CN102902010A - Waveguide grating device with uniform channel loss - Google Patents
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Abstract
The invention discloses a waveguide grating device with uniform channel loss. The waveguide grating device comprises at least one input waveguide, an input flat-plate waveguide area, a grating unit array, an output flat-plate waveguide area and an output waveguide array, wherein after being transmitted by the output flat-plate waveguide area, a central emergent light of each unit in the grating unit array is biased from the center of the output waveguide array according to a certain angle distribution function variation, so as to disperse the distribution of light peak energy output by each unit in the grating unit array on the output waveguide array; therefore, the non-uniformity of the insertion loss of each output channel is enhanced. According to the invention, without changing each component of the traditional waveguide grating device, a problem that a 3dB difference is available between a maximum value and a minimum value of the insertion loss of each output channel of the traditional waveguide grating device within a free spectral range is solved; and the waveguide grating device with the uniform channel loss, disclosed by the invention, is suitable for various waveguide materials and waveguide structures based on silicon dioxide, indium phosphide, silicon and the like and has the advantages of simplicity for making, low cost and so on.
Description
Technical field
The present invention relates to the arrayed-waveguide grating device, be specifically related to the uniform waveguide grating device of a kind of channel loss.
Background technology
Integrated light guide grating multiplexer spare mainly contains array waveguide grating (arrayed waveguide grating is called for short AWG) and etched diffraction grating (etched diffraction grating is called for short EDG).Wherein array waveguide grating is one of core devices of realizing in the optical communication system wavelength-division multiplex function owing to its compact conformation, being easy to integrated, function admirable, reliability than advantages of higher.The AWG of a N * N can transmit N different optical frequency simultaneously on its each delivery channel, greatly improved the transmission quantity of optical transmission system, so it also is to realize that light divides the core building block of poor multiplexer and a N * N optical routing system.Yet, because common AWG is at a Free Spectral Range (Free Spectral Region, abbreviation FSR) difference of the insertion loss of its central channel and edge channel is 3dB in, and in communication, usually require insertion loss heterogeneity between delivery channel at least less than 1dB, this just greatly reduces the use of the actual available number of channel of AWG and its cycle characteristics, therefore, the homogeneity of output channel channel insertion loss in a FSR of raising AWG is very important.
At present, the inhomogeneity technology of raising AWG delivery channel of having reported mainly contains: improve mould field distribution method on Waveguide array and the output waveguide zone interface and double diffraction level time synthetic method etc.The people such as J.C.Chen (J.C.Chen,
Et al" Waveguide grating routers with greater channel uniformity; " Electron. Lett, vol.33, no.23, pp.1951-1952,1997) change Waveguide array and the mould field distribution of exporting on the planar waveguide interface by the one section assistant waveguide of entrance and exit increase at Waveguide array, thereby improved the insertion loss homogeneity of each delivery channel, also increased spendable delivery channel number simultaneously.K. the people such as TaKiguchi (K. Takiguchi,
Et al" Arrayed-waveguide grating with uniform loss properties over the entire range of wavelength channels; " Opt. Lett., vol.31, no.4, pp.459-461,2006) collect the inferior energy of its adjacent two orders of diffraction by the edge channel, recycle a multi-mode interference coupler (MMI) with Energy Coupling to a delivery channel of corresponding output waveguide output, improve the inhomogeneity purpose of channel thereby reach.Y. the people such as SaKamaki (Y. Sakamaki,
Et al" Loss uniformity improvement of arrayed-waveguide grating with mode-field converters designed by wavefront matching method; " Journal of Lightwave Technology, vol. no., pp. year) utilize the wavefront matching method to introduce a series of spot-size converters at the output terminal of Waveguide array and be output into far-field distribution on the image planes to change single Waveguide array, and then reach and improve the inhomogeneity purpose of each delivery channel insertion loss.National inventing patent (ZL200510126242.6) " adopts loss fine setting waveguide to realize the method for array waveguide grating channels uniformity " to be by the end in the output waveguide of array waveguide grating and adds loss fine setting waveguide, thereby the delivery channel insertion loss of realizing array waveguide grating is even.
Yet the inhomogeneity technology of each delivery channel insertion loss of above raising array waveguide grating all is to increase extra device or increase design difficulty as cost take needs, has so not only increased the difficulty of device making technics, has also reduced other performance of device.
