CN103025042B - Radio frequency discharge device and hollow-core fiber radio frequency discharge system - Google Patents
Radio frequency discharge device and hollow-core fiber radio frequency discharge system Download PDFInfo
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- CN103025042B CN103025042B CN201210524027.1A CN201210524027A CN103025042B CN 103025042 B CN103025042 B CN 103025042B CN 201210524027 A CN201210524027 A CN 201210524027A CN 103025042 B CN103025042 B CN 103025042B
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Abstract
The invention provides a hollow-core fiber radio frequency discharge system which comprises a radio frequency discharge device and a gas distribution device. The radio frequency discharge device comprises a radio frequency power supply, a matching network, an electrode and a hollow-core fiber. The electrode comprises an inner electrode and an outer electrode. The inner electrode and the outer electrode are both hollow-core cylinder metal electrodes, and the outer diameter of the inner electrode is smaller than the inner diameter of the outer electrode. The inner electrode is located in the outer electrode, the hollow-core optical fiber is wound on the outer surface of the inner electrode, and two ends of the hollow-core optical fiber are respectively connected with the gas distribution device. When the hollow-core fiber radio frequency discharge system works, the radio frequency power supply generates an alternating electric field between the inner electrode and the outer electrode, the alternating electric field drives electrons contained in gas in the hollow-core fiber to move in reciprocating mode, and the electrons are collided with other particles in the moving process to generate a discharge plasma body. The hollow-core fiber radio frequency discharge system can generate the plasma body in radio frequency discharge mode in a solenoid tubular structure wound by the micron dimension hollow-core fiber. The hollow-core fiber radio frequency discharge system has the advantages of being simple in method, low in noise, small in energy loss, compact in structure, high in efficiency and the like.
Description
Technical field
The invention belongs to gas discharge technical field, more specifically, relate to a kind of radio frequency discharge device and hollow-core fiber radio frequency discharge system.
Background technology
Hollow-core fiber relies on its unique leaded light mechanism, has excellent performance at aspects such as long-distance transmissions and labyrinth transmission.Born structural advantage and loss performance make hollow-core fiber become the focus of every research.For the gas discharge technical research of hollow-core fiber, there is great application prospect in the field such as vapour deposition and gas laser.
Gas discharge cardinal principle is that electric field is put on to gas, makes the electronics in gas under the effect of extra electric field, obtain larger speed, and bumps with other neutral particles or charged particle in motion process, thereby carry out energy transmission and differentiation.From applying the mode of electric field, gas discharge can be divided into direct-current discharge or alternating current discharge.
Direct-current discharge adopts high-voltage DC power supply to drive.It is the important mechanisms of DC breakdown and sustain discharge that secondary electron excites, and wherein main is the process of cation excitation electron, and the cation that electron collision produces, orders about lower bombarding cathode at electric field force, causes the process of cold-cathode emitting electron.Be different from efficient thermal excitation, secondary electron excites the electronics of generation only can maintain less current density, therefore direct-current discharge puncture and to maintain voltage all higher, and the sputter effect of negative electrode is more obvious, and electrode is had to infringement to a certain degree.
Alternating current discharge, especially high-frequency discharge, adopt high-frequency alternating power drives.Electronics is vibration back and forth under the electric field action of alternation, and it has obvious enhancing during compared with direct-current discharge with number of times and ionizing power that gas particle collides.The new electronics that collision process produces is enough to sustain discharge completely, and the secondary electron excitation process directly related with electrode no longer plays a crucial role, so in high-frequency discharge, electrode can move to be put outside a region, or even electrodeless, version is various.The needed voltage amplitude of gas breakdown and sustain discharge is little while also comparing direct-current discharge because of the higher-order of oscillation of electronics.Above-mentioned advantage makes one of high frequency discharge excited important exciting technique that becomes gas discharge.
