CN102305663A - Calibration apparatus measuring mid-infrared detector responsivity with temperature change - Google Patents
Calibration apparatus measuring mid-infrared detector responsivity with temperature change Download PDFInfo
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- CN102305663A CN102305663A CN201110233043A CN201110233043A CN102305663A CN 102305663 A CN102305663 A CN 102305663A CN 201110233043 A CN201110233043 A CN 201110233043A CN 201110233043 A CN201110233043 A CN 201110233043A CN 102305663 A CN102305663 A CN 102305663A
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- infrared eye
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Abstract
The invention discloses a calibration method measuring mid-infrared detector responsivity with temperature change and an apparatus thereof. A light source, a temperature control apparatus and a signal condition measurement apparatus are placed on an optical path, and measurement of a plurality of detectors can be completed in a temperature cycle. The calibration apparatus has the characteristics of simple structure and convenient operation, experiment cost is substantially reduced, and efficiency of calibration work is raised. Since a high steady blackbody light source is employed, measurement accuracy is guaranteed.
Description
Technical field
The present invention relates to the demarcation and the measuring technique of photodetector, the particularly middle temperature variant caliberating device of infrared eye responsiveness.
Background technology
Responsiveness is meant under specified wavelength, and the ratio of this wavelength light power of signal that detector produced and incident will realize that its absolute measurement need accurately measure the luminous power of this wavelength that incides detector and the signal that detector produces.The responsiveness of middle infrared eye has bigger variation with the change of working temperature; This type detector is the core devices of large tracts of land mid-infrared laser power/energy Density Distribution measuring equipment; The used middle infrared eye quantity of this equipment reaches hundreds of; And operating ambient temperature changes greatly, and the responsiveness of accurately measuring this detector varies with temperature the essential condition that rule is a decision measuring equipment working environment index.
Existing measurement of responsivity method mainly contains the wide spectrum light source relative measurement method and the LASER Light Source absolute method of measurement.The wide spectrum light source relative measurement method sends wide range light sources such as Nernst glower, Elema light usually through inciding detector behind the grating beam splitting, and according to the voltage or the current signal amplitude of explorer response, calculates the spectral response relative value.But since the light intensity of above-mentioned light source very a little less than; Pass through again behind the grating beam splitting its power more a little less than; So be difficult to accurately to measure the luminous power after the beam split, and the radiation characteristic of wide spectrum light source also is difficult to Theoretical Calculation with the optical grating diffraction parameter and gets, so can only be used for the relative measurement of responsiveness; The LASER Light Source absolute method of measurement is to utilize laser instrument as light source, measures the absolute response rate of detector under this wavelength, in application, needs accurately to measure the laser power of irradiation to the detector useful area.Because the Laser Output Beam space distribution is inhomogeneous usually; And effective photosurface of detector is very little; When carrying out detector measurement in enormous quantities; Response signal to each detector needs twice difference Laser Measurement power and corresponding laser position place detector; Need to adopt the precision optics adjusting bracket that the placement location of each detector is accurately regulated, finally have influence on the efficient and the accuracy of measure batch; In addition; When measuring such as the explorer response rate of middle-infrared band for special wavelength; Unstable or the more high application that all limits this method of operating cost of this long wavelength laser output power; When varying with temperature for infrared eye responsiveness in demarcating; Nominal time is longer, has limited the application of this method especially.
Vary with temperature rule in order accurately and apace to demarcate its responsiveness in addition, require the detector working temperature accurately to regulate, reading device is accurate and efficiency-cost ratio is high.The stirling refrigeration device is a temperature control equipment comparatively commonly used at present; This device has the accurate advantage of adjustment; But its refrigerating operation process is complicated; The replacing detector needs the professional especially and wastes time and energy; Operating cost is higher and maintenance workload is bigger; Be fit to the demarcation of a small amount of detector, under the situation of demarcating a large amount of detectors, be difficult to use.
Summary of the invention
Institute of the present invention purpose provides the temperature variant caliberating device of infrared eye responsiveness in a kind of measurement; Responsiveness applicable to any wavelength varies with temperature measurement; Have that output light source is stable, calibration accuracy is high; And characteristics such as simple to operate, replacing detector makes things convenient for, operating cost is low are used for a large amount of explorer response rates and vary with temperature feature measurement.
