CN102807189A - Micro-electromechanical device - Google Patents
Micro-electromechanical device Download PDFInfo
- Publication number
- CN102807189A CN102807189A CN2011101575464A CN201110157546A CN102807189A CN 102807189 A CN102807189 A CN 102807189A CN 2011101575464 A CN2011101575464 A CN 2011101575464A CN 201110157546 A CN201110157546 A CN 201110157546A CN 102807189 A CN102807189 A CN 102807189A
- Authority
- CN
- China
- Prior art keywords
- battery lead
- lead plate
- microelectromechanicdevices devices
- distance
- sensing module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Abstract
The invention relates to a micro-electromechanical device containing micro sensing module and the processing circuit of the electric connected micro sensing module. The micro sensing module includes a fixed part with plurality of the first plate electrodes, a moving part and an elastomer, and the moving part includes the second plate electrode and the third plate electrode and a mass block. The processing circuit transmits a signal in correspondence with the relevance of the distance between the second plate electrode and the first plate electrode to the distance between the third plate electrode and the first plate electrode. When the placement of the micro-electromechanical device is changed, the second plate electrode and the third plate electrode move and change the distance between the second plate electrode and the first plate electrode as well as the distance between the third plate electrode and the first plate electrode. The included angle between the parallel direction of the second plate electrode and the parallel direction of the elastomer as well as the included angle between the parallel direction of the third plate electrode and the parallel direction of the elastomer are separately between 6-84 DEG.
Description
Technical field
The present invention relates to a kind of microelectromechanicdevices devices, relate in particular to and use the microelectromechanicdevices devices that electric capacity reads technology.
Background technology
(Micro Electro Mechanical Systems MEMS) is the system of an intelligent microminiaturization to MEMS, is used for carrying out the function of sensing, processing or actuating.Because MEMS development can be with the character in two or multiple field; As: technology such as electronics, machinery, optics, chemistry, biology or magnetics are incorporated into the technology in single or a plurality of chips, and the device that therefore goes out with the fabrication techniques of MEMS can significantly dwindle the volume of conventional apparatus.
For instance, please refer to Fig. 1, it shows traditional inclinometer/switch of inclination 100, and the pressure of borrowing ball 110 on feeling of stress drafting board 120, to roll to be produced calculates the inclination angle that this inclinometer/switch of inclination 100 belongs to environment.Not only volume is big and reaction speed is slow for the traditional inclinometer/switch of inclination 100 of this kind, if can go out new-type inclinometer or switch of inclination with the fabrication techniques of MEMS, should be able to effectively reduce volume.
Yet the existing device that goes out with the fabrication techniques of MEMS also has the problem of the improvement of needing.For instance; Please refer to Fig. 2; Using the operating principle that electric capacity reads the capacitive accelerometer 200 that fabrication techniques goes out in the present micro electronmechanical accelerometer is to utilize two capacitor boards 201,202; Capacitor board 201 is positioned on the second-order system that mass 203 and spring 204 and air form, and can move along with mass 203, and 202 of another capacitor boards are to be fixedly arranged at the corresponding position; Connect the fixed part 205 of capacitive accelerometer 200, thereby borrowing two capacitor boards 201, the capacitance variation amount between 202 to derive the accekeration of these capacitive accelerometer 200 place environment.Please refer to Fig. 3, it shows the equivalent structure of the capacitive accelerometer 200 of Fig. 2.From Fig. 3, can know; Because the direction of motion of capacitor board 201,202 is to be perpendicular to one another with its bearing of trend; Make that the displacement of spring 204 is almost identical with capacitor board 201,202 displacements; And make that the motion range of linearity of spring 204 receives two capacitor boards 201, the physical restriction of gap width between 202, such as within capacitor board 201, the gap between 202 1/3 times.
Therefore, how improving the technical limitations of existing MEMS and the technical application face of increase MEMS is the problem of needing research badly in fact.
Summary of the invention
The object of the present invention is to provide a kind of microelectromechanicdevices devices, be not perpendicular angular relationship between the bearing of trend of second battery lead plate through moving part and its moving direction, increase the movable scope of elastomer.
Another object of the present invention is to provide a kind of microelectromechanicdevices devices; Be not perpendicular angular relationship between the reference coordinate axle when bearing of trend of second battery lead plate through moving part and microelectromechanicdevices devices encapsulation, change the angular range that can read effective capacitance value between first capacitor board and second capacitor board.
A purpose more of the present invention is to provide a kind of microelectromechanicdevices devices; Be not perpendicular angular relationship between one reference axis of the coordinate system through elastomer bearing of trend and its application, change the angular range that can read capacitance between first capacitor board and second capacitor board.
