CN101576717B - Exposure apparatus, and device fabricating method - Google Patents

Exposure apparatus, and device fabricating method Download PDF

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Publication number
CN101576717B
CN101576717B CN2009101408816A CN200910140881A CN101576717B CN 101576717 B CN101576717 B CN 101576717B CN 2009101408816 A CN2009101408816 A CN 2009101408816A CN 200910140881 A CN200910140881 A CN 200910140881A CN 101576717 B CN101576717 B CN 101576717B
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substrate
mentioned
liquid
group
optical system
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CN101576717A (en
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小野一也
柴崎祐一
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Nikon Corp
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Nikon Corp
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Abstract

The exposure apparatus is an exposure apparatus that exposes a substrate by filling a liquid between a projection optical system and the substrate, and projecting a pattern image onto the substrate via the projection optical system and the liquid, wherein the projection optical system has a first group comprising an optical member that contacts the liquid, and a second group that differs from thatfirst group; the first group is supported by a first support member; and the second group is separated from the first group and is supported by the second support member that differs from the first s upport member.

Description

Exposure device, device making method
The application is that application number is 200480023880.9, the applying date is on July 8th, 2004, denomination of invention is divided an application for the application for a patent for invention of " coupling apparatus, exposure device, device making method ".
Technical field
The coupling apparatus that the present invention relates to two objects are combined, the exposure device that under the state that is full of with liquid between projection optical system and the substrate, by projection optical system substrate is exposed and the device making method that uses this exposure device.
The application advocates right of priority for Patent 2003-272615 number of proposition on July 9th, 2003 and Patent 2003-281182 number of proposing on July 28th, 2003, and here cites its content.
Background technology
By making semiconductor devices or liquid crystal display device being formed on the so-called photoetching method that the pattern on the mask copies on the photosensitive substrate.The exposure device that uses in this lithography step has the mask platform that supports mask and the Substrate table of supporting substrate, Yi Bian successively mobile mask platform and Substrate table, Yi Bian by projection optical system the pattern of mask is copied on the substrate.In recent years, for the further high integration of respective devices pattern, wish the more high-resolution of projection optical system.The exposure wavelength that uses is shorter, and the numerical aperture of projection optical system is larger in addition, and the exploring degree of projection optical system is higher.Therefore, the exposure wavelength that uses in the exposure device ripple that shortens from year to year, the numerical aperture of projection optical system increases.And the exposure wavelength of main flow is the 248nm of KrF excimer laser now, but the 193nm of short wavelength's ArF excimer laser is also practical.When exposing in addition, same with the exploring degree, the depth of focus (DOF) also becomes important.Exploring degree R, depth of focus δ are represented by following expression formula respectively.
R＝k 1·λ/NA …(1)
δ＝±k 2·λ/NA 2…(2)
At this, λ is exposure wavelength, and NA is the numerical aperture of projection optical system, k 1, k 2It is processing coefficient.From expression formula (1), expression formula (2) as can be known, in order to carry high-resolution R, shorten exposure wavelength lambda, if improve numerical aperture NA, depth of focus δ narrows down.
If it is narrow that depth of focus δ becomes, just be difficult to make substrate surface consistent with the image planes of projection optical system, the focusing boundary during exposure actions might be not enough.Therefore, as shortening in fact exposure wavelength, and enlarge the method for the depth of focus, for example propose disclose in the world immersion method of description in No. 99/49504 pamphlet (document 1).This immersion method is that the liquid such as water or organic solvent are full of between the lower surface and substrate surface of projection optical system, (n is the refractive index of liquid to utilize exposure wavelength in the liquid to become airborne 1/n, be generally about 1.2～1.6), carry high-resolution, and the depth of focus is expanded as approximately n times.It should be noted that, in the scope that the state decree of appointment or selection allows in the application of border home, quote the record content of described document 1, as a part described herein.
But, projection optical system by the end face (end face) of the optical component of substrate one side and substrate surface between be full of under the state of liquid, by the mobile vibration that produces of the Substrate table that the keeps substrate optical component by this terminal of liquid transfer, might be deteriorated by the pattern image that projection optical system and liquid project on the substrate.In addition, by the pressure variation of this liquid, to the projection optical system acting force, the projection optical system change, the pattern image that projects on the substrate might be deteriorated.
Summary of the invention
Existence in view of the above problems, the first purpose of the present invention be, provides the vibration that makes a side can not pass to the opposing party and device that two objects are combined.In addition, the second purpose of the present invention is, provides can suppress to be full of the deteriorated exposure device of pattern image when exposing between projection optical system and the substrate and the device making method that uses this exposure device with liquid.
In order to solve described problem, the following structure that employing of the present invention is related with Fig. 1～Figure 17 shown in the embodiment.But the parenthesized symbol that gives each key element only is the illustration of this key element only, and is not to limit each key element.
The first form of the present invention is a kind of exposure device, be full of between projection optical system (PL) and the substrate (P) with liquid (50), by projection optical system (PL) and liquid (50) pattern image is projected on the substrate (P), substrate (P) is exposed, wherein: projection optical system (PL) comprises first group (60) with the optical component (60) that contacts with liquid (50), second group (MPL) different from first crowd (60), first group (60) are supported on the first supporting member (47), and second group (MPL) is separated to second supporting member (42) different from the first supporting member (47) and supports.
According to this form, in the projection optical system, support discretely respectively with optical component of contact from liquid first group, different with it second group with the first supporting member and the second supporting member, so can separate about vibrating with second group to first group.Therefore, can prevent that first group vibration from passing to second group, prevent the deteriorated of pattern image, can make the device with high pattern precision.
The second form of the present invention is a kind of exposure device, be full of between projection optical system (PL) and the substrate (P) with liquid (50), by projection optical system (PL) and liquid (50) pattern image is projected on the substrate (P), substrate (P) is exposed, wherein: projection optical system (PL) comprises first group (60) with the optical component (60) that contacts with liquid (50), and second group (MPL) different from these first group (60), adjust with respect to the position of second group (MPL) by making first group (60) mobile driving mechanism (48) carry out first group (60).
According to this form, have in the projection optical system from first group of the optical component of liquid contact for being positioned at the desired position with first group of different the second group energy, even so between projection optical system and substrate, be full of liquid, also can prevent the deteriorated of pattern image, make high-precision device.
The 3rd form of the present invention is a kind of coupling apparatus (160), the first object (LS2) and the second object (108) combination, comprising: the parallel bindiny mechanism (160,161) of the first object (LS2) and the second object (108) combination, do not pass to the opposing party for the vibration of the side in the first object (LS2) and the second object (108) and be built in vibration proof mechanism (167,172,173,174) in the bindiny mechanism (160,161).
According to this form, by with the bindiny mechanism of built-in vibration proof mechanism in conjunction with the first object and the second object, can prevent that a side vibration (change) from passing to the opposing party.In addition, by driving bindiny mechanism, can carry out the keeping and adjusting of relative position of the first object and the second object.
The 4th form of the present invention is a kind of exposure device (EX2), at least a portion between projection optical system (PL2) and the substrate (P2) is full of by liquid (101), by projection optical system (PL2) and liquid (101) pattern image is projected on the substrate (P2), substrate (P2) is exposed, wherein: projection optical system (PL2) comprises first group (102) that have at least the optical component that contacts with liquid (101), be configured in second group (MPL2) between first group (102) and the pattern, described exposure device comprises the first retaining member (LS2) that keeps first group (102), the second retaining member (PK2) that separates and keep second group (MPL2) with the first retaining member (LS2), support the framing component (108) of the first retaining member (LS2) and the second retaining member (PK2).
According to this form, separate respectively with the first retaining member and the second retaining member and to keep having and first group of the optical component of liquid contact and with it different second group, so can separate first group and second group about vibrating.Therefore, the vibration that can prevent the first retaining member of first group of maintenance that liquid causes passes to and keeps the second retaining member of second group, prevents the deteriorated of pattern image, can make the device with high pattern precision.
In addition, for example when the structure that the reference mirror (fixed mirror) of the interferometer system of the positional information that is used for the instrumentation Substrate table is installed on the second retaining member, vibration does not pass to the second retaining member, thus can with high precision carry out Substrate table positional information instrumentation and based on this instrumentation result's position control.
The 5th form of the present invention is a kind of exposure device (EX2), by projection optical system (PL2) and liquid (101) exposure illumination is mapped on the substrate (P2), substrate is exposed, wherein: projection optical system (PL2) comprises first group (102) with the optical component that contacts with liquid (101), be configured in second group (MPL2) between first group and the pattern, exposure device (EX2) comprises the first retaining member (LS2) that keeps first group (102), the second retaining member (PK2) that separates and keep second group (MPL2) with the first retaining member (LS2), be used for supporting the framing component (108) of the first retaining member (LS2), have for suppressing the first retaining member (LS2) and be connected 108 with framing component) at least one party vibration vibration proof mechanism (161) and connect the bindiny mechanism (160) of the first retaining member and framing component.
According to this form, separate respectively with the first retaining member and the second retaining member and to keep having and first group of the optical component of liquid contact and with it different second group, so can separate first group and second group about vibrating.Therefore, the vibration that can prevent the first retaining member of first group of maintenance that liquid causes passes to and keeps the second retaining member of second group, prevents the deteriorated of pattern image, can make the device with high pattern precision.
The 6th form of the present invention is a kind of exposure device (EX2), by projection optical system (PL2) and liquid (101) exposure illumination is mapped on the substrate (P2), substrate is exposed, wherein: have the mechanism (110 of in the exposure of substrate (P), only soaking district (AR2) at the part formation liquid of substrate (P), 120), projection optical system (PL2) comprises first group (102) with the optical component that contacts with liquid, be configured in second group (MPL2) between first group and the pattern, first group (102) and second group (MPL2) are supported in vibration discretely.
According to this form, have and first group of the optical component of liquid contact and with it different second group owing in vibration, supporting discretely, so can prevent from passing to second group by first group the vibration that liquid causes, prevent the deteriorated of pattern image, can make the device with high pattern precision.
In addition, the 7th form of the present invention is device making method, and it uses the exposure device (EX) of putting down in writing above.
Description of drawings
Fig. 1 is the summary construction diagram of the embodiment 1 of expression exposure device of the present invention.
Fig. 2 is the figure of the position relationship of the expression top ends of projection optical system and fluid Supplying apparatus and liquid withdrawal system.
Fig. 3 is the figure of the configuration example of expression supply nozzle and recovery nozzle.
Fig. 4 is the skeleton diagram of embodiment 1 of the support structure of expression projection optical system.
Fig. 5 is the skeleton diagram of an example of the support structure of first group of expression.
Fig. 6 is the skeleton diagram of embodiment 2 of the support structure of expression projection optical system.
Fig. 7 is the summary construction diagram of expression exposure device embodiment 2 of the present invention.
Fig. 8 is the figure of the position relationship of the expression top ends of projection optical system and liquid supply mechanism and liquids recovery mechanism.
Fig. 9 is the figure of the configuration example of expression supply nozzle and recovery nozzle.
Figure 10 is the approximate three-dimensional map of expression coupling apparatus.
Figure 11 is the cut-open view that consists of the connecting rod of coupling apparatus.
Figure 12 is the summary construction diagram of instrumentation parts of the positional information of first group of instrumentation of expression.
Figure 13 is the figure of the interferometric example of expression.
Figure 14 is be used to the mode chart that the interferometric feature of two-way shown in Figure 13 is described.
Figure 15 is the mode chart of the interferometric light path of expression.
Figure 16 is the figure of other embodiment of instrumentation parts of the positional information of first group of instrumentation of expression.