Technical solution of the present invention is:
The temperature variant caliberating device of infrared eye responsiveness in a kind of, its special character is: comprise black-body resource, optical chopper, optical filter, well heater, height temperature control case, middle infrared eye, signal amplifier and signals collecting recording unit; Said optical chopper, optical filter and middle infrared eye are placed on the black-body resource radiation path successively; Infrared eye is arranged in the height temperature control case in said, and the sidewall of said control box is provided with the sealing optical window over against the black-body resource radiation path; The infrared detector photosensitive face is over against the black-body resource radiation path in said; The output terminal of infrared eye is connected to outer signal amplifier and the signals collecting recording unit that is provided with of height temperature control case through signal transmssion line in said; Said well heater is installed in sealing optical window place.
Infrared eye is installed on the detector fixed support in above-mentioned, and said detector fixed support is fixed on the staking after passing another sidewall of height temperature control case; Be provided with packoff between said height temperature control case sidewall and the detector fixed support; Said detector fixed support inside is provided with the through hole that can supply signal transmssion line to pass through.
The quantity of the middle infrared eye on the above-mentioned detector fixed support is a plurality of, and it is distributed on the same plane perpendicular to radiation path; Described signal transmssion line is a ribbon conductor.
The distance of above-mentioned optical chopper blade surface and detector photosurface is greater than 10 times of black matrix cavity diameters.
Above-mentioned signals collecting recording unit is the digitizing lock-in amplifier; Said well heater is a heating wire; Described sealing optical window material is white stone or silicon.
Above-mentioned middle infrared eye is an infrared eye in mercury cadmium telluride, indium antimonide, vulcanized lead or the tin lead, and the half band-width of said optical filter is 100～150nm.
The beneficial effect that the present invention has:
1, the method that adopts the wide spectrum output of black-body resource to combine narrow band pass filter to filter; Stable, the uniform source of light of specified wavelength have been obtained; Insensitive to position of detector in calibration measurements; Need not carry out minute adjustment to the placement location of detector; And detector fixed support position varies with temperature and also can not have influence on calibration result when changing, and has improved the demarcation efficient and the accuracy of detector in batches greatly.
2, the present invention's wavelength to be measured is in the transmission band of narrow band pass filter; And the half band-width of narrow band pass filter is 100～150nm; Suitable half band-width can prevent the deviation of plated film design and processes and cause wavelength to be measured to appear at outside the transmission band; Guarantee that simultaneously irradiation is enough big to detector surface power; Guarantee signal output intensity, improved the measurement signal to noise ratio (S/N ratio).
4, through changing the wavelength parameter and the blackbody temperature of optical filter,, has applicability widely applicable to the parameter calibration of detector in other wavelength.
5, the present invention adopts the method that the wide spectrum output of black-body resource combines narrow band pass filter to filter; Can obtain the luminous power parameter of irradiation through Theoretical Calculation to detector surface; Overcome the error of introducing in the small and weak optical signal power measurement, guaranteed responsiveness absolute calibration's accuracy.
6, the present invention is equipped with well heater at the sealing optical window place of height temperature control case, and the condensate water when having overcome height temperature control case low-temperature working on the sealing optical window is to the influence of calibration result.
7, caliberating device of the present invention has characteristics such as simple in structure, easy to operate, has improved the efficient of demarcating, and the demarcation expense is reduced greatly.
Description of drawings
Fig. 1 is the structural representation of temperature control equipment of the present invention;
Fig. 2 is the theory diagram of light source of the present invention and follow-up signal treatment circuit;
Fig. 3 is that the relative response rate varies with temperature curve;
Wherein: the 1-well heater; 2-seals optical window; 3-height temperature control case; 4-detector fixed support; The 5-sealing shroud; The 6-signal transmssion line; Infrared eye among the 7-; The 8-staking; The 9-black-body resource; The 10-optical chopper; The 11-optical filter; 12-detector fixed support through hole; 13-signal condition amplifier; The 14-lock-in amplifier;
Embodiment
In temperature control equipment shown in Figure 1, around the sealing optical window 2 well heater 1 is installed, sealing optical window material can be white stone or silicon, well heater 1 can be resistance wire, be coiled in sealing optical window 2 around; Nominal light incides in the height temperature control case 3 through the sealing optical window 2 of high transmission; On the middle infrared eye 7 of irradiation in light path; Middle infrared eye 7 is installed on the detector fixed support 4; And be fixed on the staking 8 through the through hole on the height temperature control case 3; Around through hole, be provided with sealing shroud 5; Signal transmssion line 6 transfers to signal with electric signal and amplifies and part of data acquisition through the through hole in the detector fixed support 4.Middle infrared eye 7 can be one; Also can be many; Because the hot spot of black-body resource radiant light is big and light distribution is more even; Reach several centimetres through beam diameter after the space divergence; Can hold many and be arranged side by side on the light beam, as long as be arranged on the plane perpendicular to radiation path by surveying device; During the infrared eye group, 6 of signal transmssion lines are ribbon conductor in adopting.According to the requirement of demarcating, middle infrared eye 7 is an infrared eye in mercury cadmium telluride, indium antimonide, vulcanized lead or the tin lead.