Summary of the invention
Deficiency for background technology, the object of the present invention is to provide the uniform waveguide grating device of a kind of channel loss, each delivery channel that has solved traditional array waveguide optical grating and etched diffraction grating has the problem of 3dB difference between insertion loss maximal value and the minimum value in a Free Spectral Range.
The objective of the invention is to be achieved through the following technical solutions:
The uniform waveguide grating device of a kind of channel loss, it comprises at least one input waveguide, input waveguide zone, raster unit array, output waveguide zone and output waveguide array, the incident light that enters from input waveguide is in the input waveguide zone) disperse and received by each unit the raster unit array afterwards, after its transmission or reflection by output waveguide zone directive output waveguide array; It is characterized in that: the center emergent light of each unit in the described raster unit array, change by certain angular spread function, after the transmission of output waveguide zone, sensing departs from the center of output waveguide array, disperse the distribution of photopeak value energy on the output waveguide array of each unit output in the grating cell array with this, improve the heteropical requirement of each delivery channel insertion loss thereby reach.
Described raster unit array is comprised of the waveguide array that a series of length arithmetic series increase progressively.
In the described waveguide array every raster unit waveguide the porch of output waveguide zone towards pointing to the output waveguide array by certain angular spread function, described angular spread function satisfies following relational expression:
Wherein,
The sensing of each raster unit waveguide and the angle of output planar waveguide zone centerline,
kExpression the
kThe waveguide of root raster unit,
γ IThe sensing of root raster unit waveguide and the angle of exporting the planar waveguide zone centerline, power exponent
nBe one greater than 0 real number.
Power exponent in the described angular spread function
nAnd angle
γThat namely each delivery channel insertion loss maximal value and minimum value is poor, is optimized gained according to the insertion loss heterogeneity to each delivery channel; Through the power exponent that obtains after optimizing
n Be 3.
Described angle
γValue between
αWith
βBetween, namely
, wherein
α IThe line of the waveguide of root raster unit and output waveguide array center and the angle of exporting the planar waveguide zone centerline,
β isThe
IThe line of the waveguide of root raster unit and output waveguide # 1 and the angle of exporting the planar waveguide zone centerline.
Described raster unit array is the etched grating that is made of a series of unit reflecting surface, again to output waveguide array at the total optical length of the entrance center of output waveguide zone becomes arithmetic series increase progressively at the entrance end points of input waveguide zone to each reflecting surface center, unit from input waveguide.
Each unit reflecting surface in the described etched grating is towards pointing to the output waveguide array so that incide the reflection ray of the light of this reflecting surface unit center from input waveguide by certain angular spread function, and described angular spread function satisfies following relational expression:
Wherein
Expression etched grating the
Individual unit reflecting surface foveal reflex light and the angle of exporting the planar waveguide zone centerline,
γ IIndividual unit reflecting surface foveal reflex light and the angle of exporting the planar waveguide zone centerline, power exponent
nBe one greater than 0 real number.
Each waveguide in the described output waveguide array towards the center of departing from the raster unit array.
The waveguide grating device of corresponding N channel, N channel occupies the whole Free Spectral Range of described waveguide grating device, and namely channel spacing is the 1/N of Free Spectral Range.
Corresponding input waveguide and the same number of waveguide grating device of output waveguide, the structural design of the input waveguide array of described input waveguide zone and the porch of raster unit array gets the structural design symmetry with the output waveguide array of output waveguide zone and the exit of raster unit array, thereby consists of the light wavelength router of N * N port.
The beneficial effect that the present invention has is:
1. the present invention can be on the basis that does not increase chip size and additional devices, each delivery channel of realizing array waveguide grating and etched diffraction grating has good insertion loss heterogeneity in a Free Spectral Range, the insertion loss maximal value of each delivery channel and the difference of minimum value are at least less than 1dB.
2. the present invention is applicable to various waveguide materials and the waveguiding structure based on silicon dioxide, indium phosphide and silicon etc., and manufacture craft is identical with the conventional waveguide grating device, has to make simple, low cost and other advantages.
Description of drawings
Fig. 1 is the structural representation of the uniform waveguide grating device of a kind of channel loss of the present invention.
Fig. 2 (a) is that the topology layout of traditional array waveguide optical grating is at the enlarged drawing of output waveguide zone.
Fig. 2 (b) is the output spectrum figure that the topology layout of employing traditional array waveguide optical grating obtains.
Fig. 3 (a) is the structural representation of array waveguide grating of the present invention.