Current, in vapour deposition field, the inner film coating technology of hollow-core fiber is successfully extended to the yardstick of 50 microns.Wherein, discharge mode is high-frequency discharge, and microelectrode is wound in hollow-core fiber outside equally spacedly to produce the longitudinal electric field of alternation.The frequency of power supply output is 5 KHz, and voltage is 5 kilovolts.Visible, the voltage that maintains of electric discharge still has the space of further reduction, and because of the set-up mode of hollow-core fiber and electrode, the distance of actual overlay film is directly related with the size of device, is difficult to take into account overlay film distance and equipment miniaturization.
In the gas laser field of hollow-core fiber, to the light stimulus technology of gas in hollow-core fiber, obtain substantial progress in middle-infrared band: because of the sink effect of acetylene to 1.5 micron wavebands, it was 5 nanoseconds by pulsewidth, wavelength is that the light pulse of 1.5 microns is that the acetylene gas of number holder carry out pumping to being filled with air pressure in hollow-core fiber, and researcher has successfully obtained the laser of 3.12 microns and 3.16 microns.The absorption spectra hydrogen cyanide similar to acetylene also can obtain mid-infrared laser by this pump mode.And for short wavelength's electric excitation, as He-Ne gas, because electric discharge is difficult to form and maintain under miniature scale, and the restriction of loss, the caliber of discharge tube is still larger.And in traditional gas laser RF exciting device, the typical shape of its electrode is lath-shaped, and in order to make arcing distance longer, the actual size of electrode also needs corresponding increase, is unfavorable for miniaturization.Therefore, the core diameter that serves as the hollow-core fiber of discharging chamber still has the space of further contraction, and discharge characteristic distance also needs to be further increased.
Summary of the invention
For the defect of prior art, the object of the present invention is to provide a kind of hollow-core fiber radio frequency discharge system, be intended to solve electric discharge device compactedness deficiency in prior art, problem that launching efficiency is on the low side.
The invention provides a kind of radio frequency discharge device, comprising: radio-frequency power supply, for exporting radio-frequency power; Matching network, input is connected with described radio-frequency power supply, for realize radio-frequency power without phase-shifted transmission; Electrode, comprises interior electrode and external electrode, and described interior electrode and described external electrode are hollow cylinder metal electrode, and the external diameter of described interior electrode is less than the internal diameter of described external electrode; Described interior electrode is positioned at the inside of described external electrode, and described interior electrode is connected with the output head anode of described matching network, ground connection after described external electrode is connected with the output earth polar of described matching network; And hollow-core fiber, being wound in the outer surface of described interior electrode, the two ends of described hollow-core fiber are connected with equipped the putting of described gas respectively; When work, radio-frequency power supply produces alternating electric field between interior electrode and external electrode, and alternating electric field drives the contained electronics reciprocating motion of gas in hollow-core fiber, and electronics produces discharge plasma with other particle encounter in motion process.
Further, described radio frequency discharge device also comprises the metallic shield being connected with the output earth polar of described matching network, covers matching network, interior electrode, external electrode and hollow-core fiber, for shielded radio frequency radiation.
Further, adjust the diameter of described interior electrode and described external electrode according to the external diameter of hollow-core fiber.
Further, described electrode also comprises the delivery port and the water inlet that are positioned at described electrode two ends.
Further, between matching network and radio-frequency power supply, be connected by coaxial cable; Between matching network and electrode, be connected by copper strips.
Further, described matching network comprises: inductance, the first tunable capacitor and the second tunable capacitor; One end of inductance is connected with described radio-frequency power supply, and the other end is connected with interior electrode; One end of the first tunable capacitor is connected with one end of described inductance, the other end ground connection of the first tunable capacitor; One end of the second tunable capacitor is connected with the other end of described inductance, the other end ground connection of the second tunable capacitor.
The present invention also provides a kind of hollow-core fiber radio frequency discharge system, comprises gentle equipped the putting of radio frequency discharge device; Described radio frequency discharge device is above-mentioned radio frequency discharge device.