Light source and follow-up signal handling principle synoptic diagram like Fig. 2; The light of black-body resource 9 radiation obtains the radiant light of alternation through optical chopper 10 and optical filter 11; Incide in the temperature control equipment shown in Figure 1; Electric signal connects signal condition amplifier 13 through signal transmssion line 6, through lock-in amplifier 14 read output signals.
The present invention's wavelength to be measured is in the transmission band of optical filter 11, and the half band-width of optical filter 11 is designed to 100～150nm.Work as when half band-width is too big, bring calibrated error easily, the too little output signal strength that then can influence detector of width.Select suitable half band-width can prevent the deviation of plated film design and processes, cause wavelength to be measured to appear at outside the transmission band, guarantee that simultaneously irradiation is enough big to detector surface power, guarantee signal output intensity, improve and measure signal to noise ratio (S/N ratio).Optical chopper 10 blade surfaces of the present invention and distances detector 7 photosurfaces are greater than 10 times of black matrix cavity diameters; The homogeneity of its black matrix output facula is better like this; Optical chopper 10 can change its modulating frequency through the chopping modulation controller, and modulating frequency is arranged on hundreds of Hz usually.The output terminal of middle infrared eye 7 connects the input end of signal condition amplifier 13; The output terminal of signal condition amplifier 13 can connect signal recorders such as oscillograph or data acquisition system (DAS); Also can connect lock-in amplifier 14; Simultaneously can realize that like this lock of feeble signal amplifies mutually; And directly export signal amplitude, further improved the measurement accuracy, when adopting lock-in amplifier 14 to amplify; Need reference be provided for lock-in amplifier 14 by chopping modulation controller output frequency modulation signal.
After the measurement of responsivity of the detector set of a temperature spot finished, working temperature to the next temperature spot of adjustment height temperature control case 3 repeated above-mentioned measuring process.After measurement finishes, explorer response rate data fitting is met with a response rate with temperature response curve.
Adopt this measuring method to have characteristics simple and reliable for structure, after one group of detector measurement is accomplished,, can carry out the surveying work of next group detector through changing the detector on the detector fixed support 4.This device can be measured the interior explorer response curve of operating temperature range of height temperature control case.
Provided the result of a confirmatory experiment of the present invention below; 35 HgCdTe photoconductive detectorses are installed on detector fixed support 4; Black-body resource 9 is operated in 1000 ℃; The frequency of operation 270Hz of optical chopper 10; Sealing optical window 2 white stone windows for the band heating; Signal measurement device is a lock-in amplifier 14, and height temperature control case 3 works in-40 ℃～60 ℃, per 10 ℃ of responsiveness parameters of measuring 35 detectors.Experimental result shows, works 10 hours, can accomplish the surveying work of 35 detectors; Behind data normalization; The match rate of meeting with a response varies with temperature curve, as shown in Figure 3, this measuring method is described and installs the responsiveness that can be effective to the batch detector to vary with temperature demarcation.
The present invention is not limited to above-mentioned embodiment; Can work in other temperature spot such as black-body resource 9; Optical chopper 10 also can work in other frequency, and the variation of optical filter 11 passbands can be measured the Changing Pattern of explorer response rate in other frequency band, and sealing optical window 2 is replaceable to be other material.More than change, all in protection scope of the present invention.
Claims (6)
1. the temperature variant caliberating device of infrared eye responsiveness in a kind is characterized in that: comprise black-body resource, optical chopper, optical filter, well heater, height temperature control case, middle infrared eye, signal amplifier and signals collecting recording unit; Said optical chopper, optical filter and middle infrared eye are placed on the black-body resource radiation path successively; Infrared eye is arranged in the height temperature control case in said, and the sidewall of said control box is provided with the sealing optical window over against the black-body resource radiation path; The infrared detector photosensitive face is over against the black-body resource radiation path in said; The output terminal of infrared eye is connected to outer signal amplifier and the signals collecting recording unit that is provided with of height temperature control case through signal transmssion line in said; Said well heater is installed in sealing optical window place.
