CN102520203A - Bionic three-dimensional angular speed sensor based on moth tentacle navigation and preparation method thereof - Google Patents
Bionic three-dimensional angular speed sensor based on moth tentacle navigation and preparation method thereof Download PDFInfo
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- CN102520203A CN102520203A CN201110433661XA CN201110433661A CN102520203A CN 102520203 A CN102520203 A CN 102520203A CN 201110433661X A CN201110433661X A CN 201110433661XA CN 201110433661 A CN201110433661 A CN 201110433661A CN 102520203 A CN102520203 A CN 102520203A
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Abstract
The invention relates to a bionic three-dimensional angular speed sensor, in particular to a bionic three-dimensional angular speed sensor based on moth tentacle navigation and a preparation method of the three-dimensional angular speed sensor. Problems that a micromechanical gyroscope in an existing navigation system only can detect angular speed in a single direction, so that the navigation system is complex in structure, and measurement errors are high are solved. The bionic three-dimensional angular speed sensor based on moth tentacle navigation comprises an N-type (100) double-polished silicon wafer and organic glass, a center square hole is arranged on the organic glass, four grooves are symmetrically arranged at the top of the organic glass, flexible magnets wound with coils are adhered in the grooves, a first square groove is arranged at the bottom of the organic glass, and the N-type (100) double-polished silicon wafer is adhered in the first square groove, and comprises a hollow frame and four foldable beams. A single structure is used for completing detection of three-dimensional angular speed, so that the bionic three-dimensional angular speed sensor is simple in structure, and can be widely applicable to detecting angular speed in the field of bionic MEMS (micro-electromechanical system) sensors.
Description
Technical field
The present invention relates to the bionic three-dimensional angular-rate sensor, specifically is a kind of bionic three-dimensional angular-rate sensor based on moth feeler navigation and preparation method thereof.
Background technology
Bionics is to connect bridge biological and technology, and the mankind achieve great success about bionic invention and innovative technology in recent years; People have invented daylight lamp through the luminescence mechanism research to firefly; Through the secret of electric fish discharge is probed into, invented voltaic element the earliest; Through giraffine dermal composition is probed into, developed flying suit---" antigravity suit "; But the research about bionical airmanship is few.The core devices micro-mechanical gyroscope of navigational system can only detect the angular velocity information on the single direction at present; And for the measurement of three dimensions attitude; Common way is to utilize to be installed in three micro-mechanical gyroscopes on the mutual vertical direction and to unite attitude algorithm, and navigational system complex structure, volume and quality are big, manufacturing process is difficult and the big problem of combination back measuring error thereby cause.
Summary of the invention
The present invention causes navigational system complex structure, problem that measuring error is big in order to solve in the existing navigational system angular velocity that can only detect single direction because of micro-mechanical gyroscope, and a kind of bionic three-dimensional angular velocity detection sensor based on the navigation of moth feeler is provided.
The present invention adopts following technical scheme to realize: the bionic three-dimensional angular-rate sensor based on the navigation of moth feeler comprises two throwing silicon chips of N type [100] and organic glass; Have the center square hole on the organic glass, the top symmetry of organic glass has four one ends and communicates with the center square hole and the groove vertical with the limit, hole, is bonded with the soft magnetic bodies that is wound with coil in the groove; The bottom of organic glass has the first identical square groove of Center-to-Center square hole, has second square groove in first square groove; The two throwing silicon chips of N type [100] are bonded in first square groove; The two throwing silicon chips of N type [100] comprise hollow framework and four folded beams, an end of all folded beams be symmetrically fixed on the limit of hollow framework and the other end be fixed on together hollow framework in be formed centrally the center and prop up dish; The center is propped up and is fixed with the permalloy rod that passes second square groove, organic glass center square hole on the dish, and the permalloy rod is by barred body and diameter are formed greater than the last barred body of following barred body diameter down; Be fixed with four pads that are positioned at four folded beam opposite sides on the hollow framework; The stress sensitive place of folded beam is fixed with two and all links to each other with adjacent pad through aluminum lead and resistance is the P type pressure drag bar of 2-3k Ω, the P type pressure drag bar of the folded beam that the position the is relative formation Wheatstone bridge that is cascaded in twos.