Further, equipped the putting of described gas comprises: the first air chamber, the second air chamber, the first barometer, the second barometer, the first vacuum valve, the 3rd barometer, gas are joined chamber, the second vacuum valve, air supply source, the 3rd vacuum valve, the 4th vacuum valve, the 5th vacuum valve, turbomolecular pump and mechanical pump; Mechanical pump is as the equipped fore pump of putting of described gas, turbomolecular pump is as the equipped rear class pump of putting of described gas, the two ends of hollow-core fiber are connected with the second air chamber with the first air chamber respectively, the first air chamber is monitored by the first barometer being attached thereto, and the first air chamber is also connected with the gas chamber of joining with the 4th vacuum valve by the first vacuum valve successively; The air pressure of the second air chamber is monitored by the second barometer being attached thereto, and gas is joined chamber and is connected with multiple air supply sources by the second vacuum valve, and the second air chamber is also connected with the gas chamber of joining with the 4th vacuum valve by the 3rd vacuum valve successively; Gas is joined the air pressure of chamber and is monitored by the 3rd barometer being attached thereto, and the gas chamber of joining is also connected with turbomolecular pump with the 5th vacuum valve by the 4th vacuum valve successively.
The present invention has overcome under miniature scale electronics because of the narrow and small difficulty that cannot puncture and maintain of discharge space.Use radio-frequency power supply to discharge, discharge stability, reliability is high, and discharge voltage is low.The mode that is different from traditional vertical drive can more effectively excite the particle in operation material.And higher rf frequency also will bring higher launching efficiency in the situation that air pressure is larger.In addition, can also eliminate and be excited the radial migration of particle and particle cluster and the concussion of discharge plasma.With novel Optical Fiber Winding mode and electrode setting mode, the distance of electric discharge and the efficiency of excitation are increased.
Brief description of the drawings
Fig. 1 is the structural representation of radio frequency discharge device in the hollow-core fiber radio frequency discharge system that provides of the embodiment of the present invention;
Fig. 2 is the axonometric drawing of the hollow-core fiber radio frequency discharge system hollow core Optical Fiber Winding electrode that provides of the embodiment of the present invention;
Fig. 3 is the cutaway view of the hollow-core fiber radio frequency discharge system hollow core Optical Fiber Winding electrode that provides of the embodiment of the present invention;
Fig. 4 is the physical circuit figure of matching network in the hollow-core fiber radio frequency discharge system that provides of the embodiment of the present invention;
Fig. 5 is the equipped structural representation of putting of gas in the hollow-core fiber radio frequency discharge system that provides of the embodiment of the present invention.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein, only in order to explain the present invention, is not intended to limit the present invention.
Hollow-core fiber radio frequency discharge system provided by the invention produces radio frequency by radio-frequency power supply and exports, then by matching network and electrode coupling in hollow-core fiber.Interelectrode distance, the diameter of internal and external electrode is poor, can carry out design modifying according to the external diameter of hollow-core fiber.The rf electric field obtaining because of coupling in hollow-core fiber makes gas ionization, and hollow-core fiber is conduction state by non-conductive state-transition.
Fig. 1 shows the structure of radio frequency discharge device in the hollow-core fiber radio frequency discharge system that the embodiment of the present invention provides, and for convenience of explanation, only shows the part relevant to the embodiment of the present invention, and details are as follows:
Hollow-core fiber radio frequency discharge system comprises gentle equipped the putting of radio frequency discharge device; Radio frequency discharge device comprises radio-frequency power supply 101, matching network 103, electrode and hollow-core fiber 106, and radio-frequency power supply 101 is for exporting radiofrequency signal; The input of matching network 103 is connected with radio-frequency power supply 101, for realize radio-frequency power without phase-shifted transmission; Electrode comprises interior electrode 104 and external electrode 105, and interior electrode 104 is hollow cylinder metal electrode with external electrode 105, and the external diameter of interior electrode 104 is less than the internal diameter of external electrode 105; Interior electrode 104 is positioned at the inside of external electrode 105, interior electrode 104 is connected with the output head anode of matching network 103, ground connection after external electrode 105 is connected with the output earth polar of matching network 103, hollow-core fiber 106 is wound in the outer surface of interior electrode 104, and the two ends of hollow-core fiber 106 are connected with equipped the putting of gas respectively; When work, radio-frequency power supply 101 produces alternating electric field between interior electrode 104 and external electrode 105, and alternating electric field drives the contained electronics reciprocating motion of gas in hollow-core fiber 106, and electronics produces discharge plasma with other particle encounter in motion process.
