CN102692822B - Multi-wavelength based aligning system and aligning method - Google Patents
Multi-wavelength based aligning system and aligning method Download PDFInfo
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- CN102692822B CN102692822B CN201110074451.6A CN201110074451A CN102692822B CN 102692822 B CN102692822 B CN 102692822B CN 201110074451 A CN201110074451 A CN 201110074451A CN 102692822 B CN102692822 B CN 102692822B
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Abstract
The invention discloses a multi-wavelength based aligning system which is compatible with various aligning marks. The aligning system comprises: an aligning radiation source providing at least two wavelengths, an optical unit, an aligning mark, a detection unit and a processing unit; the processing unit obtains all order signals of the mark under irradiation of different radiation sources; after a crude capture and an accurate capture ranges are set, all the order signals are subject to weight setting of aligning orders; and order weights participating aligning position calculation are calculated. An aligning position is calculated according to the weight setting, color selection setting, and the set crude capture and an accurate capture ranges.
Description
Technical field
The present invention relates to a kind of integrated circuit equipment manufacture field, relate in particular to a kind of alignment methods based on two light source multi-period marks and alignment system that is applicable to lithographic equipment.
Background technology
Lithographic equipment is the major equipment of manufacturing integration circuit, and its effect is to make different mask patterns be imaged onto successively the position of the accurate aligning in substrate (as semi-conductor silicon chip or LCD plate).But this aligned position but changes because of the physical and chemical changes that experiences of row graph, therefore need an alignment system, can both be aimed at accurately with the aligned position that ensures the corresponding mask of silicon chip at every turn.Along with the growth of number of electronic components on substrate per unit surface area and the size of electronic component are synthesized more and more less, accuracy requirement to integrated circuit improves day by day, therefore mask is imaged on suprabasil position and must fixes more and more accurately successively, and during to photoetching, the requirement of alignment precision is also more and more higher.
United States Patent (USP) discloses a kind of alignment system No. 5243195 and has wherein mentioned alignment so on a kind of axle, the advantage of this alignment so is that mask and substrate can directly be aligned, but its shortcoming is to be difficult to be improved to higher preci-sion and accuracy, and various processing steps can cause that alignment mark changes, thereby introduce the variation of the groove significant depth of asymmetry and substrate grating marker.This phenomenon causes technique to can't detect grating marker, or only provides faint signal in other cases, and alignment system stability reduces.
In order to address this problem, Chinese patent application discloses a kind of dual wavelength alignment system No. 03164858, comprises the aligning radiation source with the first wavelength and second wave length; Have the detection system of first wave long-channel and second wave length passage, first wave long-channel receives the aligning radiation of alignment mark first wave strong point, and second wave length passage receives the aligning radiation of alignment mark Second Wave strong point; And a positioning unit, in order to determine the position of alignment mark with respect to the relative intensity of the aligning radiation detecting in Second Wave strong point according to the aligning radiation detecting in first wave strong point.From said system, can find out, this system be in fact used two independently wavelength irradiate and detect the position of suprabasil alignment mark, thereby can select dynamically to aim at laser, to obtain better alignment result.But, in existing dual-wavelength laser measuring system, after once Pointing strategy is set and is fixed, in strategy execution process, once there is the situation that certain one-level time does not meet the demands, cannot modify, thereby cause aiming at unsuccessfully, and then have influence on the whole efficiency of alignment system, cause the sheet rate of refusing of etching system to improve.
Summary of the invention
For overcoming the defect existing in prior art, the invention provides a kind of alignment methods and alignment system based on two light source multi-period marks, this alignment methods and alignment system can be used in various alignment mark.
For achieving the above object, the invention provides a kind of alignment system based on multi-wavelength, comprise: the aligning radiation source that at least two wavelength are provided, optical unit, alignment mark, probe unit and processing unit, this processing unit obtains this and is marked at the whole level time signals under different radiation source irradiates, set slightly catch and smart capture range after to this all level time signals carry out the weight setting of alignment stage time, and calculate and participate in the level time weight that aligned position calculates; Select slightly catching and smart capture range of setting and setting according to weight setting, color, calculate aligned position.
Further, this alignment mark comprises binary cycle mark or three cycle marks.This aligning radiation source comprises red laser light source and green laser light source.
Further, this thick capture range refers to that the aligned position in a big way need to use the one-level light source information of two different cycles sizes of same mark to aim at.This essence capture range refers to use the arbitrary number of level secondary reflection light source information of the same period of same mark to aim in more among a small circle.
