturing method of micro-fluidic chip, particularly a kind of batch manufacturing method of precise injection molding of high polymer material material micro-fluidic chip.
Background technology
The work in fields such as food safety detection, inspection and quarantine, environmental monitoring presses for that development can be operated at the scene, the rapid screening detection means.Micro-fluidic chip (Microfluidic chip) technology is the analysis science and technology forward position that eighties of last century grows up the nineties, it adopts micro-processing technology, on the substrate of several square centimeters of sizes, produce little raceway groove network structure and other functional unit, with sample preparation, sample introduction, dilution, reaction, separate, being integrated on the microchip of Laboratory Function such as detection, promptly so-called " micro-total analysis system Miniaturized total analysis system; μ TAS) ", also claim " chip lab (Lab-on-chip) ", has portability, advantages such as integrated and automation, the potential scene of accomplishing, original position, implement in real time to detect, monitoring, has applicability widely, provide a kind of more easy, fast, " green " analysis means accurately, therefore, the micro-fluid chip technology is described as " one of human 15 following most important inventions of influence ".
This technology since the people such as Manz of 90 years Switzerland Chiba-Geigy companies propose first 18 in the period of obtained develop rapidly, yet the development of this technology is in the stage of pacing up and down since nearly 5 years, distinct issues are: successful application and industrialization.Up to now, the commercially produced product that does not still have a micro-fluid chip analyzing and testing truly both at home and abroad.The major technique bottleneck is low cost, the batch manufacturing technology difficult problem of chip, has directly influenced this The Application of Technology and industrialized development.
Substrate and cover plate are made in the making of micro-fluidic chip usually earlier, are formed by substrate and cover plate bonding again.The making of micro-fluidic chip substrate and cover plate at present continues to use mainly that micro electronmechanical (Microelectronic MechanicalSystems, the MEMS) inorganic material of technology preparation is as monocrystalline silicon, glass etc.Although this type of chip manufacture fineness height, and fine structure is dark/and wide ratio can be done very greatly, because: (one) inorganic material surface both had been difficult for combining with biomolecule, also was difficult for carrying out functional modification; (2) when substrate and cover plate bonding, cause the micro-structural distortion of chip product unavoidably; (3) Fu Za manufacture craft is difficult to form production in enormous quantities, causes the chip cost height, has limited application and industrialized development.Because high polymer has advantages such as cheap, that processing method is various, more and more becomes the first-selection of microchip material.Use more high polymer material to comprise polystyrene (PS), dimethyl silicone polymer (PDMS), polymethyl methacrylate (PMMA), low density polyethylene (LDPE), polypropylene (PC) and PET (PET) etc. at present.Wherein, polystyrene is good to the protein adsorption performance, translucidus is good and with low cost, is the general selection of ELISA ELISA Plate.Shrinkage factor is little, thereby change in size difference is little.
Yet, make the micro-fluidic chip not a duck soup with high polymer material, main because high polymer material is hard, vitrification point low (between 74-105 ℃), molten condition flowability are bigger, on the one hand, more subject to damage with the fashionable chip microchannel structure of traditional MEMS technical key; On the other hand, be difficult to guarantee flatness and fineness in substrate and the cover plate manufacturing process and directly influence the bonding of chip.Therefore, the chip of bibliographical information mostly is greatly and makes by hand at present, and technological level is low, is difficult to realize manufacturing in enormous quantities, can't satisfy daily substantive test requirements of one's work.
Summary of the invention
The objective of the invention is to solve present micro-fluidic chip can not batch making a difficult problem, and provide a kind of easy, batch manufacturing method of micro-fluidic chip fast.
