CN102110787A - Contraposition method for OLED (organic light emitting diode) mask plate - Google Patents
Contraposition method for OLED (organic light emitting diode) mask plate Download PDFInfo
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- CN102110787A CN102110787A CN 201010533284 CN201010533284A CN102110787A CN 102110787 A CN102110787 A CN 102110787A CN 201010533284 CN201010533284 CN 201010533284 CN 201010533284 A CN201010533284 A CN 201010533284A CN 102110787 A CN102110787 A CN 102110787A
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- subframe
- main frame
- daughter board
- mask plate
- glass substrate
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Abstract
The invention discloses a contraposition method for an OLED (organic light emitting diode) mask board, facilitating the contraposition between unit devices on the mask board and pixel units on a glass substrate. The method comprises the following steps: A: dividing the whole mask board to a group of daughter boards; B: fixing the daughter boards on subframes; C: distributing the daughter boards in parallel on a main frame, and arranging a motion mechanism between every subframe and the main frame; and D: arranging the glass substrate below the main frame, utilizing the motion mechanisms to drive the subframes to move the daughter boards, and enabling the positions of unit devices on the auxiliary plates to correspond to those of the pixel units on the glass substrate. By using the method, the corresponding daughter boards are replaced instead of the whole mask board when the position of a unit device can not correspond to the pixel unit, so that the material economization is facilitated and the production cost is reduced.
Description
Technical field
The present invention relates to a kind of OLED mask plate to method for position.
Background technology
OLED, i.e. Organic Light Emitting Diode in the OLED device fabrication processes, needs to use metal mask plate to reach purpose to light emitting pixel subregion evaporation organic material on the glass substrate.Development along with the OLED technology, OLED product size and glass substrate size are all in continuous increase, this just requires the size of evaporation metal mask plate constantly to increase, but because metal mask plate generally all very thin (generally being no more than 50 μ m), and the OLED evaporation process requires between metal mask plate and the glass substrate very high aligning accuracy (bit errors is at-3 μ m～+ 3 μ m between the pixel cell of metal mask plate unit component and glass substrate) to be arranged, therefore in the OLED production process, tend to produce owing to contraposition between metal mask plate and the glass substrate is forbidden to cause product bad, greatly influence production efficiency and production cost.Simultaneously, in existing technology is that mask plate is welded direct on the main frame, therefore the position between mask plate and the main frame can't be adjusted, and because mask plate, the volume of main frame and glass substrate is bigger and heavier, be not easy to move, therefore difficult adjustment mask plate is with respect to the relative position between the glass substrate, in addition, even adjust to the right place substantially in whole mask plate position, still may have the individual elements device can't be accurate with the pixel cell contraposition on the glass substrate, change whole mask plate with regard to needs this moment, and the price of metal mask plate generally compares costliness, causes production cost higher and cause very big waste like this.
Chinese patent 200580008820.4 discloses a kind of by the planar motor objective table device of X-Y direction and direction of rotation high accuracy action relatively in addition, this device is provided with the scale assembly on pedestal, bottom surface sections in driving objective table portion is provided with 32 dimension angular transducers, constitute surface encoder by scale assembly and 2 dimension angular transducers, and carry out the position finding of driving objective table by surface encoder.Can carry out the position finding of the relative pedestal of objective table accurately by this device, get final product accurate moving stage, this objective table device promptly can be used as one 2 dimension travel mechanism.
Chinese patent 200410031334.1 discloses a kind of objective table device, and this device slides along X-direction, Y direction on the process stone platform of Surface Machining by the mobile physical efficiency that the hydrostatic bearing liner supports.This device also can be used as one 2 dimension travel mechanism.
Summary of the invention
The technical problem that the present invention solves provides a kind ofly can conveniently carry out the OLED mask plate of contraposition to method for position with unit component on the mask plate and the pixel cell on the glass substrate.
The technical solution adopted for the present invention to solve the technical problems is: the OLED mask plate may further comprise the steps method for position:
A, whole mask plate is divided into one group of daughter board;
B, daughter board is fixed on the subframe;
C, subframe is arranged on the main frame side by side, and is provided with travel mechanism between subframe and the main frame;
D, glass substrate is placed main frame below, move, make the pixel cell contraposition on the glass substrate below unit component and the daughter board on the daughter board by travel mechanism's driven element frame strip mover plate.
