CN101923214A - Deformed secondary mirror based on piezoelectric driver - Google Patents
Deformed secondary mirror based on piezoelectric driver Download PDFInfo
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- CN101923214A CN101923214A CN 201010244785 CN201010244785A CN101923214A CN 101923214 A CN101923214 A CN 101923214A CN 201010244785 CN201010244785 CN 201010244785 CN 201010244785 A CN201010244785 A CN 201010244785A CN 101923214 A CN101923214 A CN 101923214A
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Abstract
The invention provides a deformed secondary mirror based on a piezoelectric driver, which comprises a mirror face, a driver and a rigid base, wherein the mirror face, the driver and the rigid base are bonded with each other into a whole body; the mirror face is in the structure of shell, the front side of the mirror face is an aspheric face and is simultaneously taken as the mirror face of the deformed mirror and the secondary mirror of a telescope, the back side of the mirror face is a spherical face, and the lower face of the mirror face is provided with an electrode head which is integrated with the mirror face, thereby increasing the distance between a bonding face and the mirror face and reducing the local deformation burning bonding; the two ends of the driver are respectively bonded and matched with an interface, thereby guaranteeing the compact contact among the driver, the back face of the mirror face, the bottom face of the electrode head and the top face of the base, guaranteeing the orientation of the driver, and reducing the local deformation during bonding; and the top face of the rigid base is the spherical face, thereby guaranteeing the supporting condition of the driver and realizing the lightweight on the premise that the rigidity is guaranteed. The mirror face of the deformed secondary mirror, the driver and the rigid base are bonded with each other in to a whole body, therefore, compared with the existing deformed secondary mirror, the deformed secondary mirror has the characteristics of compact structure, high rigidity, good stability, high reliability and small weight, and is applied to the application field of the deformed secondary mirror with the less amount of driving units.
Description
Technical field
The present invention relates to a kind of deformed secondary mirror, belong to the Wavefront correctors of adaptive optics technical field based on piezoelectric actuator.
Background technology
Distorting lens is one of core devices of ADAPTIVE OPTICS SYSTEMS, and it mainly acts on is controlled required type of generation system, with correcting distorted wavefront.Fig. 1. be the discrete continuous surface deformable mirror of classics, this class distorting lens has the advantage of compact conformation, rigidity height, good stability by plane reflection minute surface 1, driver 2 and rigid base 3 bonding forming.But this class distorting lens adopts plane mirror as minute surface, needs a large amount of secondary optics when using in telescopic system, to satisfy the distorting lens service condition.The existence of secondary optics makes the telescopic system complex structure, and the efficiency of light energy utilization reduces.Is to reduce the system complex degree in the present self-adaptive optical telescope development process with the telescope secondary mirror as wave-front corrector, improves the efficiency of light energy utilization, makes full use of the effective ways of heavy caliber telescope light collecting light ability.
The patent No. be US6293680 B1 U.S. Patent Publication a kind of distorting lens based on voice coil motor driver, this distorting lens adopts voice coil motor to drive minute surface, uses capacitive transducer to measure the surface deformation amount in real time, to guarantee minute surface face type control accuracy.Based on above-mentioned principle, T.K.Barrett etc. have proposed to adopt voice coil motor to drive the deformed secondary mirror scheme (" Adaptive Secondary Mirror for the 6.5-m MMT ", SPIEvol.3353754-763 (1998)) of glass-mirror at 6.5m MMT telescope.Because deformed secondary mirror is positioned at directly over the primary mirror, the atmospheric turbulence that its heating causes has a significant impact the telescope image quality.The deviser to reduce minute surface rigidity, reduces the driving force requirement by selecting the ultra-thin minute surface of central supported for use, and then reduces the driver thermal value, and increases initiatively method such as cooling provision and reduce the deformed secondary mirror heat radiation.Deformed secondary mirror complex structure, quality based on said method structure is big, minute surface resonance frequency low (being about 50Hz), servicing unit are many, and dependability is limited, and cost is higher.A.P.Doel etc. propose a kind of deformed secondary mirror scheme based on magnetic telescopic driver, and have made small size sample mirror (" Adaptive Secondary MirrorDevelopments at UCL ", SPIE Vol.4007 532-536 (2000)).Though this class deformed secondary mirror stroke is bigger, wherein the magnetic telescopic driver drive current of Cai Yonging is big, does not see the practical application report.
