CN103064431A - Gas magnetic vibration isolation platform based on air floatation zero position benchmark and laser auto-collimation measurement - Google Patents
Gas magnetic vibration isolation platform based on air floatation zero position benchmark and laser auto-collimation measurement Download PDFInfo
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- CN103064431A CN103064431A CN2012105740588A CN201210574058A CN103064431A CN 103064431 A CN103064431 A CN 103064431A CN 2012105740588 A CN2012105740588 A CN 2012105740588A CN 201210574058 A CN201210574058 A CN 201210574058A CN 103064431 A CN103064431 A CN 103064431A
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Abstract
The invention discloses a gas magnetic vibration isolation platform based on an air floatation zero position benchmark and laser auto-collimation measurement, and belongs to an ultra precise measurement and ultraprecision machining device. Three or more vibration isolators with static pressure gas magnetic structures are adopted to support a gas magnetic vibration isolation platform body and a load of the gas magnetic vibration isolation platform body. Platform six degrees of freedom gesture measurement are achieved by adopting a beam splitter prism and a photoelectric detector. The adjustments of the platform six degrees of freedom gesture by a manner that a vertical direction displacement actuator and a horizontal direction displacement actuator are arranged between the vibration isolator and the platform body are achieved. The effect of the vibration of the ground on reference beam measurement can be effectively isolated through a zero position benchmark device supported by an air floating type vibration absorber, and stability of the laser beam zero benchmark is improved. A photoelectricity detector is adopted to measure flat floating and angle drift of the reference beam, a wedge angle prism capable of adjusting relative position gaps and angles is adopted to adjust the flat floating and the angle drift of the reference beam, the reference beam correction is achieved, and vibration isolation performance of the platform can be obviously improved.
Description
Technical field
The invention belongs to ultra precise measurement and ultraprecise process unit, relate generally to a kind of gas magnetic vibration-isolating platform based on air supporting zero reference and laser auto-collimation measurement.
Background technology
In ultraprecise metrology and measurement and ultraprecise manufacture field, the platform with high quality level attitude is the basic guarantee that carries out precision measurement and large scale integrated circuit manufacturing.The application of high quality level attitude gas magnetic vibration-isolating platform is very extensive.In the relevant factory of bio-science, electron optics, precision optical machinery processing, physics and chemistry test and research thereof, the horizontal attitude control of platform can have influence on the experiments of measuring result of machinery and equipment and the usability of instrument apparatus, and can directly affect gas magnetic vibration-isolating platform to the rejection of vibration.Along with the raising of the accuracy class of ultra precise measurement instrument and ultraprecise processing and manufacturing equipment, ambient vibration is increasing on the impact of instrument and equipment.Gas magnetic vibration-isolating platform as emerging device for vibration insutation also along with the manufacturing development of exact instrument.The horizontal attitude of gas magnetic vibration-isolating platform then directly have influence on above it the precision of the instrument of putting and equipment, so being stabilized in of gas magnetic vibration-isolating platform attitude seems especially important in exact instrument manufacturing and the scientific research.Particularly for China R﹠D institution and enterprise, along with the manufacturing high speed development of VLSI (very large scale integrated circuit) and to the improving constantly of measuring accuracy and Measurement sensibility requirement, also be subject to more acid test as the stability of the vibration-isolating platform on basis.
Along with the raising that ultraprecise instrument and system require working environment, traditional passive vibration isolation mode is restricted by the factors such as vibration isolator material behavior, the rigidity of structure, can't satisfy the vibration isolation requirement to low frequency signal.For this problem, the researchist combines active Vibration Isolation with the passive vibration isolation device, reaches the purpose (Vibration Isolation Apparatus For Stage. U.S. Patent Publication No. US006327024B1) that promotes the low frequency vibration isolation performance.The method is installed in one or more vibration dampers between worktable and the pedestal, and damping device has an electric actuator, and actuator responds the signal of a position transducer, plays the active vibration isolation effect, has promoted its low frequency vibration isolation performance.The problem that the method exists is: 1) worktable does not possess attitude adjustment function; 2) the position sensor feedback signal is relative quantity, does not have the absolute zero position benchmark, can't accurately locate operating position.