In order to realize the application's goal of the invention, the batch manufacturing method of micro-fluidic chip of the present invention, wherein: described method comprises:
(a) selecting surface finish for use is the core rod of the Hardmetal materials of 0.02-0.06 micron, and this core rod comprises: left moving-mould-core part, left quiet core rod part, right moving-mould-core part and right quiet core rod part,
(b) above-mentioned left moving-mould-core part and right moving-mould-core part are put into dynamic model respectively, quiet core rod part in an above-mentioned left side and right quiet core rod part are put into quiet mould respectively, close dynamic model and quiet mould, and the temperature of above-mentioned left moving-mould-core part, left quiet core rod part, right moving-mould-core part, right quiet core rod part, dynamic model and quiet mould is remained between 85-115 ℃
(c) high polymer material is opened by a thickness 1-5 centimetre uniform spreading, descended dry 6-8 hour, to reduce the moisture content in the high polymer material at 70-75 ℃;
(d) in environment temperature is ten thousand grades to 100,000 grades toilets under 20-25 ℃, high polymer material in the step (c) is injected into respectively between left moving-mould-core part and the left quiet mould core portion branch at the accurate electric injection molding machine that is not less than 400KN under the molten condition by clamp force, and between right moving-mould-core part and the right quiet mould core portion branch; Injection machine comprises: vertical feeding cylinder, horizontal barrel and discharging opening, in the horizontal barrel screw rod is housed, discharging opening is aimed at the injection port between dynamic model and the quiet mould, the temperature of vertical feeding cylinder remains on 30-80 ℃, the temperature of horizontal barrel remains on 205-215 ℃, the temperature of discharging opening remains on 195-205 ℃
(e) injection machine is under 80-100mm/s and the condition of pressure at 40-60Mpa at issuing velocity, injects high polymer material, and keeps 1s; Be under 40-70mm/s and the condition of pressure at issuing velocity then, inject high polymer material, and keep 0.8s at 20-30Mpa; Afterwards successively, keep 1s under the condition of pressure 20-30Mpa, keep 0.8s under the condition of pressure 20-30Mpa, after progressively 20 ± 5s was cooled off in release again, the screw rod feed back was opened dynamic model (5) and quiet mould, and whole injection time is 30 ± 3s,
(f) between dividing, and after right moving-mould-core part and right quiet mould core portion take out left micro-fluidic chip and right micro-fluidic chip between dividing, with the said goods degerming of killing virus from left moving-mould-core part and left quiet mould core portion;
(g) with left micro-fluidic chip and right micro-fluidic chip bonding;
The batch manufacturing method of micro-fluidic chip of the present invention, wherein: the bonding in the described step (g) is with Weak solvent bonding, thermocompression bonding, supersonic bonding, electrostatic bonding mode left micro-fluidic chip and right micro-fluidic chip to be bonded together;
The batch manufacturing method of micro-fluidic chip of the present invention, wherein: in the described step (d) ten thousand grades of toilets be in every cubic metres of air more than or equal to 0.5 micron grit number less than 35 * 10000 and more than or equal to 5 microns grit numbers smaller or equal to 2500,100,000 grades of toilets be in every cubic metres of air more than or equal to 0.5 micron grit number less than 35 * 100000 and more than or equal to 5 microns grit numbers smaller or equal to 5000;
The batch manufacturing method of micro-fluidic chip of the present invention, wherein: the core rod in the described step (a) is a J05 type hard alloy steel, and its hardness is 93.5HRA, and fracture resistence force is 1320MPa.The power of extending is 3830MPa for the 740MPa. compressive strength, and impact strength is 7 kilograms per centimeter 3
The batch manufacturing method of micro-fluidic chip of the present invention, wherein: the temperature of vertical feeding cylinder keeps by recirculated water in the described step (d); The temperature of horizontal barrel and discharging opening is to measure by temperature probe, keeps by resistance wire;
The batch manufacturing method of micro-fluidic chip of the present invention, wherein: the virus killing degerming in the described step (f) adopts ultraviolet ray or oxirane to carry out;
The batch manufacturing method of micro-fluidic chip of the present invention, wherein: described injection machine is injected into high polymer material between left moving-mould-core part and the left quiet mould core portion branch by runner, and between right moving-mould-core part and the right quiet mould core portion branch;
The batch manufacturing method of micro-fluidic chip of the present invention, wherein: the time of screw rod feed back is 5s in the described step (e), and the time of die sinking is 1s;
The batch manufacturing method of micro-fluidic chip of the present invention, wherein: described high polymer material comprises: polystyrene (PS), dimethyl silicone polymer (PDMS), polymethyl methacrylate (PMMA), low density polyethylene (LDPE), polypropylene (PC) or PET (PET);
The batch manufacturing method of micro-fluidic chip of the present invention, wherein: have air-vent on the described runner, to avoid producing bubble in the core rod.
The batch manufacturing method of micro-fluidic chip of the present invention is compared with existing micro-fluidic chip, the present invention can use the micro-fluidic chip of high polymer material making cheaply, guarantee the substrate of chip and the contacted surface of cover plate has good flatness and fineness is beneficial to chip bonding, can make the substrate of micro-fluidic chip in enormous quantities, manufacturing speed is fast, and make substrate and cover plate be easy to bonding and make micro-fluidic chip, thereby promote micro-fluidic chip The Application of Technology and industrialized development.
Description of drawings
When Fig. 1 carries out injection moulding for the batch manufacturing method that uses micro-fluidic chip of the present invention, the schematic diagram of injection machine and mould;
Fig. 2 is Fig. 1 bowing to schematic diagram at mould A-A place.