Summary of the invention
The technical problem to be solved in the present invention is: overcome the prior art deficiency; A kind of compact conformation, rigidity height, good stability, deformed secondary mirror easy to use are provided.
The technical scheme that the present invention solves the problems of the technologies described above employing is: a kind of deformed secondary mirror based on piezoelectric actuator includes: minute surface, driver, rigid base.It is characterized in that: minute surface, driver, rigid base are bonding for whole; Minute surface is a spherical shell structure, the front be aspheric surface simultaneously as distorting lens minute surface and telescope secondary mirror, the back side is sphere, it is the cartridge of integral structure that lower surface has with minute surface, with increase bonding plane and minute surface distance, reduces the local deformation that bonding process causes; The driver two ends are bonding matched junction respectively, guarantees that driver closely contacts with cartridge bottom surface, the minute surface back side, base top surface, guarantees that driver points to, and reduces the local deformation that bonding process causes; The rigid base end face is a sphere, guarantees the driver supporting condition, and realizes lightweight under the prerequisite that guarantees rigidity; Described piezoelectric actuator is stacked piezoelectric actuator, and the driver two ends and the minute surface back side, base top surface bonding plane are sphere.
The present invention compared with prior art has following advantage:
(1) deformed secondary mirror local deformation of the present invention is little.Adopted among the present invention and similar cartridge of discrete continuous surface deformable mirror and minute surface integral structure, increased distance between driver bonding plane and the minute surface, reduced the local deformation that bonding plane causes effectively.
(2) deformed secondary mirror thermal value of the present invention is little.Adopted piezoelectric actuator among the present invention, thermal value is little, does not have the heating problem of voice coil motor, magnetic telescopic driver in the existing scheme.
(3) deformed secondary mirror resonance frequency height of the present invention.Having adopted rigidity among the present invention is the high rigidity piezoelectric actuator of 200～300N/ μ m, and minute surface links to each other with rigid base by high rigidity driver, and the minute surface mechanical resonant frequency is more than 1000Hz.
(4) deformed secondary mirror reliability height of the present invention.The present invention has adopted does not have the piezoelectric actuator of heating, high rigidity as the minute surface driving mechanism, high rigidity base is as the high stability structure of supporting mechanism, problems such as the thermal value of having removed existing scheme existence from is big, the minute surface resonance frequency is low, need not the design of shaking of extra heat abstractor and harmonic elimination, simple in structure, the reliability height.
(5) deformed secondary mirror quality of the present invention is little.Deformed secondary mirror of the present invention is derived from the discrete continuous surface deformable mirror, compact conformation, and base lightweight under the prerequisite that guarantees rigidity, and gross mass is little.
Description of drawings
Fig. 1 discrete continuous surface deformable mirror structural representation
Fig. 2 deformed secondary mirror structural representation of the present invention
Fig. 3 deformed secondary mirror mirror surface structure of the present invention synoptic diagram
Piezoelectric actuator structural representation in Fig. 4 deformed secondary mirror of the present invention
Stacked piezoelectric actuator structural representation in Fig. 5 deformed secondary mirror of the present invention
Among the figure: 1 is that minute surface, 2 is that driver, 3 is that base, 4 is that minute surface cartridge, 5 is that piezoelectric actuator and minute surface joint, 6 are that stacked piezoelectric actuator, 7 is that piezoelectric actuator and base top surface joint, 8,9 are that adjacent two piezoelectric patches, 10,11 are respectively the positive and negative drive electrode of stacked piezoelectric actuator in the stacked piezoelectric actuator
Embodiment
As Fig. 2. shown in, minute surface 1 of the present invention, piezoelectric actuator 2 and rigid base 3 are bonding, and constituting one is that support, piezoelectric actuator 2 are that driving mechanism, minute surface 1 are the piezoelectric deforming secondary mirror of reflecting surface with rigid base 3.
As Fig. 3. shown in, minute surface 1 is a spherical shell structure, its upper surface is an aspheric surface, simultaneously as distorting lens minute surface and telescope secondary mirror and distorting lens minute surface, lower surface is a sphere, cartridge 4 is an integral structure with minute surface 1, can increase bonding plane to the minute surface distance, reduces bonding process and introduces the local deformation residual error that causes.Minute surface 1 material can require to select glass, beryllium, silicon, aluminium etc. to can be used as the material of catoptron according to reality.