In order to realize vibration isolation table stage body attitude adjustment function, the China Measures Institute has proposed the pneumatic attitude of a kind of vibration-isolating platform and has adjusted scheme (vibrating isolation foundation precise leveling system.Patent publication No.: CN 101353897A).This scheme adopts the two grad vibration isolation platform, and the precision optics vibration-isolating platform is positioned on the vibrating isolation foundation, by measuring the angle of vibration-isolating platform and surface level, air spring is carried out inflation/deflation control, reaches the purpose of adjusting the vibration-isolating platform attitude.The problem that this scheme exists is: 1) in the public technology scheme, vibration-isolating platform can't be realized accurate location; 2) by the air spring inflation/deflation is adjusted the vibration-isolating platform attitude, system response time is slow.
China Watercraft The Ninth Design ﹠ Research Institute Engineering Co., Ltd. proposes a kind of every (the microvibration-preventing basis of many exact instrument centralized arrangement, little basis that shakes.Patent publication No.: CN 200920078087.9).This scheme has designed up and down two-layer independently vibration isolation table, and T-shaped cross section vibration isolation base is adopted on the upper strata, and vibration isolation base is supported on lower floor's concrete beam by vibration isolation element, and this structure can reduce the vibrating isolation system barycenter, has improved vibration isolation efficiency.The problem of this scheme is, only adopts the passive vibration isolation mode, can't isolate low-frequency vibration signal.
Chongqing Normal University proposes a kind of precise vibration isolation device (a kind of precise vibration isolation device.Publication number: CN200920207338.9).This scheme adopts two-layer vibration insulation structure, ground floor passive vibration isolation device consists of by air spring is in parallel with magnetic rheological body, second layer vibration isolator consists of by air spring is in parallel with micro actuator, and double-layer structure arranged in series, this scheme have improved the anti-vibration performance of isolation mounting to low frequency signal.The problem of this scheme is that vibration-isolating platform does not possess attitude and adjusts function.
The common problem that existing patent of invention exists:
1. the measurement of vibration-isolating platform is relative position, do not have the absolute zero position benchmark, therefore can't accurately locate vibration-isolating platform position;
2. not to the attitude high precision control program of vibration-isolating platform, so vibration-isolating platform can't obtain high-level anti-vibration performance.
The detection scheme of gas magnetic vibration-isolating platform stage body horizontal attitude has multiple, and pinpoint method mainly is to come the detection level attitude by setting up rectangular coordinate system, measures stage body separately by the degree change in displacement.The displacement measurement of gas magnetic vibration-isolating platform stage body need adopt the optical non-contact measuring method, otherwise sensor will be given vibrating isolation system additional stiffness and damping, destroys gas magnetic vibration-isolating platform natural frequency, reduces anti-vibration performance.The method kind that the tradition non-contact optical is measured displacement have based on ccd image detect, based on the frequency discrimination of laser and amplitude discrimination measurement etc.Because the platform stage body is the change in displacement on the six-freedom degree, mutually to interfere between each degree of freedom, the image-based measuring method can't realize; And be difficult to realize high-precision measurement based on the impact that the method Stimulated Light self of laser detection is drifted about.But, to improving constantly that gas magnetic vibration-isolating platform anti-vibration performance requires, the control accuracy of stage body attitude displacement is required to reach micron dimension, and platform all is in large or the super large stage body situation.So have that the displacement control accuracy is high, anti-vibration performance is excellent, reach the above large-scale or ultra-large type gas magnetic vibration-isolating platform of VC-F rank be at present ultra precise measurement both at home and abroad and the active demand of processing and manufacturing equipment every/dampening apparatus.
Summary of the invention
Purpose of the present invention is exactly the problem that exists for above-mentioned prior art, in conjunction with actual demand, design provides a kind of gas magnetic vibration-isolating platform based on air supporting zero reference and laser auto-collimation measurement, reaches stability, the calibration of realization reference beam that improves the laser beam zero reference, the purpose that improves the platform anti-vibration performance.