Further, this weight is set to static weight setting.This static weight setting comprises grade inferior and certain signal strength threshold scope that need to select that arranges, and at different levels times are set and calculate weight, check whether the actual signal intensity of at different levels times meets the requirement of setting threshold, as confirmation up to standard is passed through, this level time weight is effective; If number up to standard is less than the number of selecting setting, enter two kinds of mechanism of fault-tolerant and non-fault-tolerant.This enters after fault-tolerant mechanism and further comprises and judge whether to belong to thick capture range or smart capture range.Under this thick capture range, check whether by the level time number of checking be zero, as be zero, stop fault-tolerant processing; It is time only no available that the one-level of required different cycles is caught in inspection, as unavailable, stops fault-tolerant processing; Meet after above-mentioned condition, abandon previous selection but by the level time of checking; Check time weight setting of residue level, recalculate weight proportion at different levels times.Processing under this thick capture range further comprises: as the senior inferior of each cycle acquisition do not possess weighted value, the one-level light weight in each cycle is set to 1, calculates aligned position.Under this essence capture range, check whether by the level time number of checking be zero, as be zero, stop fault-tolerant processing; Meet after above-mentioned condition, abandon previous selection but by the level time of checking; Check time weight setting of residue level, recalculate weight proportion at different levels times.Processing under this essence capture range further comprises: as the senior inferior of each cycle acquisition do not possess weighted value, the one-level light weight in each cycle is set to 1, calculates aligned position.This enters after non-fault-tolerant mechanism, stops this time aiming at as a level time signal intensity for selected participation aligning does not all confirm the validity, and declaration is aimed at unsuccessfully.
The present invention discloses a kind of alignment methods based on multi-wavelength simultaneously, comprise and obtain the whole level time signals of alignment mark under different radiation source irradiates, set slightly catch and smart capture range after to this all level time signals carry out the weight setting of alignment stage time, and calculate and participate in the level time weight that aligned position calculates; Select slightly catching and smart capture range of setting and setting according to weight setting, color, calculate aligned position.
Further, this alignment mark comprises binary cycle mark or three cycle marks.This aligning radiation source comprises red laser light source and green laser light source.
Further, this thick capture range refers to must need to use the one-level light source information of two different cycles sizes of same mark to aim at by aligned position in a big way.This essence capture range refers to use the arbitrary number of level secondary reflection light source information of the same period of same mark to aim in more among a small circle.
Further, this weight is set to static weight setting.
Further, this static weight setting comprises grade inferior and certain signal strength threshold scope that need to select that arranges, and at different levels setting calculating weights, checks whether inferior actual signal intensity at different levels meets the requirement of setting threshold, as confirmation up to standard is passed through, this level time weight is effective; If number up to standard is less than the number of selecting setting, enter two kinds of mechanism of fault-tolerant and non-fault-tolerant.
Further, this enters after fault-tolerant mechanism and further comprises and judge whether to belong to thick capture range or smart capture range.Under this thick capture range, check whether by the level time number of checking be zero, as be zero, stop fault-tolerant processing; It is time only no available that the one-level of required different cycles is caught in inspection, as unavailable, stops fault-tolerant processing; Meet after above-mentioned condition, abandon previous selection but by the level time of checking; Time weight setting of inspection residue level, recalculates at different levels the steps under this thick capture range of weight proportion and further comprises: as the senior inferior of each cycle acquisition do not possess weighted value, the one-level light weight in each cycle is set to 1, calculates aligned position.Under this essence capture range, check whether by the level time number of checking be zero, as be zero, stop fault-tolerant processing; Meet after above-mentioned condition, abandon previous selection but by the level time of checking; Check time weight setting of residue level, recalculate weight proportion at different levels times.Step under this essence capture range further comprises: as the senior inferior of each cycle acquisition do not possess weighted value, the one-level light weight in each cycle is set to 1, calculates aligned position.This enters after non-fault-tolerant mechanism, stops this time aiming at as a level time signal intensity for selected participation aligning does not all confirm the validity, and declaration is aimed at unsuccessfully.
Compared with prior art, this alignment system and alignment methods thereof not only can provide multiple aligning Selective type, strengthen Technological adaptability, obtain more accurate aligned position, and in the situation that manufacturability is poor, apply by fault-tolerant, improve the aligning percent of pass of mark, and then ensure the aligning efficiency of alignment system.
Brief description of the drawings
Can be by following detailed Description Of The Invention and appended graphic being further understood about the advantages and spirit of the present invention.
Figure 1 shows that the schematic diagram of the dual light sources and multilevel alignment system of known technology;
Figure 2 shows that the structural representation of kind alignment mark involved in the present invention;
Figure 3 shows that the waveform schematic diagram that alignment mark involved in the present invention gathers;
Figure 4 shows that the process flow diagram of alignment methods involved in the present invention.
Embodiment
Describe specific embodiments of the invention in detail below in conjunction with accompanying drawing.