In the structure of the class solenoid shape that the hollow-core fiber radio frequency discharge system that the embodiment of the present invention provides can be coiled at the hollow-core fiber of micron dimension, produce plasma by the mode of radio frequency discharge.Have that method is simple, noise is low, energy loss is little, apparatus structure is compact, efficiency advantages of higher.
In embodiments of the present invention, radio frequency discharge device also comprises the metallic shield 102 being connected with the output earth polar of matching network 103, be used for covering matching network 103, interior electrode 104, external electrode 105 and hollow-core fiber 106, metallic shield 102 can shielded radio frequency radiation.
In embodiments of the present invention, as shown in Figures 2 and 3, interior electrode 104 and external electrode 105 are hollow cylinder metal electrode, and length is identical, the equal opening in two ends.The external diameter of interior electrode 104 is less than external electrode 105 hollow internal diameters.Interior electrode 104 is placed in external electrode 105 inside.Hollow-core fiber 106 is wrapped in interior electrode 104 outer surfaces, and the void size between external electrode 105 and interior electrode 104 is micron dimension.In interior electrode 104, tank 301 dispels the heat for passing into current.Interior electrode 104 two ends have the water inlet 302 and the delivery port 303 that are directly connected with tank 301, water inlet 302 is connected with external refrigeration water system by high leakproofness water pipe with delivery port 303, external refrigeration water system can be typical recirculated water cooling system, to economize on resources.Interior electrode 104 is drive electrode, and external electrode 105 is ground electrode.External electrode 105 ground connection to be to assist interior electrode 104 to complete electric discharge, and with the common shielded radio frequency radiation of metallic shield 102.For avoiding the skin effect of plain conductor, in radio frequency discharge system, each parts should connect with coaxial cable or copper strips.Between matching network and radio-frequency power supply, be connected by coaxial cable or copper strips; Between matching network and electrode, be connected by coaxial cable or copper strips.
In embodiments of the present invention, hollow-core fiber 106 serves as discharging chamber, can adjust the diameter of interior electrode 104 and external electrode 105 according to the external diameter of hollow-core fiber 106.The frequency that radio-frequency power supply 101 produces is order of megahertz, and power is adjustable.For realize power source without phase shift maximum power transfer and injection, need between electrode and radio-frequency power supply, add matching network 103.Matching network 103, electrode and hollow-core fiber 106 are placed in metallic shield.Hollow-core fiber is wound in interior electrode outer surface.Interior electrode there is any discrepancy the mouth of a river is to carry out water-cooled.
In embodiments of the present invention, the power reflection causing for removing capacitive and perceptual device or circuit parasitic parameter, answers appropriate design matching network 103 to ensure the impedance matching of radio frequency discharge device.Typical matching network 103 mostly is capacitor and inductor and forms with series hybrid parallel way.Matching network 103 can be typical π type matching network, can also be L-type matching network etc.As shown in Figure 4, π type matching network specifically comprises: inductance L, the first tunable capacitor C1 and the second tunable capacitor C2; One end of inductance L is connected with described radio-frequency power supply, and the other end is connected with interior electrode; First one end of tunable capacitor C1 and one end of described inductance L are connected, the other end ground connection of the first tunable capacitor C1; Second one end of tunable capacitor C2 and the other end of described inductance L are connected, the other end ground connection of the second tunable capacitor C2.