Technical solution of the present invention is:
Gas magnetic vibration-isolating platform based on air supporting zero reference and laser auto-collimation measurement, described gas magnetic vibration-isolating platform stage body is configured in more than 3 or 3 on the equally distributed vibration isolator, vibration isolator is configured on the pedestal, described vibration isolator is by the vibration isolator pedestal, vibration isolator support and vibration isolator worktable consist of, the vibration isolator worktable is installed in the vibration isolator pedestal, the vibration isolator support is configured on the vibration isolator pedestal outside portion, configuration vertical deviation actuator and horizontal shift actuator between each vibration isolator and gas magnetic vibration-isolating platform stage body, described vertical deviation actuator adopts the linear pattern voice coil motor of vertical placement, the linear pattern voice coil motor mover of vertical deviation actuator and gas magnetic vibration-isolating platform stage body are connected, the linear pattern voice coil motor stator arrangement of vertical deviation actuator is on the vibration isolator bearing, described horizontal shift actuator adopts the linear pattern voice coil motor of horizontal positioned, the linear pattern voice coil motor mover of horizontal shift actuator and gas magnetic vibration-isolating platform stage body are connected, and the linear pattern voice coil motor stator arrangement of horizontal shift actuator is on the vibration isolator bearing; Measure the laser position optical path of gas magnetic vibration-isolating platform stage body six-degree-of-freedom posture by the He-Ne laser instrument, laser collimation system, the zero reference device, stage body attitude photoelectric detector, stage body attitude Amici prism consists of, stage body attitude photoelectric detector wherein, stage body attitude Amici prism is packed on the gas magnetic vibration-isolating platform stage body following side, described stage body attitude Amici prism comprises the first Amici prism, the second Amici prism, the 3rd Amici prism and the 4th Amici prism, and the first Amici prism is positioned on the rear side transmission laser light path of laser collimation system, the second Amici prism and the 3rd Amici prism lay respectively in the transmission and reflected light path of the first Amici prism, and the 4th Amici prism is positioned on the reflected light path of the 3rd Amici prism; Described stage body attitude photoelectric detector comprises the first photoelectric detector, the second photoelectric detector, the 3rd photoelectric detector and the 4th photoelectric detector, wherein the first photoelectric detector and the second photoelectric detector lay respectively in the transmission and reflected light path of the second Amici prism, and the 3rd photoelectric detector and the 4th photoelectric detector lay respectively in the transmission and reflected light path of the 4th Amici prism; Described laser collimation system by laser bundle-enlarging collimation system, convex lens, flat float with the angle float detect photoelectric detector, light beam adjusting mechanism, flat float to float with the angle detect Amici prism and consist of, wherein the light beam adjusting mechanism floats and the angle is floated and detected between the Amici prism in laser bundle-enlarging collimation system peace, convex lens float and the angle is floated and detected that Amici prism peace is floated and the angle is floated and detected between the photoelectric detector flat, and the light beam adjusting mechanism comprises angle of wedge prism, the angle of wedge prism of capable of regulating relative position spacing and angle; Described zero reference device comprises that zero reference photoelectric detector mounting platform and natural frequency are lower than the passive damper of 0.5Hz, zero reference photoelectric detector mounting platform is installed on the pedestal by passive damper, and is positioned on the downside refractive light paths of laser collimation system; By flat float that photoelectric detector and angle float that photoelectric detector consists of flat float to float with the angle detect photoelectric detector and be packed on the zero reference device zero reference photoelectric detector mounting platform, its initial position, each is flat floats, the angle is floated the photoelectric detector receiving plane direction of motion is vertical respectively with separately, and the receiving plane center overlaps with corresponding beam center.
Described stage body attitude photoelectric detector peace is floated to float with the angle and is detected photoelectric detector and comprise position sensitive detector PSD, CCD, 4 quadrant detector QPD and silicon photocell.
Described passive damper adopts air floating structure, and passive damper is the zero stiffness vibration damper.
Described vertical deviation actuator adopts the linear pattern voice coil motor of vertical placement, the linear pattern voice coil motor mover of vertical deviation actuator and gas magnetic vibration-isolating platform stage body are connected, and the linear pattern voice coil motor stator arrangement of vertical deviation actuator is on the vibration isolator bearing; The horizontal shift actuator adopts the linear pattern voice coil motor of horizontal positioned, and the linear pattern voice coil motor mover of horizontal shift actuator and gas magnetic vibration-isolating platform stage body are connected, and the linear pattern voice coil motor stator arrangement of horizontal shift actuator is on the vibration isolator bearing.
The good result of technological innovation of the present invention and generation is:
1) this device zero reference device adopts passive damper to support, the passive damper natural frequency is lower than 0.5Hz, can effectively isolate the vibration on ground to the impact that reference beam detects, greatly improve the stability of laser beam zero reference, this is one of innovative point of the present invention and outstanding advantages.