According to the present invention, a kind of microelectromechanicdevices devices is provided, comprising: little sensing module and treatment circuit.Little sensing module comprises: fixed part, moving part and at least one elastomer.Fixed part comprises a plurality of first battery lead plates, and moving part comprises at least one second battery lead plate, at least one third electrode plate and mass.Second battery lead plate is parallel to first direction, and has first distance between first battery lead plate, and the third electrode plate is parallel to second direction, and has second distance between first battery lead plate, and mass connects second battery lead plate and third electrode plate.Elastomer is parallel to third direction, connects fixed part and mass.Treatment circuit is electrically connected little sensing module, and the relevance of corresponding first distance and second distance transmits a signal.Wherein, when the placement location of microelectromechanicdevices devices changed on the position, second battery lead plate and third electrode plate moved, and changed first distance and the second distance, and the angle of first direction and third direction and second direction and third direction is respectively between 6～84 degree.
According to the present invention, a kind of microelectromechanicdevices devices is provided, be applied to a coordinate system, comprising: little sensing module and treatment circuit.Little sensing module comprises fixed part, moving part and at least one elastomer.Fixed part comprises a plurality of first battery lead plates.Moving part comprises at least one second battery lead plate, at least one third electrode plate and mass.Have first distance between second battery lead plate and first battery lead plate, have second distance between third electrode plate and said first battery lead plate, mass connects second battery lead plate and third electrode plate.Elastomer connects fixed part and mass, and elastomer is parallel to a direction, and the angle of a reference axis of this direction and coordinate system is between 6～84 degree.Treatment circuit is electrically connected little sensing module, and the relevance of corresponding first distance and second distance transmits a signal.Wherein, when the placement location of microelectromechanicdevices devices changed on the position, second battery lead plate and third electrode plate moved, and changed first distance and the second distance.
Microelectromechanicdevices devices of the present invention is used electric capacity and is read technology, with another physical property of capacitance variation quantitative response, as: accekeration, acceleration direction or other physical property, so can derive the present situation of physical property through the capacitance that reads.Secondly, the foundation of microelectromechanicdevices devices of the present invention capacitance change also capable of using actuation of the switch as whether.Therefore, microelectromechanicdevices devices of the present invention can be used as accelerometer, inclinometer, switch of inclination or gyroscope etc., so is not limited thereto.
The treatment circuit of microelectromechanicdevices devices of the present invention preferably includes comparing unit, is electrically connected second battery lead plate and third electrode plate, as the usefulness of back end signal processing.When first distance and second distance change, comparing unit can produce aforementioned signal.This signal can be in order to the residing ambient condition of reaction microelectromechanicdevices devices; As: the placement location of microelectromechanicdevices devices, towards or accekeration; Therefore, when the placement location of microelectromechanicdevices devices is horizontal or vertical when putting in coordinate system, treatment circuit can transmit various signals represent microelectromechanicdevices devices towards; As: be just to put or put upside down, or to the left or to the right.Handle upward with regard to signal, this signal is preferably a difference value with the increase signal strength signal intensity, as: the difference of second capacitance between first capacitance between corresponding first battery lead plate and second battery lead plate and first battery lead plate and second battery lead plate so is not limited thereto.
First battery lead plate of the present invention, second battery lead plate, third electrode plate or elastomeric quantity also can be a plurality of, and its development length is also unrestricted, and bearing of trend and arrangement mode also can be done multiple variation, so need not limit.For instance, the bearing of trend of second battery lead plate and third electrode plate can opposite or vertical each other direction, and promptly second direction is the rightabout of first direction, or is perpendicular to one another with first direction.One of the variation of the arrangement mode of first battery lead plate and second battery lead plate example is: a pair of first battery lead plate is set respectively between second battery lead plate, and its another example is: be arrangement interlaced with each other between first battery lead plate and second battery lead plate.When elastomeric quantity was a plurality of, symmetric arrays preferably was to keep the structural stability of optimum system choosing.
Secondly; In embodiments of the present invention; Microelectromechanicdevices devices can be provided with on demand that another little sensing module is other is located at last little sensing module, yet in order effectively to utilize this two little sensing module, elastomer that can this two little sensing module is set to be perpendicular to one another; As: one be upper left to the lower right to, another for upper right to the lower left to, and make second battery lead plate of this two little sensing module be set to be perpendicular to one another.Because two little sensing modules are set need be taken than the large-area manufacturing microelectromechanicdevices devices; In order to reduce area occupied; In another embodiment of the present invention; The moving part of microelectromechanicdevices devices can extraly comprise at least one the 4th battery lead plate and at least one the 5th battery lead plate with enhancing signal, and the angle of the bearing of trend of the 4th battery lead plate and the 5th battery lead plate and elastomeric bearing of trend (third direction) is respectively between 6～84 degree, and the elastomer of four symmetries is set.With second battery lead plate and third electrode plate similarly, number, development length and the arrangement mode of the 4th battery lead plate and the 5th battery lead plate also can be done multiple variation.For example: with the 4th battery lead plate and the 5th battery lead plate, its bearing of trend such as grade can be each other to rightabout or is perpendicular to one another.Arrangement mode also can be done similar variation, repeats no more at this.
