CN101592332B - Waste heat boiler for recovering waste heat generated by incineration of wastes from polysilicon purification process - Google Patents
Waste heat boiler for recovering waste heat generated by incineration of wastes from polysilicon purification process Download PDFInfo
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- CN101592332B CN101592332B CN200910022651XA CN200910022651A CN101592332B CN 101592332 B CN101592332 B CN 101592332B CN 200910022651X A CN200910022651X A CN 200910022651XA CN 200910022651 A CN200910022651 A CN 200910022651A CN 101592332 B CN101592332 B CN 101592332B
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Abstract
The in'vention discloses a waste heat boiler for recovering waste heat generated by the incineration of wastes from a polysilicon purification process, which comprises a circulating pump, a drum, a boiler support and a boiler body arranged on the boiler support, wherein the boiler body comprises a boiler closed shell, a smoke inlet shutter, a smoke outlet shutter, a high temperature evaporator, a first low temperature evaporator, a second low temperature evaporator, a dust removing device and a dust hopper, and the boiler closed shell has a symmetrically-distributed and mutually-independent double flue structure consisting of a left film-type water-cooled blast furnace wall, a right film-type water-cooled blast furnace wall and a 'horizontal H'-shaped frame sealed partition wall. With the design of symmetrically-arranged double flues, the boiler can operate through a spare flue when a flue on one side fails to work so as to ensure normal operation. The boiler is a waste heat boiler for recovering waste heat generated by the incineration of the wastes from the polysilicon purification process, which is in accordance with the properties of polysilicon smoke, meets technical requirements and is easy to repair and high in operational stability.
Description
Technical field
The invention belongs to the waste heat boiler field of Thermal Power Engineering application technology, relate to a kind of waste heat boiler, especially a kind of waste heat boiler that is used to reclaim generated by incineration of wastes from polysilicon purification used heat.
Background technology
After the seventies in 20th century; along with the in-depth of people to global energy crisis and ecological deterioration problem understanding; the utilization of this renewable clear energy sources of solar energy has been subjected to generally paying attention to; started the upsurge of exploitation solar cell; thereby formed a series of application and developments and be principal mode, comprised the industrial chain-photovoltaic industries such as manufacturing of the production of high purity polycrystalline silicon raw material, manufacture of solar cells, solar module production, associated production equipment with silicon materials.Polysilicon is unique material of making the computer CPU silicon chip, is the most important raw material of silicon chip insulating barrier, and silicon is excellent semi-conducting material, can make silicon transistor.Therefore, polysilicon is a key foundation material of making products such as integrated circuit, photovoltaic solar cell, is the important foundation stone of Information of Development industry and photovoltaic new forms of energy industry.And the technology of preparation solar-grade polysilicon and semiconductor grade polysilicon to have become collection quality, cost and environmental benefit be the technology that has development potentiality of one.
At present, production of polysilicon technology has more than 70% and all to adopt improvement Siemens Method, i.e. the closed loop hydrogen reduction of trichlorosilane in the world.In the external production technology, the exhaust gas utilization condensation acid-making process of generation is handled, and does not have the waste heat recovery problem.Adopting waste heat recovery is the new technology that China adopts first.In the domestic polysilicon production process, produce the waste gas liquid of chloride ion-containing, its Main Ingredients and Appearance is SiH
2Cl
2, SiHCl
3, SiCl
4, HCl and a spot of metal chloride, belong to poisonous, harmful, inflammable, explosive material, must handle.At present by such discarded object is carried out burning disposal, and reclaim wherein utility.In this burning process, the flue-gas temperature after the incinerator outlet is 900～950 ℃, has carried a large amount of heats and contaminant component, and as being controlled without effectively utilizing also, not only whole economic efficiency is low, and will cause very big pollution to environment.Therefore can effectively utilize these flue gas heat energy by adding waste heat boiler at the incinerator afterbody, produce steam-electric power or be used for the heating of production process or for the life heating, and then can improve the energy efficiency of whole waste recovery system, and effectively reduce the discharging of poisonous component.