Figure 1 shows that the schematic diagram of the dual light sources and multilevel alignment system of known technology.As shown in Figure 1, dual light sources and multilevel alignment system comprise light source module 11,12, with reference to grating 2, optical fiber 13,23, prism 14,24, polariscope 3, object lens 4, mark 5, level time wedge 15,25, catoptron 16,26, object lens 17,27, as plane 18,28 and detector 19,29.The specific works principle of dual light sources and multilevel alignment system is common practise for the person of ordinary skill of the art, does not repeat them here.
Figure 2 shows that the structural representation of kind alignment mark involved in the present invention.Wherein a figure is three cycle alignment marks, and the cycle of this alignment mark is L > M > S.B figure is binary cycle alignment mark, and the cycle of this alignment mark is L > M.The specific works principle of above-mentioned two kinds of alignment marks is common practise for the person of ordinary skill of the art, does not repeat them here.
Figure 3 shows that the waveform schematic diagram that alignment mark involved in the present invention gathers, wherein a figure is the waveform schematic diagram that three cycle alignment marks obtain after green wavelength is irradiated, and b figure is the waveform schematic diagram that binary cycle alignment mark obtains after green wavelength is irradiated.
Adopt in the present invention red and green double-wavelength light illumination to select mark pattern as shown in Figure 2, through the alignment system detecting structure of Fig. 1, can obtain waveform P as shown in Figure 3
greenL-1, P
greenM-1, P
greenM-2, P
greenM-3, P
greenM-4, P
greenM-5, P
greenM-6, P
greenM-7, P
greenS-1; P
redL-1, P
redM-1, P
redM-2, P
redM-3, P
redM-4, P
redM-5, P
redM 6, P
redM-7, P
redS-1, wherein: P represents the aligned position of at different levels light signals; Green/red represents light source colour; The grating cycle of large-size in L expressive notation, middle-sized grating cycle in M expressive notation, the grating cycle of reduced size in S expressive notation; Arabic numeral represent that the corresponding cycle is by the inferior information of level of the obtainable light signal of alignment system institute.Owing to only showing the waveform schematic diagram obtaining, therefore P in Fig. 3 after green wavelength is irradiated
greenL-1corresponding to the P in Fig. 3
l-1, the like.
The corresponding signal intensity measuring at different levels times is S with it
survey greenL-1, S
survey greenM-1, S
survey greenM-2, S
survey greenM-3, S
survey greenM-4, S
survey greenM-5, S
survey greenM-6, S
survey greenM-7, S
survey greenS-1; S
survey redL-1, S
survey redM-1, S
survey redM-2, S
survey redM-3, S
survey redM-4, S
survey redM-5, S
survey redM-6, S
survey redM-7, S
survey redS-1, wherein: S
surveyrepresent waveform signal intensity at different levels times; Green/red represents light source colour; The grating cycle of large-size in L expressive notation, middle-sized grating cycle in M expressive notation, the grating cycle of reduced size in S expressive notation; Arabic numeral represent that the corresponding cycle is by the inferior information of level of the obtainable light signal of alignment system institute.
To introduce the present invention to the mode of combination with multiple embodiment below:
embodiment mono-:
Alignment system selects the form of slightly catching to obtain aligned position (adopting the level time of two different cycles to aim at calculating) in aligned position computation process in Pointing strategy in the present embodiment, allow use to some extent level time not by the situation that use fault-tolerant treatment mechanism, in static weight setting up procedure, select L-1, M-1, M-3, M-5, M-7 to participate in the calculating of aligned position, the signal intensity that its selected level time arranges is S
if greenL-1, S
if greenM-1, S
if greenM-3, S
if greenM-5, S
if greenM-7, S
if redL-1, S
if redM-1, S
if redM-3, S
if redM-5, S
if redM-7it is W that the aligned position that corresponding selected level time arranges calculates weight
if greenL-1, W
if greenM-1, W
if greenM-3, W
if greenM-5, W
if greenM-7, W
if redL-1, W
if redM-1, W
if redM-3, W
if redM-5, W
if redM-7at different levels the signals that (Weight represents that aligned position calculates weight) obtains the signal intensity of at different levels times that participates under the light sources with different wavelengths radiation situation of setting aiming at participation with actual test is aimed at contrast known S
if greenL-1< S
survey greenL-1, S
if greenM-1< S
survey greenM-1, S
if greenM-3< S
survey greenM-3, S
if greenM-5< S
survey greenM-5, S
if greenM-7> S
survey greenM-7, S
if redL-1< S
survey redL-1, S
if redM-1< S
survey redM-1, S
if redM-3< S
survey redM-3, S
if redM-5> S
survey redM-5, S
if redM-7> S
survey redM-7.Can recognize that through contrast in mark, seven of the size cycle grades of actual signal intensities that record of light do not reach the strength range of setting in the situation that using green light source to irradiate; Use in the situation that red light source irradiates, in mark, the Pyatyi light in size cycle and seven grades of actual signal intensities that record of light do not reach the strength range of setting.