For the sake of clarity above-mentioned two figure all proportionally do not draw.
The specific embodiment
Good shown in Figure 2 as Fig. 1, the batch manufacturing method of micro-fluidic chip of the present invention uses accurate electric injection molding machine and mould.This injection machine comprises: vertical feeding cylinder 7, horizontal barrel 8 and discharging opening 9, in the horizontal barrel 8 screw rod 11 is housed, mould comprises: dynamic model 5 and quiet mould 6 and core rod, this core rod comprises: left moving-mould-core part 1, left quiet core rod part 2, right moving-mould-core part 3 and right quiet core rod part 4.The injection port 10 that discharging opening 9 is aimed between dynamic model 5 and the quiet mould 6.
The batch manufacturing method of micro-fluidic chip of the present invention may further comprise the steps:
(a) selecting surface finish for use is the core rod of the Hardmetal materials of 0.02-0.06 micron, and core rod is a J05 type hard alloy steel, and its hardness is 93.5HRA, and fracture resistence force is 1320MPa.The power of extending is 3830MPa for the 740MPa. compressive strength, and impact strength is 7 kilograms per centimeter 3
(b) above-mentioned left moving-mould-core part 1 and right moving-mould-core part 3 are put into dynamic model 5 respectively, quiet core rod part 2 in an above-mentioned left side and right quiet core rod part 4 are put into quiet mould 6 respectively, close dynamic model 5 and quiet mould 6, and the temperature of above-mentioned left moving-mould-core part 1, left quiet core rod part 2, right moving-mould-core part 3, right quiet core rod part 4, dynamic model 5 and quiet mould 6 is remained between 85-115 ℃, preferably remain on 105 ℃;
(c) polystyrene is opened by a thickness 1-5 centimetre uniform spreading, descended dry 6-8 hour,, avoid the generation of bubble to reduce the moisture content in the polystyrene at 70-75 ℃;
D) be under 20-25 ℃ in environment temperature, be preferably under 23 ℃, in ten thousand grades to 100,000 grades toilets, ten thousand grades of toilets be in every cubic metres of air more than or equal to 0.5 micron grit number less than 35 * 10000 and more than or equal to 5 microns grit numbers smaller or equal to 2500,100,000 grades of toilets be in every cubic metres of air more than or equal to 0.5 micron grit number less than 35 * 100000 and more than or equal to 5 microns grit numbers smaller or equal to 5000, polystyrene in the step (c) is injected into respectively between left moving-mould-core part 1 and the left quiet core rod part 2 at the accurate electric injection molding machine that is not less than 400KN under the molten condition by clamp force, and between right moving-mould-core part 3 and the right quiet core rod part 4, injection machine is injected into polystyrene between left moving-mould-core part 1 and the left quiet core rod part 2 by runner 12, and between right moving-mould-core part 3 and the right quiet core rod part 4, for fear of in core rod, producing bubble, have air-vent on the runner 12, the temperature of vertical feeding cylinder 7 remains on 30-80 ℃, preferably remain between 40-60 ℃, the temperature of horizontal barrel 8 remains on 205-215 ℃, the temperature of discharging opening 9 remains on 195-205 ℃, and the temperature of vertical feeding cylinder 7 keeps by recirculated water; The temperature of horizontal barrel 8 and discharging opening 9 is to measure by temperature probe, keeps by resistance wire;
(e) injection machine is under 80-100mm/s and the condition of pressure at 40-60Mpa at issuing velocity, injects polystyrene, and keeps 1s; Be under 40-70mm/s and the condition of pressure at issuing velocity then, inject polystyrene, and keep 0.8s at 20-30Mpa; Afterwards successively, under the condition of pressure 20-30Mpa, keep 1s, under the condition of pressure 20-30Mpa, keep 0.8s, after progressively 20 ± 5s is cooled off in release again, the 11 feed back times of screw rod are 5s, and the time of opening dynamic model 5 and quiet mould 6 is 1s, and whole injection time is 30 ± 3s;
(f) between left moving-mould-core part 1 and the left quiet core rod part 2, and after taking out left micro-fluidic chip and right micro-fluidic chip between right moving-mould-core part 3 and the right quiet core rod part 4, the said goods is adopted the degerming of killing virus of ultraviolet ray or oxirane;
(g) left micro-fluidic chip and right micro-fluidic chip are bonded together with Weak solvent bonding, thermocompression bonding, supersonic bonding, electrostatic bonding mode, it is that the ZL200480039700.6 patent is disclosed with the bonding mode of Weak solvent with left micro-fluidic chip promptly that Weak solvent bonding mode wherein can adopt number of patent application: substrate or cover plate and right micro-fluidic chip promptly: cover plate or substrate are bonded together, and form micro-fluidic chip.
