CN102247786A - Microfluid control device and method for manufacturing the same - Google Patents
Microfluid control device and method for manufacturing the same Download PDFInfo
- Publication number
- CN102247786A CN102247786A CN2011100712801A CN201110071280A CN102247786A CN 102247786 A CN102247786 A CN 102247786A CN 2011100712801 A CN2011100712801 A CN 2011100712801A CN 201110071280 A CN201110071280 A CN 201110071280A CN 102247786 A CN102247786 A CN 102247786A
- Authority
- CN
- China
- Prior art keywords
- many steps
- microchannel
- infrabasal plate
- mould
- fluid passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
Provided are a plastic microfluid control device having a multi-step microchannel and a method of manufacturing the same. The device includes a lower substrate, and a fluid channel substrate contacting the lower substrate and having a multi-step microchannel having at least two depths in a side coupling to the lower substrate. Thus, the device can precisely control the fluid flow by controlling capillary force in a depth direction of the channel by controlling the fluid using the multi-step microchannel having various channel depths. A multi-step micropattern is formed by repeating photolithography and transferred, thereby easily forming the multi-step microchannel having an even surface and a precisely controlled height.
Description
Technical field
The method that the present invention relates to a kind of microfluidic control device (microfluid control device) and make this microfluidic control device more specifically, relates to plastics microfluidic control device and manufacture method thereof with many steps microchannel.
Background technology
The microfluidic control device is the critical component of laboratory on the chip (lab-on-a-chip), and is applied to require the various devices of accurate fluid control, such as protein-chip, DNA chip, delivery system, micro total analysis system and microreactor.
Method according to the control microfluid, the microfluidic control device can use little actuating method, electric osmose (electrosmotic) method or capillary flow method to realize, little actuating method is used for realizing plastics micropump and valve on fluid passage or chamber, the electro-osmosis method utilization comes drive fluid by the electro-osmosis (electromosis) that applies the voltage generation between microfluid.
For example, utilize the microfluidic control device of capillary flow method to use the inner surface of microtubule and the attraction or the repulsion of the generation of the surface tension between the fluid to control flowing and flow velocity of fluid.When fluid used capillary force control, the microfluidic control device did not need independent actuator or additional power supply, and fault is seldom arranged.
Recently, the various structures of little plastics micro-structural of the fluid control spare of capillary flow or biochip have been proposed to be applied to use.For example, the biochip for diagnosing structure has been proposed, be used for only using by flowing of capillary force carry sample, successively in the fluid passage with chamber reacts and reacting dose by the optical method for measuring sample.In addition, proposed to produce capillary force or have the width of channel of the even degree of depth and the method that angle is controlled capillary force by adjusting by the hexagon micro-column with even degree of depth is installed in passage.
Such microfluidic control device can be by making such as the retrofit of computer numerical control (CNC) process or the dry etching in the semiconductor technology.
Yet this retrofit provides coarse surface, is forming existence restriction on little pattern.Therefore, be difficult to use capillary force accurately to control fluid.In addition, use semiconductor technology to make the microfluidic control device and have difficulty in process, manufacturing time is long and manufacturing cost is high problem.
Simultaneously, because the microfluidic control device that is used to diagnose the illness is disposable (disposable), it is usually by the polymer manufacturing.Usually, it is by direct processable polymer or form mould and mould is transferred to polymer manufacturing.
Yet the conventional microfluidic control device of use polymer is difficult to control the surface configuration of microchannel.Since static or molecule attached on the surface of passage or the surface characteristic of passage according to the variation of time, also be difficult to control flow rate of fluid.
Summary of the invention
The present invention relates to use the microfluidic control device of many steps microchannel control microfluid and the method for making this microfluidic control device.
One aspect of the present invention provides a kind of microfluidic control device, and this microfluidic control device comprises: infrabasal plate; And the fluid passage substrate, contacting infrabasal plate and have many steps microchannel in a side that is attached to infrabasal plate, this many steps microchannel has two degree of depth at least.
