CN102393468A - Multistage differential pumped ultrahigh vacuum sample transmission mechanism - Google Patents
Multistage differential pumped ultrahigh vacuum sample transmission mechanism Download PDFInfo
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- CN102393468A CN102393468A CN2011102489288A CN201110248928A CN102393468A CN 102393468 A CN102393468 A CN 102393468A CN 2011102489288 A CN2011102489288 A CN 2011102489288A CN 201110248928 A CN201110248928 A CN 201110248928A CN 102393468 A CN102393468 A CN 102393468A
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Abstract
The invention relates to the field of ultrahigh vacuum equipment development, in particular to a multistage differential pumped ultrahigh vacuum sample transmission mechanism, which consists of a differential pumping mechanism and a sample transmission rod driver, wherein the differential pumping mechanism is that a cavity is separated into 2 to 3 spaces by seal rings; each space has independent vacuum acquisition mechanism and detection mechanism; a first-stage differential pumping space is fixedly connected with the sample transmission rod driver; the vacuum acquisition capacities of the differential pumping spaces are improved in turn from the sample transmission rod driver end to the ultrahigh vacuum cavity end; the highest stage of differential pumping space is fixedly connected with the ultrahigh vacuum cavity; and a sample transmission rod of the sample transmission rod driver is inserted in a differential pumping chamber and drives the mechanism to rotate. The multistage differential pumped ultrahigh vacuum sample transmission mechanism realizes high-speed sample transmission between the atmosphere and the ultrahigh vacuum cavity, and greatly improves experiment efficiency and reliability. The invention solves a core technological problem that apparatus in a spacecraft are radiated by spatial cosmic rays, fills up a domestic blank and reaches a world-class level.
Description
Technical field
The present invention relates to ultrahigh vacuum equipment development field.
Background technology
Ultra high vacuum technique is that new material is synthetic, the physicochemical property analysis of material and the basic environment of space development.Between atmosphere and ultra-high vacuum environment, picking and placeing (transmission) sample is a highly difficult technology.In order not destroy ultra-high vacuum environment, generally speaking a Sample Room need be set between atmosphere and ultrahigh vacuum cavity.Isolated between Sample Room and the ultrahigh vacuum chamber through slide valve, and have vacuum alone to obtain and detection system.When Sample Room is in atmospheric pressure state, can opens window and pick and place sample; The back that closes window starts the Sample Room vacuum acquiring system, when reaching balance between the vacuum of Sample Room and the ultrahigh vacuum chamber, opens slide valve therebetween, accomplishes the transmission of sample in ultra-high vacuum environment.The problem points that Sample Room is set is often to carry out atmosphere opening, and each arrive and will spend considerable time, inefficiency during ultrahigh vacuum chamber pressure balance.
Realizing the sample high-speed transfer between atmosphere and the ultra-high vacuum environment, be not only the demand of basic scientific research and semi-conductor industry, also is the high-level efficiency of Aero-Space exploitation, and the key subjects that always solved by expectation, China does not have this technology as yet at present.
Summary of the invention
Purpose in the present invention is to overcome above-mentioned not enough problem; Provide a kind of multistage difference to take out ultrahigh vacuum sample transmission mechanism; Simple in structure; Take out the sample high-speed transfer that realizes between atmosphere and the ultra-high vacuum environment through multistage difference, the pressure of ultra-high vacuum environment can reach 10-8Pa, and sample passes to from atmosphere that required time can be increased to 2 minutes in the ultrahigh vacuum.
The present invention for realizing the technical scheme that above-mentioned purpose adopted is: multistage difference is taken out ultrahigh vacuum sample transmission mechanism; Be made up of difference pump structure and sample transmission rod driver, difference pump structure is to cut off into 2-3 space through O-ring seal in the cavity, and there are independently vacuum acquisition mechanism and testing agency in each space; Between finding time, the one-level difference is fixedly connected with the sample transmission rod driver; From sample transmission rod drive side to ultrahigh vacuum cavity end, the vacuum capacitation between each difference is found time strengthens successively, is fixedly connected with the ultrahigh vacuum cavity between highest difference is found time; The sample transmission rod of sample transmission rod driver is inserted in the difference pumping chamber, by the sample transmission rod drive mechanism.
Said sample transmission rod adopts the hollow and solid sample transmission rod that combines, and has the sample storage slit on the sample transmission rod solid section, the employing hollow-core construction of solid section two ends sample transmission rod.
Vacuum between said one-level difference is found time obtains to obtain through a mechanical pump.
Vacuum between said difference except that the first order is found time obtains through molecular pump and mechanical pump combination.
O-ring seal between said each difference is taken out adopts the U-shaped O-ring seal.
