CN102148132B - Optical detection device - Google Patents
Optical detection device Download PDFInfo
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- CN102148132B CN102148132B CN 201010550699 CN201010550699A CN102148132B CN 102148132 B CN102148132 B CN 102148132B CN 201010550699 CN201010550699 CN 201010550699 CN 201010550699 A CN201010550699 A CN 201010550699A CN 102148132 B CN102148132 B CN 102148132B
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Abstract
The invention discloses an optical detection device, which comprises a microscope mechanism opposite to a track; a product clamping mechanism movably arranged on the track and composed of an opening/closing clamping jaw structure and a clamping bracket in a sliding fit with the track; a driving mechanism connected with the product clamping mechanism; a first sensor arranged at the tail end of a clip relatively so as to detect a detected product clamped at the outlet of the clip; a second sensor arranged on the track relatively so as to detect a detected product detained on the track; a control mechanism composed of an alarm and a rocking handle control button mechanism, which are arranged oppositely; and a detecting means at least composed of a visual mechanism opposite to the track. The optical detection device improves the stability of equipment during operation and can provide a plurality of detection means. Meanwhile, the automation degree of the optical detection device is improved and the detection precision thereof is also increased. The optical detection device has the advantages of small size and compact structure, which greatly reduces the occupying space of equipment.
Description
Technical field
The present invention relates to field of mechanical technique, relate in particular to a kind of for the manufacturing optical detection apparatus of semiconductor chip.
Background technology
Along with the high speed development of the technology of semiconductor chips and the gradually aggravation of market competition, it is particularly important that the quality stability of chip product and production efficiency seem concerning manufacturer.
In the past, manual type was mainly adopted in the quality testing of chip product.The shortcoming of manual detection is clearly: detection efficiency is low, the poor accuracy of testing result, and personnel's cost eyesight high and that detect for a long time the employee also has certain injury.
Later stage some semi-automatic checkout equipments are also arranged, but test item is few, and detection means is single, and detection efficiency is low; And for the fault alarm link is not set, in actual use, running into the special circumstances such as cartridge clip distortion, deformation of products can destroy product composition.
Therefore, those skilled in the art is devoted to develop the checkout gear of the chip series products that a kind of automaticity is high, detection means is many always.
Summary of the invention
Because the defects of prior art, technical problem to be solved by this invention provides the optical detection apparatus that a kind of automaticity is high, detection means is many.
For achieving the above object, the invention provides a kind of optical detection apparatus, be arranged on an end of a track on the body, be oppositely arranged with the cartridge clip of the accommodating product to be checked that is arranged on the described track other end; Described checkout gear comprises at least: a microscope mechanism that arranges in opposite directions with described track; One is used for grabbing the product fixture of the described product to be checked of folder, be arranged on movably on the described track, but described product fixture comprises the clamping jaw structure of folding and the clamp bracket that cooperates with described track slippage; One driving mechanism is connected with described product fixture; One first sensor is arranged on the terminal relative position of described cartridge clip so that described first sensor can detect the jammed product to be checked in the exit of described cartridge clip; One second transducer is arranged on the relative position of described track so that described the second transducer can detect the product to be checked that is trapped on the described track; Also comprise a controlling organization, described controlling organization comprises warning device and a rocking handle control button mechanism.
Preferably, also comprise a driving mechanism, be connected with described product fixture, to order about described product clamping mechanism displacement.Described driving mechanism is screw-nut body.The leading screw of described screw-nut body is connected with motor power, and the nut of described screw-nut body detachably is fixedly connected with described product fixture.
Preferably, described controlling organization has the control panel of input service pattern.
Described controlling organization triggers described warning device work after receiving the alarm signal of described first sensor and/or described the second transducer.
The present invention is mainly used in semi-conductive chip manufacturing industry, be used for finishing that semiconductor packages produces that a procedure---the 3rd optical detection (3rd Optical Inspection) operation, this procedure is that (Wire Bond) carries out behind bonding wire.In the testing process of the chip product of semicon industry, derailing can occur and damage the situation of also thereupon scrapping in product frequently.The present invention be by can preventing effectively that to the detection in rail clip material situation testing product is destroyed in testing process, and then improved the stability of equipment in running.
The present invention is the checkout gear of the chip series products that a automaticity is high, detection means is many.The highly integrated chip that this checkout gear is little for volume, function is many, outstanding with the effect of product yields to enhancing productivity in great scale integrated circuit production.
The present invention can arrange multiple detection means owing to adopt the said structure design, has improved the automaticity of checkout gear, has improved accuracy of detection; Also be provided with alarm mechanism, effectively prevented from detecting operation to the destruction of product; It is small and exquisite also to have plant bulk, and compact conformation has dwindled the occupation of land space of equipment greatly.
Be described further below with reference to the technique effect of accompanying drawing to design of the present invention, concrete structure and generation, to understand fully purpose of the present invention, feature and effect.