Another aspect of the present invention provides a kind of method of making the microfluidic control device, and this method comprises: form the mould with the little pattern of many steps; Arrive the fluid passage substrate by the little pattern transfer of many steps, form the many steps microchannel that has two degree of depth at least mould; And the fluid passage substrate junction that will have many steps microchannel is incorporated into infrabasal plate.
Description of drawings
Describe the preferred embodiments of the present invention in detail by the reference accompanying drawing, above and other feature of the present invention and advantage will become more obvious for those of ordinary skills, in the accompanying drawing:
Figure 1A and Figure 1B illustrate the structure of the microfluidic control device of the one exemplary embodiment according to the present invention;
Fig. 1 C and Fig. 1 D illustrate the principle of control microfluid of the microfluidic control device of the one exemplary embodiment according to the present invention;
Fig. 2 A to Fig. 2 F is the sectional view that the method for one exemplary embodiment formation mould prototype (prototype) according to the present invention is shown;
Fig. 3 is the sectional view of method that the formation mould of the one exemplary embodiment according to the present invention is shown;
Fig. 4 A to Fig. 4 D is the sectional view of method that the formation fluid passage substrate of the one exemplary embodiment according to the present invention is shown; And
Fig. 5 A and Fig. 5 B are the sectional views that fluid passage substrate junction that the one exemplary embodiment according to the present invention is shown is incorporated into infrabasal plate.
The specific embodiment
Hereinafter, will describe one exemplary embodiment of the present invention in detail.Yet, the invention is not restricted to the embodiment of following discloses, but can implement with various forms.For clear, will omit and the incoherent part of description of the invention, run through whole specification, similar parts will be represented with similar Reference numeral.
Run through whole specification, when part " comprising " or " comprising " parts, unless otherwise defined, this part can comprise rather than get rid of another element.In addition, term " part " used herein or " unit " are meant the unit that has a function or operation at least.
Figure 1A and Figure 1B illustrate the structure of the microfluidic control device of the one exemplary embodiment according to the present invention.Figure 1A is a perspective view, and Figure 1B is the sectional view along the line I-I ' intercepting of Figure 1A.
Shown in Figure 1A and Figure 1B, according to the microfluidic control device 100 of one exemplary embodiment of the present invention comprise infrabasal plate 120 and with infrabasal plate 120 fluid in contact channel substrates 110, fluid passage substrate 110 has many steps microchannel 150, and many steps microchannel 150 has two degree of depth at least with the side that combines of infrabasal plate 120.Here, fluid passage substrate 110 can also comprise fluid intake 130 and fluid issuing 140 and sorting hole, and air can flow to help fluid by sorting hole.Infrabasal plate 120 can also comprise sensor and reactor.
For example and since tunnel-shaped become the part that fluid is passed through fast with have the different degree of depth in the part that flows that stops fluid because of reaction, so fluid can be with high accuracy and repeatability control.Therefore, each step 152,154,156 or 158 height (H) can be 1 to 1000 μ m, and each step 152,154,156 or 158 width (W) can be 1 to 100000 μ m.
The surface of many steps microchannel 150 can or physically be handled with control hydrophobicity or hydrophily by chemistry.
Fig. 1 C and Fig. 1 D illustrate the principle of control microfluid of the microfluidic control device of the one exemplary embodiment according to the present invention.Fig. 1 C is the perspective view of many steps microchannel, and Fig. 1 D illustrates the sectional view of many steps microchannel.
Shown in Fig. 1 C, the microfluidic control device 100 of one exemplary embodiment can be controlled on the depth D 1 of microchannel and D2 according to the present invention.In other words, because the passage of microfluidic control device 100 can form the many ledge structures with various degree of depth, so capillary force can be controlled on depth direction.
The microfluidic control device 100 of one exemplary embodiment can be controlled on the depth D 1 of passage and D2 and width W 1, W2 and W3 according to the present invention.Therefore, by width W 1 and W2 and the depth D 1 and the D2 of while control channel, capillary force can be controlled more accurately.
