CN103060777A - Coating apparatus for laser excitating chemical vapor deposition (CVD) - Google Patents
Coating apparatus for laser excitating chemical vapor deposition (CVD) Download PDFInfo
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- CN103060777A CN103060777A CN2012105718226A CN201210571822A CN103060777A CN 103060777 A CN103060777 A CN 103060777A CN 2012105718226 A CN2012105718226 A CN 2012105718226A CN 201210571822 A CN201210571822 A CN 201210571822A CN 103060777 A CN103060777 A CN 103060777A
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Abstract
The invention provides a coating apparatus for a laser excitating chemical vapor deposition (CVD), and belongs to the technical field of the chemical vapor deposition (CVD). The coating apparatus for a laser excitating CVD includes a shell body. The shell body is provided with a sealing CVD cavity, an air-jet device suitable for jetting working air and a laser-focusing device suitable for focusing the laser source on the front end of a nozzle of the air-jet device are arranged inside the CVD cavity. The materials to be coated are arranged on the front end of the nozzle of the air-jet device and opposite to that. The CVD cavity is provided inside with a mobile device which is used for driving air-jet device to move along with the surface of the materials to be coated in a parallel mode. The air-jet device includes an air-jet bracket with the nozzle; the laser focusing device includes a focusing head of the focusing laser source and a fiber optic connection tube suitable for connecting the fiber optic. The focusing head is connected with the fiber optic connection tube. The air-jet bracket is provided with an air inlet used for introducing the working air and an installing hole for the focusing head, wherein the installing hole for the focusing head is used for installing the focusing head. The coating apparatus for the laser excitating CVD has the advantages of being high in coating efficiency, not easy to damage the materials to be coated, uniform in the coating thickness and smooth in the coating surface.
Description
Technical field
The invention belongs to the chemical vapor deposition (CVD) technical field, relate in particular to a kind of laser excitation CVD filming equipment.
Background technology
Chemical vapour deposition (English: Chemical Vapor Deposition, be called for short CVD) is a kind of chemical technology that is used for producing purity height, solid-state material that performance is good.Semiconductor industry is with this technology film of growing up.Typical CVD processing procedure is that wafer (substrate) is exposed under one or more different precursors, produces the film that wish deposits at substrate surface generation chemical reaction or decomposition.Usually also can produce concomitantly different byproducts in the reaction process, but mostly understand along with air-flow is pulled away, and can not stay in the reaction chamber.
Chemical vapour deposition technique extensively uses in the plated film field, in the prior art, the type of heating of working gas generally all is the chemical reaction that use Infrared Heating gas or the mode that heats material to be coated promote gas, use the mode efficient of Infrared Heating gas low, to plate out the thickness that comes also inhomogeneous, coated surface is coarse, and heats the easy damaged material of mode of material to be coated.
Summary of the invention
The object of the invention is to overcome the defective of prior art, provide a kind of plated film efficient high, the laser excitation CVD filming equipment of fragile material to be coated not, uniform film thickness, coated surface that this equipment plates are smooth.
The present invention realizes like this, a kind of laser excitation CVD filming equipment, comprise housing, the Packed CVD cavity of this housing tool, be equipped with in the described CVD cavity for the air jet system of ejection working gas with for the laser focusing device that laser source is focused on the air jet system spray nozzle front end, the spray nozzle front end that material to be coated is positioned at described air jet system is also relative with it.
Further, be equipped with in the described CVD cavity be used to driving the running gear of described air jet system along described material surface parallel to be coated.
Further, described air jet system comprises jet with described nozzle, described laser focusing device comprises the focus head in laser focusing source and is used for plugging into the optical fiber connecting pipe of optical fiber, described focus head is connected with described optical fiber connecting pipe, described jet setting up the inlet mouth of introducing working gas and the focus head open holes that is used for installing described focus head.
Particularly, described nozzle is the finedraw shape, and described focus head open holes is located at described nozzle both sides equably side by side.
Preferably, the described jet pickup groove that is useful on fixing described optical fiber connecting pipe that sets up.
