CN102769370A - Electrothermal drive outer rotor stepping micro-motor - Google Patents
Electrothermal drive outer rotor stepping micro-motor Download PDFInfo
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- CN102769370A CN102769370A CN2012102397878A CN201210239787A CN102769370A CN 102769370 A CN102769370 A CN 102769370A CN 2012102397878 A CN2012102397878 A CN 2012102397878A CN 201210239787 A CN201210239787 A CN 201210239787A CN 102769370 A CN102769370 A CN 102769370A
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- hot arm
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Abstract
The invention relates to an electrothermal drive outer rotor stepping micro-motor, which comprises electrothermal actuators and a ring wheel rotor. The electrothermal actuators are flexible cold and hot arm electrothermal actuators and can make arc-shaped reciprocating motion. The rotor is a ring wheel and is supported on a substrate through anti-sticking bumps. The direction of the rotor in perpendicular to the substrate is constrained by constraint covers. Ratchets are arranged on the inner wall of the rotor. Gear teeth are arranged on the outer wall of the rotor. The micro-motor is driven by the electrothermal actuators and has the characteristics of large output torque, low rotating speed, small operating voltage, IC (integrated circuit) voltage compatibility and adjustable rotating speed. Since the micro-motor is fabricated by adopting the MEMS (micro-electromechanical system) surface silicon technology, the micro-motor is not required to be assembled, the structure is simple and the micro-motor can be used in the fields of medical treatment, military, aerospace, biomedicine and the like.
Description
Technical field
The present invention relates to the microactrator class in MEMS (MEMS) technical field, particularly a kind of electrothermal drive external rotor stepping micro motor.
Background technology
In recent years, along with the continuous development and the maturation of MEMS technology, the demand of the micro motor big, simple in structure to output torque, that speed is suitable increased gradually.Requirement to micro motor in the types of applications is not quite similar, and components and parts accurately drive and the micro motor of location as being used in optics and the precision mechanical system, require speed height, fast, the miniaturization of response; Be used in the micro motor of aerospace field, require that output torque is big, efficient is high, in light weight, volume is little, the life-span is long, reliability is high; Be used in the micro motor of micro-nano technical field, both required the large and small typeization of moment, efficient height, require the rotating speed of motor suitable again, compatible with the micro-nano processing technology.Existing micro motor mainly contains electrostatic motor, electromagnetic induction motor, ultrasonic motor, piezoelectric ceramic impact type CD-ROM drive motor etc.1988; The researcher of Univ California-Berkeley adopt surface silicon technology made diameter be 120
the static micro motor; This electrostatic motor is that motor the earliest appears in the MEMS field; Directly utilize electrostatic force to drive rotor; Miniaturizable; With the MEMS process compatible, but output torque is little, and rotating speed is high; Can't directly use, and people's such as Muller patent in the United States Patent (USP) " Micro Motor and Method for Their Fabrication (patent No.: 5252881) " be exactly to utilize the power-actuated micro motor of static.Electromagnetic induction micro motor output torque is big, speed is fast, but coil loss is big, and structure is difficult for miniaturization; Ultrasonic motor and surface acoustic wave motor had also been done a large amount of research in recent years both at home and abroad.These motors differ from one another, but all are difficult to directly be applied in the MEMS device.
The electric heating actuator utilizes variations in temperature to produce deformation and activates; The output displacement with power is big, operating voltage is little, compatible with IC, move controlled; It is the feasible main actuating mode of present stage MEMS; Heat solid capable of using produces thermal expansion and activates, and heated air also capable of using, liquid and other medium produce change in volume and activate.Produce linear reciprocating motion behind the electric heating actuator input alternating voltage, rotatablely move, can reach the application request that rotating speed is suitable, actuating force is big if the linear reciprocating motion of its generation is converted to continuously through suitable movement transforming device.
The present invention utilizes the flexible deformation and the arcuation reciprocating motion of cold and hot arm electric heating actuator; Characteristics in conjunction with the ratchet one-way motion; The arcuation reciprocating motion of actuator is changed into the rotation rotation of ring-shaped rotor; Thereby constitute electrothermal drive external rotor stepping micro motor, through regulating the rotating speed of frequency of input voltage scalable motor.
Summary of the invention
The objective of the invention is to overcome the defective of traditional micro motor; In conjunction with the characteristics of the flexible deformation in the cold and hot arm electric heating actuator movements process and arcuation reciprocating motion and ratchet one-way motion, invent that a kind of output torque is big, efficient is high, control is simple, the electrothermal drive external rotor stepping micro motor of rotating speed adjustable.