Present domestic pertinent literature and the patent that the polysilicon waste heat boiler is not arranged yet is so will develop the polysilicon twice laid waste heat boiler with China's independent intellectual property right.The applicant researchs and analyses existing polysilicon waste heat boiler technology, and it is big blank to find that domestic waste heat boiler design theory at the polysilicon smoke characteristic also exists, the Systems Theory of lack the design of polysilicon waste heat boiler, making.There are the following problems in the recovery of generated by incineration of wastes from polysilicon purification process waste heat for existing moulding waste heat boiler structure applications:
(1) waste heat flue gas that produces of polysilicon purifying technique contains a large amount of toxic gases, but when carrying out the conventional boiler structural design, often the sealing of integral body is not taken into full account, to operating personnel and maintenance personal's security consideration deficiency.
(2) generated by incineration of wastes from polysilicon purification is crossed range request and is carried out continuously, can blowing out because of other device fails, and, in a single day waste heat boiler breaks down, the filter in its downstream is with serious overtemperature, therefore, require waste heat boiler to have continuous operation and the ability that do not have an accident, this is the operating mode that conventional waste heat boiler can not be realized;
(3) because polysilicon purifying technique flue gas corrosion is higher, and the life-span of heating surface is shorter, and frequent maintain and replace heating surface regular meeting influences the normal operation of waste heat boiler.
(4) owing to also have section H Cl gas in the polysilicon purifying technique flue gas, existing design waste heat boiler is not often considered the influence of acid dew point, so the corrosion of heating surface gas side is comparatively serious.
(5) polysilicon purifying technique SiO
2The abrasiveness of dust is very strong, and the flue gas flow rate that the high-temperature of import simultaneously causes import is far above outlet, and therefore, the wearing and tearing of import are very serious.
(6) to the bonding characteristic, characteristic of char residue etc. of ash in the polysilicon purifying technique flue gas do not know much have less understanding into, lack effective deashing device.
(7) exhanst gas outlet of waste heat boiler connects filter for installation, but often occurs the low excessively situation of exhaust gas temperature in the waste heat boiler actual motion, can not satisfy the temperature requirement of filter inlet.
For all the foregoing reasons, make that the thermal efficiency of existing moulding waste heat boiler structure is low, operation stability is poor, the outlet Gas Parameters is undesirable, limit polysilicon and prepared the development that waste recovery in the industry utilizes system, be necessary to invent a kind of stable, thermal efficiency utilization rate height, the rational polysilicon Waste Heat Recovery of exhaust gas temperature waste heat boiler, fill up domestic polysilicon waste heat boiler technology blank in this respect, further improve the international competitiveness of China's polycrystalline silicon preparing process technology.
Summary of the invention
The objective of the invention is to overcome the shortcoming of above-mentioned prior art, a kind of waste heat boiler that is used to reclaim generated by incineration of wastes from polysilicon purification used heat is provided, this waste heat boiler meets polysilicon purifying technique flue gas characteristic, satisfies technological requirement and be easy to and safeguard to have very high operation stability.
The objective of the invention is to solve by the following technical programs:
This waste heat boiler that is used to reclaim generated by incineration of wastes from polysilicon purification used heat, comprise circulating pump, drum, boiler support and be located at boiler body on the boiler support, described boiler body comprises the boiler sealing shell, advance the mouth flashboard, the outlet flue flashboard, high-temperature evaporator, first cryogenic vaporizer, second cryogenic vaporizer, deashing device and ash bucket, described boiler sealing shell is made up of symmetrical distribution and separate twin flue, be aligned in sequence with high-temperature evaporator by import to outlet in each flue, first cryogenic vaporizer, second cryogenic vaporizer, the next part case of described high-temperature evaporator is connected through pipeline with the delivery port of circulating pump, the upper collecting chamber of high-temperature evaporator is connected through down-comer with the next part case of first cryogenic vaporizer, the upper collecting chamber of first cryogenic vaporizer is connected through down-comer with the next part case of second cryogenic vaporizer, and the upper collecting chamber of second cryogenic vaporizer links to each other with drum by wireway; The bottom of described boiler sealing shell also is provided with a plurality of travel(l)ing rests, fixedly connected with high-temperature evaporator, first cryogenic vaporizer, second cryogenic vaporizer respectively in the upper end of described a plurality of travel(l)ing rests, the lower end of described travel(l)ing rest is provided with castor and track, and described castor is located on the track.