The present invention compares with the existing transmission mechanism that directly transmits sample; Have the unique technique effect: under the prerequisite of keeping system's ultrahigh vacuum, multistage difference is taken out ultrahigh vacuum sample transmission system and can be solved the High-Speed Automatic transmission of sample between atmosphere and the ultrahigh vacuum and realize from atmosphere to the high speed sample transmission the ultrahigh vacuum cavity.This technology has broken through traditional ultrahigh vacuum sample transfer mode, has greatly improved conventional efficient and reliability.The invention solves instrument and equipment in the spaceship and bear the core technology problem of space cosmic radiation research.Filled up domestic blank, achieved world-class level, to the basic scientific research of China, military affairs and Aero-Space exploitation will be played a great role.
Description of drawings:
Fig. 1 is a structural representation of the present invention.
Fig. 2 is a front view of the present invention.
Fig. 3 is a right view of the present invention.
Fig. 4 is the structural representation of difference pump structure of the present invention.
Fig. 5 is a sample transmission rod activation configuration synoptic diagram of the present invention.
Among the figure: 1 difference pump structure; 2 sample transmission rod drivers; 3 one-level difference are taken out; 4 secondary difference are taken out; 5 three grades of difference are taken out; 6 U RunddichtringOs; 7 spacer rings; 8 molecular pumps; 9 testing agencies; 10 short tubes; 11 Double-face flanges; 12 ultrahigh vacuum cavitys; 13 flanged plates; 14 back up pads; 15 screw rods; 16 sample transmission rods; 17 storage slits; 18 bench-type nuts; 19 motors; 20 hollow-core constructions.
Embodiment:
Level Four difference shown in Fig. 1-3 is taken out ultrahigh vacuum sample transmission mechanism; Be made up of difference pump structure 1 and sample transmission rod driver 2, difference pump structure 1 is as shown in Figure 4, is to cut off the U-shaped O-ring seal through U-shaped O-ring seal 6 in the cavity to be supported by spacer ring 7; Form 3 spaces and be respectively that the one-level difference takes out 3, the secondary difference is taken out 4 and three grades of difference and taken out 5; Independently vacuum acquisition mechanism and testing agency 9 are arranged between each difference is found time, be fixedly connected through flange with the sample transmission rod driver between the one-level difference is found time, from sample transmission rod drive side to ultrahigh vacuum cavity 12 ends; Difference pump structure is connected with the ultrahigh vacuum cavity through rotary flange; Vacuum capacitation between each difference is found time strengthens successively, is fixedly connected with the ultrahigh vacuum cavity between highest difference is found time, and the sample transmission rod of sample transmission rod driver is inserted in the difference pumping chamber; Vacuum between wherein the one-level difference is found time obtains to adopt mechanical pump to be installed in the one-level difference and takes out outer wall; Vacuum between the secondary difference is taken out and three grades of difference are found time obtains to adopt molecular pump 8 and mechanical pump aggregate erection to take out outer wall in difference, and molecular pump 8 is installed in difference through Double-face flange 11 and takes out outer wall; Testing agency 9 adopts vacuum meter, and vacuum meter is installed in difference through short tube 10 and takes out outer wall.
Wherein the sample transmission rod driver is as shown in Figure 5, and back up pad 14 is through Bearing Installation screw rod 15, and screw rod is driven by motor 19; Be equipped with bench-type nut 18 on the screw rod, bench-type nut fixed installation flange plate 13, the fixing bottom of sample transmission rod 16 on the flanged plate; Sample transmission rod adopts the hollow and solid sample transmission rod that combines; Have sample storage slit 17 on the sample transmission rod solid section, the employing hollow-core construction 20 of solid section two ends sample transmission rod is by the sample transmission rod drive mechanism.
During work, there are independently vacuum acquisition and testing agency in each space, forms three grades of difference and takes out function, further be connected with the ultrahigh vacuum chamber between third level difference is found time, thereby integrant level Four difference is taken out structure again.Be evacuated between fourth stage difference finds time from the one-level difference, vacuum capacitation separately progressively strengthens.The vacuum that the one-level difference is taken out obtains to realize through a mechanical pump that molecular pump that constantly strengthens through exhaust velocity between difference is thereafter found time and mechanical pump make up to be realized.In difference pump structure, U Mi Quan has not only realized the isolated of different spaces, also make sample transmission rod slip keep under the prerequisite of vacuum smooth.
It is in the sample transmittance process that difference at different levels are taken out the prerequisite that function is achieved, and promptly still can keep the partition space in the difference pump structure can keep independent relatively in the sample transmission rod sliding process.Sample storage slit through on the sample transmission rod realizes, and is as shown in Figure 5, light for sample is transmitted; The two ends of sample transmission rod are hollow (with weight reductions); The two ends, space at slit place are solid, the particular design of sample transmission rod both realized slit difference take out cut off can be taken out effectively in the space vacuum, can realize the vacuum seal of entire system again; The slip of sample transmission rod realizes through the sample transmission rod driver.