2) the present invention's flat floating with the angle of adopting two photoelectric detectors to detect respectively reference beam floated, and floats with flat the floating with the angle that the angle of wedge prism of a pair of capable of regulating relative position spacing and angle is subdued reference beam in real time, realizes the reference beam calibration; Adopt the monitoring of photoelectric detector and Amici prism implementation platform six-degree-of-freedom posture, and realized respectively every/vibration reduction platform vertical direction and the control of horizontal attitude movement high-precision by vertical deviation actuator and horizontal shift actuator, improved the platform anti-vibration performance, this is two of innovative point of the present invention and outstanding advantages.
Description of drawings:
Fig. 1 is based on the gas magnetic vibration-isolating platform three-dimensional structure synoptic diagram of air supporting zero reference and laser auto-collimation measurement;
Fig. 2 is based on the structural representation of the gas magnetic vibration-isolating platform of air supporting zero reference and laser auto-collimation measurement;
Fig. 3 is the vertical view of Fig. 2;
Fig. 4 is the laser collimation system structural representation;
Fig. 5 is zero reference apparatus structure synoptic diagram;
Fig. 6 is light beam adjusting mechanism two schemes structural representation;
Fig. 7 is that flat the floating with the angle of laser beam floated the detection principle schematic;
Fig. 8 is vibration isolator and perpendicular displacement actuator, horizontal shift actuator assembly structure synoptic diagram.
Piece number among the figure: 1-He-Ne laser instrument; The 2-laser collimation system; 3-zero reference device; 3a-zero reference photoelectric detector mounting platform; The 3b-passive damper; The 4-vibration isolator; 4a-vibration isolator pedestal; 4b-vibration isolator support; 4c-vibration isolator worktable; The 5-pedestal; 6-gas magnetic vibration-isolating platform stage body; 7-stage body attitude photoelectric detector; 7a-the first photoelectric detector; 7b-the second photoelectric detector; 7c-the 3rd photoelectric detector; 7d-the 4th photoelectric detector; 8-vertical deviation actuator; 8a-linear pattern voice coil motor mover; 8b-linear pattern voice coil motor stator; 9-horizontal shift actuator; 9a-linear pattern voice coil motor mover; 9b-linear pattern voice coil motor stator; 10-stage body attitude Amici prism; 10a-the first Amici prism; 10b-the second Amici prism; 10c-the 3rd Amici prism; 10d-the 4th Amici prism; The 11-laser bundle-enlarging collimation system; The 12-convex lens; Flat the floating with the angle of 13-floated the detection photoelectric detector; The flat photoelectric detector that floats of 13a-; 13b-floats photoelectric detector in the angle; 14-light beam adjusting mechanism; 14a-angle of wedge prism A; 14b-angle of wedge prism B; Flat the floating with the angle of 15-floated the detection Amici prism.
Embodiment
Below in conjunction with accompanying drawing embodiment of the present invention is described in further detail:
Gas magnetic vibration-isolating platform based on air supporting zero reference and laser auto-collimation measurement, described gas magnetic vibration-isolating platform stage body 6 is configured in more than 3 or 3 on the equally distributed vibration isolator 4, vibration isolator 4 is configured on the pedestal 5, described vibration isolator 4 is by vibration isolator pedestal 4a, vibration isolator support 4b and vibration isolator worktable 4c consist of, vibration isolator worktable 4c is installed in the vibration isolator pedestal 4a, vibration isolator support 4b is configured on the vibration isolator pedestal 4a outside portion, configuration vertical deviation actuator 8 and horizontal shift actuator 9 between each vibration isolator 4 and gas magnetic vibration-isolating platform stage body 6, described vertical deviation actuator 8 adopts the linear pattern voice coil motor of vertical placement, the linear pattern voice coil motor mover 8a of vertical deviation actuator 8 and gas magnetic vibration-isolating platform stage body 6 are connected, the linear pattern voice coil motor stator 8b of vertical deviation actuator 8 is configured on the vibration isolator bearing 4b, described horizontal shift actuator 9 adopts the linear pattern voice coil motor of horizontal positioned, the linear pattern voice coil motor mover 9a of horizontal shift actuator 9 and gas magnetic vibration-isolating platform stage body 6 are connected, and the linear pattern voice coil motor stator 9b of horizontal shift actuator 9 is configured on the vibration isolator bearing 4b; Measure the laser position optical path of gas magnetic vibration-isolating platform stage body 6 six-degree-of-freedom postures by He-Ne laser instrument 1, laser collimation system 2, zero reference device 3, stage body attitude photoelectric detector 7, stage body attitude Amici prism 10 consists of, stage body attitude photoelectric detector 7 wherein, stage body attitude Amici prism 10 is packed on gas magnetic vibration-isolating platform stage body 6 following sides, described stage body attitude