Also be provided with the bypass flue on the above-mentioned boiler sealing shell, described bypass flue one end is communicated with the flue middle part, and the other end is communicated with flue outlet.
Above-mentioned high-temperature evaporator, first cryogenic vaporizer and second cryogenic vaporizer are flag formula heated face structure.
The next part case water inlet of above-mentioned high-temperature evaporator is the low pressure saturation water.
Waste heat boiler of the present invention has following some beneficial effect:
1) adopts the integral sealing flue, prevent that toxic gas from leaking;
2) employing has the twin flue structural design of standby flue, adopts standby flue work during maintenance, does not influence the normal operation of waste heat boiler;
3) heating surface adopts the flag formula to arrange, improves flue gas flow rate, and then improves heat transfer efficiency;
4) twin flue is fixed on the travel(l)ing rest that translation guide rail and castor are housed separately, and in a single day left and right sides flue breaks down, and switches through advancing the mouth flashboard, the flue gas standby flue of flowing through, the flue that breaks down is by guide rail or castor translation to the left or to the right, convenient disassembly, easy access;
5) designed by-pass flue, can control the high-temperature flue gas amount that afterbody is sneaked into, and then regulated exhaust gas temperature by bypass valve.
Description of drawings
Fig. 1 is the waste heat boiler structural representation that is used for polysilicon incineration of waste process Waste Heat Recovery of the present invention;
Fig. 2 is the A-A cutaway view of Fig. 1;
Fig. 3 is the front view and the profile of left side standpipe 9.
Fig. 4 is water circulation process figure.
Wherein: 1 for advancing the mouth flashboard; 2 is high-temperature evaporator; 3 is first cryogenic vaporizer; 4 is by-pass flue; 5 is second cryogenic vaporizer; 6 is bypass valve; 7 is the outlet flue flashboard; 8 is ash bucket; 9 is the left side standpipe; 10-1 is the next part case of high-temperature evaporator; 10-2 is the next part case of first cryogenic vaporizer; 10-3 is the next part case of second cryogenic vaporizer; 11 is " worker " font frame seal steel plate; 12 is U type pipe; 13-1 is the upper collecting chamber of high-temperature evaporator; 13-2 is the upper collecting chamber of first cryogenic vaporizer; 13-3 is the upper collecting chamber of second cryogenic vaporizer; 14 is demounting bolt; 15 is travel(l)ing rest; 16 is castor; 17 is drum; 18 are the drum support; 19 is closure plate; 20 is boiler support; 21 is " worker " font frame seal partition wall; 22 is deashing device; 23 is track; 24 is steam guiding tube; 25 is down-comer; 26 is bitch; 27 is the inlet flue duct changeover portion; 28 is the exhaust pass changeover portion; 29 is the right side standpipe; 30 is alumina silicate fiber felt; 31 is steel plate and colored steel.
The specific embodiment
Below in conjunction with accompanying drawing the present invention is done and to describe in further detail:
Referring to Fig. 1 and Fig. 2, organization plan of the present invention is:
Overall structure: the Forced-circulation Waste-heat Boiler of horizontal layout comprises circulating pump, is placed on drum and supports drum 17, the boiler support 20 on 18 and be located at boiler body on the boiler support 20.Boiler body comprises the boiler sealing shell, advances mouth flashboard 1, outlet flue flashboard 7, high-temperature evaporator 2, first cryogenic vaporizer 3, second cryogenic vaporizer 5, deashing device 22 and ash bucket 8.The boiler sealing shell is formed by left side fin panel casing furnace wall, right side fin panel casing furnace wall and " worker " font frame seal partition wall 21 and is symmetrically distributed and separate twin flue structure, wherein " worker " font frame seal partition wall 21 constitutes by being in internal layer " worker " font frame seal steel plate 11 and being in outer field protective materials, described " worker " font frame seal partition wall 21 is divided into upper, middle, and lower part, be in the middle part its steel plate of partition wall middle, steel plate external application concrete thermal-insulating material and refractory material.The inboard that is in upper and lower its steel plate of partition wall is respectively concrete thermal-insulating material and refractory material, and the outside of steel plate is the light thermal-insulating material, and insulation material and refractory material all are to be fixed up by bitch 26.Left side fin panel casing furnace wall is made of by the band steel welding left side standpipe 9, and left side fin panel casing