Further be: described travel mechanism is 2 dimension travel mechanisms.
Further be: described daughter board quantity is 2～20.
Further be: described subframe is a rectangle, and the unit component on the described daughter board is positioned at the rectangle frame of subframe.
Further be: described main frame is a rectangle, and the rectangle frame of described subframe is positioned at the rectangle frame of main frame.
The invention has the beneficial effects as follows:
1, can be by travel mechanism conveniently with unit component on the daughter board and the rubber and plastic unit contraposition on the glass substrate;
2, after the unit component on a certain daughter board moves by travel mechanism, certain unit component and the pixel cell contraposition on the glass substrate on the daughter board are not accurate enough, can not conform to quality requirements, then replaceable this daughter board, promptly make a daughter board again and replace this daughter board according to bit errors, because other daughter board need not to change, but therefore economical with materials reduces production costs.
3, adopt 2 dimension travel mechanisms that subframe is moved along both direction, can further facilitate, help the quick contraposition of the pixel cell on unit component on the daughter board and the glass substrate to the moving of subframe.
Description of drawings
Fig. 1 is daughter board and subframe schematic diagram;
Fig. 2 is for being arranged on subframe in the schematic diagram on the main frame;
Fig. 3 is that the position of daughter board, subframe, travel mechanism, mainboard and glass substrate concerns schematic diagram;
Fig. 4 is the schematic diagram of 2 dimension travel mechanisms of screw mechanism formation.
Be labeled as among the figure: 1-main frame, 2, the 4-rectangle frame, 3-subframe, 5-unit component, 6-daughter board, 7-travel mechanism, 8-glass substrate, 9-chute, 10, the 11-screw mechanism, 12-slide block.
Embodiment
The present invention is further described below in conjunction with the drawings and specific embodiments.
As shown in Figure 1 to Figure 3, OLED mask plate of the present invention may further comprise the steps method for position:
A, whole mask plate is divided into one group of daughter board 6;
B, daughter board 6 is fixed on the subframe 3;
C, subframe 3 is arranged on the main frame 1 side by side, and is provided with travel mechanism 7 between subframe 3 and the main frame 1;
D, glass substrate 8 is placed main frame 1 below, drive daughter boards 6 by travel mechanism's 7 driven element frameworks 3 and move, make the pixel cell contraposition on the glass substrate 8 of unit component 5 and daughter board 6 belows on the daughter board 6.
The quantity of above-mentioned daughter board 6 can be set according to actual needs, when cutting apart whole mask plate, can cut apart successively along the orientation of the unit component on the mask plate, form one group of rectangle daughter board, because each daughter board need be equipped with a subframe, daughter board quantity is many more, the subframe that needs is many more, needs the travel mechanism of setting also many more, and installation and control are loaded down with trivial details more, therefore daughter board quantity should control in the reasonable scope, in the method for the present invention, the preferred amount of daughter board is 2～20, for example can be 2,10,19 etc.Above-mentioned travel mechanism can be unidirectional travel mechanism, as screw mechanism, and slideway mechanism, cotter mechanism etc.When being provided with, the screw rod of screw mechanism can be arranged on the main frame, will be arranged on the subframe, can drive travel mechanism by rotary screw and move with the screw rod nut engaged; Also can slideway be set on main frame, pulley is set on subframe, also can realize moving of subframe by slideway and pulley.
Though above-mentioned single-phase travel mechanism can conveniently adjust the position to daughter board, because the antithetical phrase Board position is adjusted in one direction, adjustment capability is limited.In order to further facilitate moving to subframe, and then the adjustment capability of increase antithetical phrase Board position, described travel mechanism 7 is 2 dimension travel mechanisms, be that subframe can move on X-axis and Y-axis both direction with respect to main frame, the length direction of main frame can be defined as X-axis, the Width of main frame is defined as Y-axis, then 2 dimension travel mechanisms can drive subframe along moving on the length direction of main frame and the Width, and then can make things convenient for unit component on the daughter board and the pixel cell contraposition on the glass substrate.Above-mentioned 2 dimension travel mechanisms are prior art, disclosed device in the Chinese patent 200580008820.4 for example, and perhaps Chinese patent 200410031334.1 disclosed devices also can be the objective table travel mechanism that uses on the conventional microscope.When being provided with, 22 dimension travel mechanisms can be separately positioned on the left and right side frame below of subframe, the frame structure that is used to support 2 dimension travel mechanisms accordingly is set on the main frame, but move by 2 dimension travel mechanism driven element frameworks, and then reach the purpose of adjusting the daughter board position, certainly also 42 dimension travel mechanisms can be separately positioned on 4 frame belows all around of subframe, on the main frame also relative set be useful on the frame structure that supports 2 dimension travel mechanisms.In addition, also can realize 2 of subframe is tieed up the adjustment of directions with structures such as screw mechanism or meticulous screws, as shown in Figure 4, main frame 1 comprises chute 9 and the slide block 12 that can move along chute 9, slide block 12 is moved along chute 9 by screw mechanism 11 controls that are arranged on slide block 12 inside, also be provided with the screw mechanism vertical 10 on the slide block 12 with the chute bearing of trend, be connected with subframe 3 on the screw mechanism 10, move by screw mechanism 10 may command subframes 3, and the moving direction of subframe 3 is vertical with the moving direction of slide block 12, so just can realize that 2 dimensions of daughter board 6 move.