Present embodiment is that example describes with the polystyrene, except that polystyrene, can also comprise: dimethyl silicone polymer (PDMS), polymethyl methacrylate (PMMA), low density polyethylene (LDPE), polypropylene (PC) or PET (PET);
More than describing is explanation of the invention, is not that institute of the present invention restricted portion is referring to claim to the qualification of invention, and under the situation of spirit of the present invention, the present invention can do any type of modification.

Claims (10)

1. the batch manufacturing method of a micro-fluidic chip, it is characterized in that: described method comprises:
(a) selecting surface finish for use is the core rod of the Hardmetal materials of 0.02-0.06 micron, and this core rod comprises: left moving-mould-core part (1), left quiet core rod part (2), right moving-mould-core part (3) and right quiet core rod part (4);
(b) above-mentioned left moving-mould-core part (1) and right moving-mould-core part (3) are put into dynamic model (5) respectively, quiet core rod part in an above-mentioned left side (2) and right quiet core rod part (4) are put into quiet mould (6) respectively, close dynamic model (5) and quiet mould (6), and the temperature of above-mentioned left moving-mould-core part (1), left quiet core rod part (2), right moving-mould-core part (3), right quiet core rod part (4), dynamic model (5) and quiet mould (6) is remained between 85-115 ℃;
(c) high polymer material is opened by a thickness 1-5 centimetre uniform spreading, descended dry 6-8 hour, to reduce the moisture content in the high polymer material at 70-75 ℃;
(d) in environment temperature is ten thousand grades to 100,000 grades toilets under 20-25 ℃, high polymer material in the step (c) is injected into respectively between left moving-mould-core part (1) and the left quiet core rod part (2) at the accurate electric injection molding machine that is not less than 400KN under the molten condition by clamp force, and between right moving-mould-core part (3) and the right quiet core rod part (4); Injection machine comprises: vertical feeding cylinder (7), horizontal barrel (8) and discharging opening (9), screw rod (11) is housed in the horizontal barrel (8), discharging opening (9) is aimed at the injection port (10) between dynamic model (5) and the quiet mould (6), the temperature of vertical feeding cylinder (7) remains on 30-80 ℃, the temperature of horizontal barrel (8) remains on 205-215 ℃, and the temperature of discharging opening (9) remains on 195-205 ℃;
(e) injection machine is under 80-100mm/s and the condition of pressure at 40-60Mpa at issuing velocity, injects high polymer material, and keeps 1s; Be under 40-70mm/s and the condition of pressure at issuing velocity then, inject high polymer material, and keep 0.8s at 20-30Mpa; Afterwards successively, keep 1s under the condition of pressure 20-30Mpa, keep 0.8s under the condition of pressure 20-30Mpa, after progressively 20 ± 5s was cooled off in release again, screw rod (11) feed back was opened dynamic model (5) and quiet mould (6), and whole injection time is 30 ± 3s;
(f) between left moving-mould-core part (1) and the left quiet core rod part (2), and right moving-mould-core part (3) and right quiet core rod be partly between (4) behind left micro-fluidic chip of taking-up and the right micro-fluidic chip, with the said goods degerming of killing virus;
(g) with left micro-fluidic chip and right micro-fluidic chip bonding.
2. the batch manufacturing method of micro-fluidic chip as claimed in claim 1, it is characterized in that: the bonding in the described step (g) is with Weak solvent bonding, thermocompression bonding, supersonic bonding, electrostatic bonding mode left micro-fluidic chip and right micro-fluidic chip to be bonded together.
3. the batch manufacturing method of micro-fluidic chip as claimed in claim 1, it is characterized in that: in the described step (d) ten thousand grades of toilets be in every cubic metres of air more than or equal to 0.5 micron grit number less than 35 * 10000 and more than or equal to 5 microns grit numbers smaller or equal to 2500,100,000 grades of toilets be in every cubic metres of air more than or equal to 0.5 micron grit number less than 35 * 100000 and more than or equal to 5 microns grit numbers smaller or equal to 5000.
4. the batch manufacturing method of micro-fluidic chip as claimed in claim 1, it is characterized in that: the core rod in the described step (a) is a J05 type hard alloy steel, its hardness is 93.5HRA, fracture resistence force is 1320MPa, the tension force of extending is 3830MPa for the 740MPa. compressive strength, and impact strength is 7 kilograms/cubic centimetre.