furnace wall is respectively alumina silicate fiber felt 30, steel plate and colored steel 31 outward.Right side fin panel casing furnace wall is made of by the band steel welding right side standpipe 29, and identical with left side fin panel casing furnace wall, right side fin panel casing furnace wall also is respectively alumina silicate fiber felt 30, steel plate and colored steel 31 outward.Described flue two ends arrange that respectively pull-type advances mouth flashboard 1 and outlet flue flashboard 7, and it is welded on the steel plate at flue two ends.Each flue inside vertically is arranged in order to outlet by import and is furnished with high-temperature evaporator 2, first cryogenic vaporizer 3, second cryogenic vaporizer 5.The next part case 10-1 of described high-temperature evaporator 2 is connected through pipeline with the delivery port of circulating pump, the upper collecting chamber 13-1 of high-temperature evaporator 2 is connected through down-comer with the next part case 10-2 of first cryogenic vaporizer 3, the upper collecting chamber 13-2 of first cryogenic vaporizer 3 is connected through down-comer with the next part case 10-3 of second cryogenic vaporizer 5, and the upper collecting chamber 13-3 of second cryogenic vaporizer 5 links to each other with drum 17 by steam guiding tube 24.Above-described refractory material and boiler steel backplate all carry out preservative treatment, to prevent HCl and Cl
2Dew point corrosion.
Also be provided with bypass flue 4 on the above boiler sealing shell, bypass flue 4 one ends are communicated with the flue middle part, and the other end is communicated with flue outlet, also is provided with valve 6 on the bypass flue 4, and bypass flue 4 is located on the twin flue respectively for being symmetrically arranged.
As Fig. 2 and Fig. 3, high-temperature evaporator 2, first cryogenic vaporizer 3 and second cryogenic vaporizer 5 are equipped with many group heat exchanger tube rows, every row's heating surface connects many U type pipes 12 by a standpipe (left side standpipe 9 or right side standpipe 29), be left-right symmetry flag formula and arrange, three groups of heating surfaces of every side constitute two flues independently separately.Welding flat steel constitutes fin panel casing between the standpipe of right side standpipe 29 and left side standpipe 9, is beneficial to the both walls sealing, and left side wall and " worker " font frame seal partition wall are formed the left side flue, and right-side wall and " worker " font frame seal partition wall are formed the right side flue.With the main body of flag formula heating surface, not only make the heated face structure compactness, and manufacturing process is simplified greatly as the boiler heat convection.
The bottom of described boiler sealing shell also is provided with a plurality of travel(l)ing rests 15, fixedly connected with high-temperature evaporator 2, first cryogenic vaporizer 3, second cryogenic vaporizer 5 respectively in the upper end of each travel(l)ing rest 15, the lower end of described travel(l)ing rest 15 is provided with castor 16 and track 23, and described castor 16 is located on the track 23.The present invention adopts beam structure that boiler body is fixed on the boiler support 20, and boiler support 20 and travel(l)ing rest 15 are the channel-section steel structure.
Water circulation system: as Fig. 2 and Fig. 4, the next part case of high-temperature evaporator 2 is sent in feedwater through circulating pump by feed pump, enter the upper collecting chamber of high-temperature evaporator 2 through flag formula heating surface, enter the next part case of first cryogenic vaporizer 3 by down-comer 25, enter the upper collecting chamber of first cryogenic vaporizer 3 through flag formula heating surface, enter the next part case of second cryogenic vaporizer 5 by down-comer, enter the upper collecting chamber of second cryogenic vaporizer 5 through flag formula heating surface, advance the horizontal and vertical upper collecting chamber of putting on the furnace roof, and carry out the pre-separation of carbonated drink therein, steam water interface after will being heated by steam guiding tube 24 is introduced in the drum 17, the water separator of arranging in drum 17 separates, separate the saturated vapor that reaches steam quality and be incorporated into hot user from the stop valve of drum 17, the water of water of separating and feed pump outlet converges, and continues circulation.The present invention does not adopt the economizer structure, and the saturated feedwater of low pressure is adopted in feedwater, all by evaporating heating surface, guarantees that higher tube wall temperature is to prevent acid dew piont corrosion.