For achieving the above object, design of the present invention is:
Task of the present invention is to set up a kind of and the MEMS surface treatment compatible, need not to assemble, output torque is big, the polysilicon micro motor of rotating speed adjustable.The one-way movement characteristic of utilizing ratchet-gear wheel is transformed into the arcuation reciprocating motion of electric pyrogenicity actuator the continuous rotation output of motor rotor.
According to foregoing invention thought, reach goal of the invention through following technical scheme:
A kind of electrothermal drive external rotor stepping micro motor comprises stator and rotor, it is characterized in that: stator is cold and hot arm electric heating actuator, and rotor is an annulus wheel; One end of cold and hot arm electric heating actuator is fixed on the silicon lining bottom plane through anchor point, and the other end is movable driving ratchet, and this drives the ratchet of ratchet and the interior ratchet engagement of rotor; Drive between ratchet and the interior ratchet gapped; Rotor is a floating roller, and periphery has the standard involute gear tooth, by 4 containment shroud constraints that circumferentially are uniformly distributed with; Fixing electrode forms with anchor point through lead and is electrically connected, to cold and hot arm electric heating actuator power supply.
Said cold and hot arm electric heating actuator is the hot arm electric heating of a U type list actuator, perhaps is the two hot arm electric heating actuators of U type.
The number of said cold and hot arm electric heating actuator can be 2,4 or 6.
The inboard of said rotor also is provided with the interior ratchet engagement of 1 ~ 2 detent and rotor.
Said stator and rotor prepare with the MEMS surface treatment; On silicon lining bottom plane; Silicon nitride layer is arranged; The fixing polysilicon layer Poly0 as lead is arranged on the silicon nitride layer, on polysilicon layer Poly0, have fixing structure sheaf Ploy2 to constitute the anchor point of containment shroud and structure sheaf Poly1, on Poly0, have by the anti-structure sheaf Poly1 that adheres to the projection support to constitute cold and hot arm electric heating actuator and rotor.
The present invention has following conspicuous outstanding substantive distinguishing features and marked improvement compared with prior art:
The present invention has realized the rotation of motor rotor through the form of electrothermal drive; The arcuation reciprocating motion of electric heating actuator is transformed into rotatablely moving of rotor; Inherited the advantage that electric heating actuator power output is big, operating voltage is little, its novel structure is unique, with the MEMS process compatible, be easy to control, delivery efficiency height, rotating speed adjustable, whole device and need not to assemble.
Description of drawings
Fig. 1 is the structural representation of the present invention with a pair of actuator.
Fig. 2 is the another kind of execution mode sketch map of micro motor shown in Figure 1.
Fig. 3 is a cross-sectional view of the present invention, and containment shroud 8 is second layer structure sheaf Poly2, is used at vertical substrates direction constrain rotor 5; 9 is conductor layer Poly0, is used for being electrically connected; 10 is to prevent sticking projection, is used for support rotor 5.
Fig. 4 is that single hot arm electric heating activates the distortion sketch map among the present invention.
Fig. 5 is two hot arm electric heating actuator structure sketch mapes, and arrow is depicted as the direction of motion.
Embodiment
Preferred embodiment of the present invention combines detailed description of the drawings following:
Embodiment one:
Participate in Fig. 1 and Fig. 2, this electrothermal drive external rotor stepping micro motor comprises stator and rotor (5), it is characterized in that: stator is a cold and hot arm electric heating actuator (3a, 3b), and rotor (5) is an annulus wheel; One end of cold and hot arm electric heating actuator (3a, 3b) is fixed on the silicon lining bottom plane (12) through anchor point; The other end is movable driving ratchet (4a, 4b); This drives interior ratchet (6) engagement of the ratchet and the rotor (5) of ratchet (4a, 4b), and gapped between driving ratchet (4a, 4b) and the interior ratchet (6), rotor (5) is a floating roller; Periphery has standard involute gear tooth (7); By 4 containment shroud that circumferentially are uniformly distributed with (8a, 8b, 8c, 8d) constraint, fixing electrode (2a, 2b) forms with anchor point (1) through lead (9) and is electrically connected, and supplies power to cold and hot arm electric heating actuator (3a, 3b).