In embodiments of the present invention, make second battery lead plate not vertical with the elastomer bearing of trend with the bearing of trend of third electrode plate, therefore elastomeric displacement and capacitor board displacement are certain proportion.The physical restriction of the scalable elastomer motion range of linearity like this; Make elastomeric maximum displacement greater than 1/3 times of the spacing distance between second battery lead plate; As: elastomeric maximum displacement is 1/3sin θ a times of spacing distance; θ represents the angle of first direction or second direction and third direction, and the angle optimum that therefore can know first direction and third direction and second direction and third direction is 45 degree.
If in embodiments of the present invention; Contrast in a coordinate system of microelectromechanicdevices devices encapsulation time institute's foundation of the present invention; When elastomeric bearing of trend (third direction) is parallel to a reference coordinate axle of above-mentioned coordinate system; Owing to have the angle of 6～84 degree at this moment between the reference coordinate axle of the bearing of trend (first direction and second direction) of second battery lead plate on the moving part and third electrode plate and coordinate system, so can change the angular range that in this coordinate system, reads effective capacitance value between first capacitor board and second capacitor board.For instance; When no matter this microelectromechanicdevices devices is to place and no matter be just to put, put upside down, wait towards the capacitance that is read to the left or to the right and all effectively represent its inclination angle in environment, therefore can be used as good inclinometer and use with horizontal or vertical disposing way in this coordinate system.
Yet; In another embodiment of the present invention; Contrast in the applied coordinate system of microelectromechanicdevices devices of the present invention, the elastomeric bearing of trend of microelectromechanicdevices devices of the present invention can and the reference coordinate axle of coordinate system between have the angle of 6～84 degree, this angle more preferably is 45 degree.At this moment; Though and the angle number of degrees between the reference coordinate axle of the bearing of trend (first direction and second direction) of second battery lead plate on the unrestricted moving part and third electrode plate and coordinate system; But when this microelectromechanicdevices devices in this coordinate system no matter be with horizontal or vertical disposing way place and no matter be just put, put upside down, wait to the left or to the right towards the time; The capacitance that is read also can effectively be represented its inclination angle in environment, therefore also can be used as good inclinometer and uses.
In addition, microelectromechanicdevices devices of the present invention optionally is provided with Z axle sensing module, comprises two sensing electrodes, lay respectively on the different vertical heights, with promote the Z axle towards interpretation property.
Hereat, can learn from above-mentioned that microelectromechanicdevices devices of the present invention can to increase the movable scope of elastomer, can be detected the space and increase microelectromechanicdevices devices through changing the corner dimension between battery lead plate bearing of trend and the elastomer.Secondly; Be not perpendicular angular relationship between the reference coordinate axle when bearing of trend of second battery lead plate that also can be through moving part and microelectromechanicdevices devices encapsulation or change the corner dimension between the reference axis of elastomer and the application coordinate system of microelectromechanicdevices devices, and change can read the angular range of capacitance between first capacitor board and second capacitor board.
Description of drawings
Fig. 1 shows the vertical view of traditional inclinometer/switch of inclination.
Fig. 2 shows the structural representation of conventional condenser accelerometer.
Fig. 3 shows the sketch map of equivalent structure of the capacitive accelerometer of Fig. 2.
Fig. 4 shows the sketch map of the microelectromechanicdevices devices of making according to first embodiment of the invention.
Fig. 5 shows the equivalent structure sketch map of little sensing module of the microelectromechanicdevices devices of making according to first embodiment of the invention.
Fig. 6 shows the equivalent structure sketch map of the microelectromechanicdevices devices of making according to second embodiment of the invention.
Fig. 7 shows the sketch map of the microelectromechanicdevices devices of making according to third embodiment of the invention.
Fig. 8 shows the sketch map of the microelectromechanicdevices devices of making according to fourth embodiment of the invention.
Fig. 9 shows the generalized section of the Z axle sensing module of the microelectromechanicdevices devices of making according to fifth embodiment of the invention.
[main element symbol description]
The specific embodiment
For further specifying each embodiment, the present invention provides accompanying drawing.These accompanying drawings are the part of the disclosure of invention, and it is mainly in order to illustrative embodiment, and can cooperate the associated description of specification to explain the operation principles of embodiment.Cooperation is with reference to these contents, and those of ordinary skill in the art will be understood that embodiment and the advantage of the present invention that other is possible.Element among the figure and not drawn on scale, and the similar elements symbol is commonly used to represent similar elements.