2. the temperature variant caliberating device of infrared eye responsiveness in according to claim 1 is characterized in that: also comprise staking and detector fixed support, said staking is arranged on outside the height temperature control case; Infrared eye is installed on the detector fixed support in said, and said detector fixed support is fixed on the staking after passing another sidewall of height temperature control case; Be provided with packoff between said height temperature control case sidewall and the detector fixed support; Said detector fixed support inside is provided with the through hole that can supply signal transmssion line to pass through.
3. the temperature variant caliberating device of infrared eye responsiveness in according to claim 1 and 2; It is characterized in that: the quantity of the middle infrared eye on the said detector fixed support is a plurality of, and it is distributed on the same plane perpendicular to radiation path; Described signal transmssion line is a ribbon conductor.
4. the temperature variant caliberating device of infrared eye responsiveness in according to claim 3, it is characterized in that: the distance of said optical chopper blade surface and detector photosurface is greater than 10 times of black matrix cavity diameters.
5. the temperature variant caliberating device of infrared eye responsiveness in according to claim 4, it is characterized in that: described signals collecting recording unit is the digitizing lock-in amplifier; Said well heater is a heating wire; Described sealing optical window material is white stone or silicon.
6. the temperature variant caliberating device of infrared eye responsiveness in according to claim 5; It is characterized in that: infrared eye is an infrared eye in mercury cadmium telluride, indium antimonide, vulcanized lead or the tin lead in described, and the half band-width of said optical filter is 100～150nm.
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103256976A (en) * | 2013-03-20 | 2013-08-21 | 中国科学院安徽光学精密机械研究所 | Low-temperature absolute radiometer absolute spectral responsivity calibration method and experimental apparatus |
| CN104375073A (en) * | 2014-11-18 | 2015-02-25 | 中国人民解放军63655部队 | Photoelectric response sensitivity calibrating device for optical waveguide detector under different temperatures |
| CN104634447A (en) * | 2014-12-31 | 2015-05-20 | 西南技术物理研究所 | Photoelectric detector service life assessment test system |
| CN104880254A (en) * | 2015-06-12 | 2015-09-02 | 中国电子科技集团公司第十三研究所 | Simulation pulse temperature source for microscopic infrared thermal infrared imager response time parameter test |
| CN107631804A (en) * | 2017-09-28 | 2018-01-26 | 泉州禾逸电子有限公司 | A kind of pyroelectric infrared detector automatic testing equipment and its method of testing |
| CN109323994A (en) * | 2018-11-19 | 2019-02-12 | 中国海洋石油集团有限公司 | A kind of scale method and device |
| CN109839196A (en) * | 2019-02-22 | 2019-06-04 | 烟台艾睿光电科技有限公司 | A kind of test board and test macro of infrared focal plane detector |
| CN111307418A (en) * | 2019-12-05 | 2020-06-19 | 中国科学院新疆理化技术研究所 | Low-temperature irradiation test method based on proton displacement effect of infrared detector |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103256976A (en) * | 2013-03-20 | 2013-08-21 | 中国科学院安徽光学精密机械研究所 | Low-temperature absolute radiometer absolute spectral responsivity calibration method and experimental apparatus |
| CN104375073A (en) * | 2014-11-18 | 2015-02-25 | 中国人民解放军63655部队 | Photoelectric response sensitivity calibrating device for optical waveguide detector under different temperatures |
| CN104634447A (en) * | 2014-12-31 | 2015-05-20 | 西南技术物理研究所 | Photoelectric detector service life assessment test system |
| CN104880254A (en) * | 2015-06-12 | 2015-09-02 | 中国电子科技集团公司第十三研究所 | Simulation pulse temperature source for microscopic infrared thermal infrared imager response time parameter test |
| CN107631804A (en) * | 2017-09-28 | 2018-01-26 | 泉州禾逸电子有限公司 | A kind of pyroelectric infrared detector automatic testing equipment and its method of testing |
| CN107631804B (en) * | 2017-09-28 | 2023-09-26 | 泉州禾逸电子有限公司 | Automatic testing device and method for pyroelectric infrared detector |
| CN109323994A (en) * | 2018-11-19 | 2019-02-12 | 中国海洋石油集团有限公司 | A kind of scale method and device |
| CN109323994B (en) * | 2018-11-19 | 2021-01-29 | 中国海洋石油集团有限公司 | Calibration method and device |
| CN109839196A (en) * | 2019-02-22 | 2019-06-04 | 烟台艾睿光电科技有限公司 | A kind of test board and test macro of infrared focal plane detector |
| CN111307418A (en) * | 2019-12-05 | 2020-06-19 | 中国科学院新疆理化技术研究所 | Low-temperature irradiation test method based on proton displacement effect of infrared detector |
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