As Fig. 3, the centre position of flag formula heating surface standpipe is provided with closure plate 19, and closure plate 19 is bow-shaped structural, and closure plate makes 90% feedwater by U type pipe, and the feedwater of residue 10% is convenient to the cooling of standpipe heating surface by standpipe.
Air and gas system: when boiler normally moves, flue gas is from the boiler left and right sides, by advancing mouth flashboard 1 and inlet flue duct changeover portion 27 enters twin flue, high-temperature evaporator 2, first cryogenic vaporizer 3 and second cryogenic vaporizer 5 by arranging in a left side or the right flue successively, left and right sides exhaust opening from the boiler rear portion, discharge through exhaust pass changeover portion 28 and outlet flue flashboard 7, be for further processing.Because for twin flue is arranged, can utilize the Gravity Separation of flue gas and the centrifuge effect of transformation, carry out secondary separation in flag formula heating surface flue, the part that particle in the flue gas is bigger separates, reduce fouling of heating surface, significantly reduced the original dust exhausting concentration of boiler.For satisfying technological requirement, make exhaust gas temperature unlikely low excessively, the present invention arranges by-pass flue 4 between first cryogenic vaporizer 3 and back-end ductwork, make high-temperature flue gas sneak into afterbody (as Fig. 1) by by-pass flue 4, and controls the high-temperature flue gas amount that afterbody is sneaked into by bypass valve.When one of them flue surface goes wrong, can extract the demounting bolt 14 that is positioned at the lower collecting box two ends, dismounting time outer layer plate and colored steel 31 by advancing mouth flashboard 1 and outlet flue flashboard 7 before and after closing, pulling travel(l)ing rest 15, and then heating surface carries out off-the-line under the dismounting.Because travel(l)ing rest 15 bottoms are equipped with castor 16 and guide rail 23, the dismounting maintenance of this waste heat boiler is economical, convenient.
The present invention considers the severe corrosive of flue gas, adopt the integral sealing flue, prevent that toxic gas from leaking, adopt the twin flue structure, adopt standby flue work during maintenance, can avoid changing the normal operation that heating surface influences waste heat boiler, the more important thing is and avoid polysilicon purifying technique process to interrupt, and rapidly the heating surface that goes wrong is keeped in repair.
Claims (6)
1. waste heat boiler that is used to reclaim generated by incineration of wastes from polysilicon purification used heat, comprise circulating pump, drum (17), boiler support (20) and be located at boiler body on the boiler support (20), described boiler body comprises the boiler sealing shell, advance mouth flashboard (1), outlet flue flashboard (7), high-temperature evaporator (2), first cryogenic vaporizer (3), second cryogenic vaporizer (5), deashing device (22) and ash bucket (8), it is characterized in that: described boiler sealing shell is by left side fin panel casing furnace wall, right side fin panel casing furnace wall and " worker " font frame seal partition wall (21) form and are symmetrically distributed and separate twin flue structure, each flue two ends arranges that respectively pull-type advances mouth flashboard (1) and outlet flue flashboard (7), be aligned in sequence with high-temperature evaporator (2) by import to outlet in each flue, first cryogenic vaporizer (3), second cryogenic vaporizer (5), the next part case (10-1) of described high-temperature evaporator (2) is connected through pipeline with the delivery port of circulating pump, the upper collecting chamber (13-1) of high-temperature evaporator (2) is connected through down-comer with the next part case (10-2) of first cryogenic vaporizer (3), the upper collecting chamber (13-2) of first cryogenic vaporizer (3) is connected through down-comer with the next part case (10-3) of second cryogenic vaporizer (5), and the upper collecting chamber (13-3) of second cryogenic vaporizer (5) links to each other with drum (17) by steam guiding tube (24); The bottom of described boiler sealing shell also is provided with a plurality of travel(l)ing rests (15), fixedly connected with high-temperature evaporator (2), first cryogenic vaporizer (3), second cryogenic vaporizer (5) respectively in the upper end of a plurality of travel(l)ing rests (15), the lower end of described travel(l)ing rest (15) is provided with castor (16) and track (23), and described castor (16) is located on the track (23).