For example, in the part that is used for increasing flow rate of fluid, can increase the depth D 1 and/or the width W 1 of passage, thereby reduce capillary force.Part at the part that flows that is used for stopping fluid, valve portion or reduction flow velocity has reduced depth D 2 and/or the width W 2 and the W3 of passage, thereby has increased capillary force.
Shown in Fig. 1 D, the width by while control channel (W1＞W3＞W2) and the degree of depth (and D1＞D2), can effectively reduce microfluid the cross section of microchannel of process.For example, with (W1＞W3＞W2) reduces the cross section of microchannel and (compares during W1 * D1＞W3 * D1＞W2 * D1) when the width of control channel only, ((D1＞when D2) being controlled simultaneously can effectively reduce the cross section (W1 * D1＞W3 * D1＞W2 * D1) of microchannel for the W1＞W3＞W2) and the degree of depth when width of channel.
Similarly, by the governing factor of usage level and vertical direction, the stopping of fluid, valve regulation, by can being controlled more accurately and reproducibly with converging.Particularly, in biological MEMS (bio-MEMS), be used for disease early diagnosis and the situation of chemico-analytic chip under, the application of many steps of one exemplary embodiment microchannel can and reproducibly be controlled the ultra micro fluid by control accurately more accurate analysis is provided according to the present invention.
In addition, when capillary force was only controlled in the horizontal direction, width of channel and shape were had to controlled, therefore can increase the size of chip.Yet when capillary force was also controlled in vertical direction, the size of chip can not increase.
In order to make the microfluidic control device that comprises many steps microchannel, can use processing or semiconductor technology.Yet according to processing technology, passage can have coarse surface, and therefore the reproducibility in fluid control can reduce.Compare with machining,, can obtain more level and smooth surface, but passage can form and has the only 1 μ m or the littler degree of depth, and manufacturing cost becomes higher according to semiconductor technology.As a result, productivity ratio is lower than the productivity ratio of disposable plastic chip product.The method of the manufacturing microfluidic control device be suitable for forming many steps microchannel is described hereinafter, with reference to the accompanying drawings.
Fig. 2 A to Fig. 5 B is the sectional view of method that the manufacturing microfluidic control device of the one exemplary embodiment according to the present invention is shown.
According to one exemplary embodiment of the present invention, formation has the mould prototype of the little pattern of many steps, and the mould with the little pattern of many steps uses the mould prototype to form.Then, form the many steps microchannel that has two degree of depth at least to the fluid passage substrate by the little pattern transfer of many steps with mould.Then, the fluid passage substrate junction with many steps microchannel is incorporated into infrabasal plate, thereby finishes the microfluidic control device.
According to the present invention, when the microfluidic control device by with the little pattern transfer of many steps of mould when the fluid passage substrate is made, owing to obtained the level and smooth surface of passage, the reproducibility of fluid control uprises, and has obtained low manufacturing cost and high production rate.Since the degree of depth of passage can be controlled in from micron to centimetre not commensurate, so capillary force be accurately controlled, thereby fluid can be controlled more accurately.
Fig. 2 A to Fig. 2 F is the sectional view of method that the formation mould prototype of the one exemplary embodiment according to the present invention is shown.
Shown in Fig. 2 A, photoresist 220 is coated to silicon substrate 210, and mask pattern 230 is formed on the photoresist 220.
Here, photoresist 220 can be the epoxy radicals photoresist.Epoxy radicals photoresist 220 can easily form the pattern of expectation by exposure, can not damaged or distortion by extra exposure after thermmohardening, and can form little pattern.Can use exemplary epoxy radicals photoresist, SU-8 base photoresist.
The thickness of the photoresist 220 of coating can be controlled according to the viscosity of photoresist, the per unit revolution and the time of spin coating device.For example, photoresist 220 can apply with 500 to 5000rpm rotary speed, and can form the thickness of 1 to 100 μ m.