The preparation method of above-mentioned bionic three-dimensional angular-rate sensor based on moth feeler navigation comprises the steps:
(1), make the two throwing silicon chips of N type [100]:
Step 1: getting thickness is the two throwing substrates of N type [100] of 300-350um; On the two throwing substrates of N type [100], form the pressure drag graph area, at the pressure drag graph area P type pressure drag bar that to inject the P ion P type pressure drag bar (10) that to form around four resistances on the horizontal direction of the two throwing substrate center of N type [100] symmetric offset spread be 2-3k Ω and four resistances on the vertical direction be 2-3k Ω through photoetching process;
Step 2: on the two throwing substrates of N type [100], utilize photoetching technique to form the fairlead that is positioned at P type pressure drag bar two ends; On the two throwing substrates of N type [100], utilize photoetching process to form the graph area of lead-in wire and pad, the lead-in wire and the graph area sputter thickness of pad be the aluminium film formation of 3000 dusts two pads being positioned at four P type pressure drag bar both sides on the horizontal direction be positioned at vertical direction on four P type pressure drag bar both sides two pads, be connected the aluminum lead of both sides, the center P type pressure drag bar formation Wheatstone bridge on fairlead and the aluminum lead of adjacent pad and connect in twos horizontal direction and the vertical direction;
Step 3: on the two throwing substrates of N type [100], get rid of the SU-8 glue that a layer thickness is 1-1.1mm, utilize photoetching process to form center pit, in center pit, form the excellent following barred body of permalloy through little electroforming process; On the two throwing substrates of N type [100], get rid of the SU-8 glue that a layer thickness is 1.1-1.2mm again, utilize photoetching process to form center pit, in center pit through little electroforming process form the permalloy rod on barred body;
Step 4: utilize the back side of photoetching technique, the two throwing substrates of ICP lithographic technique etching N type [100] and penetrate, form by hollow framework, center and prop up dish and four symmetry centers of being connected in are propped up between dish and the hollow framework and the stress sensitive place is made up of the folded beam of two P type pressure drag bars two throwing silicon chips of N type [100];
(2), get organic glass, communicate with the center square hole and four grooves vertical with a processing technology machining center square hole and an end at the top of organic glass with the limit, hole; Behind first square groove identical with the center square hole of the back side of organic glass, in first square groove, process second square groove again with the processing technology machining center;
(3), be bonded in respectively in four grooves of organic glass after being wrapped in coil (4) on four soft magnetic bodies respectively; The two throwing silicon chips of N type [100] are bonded in first square groove and make the last barred body of permalloy rod pass the center square hole; Promptly obtain bionic three-dimensional angular-rate sensor based on the navigation of moth feeler.
Thereby the perm alloy bar adopts upper coarse and lower fine structure that barycenter is concentrated on the permalloy rod among the present invention top has increased coriolis force, and (quality and speed that the size of coriolis force and permalloy are excellent are relevant) improved measurement sensitivity then; In first square groove of organic glass bottom, have second square groove, when preventing the folded beam vibration and the lower surface of organic glass bump; Adopt simultaneously folded beam can make the permalloy rod have degree of freedom on the three-dimensional on N type (100) silicon chip at the effect lower swing of electromagnetic actuation force.