At first please in the lump with reference to figure 4, wherein Fig. 4 shows the sketch map of the microelectromechanicdevices devices of making according to first embodiment of the invention, and Fig. 5 shows the equivalent structure sketch map of little sensing module of the microelectromechanicdevices devices of making according to first embodiment of the invention.Microelectromechanicdevices devices 1 reads technology for using electric capacity; With another physical property of capacitance variation quantitative response; Like the device of accekeration, acceleration direction or other physical property, so can derive the present situation of physical property or utilize the foundation of capacitance change actuation of the switch through the capacitance that reads as whether.Microelectromechanicdevices devices 1 in this example is a chip, is that it can be used as accelerometer, inclinometer, switch of inclination or gyroscope etc., so is not limited thereto with the formed coordinate system encapsulation of XY reference axis.Shown in figure, the microelectromechanicdevices devices 1 of present embodiment comprises that two are arranged on the little sensing module 10,20 and the treatment circuit 30 on next door each other.Treatment circuit 30 is arranged on the zone outside little sensing module 10,20, and is electrically connected little sensing module 10,20.
The internal structure symmetry of the internal structure of little sensing module 20 and little sensing module 10 in order to save space, is mainly described the difference part between the internal structure at this, and other identical part repeats no more.The bearing of trend of the elastomer 23 of little sensing module 20 is vertical with the bearing of trend of the elastomer 13 of little sensing module 10; More specifically say; The bearing of trend of the elastomer 23 of little sensing module 20 is upper left to the bottom right; And the bearing of trend of the elastomer 13 of little sensing module 10 is upper right to a left side, and the second battery lead plate 12A of little sensing module 10 is perpendicular to the second battery lead plate 22A of little sensing module 20.
When microelectromechanicdevices devices 1 changes its placement location in the XY coordinate system; In the time of can receiving acceleration; The moving part 12 that suspends can receive an application of force according to newton's second law of motion; This application of force can put on the second-order system that mass 12C and elastomer 13 and air form, and makes mass 12C move and changes the length of elastomer 13.Can drive the second battery lead plate 12A and the third electrode plate 12B that are attached thereto when mass 12C moves and move, therefore change apart from d toward equidirectional
AWith apart from d
BTreatment circuit 30 can respective distances d at this moment
AAnd apart from d
BRelevance transmit a signal, such as: the capacitance between the first battery lead plate 11A and the second battery lead plate 12A can receive apart from d
AChange influence, and the capacitance between the first battery lead plate 11A and the third electrode plate 12B can receive apart from d
BChange influence, therefore, treatment circuit 30 can transmit corresponding signal according to the capacitance change amount that reads, however the mode that signal is handled also can have other variation, is not limited to this.
In addition; Because in the present embodiment; The second battery lead plate 12A in little sensing module 10,20,22A are not vertical with elastomer 13,23 bearing of trends with the bearing of trend of third electrode plate 12B, 22B; Therefore displacement and the second battery lead plate 12A, 22A and third electrode plate 12B, the 22B displacement of elastomer 13 present certain proportion, make elastomer 13,23 displacements greater than the spacing d between the second battery lead plate 12A, 22A and third electrode plate 12B, the 22B
A, d
BThe change amount.The physical restriction of scalable elastomer 13, the 23 motion ranges of linearity like this makes the maximum displacement of elastomer 13,23 greater than the spacing distance d between the second battery lead plate 12A, 22A and third electrode plate 12B, the 22B
A, d
B1/3 times.Calculate according to trigonometric function; The maximum displacement of tolerable elastomer 13,23 is 1/3sin θ a times of spacing distance; θ represents the angle of A direction or B direction and C direction; Therefore the angle that can know A direction and C direction and B direction and C direction is 45 when spending, maximum displacement that can the best amplification elastomer 13,23.
Other please refer to Fig. 6, and it shows the equivalent structure sketch map of the microelectromechanicdevices devices of making according to second embodiment of the invention.In order to save space, the present embodiment and the first embodiment difference part are only described at this.Shown in figure; Second battery lead plate 12A in little sensing module 10 of present embodiment and the arrangement mode of the third electrode plate 12A and the first battery lead plate 11A change to some extent; Make a pair of first battery lead plate 11A is set respectively between the second battery lead plate 12A that the first battery lead plate 11A of the second battery lead plate 12A both sides like this and the second battery lead plate 12A all possibly produce capacitance variation and increase the reliability of system.