Figure 17 is the program flow diagram of an example of the manufacturing step of expression semiconductor devices.
Embodiment
Below, with reference to description of drawings exposure device of the present invention, device making method.But the present invention is not limited to each following embodiment, textural element that for example can these embodiment of appropriate combination.
(embodiment 1 of exposure device)
Fig. 1 is the summary construction diagram of the embodiment 1 of expression exposure device of the present invention.
In Fig. 1, exposure device EX comprises: the control device CONT that supports the Substrate table PST of mask platform MST, the supporting substrate P of mask M, illuminates the lamp optical system IL of the mask M that is supported on the mask platform MST, all actions of exposure device EX are controlled in the projection optical system PL of pattern image projection exposure on the substrate P of Substrate table PST upper support of the mask M that illuminates with exposure light EL, unification with exposure light EL.
At this, in the present embodiment, with making on one side mask M and substrate P different directions from each other (oppositely) synchronizing moving on the direction of scanning, on one side scanning exposure apparatus (so-called scanning-exposure apparatus) that the pattern of the upper formation of mask M is exposed in substrate P describe as an example as the situation of exposure device EX use.In the following description, the direction consistent with the optical axis AX of projection optical system PL as Z-direction, the synchronizing moving direction (direction of scanning) of mask M and substrate P is X-direction in the plane of vertical and Z-direction, and the direction vertical with Z-direction and X-direction (non-direction of scanning) is Y direction.In addition, rotation (inclination) direction around X-axis, Y-axis, Z axis is respectively θ X, θ Y, θ Z direction.It should be noted that, be included in semiconductor chip coating resist at this said " substrate ", " mask " comprises the graticule that forms the device pattern of reduced projection to the substrate.
The exposure device EX of the present embodiment is in order to shorten in fact exposure wavelength, carry high-resolution, and enlarge the depth of focus in fact and use the liquid immersion exposure apparatus of immersion method, have fluid Supplying apparatus 1 to feed fluid on the substrate P 50, reclaim the liquid withdrawal system 2 of the liquid 50 on the substrate P.Exposure device EX when copying to the pattern image of mask M on the substrate P, forms liquid by the part of liquid 50 on the substrate P of the projection in zone that comprises projection optical system PL of supplying with from fluid Supplying apparatus 1 and soaks the district at least.Particularly, exposure device EX is full of with liquid 50 parts between the top end face (bottom) 7 and substrate P surface of optical element 60 of top ends of projection optical system PL, by the liquid 50 between projection optical system PL and the substrate P and projection optical system PL the pattern image of mask M is projected on the substrate P substrate P is exposed.
Lamp optical system IL is the mask M that illuminates mask platform MST upper support with exposure light EL, the condenser that have exposure light source, make the optical integrator of the uniform-illumination of the light beam that penetrates from exposure light source, the exposure light EL from optical integrator is converged, relay lens, the variable field-of-view diaphragm that is set as slit-shaped based on the surround on the mask M of the light EL that exposes.Regulation surround on the mask M by lamp optical system IL by expose uniformly light EL illumination of Illumination Distribution.As the exposure light EL that penetrates from lamp optical system IL, use extreme ultraviolet light (DUV light), ArF excimer laser (wavelength 193nm) and the F such as the ray (g ray, h ray, i ray) of the ultraviolet region that penetrates from mercury vapor lamp and krF excimer laser (wavelength 248nm) 2The vacuum ultraviolet (VUV light) of laser (wavelength 157nm).In the present embodiment, use the ArF excimer laser.
Mask platform MST supports mask M, can be two-dimensional movement in the XY plane in the plane perpendicular to the optical axis AX of projection optical system PL, can slightly rotate in θ Z direction.Mask platform MST is driven by mask platform drive unit MSTD such as linear electric machines.Mask platform drive unit MSTD is controlled by control device CONT.The position of the two-dimensional directional of the mask M on the mask platform MST and rotation angle are passed through in real time instrumentation of laser interferometer, and the instrumentation result exports control device CONT.Control device CONT drives mask platform drive unit MSTD according to the instrumentation result of laser interferometer, thereby carries out the location of the mask M of mask platform MST upper support.
Projection optical system PL carries out projection exposure with projection multiple β pattern to mask M on substrate P of regulation, and it is made of a plurality of optical elements (lens), and these optical elements are being supported by lens barrel PK.In the present embodiment, projection optical system PL is that projection multiple β is 1/4 or 1/5 reduction system.It should be noted that, projection optical system PL can be any one of equimultiple system and amplification system.
Projection optical system PL has: be configured in its top one side (substrate P one side), comprise the optical element (first group) 60 of the optical component of contact liq 50; Be configured in the projection optical system main body that comprises a plurality of optical elements (second group) MPL between optical element 60 and the mask M.Projection optical system main body MPL is supported on the lens barrel PK, and optical element 60 supports discretely from lens barrel PK.The back is described the details of the support structure of optical element 60 and projection optical system main body MPL in detail.It should be noted that, in the present embodiment, the optical element 60 that consists of first group is made of an optical component (lens).
Substrate table PST supporting substrate P has the Z platform 51 by substrate holder maintenance substrate P, the XY platform 52 of support Z platform 51.The Substrate table PST that comprises Z platform 51 and XY platform 52 is supported on the pedestal 53.Substrate table PST is driven by Substrate table drive unit PSTD such as linear electric machines.Substrate table drive unit PSTD is controlled by control device CONT.By driving Z platform 51, the position of the Z-direction position (focal position) of the substrate P that keeps on the control Z platform 51, θ X, θ y direction.In addition, by driving XY platform 52, the position of the XY direction of control substrate P (with the position of the parallel in fact direction of the image planes of projection optical system PL).Be focal position and the pitch angle of Z platform 51 control substrate P, consistent with the image planes of projection optical system PL the surface of substrate P with automatic focus mode, automatic leveling mode, XY platform 52 carries out the location of X-direction and the Y direction of substrate P.It should be noted that, certainly can be wholely set Z platform and XY platform.
The moving lens 54 that moves with Substrate table PST one is set at Substrate table PST (Z platform 51).In addition, in the position relative with moving lens 54 laser interferometer 55 is set.With real-time instrumentation, the instrumentation result exports control device CONT by laser interferometer 55 for the position of the two-dimensional directional of the substrate P on the Substrate table PST and rotation angle.Control device CONT drives Substrate table drive unit PSTD according to the instrumentation result of laser interferometer 55, carries out the location of the substrate P of Substrate table PST upper support.
Exposure device EX has the liquid withdrawal system 2 to the liquid 50 in the fluid Supplying apparatus 1 of the liquid 50 of the space 56 supply regulations between the top end face of projection optical system PL (top end face of optical element 60) 7 and the substrate P, recovery space 56.Fluid Supplying apparatus 1 usefulness liquid 50 is full of at least a portion between projection optical system PL and the substrate P, has container, the force (forcing) pump of collection liquid 50.An end that connects supply pipe 3 at fluid Supplying apparatus 1 connects supply nozzle 4 in the other end of supply pipe 3.Fluid Supplying apparatus 1 is by supply pipe 3 and 4 pairs of spaces of supply nozzle, 56 feed fluids 50.
Liquid withdrawal system 2 has the container of the liquid 50 of suction pump, collection recovery.An end that connects recovery tube 6 at liquid withdrawal system 2 connects recovery nozzle 5 in the other end of recovery tube 6.Liquid withdrawal system 2 is by reclaiming the liquid 50 in nozzle 5 and recovery tube 6 recovery spaces 56.When in making space 56, being full of liquid 50, control device CONT drives fluid Supplying apparatus 1, in the unit interval, supply with the liquid 50 of ormal weight by supply pipe 3 and 4 pairs of spaces 56 of supply nozzle, and drive liquid withdrawal system 2, by reclaim nozzle 5 and recovery tube 6 in the unit interval from the space 56 liquid 50 that reclaim ormal weights.Accordingly, configure liquid 50 in top end face 7 and the space between the substrate P 56 of projection optical system PL.
In the present embodiment, liquid 50 is used pure water.Pure water is not only at the ArF excimer laser, when exposure light EL be the extreme ultraviolet light (DUV light) of the ray (g ray, h ray, i ray) of the ultraviolet region that penetrates from mercury vapor lamp and KrF excimer laser (wavelength 248nm), the light EL that exposes can see through.
Fig. 2 is bottom, the fluid Supplying apparatus 1 of the projection optical system PL of expression exposure device EX, the front view of liquid withdrawal system 2.In Fig. 2, in the optical element bottom 60 of projection optical system PL, top ends 60A only stays necessary part in the direction of scanning, forms elongated rectangle in Y direction (non-direction of scanning).When scan exposure, the pattern image of the part of mask M project to top ends 60A under the rectangle projection in zone in, for projection optical system PL, move synchronously with speed V at-directions X (or+directions X) with mask M, by XY platform 52, substrate P is in+directions X (or-directions X), and is mobile with speed β V (β is the projection multiple).Then, after taking the end exposure in district to one, by the stepping of substrate P, next is taken the district and moves to the scanning starting position, and next coming in order carry out each is taken the exposure-processed in district with stepping and scan mode.In the present embodiment, parallel with the moving direction of substrate P, liquid 50 flows to the direction identical with the moving direction of substrate P.
Fig. 3 is the top ends 60A of the lens 60 of expression projection optical system PL, at the nozzle 4 of the X-direction feed fluid 50 (figure of the position relationship of the recovery nozzle 5 (5A, 5B) of 4A～4C), withdrawal liquid 50.In Fig. 3, the shape of the top ends 60A of lens 60 becomes at the elongated rectangle of Y direction, the top ends 60A of the lens 60 of projection optical system PL clips X-direction ,+3 supply nozzle 4A～4C of X one side configuration ,-2 recovery of X one side configuration nozzle 5A, 5B.And supply nozzle 4A～4C is connecting fluid Supplying apparatus 1 by recovery tube 3, reclaims nozzle 5A, 5B and is connecting liquid withdrawal system 2 by recovery tube 6.In addition, supply nozzle 4A～4C and reclaim nozzle 5A, 5B almost Rotate 180 ° configuration configuration supply nozzle 8A～8C and reclaim nozzle 9A, 9B.Supply nozzle 4A～4C and recovery nozzle 9A, 9B are at the Y direction alternative arrangement, supply nozzle 8A～8C and recovery nozzle 5A, 5B are at the Y direction alternative arrangement, supply nozzle 8A～8C is connected on the fluid Supplying apparatus 1 by supply pipe 10, reclaims nozzle 9A, 9B and is connected on the liquid withdrawal system 2 by recovery tube 11.
Fig. 4 is the skeleton diagram for the support structure of explanation projection optical system PL.
It should be noted that, in Fig. 4, become simple in order to make explanation, omit liquid 50, fluid Supplying apparatus 1 and liquid withdrawal system 2 etc.In Fig. 4, exposure device EX has the base frame 43 of main frame 42, support main frame 42 and the Substrate table PST (Z platform 51 and XY platform 52) of support projection optical system main body MPL.Periphery at the lens barrel PK that keeps projection optical system main body MPL arranges flange 41, and projection optical system main body MPL is supported on the main frame (the second supporting member) 42 by flange 41.
Configuration antihunting device 44 by antihunting device 44 main frame 42 is separated with base frame 43, thereby the vibration of base frame 43 does not pass to the main frame 42 of support projection optical system main body MPL between main frame 42 and base frame 43.Base frame 43 almost is horizontally disposed with by foot 45 on the ground of clean room.
Pass through antihunting device 46 supporting platform seat (first foundation member) 53 in base frame (the second basic component) 43.By antihunting device 46 base frame 43 is separated with pedestal 53, thereby the vibration of base frame 43 does not pass to pedestal 53, the vibration of pedestal 53 does not pass to base frame 43 in addition.