In addition, the shape of said frame can be for multiple, and preferred implementation is: described subframe 3 is rectangle, and the unit component 5 on the described daughter board 6 is positioned at the rectangle frame 4 of subframe 3.Adopt said mechanism, be convenient to subframe is arranged on the main frame, also be convenient to each subframe is adjusted.Certainly, subframe also can be shapes such as pentagon.
On the basis of the above, as shown in Figure 2, in order further to be convenient to subframe is adjusted, described main frame 1 is a rectangle, and the rectangle frame 4 of described subframe 3 is positioned at the rectangle frame 2 of main frame 1.Adopt said structure also to be convenient to by daughter board to the pixel cell evaporation luminous organic material on the glass substrate of daughter board below.
Claims (5)
1.OLED mask plate to method for position, may further comprise the steps:
A, whole mask plate is divided into one group of daughter board (6);
B, daughter board (6) is fixed on the subframe (3);
C, subframe (3) is arranged on the main frame (1) side by side, and is provided with travel mechanism (7) between subframe (3) and the main frame (1);
D, glass substrate (8) is placed main frame (1) below, drive daughter board (6) by travel mechanism (7) driven element framework (3) and move, make the pixel cell contraposition on the glass substrate (8) of unit component (5) and daughter board (6) below on the daughter board (6).
2. OLED mask plate as claimed in claim 1 is characterized in that method for position: described travel mechanism (7) is 2 dimension travel mechanisms.
3. OLED mask plate as claimed in claim 1 is characterized in that method for position: described daughter board (6) quantity is 2～20.
4. OLED mask plate as claimed in claim 1 is characterized in that method for position: described subframe (3) is a rectangle, and the unit component (5) on the described daughter board (6) is positioned at the rectangle frame (4) of subframe (3).
5. OLED mask plate as claimed in claim 4 is characterized in that method for position: described main frame (1) is a rectangle, and the rectangle frame (4) of described subframe (3) is positioned at the rectangle frame (2) of main frame (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105332842A CN102110787B (en) | 2010-11-05 | 2010-11-05 | Contraposition method for OLED (organic light emitting diode) mask plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105332842A CN102110787B (en) | 2010-11-05 | 2010-11-05 | Contraposition method for OLED (organic light emitting diode) mask plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102110787A true CN102110787A (en) | 2011-06-29 |
| CN102110787B CN102110787B (en) | 2012-07-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105332842A Expired - Fee Related CN102110787B (en) | 2010-11-05 | 2010-11-05 | Contraposition method for OLED (organic light emitting diode) mask plate |
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| Country | Link |
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| CN (1) | CN102110787B (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102776473A (en) * | 2012-08-10 | 2012-11-14 | 深圳市华星光电技术有限公司 | Mask device for evaporating organic materials of organic light-emitting diodes |
| CN103205703A (en) * | 2012-01-16 | 2013-07-17 | 昆山允升吉光电科技有限公司 | A method for improving the positional accuracy of mask plate openings and a device thereof |
| CN107326325A (en) * | 2017-06-30 | 2017-11-07 | 武汉华星光电半导体显示技术有限公司 | Mask plate |