Set in the present embodiment and use fault-tolerant processing, because fault-tolerant treatment mechanism is to process respectively at different levels signals of the light source of different wave length, be example so sentence green glow, whether the number that first checks the level time light of the participation alignment applications that meets setting signal requirement of strength is zero, after testing, non-vanishing; Secondly slightly catch form owing to adopting, need to have the one-level light signal in different size cycle to participate in aiming at, after testing, the signal intensity of the actual acquisition of L-1 and M-1 is greater than set signal strength range, up to standard, meets the demands; Again, by the M-7 level light settings by setting signal intensity not for using, with it to deserved M-7 level light weights W
if greenM-7cancel and no longer participate in final alignment calculating; Finally, obtain original weights W of at different levels times
if greenL-1, W
if greenM-1, W
if greenM-3, W
if greenM-5, W
if greenM-7recalculate weight at different levels times
W
if greenL-1=W
if greenL-1* (W
if greenL-1+ W
if greenM-1+ W
if greenM-3+ W
if greenM-5+ W
if greenM-7)/(W
if greenL-1+ W
if greenM-1+ W
if greenM-3+ W
if greenM-5);
W
if greenM-1=W
if greenM-1* (W
if greenL-1+ W
if greenM-1+ W
if greenM-3+ W
if greenM-5+ W
if greenM-7)/(W
if greenL-1+ W
if greenM-1+ W
if greenM-3+ W
if greenM-5);
W
if greenM-3=W
if greenM-3* (W
if greenL-1+ W
if greenM-1+ W
if greenM-3+ W
if greenM-5+ W
if greenM-7)/(W
if greenL-1+ W
if greenM-1+ W
if greenM-3+ W
if greenM-5);
W
if greenM-5=W
if greenM-5* (W
if greenL-1+ W
if greenM-1+ W
if greenM-3+ W
if greenM-5+ W
if greenM-7)/(W
if greenL-1+ W
if greenM-1+ W
if greenM-3+ W
if greenM-5);
In like manner can obtain in red light irradiation situation and participate in the weight that aligned position calculates at different levels times
W
if redL-1=W
if redL-1* (W
if redL-1+ W
if redM-1+ W
if redM-3+ W
if redM-5+ W
if redM-7)/(W
if redL-1+ W
if redM-1+ W
if redM-3);
W
if redM-1=W
if redM-1* (W
if redL-1+ W
if redM-1+ W
if redM-3+ W
if redM-5+ W
if redM-7)/(W
if redL-1+ W
if redM-1+ W
if redM-3);
W
if redM-3=W
if redM-3* (W
if redL-1+ W
if redM-1+ W
if redM-3+ W
if redM-5+ W
if redM-7)/(W
if redL-1+ W
if redM-1+ W
if redM-3);
In color Dynamic Selection link, relatively under different wave length radiation situation, pass through the signal intensity summations of at different levels times of checking, the color that final choice signal intensity summation is large is carried out final alignment position calculation (concrete comparative approach is shown in described in CN09471.1)
Calculate final alignment position.
embodiment bis-:
Alignment system selects the essence form of catching to obtain aligned position (adopting the level time of two different cycles to aim at calculating) in aligned position computation process in Pointing strategy in the present embodiment, allow use to some extent level time not by the situation that use fault-tolerant treatment mechanism, in static weight setting up procedure, select L-1, M-1, M-3, M-5, M-7 to participate in the calculating of aligned position, the signal intensity that its selected level time arranges is S
if greenL-1, S
if greenM-1, S
if greenM-3, S
if greenM-5, S
if greenM-7, S
if redL-1, S
if redM-1, S
if redM-3, S
if redM-5, S
if redM-7it is W that the aligned position that corresponding selected level time arranges calculates weight
if greenL-1, W
if greenM-1, W
if greenM-3, W
if greenM-5, W
if greenM-7, W
if redL-1, W
if redM-1, W
if redM-3, W
if redM-5, W
if redM-7at different levels the signals that (Weight represents that aligned position calculates weight) obtains the signal intensity of at different levels times that participates under the light sources with different wavelengths radiation situation of setting aiming at participation with actual test is aimed at contrast known S
if greenL-1< S
survey greenL-1, S
if greenM-1< S
survey greenM-1, S
if greenM-3< S
survey greenM-3, S
if greenM-5< S
survey greenM-5, S
if greenM-7> S
survey greenM-7, S
if redL-1< S
survey redL-1, S
if redM-1< S
survey redM-1, S
if redM-3< S
survey redM-3, S
if redM-5> S
survey redM-5, S
if redM-7> S
survey redM-7.Can recognize that through contrast in mark, seven of the size cycle grades of actual signal intensities that record of light do not reach the strength range of setting in the situation that using green light source to irradiate; Use in the situation that red light source irradiates, in mark, the Pyatyi light in size cycle and seven grades of actual signal intensities that record of light do not reach the strength range of setting.