Amici prism 10 comprises the first Amici prism 10a, the second Amici prism 10b, the 3rd Amici prism 10c and the 4th Amici prism 10d, and the first Amici prism 10a is positioned on the rear side transmission laser light path of laser collimation system 2, the second Amici prism 10b and the 3rd Amici prism 10c lay respectively in the transmission and reflected light path of the first Amici prism 10a, and the 4th Amici prism 10d is positioned on the reflected light path of the 3rd Amici prism 10c; Described stage body attitude photoelectric detector 7 comprises the first photoelectric detector 7a, the second photoelectric detector 7b, the 3rd photoelectric detector 7c and the 4th photoelectric detector 7d, wherein the first photoelectric detector 7a and the second photoelectric detector 7b lay respectively in the transmission and reflected light path of the second Amici prism 10b, and the 3rd photoelectric detector 7c and the 4th photoelectric detector 7d lay respectively in the transmission and reflected light path of the 4th Amici prism 10d; Described laser collimation system 2 by laser bundle-enlarging collimation system 11, convex lens 12, flat float with the angle float detect photoelectric detector 13, light beam adjusting mechanism 14, flat float to float with the angle detect Amici prism 15 and consist of, wherein light beam adjusting mechanism 14 floats and the angle is floated and detected between the Amici prism 15 in laser bundle-enlarging collimation system 11 peace, convex lens 12 float and the angle is floated and detected that Amici prism 15 peace are floated and the angle is floated and detected between the photoelectric detector 13 flat, and light beam adjusting mechanism 14 comprises angle of wedge prism A14a, the angle of wedge prism B14b of capable of regulating relative position spacing and angle; Described zero reference device 3 comprises that zero reference photoelectric detector mounting platform 3a and natural frequency are lower than the passive damper 3b of 0.5Hz, zero reference photoelectric detector mounting platform 3a is installed on the pedestal 5 by passive damper 3b, and is positioned on the downside refractive light paths of laser collimation system 2; By flat float that photoelectric detector 13a and angle float that photoelectric detector 13b consists of flat float to float with the angle detect photoelectric detector 13 and be packed on the zero reference photoelectric detector mounting platform 3a of zero reference device 3, its initial position, each is flat floats, photoelectric detector 13a is floated at the angle, direction of motion is vertical respectively with separately for the 13b receiving plane, and the receiving plane center overlaps with corresponding beam center.
Described stage body attitude photoelectric detector 7 peace are floated to float with the angle and are detected photoelectric detector 13 and comprise position sensitive detector PSD, CCD, 4 quadrant detector QPD and silicon photocell.
Described passive damper 3b adopts air floating structure, and passive damper 3b is the zero stiffness vibration damper.
Described vertical deviation actuator 8 adopts the linear pattern voice coil motor of vertical placement, the linear pattern voice coil motor mover 8a of vertical deviation actuator 8 and gas magnetic vibration-isolating platform stage body 6 are connected, and the linear pattern voice coil motor stator 8b of vertical deviation actuator 8 is configured on the vibration isolator bearing 4b; Described horizontal shift actuator 9 adopts the linear pattern voice coil motor of horizontal positioned, the linear pattern voice coil motor mover 9a of horizontal shift actuator 9 and gas magnetic vibration-isolating platform stage body 6 are connected, and the linear pattern voice coil motor stator 9b of horizontal shift actuator 9 is configured on the vibration isolator bearing 4b.
Workflow of the present invention is as follows:
The stage body attitude is measured by the laser position optical path, a branch of source laser that laser instrument 1 sends is at first by laser collimation system 2, by flat float to float with the angle detect Amici prism 15 and tell two bundle reference beams, float photoelectric detector 13b and receive by flat photoelectric detector 13a and the angle of floating respectively, detect flat drift value and the angle drift value of reference beam self, adjust in real time its flat floating with the angle by light beam adjusting mechanism 14 at last and float.Flat float with the angle float detect photoelectric detector 13 effectively isolation realize zero reference device 3 and stage body and the earth isolation, as the position absolute zero position benchmark of gas magnetic vibration-isolating platform stage body 6 six-freedom degrees greater than the impact that the vibration of 0.5Hz detects reference beam.Light beam is told four road light beams through stage body attitude Amici prism 10 again, finally received by stage body attitude photoelectric detector 7, realize thus the position probing of the six-freedom degree of stage body attitude, through adjusting in real time control by vertical deviation actuator 8 and horizontal shift actuator 9 realization stage body attitude six degree of freedoms again after resolving.