Description of drawings
Fig. 1 is the perspective view of the present invention's one specific embodiment;
Fig. 2 is main TV structure schematic diagram embodiment illustrated in fig. 1;
Fig. 3 is A section partial enlarged drawing among Fig. 1;
Fig. 4 is plan structure schematic diagram embodiment illustrated in fig. 1.
Drawing reference numeral:
Product B, bed body 1, track 2, cartridge clip 3, microscope mechanism 4, microscope mounting bracket 41, product fixture 5, first sensor 6, the second transducers 7, controlling organization 8, control panel 81, warning device 82, rocking handle control button mechanism 83, one driving mechanisms 9.
Embodiment
For the present invention's one specific embodiment, this optical detection apparatus is arranged on an end of a track 2 on the body 1 as shown in Figures 1 to 4, and is arranged on cartridge clip 3 track 2 other ends, that be used for accommodating product B and is oppositely arranged.Cartridge clip 3 is placed on the platform of Z-direction lifting mechanism 31.This checkout gear comprises:
The one microscope mechanism 4 as visual mechanisms is fixed on the body 1 by microscope mounting bracket 41, and its sight line drops on the track 2 can cover product B.
One is used for grabbing the product fixture 5 of folder product B, is arranged on movably on the track 2.But product fixture 5 comprises the clamping jaw structure of folding and the clamp bracket (not doing diagram) that cooperates with track 2 slippages.But the clamping jaw structure of folding is realized product B grabbed the folder operation.
One driving mechanism 9 is connected with product fixture 5, to order about 5 displacements of product fixture.In the present embodiment, driving mechanism 9 is that an XY is to mobile platform, be specially screw-nut body, the leading screw of screw-nut body is connected with motor power in being arranged on a body 1, and the nut of screw-nut body detachably is fixedly connected with the clamp bracket of product fixture 5.
One first sensor 6 is arranged on cartridge clip 3 terminal relative positions.The implication of being somebody's turn to do " relative position " is that those of ordinary skills can adopt existing technological means, by the position adjustment first sensor 6 can be detected in the jammed product B in the exit of cartridge clip 3.
One second transducer 7 is arranged on the relative position of track 2.Implication that should " relative position " is, those of ordinary skills can adopt existing technological means, by the position adjustment the second transducer 7 can be detected because of various accidental causes and is trapped in product B on the track 2.
This checkout gear also comprises a controlling organization 8.Controlling organization 8 has the control panel 81 of input multiple-working mode, by the control panel 81 on the board, clicks the checking mode of checkout gear.
Controlling organization 8 also comprises warning device 82, and controlling organization 8 receives trigger alarm device 82 work after the alarm signal of the first sensing 6 devices and/or the second transducer 7.
Controlling organization 8 also comprises a rocking handle control button mechanism 83.
Detecting pattern of the present invention below is described, checkout gear of the present invention has three kinds of detecting patterns:
1, manually inspect pattern by random samples:
Operating personnel want the subject that detects by control panel 82 input, directly press rocking handle control button mechanism 83, send signal to motor, and the X-direction motor 91 in the control driving mechanism 9 begins action, moves along X-direction by leading screw drive clamp bracket.Before fixture 5 moved to the position of product clamping B, jaw was in folding condition.After arriving at the product clip position, the cylinder of fixture 5 is started working, jaw is closed under the effect of cylinder, after product B clamped, by program control, give 91 1 signals of X-direction motor, drive the leading screw reverse rotation, just product B can be pulled to microscope mechanism from cartridge clip 3 and detect for 4 times.
2, automatically inspect pattern by random samples:
Operating personnel are as long as directly press rocking handle control button mechanism 83, just can be with the product B to be checked in the cartridge clip 3 that is placed on the Z-direction lifting platform 31, and be pulled to microscope mechanism according to from bottom to up order one by one and detect for 4 times.
3, inspect immediately pattern by random samples:
Under this pattern, the product B of detection is pulled to randomly microscope mechanism and detects for 4 times from cartridge clip 3.
The method of operation of checkout gear of the present invention is described below in conjunction with the operation principle of checkout gear of the present invention:
Checkout gear of the present invention to product in the principle that the rail clip material detects is: laterally get stuck with vertical two directions by the two sensors detection; product is when rail lateral transfer product; when the reasons such as product, cartridge clip distortion cause the phenomenon that gets stuck; system can detect the signal that gets stuck immediately by transducer; and the stopping alarm processing, after having cleared up material, operating personnel can recover normal operation.When gas folder is sent into product cartridge clip and is retreated; deformation of products causes takes product out of cartridge clip; when lift down moves, can roll over product bad; at this moment can carry out lifting action again after in another transducer detection track whether product being arranged, system alarm and shutdown are processed when product is arranged at rail.
Particularly, during normal operation, operating personnel press the shift knob in the rocking handle control button mechanism 83, and the fixture 5 of product B will be pulled out product B from cartridge clip 3, do detection 4 times along track 2 to microscope mechanism.