Especially, described running gear comprises the threaded screw mandrel of tool and drives the first motor that this screw mandrel rotates, and described jet offers the screw adaptive with the screw thread of described screw mandrel, and described screw mandrel is arranged in the described screw.
Further, described housing offers the opening for feed that enters described CVD cavity for described material to be coated, described housing also offers the discharge port that leaves described CVD cavity for described material to be coated, and described opening for feed and described discharge port are oppositely arranged and all are equipped with tightness system.
Further, described tightness system comprises that elasticity presses on the first cylinder of described material one side to be coated and the second tin roller that elasticity presses on described material another side to be coated.
Particularly, described tightness system also comprises the second motor that drives described the first cylinder or the rotation of described second tin roller.
Preferably, be equipped with in the described CVD cavity water-cooling heat radiating device, for detection of the film thickness monitoring device of coating film thickness on the material to be coated, be used for monitoring video monitoring apparatus, heating unit and the temperature measuring equipment of described CVD inside cavity environment.
During plated film of the present invention, laser focusing device focuses on the air jet system spray nozzle front end with laser source and forms focal zone, by the laser excitation thermal degradation, the working gas that is decomposed forms plated film owing to inertia impacts and adheres on the material surface to be coated to the working gas of nozzle ejection at focal zone.Because the present invention adopts the mode of laser focusing that working gas is added thermal excitation, its plated film efficient height, not fragile material to be coated, the uniform film thickness of plating, coated surface are smooth.
Description of drawings
Fig. 1 is the schematic perspective view of laser excitation CVD filming equipment in the embodiment of the invention;
Fig. 2 is the schematic internal view of laser excitation CVD filming equipment in the embodiment of the invention;
Fig. 3 is the sectional view of A-A among Fig. 1, i.e. laser excitation CVD filming equipment backsight sectional view in the embodiment of the invention;
Fig. 4 is the structural representation of tightness system in the embodiment of the invention;
Fig. 5 is the air jet system schematic perspective view that laser focusing device is installed in the embodiment of the invention;
Fig. 6 is the schematic perspective view of air jet system in the embodiment of the invention;
Fig. 7 is the schematic perspective view at another visual angle of air jet system in the embodiment of the invention.
Embodiment
In order to make purpose of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, is not intended to limit the present invention.
Referring to Fig. 1 and Fig. 2, the embodiment of the invention provides a kind of laser excitation CVD filming equipment, comprise housing 1, the Packed CVD cavity 11 of this housing 1 tool, be equipped with in the described CVD cavity 11 for the air jet system 2 of ejection working gas with for laser source is focused on the laser focusing device 3(of air jet system nozzle 211 front ends referring to Fig. 5), nozzle 211 front ends that material 4 to be coated is positioned at described air jet system 2 are also relative with it.Carry out needing before the plated film to discharge first the unnecessary gas (housing 1 is provided be used to the mixed gas outlet 15 of discharging unnecessary gas) in the CVD cavity 11, and then pass into shielding gas.During plated film, laser focusing device 3 focuses on air jet system nozzle 211 front ends with laser source and forms focal zone, nozzle 211 ejection working gass, working gas at focal zone by the laser excitation thermal degradation, because the gas of ejection has inertia, the working gas that then is decomposed impacts to adhere on the material surface to be coated and forms plated film.As a kind of preferred implementation of the present invention, laser source focuses on the position of distance material to be coated 4 surfaces, 0.3～1mm, the position of air jet system nozzle 211 distances material 4 surperficial 3mm to be coated, like this, it is all closer from the distance of material surface to be coated and nozzle 211 to focus on local, can take full advantage of working gas.Because the present invention adopts the mode of laser focusing that working gas is excited heating, its plated film efficient height, not fragile material to be coated, the uniform film thickness of plating, coated surface are smooth.
Referring to Fig. 2, be equipped with in the described CVD cavity 11 be used to driving the running gear 5 of described air jet system 2 along described material 4 surperficial parallels to be coated.For the larger material to be coated of width, be installed on the different positions that air jet system 2 on the running gear 5 can be sprayed on working gas material to be coated 4 surfaces.