Embodiment two:
Participate in Fig. 1, Fig. 2 and Fig. 3, present embodiment and embodiment one are basic identical, and special feature is following:
Said cold and hot arm electric heating actuator (3a, 3b) is the hot arm electric heating of a U type list actuator, perhaps is the two hot arm electric heating actuators of U type.The number of said cold and hot arm electric heating actuator can be 2,4 or 6.The inboard of said rotor (5) also is provided with interior ratchet (6) engagement of 1 ~ 2 detent (13a, 13b) and rotor (5).Said stator and rotor (5) prepare with the MEMS surface treatment; On silicon lining bottom plane (12); Silicon nitride layer (11) is arranged; The fixing polysilicon layer Poly0 (9) as lead is arranged on the silicon nitride layer (11); On polysilicon layer Poly0 (9), there is fixing structure sheaf Ploy2 to constitute the anchor point (1) of containment shroud (8a, 8b, 8c, 8d) and structure sheaf Poly1, on Poly0 (9), has by the anti-structure sheaf Poly1 that adheres to projection (10) support to constitute cold and hot arm electric heating actuator (3a, 3b) and rotor (5).
Embodiment three:
This micro motor, the triangular shaped ratchet 6 that drives ratchet 4, detent 13 and rotor 5 inwalls during initial condition is in engagement (because technological reason, there is the gap in the ratchet engagement place), and electrode 2 is used for to actuator 3 power supplies.The operation principle of micro motor is: after the electrifying electrodes, have electric current to pass through in the actuator, because cold and hot arm actuator is not wide; The resistance heat that hot arm 15 produces is greater than cold arm 16, so actuator produces flexible arcuation motion as shown in Figure 5 under the effect of resistance heat stress, the driving ratchet just can drive rotor and turn over certain angle clockwise; When the driving ratchet returned, the ratchet ratchet streaked the rotor ratchet, and static driving ratchet or detent start-stop action are used; Rotor can not reverse; Drive down at alternating voltage, the driving that moves in circles of driving ratchet, rotor rotates continuously.
Referring to accompanying drawing 1; After adding suitable voltage between electrode 2a and 2b, there is electric current to pass through among actuator 3a and the 3b, produces flexible arcuation motion as shown in Figure 5; Drive ratchet 4a and 4b and drive rotor 5 simultaneously and turn over certain angle clockwise, during the ratchet 6 of rotor 5 streak detent 13a and 13b; Then electrode 2a, 2b outage, actuator 3a and 3b set back, and the ratchet 6 that driving ratchet 4a and 4b slip over rotor counterclockwise returns, because the stopping function of detent 13a and 13b, rotor 5 can not reverse.A duty cycle is accomplished, under alternating voltage drives, and actuator 3a and 3b reciprocating motion, rotor 5 can be realized rotatablely moving continuously.
Referring to accompanying drawing 2, present embodiment and embodiment one are basic identical, and special feature is following: said actuator 3a is by electrode 2a and 2d power supply; Actuator 3b drives ratchet 4a and 4b and moves respectively, when 4a drives by electrode 2b, 2c power supply; 4b stop; Vice versa, drives ratchet 4a and 4b driven, and rotor 5 rotates continuously.Owing to drive ratchet 4a and 4b driven, another stoppable when returning is so detent 13 can be cancelled in this instance.
Claims (5)
1. an electrothermal drive external rotor stepping micro motor comprises stator and rotor (5), it is characterized in that: stator is a cold and hot arm electric heating actuator (3a, 3b), and rotor (5) is an annulus wheel; One end of cold and hot arm electric heating actuator (3a, 3b) is fixed on the silicon lining bottom plane (12) through anchor point; The other end is movable driving ratchet (4a, 4b); This drives interior ratchet (6) engagement of the ratchet and the rotor (5) of ratchet (4a, 4b), and gapped between driving ratchet (4a, 4b) and the interior ratchet (6), rotor (5) is a floating roller; Periphery has standard involute gear tooth (7); By 4 containment shroud that circumferentially are uniformly distributed with (8a, 8b, 8c, 8d) constraint, fixing electrode (2a, 2b) forms with anchor point (1) through lead (9) and is electrically connected, and supplies power to cold and hot arm electric heating actuator (3a, 3b).
2. electrothermal drive external rotor stepping micro motor according to claim 1 is characterized in that: said cold and hot arm electric heating actuator (3a, 3b) is the hot arm electric heating of a U type list actuator, perhaps is the two hot arm electric heating actuators of U type.