As shown in Figure 4, driver 2 is stacked piezoelectric actuator, and its two ends are bonding matched junction 5,7 respectively, guarantees that driver closely contacts with minute surface cartridge 4 lower surfaces and base 3 upper surfaces, guarantee that driver points to the minute surface normal direction, reduces the local deformation that bonding process causes.Stacked driver 6 structural principles are seen Fig. 5 in the piezoelectric actuator 2., wherein adjacent piezoelectric patches 8,9 is according to the opposite direction arrangement of polarised direction P, bonding, and settle driving positive and negative electrode 10,11 respectively at adjacent piezoelectric patches interface, connect the driver of electrical structure parallel connection thereby constitute on the physical construction.
Based on said structure, it is that minute surface, stacked piezoelectric actuator are that driving mechanism, silit lightweight structure are base with silicon that the embodiment of the invention has designed one, the piezoelectric deforming secondary mirror that integral adhesive forms.This deformed secondary mirror bore Φ 350mm, die opening 38mm, stroke ± 6 μ m, driver element number are that Unit 73, gross mass are about 7.3kg.
As the above analysis, deformed secondary mirror of the present invention comes from the discrete continuous surface deformable mirror, has compact conformation, rigidity height, good stability, reliability height, characteristics that quality is little.Deformed secondary mirror gross mass based on structure development of the present invention is suitable with the existing secondary mirror of telescopic system, can be under the prerequisite that does not change existing system, and equipment NEW ADAPTIVE system reduces new system and realizes difficulty.
Claims (2)
1. deformed secondary mirror based on piezoelectric actuator, include minute surface (1), driver (2), rigid base (3), described minute surface (1) and driver (2) and rigid base (3) are bonding to be whole, it is characterized in that: described minute surface (1) is a spherical shell structure, its front is an aspheric surface, as distorting lens minute surface and telescope secondary mirror, its back side is sphere simultaneously, and the back side of described minute surface (1) is useful on and the bonding cartridge (4) of driver (2); Cartridge (4) is an integral structure with minute surface (1), points to minute surface (1) back side normal direction; The two ends of described piezoelectric actuator (2) are bonding first matched junction (5) and second matched junction (7) respectively, first matched junction (5) is a sphere with the bonding plane of minute surface (1) back side cartridge (4), and second matched junction (7) is a sphere with the bonding plane of rigid base (3) end face; Described rigid base (3) end face is a sphere.
2. the deformed secondary mirror based on piezoelectric actuator according to claim 1 is characterized in that: described piezoelectric actuator (2) is stacked piezoelectric actuator.
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| CN 201010244785 CN101923214A (en) | 2010-08-04 | 2010-08-04 | Deformed secondary mirror based on piezoelectric driver |
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| CN 201010244785 CN101923214A (en) | 2010-08-04 | 2010-08-04 | Deformed secondary mirror based on piezoelectric driver |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102928950A (en) * | 2012-10-30 | 2013-02-13 | 无锡微奥科技有限公司 | Micro lens based on micro-electromechanical system (MEMS) |
| CN104111527A (en) * | 2013-04-16 | 2014-10-22 | 佳能株式会社 | Mirror Unit And Exposure Apparatus |
| CN104516212A (en) * | 2013-09-30 | 2015-04-15 | 佳能株式会社 | Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article |
| CN104793333A (en) * | 2015-04-29 | 2015-07-22 | 中国科学院光电技术研究所 | Large stroke high-speed multi-stage drive inclined mirror |
| CN105045044A (en) * | 2014-05-02 | 2015-11-11 | 佳能株式会社 | Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article |