The width W of little pattern determines that by the width W 4 of mask pattern 230 mask pattern 230 can have the width W 2 of 1 to 100000 μ m.
Shown in Fig. 2 B, the first pattern 220A uses mask pattern 230 to form by exposure and development as the etching obstacle.Here, the formation of the first pattern 220A can be undertaken by the photoetching with 1 μ m or bigger resolution ratio.
Then, the first pattern 220A solidifies by thermmohardening technology.Here, thermmohardening technology can and be carried out before developing afterwards.
As a result, formation has the mould prototype of little pattern, and the little pattern of many steps can form by the formation of the coating that repeats to comprise photoresist, the formation of mask pattern, little pattern and the technology of sclerosis.
Shown in Fig. 2 C, photoresist 240 is coated on the whole surface of products therefrom of the first pattern 220A that comprises curing, and mask pattern 250 is formed on the photoresist 240.
Shown in Fig. 2 D, the second pattern 240A uses mask pattern 250 to form by exposure and development as the etching obstacle.Then, the second pattern 240A solidifies by thermmohardening.
Shown in Fig. 2 E, photoresist 260 is coated on the whole surface of products therefrom of the second pattern 240A that comprises curing, and mask pattern 270 is formed on the photoresist 260.
Shown in Fig. 2 F, the 3rd pattern 260A uses mask pattern 270 to form as the etching obstacle.Then, the 3rd pattern 260A solidifies by thermmohardening.
As a result, made mould prototype 200 with the little pattern of three steps.Here, the number of the step of little pattern can be controlled according to the number of times that technology repeats, and the shape of little pattern can change according to the shape of mask pattern 230,250 or 270.
Fig. 3 is the sectional view that the method for one exemplary embodiment formation mould according to the present invention is shown.
As shown in Figure 3, use mould prototype 200 to form mould 300 with the little pattern of many steps.For example, metal die can form by electroplating.Particularly, the seed crystal film can be formed on the mould prototype 200, and metal die can form by electroplating.
Here, thus the seed crystal film can be formed by the metal such as Ti, Cr, Al or Au and has individual layer or bilayer.To have enough thickness not crooked or break in ensuing transfer printing process thereby mould 300 can form.
Then, although do not illustrate in the accompanying drawings, mould prototype 200 is removed by wet etching.
Fig. 4 A to Fig. 4 D is the sectional view that illustrates according to the method for the formation fluid passage substrate of one exemplary embodiment of the present invention.
Shown in Fig. 4 A, prepared the mould 300 that comprises the little pattern of many steps and be used for the substrate 400 that transfer printing is formed on the little pattern of lip-deep many steps of mould 300.
Here, substrate 400 can be a polymeric substrates, and it can be by cyclic olefine copolymer (COC), polymethyl methacrylate (PMMA), Merlon (PC), cyclic olefin polymer (COP), liquid crystal polymer (LCP), dimethyl silicone polymer (PDMS), polyamide (PA), polyethylene (PE), polyimides (PI), polypropylene (PP), polyphenylene oxide (PPE), polystyrene (PS), polyformaldehyde (POM), polyether-ether-ketone (PEEK), polyether sulfone (PES), PETG (PET), polytetrafluoroethylene (PTFE), polyvinyl chloride (PVC), polyvinylidene fluoride (PVDF), polybutylene terephthalate (PBT) (PBT), PEP (FEP), crossing fluoroalkylation thing (PFA) or its synthetic forms.
Shown in Fig. 4 B, the little pattern transfer of many steps of mould 300 is to substrate 400.
For example, when using the substrate 400 that is formed by polymer, the little pattern of many steps can use injection mo(u)lding, hot moulding or casting to come transfer printing.As a result, the little pattern of many steps with complicated shape can easily be transferred to polymeric substrates 400, therefore can finish the fluid passage substrate 400A with many steps microchannel.As mentioned above, when many steps microchannel was formed on the polymeric substrates 400 by transfer printing, passage can form the degree of depth that has from several microns to several centimetres.