On pedestal 53, use air bearing noncontact supporting substrate platform PST, Substrate table PST use not shown linear electric machine can be on pedestal 53 two-dimensional movement.At pedestal 53 support frame (the first supporting member) 47 is set, keeps framework (lens unit) 61 of optical element 60 to be supported by support frame 47.The main frame 42 of the support frame 47 of supporting optical component 60 (framework 61) and support projection optical system main body MPL does not transmit by the vibration that antihunting device 44,46 is separated into each other.
It should be noted that, in structure shown in Figure 4, between support frame 47 and pedestal 53, can arrange and antihunting device 44,46 same antihunting devices, also can configure the elastic components such as rubber, make the vibration damping that passes between support frame 47 and the pedestal 53.
Fig. 5 is near the enlarged drawing the optical element 60 of projection optical system PL.
Between the framework 61 of support frame 47 and maintenance optical element 60, configure voice coil motor (driving mechanism) 48, support frame 47 is by voice coil motor 48 noncontact support frames 61, by the driving of voice coil motor 48, the optical element 60 that remains in the framework 61 can move in Z-direction.In addition, configure interferometer (measuring device) 71 at main frame 42, reception is from the mensuration catoptron 49a and the reflected light that is installed in the mensuration catoptron 49b on the lens barrel PK, the interval of instrumentation projection optical system main body MPL and optical element 60 that are installed on the framework 61.For example between framework 61 and support frame 47, configure 3 voice coil motors 48 with 120 ° interval each other, drive alone respectively, can consist of to the movement of Z-direction with to the inclination of projection optical system MPL.Voice coil motor 48 is controlled according to the instrumentation result of interferometer 71, thus the position relationship (predetermined distance) of projection optical system main body MPL and optical element 60 positions regulation.
Below, illustrate use above-mentioned exposure device EX on substrate P the step of the pattern exposure of mask M.
Mask M is contained on the mask platform MST, and after being contained in substrate P on the Substrate table PST, control device CONT drives fluid Supplying apparatus 1, begin the liquid supply action to space 56.Then, make substrate P mobile to the direction of scanning (directions X) shown in the arrow Xa (with reference to Fig. 3), when carrying out scan exposure, use supply pipe 3, supply nozzle 4A～4C, recovery tube 6, reclaim nozzle 5A, 5B, carry out supply and the recovery of liquid 50 by fluid Supplying apparatus 1 and liquid withdrawal system 2.Be substrate P to-when directions X moves, supply pipe 3, supply nozzle 4 (4A～4C) from feed fluid 50 between 1 couple of projection optical system PL of fluid Supplying apparatus and the substrate P, and by reclaiming nozzle 5 (5A, 5B) and recovery tube 6 liquid 50 is recovered to liquid withdrawal system 2.Liquid 50 flows to be full of between optical element 60 and the substrate P to-directions X.And when making substrate P carry out scan exposure to the direction of scanning (+directions X) that arrow Xb represents is mobile, use supply pipe 10, supply nozzle 8A～8C, recovery tube 11, reclaim nozzle 9A, 9B, carry out supply and the recovery of liquid 50 by fluid Supplying apparatus 1 and liquid withdrawal system 2.Be substrate P+when directions X moves, by supply pipe 10 supply nozzles 8 (8A～8C) from feed fluid 50 between 1 couple of projection optical system PL of fluid Supplying apparatus and the substrate P, and by reclaiming nozzle 9 (9A, 9B) and recovery tube 11 liquid 50 is recovered to liquid withdrawal system 2, liquid 50 flows at+directions X, thereby is full of between optical element 60 and the substrate P.At this moment, the movement to-directions X that the liquid 50 of supplying with by supply nozzle 4 from fluid Supplying apparatus 1 is accompanied by substrate P flows to space 56, so even the supply energy of fluid Supplying apparatus 1 is little, also can easily offer space 56 to liquid 50.And, by switch the direction that liquid 50 flows according to the direction of scanning, no matter to+directions X or-during which steering handle substrate P scanning of directions X, can both be full of between the top end face 7 and substrate P of optical element 60 with liquid 50, can obtain high exploring degree and the wide depth of focus.
At this, can arrange the cooling of the coil portion of voice coil motor 48, be set as the cooling device of set point of temperature.At this moment, the refrigerant of this cooling device is water, can with the public part of temperature control equipment that is setting to the Temperature Setting of liquid 50.
In addition, interferometer 71 total intervals that monitor the lens barrel PK that keeps projection optical system main body MPL and the framework 61 that keeps optical element 60, when since the pressure of the vibration of Substrate table PST or liquid 50 change, during this interval variation, instrumentation meter mistake according to interferometer 71, by voice coil motor 48, the optical element 60 that remains in the framework 61 moves, and the interval (position relationship) of this projection optical system main body MPL and optical element 60 is maintained specified states.
In the present embodiment, the main frame 42 of support projection optical system main body MPL separates in vibration with the support frame 47 that keeps optical element 60, can prevent that the vibration that passes to optical element 60 from passing to projection optical system main body MPL.In addition, optical element 60 is supported on the support frame 47 by voice coil motor 48 noncontacts, can interdict the vibration of self-supporting frame 47, so the position of X-axis and Y direction is not only stable, can also be by the position of voice coil motor 48 control Z-directions, so can be positioned at required state to optical element 60 for projection optical system main body MPL.Therefore, be full of with liquid 50 between the optical element 60 and substrate P of projection optical system PL, when carrying out immersion exposure, the deteriorated of pattern image do not occur, can form required pattern image in substrate P.In addition, with the interferometer 55 that monitors Substrate table PST or monitor that the interferometer (not shown) of mask platform MST uses be arranged on lens barrel PK when upper with reference to catoptron, because the vibration of optical element 60 can not passed on the lens barrel PK, so can prevent each interferometric instrumentation error.
It should be noted that, at projection optical system main body MPL and framework 61 a plurality of mensuration catoptrons are set, not only the relative position of instrumentation relative tilt, X-direction and Y direction is gone back at the interval of projection optical system main body MPL and framework 61.In addition, according to the instrumentation result, can optical element 60 be tilted by voice coil motor 48, move in X-direction, Y direction.In addition, in the present embodiment, be the structure that optical element 60 is moved, but projection optical system main body MPL is moved.In addition, when because the change of optical element 60, when the projection state's (image formation state) that is projected in the pattern image on the substrate P changes, the part of a plurality of optical components that consist of projection optical system main body MPL is moved, revise the variation of this projection state.
In addition, in the above embodiments 1, use interferometer system (49a, 49b, 71) as measuring device, if but can with the position relationship of specified accuracy instrumentation projection optical system main body MPL and optical element 60, just can make measuring device otherwise.For example replace above-mentioned interferometer system, also can use the measuring device of the relative position information of the instrumentation mark of configuration on optically the instrumentation lens barrel PK and framework 61.
Fig. 6 is the skeleton diagram of other forms of the support structure of expression projection optical system.
In the present embodiment, the difference with the embodiment of the support structure of the projection optical system of reference Fig. 4 explanation is: in base frame 43 support frame 47 ' that supports the framework 61 that keeps optical elements 60 is installed.In the present embodiment, the main frame 42 of support projection optical system main body MPL separates in vibration with the support frame 47 ' that keeps optical element 60, the vibration that passes to optical element 60 does not pass to projection optical system main body MPL, in addition, the position relationship of projection optical system main body MPL and optical element 60 maintains specified states, so when being full of between the optical element 60 of projection optical system PL and the substrate P with liquid 50, the deteriorated of pattern image do not occur, and can form required pattern image in substrate P.
It should be noted that, if projection optical system main body MPL separates in vibration with optical element 60, supporting member separately (framework) just is not limited to each above-mentioned embodiment.
In addition, in described embodiment, framework 61 only keeps an optical element 60, but can keep comprising a plurality of optical elements of optical element 60.In addition, in the above-described embodiments, projection optical system PL is divided into two crowds of projection optical system main body MPL between optical element 60, mask M and the optical element 60 etc., but can be separated into more than three groups, can comprise first group of optical element 60 with and first crowd of non-conterminous group's relative position maintain specified states.
In described each embodiment, the shape of above-mentioned nozzle also is not particularly limited, and still about the long limit of top ends 60A, can carry out with 2 pairs of nozzles supply or the recovery of liquid 50.It should be noted that, at this moment, for no matter from+directions X or-which direction of directions X can both carry out supply and the recovery of liquid 50, can and reclaim up and down side by side configuration of nozzle supply nozzle.
(embodiment 2 of exposure device)
Fig. 7 is the summary construction diagram of the embodiment 2 of expression exposure device of the present invention.
In Fig. 7, exposure device EX2 has the Substrate table PST2 of the mask platform MST2, the supporting substrate P2 that support mask M2, illuminate the lamp optical system IL2 of mask M2 of mask platform MST2 upper support with exposure light EL2 the projection optical system PL2 of pattern image projection exposure on the substrate P 2 of Substrate table PST2 upper support of the mask M2 that is illuminated by exposure light EL2, the unified control device CONT2 that controls all actions of exposure device EX2.Exposure device EX2 has the main pillar 103 that supports mask platform MST2 and projection optical system PL2.Main pillar 103 is arranged on and lies in a horizontal plane on the ground base 104.Form outstanding to the inside upper layer part (upside support portion) 103A and lower layer part (downside support portion) 103B at main pillar 103.
The exposure device EX2 of the present embodiment is in order to shorten in fact exposure wavelength, carry high-resolution, and enlarge the depth of focus in fact and use the liquid immersion exposure apparatus of immersion method, have the liquid supply mechanism 110 to feed fluid 101 on the substrate P 2, the liquids recovery mechanism 120 that reclaims the liquid 101 on the substrate P 2.When exposure device EX2 copied to the pattern image of mask M2 on the substrate P 2 at least, by the liquid 101 of supplying with from liquid supply mechanism 110, the part on the substrate P 2 of the projection in zone AR1 that comprises projection optical system PL2 formed liquid and soaks district AR2.Particularly, exposure device EX2 is full of with liquid 101 parts between optical component (optical element) 102 and substrate P 2 surfaces of top ends (terminal part) of projection optical system PL2, by the liquid 101 between projection optical system PL2 and the substrate P 2 and projection optical system PL2 the pattern image of mask M2 is projected on the substrate P 2, substrate P 2 exposures.
In the present embodiment, with making on one side mask M2 and substrate P 2 different directions from each other (oppositely) synchronizing moving on the direction of scanning, on one side scanning exposure apparatus (so-called one by one portable exposure device) that the pattern of the upper formation of mask M2 is exposed in substrate P 2 situation about using as exposure device EX2 describe as an example.In the following description, the direction consistent with the optical axis AX2 of projection optical system PL2 as Z-direction, the synchronizing moving direction (direction of scanning) of mask M2 and substrate P 2 is X-direction in the plane of vertical and Z-direction, and the direction vertical with Z-direction and X-direction (non-direction of scanning) is Y direction.In addition, rotation (inclination) direction around X-axis, Y-axis, Z axis is respectively θ X, θ Y, θ Z direction.It should be noted that, be included in semiconductor chip coating photoresist at this said " substrate ", " mask " comprises the graticule that forms the device pattern of reduced projection to the substrate.