Because two little sensing modules are set need be taken than the large-area manufacturing microelectromechanicdevices devices, in order to reduce area occupied, the present invention proposes an embodiment in addition.Please refer to Fig. 7, it shows the sketch map of the microelectromechanicdevices devices of making according to third embodiment of the invention.In order to save space, the present embodiment and the first embodiment difference part are only described at this.Shown in figure, microelectromechanicdevices devices 2 only has a little sensing module 40, and it comprises fixed part 41, moving part 42 and four elastomers 43.Except having a plurality of parallel second battery lead plate 42A and third electrode plate 42B and mass 42E, also have a plurality of the 4th parallel battery lead plate 42C and the 5th battery lead plate 42D in the moving part 42 with enhancing signal.Angle between the bearing of trend of the 4th battery lead plate 42C and the 5th battery lead plate 42D and elastomer 43 bearing of trends is respectively between 6～84 degree.With the second battery lead plate 42A and third electrode plate 43B similarly, number, development length and the arrangement mode of the 4th battery lead plate 42C and the 5th battery lead plate 42D also can be done multiple variation.For example: with the 4th battery lead plate 42C and the 5th battery lead plate 42D, its bearing of trend such as grade can be each other to rightabout or is perpendicular to one another.Arrangement mode also can be done similar variation, repeats no more at this.Contrast in the XY coordinate system of microelectromechanicdevices devices 2 encapsulation time institute's foundations of present embodiment, the bearing of trend of elastomer 43 is parallel to the X of above-mentioned coordinate system, Y reference axis.Owing to there is the angle of 6～84 degree at this moment between the X of the bearing of trend of the second battery lead plate 42A, third electrode plate 43B, the 4th battery lead plate 42C and the 5th battery lead plate 42D on the moving part 42 and XY coordinate system, the Y reference axis; Therefore towards or when deviating from X, Y change in coordinate axis direction; Capacitance between the second battery lead plate 42A, third electrode plate 43B, the 4th battery lead plate 42C and the 5th battery lead plate 42D and the first battery lead plate (not shown) is all non-vanishing and can read virtual value, so can change reading the angular range of effective capacitance value.
Secondly, the treatment circuit 50 of the microelectromechanicdevices devices 2 of present embodiment comprises that the comparing unit (not shown) is electrically connected the second battery lead plate 42A, third electrode plate 42B, the 4th battery lead plate 42C and the 5th battery lead plate 42D, as the usefulness of back end signal processing.In the present embodiment, the capacitance C that reads between corresponding first battery lead plate of comparing unit and the second battery lead plate 42A
AAnd the capacitance C that reads between first battery lead plate and the third electrode plate 42B
BDifference value produce a signal, and the capacitance C that reads between corresponding first battery lead plate and the 4th battery lead plate 42C
CAnd the capacitance C that reads between first battery lead plate and the 5th battery lead plate 42D
DDifference value produce another signal, that is:
Signal 1: work as C
B＞C
A, then export 1, otherwise export 0;
Signal 2: work as C
C＞C
D, then export 1, otherwise export 0;
With the foundation of this two signal as XY diaxon position judgment.
If when changing microelectromechanicdevices devices 2 on the position that is placed on " vertically put, put upside down " (be equivalent to turn upside down see) with Fig. 7, the distance between the second battery lead plate 42A and first battery lead plate diminishes, so capacitance C
ABecome big, and the distance between the third electrode plate 42B and first battery lead plate becomes big, so capacitance C
BDiminish.Therefore, C
A＞C
B, first signal that comparing unit produces is 0.On the other hand, because the distance between the 4th battery lead plate 42C and first battery lead plate becomes big, so capacitance C
CDiminish, and the distance between the 5th battery lead plate 42D and first battery lead plate diminishes, so capacitance C
DBecome big.Therefore, C
D＞C
C, second signal that comparing unit produces is 0.Therefore transmit the signal of (0,0).When changing and to be placed on " level put, towards a left side " or " level put, towards right " for microelectromechanicdevices devices 2, also can transmit the signal of (1,0) and (0,1) respectively.Therefore; The placement location that from this example, can find out the microelectromechanicdevices devices 2 of present embodiment is horizontal or vertical when putting in the XY coordinate system; Treatment circuit 50 can transmit really various signals represent microelectromechanicdevices devices 2 towards, as: be just to put or put upside down, or to the left or to the right; And can effectively represent the inclination angle of microelectromechanicdevices devices 2 in environment, therefore can be used as good inclinometer and use.
Other please refer to Fig. 8, and it shows the sketch map of the microelectromechanicdevices devices of making according to fourth embodiment of the invention.In order to save space, present embodiment and the 3rd embodiment difference part are only described at this.Shown in figure, the microelectromechanicdevices devices 3 of present embodiment is applied to the XY coordinate system, comprises little sensing module 60 and treatment circuit 50.Little sensing module 60 comprises fixed part 61, moving part 62 and four elastomers 63.The X of the second battery lead plate 62A, third electrode plate 62B, the 4th battery lead plate 62C and the 5th battery lead plate 62D bearing of trend and XY coordinate system, the angle number of degrees between the Y reference axis and unrestricted, and elastomeric bearing of trend S
1, S
2Spend between 6～84 with the angle of X, Y reference axis.Contrast coordinate system, elastomeric bearing of trend S in XY
1, S
2Be exemplified as 45 degree with the angle of X, Y reference axis at this.Microelectromechanicdevices devices 3 in the XY coordinate system no matter be with horizontal or vertical disposing way place and no matter be just put, put upside down, wait to the left or to the right towards the time; The capacitance that is read also can effectively be represented its inclination angle in environment, therefore also can be used as good inclinometer and uses.For instance,,, make that the distance between the second battery lead plate 62A and the first battery lead plate (not shown) becomes big because mass 42E can past-Y direction move with the position of " vertically put, just put " shown in Figure 8, so capacitance C
ADiminish, and the distance between the third electrode plate 62B and first battery lead plate diminishes, so capacitance C
BBecome big.Therefore, C
B＞C
A, first signal that comparing unit produces is 1.On the other hand, owing to the distance between the 4th battery lead plate 62C and first battery lead plate diminishes, so capacitance C
CBecome big, and the distance between the 5th battery lead plate 62D and first battery lead plate becomes big, so capacitance C
DDiminish.Therefore, C
C＞C
D, second signal that comparing unit produces is 1.Therefore transmit the signal of (1,1).