Fig. 3 (b) is the enlarged drawing of output waveguide zone among Fig. 3 (a).
Fig. 3 (c) is that waveguide array of the present invention realizes that in traditional array waveguide optical grating layout waveguide is towards the schematic diagram of change in location.
Fig. 4 is under the different power exponents, and array waveguide grating loss heterogeneity is with the situation of change of γ.
Fig. 5 is corresponding to the excess loss with respect to the introducing of traditional array waveguide optical grating that obtains under each condition of Fig. 4.
Fig. 6 is respectively in the Waveguide array structure (correspondence of generic array waveguiding structure and the method for the invention
=0.15 He
=0.17 two kind of situation) in, the sensing of each raster unit waveguide and the angle of exporting the planar waveguide zone centerline
Situation of change.
Fig. 7 (a) adopts array wave-guide grating structure (correspondence of the present invention
=0.17 situation) the output spectrum figure that obtains.
Fig. 7 (b) adopts array wave-guide grating structure (correspondence of the present invention
=0.15 situation) the output spectrum figure that obtains.
Fig. 8 is the structural representation of traditional etched diffraction grating.
Fig. 9 (a) is the structural representation of etched diffraction grating of the present invention.
Fig. 9 (b) is that etched diffraction grating of the present invention realizes that in traditional etched diffraction grating layout unit reflecting surface foveal reflex light is towards the structural representation that changes.
Figure 10 is the light wavelength router schematic diagram of the N that adopts the method for the invention * N port.
Among the figure: 1, input waveguide, 2, the input waveguide zone, 3, the raster unit array, 3a, waveguide array, 3b, etched grating, 4, the output waveguide zone, 5, the output waveguide array, 6, Rowland circle, 7, grating circle, 8, output planar waveguide zone centerline, 9, the
IIndividual raster unit (the
IRoot raster unit waveguide or
I10, individual unit reflecting surface) ,-
IIndividual raster unit (the-
IRoot raster unit waveguide or-
IIndividual unit reflecting surface), 11, the 0th raster units (the 0th raster unit waveguide or the 0th unit reflecting surface), 12,
IThe line of individual raster unit waveguide and output waveguide # 1,13 ,-
IIndividual raster unit waveguide and output waveguide #N
ChLine, 14, the 1st raster unit waveguides and its line towards the position, 15, output waveguide #N
Ch, 16, output waveguide # 1,17, the waveguide in output waveguide array bosom, 18, the traditional array waveguide optical grating
IThe waveguide of root raster unit, 19, the traditional array waveguide optical grating-
IThe waveguide of root raster unit, 20,
IThe line of the waveguide of root raster unit and output waveguide array center, 21 ,-
IThe line at the center of the waveguide of root raster unit and output waveguide array, 22,
IThe line of reflecting surface center, individual unit and output waveguide array center, 23 ,-
IThe line of reflecting surface center, individual unit and output waveguide array center, 24,
IThe center of individual unit reflecting surface and the line of output waveguide # 1,25 ,-
IThe center of individual unit reflecting surface and output waveguide #N
ChLine.
Embodiment
The invention will be further described below in conjunction with drawings and Examples.
Fig. 1 is the principle schematic of the uniform waveguide grating device of a kind of channel loss of the present invention, the incident light that enters from input waveguide 1 is received by each unit the raster unit array 3 after input waveguide zone 2 is dispersed, after its transmission or reflection by output waveguide zone 4 directive output waveguide arrays 5, owing to interference effect so that different wave length export in different output waveguide place formation phase long coherence.Different from traditional waveguide grating device, the center emergent light of each unit in the raster unit array 3 of the present invention, change by certain angular spread function, after the transmission of output waveguide zone 4, sensing departs from the center of output waveguide array 5, disperse the distribution of photopeak value energy on output waveguide array 5 of each unit output in the grating cell array 3 with this, improve the inhomogeneity requirement of each delivery channel insertion loss thereby reach.
Because the integrated light guide grating device mainly contains array waveguide grating and etched diffraction grating, the below is will be as an example of these two kinds of devices example detailed introduces the uniform waveguide grating device of a kind of channel loss of the present invention.