Shown in Fig. 4 C, finish the little pattern of many steps after the transfer printing of fluid passage substrate 400A, remove mould 300.In the accompanying drawings, the many steps microfluidic channel that is formed on the substrate 400A of fluid passage is indicated by Reference numeral " 410 ".
Shown in Fig. 4 D, substrate 400A etched fluid issuing 430 in fluid passage to be formed for injecting the fluid intake 420 of fluid and being used to discharge fluid.In the accompanying drawings, the fluid passage substrate with fluid intake 420 and fluid issuing 430 is indicated by Reference numeral " 400B ".In addition, although do not have shown in the drawingsly, can further form the hole that allows air pass through.
Fig. 5 A and Fig. 5 B are the sectional views that fluid passage substrate junction that the one exemplary embodiment according to the present invention is shown is incorporated into infrabasal plate.
Shown in Fig. 5 A, fluid passage substrate 400B and infrabasal plate 500 that preparation has many steps microfluidic channel 410.
Here, infrabasal plate 500 can be by forming with the fluid passage similar polymer of substrate 400B.Fluid passage substrate 400B and infrabasal plate 500 can be formed by identical or different polymer architecture.The example of the material of infrabasal plate 500 is identical with the example of the material of above-mentioned fluid passage substrate 400.
Shown in Fig. 5 B, the microfluidic control device is made by fluid passage substrate 400B is attached to infrabasal plate 500.
Here, when fluid passage substrate 400B and infrabasal plate 500 were formed by identical materials, fluid passage substrate 400B can be undertaken by using heat, chemical substance or hyperacoustic fusion adhesion method to the combination of infrabasal plate 500.
When fluid passage substrate 400B was formed by different materials with infrabasal plate 500, fluid passage substrate 400B can use liquid-type jointing material, powder-stuck material or paper shape film-type jointing material to carry out to the combination of infrabasal plate 500.
Especially, can use the UV curing agent.In addition, can require room temperature or low temperature, in this case, can use the contact adhesive that only carries out combination with pressure to prevent biochemical material modification during combination.
According to the present invention, fluid is controlled in the many steps microchannel that has different depth by use, and the microfluidic control device flows channel depth direction adjusted capillary force and accurate control fluid.In addition, form the little pattern of many steps, can easily form the many steps microchannel that has an even surface and highly accurately controlled by repeating photoetching and the little pattern of transfer printing.
Therefore, fluid can use vertical many steps ultra microstructure reproducibly and accurately to be controlled.The biological device in laboratory on the various chips be can be applied to according to microfluidic control device of the present invention and manufacture method thereof, protein-chip, DNA chip, delivery system, micro total analysis system and biochemical microreactor comprised.
Although illustrate and described the present invention with reference to particular exemplary embodiment of the present invention, it will be understood by those skilled in the art that and to carry out various changes in form and details and do not deviate from the spirit and scope that the present invention is defined by the claims.
The application requires the korean patent application No.10-2010-0026154 that submits on March 24th, 2010 and priority and the rights and interests of the korean patent application No.10-2010-0077699 that submits on August 12nd, 2010, and its full content is incorporated herein by reference.
Claims (14)
1. microfluidic control device comprises:
Infrabasal plate; With
The fluid passage substrate contacts described infrabasal plate and has many steps microchannel in a side that is attached to described infrabasal plate, and this many steps microchannel has two degree of depth at least.
2. device as claimed in claim 1, the capillary force of wherein said many steps microchannel is controlled on the depth direction of passage.
3. device as claimed in claim 1, wherein said many steps microchannel has a step, and the degree of depth of this step is 1 to 1000 μ m.
4. device as claimed in claim 1, wherein said many steps microchannel has a step, and the width of this step is 1 to 100000 μ m.
5. device as claimed in claim 1, wherein said fluid passage substrate and described infrabasal plate are configured to by identical or different polymer scale.
6. device as claimed in claim 1, the surface of wherein said many steps microchannel are by chemical treatment, with control hydrophobicity or hydrophily.