On the contrary, if when changing microelectromechanicdevices devices 3 on the position that is placed on " vertically put, put upside down " (be equivalent to turn upside down see) with Fig. 8, the distance between this moment second battery lead plate 62A and first battery lead plate diminishes, so capacitance C
ABecome big, and the distance between the third electrode plate 62B and first battery lead plate becomes big, so capacitance C
BDiminish.Therefore, C
A＞C
B, first signal that comparing unit produces is 0.On the other hand, because the distance between the 4th battery lead plate 62C and first battery lead plate becomes big, so capacitance C
CDiminish, and the distance between the 5th battery lead plate 62D and first battery lead plate diminishes, so capacitance C
DBecome big.Therefore, C
D＞C
C, second signal that comparing unit produces is 0.Therefore transmit the signal of (0,0).During with respect to " level put, towards a left side " or " level put, towards right ", also can transmit the signal of (1,0) and (0,1) respectively, repeat no more at this.
Other please refer to Fig. 9, and it shows the generalized section of the Z axle sensing module 70 of the microelectromechanicdevices devices of making according to fifth embodiment of the invention." vertically put, just put " ability that reaches " vertically put, put upside down " in order more to promote identification, arbitrary embodiment all can more increase the structure of Z axle sensing module 70 among the present invention.Shown in figure; Z axle sensing module 70 comprises two sensing electrodes 71,72; Sensing electrode 71,72 lays respectively on the different vertical heights; And sensing electrode 71, between 72 and non-perpendicular correspondence, and tilt to have an angle, therefore also can realize increasing the effect that microelectromechanicdevices devices can be detected the space measuring on the Z-direction.
Therefore, can learn from above-mentioned that microelectromechanicdevices devices of the present invention can to increase the movable scope of elastomer, can be detected the space and increase microelectromechanicdevices devices through changing the corner dimension between battery lead plate bearing of trend and the elastomer.Secondly; Be not perpendicular angular relationship between the reference coordinate axle when bearing of trend of second battery lead plate that also can be through moving part and microelectromechanicdevices devices encapsulation or change the corner dimension between the reference axis of elastomer and the application coordinate system of microelectromechanicdevices devices, and change can read the angular range of capacitance between first capacitor board and second capacitor board.
More than narration is according to a plurality of different embodiment of the present invention, and wherein various features can single or different combinations be implemented.Therefore, embodiment of the present invention is the specific embodiment of illustrating principle of the present invention, should not limit the invention to the embodiment that is disclosed.Furthermore, before narrated and accompanying drawing is merely the usefulness of the present invention's demonstration, and not limited by its limit.The variation of other element or combination be possibility all, and is not contrary in spirit of the present invention and scope.
Claims (23)
1. microelectromechanicdevices devices comprises:
Little sensing module comprises:
Fixed part comprises a plurality of first battery lead plates;
Moving part comprises:
At least one second battery lead plate is parallel to first direction, and has first distance between said first battery lead plate;
At least one third electrode plate is parallel to second direction, and has second distance between said first battery lead plate;
Mass connects said second battery lead plate and said third electrode plate; And
At least one elastomer is parallel to third direction, connects said fixed part and said mass; And
Treatment circuit is electrically connected said little sensing module, and the relevance of corresponding said first distance and said second distance transmits a signal;
Wherein, When the placement location of said microelectromechanicdevices devices changes on the position; Said second battery lead plate and said third electrode plate move; And changing said first distance and the said second distance, the angle of said first direction and said third direction and said second direction and said third direction is respectively between 6～84 degree.
2. microelectromechanicdevices devices as claimed in claim 1, wherein said third direction are parallel to the reference coordinate axle of the coordinate system of said microelectromechanicdevices devices encapsulation time institute's foundation.
3. microelectromechanicdevices devices as claimed in claim 1, the angle of wherein said first direction and said third direction are 45 degree.
4. microelectromechanicdevices devices as claimed in claim 1, wherein said second direction are the rightabout of said first direction.
5. microelectromechanicdevices devices as claimed in claim 1, wherein said second direction is perpendicular to one another with said first direction.
6. microelectromechanicdevices devices as claimed in claim 1, the quantity of wherein said first battery lead plate and said second battery lead plate is a plurality of, and a pair of these first battery lead plates are set respectively between these second battery lead plates, distance one spacing distance between these second battery lead plates.