The outlet of each raster unit waveguide of traditional array waveguide optical grating is all pointed to the center of output waveguide array 5 towards shown in Fig. 2 (a).Because the basic mode mould field distribution that light transmits in waveguide can be similar to Gaussian distribution, so when the transmission of light through waveguide array 3a, again by the diffraction of exporting waveguide zone 4, Rowland circle 6 at output waveguide array 5 entrance places forms and interferes at last, the maximal value of its luminous energy will appear at the center of output waveguide array 5, so in a Free Spectral Range, the output waveguide 15 at edge and 16 and the waveguide 17 in output waveguide array bosom between insertion loss the difference of 3dB is just arranged, shown in Fig. 2 (b).If require each interchannel loss homogeneity of output waveguide array 5 at least less than 1dB, the waveguide at output waveguide array 5 edges can not be used with regard to not meeting the demands so.Based on this reason, each waveguide that changes waveguide array 3a towards, make the center of every raster unit waveguide among the waveguide array 3a point to output array waveguide 5 towards the position by the angular spread function of setting, this angular spread function is as follows:
Wherein,
The sensing of each raster unit waveguide and the angle of output planar waveguide zone centerline 8,
kExpression the
kThe waveguide of root raster unit, with middle the 0th raster unit waveguide 11 of waveguide array as boundary, the raster unit waveguide that this waveguide is above
kValue is being for just, following raster unit waveguide
kValue is for negative.In the waveguide array
IThe line 12 of individual raster unit waveguide and output waveguide # 1 is β with the angle of output planar waveguide zone centerline 8, because symmetry, and the in the waveguide array-
IThe line 13 of individual raster unit waveguide and output waveguide #Nch with the angle of output planar waveguide zone centerline 8 is-β, and α is the
IThe angle of the line 20 of the waveguide of root raster unit and output waveguide array center and output planar waveguide zone centerline 8, according to symmetry, in the waveguide array the-
IThe line 21 at the center of the waveguide of root raster unit and output waveguide array with the angle of output planar waveguide zone centerline 8 is-alpha, gamma is waveguide array the
IThe sensing of root raster unit waveguide and the angle of exporting planar waveguide zone centerline 8, it is worth between α and β, namely
, power exponent n be one greater than 0 real number.
Variation that each raster unit waveguide exports towards the position among the waveguide array 3a among the present invention is on the basis of traditional array wave-guide grating structure, do not change waveguide array 3a and export the position of each waveguide core on grating circle 7, just slightly turn over an angle along this center, shown in Fig. 3 (c), of traditional array waveguide optical grating
IRoot raster unit waveguide 18 is through having become the of waveguide array 3a after the angular deflections
IRoot raster unit waveguide 9, its export center be towards output waveguide 16, in like manner of the traditional array waveguide optical grating-
I The waveguide 19 of root raster unit becomes the after over-angle changes-
IRoot raster unit waveguide 10, its export center is towards output waveguide 15, all raster unit waveguides are no longer all towards the center of output waveguide array 5 after over-angle changes, but towards a section of the Rowland circle 6 take output waveguide 15 and output waveguide 16 as the output waveguide array entrance place on border shown in Fig. 3 (b), Fig. 3 (b) is the enlarged drawing of the output waveguide zone of array waveguide grating of the present invention.
Two free parameters are arranged in relational expression (1)
And n, the good inhomogeneity acquisition of delivery channel insertion loss will be the result of these two parameter optimum optimizations in the Free Spectral Range.
Fig. 8 has provided the structural representation of traditional etched diffraction grating, and the Energy maximum value focus point of the light of each unit reflecting surface reflection is at the center of output waveguide array 5.If setting the order of diffraction of etched diffraction grating inferior is m, output waveguide array 5 transmission light wavelengths are from below to up
, the optical wavelength of the waveguide in bosom is
, so for traditional etched diffraction grating, the angle of each unit reflecting surface towards all be take wavelength as
The m order diffraction obtain to glitter to set.If be similar to the basic mode mould field that light transmits with Gaussian distribution in waveguide, the Energy maximum value that is glittered by each unit reflecting surface so will converge in the center of output waveguide array 5, and the insertion loss of edge channel and central channel just have at least difference of 3dB.Based on this reason, the angle that changes the unit reflecting surface towards, make the reflection ray that input waveguide 1 incides each reflecting surface center, unit point to output waveguide array 5 by the angular spread function of setting, this angular spread function is as follows:
Wherein
Expression etched grating 3b the
kThe sensing of individual unit reflecting surface foveal reflex light and the angle of exporting planar waveguide zone centerline 8,
kThe of expression etched grating
kIndividual reflecting surface, as separation, the above unit reflecting surface of this separation is corresponding with the central point of etched grating
kValue is being for just, below the separation
kValue is for negative.