7. method of making the microfluidic control device comprises:
Formation has the mould of the little pattern of many steps;
Arrive the fluid passage substrate by the little pattern transfer of described many steps, form the many steps microchannel that has two degree of depth at least described mould; And
The described fluid passage substrate junction that will have described many steps microchannel is incorporated into infrabasal plate.
8. method as claimed in claim 7, wherein said fluid passage substrate and described infrabasal plate are formed by identical or different polymer.
9. method as claimed in claim 7, wherein said fluid passage substrate are used adhesive or ultrasonic joint and are attached to described infrabasal plate.
10. method as claimed in claim 7, the formation of wherein said mould comprises:
Formation has the mould prototype of the little pattern of many steps; And
Use described mould prototype to form metal die by electroplating.
11. method as claimed in claim 10, the formation of wherein said mould prototype comprises:
The coating photoresist is to the surface of silicon substrate;
Form little pattern by the described photoresist of patterning; And
The described little pattern that hardens,
Wherein repeat the formation and the described sclerosis of the formation of the coating of described photoresist, described mask pattern, described little pattern, to form the little pattern of described many steps.
12. method as claimed in claim 11, wherein said photoresist are epoxy or SU-8 base photoresist.
13. method as claimed in claim 10, the formation of wherein said metal die comprises:
On described mould prototype, form the seed crystal thin layer;
Form described metal die by electroplating; And
Remove described mould prototype by wet etching.
14. method as claimed in claim 7, wherein said transfer printing is undertaken by injection mo(u)lding, hot moulding or casting.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR20100026154 | 2010-03-24 | ||
| KR10-2010-0026154 | 2010-03-24 | ||
| KR1020100077699A KR101348655B1 (en) | 2010-03-24 | 2010-08-12 | Microfluid control device and method for manufacturing the same |
| KR10-2010-0077699 | 2010-08-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102247786A true CN102247786A (en) | 2011-11-23 |
| CN102247786B CN102247786B (en) | 2014-11-05 |
Family
ID=44956726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110071280.1A Expired - Fee Related CN102247786B (en) | 2010-03-24 | 2011-03-24 | Microfluid control device and method for manufacturing the same |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR101348655B1 (en) |
| CN (1) | CN102247786B (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105149024A (en) * | 2015-09-16 | 2015-12-16 | 杭州电子科技大学 | Thermophoresis coupling subparticle sorter |
| CN107271421A (en) * | 2017-07-27 | 2017-10-20 | 深圳中科芯海智能科技有限公司 | A kind of microparticle fluorescence detection means in fluid sample |
| CN108927232A (en) * | 2018-07-17 | 2018-12-04 | 博奥生物集团有限公司 | A kind of fluid mixing structure for micro-fluidic chip |
| CN110078018A (en) * | 2018-01-26 | 2019-08-02 | 苏州锐材半导体有限公司 | Stepped formwork processing method for micro-fluidic chip preparation |
| CN110559995A (en) * | 2019-09-11 | 2019-12-13 | 南京工业大学 | method for adsorbing polystyrene micro-plastic in water by using three-dimensional graphene |
| CN111250185A (en) * | 2020-02-21 | 2020-06-09 | 京东方科技集团股份有限公司 | Preparation method and preparation device of micro-fluidic chip |
| CN111254390A (en) * | 2018-11-30 | 2020-06-09 | 研能科技股份有限公司 | Method for manufacturing micro-fluid actuator |
| JP2020114620A (en) * | 2014-11-28 | 2020-07-30 | デクセリアルズ株式会社 | Matrix for microchannel fabrication, transcript, and manufacturing method of matrix for microchannel fabrication |