Referring to Fig. 5-Fig. 7, described air jet system 2 comprises jet 21 with described nozzle 211, described laser focusing device 3 comprises the focus head 31 in laser focusing source and is used for plugging into the optical fiber connecting pipe 32 of optical fiber, described focus head 31 is connected with described optical fiber connecting pipe 32, and described jet 21 is provided with the inlet mouth 212 of introducing working gas and the focus head open holes 213 that is used for installing described focus head 31.Working gas passes into inlet mouth 212(referring to Fig. 2 by pneumatic tube 22).Poly-air jet system 2 is assemblied in one with laser focusing device 3, and both are relatively static, can guarantee stable nozzle 211 front ends that are positioned at of focal zone.Laser source is handed to focus head 31 by optical fiber transmission, and 31 pairs of laser sources of focus head focus on.Focus head open holes 213 can arrange its position and angle according to real needs.
Referring to Fig. 5, described nozzle 211 is the finedraw shape, described focus head open holes 213 is located at described nozzle 211 both sides equably side by side, like this, focal zone is the fillet focal zone that is positioned at nozzle 211 front ends, and working gas excites thermal degradation by nozzle 211 ejections of finedraw shape and in the fillet focal zone, because nozzle 211 is bar shaped finedraw shape, if material to be coated relatively moves with it, it is large that it sweeps away width, can greatly improve plated film efficient.
Referring to Fig. 6, described jet 21 pickup groove 214 that is provided with for fixing described optical fiber connecting pipe 32, pickup groove 214 is firm optical fiber connecting pipe further, prevents that the optical fiber connecting pipe is loosening and affects the accuracy of focus head 31 focal positions.
Referring to Fig. 2, described running gear 5 comprises the threaded screw mandrel 51 of tool and drives the first motor 52 that this screw mandrel 51 rotates, described jet 21 offers with the adaptive screw 215(of the screw thread of described screw mandrel 51 referring to Fig. 5), described screw mandrel 51 is arranged in the described screw 215.Screw mandrel 51 can order about jet 21 along the moving axially of screw mandrel 51 when rotating, screw mandrel 51 not only can be so that jet 21 quick travel, and in the moving process steadily, prevent in the coating process owing to air jet system 2 does not steadily cause plated film inhomogeneous.
Referring to Fig. 3, described housing 1 offers the opening for feed 12 that enters described CVD cavity 11 for described material 4 to be coated, described housing 1 also offers the discharge port 13 that leaves described CVD cavity 11 for described material 4 to be coated, and described opening for feed 12 is oppositely arranged and all is equipped with tightness system 6 with described discharge port 13.Long material to be coated 4 can be entered by opening for feed 12, carries out plated film through air jet system 2 tops, and along with advancing of material 4 to be coated, the complete end of plated film will be by discharge port 13 outputs.Be filled with shielding gas in the CVD cavity 11, in order to guarantee its stopping property, need at opening for feed 12 and discharge port 13 mounting sealing devices 6, simultaneously, can also prevent that introduced contaminants from entering in the CVD cavity 11.
Referring to Fig. 4, described tightness system 6 comprises that elasticity presses on the first cylinder 61 of described material to be coated 4 one sides and the second tin roller 62 that elasticity presses on described material to be coated 4 another sides.Because the first cylinder 61 is pressed on the material 4 to be coated with second tin roller 62 elasticity, when material 4 to be coated left tightness system 6, two cylinders were pressed applying mutually, prevented from having the gap and the breakseal effect between two cylinders.
Further, described tightness system 6 also comprises the second motor 63 that drives described the first cylinder 61 or 62 rotations of described second tin roller, the second motor 63 is connected with second tin roller 62 in the present embodiment, but the second motor 63 head rolls rotate, material 4 to be coated can be at the uniform velocity mobile under the driving that cylinder rotates, and can pass through the translational speed of the speed adjustment material 4 to be coated of control the second motor 63.