The of expression etched grating
IThe center of individual unit reflecting surface and the line of output waveguide # 1 24 and the angle of exporting planar waveguide zone centerline 8,
The of expression etched grating-
IThe center of individual unit reflecting surface and output waveguide #N
ChThe angle of line 25 and output planar waveguide zone centerline 8,
The of expression etched grating 3b
IThe line 22 of reflecting surface center, individual unit and output waveguide array center and the angle of exporting planar waveguide zone centerline 8,
The of expression etched grating-
I The line 23 of reflecting surface center, individual unit and output waveguide array center and the angle of exporting planar waveguide zone centerline 8,
It is etched grating
IThe sensing of individual reflecting surface foveal reflex light and the angle of exporting planar waveguide zone centerline 8,
, power exponent n be one greater than 0 real number.
Fig. 9 (a) is the structural representation of etched diffraction grating of the present invention, and wherein the schematic diagram of the unit reflecting surface foveal reflex light angle rotation of etched grating is such as 9 (b).
The present invention is on the basis that does not change the etched grating structure, and each unit reflecting surface is rotated towards angle a little around the face center, shown in Fig. 9 (b), and of etched grating 3b
IIndividual unit reflecting surface rotates towards angle, makes the
IThe sensing of the light of individual unit reflecting surface foveal reflex changes output waveguide # 1 into from the center of output waveguide array 5, the optical wavelength that this unit reflecting surface glitters from
Change into
, in like manner rotate of etched grating 3b-
IIndividual unit reflecting surface towards angle, make-
IThe sensing of the light of individual unit reflecting surface foveal reflex changes output waveguide #N into from the center of output waveguide array 5
Ch, the optical wavelength of glittering from
Change into
, the light of other unit reflecting surface foveal reflex obey formula (2) towards the variation of angle thus make optical wavelength that each unit reflecting surface glitters from concentrating on
Situation be converted to dispersion
With
Between situation, the maximal value of the corresponding photopeak value energy that is glittered by each unit reflecting surface also has been distributed between output waveguide 15 and 16, thereby realizes the inhomogeneity purpose of uniform channel loss.
Since each waveguide entrance of traditional output waveguide array 5 towards all being the export center of pointing to raster unit array 3, the excess loss of bringing in order to reduce waveguide grating device of the present invention so, each output waveguide entrance towards also optimizing according to receiving maximum luminous energy.
Figure 10 is the light wavelength router schematic diagram that adopts N of the present invention * N port, input as shown in the figure the structural design full symmetric of structural design and the outlet of output waveguide zone 4 and the output waveguide array 5 that has a common boundary and grating waveguide array 3 of the entrance of waveguide zone 2 and the input waveguide 1 that has a common boundary and grating array 3, so when light is inputted from the central waveguide of output waveguide array 5, N input waveguide will receive respectively the luminous energy of each self-waveguide corresponding wavelength, and the insertion loss heterogeneity of each channel is less than 1dB, no matter that is to say that with input waveguide or output waveguide as input, finally the insertion loss heterogeneity between the luminous energy that each channel of output receives is all less than 1dB.