In embodiments of the present invention, the equipped gas that is set to hollow-core fiber electric discharge of gas mixes, the module of filling and find time, as shown in Figure 5, equipped the putting of gas comprises: the first air chamber 501, the second air chamber 502, the first barometer 503, the second barometer 504, the first vacuum valve 505, the 3rd barometer 506, gas are joined chamber 507, the second vacuum valve 508, air supply source 509, the 3rd vacuum valve 510, the 4th vacuum valve 511, the 5th vacuum valve 512, turbomolecular pump 513 and mechanical pump 514; Mechanical pump 514 is as the equipped fore pump of putting of gas, and turbomolecular pump 513 is as the equipped rear class pump of putting of described gas, and mechanical pump 514 combines with turbomolecular pump 513 the high vacuum environment that gas match system and discharging chamber are provided.The two ends of hollow-core fiber 106 are connected with the second air chamber 502 with the first air chamber 501 respectively, are convenient to inflation and bleed.The first air chamber 501 is monitored by the first barometer 503 being attached thereto, and the first air chamber 501 is also joined chamber 507 by the first vacuum valve 505 with the 4th vacuum valve 511 and gas successively and is connected; The air pressure of the second air chamber 502 is monitored by the second barometer 504 being attached thereto, gas is joined chamber 507 and is connected with multiple air supply sources 509 by the second vacuum valve 508, and the second air chamber 502 is also joined chamber 507 by the 3rd vacuum valve 510 with the 4th vacuum valve 511 and gas successively and is connected; Gas is joined the air pressure of chamber 507 and is monitored by the 3rd barometer 506 being attached thereto, and gas is joined chamber 507 and is also connected with turbomolecular pump 513 with the 5th vacuum valve 512 by the 4th vacuum valve 511 successively.Gas is joined chamber and is connected with multiple air supply sources, mixes or single gas is provided in order to the gas of different proportionings.The gas chamber of joining is equipped with barometer, for monitoring chamber internal gas pressure.For guaranteeing the air-tightness of gas match system, between each parts, should connect with high-air-tightness tracheae, should be with seal washer and the docking of interface fastener between distinct interface.Mechanical pump 514 and turbomolecular pump 513 are responsible for equipped the putting of a whole set of gas to find time.Because of hollow-core fiber 106 internal diameters and external diameter very little, so to hollow-core fiber 106 fix, inflate and the action need of bleeding completes by the first air chamber 501 and the second air chamber 502.Gas is joined the gas of chamber 507 for the different pressure of mixed on demand different proportion.All vacuum valves, for coordinating inflation and the various process of bleeding to carry out air-flow control, are controlled each gas circuit annexation, with meet bleed and inflated condition under the different needs of gas circuit connectedness, effectively reduce the waste of working gas simultaneously.
The present invention has overcome under miniature scale electronics because of the narrow and small difficulty that cannot puncture and maintain of discharge space.Use radio-frequency power supply to discharge, discharge stability, reliability is high, and discharge voltage is low.The mode that is different from traditional vertical drive can more effectively excite the particle in operation material.And higher rf frequency also will bring higher launching efficiency in the situation that air pressure is larger.In addition, can also eliminate and be excited the radial migration of particle and particle cluster and the concussion of discharge plasma.With novel Optical Fiber Winding mode and electrode setting mode, the distance of electric discharge and the efficiency of excitation are increased.
For the hollow-core fiber radio frequency discharge system that the further description embodiment of the present invention provides, in conjunction with instantiation, details are as follows now:
The hollow-core fiber 106 that is 100 microns by core diameter connects into electric discharge device.Close air supply source 509 and gas and join the second vacuum valve 508 between chamber 507, open all the other all valves.By mechanical pump 514, system is evacuated to 0.5 handkerchief, then combines turbomolecular pump 513 system is evacuated to 0.001 handkerchief.Holding one's breath and join the 4th vacuum valve 511 between chamber 507 and turbomolecular pump 513 in pass, opens air supply source 509 and gas and join the second vacuum valve 508 between chamber 507.Open helium gas source 509, join chamber 507 for gas and be first filled with 10 holder helium.Open neon source 509 again, join chamber 507 be filled with 2 holder neons for gas, obtaining He-Ne proportioning is the hybrid working gas of 5:1.Close air supply source 509 and gas and join the second vacuum valve 508 between chamber 507, close the 5th vacuum valve 512 before turbomolecular pump, close turbomolecular pump 513 and mechanical pump 514.Open gas and join the first vacuum valve 505, the 3rd vacuum valve 510 before the 4th vacuum valve 511 and two air chambers of chamber 507, for hollow-core fiber 106 is filled with after 10 holder mists, closing holds one's breath joins the first vacuum valve 505, the 3rd vacuum valve 510 before the 4th vacuum valve 511 and two air chambers of chamber 507.Open radio-frequency power supply 101, regulating power is output as 100 watts, and discharge plasma produces.