Set in the present embodiment and use fault-tolerant processing, because fault-tolerant treatment mechanism is to process respectively at different levels signals of the light source of different wave length, be example so sentence green glow, whether the number that first checks the level time light of the participation alignment applications that meets setting signal requirement of strength is zero, after testing, non-vanishing; Secondly, by the M-7 level light settings by setting signal intensity not for using, with it to deserved M-7 level light weights W
if greenM-7cancel and no longer participate in final alignment calculating; Finally, obtain original weights W of at different levels times
if greenL-1, W
if greenM-1, W
if greenM-3, W
if greenM-5, W
if greenM-7recalculate weight at different levels times
W
if greenL-1=W
if greenL-1* (W
if greenL-1+ W
if greenM-1+ W
if greenM-3+ W
if greenM-5+ W
if greenM-7)/(W
if greenL-1+ W
if greenM-1+ W
if greenM-3+ W
if greenM-5);
W
if greenM-1=W
if greenM-1* (W
if greenL-1+ W
if greenM-1+ W
if greenM-3+ W
if greenM-5+ W
if greenM-7)/(W
if greenL-1+ W
if greenM-1+ W
if greenM-3+ W
if greenM-5);
W
if greenM-3=W
if greenM-3* (W
if greenL-1+ W
if greenM-1+ W
if greenM-3+ W
if greenM-5+ W
if greenM-7)/(W
if greenL-1+ W
if greenM-1+ W
if greenM-3+ W
if greenM-5);
W
if greenM-5=W
if greenM-5* (W
if greenL-1+ W
if greenM-1+ W
if greenM-3+ W
if greenM-5+ W
if greenM-7)/(W
if greenL-1+ W
if greenM-1+ W
if greenM-3+ W
if greenM-5);
In like manner can obtain in red light irradiation situation and participate in the weight that aligned position calculates at different levels times
W
if redL-1=W
if redL-1* (W
if redL-1+ W
if redM-1+ W
if redM-3+ W
if redM-5+ W
if redM-7)/(W
if redL-1+ W
if redM-1+ W
if redM-3);
W
if redM-1=W
if redM-1* (W
if redL-1+ W
if redM-1+ W
if redM-3+ W
if redM-5+ W
if redM-7)/(W
if redL-1+ W
if redM-1+ W
if redM-3);
W
if redM-3=W
if redM-3* (W
if redL-1+ W
if redM-1+ W
if redM-3+ W
if redM-5+ W
if redM-7)/(W
if redL-1+ W
if redM-1+ W
if redM-3);
In color Dynamic Selection link, relatively under different wave length radiation situation, pass through the signal intensity summations of at different levels times of checking, the color that final choice signal intensity summation is large is carried out final alignment position calculation (concrete comparative approach is shown in described in CN09471.1)
Calculate final alignment position.
embodiment tri-:
Alignment system selects the form of slightly catching to obtain aligned position (adopting the level time of two different cycles to aim at calculating) in aligned position computation process in Pointing strategy in the present embodiment, allow use to some extent level time not by the situation that use fault-tolerant treatment mechanism, in static weight setting up procedure, select L-1, M-1, M-3, M-5, M-7 to participate in the calculating of aligned position, the signal intensity that its selected level time arranges is S
if greenL-1, S
if greenM-1, S
if greenM-3, S
if greenM-5, S
if greenM-7, S
if redL-1, S
if redM-1, S
if redM-3, S
if redM-5, S
if redM-7it is W that the aligned position that corresponding selected level time arranges calculates weight
if greenL-1, W
if greenM-1, W
if greenM-3, W
if greenM-5, W
if greenM-7, W
if redL-1, W
if redM-1, W
if redM-3, W
if redM-5, W
if redM-7at different levels the signals that (Weight represents that aligned position calculates weight) obtains the signal intensity of at different levels times that participates under the light sources with different wavelengths radiation situation of setting aiming at participation with actual test is aimed at contrast known S
if greenL-1< S
survey greenL-1, S
if greenM-1> S
survey greenM-1, S
if greenM-3< S
survey greenM-3, S
if greenM-5< S
survey greenM-5, S
if greenM-7> S
survey greenM-7, S
if redL-1< S
survey redL-1, S
if redM-1< S
survey redM-1, S
if redM-3< S
survey redM-3, S
if redM-5> S
survey redM-5, S
if redM-7> S
survey redM-7.Can recognize that through contrast in mark, the one-level light in size cycle and seven grades of actual signal intensities that record of light do not reach the strength range of setting in the situation that using green light source to irradiate; Use in the situation that red light source irradiates, in mark, the Pyatyi light in size cycle and seven grades of actual signal intensities that record of light do not reach the strength range of setting.