| CN107354425A (en) * | 2017-06-15 | 2017-11-17 | 武汉华星光电半导体显示技术有限公司 | Spliced fine metal mask plate and preparation method thereof |
| WO2019085460A1 (en) * | 2017-10-31 | 2019-05-09 | 昆山国显光电有限公司 | Mask component |
| CN109750257A (en) * | 2019-03-26 | 2019-05-14 | 京东方科技集团股份有限公司 | Mask plate and its manufacturing method |
| WO2020192349A1 (en) * | 2019-03-25 | 2020-10-01 | 京东方科技集团股份有限公司 | Preparation method for mask assembly, and mask assembly |
| CN115418605A (en) * | 2022-09-26 | 2022-12-02 | 云谷（固安）科技有限公司 | Mask plate frame and mask plate assembly |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1362642A (en) * | 2000-11-28 | 2002-08-07 | Lg电子株式会社 | Mask for making display board |
| CN1854909A (en) * | 2005-04-20 | 2006-11-01 | 应用菲林股份有限两合公司 | Method and apparatus for positioning a mask |
| US20090017192A1 (en) * | 2007-07-12 | 2009-01-15 | Hiroyasu Matsuura | Vapor deposition method and apparatus |
| JP2009301789A (en) * | 2008-06-11 | 2009-12-24 | Hitachi Displays Ltd | Method of manufacturing organic electroluminescent display device |
-
2010
- 2010-11-05 CN CN2010105332842A patent/CN102110787B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1362642A (en) * | 2000-11-28 | 2002-08-07 | Lg电子株式会社 | Mask for making display board |
| CN1854909A (en) * | 2005-04-20 | 2006-11-01 | 应用菲林股份有限两合公司 | Method and apparatus for positioning a mask |
| US20090017192A1 (en) * | 2007-07-12 | 2009-01-15 | Hiroyasu Matsuura | Vapor deposition method and apparatus |
| JP2009301789A (en) * | 2008-06-11 | 2009-12-24 | Hitachi Displays Ltd | Method of manufacturing organic electroluminescent display device |
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103205703A (en) * | 2012-01-16 | 2013-07-17 | 昆山允升吉光电科技有限公司 | A method for improving the positional accuracy of mask plate openings and a device thereof |
| CN103205703B (en) * | 2012-01-16 | 2016-04-27 | 昆山允升吉光电科技有限公司 | Improve method and the device thereof of mask plate aperture position precision |
| CN102776473B (en) * | 2012-08-10 | 2014-10-29 | 深圳市华星光电技术有限公司 | Mask device for evaporating organic materials of organic light-emitting diodes |
| CN102776473A (en) * | 2012-08-10 | 2012-11-14 | 深圳市华星光电技术有限公司 | Mask device for evaporating organic materials of organic light-emitting diodes |
| CN107354425A (en) * | 2017-06-15 | 2017-11-17 | 武汉华星光电半导体显示技术有限公司 | Spliced fine metal mask plate and preparation method thereof |
| WO2019000600A1 (en) * | 2017-06-30 | 2019-01-03 | 武汉华星光电半导体显示技术有限公司 | Mask plate |
| CN107326325A (en) * | 2017-06-30 | 2017-11-07 | 武汉华星光电半导体显示技术有限公司 | Mask plate |
| US10317792B2 (en) | 2017-06-30 | 2019-06-11 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Mask plate |
| CN107326325B (en) * | 2017-06-30 | 2019-07-23 | 武汉华星光电半导体显示技术有限公司 | Mask plate |
| WO2019085460A1 (en) * | 2017-10-31 | 2019-05-09 | 昆山国显光电有限公司 | Mask component |
| WO2020192349A1 (en) * | 2019-03-25 | 2020-10-01 | 京东方科技集团股份有限公司 | Preparation method for mask assembly, and mask assembly |
| US11319625B2 (en) | 2019-03-25 | 2022-05-03 | Chengdu Boe Optoelectronics Technology Co., Ltd. | Preparation method of mask assembly and mask assembly |
| CN109750257A (en) * | 2019-03-26 | 2019-05-14 | 京东方科技集团股份有限公司 | Mask plate and its manufacturing method |
| CN115418605A (en) * | 2022-09-26 | 2022-12-02 | 云谷（固安）科技有限公司 | Mask plate frame and mask plate assembly |
| CN115418605B (en) * | 2022-09-26 | 2024-04-16 | 云谷（固安）科技有限公司 | Mask plate frame and mask plate assembly |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102110787B (en) | 2012-07-25 |
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Granted publication date: 20120725 Termination date: 20201105 |