5. the batch manufacturing method of micro-fluidic chip as claimed in claim 1 is characterized in that: the temperature of vertical feeding cylinder (7) keeps by recirculated water in the described step (d); The temperature of horizontal barrel (8) and discharging opening (9) is to measure by temperature probe, keeps by resistance wire.
6. the batch manufacturing method of micro-fluidic chip as claimed in claim 1 is characterized in that: the virus killing degerming in the described step (f) adopts ultraviolet ray or oxirane to carry out.
7. the batch manufacturing method of micro-fluidic chip as claimed in claim 1, it is characterized in that: described injection machine is injected into high polymer material between left moving-mould-core part (1) and the left quiet core rod part (2) by runner (12), and between right moving-mould-core part (3) and the right quiet core rod part (4).
8. the batch manufacturing method of micro-fluidic chip as claimed in claim 1 is characterized in that: the time of screw rod (11) feed back is 5s in the described step (e), and the time of die sinking is 1s.
9. the batch manufacturing method of micro-fluidic chip as claimed in claim 1, it is characterized in that: described high polymer material comprises: polystyrene (PS), dimethyl silicone polymer (PDMS), polymethyl methacrylate (PMMA), low density polyethylene (LDPE), polypropylene (PC) or PET (PET).
10. the batch manufacturing method of micro-fluidic chip as claimed in claim 7, it is characterized in that: described runner has air-vent on (12), to avoid producing bubble in the core rod.
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CN101823686A (en) * 2010-04-21 2010-09-08 大连理工大学 Sealing method of thermoplastic polymer multi-layer micro-fluidic chips
CN101863104A (en) * 2010-05-26 2010-10-20 大连理工大学 Injection molding process of plastic microfluidic chip
CN102179831A (en) * 2011-04-06 2011-09-14 哈尔滨工业大学 Micro-channel processing equipment of microfluidic chip
CN102502091A (en) * 2011-10-27 2012-06-20 广州科甫眼镜有限公司 Storing and placing appliance of transparent contact lens with magnifying function and preparation method thereof
CN101791840B (en) * 2010-01-08 2012-09-12 大连理工大学 Movable-molding cavity injection-pressing moulding method of plastic microfluidic chip
CN105399051A (en) * 2015-12-29 2016-03-16 南京洁态环保科技有限公司 Method for packaging microfluidic chip with cyclo-olefin copolymer (COC) substrate and COC upper cover
CN106671346A (en) * 2016-12-30 2017-05-17 北京化工大学 Injection moulding method of polydimethylsiloxane microfluidics chip
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CN101791840B (en) * 2010-01-08 2012-09-12 大连理工大学 Movable-molding cavity injection-pressing moulding method of plastic microfluidic chip
CN101823686A (en) * 2010-04-21 2010-09-08 大连理工大学 Sealing method of thermoplastic polymer multi-layer micro-fluidic chips
CN101823686B (en) * 2010-04-21 2012-07-04 大连理工大学 Sealing method of thermoplastic polymer multi-layer micro-fluidic chips
CN101863104A (en) * 2010-05-26 2010-10-20 大连理工大学 Injection molding process of plastic microfluidic chip
CN102179831A (en) * 2011-04-06 2011-09-14 哈尔滨工业大学 Micro-channel processing equipment of microfluidic chip
CN102179831B (en) * 2011-04-06 2012-08-01 哈尔滨工业大学 Micro-channel processing equipment of microfluidic chip
CN102502091A (en) * 2011-10-27 2012-06-20 广州科甫眼镜有限公司 Storing and placing appliance of transparent contact lens with magnifying function and preparation method thereof
CN105399051A (en) * 2015-12-29 2016-03-16 南京洁态环保科技有限公司 Method for packaging microfluidic chip with cyclo-olefin copolymer (COC) substrate and COC upper cover
CN106671346A (en) * 2016-12-30 2017-05-17 北京化工大学 Injection moulding method of polydimethylsiloxane microfluidics chip
CN109331191A (en) * 2018-09-10 2019-02-15 浙江大学 A kind of high voltage electric field coupling ultrasonic wave treatment liquid sterilizing test device and method
CN110719826A (en) * 2018-12-10 2020-01-21 深圳大学 Micro-structure mold core of micro-fluidic chip and manufacturing method thereof
WO2020118487A1 (en) * 2018-12-10 2020-06-18 深圳大学 Micro-structure mold core of microfluidic chip and manufacturing method therefor
CN110719826B (en) * 2018-12-10 2021-04-20 深圳大学 Micro-structure mold core of micro-fluidic chip and manufacturing method thereof
US11305277B2 (en) 2018-12-10 2022-04-19 Shenzhen University Micro-structured mold-core of microfluidic chip and its manufacturing method

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