Then, will the invention will be further described with a concrete case:
With SiO
2Waveguide material is example, and waveguide dimensions is 6 μ m * 6 μ m, and the sandwich layer refractive index is 1.47, and cladding index is 1.46, designs one 1 * 16 array waveguide grating.Need selected according to relational expression (1)
Determine that with the value of n each raster unit waveguide departs from the angle of output planar waveguide zone centerline
According to selected waveguide material and size, calculate α=0.142, β=0.192,
Will be in this scope value.At first, set respectively power exponent n=1,2,3, allow of waveguide array
IRoot raster unit waveguide 9 towards angle
With
Between change, and other raster unit waveguide is according to the angle of formula (1)
Change, obtain under different power exponents, the loss heterogeneity with towards angle
Relation, as shown in Figure 4: power exponent n is fixedly the time, along with towards angle
Increase, the loss heterogeneity diminishes; Under angle, when the power series frequency n changed within the specific limits, the loss heterogeneity changed to first minimum and increases gradually that (among Fig. 4, power exponent n=3 is towards angle again same
For
The time, the loss heterogeneity be negative value be because the loss of central passage greater than edge gateway).Therefore in the design, can there be two schemes to select power exponent n and towards angle in the situation that take into account laying out pattern
Obtain optimum loss heterogeneity: scheme one, after the selected power exponent, realize good loss heterogeneity by what change edge waveguide towards angle; Scheme two, selected waveguide realize good loss heterogeneity by changing power exponent after angle.Fig. 5 is corresponding to the excess loss with respect to the introducing of traditional array waveguide optical grating that obtains under each condition of Fig. 4.As can be seen from Figure 4 and Figure 5 as power exponent n=3, towards angle
=0.17 o'clock, the loss heterogeneity of each channel was less than 0.4dB, and excess loss is 3dB, and edge channel loss is 3.4dB; As power exponent n=3, towards angle
=0.15 o'clock, the loss heterogeneity of each channel was less than 1dB, and excess loss is 2dB, that is to say that edge channel loss is 3dB.Although the loss of the edge channel that the latter is the poorest is the same with traditional design, the loss heterogeneity is but than the little 2dB of traditional design.Therefore with this parameter, i.e. power exponent n=3 is towards angle
=0.15 simulates array waveguide grating spectral response of the present invention, guarantees simultaneously each output waveguide received energy maximization.Fig. 6 is the angle that each the raster unit waveguide of the waveguide array 3a in this situation departs from output planar waveguide zone centerline 8
Distribution situation, in order to compare, angle corresponding to each waveguide and according to (correspondence of the present invention in the traditional array waveguide optical grating
=0.17 situation) angle corresponding to each waveguide also provides in Fig. 6.Fig. 2 (b) has provided under the design of traditional array wave-guide grating structure has the heteropical spectrogram of 3dB loss in the one FSR.Adopt the output spectrum figure that Waveguide array structure of the present invention obtains as seen from Fig. 7 (a) and Fig. 7 (b), delivery channel loss heterogeneity is respectively 0.4dB and 1dB in a free transmission rage, can see that clearly array waveguide grating of the present invention realized the inhomogeneity raising of each delivery channel insertion loss, and the waveguide optical grating by the visible corresponding N channel of output spectrum figure (N=16 in this example), a described N channel occupies the whole Free Spectral Range of described array waveguide grating, and namely channel spacing is the 1/N of the Free Spectral Range of array waveguide grating.
Above-described embodiment is used for the present invention that explains, rather than limits the invention, and in the protection domain of spirit of the present invention and claim, any modification and change to the present invention makes all fall into protection scope of the present invention.
Claims (10)
1. uniform waveguide grating device of channel loss, it comprises at least one input waveguide (1), input waveguide zone (2), raster unit array (3), output waveguide zone (4) and output waveguide array (5), the incident light that enters from input waveguide (1) is dispersed in input waveguide zone (2) and is received by each unit the raster unit array (3) afterwards, after its transmission or reflection by exporting waveguide zone (4) directive output waveguide array (5); It is characterized in that: the center emergent light of each unit in the described raster unit array (3), change by certain angular spread function, after the transmission of output waveguide zone (4), sensing departs from the center of output waveguide array (5), disperse the distribution of photopeak value energy on output waveguide array (5) of each unit output in the grating cell array (3) with this, improve the heteropical requirement of each delivery channel insertion loss thereby reach.
2. the uniform waveguide grating device of a kind of channel loss according to claim 1, it is characterized in that: described raster unit array (3) is comprised of the waveguide array (3a) that a series of length arithmetic series increase progressively.
3. the uniform waveguide grating device of a kind of channel loss according to claim 2, it is characterized in that: in the described waveguide array (3a) every raster unit waveguide the porch of output waveguide zone (4) towards pointing to output waveguide array (5) by certain angular spread function, described angular spread function satisfies following relational expression:
Wherein,
The sensing of each raster unit waveguide and the angle of output planar waveguide zone centerline (8),
kExpression the
kThe waveguide of root raster unit,
γ IThe sensing of root raster unit waveguide (9) and the angle of exporting planar waveguide zone centerline (8), power exponent
nBe one greater than 0 real number.
4. the uniform waveguide grating device of a kind of channel loss according to claim 3 is characterized in that: power exponent in the described angular spread function
nAnd angle
γThat namely each delivery channel insertion loss maximal value and minimum value is poor, is optimized gained according to the insertion loss heterogeneity to each delivery channel; Through the power exponent that obtains after optimizing
nBe 3.