Because the structure taken out of level Four difference and the reasonable disposition of vacuum acquiring system, sample transmission rod can continuous motion, in (but looking also shorter time of experimental situation) completion within 2 minutes from atmosphere to the transmission the ultrahigh vacuum cavity.
Claims (5)
1. multistage difference is taken out ultrahigh vacuum sample transmission mechanism; Be made up of difference pump structure and sample transmission rod driver, it is characterized in that: difference pump structure is to cut off into 2-3 space through O-ring seal in the cavity, and there are independently vacuum acquisition mechanism and testing agency in each space; Between finding time, the one-level difference is fixedly connected with the sample transmission rod driver; From sample transmission rod drive side to ultrahigh vacuum cavity end, the vacuum capacitation between each difference is found time strengthens successively, is fixedly connected with the ultrahigh vacuum cavity between highest difference is found time; The sample transmission rod of sample transmission rod driver is inserted in the difference pumping chamber, by the sample transmission rod drive mechanism.
2. multistage difference according to claim 1 is taken out ultrahigh vacuum sample transmission mechanism; It is characterized in that: said sample transmission rod adopts the hollow and solid sample transmission rod that combines; Have the sample storage slit on the sample transmission rod solid section, the employing hollow-core construction of solid section two ends sample transmission rod.
3. multistage difference according to claim 1 is taken out ultrahigh vacuum sample transmission mechanism, it is characterized in that: the vacuum between said one-level difference is found time obtains to obtain through a mechanical pump.
4. multistage difference according to claim 1 is taken out ultrahigh vacuum sample transmission mechanism, it is characterized in that: the vacuum between said difference except that the first order is found time obtains through molecular pump and mechanical pump combination.
5. multistage difference according to claim 1 is taken out ultrahigh vacuum sample transmission mechanism, it is characterized in that: the O-ring seal between said each difference is taken out adopts the U-shaped O-ring seal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011102489288A CN102393468A (en) | 2011-08-28 | 2011-08-28 | Multistage differential pumped ultrahigh vacuum sample transmission mechanism |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011102489288A CN102393468A (en) | 2011-08-28 | 2011-08-28 | Multistage differential pumped ultrahigh vacuum sample transmission mechanism |
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| CN102393468A true CN102393468A (en) | 2012-03-28 |
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| CN2011102489288A Pending CN102393468A (en) | 2011-08-28 | 2011-08-28 | Multistage differential pumped ultrahigh vacuum sample transmission mechanism |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105987923A (en) * | 2015-01-28 | 2016-10-05 | 中国科学院高能物理研究所 | Low-temperature sample operation bench used for soft X-ray magnetic circular dichroism (MCD) |
| CN111876747A (en) * | 2020-08-10 | 2020-11-03 | 北京大学 | Vacuum cavity sampling system |
Citations (4)
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|---|---|---|---|---|
| US5498545A (en) * | 1994-07-21 | 1996-03-12 | Vestal; Marvin L. | Mass spectrometer system and method for matrix-assisted laser desorption measurements |
| CN1610767A (en) * | 2001-10-11 | 2005-04-27 | 莱博尔德真空技术有限责任公司 | Multi-chamber installation for treating objects under vacuum, method for evacuating said installation and evacuation system therefor |
| CN101100763A (en) * | 2007-05-17 | 2008-01-09 | 浙江大学 | Growth device for preparing IV-VI species semiconductor single-crystal thin film |
| CN101846635A (en) * | 2010-05-07 | 2010-09-29 | 中国科学院半导体研究所 | Ultra-high vacuum multifunctional integrated test system |
-
2011
- 2011-08-28 CN CN2011102489288A patent/CN102393468A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5498545A (en) * | 1994-07-21 | 1996-03-12 | Vestal; Marvin L. | Mass spectrometer system and method for matrix-assisted laser desorption measurements |
| CN1610767A (en) * | 2001-10-11 | 2005-04-27 | 莱博尔德真空技术有限责任公司 | Multi-chamber installation for treating objects under vacuum, method for evacuating said installation and evacuation system therefor |
| CN101100763A (en) * | 2007-05-17 | 2008-01-09 | 浙江大学 | Growth device for preparing IV-VI species semiconductor single-crystal thin film |
| CN101846635A (en) * | 2010-05-07 | 2010-09-29 | 中国科学院半导体研究所 | Ultra-high vacuum multifunctional integrated test system |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105987923A (en) * | 2015-01-28 | 2016-10-05 | 中国科学院高能物理研究所 | Low-temperature sample operation bench used for soft X-ray magnetic circular dichroism (MCD) |
| CN105987923B (en) * | 2015-01-28 | 2019-03-08 | 中国科学院高能物理研究所 | Low-temperature sample operating bench tray for grenz ray magnetic circular dichroism (mcd) |
| CN111876747A (en) * | 2020-08-10 | 2020-11-03 | 北京大学 | Vacuum cavity sampling system |
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Application publication date: 20120328 |