Feeler is as the important receptor of moth; Not only to external world smell and air velocity is very responsive, and can experience the variation of self attitude, and Johnston ' the s organ of feeler pedicel is a small-sized mechanical pick-up device; It can experience body posture in three-dimensional subtle change; And the information of experiencing passed to brain, through brain control wing modulation attitude, keep stable state of flight.The structure of three dimensional angular speed pickup according to the invention is refined from moth feeler model; The feeler of moth is being swung with what the vibration frequency
of wing was not stopped up and down; When the moth body posture changes; (object has relative motion simultaneously and promptly moves or rotate and involve when rotating will to produce coriolis force at the feeler root; To produce a coriolis acceleration; It is Corioli's acceleration; It is coriolis force that moving object produces the corresponding inertial force of Corioli's acceleration), the neurocyte of root will be experienced the De Geshi force information and pass to brain and carry out resolving of attitude; Biomimetic features through the simulation of this living model having been invented two-dimentional driving comes the feeler of contraposition moth; Thereby coil connectors in the relative groove all linked to each other with the drive circuit module that produces square-wave signal produce magnetic field formation Electromagnetic Drive structure; Magnetic field makes the permalloy rod along x, the swing of y axle, can not be similar to the moth feeler of failure of oscillation; Swing in the permalloy rod two-dimensional space will cause the vibration of this structure on the z direction of principal axis; Because of applied the square wave driving signal of frequency for
can so that this structure along x, y direction of principal axis with different along the vibration frequency on the z direction of principal axis, promptly along the main vibration frequency on x, the y direction of principal axis for
axial vibration frequency of z but be 2
(as shown in Figure 4).Through analysis of the model of the antennae, the yaw angular velocity caused by the Coriolis force is modulated in the x, y-axis direction
frequency signals inside; while the roll angular velocity, pitch angular velocity caused by the Coriolis force is modulated in the x, y axis direction, but the z-axis vibration velocity mainly concentrated in 2
Office makes the roll angular velocity, pitch angular velocity caused by the Coriolis force is modulated in 2
frequency signal within; therefore by right frequency signal
, 2
Extraction to get each brother Coriolis force information.As shown in Figure 3; P type pressure drag bar R1, R2, R5, R6 and P type pressure drag bar R3, R4, R7, R8 form two Wheatstone bridges; Relative pad (being two output terminals of Wheatstone bridge) is all linked to each other with signal processing module through lead-in wire; Just can calculate the size and Orientation of angular velocity signal on the three-dimensional, confirm the attitude information of this model, and then carry out effective attitude control and realize navigation.Below be the detection of yaw rate, roll angle speed and rate of pitch:
1, the detection of yaw rate
Under the effect of Electromagnetic Drive structure; The permalloy rod with
frequency vibration along x, y direction of principal axis; At this moment; Folded beam is along x, y direction of principal axis generation deformation, and the driving force signal is as shown in Figure 5; When sensor being fixed on the Z axle rotation of carrier (like aircraft) upper edge; Can know according to the coriolis force effect principle; Can produce coriolis force at y, x direction of principal axis, the coriolis force signal is as shown in Figure 5, and coriolis force causes that the folded beam of permalloy rod root is along x, the deformation of y direction generation secondary; Cause the resistance of P type pressure drag bar on the folded beam to change like this; Further make the Wheatstone bridge output voltage signal change, can know, the phasic difference mutually 90
of drive signal and coriolis force signal through theoretical analysis and signal superposition principle; Amplitude is two signal coupling amplitudes; Changing value to recording with signal processing module carries out phase demodulating and computational analysis, can resolve the amplitude and the phase place of coriolis force signal, and then draws the size and Orientation of yaw rate.
2, the detection of roll angle speed, rate of pitch
Under the effect of Electromagnetic Drive structure; Utilize square wave driving signal can control alloy column body structure vibration frequency on the z direction be 2
; Therefore the deformation of folded beam is also along the Z direction, and this moment, the driving force signal was as shown in Figure 6.When sensor being fixed on the X axle rotation of carrier (like aircraft) upper edge; The Y direction will produce coriolis force and cause y direction corresponding deformation, this moment the coriolis force that produced just be modulated at 2
in the frequency signal; In like manner; When carrier rotates along the y axle; The x direction will produce coriolis force and cause x direction corresponding deformation; This moment the coriolis force that produced also be modulated at 2
in the frequency signal, two coriolis force signals are as shown in Figure 6, these deformation cause that finally P type pressure drag bar resistance changes; And then cause that the Wheatstone bridge output voltage signal changes; The realizable force electric coupling to recording the De Geshi force signal with signal processing module and the driving force signal carries out phase demodulating and computational analysis, and then calculates roll angle speed and rate of pitch respectively.
The detection that the present invention adopts single structure to accomplish three dimensional angular speed makes sensor construction simple, and success biologic-organ is converted into the practical applications structure, realized the combination of bionics and micromachining technology; Only need to detect simultaneously just to have calculated the angular velocity information on the three-dimensional, greatly reduced measuring error along the STRESS VARIATION on x, the y direction; Solved in the existing navigational system angular velocity that can only detect single direction and caused navigational system complex structure, problem that measuring error is big because of micro-mechanical gyroscope, can be adaptable across the angular velocity detection of bionical MEMS sensor field.