| CN113646252A (en) * | 2019-01-29 | 2021-11-12 | 内特里公司 | Method for manufacturing 3D microfluidic devices |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101443981B1 (en) * | 2012-11-29 | 2014-10-14 | 포항공과대학교 산학협력단 | The structure for the microdroplet control and microdroplet/microparticle made based on this |
| KR101411333B1 (en) * | 2013-07-22 | 2014-06-25 | 연세대학교 산학협력단 | Microfluidic Channel Having Heat Generating Member and Airborne Fine Particles Monitoring Apparatus Having the Same |
| WO2018183074A1 (en) | 2017-03-29 | 2018-10-04 | Kimberly-Clark Worldwide, Inc. | Surface for directional fluid transport including against external pressure |
| KR102622842B1 (en) | 2017-06-19 | 2024-01-10 | 주식회사 큐리오칩스 | Microfluidic device with partially enclosed microfluidic channel and uses thereof |
| KR102086802B1 (en) * | 2017-07-19 | 2020-03-09 | 서강대학교산학협력단 | Injection mold for manufacturing probe of atomic force microscopy and manufacturing method thereof |
| KR102283697B1 (en) | 2019-10-16 | 2021-07-30 | 울산과학기술원 | Apparatus for analyzing nanochannel by controlling temperature |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6557427B2 (en) * | 2000-05-24 | 2003-05-06 | Micronics, Inc. | Capillaries for fluid movement within microfluidic channels |
| US20030214057A1 (en) * | 2002-05-15 | 2003-11-20 | Zhili Huang | Microstructure fabrication and microsystem integration |
| CN1689142A (en) * | 2002-08-14 | 2005-10-26 | 兰姆研究有限公司 | Method and compositions for hardening photoresist in etching processes |
| CN1742358A (en) * | 2002-11-20 | 2006-03-01 | 瑞威欧公司 | Method and system for fabricating multi layer devices on a substrate |
| CN1867795A (en) * | 2003-08-11 | 2006-11-22 | 加州理工学院 | Microfluidic large scale integration |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100452946B1 (en) * | 2002-11-26 | 2004-10-14 | 한국전자통신연구원 | Low Power Consumption Microfabricated Thermal Cycler and its Fabrication Method |
| KR100995363B1 (en) * | 2007-12-17 | 2010-11-19 | 한국전자통신연구원 | Device for Controlling of Microfluidic and Method of Fabricating and Operating the Same |
-
2010
- 2010-08-12 KR KR1020100077699A patent/KR101348655B1/en active IP Right Grant
-
2011
- 2011-03-24 CN CN201110071280.1A patent/CN102247786B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6557427B2 (en) * | 2000-05-24 | 2003-05-06 | Micronics, Inc. | Capillaries for fluid movement within microfluidic channels |
| US20030214057A1 (en) * | 2002-05-15 | 2003-11-20 | Zhili Huang | Microstructure fabrication and microsystem integration |
| CN1689142A (en) * | 2002-08-14 | 2005-10-26 | 兰姆研究有限公司 | Method and compositions for hardening photoresist in etching processes |
| CN1742358A (en) * | 2002-11-20 | 2006-03-01 | 瑞威欧公司 | Method and system for fabricating multi layer devices on a substrate |
| CN1867795A (en) * | 2003-08-11 | 2006-11-22 | 加州理工学院 | Microfluidic large scale integration |
Non-Patent Citations (1)
| Title |
|---|
| 罗怡等: "《一种新型微流控芯片金属热压模具的制作工艺研究》", 《中国机械工程》, vol. 16, no. 17, 27 October 2005 (2005-10-27), pages 1505 - 1507 * |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020114620A (en) * | 2014-11-28 | 2020-07-30 | デクセリアルズ株式会社 | Matrix for microchannel fabrication, transcript, and manufacturing method of matrix for microchannel fabrication |
| CN105149024A (en) * | 2015-09-16 | 2015-12-16 | 杭州电子科技大学 | Thermophoresis coupling subparticle sorter |
| CN105149024B (en) * | 2015-09-16 | 2017-01-11 | 杭州电子科技大学 | Thermophoresis coupling subparticle sorter |
| CN107271421A (en) * | 2017-07-27 | 2017-10-20 | 深圳中科芯海智能科技有限公司 | A kind of microparticle fluorescence detection means in fluid sample |