7. microelectromechanicdevices devices as claimed in claim 1, the quantity of wherein said first battery lead plate and said second battery lead plate is a plurality of, these first battery lead plates and these second battery lead plates are arrangements interlaced with each other, distance one spacing distance between these second battery lead plates.
8. like claim 6 or 7 described microelectromechanicdevices devices, wherein said elastomeric maximum displacement is greater than 1/3 times of said spacing distance.
9. like claim 6 or 7 described microelectromechanicdevices devices, the 1/3sin θ that wherein elastomeric maximum displacement is said spacing distance times, θ represents the angle of said first direction or said second direction and said third direction.
10. microelectromechanicdevices devices as claimed in claim 1, wherein said moving part also comprise at least one the 4th battery lead plate and at least one the 5th battery lead plate, and the angle of said the 4th battery lead plate and said the 5th battery lead plate and said third direction is respectively between 6～84 degree.
11. a microelectromechanicdevices devices is applied to a coordinate system, comprising:
Little sensing module comprises:
Fixed part comprises a plurality of first battery lead plates;
Moving part comprises:
At least one second battery lead plate, and have first distance between said first battery lead plate;
At least one third electrode plate, and have second distance between said first battery lead plate;
Mass connects said second battery lead plate and said third electrode plate; And
At least one elastomer connects said fixed part and said mass, and said elastomer is parallel to a direction, and the angle of a reference axis of said direction and said coordinate system is between 6～84 degree; And
Treatment circuit is electrically connected said little sensing module, and the relevance of corresponding said first distance and said second distance transmits a signal;
Wherein, when the placement location of said microelectromechanicdevices devices changed on the position, said second battery lead plate and said third electrode plate moved, and changed said first distance and the said second distance.
12. like claim 2 or 11 described microelectromechanicdevices devices, wherein when the placement location of said microelectromechanicdevices devices be vertical pendulum when being put in the said coordinate system, said treatment circuit transmits different said signals, and to represent said microelectromechanicdevices devices be just to put or put upside down.
13. like claim 2 or 11 described microelectromechanicdevices devices, wherein when the placement location of said microelectromechanicdevices devices be horizontal pendulum when being put in the said coordinate system, said treatment circuit transmits different said signals, and to represent said microelectromechanicdevices devices be to the left or to the right.
14. like claim 4 or 11 described microelectromechanicdevices devices, it also comprises another little sensing module, said little sensing module is located on the side, and the said elastomer of said little sensing module is perpendicular to the said elastomer of said another little sensing module.
15. microelectromechanicdevices devices as claimed in claim 14, the said elastomeric bearing of trend of wherein said little sensing module be upper left to the lower right to, the said elastomeric bearing of trend of another little sensing module be upper right to the lower left to.
16. microelectromechanicdevices devices as claimed in claim 14, said second battery lead plate of wherein said little sensing module is perpendicular to said second battery lead plate of said another little sensing module.
17. like claim 1 or 11 described microelectromechanicdevices devices, wherein said treatment circuit also comprises:
Comparing unit is electrically connected said second battery lead plate and said third electrode plate, and when said first distance and the change of said second distance, said comparing unit produces said signal.
18. microelectromechanicdevices devices as claimed in claim 17, first capacitance between corresponding said first battery lead plate of wherein said signal and said second battery lead plate and the difference of second capacitance between said first battery lead plate and said second battery lead plate.
19. like claim 1 or 11 described microelectromechanicdevices devices, wherein said microelectromechanicdevices devices is accelerometer, inclinometer or switch of inclination.
20. microelectromechanicdevices devices as claimed in claim 11; The quantity system of wherein said first battery lead plate and said second battery lead plate is a plurality of; A pair of these first battery lead plates are set, distance one spacing distance between these second battery lead plates between these second battery lead plates respectively.
21. microelectromechanicdevices devices as claimed in claim 11, the quantity of wherein said first battery lead plate and said second battery lead plate is a plurality of, and these first battery lead plates and these second battery lead plates are arrangements interlaced with each other.
22. microelectromechanicdevices devices as claimed in claim 11, the angle of a reference axis of wherein said direction and said coordinate system are 45 degree.