Set in the present embodiment and use fault-tolerant processing, because fault-tolerant treatment mechanism is to process respectively at different levels signals of the light source of different wave length, be example so sentence green glow, whether the number that first checks the level time light of the participation alignment applications that meets setting signal requirement of strength is zero, after testing, non-vanishing; Secondly owing to adopting the form of slightly catching, need to there is the one-level light signal in different size cycle to participate in aiming at, after testing, in the signal of the actual acquisition of L-1 and M-1, L-1 intensity is greater than set signal strength range, up to standard, meet the demands, but M-1 intensity is less than set signal strength range, below standard, therefore stop this time aiming at.
embodiment tetra-:
Alignment system selects the form of slightly catching to obtain aligned position (adopting the level time of two different cycles to aim at calculating) in aligned position computation process in Pointing strategy in the present embodiment, allow use to some extent level time not by the situation that use non-fault-tolerant treatment mechanism, in static weight setting up procedure, select L-1, M-1, M-3, M-5, M-7 to participate in the calculating of aligned position, the signal intensity that its selected level time arranges is S
if greenL-1, S
if greenM-1, S
if greenM-3, S
if greenM-5, S
if greenM-7, S
if redL-1, S
if redM-1, S
if redM-3, S
if redM-5, S
if redM-7it is W that the aligned position that corresponding selected level time arranges calculates weight
if greenL-1, W
if greenM-1, W
if greenM-3, W
if greenM-5, W
if greenM-7, W
if redL-1, W
if redM-1, W
if redM-3, W
if redM-5, W
if redM-7at different levels the signals that (Weight represents that aligned position calculates weight) obtains the signal intensity of at different levels times that participates under the light sources with different wavelengths radiation situation of setting aiming at participation with actual test is aimed at contrast known S
if greenL-1< S
survey greenL-1, S
if greenM-1> S
survey greenM-1, S
if greenM-3< S
survey greenM-3, S
if greenM-5< S
survey greenM-5, S
if greenM-7> S
survey greenM-7, S
if redL-1< S
survey redL-1, S
if redM-1< S
survey redM-1, S
if redM-3< S
survey redM-3, S
if redM-5> S
survey redM-5, S
if redM-7> S
survey redM-7.
Can recognize that through contrast in mark, the one-level light in size cycle and seven grades of actual signal intensities that record of light do not reach the strength range of setting in the situation that using green light source to irradiate; Use in the situation that red light source irradiates, in mark, the Pyatyi light in size cycle and seven grades of actual signal intensities that record of light do not reach the strength range of setting.
Do not set and use fault-tolerant processing in the present embodiment, therefore because level time does not meet aligned position calculation requirement, therefore stop this aligning.
Accompanying drawing 4 is process flow diagrams of alignment methods involved in the present invention.This alignment methods mainly comprises the following steps:
S101-arranges slightly-essence and catches.Aim at thick smart capture range setting, arranging in conjunction with aiming at of this scope needs in a big way and more among a small circle, to obtain aligned position.This thick capture range refers to obtain aligned position in a big way and need to use the one-level light source information of two different cycles sizes of same mark to aim at.Essence capture range refers to use the arbitrary number of level secondary reflection light source information of the same period of same mark to aim in more among a small circle.Select different cycles can in different range, obtain aligned position, when selecting L, when two cycles of M, can obtain aligning scope according to the method for lowest common multiple, in the time only selecting one-period, within the scope of one-period, can obtain aligned position.
Completing thick essence catches after S101 is set and enters weight setting step S201.Typically, weight setting had both comprised that static weight was set and changeable weight is set, and in the present embodiment, will introduce in detail one---static weight setting means S201 wherein.