3. electrothermal drive external rotor stepping micro motor according to claim 1 is characterized in that: the number of said cold and hot arm electric heating actuator can be 2,4 or 6.
4. electrothermal drive external rotor stepping micro motor according to claim 1 is characterized in that: the inboard of said rotor (5) also is provided with interior ratchet (6) engagement of 1 ~ 2 detent (13a, 13b) and rotor (5).
5. according to the described electrothermal drive external rotor of claim 1 ~ 5 stepping micro motor; It is characterized in that: said stator and rotor (5) prepare with the MEMS surface treatment; On silicon lining bottom plane (12); Silicon nitride layer (11) is arranged; The fixing polysilicon layer Poly0 (9) as lead is arranged on the silicon nitride layer (11), on polysilicon layer Poly0 (9), have fixing structure sheaf Ploy2 to constitute the anchor point (1) of containment shroud (8a, 8b, 8c, 8d) and structure sheaf Poly1, on Poly0 (9), have by the anti-structure sheaf Poly1 that adheres to projection (10) support to constitute cold and hot arm electric heating actuator (3a, 3b) and rotor (5).
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| Application Number | Priority Date | Filing Date | Title |
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| CN2012102397878A CN102769370A (en) | 2012-07-12 | 2012-07-12 | Electrothermal drive outer rotor stepping micro-motor |
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| CN2012102397878A CN102769370A (en) | 2012-07-12 | 2012-07-12 | Electrothermal drive outer rotor stepping micro-motor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106586945A (en) * | 2017-01-07 | 2017-04-26 | 杭州电子科技大学 | Miniaturized impact hammer with low driving voltages |
| CN110557049A (en) * | 2019-09-05 | 2019-12-10 | 兰州城市学院 | Silicon micro-moving cam mechanism manufactured on semiconductor chip |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5959376A (en) * | 1998-09-10 | 1999-09-28 | Sandia Corporation | Microelectromechanical reciprocating-tooth indexing apparatus |
| US6211599B1 (en) * | 1999-08-03 | 2001-04-03 | Sandia Corporation | Microelectromechanical ratcheting apparatus |
| CN1972102A (en) * | 2006-10-19 | 2007-05-30 | 上海大学 | Electrostatic actuation beam-folding nano-stepping micro-actuator |
| CN101325382A (en) * | 2007-06-14 | 2008-12-17 | 建凖电机工业股份有限公司 | Grasping-lifting drive type minitype motor capable of reducing drive voltage as well as manufacture method and usage thereof |
| CN101621261A (en) * | 2009-08-06 | 2010-01-06 | 上海交通大学 | Flexible composite beam electric heating microdriver based on U+V shape |
| CN101769898A (en) * | 2010-02-08 | 2010-07-07 | 南京师范大学 | On-line measuring method of Poisson ratio of micro-electromechanical system (MEMS) film based on resonance frequency method |
-
2012
- 2012-07-12 CN CN2012102397878A patent/CN102769370A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5959376A (en) * | 1998-09-10 | 1999-09-28 | Sandia Corporation | Microelectromechanical reciprocating-tooth indexing apparatus |
| US6211599B1 (en) * | 1999-08-03 | 2001-04-03 | Sandia Corporation | Microelectromechanical ratcheting apparatus |
| CN1972102A (en) * | 2006-10-19 | 2007-05-30 | 上海大学 | Electrostatic actuation beam-folding nano-stepping micro-actuator |
| CN101325382A (en) * | 2007-06-14 | 2008-12-17 | 建凖电机工业股份有限公司 | Grasping-lifting drive type minitype motor capable of reducing drive voltage as well as manufacture method and usage thereof |
| CN101621261A (en) * | 2009-08-06 | 2010-01-06 | 上海交通大学 | Flexible composite beam electric heating microdriver based on U+V shape |
| CN101769898A (en) * | 2010-02-08 | 2010-07-07 | 南京师范大学 | On-line measuring method of Poisson ratio of micro-electromechanical system (MEMS) film based on resonance frequency method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106586945A (en) * | 2017-01-07 | 2017-04-26 | 杭州电子科技大学 | Miniaturized impact hammer with low driving voltages |
| CN110557049A (en) * | 2019-09-05 | 2019-12-10 | 兰州城市学院 | Silicon micro-moving cam mechanism manufactured on semiconductor chip |
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Application publication date: 20121107 |