Description of drawings
Fig. 1 is a stereographic map of the present invention.
Fig. 2 is the front elevation of Fig. 1.
Fig. 3 is the structural representation of N type [100] silicon chip.
Fig. 4-a is the movement profiles of permalloy rod of the present invention under
frequency; Fig. 4-b be permalloy rod of the present invention 2
movement profiles under the frequency.
Fig. 5 is the movement profiles of the present invention's permalloy rod when detecting yaw rate.
Fig. 6 is the movement profiles of the present invention's permalloy rod when detecting roll angle speed or rate of pitch.
Among the figure: the 1-organic glass; The 2-pad; The 3-groove; The 4-coil; The 5-soft magnetic bodies; 6-second square groove; Barred body under the 7-; The last barred body of 8-; The 9-folded beam; 10-P type pressure drag bar; The hollow framework of 11-.
Embodiment
Bionic three-dimensional angular-rate sensor based on the navigation of moth feeler comprises two throwing silicon chips of N type [100] and organic glass 1; Have the center square hole on the organic glass 1, the top symmetry of organic glass 1 has that four one ends communicate with the center square hole and the groove 3 vertical with the limit, hole, is bonded with the soft magnetic bodies 5 that is wound with coil 4 in the groove 3; The bottom of organic glass 1 has the first identical square groove of Center-to-Center square hole, has second square groove 6 in first square groove; The two throwing silicon chips of N type [100] are bonded in first square groove; The two throwing silicon chips of N type [100] comprise hollow framework 11 and four folded beams 9, an end of all folded beams 9 be symmetrically fixed on the limit of hollow framework 11 and the other end be fixed on together hollow framework 11 in be formed centrally the center and prop up dish; The center is propped up and is fixed with the permalloy rod that passes second square groove 6, organic glass 1 center square hole on the dish, and the permalloy rod is made up of greater than the last barred body 8 of barred body 7 diameters down barred body 7 down and diameter; Be fixed with four pads 2 that are positioned at four folded beam 9 opposite sides on the hollow framework 11; The stress sensitive place of folded beam 9 is fixed with two and all links to each other with adjacent pad 2 through aluminum lead and resistance is the P type pressure drag bar 10 of 2-3k Ω, the P type pressure drag bar 10 of the folded beam 9 that the position the is relative formation Wheatstone bridge that is cascaded in twos.
The preparation method of above-mentioned bionic three-dimensional angular-rate sensor based on moth feeler navigation comprises the steps:
(1), make the two throwing silicon chips of N type [100]:
Step 1: getting thickness is the two throwing substrates of N type [100] of 300-350um; On the two throwing substrates of N type [100], form the pressure drag graph area, at the pressure drag graph area P type pressure drag bar 10 that to inject the P ion P type pressure drag bar (10) that to form around four resistances on the horizontal direction of the two throwing substrate center of N type [100] symmetric offset spread be 2-3k Ω and four resistances on the vertical direction be 2-3k Ω through photoetching process;
Step 2: on the two throwing substrates of N type [100], utilize photoetching technique to form the fairlead that is positioned at P type pressure drag bar 10 two ends; On the two throwing substrates of N type [100], form the graph area of lead-in wire and pad through photoetching process, the lead-in wire and the graph area sputter thickness of pad be the aluminium film formation of 3000 dusts two pads 2 being positioned at four P type pressure drag bar 10 both sides on the horizontal direction be positioned at vertical direction on four P type pressure drag bar 10 both sides two pads 2, be connected the aluminum lead of both sides, the center P type pressure drag bar 10 formation Wheatstone bridges on fairlead and the aluminum lead of adjacent pad 2 and connect in twos horizontal direction and the vertical direction;
Step 3: on the two throwing substrates of N type [100], get rid of the SU-8 glue that a layer thickness is 1-1.1mm, utilize photoetching process to form center pit, in center pit, form the excellent following barred body 7 of permalloy through little electroforming process; On the two throwing substrates of N type [100], get rid of the SU-8 glue that a layer thickness is 1.1-1.2mm again, utilize photoetching process to form center pit, in center pit through little electroforming process form the permalloy rod on barred body 8;
Step 4: utilize the back side of photoetching technique, the two throwing substrates of ICP lithographic technique etching N type [100] and penetrate, form by hollow framework 11, center and prop up dish and four symmetry centers of being connected in are propped up between dish and the hollow framework 11 and the stress sensitive place is made up of the folded beam 9 of two P type pressure drag bars 10 two throwing silicon chips of N type [100];
(2), get organic glass 1, communicate with the center square hole and four grooves 3 vertical with a processing technology machining center square hole and an end at the top of organic glass 1 with the limit, hole; Behind first square groove identical with the center square hole of the back side of organic glass 1, in first square groove, process second square groove 6 again with the processing technology machining center;
(3), be bonded in respectively in four grooves 3 of organic glass 1 after being wrapped in coil 4 on four soft magnetic bodies 5 respectively; The two throwing silicon chips of N type [100] are bonded in first square groove and make the last barred body 8 of permalloy rod pass the center square hole; Promptly obtain bionic three-dimensional angular-rate sensor based on the navigation of moth feeler.