5. the uniform waveguide grating device of a kind of channel loss according to claim 3 is characterized in that: described angle
γValue between
αWith
βBetween, namely
, wherein
αThe line (20) of the raster unit waveguide of I root and output waveguide array center and the angle of output planar waveguide zone centerline (8),
β isThe
IThe line of the waveguide of root raster unit and output waveguide #1 (12) and the angle of exporting planar waveguide zone centerline (8).
6. the uniform waveguide grating device of a kind of channel loss according to claim 1, it is characterized in that: described raster unit array (3) is the etched grating (3b) that is made of a series of unit reflecting surface, again to output waveguide array (5) at the total optical length of the entrance center of output waveguide zone (4) becomes arithmetic series increase progressively at the entrance end points of input waveguide zone (2) to each reflecting surface center, unit from input waveguide (1).
7. the uniform waveguide grating device of a kind of channel loss according to claim 6, it is characterized in that: each the unit reflecting surface in the described etched grating (3b) is towards pointing to output waveguide array (5) so that incide the reflection ray of the light of this reflecting surface unit center from input waveguide (1) by certain angular spread function, and described angular spread function satisfies following relational expression:
Wherein
Expression etched grating the
Individual unit reflecting surface foveal reflex light and the angle of exporting planar waveguide zone centerline (8),
γ IIndividual unit reflecting surface (9) foveal reflex light and the angle of exporting planar waveguide zone centerline (8), power exponent
nBe one greater than 0 real number.
8. the uniform waveguide grating device of a kind of channel loss according to claim 1 is characterized in that: each waveguide in the described output waveguide array (5) towards the center of departing from raster unit array (3).
9. the uniform waveguide grating device of a kind of channel loss according to claim 1, it is characterized in that: the waveguide grating device of a corresponding N channel, N channel occupies the whole Free Spectral Range of described waveguide grating device, and namely channel spacing is the 1/N of Free Spectral Range.
10. the uniform waveguide grating device of a kind of channel loss according to claim 1, it is characterized in that: the same number of waveguide grating device of corresponding input waveguide and output waveguide, the structural design of the porch of the input waveguide array of described input waveguide zone (2) and raster unit array (3) gets the structural design symmetry with the output waveguide array of output waveguide zone (4) and the exit of raster unit array (3), thereby consists of the light wavelength router of N * N port.
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| CN103472534A (en) * | 2013-09-13 | 2013-12-25 | 河南仕佳光子科技有限公司 | Method for achieving arrayed waveguide grating edge channel planarization and loss uniformity |
| CN104238008A (en) * | 2014-09-10 | 2014-12-24 | 浙江大学 | N*N array waveguide grating optical wavelength router capable of reducing frequency deviation |
| CN105547478A (en) * | 2016-01-27 | 2016-05-04 | 浙江大学 | Imaging spectrometer on the basis of etched diffraction grating |
| CN108469651A (en) * | 2018-05-22 | 2018-08-31 | 浙江大学 | Uniform arrayed-waveguide grating routers are lost |
| CN109373933A (en) * | 2018-11-20 | 2019-02-22 | 武汉光迅科技股份有限公司 | A kind of detection device and method of diffraction grating verticality |
| WO2023035338A1 (en) * | 2021-09-07 | 2023-03-16 | 中国科学院上海微系统与信息技术研究所 | Arrayed waveguide grating having uniform channels and setting method therefor |
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| CN104238008A (en) * | 2014-09-10 | 2014-12-24 | 浙江大学 | N*N array waveguide grating optical wavelength router capable of reducing frequency deviation |
| CN104238008B (en) * | 2014-09-10 | 2017-05-03 | 浙江大学 | N*N array waveguide grating optical wavelength router capable of reducing frequency deviation |
| CN105547478A (en) * | 2016-01-27 | 2016-05-04 | 浙江大学 | Imaging spectrometer on the basis of etched diffraction grating |
| CN108469651A (en) * | 2018-05-22 | 2018-08-31 | 浙江大学 | Uniform arrayed-waveguide grating routers are lost |
| CN109373933A (en) * | 2018-11-20 | 2019-02-22 | 武汉光迅科技股份有限公司 | A kind of detection device and method of diffraction grating verticality |
| CN109373933B (en) * | 2018-11-20 | 2020-07-31 | 武汉光迅科技股份有限公司 | Device and method for detecting verticality of diffraction grating |
| WO2023035338A1 (en) * | 2021-09-07 | 2023-03-16 | 中国科学院上海微系统与信息技术研究所 | Arrayed waveguide grating having uniform channels and setting method therefor |
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