Lamp optical system IL2 is supported by the support column 105 on the top that is fixed on main pillar 103.Lamp optical system IL2 illuminates the mask M2 of mask platform MST2 upper support with exposure light EL2, the condenser that have exposure light source, make the optical integrator of the uniform-illumination of the light beam that penetrates from exposure light source, the exposure light EL2 from optical integrator is converged, relay lens, the variable field-of-view diaphragm that is set as slit-shaped based on the surround on the mask M2 of the light EL2 that exposes.Regulation surround on the mask M2 by lamp optical system IL2 by expose uniformly light EL2 illumination of Illumination Distribution.As the exposure light EL2 that penetrates from lamp optical system IL2, use the vacuum ultraviolet (VUV light) of extreme ultraviolet light (DUV light), ArF excimer laser (wavelength 193nm) and the F2 laser (wavelength 157nm) such as the ray (g ray, h ray, i ray) of the ultraviolet region that penetrates from mercury vapor lamp and krF excimer laser (wavelength 248nm).In the present embodiment, use the ArF excimer laser.
In the present embodiment, liquid 101 is used pure water.ArF excimer laser not only, the ray (g ray, h ray, i ray) of the ultraviolet region that penetrates from mercury vapor lamp and the extreme ultraviolet light (DUV light) of KrF excimer laser (wavelength 248nm) also can see through pure water.
Mask platform MST2 supports mask M2, and section has the peristome 134A that the pattern image that makes mask M2 is passed through in the central.Upper layer part 103A at main pillar 103 supports mask price fixing 131 by antivibrating parts 106.Form the peristome 134B that the pattern image that makes mask M2 is passed through at the central portion of mask price fixing 131.Being provided with a plurality of non-contact bearings at the lower surface of mask platform MST2 is gas bearing 132.Mask platform MST2 supports by the upper surface (guide surface) of 132 pairs of mask price fixings 131 of gas bearing untouchablely, in the plane perpendicular to the optical axis AX2 of projection optical system PL2, be two-dimensional movement in the XY plane by mask platform driving mechanisms such as linear electric machines, can slightly rotate in θ Z direction.On mask platform MST2+assigned position of X one side arranges moving lens 135.In addition, in the position relative with moving lens 135 laser interferometer 136 is set.Although same not shown, on mask platform MST2+Y one side also arranges moving lens, in the position relative with it laser interferometer is set.With real-time instrumentation, the instrumentation result exports control device CONT2 the rotation angle of the position of the two-dimensional directional of the mask M2 on the mask platform MST2 and θ Z direction (according to circumstances, also comprising the rotation angle of θ X, θ Y-direction) by laser interferometer 136.Control device CONT2 drives the mask platform driving mechanism according to the instrumentation result of laser interferometer 136, thereby carries out the location of the mask M2 of mask platform MST2 upper support.
Projection optical system PL2 with the regulation projection multiple β on substrate P 2 the pattern projection exposure of mask M2.In the present embodiment, projection optical system PL2 is that projection multiple β is 1/4 or 1/5 reduction system.It should be noted that, projection optical system PL2 can be any one of equimultiple system and amplification system.Projection optical system PL2 has: be configured in its terminal one side (substrate P 2 one sides), the optical component that contacts with liquid 101 (first group) 102; Be configured in the optics group who comprises a plurality of optical elements (second crowd) MPL2 between the figuratum mask M2 of optical component 102 and tool.It should be noted that, in the present embodiment, first group only comprises the i.e. lens element (optical element) of optical component 102.Lens element 102 remains on the metal lens unit (the first retaining member).Lens unit LS2 is metal-made, has not shown spring device between lens unit LS2 and lens element 102.And optics group MPL2 is kept by lens barrel (the second retaining member) PK2.Lens unit LS2 separates with lens barrel PK2.
Peripheral part at lens barrel PK2 arranges flange part FLG2.In addition, the lower layer part 103B at main pillar 103 supports lens barrel chassis 108 by antivibrating parts 107.And flange part FLG2 is supported on the lens barrel PK2 that keeps optics group MPL2 on the lens barrel chassis (framing component) 108 by cooperating with lens barrel chassis 108.
The coupling apparatus 160 and lens barrel chassis 108 combinations of lens unit LS2 by describing later that keeps lens element 102 becomes by coupling apparatus 160 and is supported on structure on the lens barrel chassis 108.The lens element 102 that remains among the lens unit LS2 becomes movably for the optics group MPL2 that remains among the lens barrel PK2 by coupling apparatus 160.
Consist of a plurality of optical elements of projection optical system PL2 respectively by fluorite or quartzy formation, the curved surface of the optical element of a part is carried out aspherical lapping.If form lens element 102 with fluorite, then this fluorite is immersed in the water for a long time, so with suitable coating thin film, improve compatibility.Accordingly, can make almost comprehensively being close to of liquid contact surface of liquid 101 and lens element 102, can be full of reliably light path between lens element 102 and the substrate P 2 with liquid 101.It should be noted that, lens element 102 can be the quartz high with the water compatibility.In addition, liquid contact surface to lens element 102 carries out hydrophilic (lyophily) processing such as plated film, when further improving the compatibility with liquid 101, can adopt and soak district AR2 from liquid except under the drying regime of anhydrating, special film structure (if the extra electric field that moisture loses rapidly from the liquid contact surface of lens element 102, molecules align changes, or some electric currents flow through the film that temperature just rises).
Substrate table PST2 keeps substrate P 2 by substrate holder PH2 absorption, is set to removablely, and at its lower surface a plurality of non-contact bearings being set is gas bearing 142.Pass through antivibrating parts 109 supporting substrate chassis 141 at base 104.Substrate table PST2 supports for upper surface (guide surface) the 141A noncontact on substrate chassis 141 by air bearing 142, Substrate table driving mechanism by linear electric machine etc., be can two-dimensional movement in the XY plane in the plane perpendicular to the optical axis AX2 of projection optical system PL2, can slightly rotate in θ Z direction.Substrate table PST2 also is set to can Z-direction, θ directions X, θ Y-direction move.The Substrate table driving mechanism is controlled by control device CONT2.Focal position (Z position) and the pitch angle of Substrate table PST2 control substrate P 2, consistent with the image planes of projection optical system PL2 the surface of substrate P 2 with automatic focus mode, automatic leveling mode, and carry out the location of X-direction and the Y direction of substrate P 2.
On Substrate table PST2 (substrate holder PH2)+the assigned position setting of X one side and the moving lens 180 that Substrate table PST2 one moves, lens barrel PK2+assigned position of X one side arranges reference mirror (fixed mirror) 181.In addition, in the position relative with moving lens 180 laser interferometer 182 is set.Long light beam (mensuration light) is surveyed in 180 irradiations of 182 pairs of moving lens of laser interferometer, and reference mirror 181 is shone reference beams (with reference to light) by catoptron 183A, 183B.Based on the long light beam of survey of irradiation and reference beams respectively from the light accepting part reception by laser interferometer 182 of the reflected light of moving lens 180 and reference mirror 181, laser interferometer 182 is these interference of light, position (coordinate) or the displacement of the moving lens 180 of instrumentation take the optical path length of reference beams as the optical path length of the long light beam of survey of benchmark, take reference mirror 181 as benchmark.Reference mirror 181 is supported on the lens barrel PK2, and moving lens 180 is supported on the substrate holder PH2 (Substrate table PST2).Although same not shown, Substrate table PST2 and lens barrel PK2+Y one side also arranges moving lens and reference mirror, in the position relative with them laser interferometer is set.By position and the rotation angle of laser interferometer 182 with the two-dimensional directional of the substrate P 2 on the real-time instrumentation Substrate table PST, the instrumentation result exports control device CONT2.Control device CONT2 comprises the Substrate table driving mechanism of linear electric machine according to the instrumentation result driving of laser interferometer 182, thereby carries out movement and the location of the substrate P 2 of Substrate table PST2 upper support.
In addition, on Substrate table PST2 (substrate holder PH2), surround substrate P 2 accessory plate 143 is set.Accessory plate 143 has the plane of the surperficial almost identical height of the substrate P 2 that upward keeps with substrate holder PH2.When the profile region of substrate P 2 is exposed, can remain on liquid 101 under the projection optical system PL2 by accessory plate 143.
Substrate table PST2 is supported for and can moves freely in X-direction by X guide table 144.Substrate table PST2 can be moved with predetermined stroke in X-direction by x-ray motor 147 by 144 guiding of X guide table.X-ray motor 147 has stator 147A, the moving element 147B that arrange and be fixed on Substrate table PST2 on corresponding to this stator 147A in the X-direction extension that is arranged on the X guide table 144.And moving element 147B drives for stator 147A, thereby Substrate table PST2 moves in X-direction.At this, Substrate table PST2 supports with cordless by the magnetic conductance that is made of magnet and actuator of keeping the interval of ormal weight for X guide table 144 in Z-direction.Substrate table PST2 moves to X-direction by x-ray motor 147 under noncontact is supported on state on the X guide table 144.
The a pair of Y linear electric machine 148 that can move with Substrate table PST2 X guide table 144 in Y direction is set at the length direction two ends of X guide table 144.Y linear electric machine 148 have respectively the length direction two ends that are arranged on X guide table 144 moving element 148B, with the stator 148A of the corresponding setting of this moving element 148B.
And, driving for stator 148A by moving element 148B, X guide table 144 moves in Y direction with Substrate table PST2.In addition, by adjusting Y linear electric machine 148 driving separately, X guide table 144 becomes in θ Z direction also can rotate.Therefore, by Y linear electric machine 148, Substrate table PST2 can almost move in Y direction and θ Z direction integratedly with X guide table 144.
Guiding X guide table 144 is set respectively to the guide portion 149 of the movement of Y direction in the X-direction both sides on substrate chassis 141.Guide portion 149 is supported on the base 104.And concave shape is set at the length direction two ends of the lower surface of X guide table 144 be directed member 145.Guide portion 149 be directed member 145 and cooperate, the upper surface (guide surface) that is set to guide portion 149 is relative with the inside surface of guiding elements 145.At the guide surface of guide portion 149 non-contact bearing being set is gas bearing 146, and X guide table 144 supports for the guide surface noncontact of guide portion 149.
Fig. 8 is near the enlarged drawing express liquid feed mechanism 110, liquids recovery mechanism 120, the projection optical system PL2 top ends.
Liquid supply mechanism 110 is to feed fluid 101 between projection optical system PL2 and the substrate P 2, has the liquid supply section 111 that can send liquid 101, is connected in the liquid supply section 111 and the liquid 101 of sending from liquid supply section 111 is offered supply nozzle 114 on the substrate P 2 by supply pipe 115.Supply nozzle 114 is near the surface configuration of substrate P 2.Liquid supply section 111 has the temperature adjustment device of the temperature of the liquid 101 that the container, force (forcing) pump, adjustment of collection liquid 101 supply with, by feed fluid 101 on supply pipe 115 and 114 pairs of substrate P 2 of supply nozzle.The action of the liquid supply of liquid supply section 111 is by control device CONT2 control, control device CONT2 can control based on liquid supply section 111 to the liquid supply amount in the unit interval on the substrate P 2.
Liquids recovery mechanism 120 reclaims the liquid 101 on the substrate P 2 of being supplied with by liquid supply mechanism 110, has recovery nozzle 121 near the surface configuration of substrate P 2, is connected to the liquids recovery section 125 that reclaims on the nozzle 121 by recovery tube 124.Liquids recovery section 125 has suction pump, can collect the container of the liquid 101 that reclaims.The liquid 101 that is recovered to liquids recovery section 125 goes out of use, and perhaps cleaning is got back to liquid supply section 111, recycling.
When substrate P 2 formation liquid soak district AR2, control device CONT2 drives liquid supply section 111, in the unit interval, supply with the liquid 101 of ormal weight by supply pipe 115 and supply nozzle 114, and drive liquids recovery section 125, in the unit interval, reclaim the liquid 101 of ormal weight by reclaiming nozzle 121 and recovery tube 124.Accordingly, the liquid that forms liquid 101 between the lens element 102 of the terminal part of projection optical system PL2 and substrate P 2 soaks district AR2.