Claims (2)
1. based on the bionic three-dimensional angular-rate sensor of moth feeler navigation, it is characterized in that: comprise two throwing silicon chips of N type [100] and organic glass (1); Organic glass has the center square hole on (1), and the top symmetry of organic glass (1) has that four one ends communicate with the center square hole and the groove (3) vertical with the limit, hole, is bonded with the soft magnetic bodies (5) that is wound with coil (4) in the groove (3); The bottom of organic glass (1) has the first identical square groove of Center-to-Center square hole, has second square groove (6) in first square groove; The two throwing silicon chips of N type [100] are bonded in first square groove; The two throwing silicon chips of N type [100] comprise hollow framework (11) and four folded beams (9), an end of all folded beams (9) be symmetrically fixed on the limit of hollow framework (11) and the other end be fixed on together hollow framework (11) in be formed centrally the center and prop up dish; The center is propped up and is fixed with the permalloy rod that passes second square groove (6), organic glass (1) center square hole on the dish, and the permalloy rod is by barred body (7) and diameter are formed greater than the last barred body (8) of following barred body (7) diameter down; Be fixed with four pads (2) that are positioned at four folded beams (9) opposite side on the hollow framework (11); The stress sensitive place of folded beam (9) is fixed with two and all links to each other with adjacent pad (2) through aluminum lead and resistance is the P type pressure drag bar (10) of 2-3k Ω, the P type pressure drag bar (10) of the folded beam (9) that the position the is relative formation Wheatstone bridge that is cascaded in twos.
2. the preparation method of the bionic three-dimensional angular-rate sensor based on moth feeler navigation as claimed in claim 1 is characterized in that: comprise the steps:
(1), make the two throwing silicon chips of N type [100]:
Step 1: getting thickness is the two throwing substrates of N type [100] of 300-350um; On the two throwing substrates of N type [100], form the pressure drag graph area, at the pressure drag graph area P type pressure drag bar (10) that to inject the P ion P type pressure drag bar (10) that to form around four resistances on the horizontal direction of the two throwing substrate center of N type [100] symmetric offset spread be 2-3k Ω and four resistances on the vertical direction be 2-3k Ω through photoetching process;
Step 2: on the two throwing substrates of N type [100], utilize photoetching process to form the fairlead that is positioned at P type pressure drag bar (10) two ends; On the two throwing substrates of N type [100], pass through the graph area that photoetching process forms lead-in wire and pad; Is the aluminium film of 3000 dusts at lead-in wire with the graph area sputter thickness of pad, the aluminum lead of two pads (2), the aluminum lead that is connected fairlead and adjacent pad (2) and the formation of both sides, the center P type pressure drag bars (10) on connect in twos horizontal direction and the vertical direction Wheatstone bridge of four P type pressure drag bars (10) both sides on forming two pads (2) of being positioned at four P type pressure drag bars (10) both sides on the horizontal direction and being positioned at vertical direction;
Step 3: on the two throwing substrates of N type [100], get rid of the SU-8 glue that a layer thickness is 1-1.1mm, utilize photoetching process to form center pit, in center pit, form the excellent following barred body (7) of permalloy through little electroforming process; On the two throwing substrates of N type [100], get rid of the SU-8 glue that a layer thickness is 1.1-1.2mm again, utilize photoetching process to form center pit, in center pit through little electroforming process form the permalloy rod on barred body (8);