When product B detected complete after, be sent back in the process of cartridge clip 3, when product B is not released track 2 fully, judge in the track 2 to have or not the second transducer 7 of product B to start working, remind operating personnel's product B not de-orbit 2 fully, need manually product B to be shifted out track 2.During this state, Z-direction lifting mechanism 31 will stop to move up and down.Only have product B cleared out of track 2 fully after, Z-direction lifting mechanism 31 just begins again normally to move, the phenomenon of having avoided damaging product B occurs.
When product B detected complete after, be sent back in the process of cartridge clip 3 by track 2 smoothly, when causing product B not to be sent to cartridge clip 3 because of reasons such as cartridge clip 3 distortion, the first sensor 6 of reporting to the police is started working as getting stuck, product fixture 5 is out of service, warning device 82 alert on the board are made mistakes, and avoid damaging the product B of detection.
In sum, described in this specification is several preferred embodiment of the present invention, and above embodiment is only unrestricted in order to technical scheme of the present invention to be described.All in the art technical staff all should be within claim protection range of the present invention under this invention's idea on the basis of existing technology by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (4)
1. optical detection apparatus is arranged on an end of a track on the body, is oppositely arranged with the cartridge clip of the accommodating product to be checked that is arranged on the described track other end; It is characterized in that: described checkout gear comprises at least: a microscope mechanism that arranges in opposite directions with described track; One is used for grabbing the product fixture of the described product to be checked of folder, be arranged on movably on the described track, but described product fixture comprises the clamping jaw structure of folding and the clamp bracket that cooperates with described track slippage; One driving mechanism is connected with described product fixture; One first sensor is arranged on the terminal relative position of described cartridge clip so that described first sensor can detect the jammed product to be checked in the exit of described cartridge clip; One second transducer is arranged on the relative position of described track so that described the second transducer can detect the product to be checked that is trapped on the described track; Also comprise a controlling organization, described controlling organization comprises warning device and a rocking handle control button mechanism.
2. optical detection apparatus as claimed in claim 1, it is characterized in that: described driving mechanism is screw-nut body.
3. optical detection apparatus as claimed in claim 2, it is characterized in that: the leading screw of described screw-nut body is connected with motor power, and the nut of described screw-nut body detachably is fixedly connected with described product fixture.
4. optical detection apparatus as claimed in claim 1, it is characterized in that: described controlling organization has the control panel of input service pattern.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010550699 CN102148132B (en) | 2010-11-19 | 2010-11-19 | Optical detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010550699 CN102148132B (en) | 2010-11-19 | 2010-11-19 | Optical detection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102148132A CN102148132A (en) | 2011-08-10 |
| CN102148132B true CN102148132B (en) | 2013-02-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010550699 Active CN102148132B (en) | 2010-11-19 | 2010-11-19 | Optical detection device |
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| Country | Link |
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| CN (1) | CN102148132B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102519409B (en) * | 2011-12-21 | 2014-01-29 | 宁波继峰汽车零部件股份有限公司 | Detection apparatus of automobile seat headrest guide sleeve |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2116192U (en) * | 1992-03-23 | 1992-09-16 | 常州市潞城传感器厂 | Electro-optic position online detecting apparatus of mill |
| US5493236A (en) * | 1993-06-23 | 1996-02-20 | Mitsubishi Denki Kabushiki Kaisha | Test analysis apparatus and analysis method for semiconductor wafer using OBIC analysis |
| WO2004053944A2 (en) * | 2002-12-11 | 2004-06-24 | Pdf Solutions, Inc. | Fast localization of electrical failures on an integrated circuit system and method |
| CN101339146A (en) * | 2007-07-05 | 2009-01-07 | 京元电子股份有限公司 | Automatic optical detector |
-
2010
- 2010-11-19 CN CN 201010550699 patent/CN102148132B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2116192U (en) * | 1992-03-23 | 1992-09-16 | 常州市潞城传感器厂 | Electro-optic position online detecting apparatus of mill |
| US5493236A (en) * | 1993-06-23 | 1996-02-20 | Mitsubishi Denki Kabushiki Kaisha | Test analysis apparatus and analysis method for semiconductor wafer using OBIC analysis |
| WO2004053944A2 (en) * | 2002-12-11 | 2004-06-24 | Pdf Solutions, Inc. | Fast localization of electrical failures on an integrated circuit system and method |
| CN101339146A (en) * | 2007-07-05 | 2009-01-07 | 京元电子股份有限公司 | Automatic optical detector |
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| Publication number | Publication date |
|---|---|
| CN102148132A (en) | 2011-08-10 |
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Effective date of registration: 20180105 Address after: 201107 Shanghai city Minhang District Zhu Jian Lu Lane 333 No. 2 layer, two layer Patentee after: Shanghai LANCO Semiconductor Equipment Co., Ltd. Address before: 201203 Shanghai Guo Shou Jing Road, Zhangjiang hi tech Park No. 351 Building No. 2 room 657-20 Patentee before: Shanghai Rising Sun Automation Technology Co., Ltd. |
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| TR01 | Transfer of patent right |