It should be noted that, shown in the partial sectional view of Fig. 7 and Fig. 8, liquid supply mechanism 110 and liquids recovery mechanism 120 support discretely for lens barrel chassis 108.Accordingly, the vibration that produces in liquid supply mechanism 110 and the liquids recovery mechanism 120 can not pass to projection optical system PL2 by lens barrel chassis 108.
Fig. 9 is the planimetric map of position relationship of the projection in zone AR1 of express liquid feed mechanism 110 and liquids recovery mechanism 120 and projection optical system PL2.The projection in zone AR1 of projection optical system PL2 becomes at the elongated rectangle of Y direction (cracking), clips projection in zone AR1 in X-direction ,+3 supply nozzle 114A～114C of X one side configuration ,-2 recovery of X one side configuration nozzle 121A, 121B.And supply nozzle 114A～114C is connected in the liquid supply section 111 by supply pipe 115, reclaims nozzle 121A, 121B and is connected in the liquids recovery section 125 by recovery tube 124.In addition, supply nozzle 114A～114C with reclaim the almost configuration configuration supply nozzle 114A ' of Rotate 180 °～114C ' and recovery nozzle 121A ', 121B ' of nozzle 121A, 121B.Supply nozzle 114A '～114C ' and recovery nozzle 121A ', 121B ' are at the Y direction alternative arrangement, supply nozzle 114A '～114C ' is connected in the liquid supply section 111 by supply pipe 115 ', reclaims nozzle 121A ', 121B ' and is connected in the liquids recovery section 125 by recovery tube 124 '.
Figure 10 is that expression is the stereographic map of the coupling apparatus 160 of lens unit LS2 and 108 combinations of lens barrel chassis.
Coupling apparatus 160 is made of the bindiny mechanism that is set up in parallel a plurality of link rod parts 161 that have respectively actuated components 162.In the present embodiment, coupling apparatus 160 is the 6DOF bindiny mechanisms that are made of 6 link rod parts 161, and motion ground supports lens unit LS2.In the present embodiment, link rod part 161 per 2 as a pair of, with 120 ° of arranged spaced almost.It should be noted that, 6 link rod parts 161 can with uniformly-spaced configuration, can configure with unequal interval.
Link rod part 161 has by globe bearing 163 and is connected to the first connecting elements 164 on the lens unit LS2, is connected to the second connecting elements 166 on the lens barrel chassis 108 by globe bearing 165.First, second connecting elements 164, the 166th, axis-shaped component is set to and can moving axially for the cylindrical member 167 that consists of actuated components 162.And, driving by actuated components 162, first, second connecting elements 164,166 cylindrical members 167 for actuated components 162 can move axially, and link rod part 161 can be kept or change the interval of (stretching) globe bearing 163 and globe bearing 165 accordingly.
Lens unit LS2 can be kept, be adjusted to coupling apparatus 160 for the attitude on lens barrel chassis 108 by making link rod part 161 flexible respectively.At this moment, keep the lens barrel PK2 of optics group MPL2 to be supported on the lens barrel chassis 108, lens element 102 remains among the lens unit LS2, so lens element 102 can be kept in fact, be adjusted to coupling apparatus 160 for the attitude of optics group MPL2 by making link rod part 161 flexible respectively.
Figure 11 is the cut-open view of link rod part 161.
In Figure 11, the axis-shaped component that link rod part 161 has cylindrical member 167, be set to removable (can haunt) for cylindrical member 167 is first, second connecting elements 164,166.At first, second connecting elements 164,166 top ends 164A, 166A globe bearing 163,165 is set respectively.First, second connecting elements 164,166 and cylindrical member 167 between to have respectively non-contact bearing be gas bearing 168,169.It should be noted that, as non-contact bearing, can also use the bearing of other modes of utilizing magnetic.Air bearing 168 on the position relative with the first connecting elements 164, axially is being set up in parallel 2 in the inside surface of cylindrical member 167.To air bearing 168,169, by being formed on the runner 170 of cylindrical member 167 inside, supplying with edge 171 from gas and supply with squeezing gas (air).First, second connecting elements 164,166 supports for cylindrical member 167 noncontacts by air bearing 168,169.
Configuration is as the first voice coil motor 172 of the driving mechanism that drives the first connecting elements 164 between the first connecting elements 164 and cylindrical member 167.In the present embodiment, the coil portion 172A that consists of the first voice coil motor 172 is set along the inside surface of cylindrical member 167, along the peripheral part of the first connecting elements 164 172B of magnet section is set.And, by the driving of the first voice coil motor 172, producing Lorentz force, the first connecting elements 164 that noncontact is supported on the cylindrical member 167 can move axially at it.
Same the second voice coil motor 173 that between the second connecting elements 166 and cylindrical member 167, configures as the driving mechanism that drives the second connecting elements 166.The coil portion 173A that consists of the second voice coil motor 173 is set along the inside surface of cylindrical member 167, along the peripheral part of the second connecting elements 166 173B of magnet section is set.And, by the driving of the second voice coil motor 173, producing Lorentz force, the second connecting elements 166 that noncontact is supported on the cylindrical member 167 can move axially at it.
Link rod part 161 uses Lorentz force to move first, second connecting elements 164,166 by voice coil motor 172,173, can change the distance of the top ends 166A of the top ends 164A of the first connecting elements 164 and the second connecting elements 166.Be link rod part 161 flexibles.
The first connecting elements 164 be connected connecting elements 166 noncontacts and connect, spatial portion 174 therebetween is connected with vacuum plant 176 by the runner 175 that is formed on the cylindrical member 167.
By the driving of vacuum plant 176, spatial portion 174 is set to negative pressure.Accordingly, be connected on the first connecting elements 164 at lens unit LS2, lens barrel chassis 108 is connected under the state on the second connecting elements 166, the deadweight of scioptics unit LS2 and the first connecting elements 164, even the first connecting elements 164 is subject to power in the direction of leaving the second connecting elements 166, resist it, between the first connecting elements 164 that connects non-contactly and the second connecting elements 166, act on gravitation.It should be noted that, projection optical system PL2 is turned upside down, when keeping lens unit LS2, can make the spatial portion 174 between the first connecting elements 164 and the second connecting elements 166 be malleation.
The assigned position that namely is configured in spatial portion 174 in the first connecting elements 164 at the rearward end 164B of the first connecting elements 164 arranges instrumentation the first connecting elements 164 for i.e. the first scrambler 177 of the position measuring device of the positional information of cylindrical member 167.The assigned position that equally namely is configured in spatial portion 174 in the second connecting elements 166 at the rearward end 166B of the second connecting elements 166 arranges instrumentation the second connecting elements 166 for i.e. the second scrambler 178 of the position measuring device of the positional information of cylindrical member 167.First, second scrambler 177,178 is instrumentation result separately export control device CONT2.At this, relative position information by first scrambler 177 instrumentations the first connecting elements 164 and cylindrical member 167, relative position information by second scrambler 178 instrumentations the second connecting elements 166 and cylindrical member 167, so control device CONT2 can obtain the first connecting elements 164 for the positional information of the second connecting elements 166 according to first, second scrambler 177,178 instrumentation result.At this moment, the first connecting elements 164 is connected on the lens unit LS2 that keeps lens element 102, and the second connecting elements 166 is connected with the lens barrel chassis 108 of supporting the lens barrel PK2 that keeps optics group MPL2.Therefore, control device CONT2 can obtain in fact lens unit LS2 (lens element 102) for the positional information of lens barrel chassis 108 (optics group MPL2) by obtaining the first connecting elements 164 for the positional information of the second connecting elements 166.
And, control device CONT2 can obtain the attitude information of the lens unit LS2 (lens element 102) corresponding with lens barrel chassis 108 (optics group MPL2) according to first, second scrambler 177 that arranges respectively in 6 link rod parts 161,178 instrumentation result.
In the present embodiment, when making link rod part 161 flexible (change the top ends 164A of the first connecting elements 164 and the second connecting elements 166 top ends 166A apart from the time), only drive the first voice coil motor 172, the second voice coil motors 173 and do not drive.And, the first connecting elements 164 supports for cylindrical member 167 noncontacts by air bearing 168, so when driving the first voice coil motor 172 for the distance of the top ends 166A of the top ends 164A that changes the first connecting elements 164 and the second connecting elements 166, cylindrical member 167 the direction opposite with the moving direction of the first connecting elements 164 only mobile momentum providing divided by the amount of the quality of cylindrical member 167.By the movement of cylindrical member 167, offset the reacting force of driving be accompanied by for mobile the first connecting elements 164 or be used for keeping the voice coil motor 172 of the attitude after the first connecting elements 164 moves.Be that cylindrical member 167 has the function as so-called balance material.By the effect as the cylindrical member 167 of balance material, absorb the vibration that produces by the first connecting elements 164 mobile lens unit LS2, this vibration does not pass to lens barrel chassis 108.
In addition, during for example by 101 couples of lens unit LS2 of liquid acting force, in order to keep the attitude of lens unit LS2, namely not mobile for the first connecting elements 164, the first voice coil motor 172 drives.At this moment, cylindrical member 167 is providing the direction of the opposite direction of power to move with 172 pairs of the first connecting elements 164 of the first voice coil motor, offsets the reacting force of the driving that is accompanied by the first voice coil motor 172.At this moment, by the effect of cylindrical member 167, the vibration that produces among the absorption lens unit LS2 can prevent that this vibration from passing to lens barrel chassis 108.
The following describes and use above-mentioned exposure device EX2 the step of the pattern of mask M2 in substrate P 2 exposures.
Mask M2 is placed on the mask platform MST2, after being placed in substrate P 2 on the Substrate table PST2, control device CONT2 drives the liquid supply section 111 of liquid supply mechanism 110, by during supply pipe 115 and supply nozzle 114 are between unit substrate P 2 being supplied with the liquid 101 of ormal weights.In addition, control device CONT2 is accompanied by the supply based on the liquid 101 of liquid supply mechanism 110, drives the liquids recovery section 125 of liquids recovery mechanism 120, by reclaiming nozzle 121 and recovery tube 124, reclaims the liquid 101 of ormal weight in the unit interval.Accordingly, the liquid that forms liquid 101 between the lens element 102 of the top ends of projection optical system PL2 and substrate P 2 soaks district AR2.Then control device CONT2 illuminates mask M2 by lamp optical system IL2 with exposure light EL2, and the pattern image of mask M2 is projected on the substrate P 2 by projection optical system PL2 and liquid 101.