Step 4: utilize the back side of photoetching technique, the two throwing substrates of ICP lithographic technique etching N type [100] and penetrate, form by hollow framework (11), center and prop up dish and four symmetry centers of being connected in are propped up between dish and the hollow framework (11) and the stress sensitive place has the folded beam (9) of two P type pressure drag bars (10) to form two throwing silicon chips of N type [100];
(2), get organic glass (1), communicate with the center square hole and four grooves (3) vertical with a processing technology machining center square hole and an end at the top of organic glass (1) with the limit, hole; Behind first square groove identical with the center square hole of the back side of organic glass (1), in first square groove, process second square groove (6) again with the processing technology machining center;
(3), be bonded in respectively in four grooves (3) of organic glass (1) after being wrapped in coil (4) on four soft magnetic bodies (5) respectively; The two throwing silicon chips of N type [100] are bonded in first square groove and make the last barred body (8) of permalloy rod pass the center square hole; Promptly obtain bionic three-dimensional angular-rate sensor based on the navigation of moth feeler.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106289210A (en) * | 2015-05-15 | 2017-01-04 | 东南大学 | A kind of bionical hair formula silicon micro-gyroscope sensitive for angular velocity |
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| JPH1048305A (en) * | 1996-08-07 | 1998-02-20 | Yuseisho Tsushin Sogo Kenkyusho | Tracking apparatus for communication satellite for mobile body communication |
| JP2009075115A (en) * | 1998-01-23 | 2009-04-09 | Autoliv Development Ab | Constitution for measuring angular velocity |
| US7832110B1 (en) * | 2010-04-02 | 2010-11-16 | Hong-Wen Cheng | Quasi-uniaxial solar trajectory tracking transit system |
-
2011
- 2011-12-22 CN CN 201110433661 patent/CN102520203B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1048305A (en) * | 1996-08-07 | 1998-02-20 | Yuseisho Tsushin Sogo Kenkyusho | Tracking apparatus for communication satellite for mobile body communication |
| JP2009075115A (en) * | 1998-01-23 | 2009-04-09 | Autoliv Development Ab | Constitution for measuring angular velocity |
| US7832110B1 (en) * | 2010-04-02 | 2010-11-16 | Hong-Wen Cheng | Quasi-uniaxial solar trajectory tracking transit system |
Non-Patent Citations (3)
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| R. MCNEILL ALEXANDER: "Antennae as Gyroscopes", 《SCIENCE》, vol. 315, 9 February 2007 (2007-02-09), pages 771 - 772 * |
| SANJAY P. SANE ET AL.: "Antennal Mechanosensors Mediate Flight Control in Moths", 《SCIENCE》, vol. 315, 9 February 2007 (2007-02-09), pages 863 - 866 * |
| SANJAY P. SANE ET AL.: "Antennal regulation of migratory flight in the neotropical moth Urania fulgens", 《BIOLOGY LETTERS》, 24 February 2010 (2010-02-24), pages 406 - 409 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106289210A (en) * | 2015-05-15 | 2017-01-04 | 东南大学 | A kind of bionical hair formula silicon micro-gyroscope sensitive for angular velocity |
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Inventor after: Liu Jun Inventor after: Guo Hao Inventor after: Wen Huanfei Inventor after: Tang Jun Inventor after: Cui Yongjun Inventor after: Shi Yunbo Inventor after: Li Jie Inventor after: Zhang Xiaoming Inventor after: Cao Weida Inventor after: Liu Yao Inventor after: Ding Yukai Inventor before: Liu Jun Inventor before: Tang Jun Inventor before: Shi Yunbo Inventor before: Li Jie Inventor before: Zhang Xiaoming Inventor before: Liu Yao Inventor before: Guo Hao Inventor before: Wen Huanfei |
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