| CN110078018A (en) * | 2018-01-26 | 2019-08-02 | 苏州锐材半导体有限公司 | Stepped formwork processing method for micro-fluidic chip preparation |
| CN108927232A (en) * | 2018-07-17 | 2018-12-04 | 博奥生物集团有限公司 | A kind of fluid mixing structure for micro-fluidic chip |
| CN111254390A (en) * | 2018-11-30 | 2020-06-09 | 研能科技股份有限公司 | Method for manufacturing micro-fluid actuator |
| CN111254390B (en) * | 2018-11-30 | 2022-03-22 | 研能科技股份有限公司 | Method for manufacturing micro-fluid actuator |
| CN113646252A (en) * | 2019-01-29 | 2021-11-12 | 内特里公司 | Method for manufacturing 3D microfluidic devices |
| CN110559995A (en) * | 2019-09-11 | 2019-12-13 | 南京工业大学 | method for adsorbing polystyrene micro-plastic in water by using three-dimensional graphene |
| CN110559995B (en) * | 2019-09-11 | 2021-09-21 | 南京工业大学 | Method for adsorbing polystyrene micro-plastic in water by using three-dimensional graphene |
| CN111250185A (en) * | 2020-02-21 | 2020-06-09 | 京东方科技集团股份有限公司 | Preparation method and preparation device of micro-fluidic chip |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20110107255A (en) | 2011-09-30 |
| CN102247786B (en) | 2014-11-05 |
| KR101348655B1 (en) | 2014-01-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102247786B (en) | Microfluid control device and method for manufacturing the same | |
| US20130212882A1 (en) | Microfluid control device and method of manufacturing the same | |
| Abgrall et al. | A novel fabrication method of flexible and monolithic 3D microfluidic structures using lamination of SU-8 films | |
| EP2179279B1 (en) | Device for controlling fluid motion into micro/nanochannels by means of surface acoustic waves | |
| US7238324B2 (en) | Microfluidic device for the controlled movement of fluid | |
| US20110240127A1 (en) | Fluidic Article Fabricated In One Piece | |
| Hongbin et al. | Novel polydimethylsiloxane (PDMS) based microchannel fabrication method for lab-on-a-chip application | |
| Han et al. | Multi-layer plastic/glass microfluidic systems containing electrical and mechanical functionality | |
| JP5065803B2 (en) | Micro liquid weighing apparatus, microchip having the same, and liquid measuring method | |
| KR20120030130A (en) | Fluidic devices with diaphragm valves | |
| Brassard et al. | 3D thermoplastic elastomer microfluidic devices for biological probe immobilization | |
| JP3668959B2 (en) | Micro liquid control mechanism | |
| KR100961850B1 (en) | Microfluidic chip using hydrophillic film | |
| KR100444751B1 (en) | Device of Controlling Fluid using Surface Tension | |
| JP2008132543A (en) | Method for forming pattern on resin substrate, and manufacturing method of a micro-passage device using the method | |
| TWI269776B (en) | Microfluidic driving apparatus and method for manufacturing the same | |
| KR101151221B1 (en) | The method of manufacturing a structure with micro-channels and the structure using the same | |
| JP4513626B2 (en) | Method for producing a mold for producing a microchannel substrate | |
| JP4622617B2 (en) | Method for producing a mold for producing a microchannel substrate | |
| Karthikeyan et al. | Dimension tolerances in fabrication of polymer microfluidic devices | |
| JP4581784B2 (en) | Method for producing a mold for producing a microchannel substrate | |
| Cardoso et al. | Introduction to microfabrication techniques for microfluidics devices | |
| KR20060065456A (en) | Micro heating system using plastic substrate and method for manufacturing the same | |
| KR100779083B1 (en) | Plastic micro heating system, lap-on-a-chip using the same micro heating system, and method of fabricating the same micro heating system | |
| TWI288117B (en) | Method of forming embedded micro channels |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141105 Termination date: 20190324 |