Static weight is set and is comprised, arranges grade inferior and certain signal strength threshold scope that need to select, and at different levels times are set and calculate weight, check whether the actual signal intensity of at different levels times meets the requirement of setting threshold, as confirmation up to standard is passed through, this level time weight is effective;
Under static weight set-up mode, a signal intensity as inferior in the level of selected participation aligning does not all confirm the validity, and needs point fault-tolerant pattern and two kinds of situations of non-fault-tolerant pattern to be processed;
Under static weight set-up mode, a signal intensity as inferior in the level of selected participation aligning does not all confirm the validity, and under fault-tolerant pattern, under thick capture range and smart capture range condition, processing links there are differences
Under static weight set-up mode, a signal intensity as inferior in the level of selected participation aligning does not all confirm the validity, and in fault-tolerant pattern, under thick capture range condition, check that whether by the level time number of checking be zero (need possess), as be zero, stop fault-tolerant processing; The one-level time only no available (needing available) of required different cycles is caught in inspection, as unavailable, stops fault-tolerant processing; Meet after above-mentioned condition, discard to fall previous selection but by checking level time; Check time weight setting of residue level, recalculate weight proportion at different levels times.As the senior inferior of each cycle acquisition do not possess weighted value, the one-level light weight in each cycle is set to 1, calculates aligned position.
Under static weight set-up mode, a signal intensity as inferior in the level of selected participation aligning does not all confirm the validity, and in fault-tolerant pattern, whether be zero (need possess), as be zero, stop fault-tolerant processing if under essence capture range condition, looking into by the level time number of checking; Meet after above-mentioned condition, discard to fall previous selection but by checking level time; Check time weight setting of residue level, recalculate weight proportion at different levels times.As the senior inferior of each cycle acquisition do not possess weighted value, the one-level light weight in each cycle is set to 1, calculates aligned position.
Under static weight set-up mode, a signal intensity as inferior in the level of selected participation aligning does not all confirm the validity, and under non-fault-tolerant pattern, stops this time aiming at, and declaration is aimed at unsuccessfully, enters S401.
Completing static weight arranges and enters color after S201 and select to arrange S301 step to obtain aligned position S402.Because color is selected S301 is set continues to continue to use technical scheme of the prior art, hold within disclosed referring to CN09471.1 to the exposure concrete grammar of this part technological means.
Described in this instructions is preferred embodiment of the present invention, and above embodiment is only in order to illustrate technical scheme of the present invention but not limitation of the present invention.All those skilled in the art, all should be within the scope of the present invention under this invention's idea by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (16)
1. the alignment system based on multi-wavelength, comprise: the aligning radiation source that at least two wavelength are provided, optical unit, alignment mark, probe unit and processing unit, it is characterized in that, described in described processing unit obtains, be marked at the whole level time signals under different radiation source irradiates, set slightly catch and smart capture range after described whole level time signals are carried out to the weight setting of alignment stage time, and calculate and participate in the level time weight that aligned position calculates; Select slightly catching and smart capture range of setting and setting according to weight setting, color, calculate aligned position;
Wherein, described weight is set to static weight setting, comprise grade inferior and certain signal strength threshold scope that need to select that arranges, and at different levels times are set and calculate weight, check whether the actual signal intensity of at different levels times meets the requirement of setting threshold, as confirmation up to standard is passed through, this level time weight is effective; If number up to standard is less than the number of selecting setting, enter two kinds of mechanism of fault-tolerant and non-fault-tolerant;
First this fault-tolerant mechanism check whether by the level time number of checking be zero, as be zero, stops fault-tolerant processing;
Described entering after fault-tolerant mechanism, further comprises and judges whether to belong to thick capture range or smart capture range;
Under described thick capture range, check that to catch the one-level of required different cycles time only no available, as unavailable, stop fault-tolerant processing; Meet after available condition, abandon previous selection but by the level time of checking; Check time weight setting of residue level, recalculate weight proportion at different levels times;
Under described smart capture range, check whether by the level time number of checking be zero, as be zero, stop fault-tolerant processing; Meet after non-vanishing condition, abandon previous selection but by the level time of checking; Check time weight setting of residue level, recalculate weight proportion at different levels times.
2. the alignment system based on multi-wavelength as claimed in claim 1, is characterized in that, described alignment mark comprises binary cycle mark or three cycle marks.
3. the alignment system based on multi-wavelength as claimed in claim 1, is characterized in that, described aligning radiation source comprises red laser light source and green laser light source.
4. the alignment system based on multi-wavelength as claimed in claim 1, is characterized in that, described thick capture range refers to that the aligned position in a big way need to use the one-level light source information of two different cycles sizes of same mark to aim at.
5. the alignment system based on multi-wavelength as claimed in claim 1, is characterized in that, described smart capture range refers to use the arbitrary number of level secondary reflection light source information of the same period of same mark to aim in more among a small circle.
6. the alignment system based on multi-wavelength as claimed in claim 1, it is characterized in that, processing under described thick capture range further comprises: as the senior inferior of each cycle acquisition do not possess weighted value, the one-level light weight in each cycle is set to 1, calculates aligned position.