When scan exposure, a part of pattern image of projection print plate M2 on projection in zone AR1, with for projection optical system PL2, mask M2 moves synchronously with speed V at-directions X (or+directions X), by Substrate table PST2, substrate P 2 is mobile with β V (β is the projection multiple) at+directions X (or-directions X).And after taking the end exposure in district to one, by the stepping of substrate P 2, next is taken the district and moves to the scanning starting position, and next coming in order carry out each is taken the exposure-processed in district with stepping and scan mode.In the present embodiment, be set as parallelly with the moving direction of substrate P 2, liquid 101 flows to the direction identical with the moving direction of substrate P 2.Namely in the direction of scanning (directions X) shown in the arrow Xa2 (with reference to Fig. 9) substrate P 2 is moved, when carrying out scan exposure, use supply pipe 115, supply nozzle 114A～114C, recovery tube 124, reclaim nozzle 121A, 121B, carry out supply and recovery based on the liquid 101 of liquid supply mechanism 110 and liquids recovery mechanism 120.Be substrate P 2-when directions X moves, from supply nozzle 114 (114A～114C) to feed fluid 101 between projection optical system PL2 and the substrate P 2, and from reclaiming the liquid 101 on nozzle 121 (121A, 121B) the recovery substrate P 2, liquid flows to-directions X, thereby is full of between the lens element 102 and substrate P of top ends of projection optical system PL2.And in the direction of scanning (+directions X) shown in the arrow Xb2 (with reference to Fig. 9) substrate P 2 is moved, when carrying out scan exposure, use supply pipe 115 ', supply nozzle 114A '～114C ', recovery tube 124 ', reclaim nozzle 121A ', 121B ', carry out supply and recovery based on the liquid 101 of liquid supply mechanism 110 and liquids recovery mechanism 120.Be substrate P+when directions X moves, from supply nozzle 114 ' (114A '～114C ') to feed fluid 101 between projection optical system PL2 and the substrate P 2, and reclaim liquid 101 and the gas around it on the substrate P 2 from reclaiming nozzle 121 ' (121A ', 121B '), liquid 101 flows to+directions X, thereby is full of between the lens element 102 and substrate P 2 of top ends of projection optical system PL2.At this moment, the liquid 101 of supplying with by supply nozzle 114 is accompanied by substrate P 2 to the movement of-directions X, be attracted and flow between lens element 102 and the substrate P 2, so in time the supply energy of liquid supply mechanism 110 (liquid supply section 111) is little, also can be easily to feed fluid 101 between lens element 102 and the substrate P 2.And, by switch the direction that liquid 101 flows according to the direction of scanning, no matter to+directions X or-during which steering handle substrate P 2 scanning of directions X, can both be full of between lens element 102 and the substrate P 2 with liquid 101, can obtain high exploring degree and the wide depth of focus.
At this, because the Substrate table PST2 that is used for scan exposure is to the movement of XY direction be used for focusing on and sometimes the soaking the liquid 101 of distinguishing AR2 by liquid to the movement of Z-direction and vergence direction (θ X, θ y direction) at the vibration component that substrate P 2 one sides produce and pass to lens element 102 of leveling.In addition, also consider when scanning substrate P2, because liquid soaks the viscous resistance of the liquid 101 of district AR2, the situation that lens element 102 moves.At this moment, the pattern image that projects on the substrate P 2 by projection optical system PL2 and liquid 101 might be deteriorated.
But, separate respectively lens element 102 and the optics group MPL2 that maintenance contacts with liquid 101 with lens unit LS2 and lens barrel PK2, so about vibration, can separate lens element 102 with optics group MPL2.The vibration that therefore, can suppress to pass to lens element 102 passes to optics group MPL2.
When to lens element 102 effect vibration, lens element 102 moves, and makes the relative position change with optics group MPL2, is accompanied by this, might cause the deteriorated of pattern image.At this moment, according to being arranged on first, second scrambler 177 on the link rod part 161 that consists of coupling apparatus 160,178 instrumentation result, control device CONT2 obtains lens element 102 for the attitude information of optics group MPL2.
Control device CONT2 drives the first voice coil motor 172 of each link rod part 161 according to the attitude information obtained, can maintain required state to lens element 102 for the position (attitude) of optics group MPL2.Be that control device CONT2 carries out according to first, second scrambler 177,178 instrumentation result, for lens element 102 is maintained required state for the attitude of optics group MPL2 and drive the FEEDBACK CONTROL of the first voice coil motor 172.Accordingly, even to lens element 102 effect vibrations, this lens element 102 moves, make the relative position change to optics group MPL2, the position relationship of optics group MPL2 and lens element 102 also can keep necessarily, can make the vibration of lens element 102 can not pass to optics group MPL2.
At this moment, control device CONT2 is according to first, second scrambler 177 that arranges respectively in 6 link rod parts 161,178 instrumentation result, carry out computing, obtain lens element 102 for each position relationship about X-axis, Y-axis, Z axis, θ X, θ Y, θ Z direction of optics group MPL2.In addition, control device CONT2 is by making 6 link rod parts 161 flexible respectively, and control lens element 102 is for each position about X-axis, Y-axis, Z axis, θ X, θ Y, θ Z direction of optics group MPL2.
And, the vibration that produces when driving the first voice coil motor 172 is absorbed by the effect of vibration proof mechanism built-in in the link rod part 161 as the cylindrical member 167 of balance material, so for optics group MPL2, vibration can not transmitted by lens barrel chassis 108 and lens barrel PK2.Therefore, can prevent from projecting to the deteriorated of pattern image on the substrate P 2.
In addition, the lens barrel PK2 that vibration does not pass to optics group MPL2 and keeps them, thereby in time the reference mirror (fixed mirror) 181 of the interferometer system of the positional information that is used for instrumentation Substrate table PST2 is installed to lens barrel PK2, also can with high precision carry out Substrate table PST2 positional information instrumentation and based on this instrumentation result's position control.
In the present embodiment, make link rod part 161 flexible, when carrying out the attitude control of the lens element 102 that keeps among the lens unit LS2, as mentioned above, only drive the first voice coil motor 172, the second voice coil motors 173 and do not drive.Namely carry out attitude when control of lens element 102, only the first voice coil motor 172 is supplied with the control electric power, to the second voice coil motor 173 (or fully) supply capability not almost.And, for the attitude control of carrying out lens element 102 the first voice coil motor 172 in Figure 11 for example during arrow J1 one side shifting, cylindrical member 167 is to arrow J2 one side shifting.At this moment, the second connecting elements 166 that links lens barrel price fixing 108 does not move.At this, according to the scan exposure condition, cylindrical member 167 might only continue to move to arrow J2 direction, at this moment, might first, second connecting elements 164,166 and the relative position of cylindrical member 167 significantly be offset, the first connecting elements 164 leaves cylindrical member 167 finally.Therefore, control device CONT2 drives the second voice coil motor 173, the position of correction cylindrical member 167 when first, second connecting elements 164,166 and the relative position of cylindrical member 167 skew permissible value when above.At this, can be when changing substrate or first take after district's exposure and the second exposure actions such as time between taking before district's exposure of following beyond timing carry out the driving of the second voice coil motor 173.It should be noted that, in exposure, when carrying out the attitude control of lens element 102 (lens unit LS2) by the first voice coil motor 172, vacuum plant 176 is kept the pressure of spatial portion 174 necessarily.
In the present embodiment, by the spatial portion 174 between the first connecting elements 164 and the second connecting elements 166 is set as negative pressure, because the deadweight of lens unit LS2 and the first connecting elements 164, even the first connecting elements 164 is subject to power in the direction of leaving the second connecting elements 166, also can keep the first connecting elements 164 of noncontact connection and the relative position (distance) of the second connecting elements 166.At this, by voice coil motor 172,173 is continued supply capability, the deadweight that can bear lens unit LS2 and the first connecting elements 164 increases but offer the electric power amount of voice coil motor this moment, produces the possibility of heating.Link rod part 161 is configured near the image planes of projection optical system PL2, so the pattern image that projects on the substrate P 2 owing to generating heat, might causing is deteriorated.
Therefore, be negative pressure by making spatial portion 174, the deadweight of bearing lens unit LS2 and the first connecting elements 164, the electric power that voice coil motor is supplied with can only be the electric power for the attitude of control lens unit LS2 (lens element 102).Therefore, the electric power amount of voice coil motor can be suppressed to offer, the problem of heating can be suppressed.
It should be noted that the impact on pattern image that causes in order to suppress voice coil motor 172,173 heating can be provided for regulating the temperature adjustment device of the temperature of (cooling) voice coil motor 172,173.
By spatial portion 174 is set, the elastic reaction of the gas by this spatial portion 174 can reduce the radio-frequency component that will pass to the vibration of lens barrel chassis 108 1 sides from lens unit LS2 one side.
And, reduce the comparison low-frequency component that vibrates by voice coil motor, thereby link rod part 161 (coupling apparatus 160) can be obtained vibration-isolating effect in broad frequency band.The passive vibrationproof of the elastic reaction of the active vibrationproof by being used in combination voice coil motor and the gas of usage space section 174, the vibration that can establishment acts on lens element 102 passes to optics group MPL2.
It should be noted that, except by making spatial portion 174 be negative pressure, thereby bear the structure of the deadweight of lens unit LS2 and the first connecting elements 164, also can connect the first connecting elements 164 and the second connecting elements 166 with spring member.
It should be noted that, in described embodiment, lens unit LS2 only keeps a lens element 102, but can keep a plurality of lens elements (optical element).
In addition, in the exposure device of embodiment 2, projection optical system PL2 is divided into two crowds of projection optical system main body MPL2 between optical element 102, mask M2 and the optical element 102 etc., but can be separated into more than 3 groups.
It should be noted that, in described embodiment, the second connecting elements 166 of link rod part 161 is connected on the lens barrel chassis 108, but also can be connected to other members for example on the rubber 103 (lower layer part 103B).
It should be noted that, in described embodiment, the attitude of lens element 102 control (for the active vibration Restrained Control of optics group MPL2) is the FEEDBACK CONTROL of carrying out according to the position instrumentation result based on scrambler 177,178 lens element 102, but might produce delay this moment in control.Therefore, employing is before exposure, exposure device EX2 when obtaining scan exposure in advance and about the physical quantity of the movement of liquid 101, according to the physical quantity of obtaining, drive link section 161 (voice coil motors 172) when exposure, thereby carry out the feedforward control of the attitude control of lens element 102, can carry out the active vibrationproof.It should be noted that, also can make up FEEDBACK CONTROL and feedforward control.
When carrying out feedforward control, carry out in advance test exposure, carry out the derivation of a plurality of physical quantitys.Namely carry out the identification experiment of the system of exposure device EX2, obtain the acting characteristic of the physical quantity that comprises this system.In identification experiment, use liquid supply mechanism 110 and liquids recovery mechanism 120 to soak under the state of district AR2 at formation liquid between lens element 102 and the substrate P 2, scanning substrate platform PST2, use described scrambler 177,178 or laser interferometer 182 detect physical quantitys.It should be noted that, in identification experiment, certainly do not drive voice coil loudspeaker voice coil 172,173.As the physical quantity that detects, enumerate relative position, relative velocity, the relative acceleration of position, speed and acceleration, lens element 102 and substrate P 2 of position, speed and acceleration, the lens element 102 of moment in the exposure sequence, substrate P 2.Detect these positions, speed, acceleration about whole (6DOF) value of X-axis, Y-axis, Z axis, θ X, θ Y, θ Z direction.As the physical quantity that detects, also enumerate the amount (volume, quality) of the liquid 1 of supply.The described a plurality of physical quantitys that detect in identification experiment are stored among the control device CONT2.Control device CONT2 is according to the physical quantity that detects, determine to be used for driving the controlled quentity controlled variable (control electric power) of voice coil motor 172 (173), in order to carry out the vibrationproof to optics group MPL2 according to the physical quantity that determines, Yi Bian drive voice coil motor 172, Yi Bian carry out this exposure.Control device CONT2 uses voice coil motor 172, can carry out vibrationproof according to the acting characteristic of exposure device EX2 self, can maintain required state to the position relationship of optics group MPL2 and lens element 102.
But control device CONT2 can control the attitude of lens element 102 by making a plurality of link rod parts 161 flexible respectively as mentioned above.Therefore, control device CONT2 actively controls lens element 102 for the attitude of optics group MPL2 by making link rod part 161 flexible, can adjust by projection optical system PL2 and be formed on pattern image on the substrate P 2.And, by driving lens element 102, can control at least one in image planes, image position, the distortion.By driving lens element 102, adjust pattern image, when making the image planes of projection optical system PL2 consistent with substrate P 2 surfaces, compare with the structure that drives heavy weight Substrate table PST2, can drive low weight lens element 102, so can obtain the response of high speed.Certainly this moment, can drive Substrate table PST2 and lens element 102 both sides.