Particularly, water-cooling heat radiating device 7(is installed referring to Fig. 3 in the described CVD cavity 11), for detection of the film thickness monitoring device of coating film thickness on the material 4 to be coated, be used for monitoring video monitoring apparatus, heating unit and the temperature measuring equipment of described CVD inside cavity environment.Owing to can produce a large amount of heat in the coating process, if but the heat that water-cooling heat radiating device 7 Quick diffusing coating process produce is installed on the equipment, prevent excess Temperature and burn out inner components.Referring to Fig. 1, housing 1 is provided with to water-cooling heat radiating device 7 and injects the water inlet 71 of cooling fluid and the water outlet 72 of discharging cooling fluid, also is provided with on the housing 1 for the camera lens open holes 14 that video monitoring apparatus is installed.Film thickness monitoring device can feed back to principal controller with measured coating film thickness, and principal controller is made respective reaction according to measured result.Heating unit is used for the internal medium of CVD cavity 11 is heated, and heating unit can be selected infrared heating device, and certainly, the present invention also can carry out the heating of CVD cavity 11 by other means.
Device mentioned above all is connected with principal controller, and principal controller can be collected the mode of operation of respectively installing institute's feedack and each device of control.
The laser excitation CVD filming equipment working process that the embodiment of the invention provides is described below:
At first, discharge CVD cavity 11 interior unnecessary gases, pass into again desired gas and shielding gas;
Open heating unit and the internal medium of CVD cavity 11 is heated to temperature required, after temperature measuring equipment records CVD cavity 11 internal temperatures and reaches requirement, continue to pass into desired gas and shielding gas;
Finish the step post heating device CVD cavity 11 is controlled in the required temperature range of normal operation, open relative unit, material 4 to be coated is sent into CVD cavity 11 by feeding mouth 12;
During material 4 process air jet systems to be coated 2 top, working gas excites thermal degradation through focal zone after being sprayed by nozzle 211, working gas after the decomposition impacts on the surface that adheres to material 4 to be coated owing to inertia, film thickness monitoring device detects coating film thickness, with the result feedback that detects to principal controller, principal controller is according to the efflux velocity of the gauge control air jet system 2 of required plated film and the power of translational speed and laser focusing device 3, with film thickness monitoring in required thickness range;
The material of plated film can be finished the plated film of a block of material by discharge port 13 outputs;
After all plated film is finished with all material, need to extract out the gas in the CVD cavity, through processing, the atmosphere storage that can be recycled is got up in order to using again, carry out discharging again in the atmosphere after the off gas treatment for the gas that not can be recycled, to prevent pollutant atmosphere; And also need unified the processing for the solid that generates, in order to avoid pollute physical environment.
The above only is preferred embodiment of the present invention, not in order to limiting the present invention, all any modifications of doing within the spirit and principles in the present invention, is equal to and replaces or improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. laser excitation CVD filming equipment, comprise housing, the Packed CVD cavity of this housing tool, it is characterized in that: be equipped with in the described CVD cavity for the air jet system of ejection working gas with for the laser focusing device that laser source is focused on the air jet system spray nozzle front end, the spray nozzle front end that material to be coated is positioned at described air jet system is also relative with it.
2. laser excitation CVD filming equipment as claimed in claim 1 is characterized in that: be equipped with in the described CVD cavity be used to driving the running gear of described air jet system along described material surface parallel to be coated.
3. laser excitation CVD filming equipment as claimed in claim 2, it is characterized in that: described air jet system comprises jet with described nozzle, described laser focusing device comprises the focus head in laser focusing source and is used for plugging into the optical fiber connecting pipe of optical fiber, described focus head is connected with described optical fiber connecting pipe, described jet setting up the inlet mouth of introducing working gas and the focus head open holes that is used for installing described focus head.
4. laser excitation CVD filming equipment as claimed in claim 3, it is characterized in that: described nozzle is the finedraw shape, described focus head open holes is located at described nozzle both sides equably side by side.
5. laser excitation CVD filming equipment as claimed in claim 4 is characterized in that: the described jet pickup groove that is useful on fixing described optical fiber connecting pipe that sets up.