23. like claim 1 or 11 described microelectromechanicdevices devices, it also comprises Z axle sensing module, comprises two sensing electrodes, lays respectively on the different vertical heights.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101575464A CN102807189A (en) | 2011-05-31 | 2011-05-31 | Micro-electromechanical device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101575464A CN102807189A (en) | 2011-05-31 | 2011-05-31 | Micro-electromechanical device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102807189A true CN102807189A (en) | 2012-12-05 |
Family
ID=47231081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011101575464A Pending CN102807189A (en) | 2011-05-31 | 2011-05-31 | Micro-electromechanical device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102807189A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103278149A (en) * | 2013-06-19 | 2013-09-04 | 江苏物联网研究发展中心 | Interdigital capacitor accelerometer with uniaxial folding spring beams |
| CN103879949A (en) * | 2012-12-20 | 2014-06-25 | 财团法人工业技术研究院 | Micro-electromechanical device with multiple electrodes and manufacturing method thereof |
| US9249008B2 (en) | 2012-12-20 | 2016-02-02 | Industrial Technology Research Institute | MEMS device with multiple electrodes and fabricating method thereof |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0942973A (en) * | 1995-08-01 | 1997-02-14 | Nissan Motor Co Ltd | Angle speed sensor |
| US5908986A (en) * | 1996-03-01 | 1999-06-01 | Nissan Motor Co., Ltd. | Angular velocity sensor |
| US6230563B1 (en) * | 1998-06-09 | 2001-05-15 | Integrated Micro Instruments, Inc. | Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability |
| EP2246868A1 (en) * | 2009-04-27 | 2010-11-03 | Epcos Ag | Capacitive switch with enhanced lifetime |
| CN201828268U (en) * | 2010-09-28 | 2011-05-11 | 深迪半导体(上海)有限公司 | Superminiature MEMS (micro-electromechanical system) gyro sensor |
| CN102064021A (en) * | 2009-11-17 | 2011-05-18 | 北京大学 | Comb tooth capacitor of micromachine |
-
2011
- 2011-05-31 CN CN2011101575464A patent/CN102807189A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0942973A (en) * | 1995-08-01 | 1997-02-14 | Nissan Motor Co Ltd | Angle speed sensor |
| US5908986A (en) * | 1996-03-01 | 1999-06-01 | Nissan Motor Co., Ltd. | Angular velocity sensor |
| US6230563B1 (en) * | 1998-06-09 | 2001-05-15 | Integrated Micro Instruments, Inc. | Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability |
| EP2246868A1 (en) * | 2009-04-27 | 2010-11-03 | Epcos Ag | Capacitive switch with enhanced lifetime |
| CN102064021A (en) * | 2009-11-17 | 2011-05-18 | 北京大学 | Comb tooth capacitor of micromachine |
| CN201828268U (en) * | 2010-09-28 | 2011-05-11 | 深迪半导体(上海)有限公司 | Superminiature MEMS (micro-electromechanical system) gyro sensor |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103879949A (en) * | 2012-12-20 | 2014-06-25 | 财团法人工业技术研究院 | Micro-electromechanical device with multiple electrodes and manufacturing method thereof |
| US9249008B2 (en) | 2012-12-20 | 2016-02-02 | Industrial Technology Research Institute | MEMS device with multiple electrodes and fabricating method thereof |
| CN103879949B (en) * | 2012-12-20 | 2016-05-04 | 财团法人工业技术研究院 | Micro-electromechanical device with multiple electrodes and manufacturing method thereof |
| CN103278149A (en) * | 2013-06-19 | 2013-09-04 | 江苏物联网研究发展中心 | Interdigital capacitor accelerometer with uniaxial folding spring beams |
| CN103278149B (en) * | 2013-06-19 | 2015-07-08 | 江苏物联网研究发展中心 | Interdigital capacitor accelerometer with uniaxial folding spring beams |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101639487B (en) | Triaxial acceleration sensor | |
| CN206514863U (en) | MEMS multiaxis gyroscopes and electronic equipment | |
| KR101929149B1 (en) | Inertia measurement module and three-axis accelerometer | |
| US11255873B2 (en) | Increased sensitivity z-axis accelerometer | |
| CN103900546B (en) | A kind of micro electronmechanical six axle inertial sensors | |
| CN101799480B (en) | Sensor device | |
| CN101038299A (en) | Uniaxle integrated inertia measurement device based on single mass-block | |
| CN104897147A (en) | MEMS (micro-electro-mechanical system) three-axis gyroscope | |
| US11879907B2 (en) | Acceleration sensor | |
| CN104931729B (en) | A kind of MEMS triaxial accelerometer | |
| US8701490B2 (en) | Z-axis capacitive accelerometer | |
| CN102854998A (en) | Inertia sensing apparatus | |
| CN102636162A (en) | Three-axis micro-mechanical gyroscope | |
| CN103438878A (en) | Triaxial micromechanical gyroscope | |
| CN106153241A (en) | A kind of MEMS capacitive pressure transducer | |
| CN103728467B (en) | Plane-parallel capacitor | |
| CN102807189A (en) | Micro-electromechanical device | |
| CN103675346A (en) | Accelerometer and manufacturing process thereof | |
| CN204731265U (en) | A kind of MEMS triaxial accelerometer | |
| CN204679079U (en) | A kind of MEMS three-axis gyroscope | |
| CN113917186B (en) | Acceleration sensor | |
| CN215338345U (en) | Off-plane detection gyroscope | |
| CN103675344A (en) | Accelerometer and manufacturing process thereof | |
| TW594016B (en) | Z-axis solid state gyroscope and three-axis inertial measurement apparatus | |
| CN101865934B (en) | Acceleration transducer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C05 | Deemed withdrawal (patent law before 1993) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20121205 |