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present invention; not in order to limit the present invention, all any amendments of doing within the spirit and principles in the present invention, be equal to and replace and improvement etc., within all should being included in protection scope of the present invention.
Claims (8)
1. a radio frequency discharge device, is characterized in that, comprising:
Radio-frequency power supply, for exporting radio-frequency power;
Matching network, input is connected with described radio-frequency power supply, for realize radio-frequency power without phase-shifted transmission;
Electrode, comprises interior electrode and external electrode, and described interior electrode and described external electrode are hollow cylinder metal electrode, and the external diameter of described interior electrode is less than the internal diameter of described external electrode; Described interior electrode is positioned at the inside of described external electrode, and described interior electrode is connected with the output head anode of described matching network, ground connection after described external electrode is connected with the output earth polar of described matching network; And
Hollow-core fiber, is wound in the outer surface of described interior electrode, and the two ends of described hollow-core fiber are connected with equipped the putting of gas respectively;
When work, radio-frequency power supply produces alternating electric field between interior electrode and external electrode, and alternating electric field drives the contained electronics reciprocating motion of gas in hollow-core fiber, and electronics produces discharge plasma with other particle encounter in motion process.
2. radio frequency discharge device as claimed in claim 1, it is characterized in that, described radio frequency discharge device also comprises the metallic shield being connected with the output earth polar of described matching network, covers matching network, interior electrode, external electrode and hollow-core fiber, for shielded radio frequency radiation.
3. radio frequency discharge device as claimed in claim 1, is characterized in that, adjusts the diameter of described interior electrode and described external electrode according to the external diameter of hollow-core fiber.
4. radio frequency discharge device as claimed in claim 1, is characterized in that, described electrode also comprises the delivery port and the water inlet that are positioned at described electrode two ends.
5. radio frequency discharge device as claimed in claim 1, is characterized in that, between matching network and radio-frequency power supply, is connected by coaxial cable; Between matching network and electrode, be connected by copper strips.
6. radio frequency discharge device as claimed in claim 1, is characterized in that, described matching network comprises inductance, the first tunable capacitor and the second tunable capacitor;
One end of inductance is connected with described radio-frequency power supply, and the other end is connected with interior electrode;
One end of the first tunable capacitor is connected with one end of described inductance, the other end ground connection of the first tunable capacitor;
One end of the second tunable capacitor is connected with the other end of described inductance, the other end ground connection of the second tunable capacitor.
7. a hollow-core fiber radio frequency discharge system, comprises gentle equipped the putting of radio frequency discharge device; It is characterized in that, described radio frequency discharge device is the radio frequency discharge device described in claim 1-6 any one.
8. hollow-core fiber radio frequency discharge system as claimed in claim 7, it is characterized in that, equipped the putting of described gas comprises: the first air chamber, the second air chamber, the first barometer, the second barometer, the first vacuum valve, the 3rd barometer, gas are joined chamber, the second vacuum valve, air supply source, the 3rd vacuum valve, the 4th vacuum valve, the 5th vacuum valve, turbomolecular pump and mechanical pump;
Mechanical pump is as the equipped fore pump of putting of described gas, turbomolecular pump is as the equipped rear class pump of putting of described gas, the two ends of hollow-core fiber are connected with the second air chamber with the first air chamber respectively, the first air chamber is monitored by the first barometer being attached thereto, and the first air chamber is also connected with the gas chamber of joining with the 4th vacuum valve by the first vacuum valve successively; The air pressure of the second air chamber is monitored by the second barometer being attached thereto, and gas is joined chamber and is connected with multiple air supply sources by the second vacuum valve, and the second air chamber is also connected with the gas chamber of joining with the 4th vacuum valve by the 3rd vacuum valve successively; Gas is joined the air pressure of chamber and is monitored by the 3rd barometer being attached thereto, and the gas chamber of joining is also connected with turbomolecular pump with the 5th vacuum valve by the 4th vacuum valve successively.
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| C06 | Publication | ||
| PB01 | Publication | ||
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