6. laser excitation CVD filming equipment as claimed in claim 3, it is characterized in that: described running gear comprises the threaded screw mandrel of tool and drives the first motor that this screw mandrel rotates, described jet offers the screw adaptive with the screw thread of described screw mandrel, and described screw mandrel is arranged in the described screw.
7. laser excitation CVD filming equipment as claimed in claim 1, it is characterized in that: described housing offers the opening for feed that enters described CVD cavity for described material to be coated, described housing also offers the discharge port that leaves described CVD cavity for described material to be coated, and described opening for feed and described discharge port are oppositely arranged and all are equipped with tightness system.
8. laser excitation CVD filming equipment as claimed in claim 7 is characterized in that: described tightness system comprises that elasticity presses on the first cylinder of described material one side to be coated and the second tin roller that elasticity presses on described material another side to be coated.
9. laser excitation CVD filming equipment as claimed in claim 8 is characterized in that: described tightness system also comprises and drives the second motor that described the first cylinder or described second tin roller rotate.
10. such as each described laser excitation CVD filming equipment of claim 1-9, it is characterized in that: water-cooling heat radiating device is installed in the described CVD cavity, for detection of the film thickness monitoring device of coating film thickness on the material to be coated, be used for monitoring video monitoring apparatus, heating unit and the temperature measuring equipment of described CVD inside cavity environment.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210571822.6A CN103060777B (en) | 2012-12-25 | 2012-12-25 | Coating apparatus for laser excitating chemical vapor deposition (CVD) |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210571822.6A CN103060777B (en) | 2012-12-25 | 2012-12-25 | Coating apparatus for laser excitating chemical vapor deposition (CVD) |
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| CN103060777A true CN103060777A (en) | 2013-04-24 |
| CN103060777B CN103060777B (en) | 2014-12-31 |
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| US20060223328A1 (en) * | 2005-04-01 | 2006-10-05 | Seiko Epson Corporation | Apparatus and method for manufacturing semiconductor device, and electronic apparatus |
| CN101016618A (en) * | 2006-02-10 | 2007-08-15 | 株式会社半导体能源研究所 | Film forming apparatus, film forming method, and manufacturing method of light emitting element |
| CN201437551U (en) * | 2009-06-08 | 2010-04-14 | 广东中环真空设备有限公司 | Continuous winding coating equipment |
| CN203128657U (en) * | 2012-12-25 | 2013-08-14 | 王奉瑾 | Laser exciting CVD (chemical vapor deposition) coating equipment |
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2012
- 2012-12-25 CN CN201210571822.6A patent/CN103060777B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5620754A (en) * | 1994-01-21 | 1997-04-15 | Qqc, Inc. | Method of treating and coating substrates |
| CN1639831A (en) * | 2001-10-15 | 2005-07-13 | 兰姆研究公司 | Tunable multi-zone gas injection system |
| CN1467802A (en) * | 2002-06-07 | 2004-01-14 | 富士胶片株式会社 | Laser anneal equipment and laser film forming method |
| US20060223328A1 (en) * | 2005-04-01 | 2006-10-05 | Seiko Epson Corporation | Apparatus and method for manufacturing semiconductor device, and electronic apparatus |
| CN101016618A (en) * | 2006-02-10 | 2007-08-15 | 株式会社半导体能源研究所 | Film forming apparatus, film forming method, and manufacturing method of light emitting element |
| CN201437551U (en) * | 2009-06-08 | 2010-04-14 | 广东中环真空设备有限公司 | Continuous winding coating equipment |
| CN203128657U (en) * | 2012-12-25 | 2013-08-14 | 王奉瑾 | Laser exciting CVD (chemical vapor deposition) coating equipment |
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Effective date of registration: 20160128 Address after: Nine road 528400 Guangdong province Zhongshan Torch Development Zone No. 6 Building 3 floor five A zone Patentee after: Zhongshan Power Technology Co., Ltd. Address before: 4 building, No. 2 Xingye Road, Torch Development Zone, Guangdong, Zhongshan, 528400 Patentee before: Wang Fengjin |
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Granted publication date: 20141231 Termination date: 20171225 |
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