7. the alignment system based on multi-wavelength as claimed in claim 1, it is characterized in that, processing under described smart capture range further comprises: as the senior inferior of each cycle acquisition do not possess weighted value, the one-level light weight in each cycle is set to 1, calculates aligned position.
8. the alignment system based on multi-wavelength as claimed in claim 1, is characterized in that, described in enter after non-fault-tolerant mechanism, a level time signal intensity of aiming at as selected participation does not all confirm the validity and stops this time aiming at, and announces to aim at unsuccessfully.
9. the alignment methods based on multi-wavelength, it is characterized in that, obtain the whole level time signals of alignment mark under different radiation source irradiates, set slightly catch and smart capture range after described whole level time signals are carried out to the weight setting of alignment stage time, and calculate and participate in the level time weight that aligned position calculates; Select slightly catching and smart capture range of setting and setting according to weight setting, color, calculate aligned position;
Wherein, described weight is set to static weight setting, comprise grade inferior and certain signal strength threshold scope that need to select that arranges, and at different levels times are set and calculate weight, check whether the actual signal intensity of at different levels times meets the requirement of setting threshold, as confirmation up to standard is passed through, this level time weight is effective; If number up to standard is less than the number of selecting setting, enter two kinds of mechanism of fault-tolerant and non-fault-tolerant;
First this fault-tolerant mechanism check whether by the level time number of checking be zero, as be zero, stops fault-tolerant processing;
Described entering after fault-tolerant mechanism, further comprises and judges whether to belong to thick capture range or smart capture range;
Under described thick capture range, check that to catch the one-level of required different cycles time only no available, as unavailable, stop fault-tolerant processing; Meet after available condition, abandon previous selection but by the level time of checking; Check time weight setting of residue level, recalculate weight proportion at different levels times;
Under described smart capture range, check whether by the level time number of checking be zero, as be zero, stop fault-tolerant processing; Meet after non-vanishing condition, abandon previous selection but by the level time of checking; Check time weight setting of residue level, recalculate weight proportion at different levels times.
10. the alignment methods based on multi-wavelength as claimed in claim 9, is characterized in that, described alignment mark comprises binary cycle mark or three cycle marks.
11. alignment methods based on multi-wavelength as claimed in claim 9, is characterized in that, described aligning radiation source comprises red laser light source and green laser light source.
12. alignment methods based on multi-wavelength as claimed in claim 9, is characterized in that, described thick capture range refers to that aligned position need to use the one-level light source information of two different cycles sizes of same mark to aim in a big way.
13. alignment methods based on multi-wavelength as claimed in claim 9, is characterized in that, described smart capture range refers to use the arbitrary number of level secondary reflection light source information of the same period of same mark to aim in more among a small circle.
14. alignment methods based on multi-wavelength as claimed in claim 9, it is characterized in that, step under described thick capture range further comprises: as the senior inferior of each cycle acquisition do not possess weighted value, the one-level light weight in each cycle is set to 1, calculates aligned position.
15. alignment methods based on multi-wavelength as claimed in claim 9, it is characterized in that, step under described smart capture range further comprises: as the senior inferior of each cycle acquisition do not possess weighted value, the one-level light weight in each cycle is set to 1, calculates aligned position.
16. alignment methods based on multi-wavelength as claimed in claim 9, is characterized in that, described in enter after non-fault-tolerant mechanism, a level time signal intensity of aiming at as selected participation does not all confirm the validity and stops this time aiming at, and announces to aim at unsuccessfully.
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| US5801390A (en) * | 1996-02-09 | 1998-09-01 | Nikon Corporation | Position-detection method and apparatus with a grating mark |
| CN101158821A (en) * | 2007-08-31 | 2008-04-09 | 上海微电子装备有限公司 | Aligning mark, alignment method and aligning system |
| CN101571679A (en) * | 2009-06-09 | 2009-11-04 | 上海微电子装备有限公司 | Aligning system based on dual light sources and multilevel and aligning method thereof |
| CN101634815A (en) * | 2009-08-31 | 2010-01-27 | 上海微电子装备有限公司 | Alignment method based on a plurality of different wavelengths |
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| US5801390A (en) * | 1996-02-09 | 1998-09-01 | Nikon Corporation | Position-detection method and apparatus with a grating mark |
| CN101158821A (en) * | 2007-08-31 | 2008-04-09 | 上海微电子装备有限公司 | Aligning mark, alignment method and aligning system |
| CN101571679A (en) * | 2009-06-09 | 2009-11-04 | 上海微电子装备有限公司 | Aligning system based on dual light sources and multilevel and aligning method thereof |
| CN101634815A (en) * | 2009-08-31 | 2010-01-27 | 上海微电子装备有限公司 | Alignment method based on a plurality of different wavelengths |
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