In described embodiment, be according to according to the scrambler 177 that arranges respectively in 6 link rod parts 161,178 instrumentation result, obtain the structure of the attitude of lens element 102.At this moment, control device CONT2 is according to the instrumentation result of 6 link rod parts 161, scrambler 177,178 instrumentation result, carry out computing, obtain the attitude information of lens element 102, so sometimes because the device alignment error of link rod part 161 produces position instrumentation error (error of calculation).Therefore, as shown in figure 12, can be by the measuring device 190 with laser interference meter systems, instrumentation lens element 102 is for the positional information of optics group MPL2.Control device CONT2 makes link rod part 161 flexible respectively, the attitude of control lens element 102 according to the instrumentation result of measuring device 190.Can directly not obtain lens element 102 for the positional information of optics group MPL2 by computing by the laser interference meter systems, so can obtain with high precision the positional information of lens element 102.
In Figure 12, measuring device 190 (laser interference meter systems) have be arranged on lens unit LS2+moving lens 191 of X one side mark allocation, be arranged on lens barrel PK2+reference mirror (fixed mirror) 192 of X one side mark allocation, be arranged on the laser interferometer 193 of the position relative with moving lens 191 and reference mirror 192.Long light beam (mensuration light) is surveyed in 191 irradiations of 193 pairs of moving lens of laser interferometer, and to reference mirror 192 irradiation reference beams (with reference to light).Based on the long light beam of survey of irradiation and reference beams respectively from the light accepting part reception by laser interferometer 193 of the reflected light of moving lens 191 and reference mirror 192, laser interferometer 193 is these interference of light, the optical path length variable quantity of instrumentation take the optical path length of reference beams as the long light beam of survey of benchmark, and then the position (coordinate) of the moving lens 191 of instrumentation take reference mirror 192 as benchmark.Reference mirror 192 is arranged on the lens barrel PK2, and moving lens 191 is arranged on the lens unit LS2, so laser interferometer 193 energy instrumentation lens unit LS2 are for the position of the X-direction of lens barrel PK2.Although same not shown, but lens unit LS2 and lens barrel PK2+Y one surveys moving lens and reference mirror also is set, in the position relative with them laser interferometer is set, by the position of this laser interferometer energy instrumentation lens unit LS2 for the Y direction of lens barrel PK2.In addition, by moving lens 191 and reference mirror 192 being shone at Y direction at least 2 light beams arranged side by side from laser interferometer 193 handles, energy instrumentation lens unit LS2 is for the position of the θ z direction of lens barrel PK2.
At lens barrel PK2, a plurality of (3 place) assigned position that differs from one another at the circumferencial direction of lens barrel PK2 is installed respectively laser interferometer 194 (194A～194C).But, in Figure 12, represent typically a laser interferometer 194A among 3 laser interferometer 194A～194C.In addition, at the upper surface of lens unit LS2, in the position relative with each laser interferometer 194 moving lens 195 is installed, is parallel to the long light beam of survey of Z-direction from 195 irradiations of 194 pairs of moving lens of each laser interferometer.It should be noted that, the reference mirror corresponding with laser interferometer 194 is installed on the lens barrel PK2, perhaps is built in the laser interferometer 194, and be not shown in Figure 12.Laser interferometer 194 energy instrumentation lens unit LS2 are to the position of the Z-direction of lens barrel PK2.In addition, according to 3 laser interferometers 194 instrumentation result separately, energy instrumentation lens unit LS2 is for the θ X of lens barrel PK2, the position of θ Y-direction.
The instrumentation result of described each laser interferometer exports control device CONT.Control device CONT2 is that lens unit LS2 is for each positional information about X-axis, Y-axis, Z axis, θ X, θ Y, θ Z direction of lens barrel PK2 according to the instrumentation result of described each laser interferometer, a plurality of link rod parts 161 are stretched, can control lens unit LS2 for each position about X-axis, Y-axis, Z axis, θ X, θ Y, θ Z direction of lens barrel PK2.
It should be noted that, in the present embodiment, the position relationship of measuring device 190 instrumentation lens unit LS2 and lens barrel PK2, but lens unit LS2 keeps lens element 102, lens barrel PK2 keeps optics group MPL2, so the position relationship of the position relationship of instrumentation lens unit LS2 and lens barrel PK2 and instrumentation lens element 102 and optics group MPL2 is equal in fact.Therefore, control device CONT2 can obtain the position relationship of lens element 102 and optics group MPL2 according to the instrumentation result of measuring device 190.
It should be noted that, the laser interferometer of the present embodiment is so-called two-way interferometer.
Figure 13 is the summary construction diagram of interferometer 193.It should be noted that, other interferometers 194,182 etc. also have the structure equal with interferometer shown in Figure 13.Interferometer 193 has: the light source 220 of outgoing beam; Penetrating from light source 220, be divided into the polarization spectroscope 224 of the long light beam 191A of survey and reference beams 192A by the light beam of catoptron 223 incidents; Be configured between polarization spectroscope 224 and the moving lens 191 λ that passes through from the long light beam 191A of the survey of polarization spectroscope 224/4 plates 225 (225A, 225B); Be configured between polarization spectroscope 224 and the reference mirror 192 λ that the reference beams 192A from polarization spectroscope 224 by catoptron 227 passes through/4 plates 226 (226A, 226B); By moving lens 191 reflections and by the long light beam 191A of survey of polarization spectroscope 224 and the corner cube prism 228 that reflects and pass through the reference beams 192A difference incident of polarization spectroscope 224 by reference mirror 192; Reception is by the light accepting part 230 of the catoptrical synthetic light (interference light) of the reflected light of the synthetic long light beam 191A of survey of polarization spectroscope 224 and reference beams 192A.
Be divided into the long light beam 191A of survey and reference beams 192A from the light beam of 220 pairs of polarization spectroscope 224 incidents of light source.Wherein survey long light beam 191A by behind λ/4 plate 225A, shine moving lens 191.By λ/4 plate 225A, thereby after the long light beam 191A of the survey of rectilinearly polarized light is transformed to circularly polarized light, shine moving lens 191.Shine the reflected light of the long light beam 191A of survey of moving lens 191 again by behind λ/4 plate 225A, incident polarization spectroscope 224 arrives corner cube prism 228.By the long light beam 191A of the survey of corner cube prism 228 incident polarization spectroscope 224 again, behind λ/4 plate 225B, shine moving lens 191.Its reflected light by behind λ/4 plate 225B, incides polarization spectroscope 224 again.And pass through catoptron 227 from the reference beams 192A that polarization spectroscope 224 penetrates, and behind λ/4 plate 226A, irradiation reference mirror 192.Reference beams 192A shines reference mirror 192 with circularly polarized light, and its reflected light by behind λ/4 plate 226A, incides polarization spectroscope 224 again, arrives corner cube prism 228.Reference beams 192A by corner cube prism 228 is incident polarization spectroscope 224 again, behind λ/4 plate 226B, and irradiation reference mirror 192.Its reflected light by behind λ/4 plate 226B, incides polarization spectroscope 224 again.After synthetic by polarization spectroscope 224 by the long light beam 191A of the survey of λ/4 plate 225B and the reference beams 192A by λ/4 plate 226B, receive at light accepting part 230.The interferometer 193 of the present embodiment is made of the so-called two-way interferometer of moving lens (reference mirror) irradiation being surveyed long light beam (reference beams) for 2 times, even have moving lens 191, from the catoptrical direct of travel of the long light beam of survey of moving lens 191 also indeclinable feature.
Figure 14 is the interferometric mode chart of two-way.
Among Figure 14, only diagram shines the long light beam 191A of survey of moving lens 191, omits λ/4 plates etc.
In Figure 14, the light beam that penetrates from light source 220 incides polarization spectroscope 224 by catoptron 223.Survey long light beam 191A by the reflection of the reflecting surface of polarization spectroscope 224 after, shine the reflecting surface of moving lens 191, this reflected light behind the reflecting surface of moving lens 191, is subjected to light at light accepting part 230 by polarization spectroscope 224 and corner cube prism 228 after-suns.At this moment, when the inclination of the reflecting surface that does not have moving lens 191, (angle for Y-axis is 0 degree), surveying long light beam 191A advances shown in the dotted line of Figure 14 like that, penetrate from polarization spectroscope 224, become parallel towards the outgoing beam of light accepting part 230 with incident beam to polarization spectroscope 224 incidents.And when the reflecting surface tilt angle theta of moving lens 191, surveying long light beam advances like that by the single-point line 191A ' of Figure 14, but this moment, becomes parallel with incident beam from the outgoing beam of polarization spectroscope 224.Namely the outgoing beam working direction separately when not having becomes identical when the inclination of the reflecting surface that has moving lens 191.Therefore, mode chart as shown in figure 15 is such, when 191 irradiations are surveyed long light beam 191A 1 time to moving lens, if moving lens 191 exists to tilt, for the state that does not have to tilt, catoptrical working direction changes, be created in the problem that light accepting part is not subjected to light, but as with reference to Figure 14 explanation, according to the two-way interferometer, even moving lens 191 tilts, also can be subjected to light with light accepting part 230.
It should be noted that, in the embodiment of reference Figure 12 explanation, have laser interferometer 193,194 measuring device 190 instrumentation lens barrel PK2 and the position relationship of lens unit LS2, but the reflecting member that has the reflecting surface of the long light beam of survey that can reflected illumination in the assigned position setting of lens element 102, from laser interferometer to the long light beam of this reflecting surface irradiation survey.For example as shown in figure 16, irradiation is installed the reflector elements with reflecting surface from the position of the long light beam of survey of laser interferometer 193 in lens element 102, or from the position of the long light beam of survey of laser interferometer 194 the metal steam plated film is set in irradiation, this film surface as reflecting surface.When for example between lens unit LS2 and lens element 102, having the structure of spring device (sweep), when supposing the skew of lens unit LS2 and lens element 102 positions, if as the embodiment with reference to Figure 12 explanation, position instrumentation result according to lens unit LS2, to control the attitude of lens element 102 in order to adjust pattern image, will produce the possibility that pattern image can't be controlled to be required state, but as shown in figure 16, form reflecting surface from it at lens element 102, use the position of this reflecting surface instrumentation lens element 102, thereby can correctly obtain the positional information of lens element 102.
It should be noted that, in the above-described embodiment, use the interferometer system as measuring device 190, but can make measuring device otherwise.For example also can replace above-mentioned interferometer system, use the optically measuring device of the positional information of the upper instrumentation mark that forms of instrumentation lens unit LS2.
In addition, by coupling apparatus 160, lens element 102 can move, so when being full of liquid 101 between lens element 102 and substrate P 2, use coupling apparatus 160 in advance lens element 102 to be risen, the distance of substrate P 2 and lens element 102 is fully pulled open, then configure liquid in substrate P 2, then drive coupling apparatus 160, lens element 102 is descended, substrate P 2 and lens element 102 are approached, soak district AR2 thereby can between lens element 102 and substrate P 2, form liquid.At this moment, when lens element 102 descends, make lens element 102 near substrate P 2 from vergence direction, when having bubble in the liquid 101, might remove this bubble.In addition, before exposure, on the substrate P 2 during feed fluid 101, do not use liquid supply mechanism 110, can use the fluid Supplying apparatus that is arranged on the position different from liquid supply mechanism 110, at substrate P 2 configuration liquid 101.