2. the waste heat boiler of recovery generated by incineration of wastes from polysilicon purification used heat according to claim 1, it is characterized in that: also be provided with bypass flue (4) on the described boiler sealing shell, described bypass flue (4) one ends are communicated with the flue middle part, the other end is communicated with flue outlet, also be provided with valve (6) on the described bypass flue (4), described twin flue is provided with two described bypass flues (4), and two described bypass flues (4) are symmetrically arranged.
3. the waste heat boiler of recovery generated by incineration of wastes from polysilicon purification used heat according to claim 1 is characterized in that: described high-temperature evaporator (2), first cryogenic vaporizer (3) and second cryogenic vaporizer (5) are flag formula heated face structure.
4. the waste heat boiler of recovery generated by incineration of wastes from polysilicon purification used heat according to claim 1 is characterized in that: the next part case water inlet of described high-temperature evaporator (2) is the low pressure saturation water.
5. the waste heat boiler of recovery generated by incineration of wastes from polysilicon purification used heat according to claim 1, it is characterized in that: described " worker " font frame seal partition wall (21) is for fixed, and described left side fin panel casing furnace wall and right side fin panel casing furnace wall are packaged type.
6. the waste heat boiler of recovery generated by incineration of wastes from polysilicon purification used heat according to claim 1, it is characterized in that: described left side fin panel casing furnace wall is made of by the band steel welding left side standpipe (9), and described right side fin panel casing furnace wall is made of by the band steel welding right side standpipe (29).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910022651XA CN101592332B (en) | 2009-05-22 | 2009-05-22 | Waste heat boiler for recovering waste heat generated by incineration of wastes from polysilicon purification process |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910022651XA CN101592332B (en) | 2009-05-22 | 2009-05-22 | Waste heat boiler for recovering waste heat generated by incineration of wastes from polysilicon purification process |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101968226A (en) * | 2010-10-26 | 2011-02-09 | 陕西天宏硅材料有限责任公司 | Burning treatment process of waste gas and waste liquid containing chlorosilane in polysilicon production |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102679300B (en) * | 2011-03-18 | 2015-05-20 | 陕西天宏硅材料有限责任公司 | Device and method for recovering waste heat during waste gas and waste liquid treatment |
| CN102305465A (en) * | 2011-09-22 | 2012-01-04 | 哈尔滨工业大学 | Hot water boiler with inclined reciprocating grate and film-type wall |
| CN104033875B (en) * | 2014-06-25 | 2015-07-22 | 常州德峰节能电力工程技术有限公司 | Novel waste heat boiler |
| CN106315586B (en) * | 2015-06-15 | 2018-09-18 | 内蒙古盾安光伏科技有限公司 | polycrystalline silicon production system |
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| US3204407A (en) * | 1961-03-30 | 1965-09-07 | Bbc Brown Boveri & Cie | Combined gas turbine and steam turbine power plant |
| CN2377450Y (en) * | 1999-07-12 | 2000-05-10 | 中国科学院工程热物理研究所 | Vortex circulation fluidised bed refuse incinerator |
| CN1172111C (en) * | 2002-12-24 | 2004-10-20 | 鞍山热能研究院 | Slag incinerator for treating hazardous wastes and medical garbage and process method |
| CN101118053A (en) * | 2007-08-27 | 2008-02-06 | 南京圣诺热管有限公司 | Revolving furnace, electric stove steel-smelting high-temperature gas cooling down heat-recovering steam producing energy conservation system device |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US3204407A (en) * | 1961-03-30 | 1965-09-07 | Bbc Brown Boveri & Cie | Combined gas turbine and steam turbine power plant |
| CN2377450Y (en) * | 1999-07-12 | 2000-05-10 | 中国科学院工程热物理研究所 | Vortex circulation fluidised bed refuse incinerator |
| CN1172111C (en) * | 2002-12-24 | 2004-10-20 | 鞍山热能研究院 | Slag incinerator for treating hazardous wastes and medical garbage and process method |
| CN101118053A (en) * | 2007-08-27 | 2008-02-06 | 南京圣诺热管有限公司 | Revolving furnace, electric stove steel-smelting high-temperature gas cooling down heat-recovering steam producing energy conservation system device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101968226A (en) * | 2010-10-26 | 2011-02-09 | 陕西天宏硅材料有限责任公司 | Burning treatment process of waste gas and waste liquid containing chlorosilane in polysilicon production |
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