| CN105182529A (en) * | 2015-09-24 | 2015-12-23 | 中国科学院西安光学精密机械研究所 | Spherical metal deformable mirror and integrated processing technology thereof |
| CN107144900A (en) * | 2017-06-23 | 2017-09-08 | 中国科学院长春光学精密机械与物理研究所 | A kind of diaphragm and the optical instrument with the diaphragm |
| CN110764250A (en) * | 2019-11-19 | 2020-02-07 | 宁波大学 | Zoom lens based on piezoelectric ceramic tube driving |
| CN111352233A (en) * | 2020-04-30 | 2020-06-30 | 中国科学院光电技术研究所 | High-thermal-disturbance-resistance aspheric surface deformation reflector and development method thereof |
| CN114815224A (en) * | 2022-05-23 | 2022-07-29 | 中国科学院光电技术研究所 | Piezoelectric ceramic driving type deformable reflector and manufacturing method thereof |
| WO2023051118A1 (en) * | 2021-09-30 | 2023-04-06 | Oppo广东移动通信有限公司 | Driver and manufacturing method therefor, driving apparatus, camera module, and electronic device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6293680B1 (en) * | 1997-09-10 | 2001-09-25 | Thermotrex Corporation | Electromagnetically controlled deformable mirror |
| CN1987547A (en) * | 2006-12-30 | 2007-06-27 | 中国科学院光电技术研究所 | Device for automatic correcting telescope astigmatic aberration using telescope second lens |
| CN101504487A (en) * | 2009-03-20 | 2009-08-12 | 中国科学院光电技术研究所 | Large-diameter detachable piezoelectric deforming reflection mirror |
-
2010
- 2010-08-04 CN CN 201010244785 patent/CN101923214A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6293680B1 (en) * | 1997-09-10 | 2001-09-25 | Thermotrex Corporation | Electromagnetically controlled deformable mirror |
| CN1987547A (en) * | 2006-12-30 | 2007-06-27 | 中国科学院光电技术研究所 | Device for automatic correcting telescope astigmatic aberration using telescope second lens |
| CN101504487A (en) * | 2009-03-20 | 2009-08-12 | 中国科学院光电技术研究所 | Large-diameter detachable piezoelectric deforming reflection mirror |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102928950A (en) * | 2012-10-30 | 2013-02-13 | 无锡微奥科技有限公司 | Micro lens based on micro-electromechanical system (MEMS) |
| US9557560B2 (en) | 2013-04-16 | 2017-01-31 | Canon Kabushiki Kaisha | Mirror unit and exposure apparatus |
| CN104111527A (en) * | 2013-04-16 | 2014-10-22 | 佳能株式会社 | Mirror Unit And Exposure Apparatus |
| CN104516212A (en) * | 2013-09-30 | 2015-04-15 | 佳能株式会社 | Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article |
| US9568729B2 (en) | 2013-09-30 | 2017-02-14 | Canon Kabushiki Kaisha | Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article |
| US9678444B2 (en) | 2014-05-02 | 2017-06-13 | Canon Kabushiki Kaisha | Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article |
| CN105045044A (en) * | 2014-05-02 | 2015-11-11 | 佳能株式会社 | Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article |
| CN105045044B (en) * | 2014-05-02 | 2018-04-03 | 佳能株式会社 | Optical devices, projection optical system, the manufacture method of exposure device and article |
| CN104793333A (en) * | 2015-04-29 | 2015-07-22 | 中国科学院光电技术研究所 | Large stroke high-speed multi-stage drive inclined mirror |
| CN105182529A (en) * | 2015-09-24 | 2015-12-23 | 中国科学院西安光学精密机械研究所 | Spherical metal deformable mirror and integrated processing technology thereof |
| CN107144900A (en) * | 2017-06-23 | 2017-09-08 | 中国科学院长春光学精密机械与物理研究所 | A kind of diaphragm and the optical instrument with the diaphragm |
| CN107144900B (en) * | 2017-06-23 | 2019-10-29 | 中国科学院长春光学精密机械与物理研究所 | A kind of diaphragm and the optical instrument with the diaphragm |
| CN110764250A (en) * | 2019-11-19 | 2020-02-07 | 宁波大学 | Zoom lens based on piezoelectric ceramic tube driving |
| CN111352233A (en) * | 2020-04-30 | 2020-06-30 | 中国科学院光电技术研究所 | High-thermal-disturbance-resistance aspheric surface deformation reflector and development method thereof |
| WO2023051118A1 (en) * | 2021-09-30 | 2023-04-06 | Oppo广东移动通信有限公司 | Driver and manufacturing method therefor, driving apparatus, camera module, and electronic device |
| CN114815224A (en) * | 2022-05-23 | 2022-07-29 | 中国科学院光电技术研究所 | Piezoelectric ceramic driving type deformable reflector and manufacturing method thereof |
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Application publication date: 20101222 |