In described embodiment, the shape of said nozzle also is not particularly limited, and about the long limit of projection in zone AR1, can carry out with 2 pairs of nozzles supply or the recovery of liquid 101.It should be noted that, at this moment, for no matter+directions X or-which direction of directions X can both carry out supply and the recovery of liquid 101, can configure side by side up and down supply nozzle and reclaim nozzle.
In addition, in the above-described embodiments, in the support of lens unit LS2, use the coupling apparatus of 2 physics that adopt bindiny mechanism, but be not limited to this, can in the support of substrate holder PH2, use.
As mentioned above, the liquid 50,101 of described each embodiment is made of pure water.Pure water can easily be obtained in semiconductor fabrication factory in a large number, and has not the harmful effect to the photoresist on substrate P, the P2 or optical element (lens).In addition, pure water is not for the harmful effect of environment, and the content of impurity is extremely low, so can expect the effect of the optical element surface that arranges on the top end face of surface on clean substrate P, the P2 and projection optical system PL, PL2.
And, pure water (water) is about 1.44 for the refractive index n of exposure light EL, the EL2 of wavelength 193nm, so light source as exposure light EL, EL2, when using the ArF excimer laser (wavelength 193nm), on substrate P, P2, shortwave turns to the i.e. about 134nm of 1/n, can obtain high exploring degree.Compare in the depth of focus and the air, expand approximately doubly namely 1.44 times of n to, so when the depth of focus that only need guarantee when in air, using with degree, can further increase the numerical aperture of projection optical system PL, PL2, thereby the exploring degree improves.
In the present embodiment, at the top of projection optical system PL, PL2 mounted lens 60,102, but as the optical element on the top that is installed in projection optical system PL, PL2, can be the optical sheet that the optical characteristics of projection optical system PL, PL2 is for example used in the adjustment of aberration.The permeable planopaallel plate of light EL perhaps exposes.
It should be noted that, the liquid 50, the 101st of the present embodiment, water, but can be water liquid in addition, for example the light source as exposure light EL, EL2 is F 2During laser, this F 2Laser does not see through water, so as liquid 50,101, can use F this moment 2The liquid of the fluorine classes such as the permeable fluorine class oil of laser or mistake fluorinated polyether (PFPE).In addition as liquid 50,101, can also use the permeability that has exposure light EL, EL2, refractive index is high as far as possible, for the stable material (for example cedar oil) of photoresist that applies on projection optical system PL, PL2 or substrate P, the P2 surface.
It should be noted that; substrate P, P2 as described each embodiment; the semiconductor chip of semiconductor devices manufacturing usefulness not only can also be used the mask that uses in the glass substrate of semiconductor device by using, potsherd that thin-film head is used or the exposure device or the raw sheet (synthetic quartz, silicon chip) of graticule.
In addition, in the above-described embodiment, adopt locally to be full of exposure device between projection optical system PL, PL2 and substrate P, the P2 with liquid, but the platform that makes the substrate that keeps exposure object that also can in Unexamined Patent 6-124873 communique, describe in liquid bath, describe in mobile liquid immersion exposure apparatus or the Unexamined Patent 10-303114 communique form the liquid tank of prescribed depth and keep therein the liquid immersion exposure apparatus of substrate at platform.
As exposure device EX, EX2, except making mask M, M2 and substrate P, P2 synchronizing moving, the scanning exposure apparatus (scanning-exposure apparatus) of the stepping of the pattern scan exposure of mask M, M2 and scan mode, can be under the static state making mask M, M2 and substrate P, P2 also, the unified exposure of the pattern of mask M, M2, substrate P, P2 are used one by one in the projection aligner (one by one portable exposure device) of mobile stepping and repetitive mode.In addition, the present invention also can be at least using in the exposure device of the local overlapping stepping that copies of 2 patterns and overlap mode on substrate P, P2.
In addition, the present invention also can have processed substrates such as laying respectively wafer, can use in the twin-stage-type exposure device of 2 platforms that the XY direction independently moves.The structure of twin-stage-type exposure device and exposure actions are for example at Unexamined Patent 10-163099 number and Unexamined Patent 10-214783 number (corresponding United States Patent (USP) 6,341,007,6,400,441,6,549,269 and 6,590,634), special table 2000-505958 number (corresponding United States Patent (USP) 5,969,441) or United States Patent (USP) 6,208, describe in 407, in the scope that the state decree of appointment or selection allows in the application of border home, quote these contents as a part described herein.
As exposure device EX, EX2, be not limited on substrate P, P2 the exposure device of the semiconductor element manufacturing usefulness of semiconductor element pattern exposure, also can be widely used in the liquid crystal display cells manufacturing with or the exposure device used of display manufacturing, the exposure device for the manufacture of thin-film head, imaging apparatus (CCD) or graticule in.
When to Substrate table PST or mask platform MST use linear electric machine, can use any one of the air suspension type that utilizes air bearing and the magnetic levitation type that utilizes Lorentz force or reactance power.In addition, each PST, MST can move along guide rail, can be do not arrange guide rail without rail types.The example that platform is used linear electric machine is at United States Patent (USP) 5,623, describes in 853 and 5,528,118, specify in the application of border home or scope that the state decree selected allows in, use the content of these documents as a part described herein.
As the driving mechanism of each PST, PST2, MST, MST2, can use the magnet component of distributed magnet two-dimensionally relatively with the motor subassembly that configures two-dimensionally coil, drive the planar motor of each PST, PST2, MST, MST2 by electromagnetic force.At this moment, magnet component is connected any one party is connected with each PST, PST2, MST, MST2 with the motor subassembly, the all-moving surface one side setting of the opposing party of magnet component and motor subassembly at platform PST, PST2, MST, MST2.
The reacting force that produces for the movement owing to Substrate table PST does not pass to projection optical system PL, can use framing component mechanically to be discharged on the ground.The disposal route of this reacting force is for example at United States Patent (USP) 5,528, describe in detail in 118 (the Unexamined Patent 8-166475 communiques), in the scope that the state decree of appointment or selection allows in the application of border home, use the content of these documents as a part described herein.
The reacting force that produces for the movement that makes by mask platform MST does not pass to projection optical system PL, can use framing component that this reacting force mechanically is discharged on the ground yet.The disposal route of this reacting force is for example at United States Patent (USP) 5,874, describe in detail in 820 (the Unexamined Patent 8-330224 communiques), in the scope that the state decree of appointment or selection allows in the application of border home, use the content of these documents as a part described herein.
Keep the mechanical precision of regulation, electric precision, the assembling of optical accuracy ground to comprise the various subsystems of enumerating in claims of the application, make exposure device EX, the EX2 of the present embodiment.In order to ensure various precision, in the front and back of assembling, about various optical systems, carry out for the adjustment that realizes optical accuracy, about various mechanical systems, carry out, carrying out be used to the adjustment that realizes electric precision about various electric systems for the adjustment that realizes mechanical precision.
Number of assembling steps from from various subsystems to exposure device comprises the wiring connection of the mutual mechanical connection of various subsystems, circuit, the pipeline of air pressure circuit connects.Before the number of assembling steps from various subsystems to exposure device, certainly there is each subsystem number of assembling steps separately.If each subsystem finishes to the number of assembling steps of exposure device, just comprehensively adjust, guarantee the various precision as exposure device.It should be noted that, the manufacturing of exposure device is wished to carry out in the clean room of management temperature and cleanliness.
The microdevices such as semiconductor devices as shown in figure 17, through the step 201 of carrying out the function of microdevice and performance design, make step 202 based on the mask (graticule) of this design procedure, make the step 203 of the substrate of device, the exposure device by described embodiment exposes the pattern of mask at substrate processing substrate step 204, device number of assembling steps (comprising slicing step, engagement step, encapsulation step) 205, check step 206 manufacturing.
Applicability on the industry
The present invention is full of between projection optical system and the substrate with liquid, by described projection optical system and described liquid pattern image is projected on the described substrate, the exposure device that accordingly described substrate is exposed, described projection optical system comprise have from first group of the optical component of described liquid contact and with this first group different second group, this first group and second group of separated support in vibration, even so under the state that is full of liquid between projection optical system and the substrate, also can suppress the deteriorated of pattern image, thereby can produce high-precision device.

Claims (10)

1. an exposure device makes described substrate expose by via projection optical system and liquid pattern image being projected on the substrate, and described exposure device is characterised in that and comprises:
Liquid dipping machine structure, in the exposure of aforesaid substrate, only the part formation liquid at aforesaid substrate soaks the district,
Above-mentioned projection optical system comprises: have first group of the optical component that contacts with described liquid; And second group of between above-mentioned first group and pattern, configuring,
Above-mentioned first group with above-mentioned second group the vibration on supported discretely, wherein
Described exposure device also comprises
Measuring device carries out instrumentation to above-mentioned first group and above-mentioned second group position relationship.
2. exposure device according to claim 1 is characterized in that comprising:
Substrate table keeps and mobile aforesaid substrate,
Be full of at least a portion space between above-mentioned projection optical system and the aforesaid substrate with aforesaid liquid.
3. exposure device according to claim 2 is characterized in that comprising:
Driving mechanism according to the instrumentation result of above-mentioned measuring device, in order to adjust above-mentioned first group and above-mentioned second group position relationship, makes above-mentioned first group and above-mentioned the second faciation to movement.
4. exposure device according to claim 2 is characterized in that comprising:
The first supporting member supports above-mentioned first group;
The second supporting member supports above-mentioned second group, is different from above-mentioned the first supporting member,
For not mutual transmitting vibrations, above-mentioned the first supporting member is separated with above-mentioned the second supporting member.
5. exposure device according to claim 4 is characterized in that comprising:
Substrate table keeps and mobile aforesaid substrate; And
The first foundation member,
Wherein,
On above-mentioned first foundation member, support non-contactly the aforesaid substrate platform,
The aforesaid substrate platform can two-dimensional movement on above-mentioned first foundation member,
Above-mentioned the first supporting member is installed on the above-mentioned first foundation member.
6. exposure device according to claim 4 is characterized in that comprising:
Substrate table keeps and mobile aforesaid substrate;
The first foundation member; And
The second basic component,
Wherein,
On above-mentioned first foundation member, support non-contactly the aforesaid substrate platform,
The aforesaid substrate platform can two-dimensional movement on above-mentioned first foundation member,
On above-mentioned the second basic component, support above-mentioned first foundation member,
Above-mentioned the first supporting member is installed on above-mentioned the second basic component.
7. exposure device according to claim 6 is characterized in that:
For not mutual transmitting vibrations, above-mentioned first foundation member is separated with above-mentioned the second basic component.
8. the described exposure device of each according to claim 1-7 is characterized in that:
Above-mentioned optical component comprises planopaallel plate.
9. the described exposure device of each according to claim 1-7 is characterized in that:
Above-mentioned optical component comprises lens.
10. device making method is characterized in that:
Right to use requires the exposure device described in 1.
CN2009101408816A 2003-07-09 2004-07-08 Exposure apparatus, and device fabricating method Expired - Fee Related CN101576717B (en)

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EP2469340B1 (en) * 2010-12-21 2021-01-06 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
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US10551751B2 (en) 2012-04-26 2020-02-04 Asml Netherlands B.V. Lithography apparatus and device manufacturing method
CN104428715B (en) * 2012-07-13 2017-06-30 株式会社尼康 Lining processor and device making method
JP5883043B2 (en) * 2013-02-28 2016-03-09 株式会社沖データ Reading device and composite device
CN104049317A (en) * 2013-03-11 2014-09-17 鸿富锦精密工业（深圳）有限公司 Optical-communication-module assembly device
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