Float because laser beam has flat floating with the angle, so reference path has certain deviation, thus need all the time all adjust, to guarantee the accuracy of reference beam.The level that guarantees reference beam is the basis that guarantees the platform horizontal attitude.Reference beam flat floats to float by being fixed on flat on the zero reference device 3 with the angle and floats to float with the angle and detect photoelectric detector 13 and measure.Flat the floating by photoelectric detector 13a of light beam detected, and angle drift of laser is detected by the photoelectric detector 13b with convex lens 12, and suppresses by light beam adjusting mechanism 14.Light beam adjusting mechanism 14 is by adjusting angle and the relative position spacing of two angle of wedge prisms, and the angle of inhibition light beam is floated peace and floated.Determine after the reference beam that record is demarcated and flatly float that to float the output valve that detects photoelectric detector 13 with the angle be initial value, output valve is approached to the initial value of demarcating get final product.
During work, reference beam is by real time calibration, the photoelectric detector real-time sampling, adopt 12 values at every turn and remove a maximal value and a minimum value, and 10 remaining values are averaged make comparisons with initial value separately respectively, just can obtain the attitude variation of gas magnetic vibration-isolating platform stage body 6 under the ground vibration impact through processing.Control system is adjusted the stage body attitude error according to this measured value control vertical deviation actuator 8 and horizontal shift actuator 9 six degree of freedoms, make gas magnetic vibration-isolating platform stage body be in metastable state, thereby make gas magnetic vibration-isolating platform have less vibration transmissibility, realize every/vibration damping.
Claims (4)
1. the gas magnetic vibration-isolating platform of measuring based on air supporting zero reference and laser auto-collimation, it is characterized in that gas magnetic vibration-isolating platform stage body (6) is configured in more than 3 or 3 on the equally distributed vibration isolator (4), vibration isolator (4) is configured on the pedestal (5), described vibration isolator (4) is by vibration isolator pedestal (4a), vibration isolator support (4b) and vibration isolator worktable (4c) consist of, vibration isolator worktable (4c) is installed in the vibration isolator pedestal (4a), vibration isolator support (4b) is configured on vibration isolator pedestal (4a) outside portion, configuration vertical deviation actuator (8) and horizontal shift actuator (9) between each vibration isolator (4) and gas magnetic vibration-isolating platform stage body (6), described vertical deviation actuator (8) adopts the linear pattern voice coil motor of vertical placement, the linear pattern voice coil motor mover (8a) of vertical deviation actuator (8) is connected with gas magnetic vibration-isolating platform stage body (6), the linear pattern voice coil motor stator (8b) of vertical deviation actuator (8) is configured on the vibration isolator bearing (4b), described horizontal shift actuator (9) adopts the linear pattern voice coil motor of horizontal positioned, the linear pattern voice coil motor mover (9a) of horizontal shift actuator (9) is connected with gas magnetic vibration-isolating platform stage body (6), and the linear pattern voice coil motor stator (9b) of horizontal shift actuator (9) is configured on the vibration isolator bearing (4b); Measure the laser position optical path of gas magnetic vibration-isolating platform stage body (6) six-degree-of-freedom posture by He-Ne laser instrument (1), laser collimation system (2), zero reference device (3), stage body attitude photoelectric detector (7), stage body attitude Amici prism (10) consists of, stage body attitude photoelectric detector (7) wherein, stage body attitude Amici prism (10) is packed on gas magnetic vibration-isolating platform stage body (6) following side, described stage body attitude Amici prism (10) comprises the first Amici prism (10a), the second Amici prism (10b), the 3rd Amici prism (10c) and the 4th Amici prism (10d), and the first Amici prism (10a) is positioned on the rear side transmission laser light path of laser collimation system (2), the second Amici prism (10b) and the 3rd Amici prism (10c) lay respectively in the transmission and reflected light path of the first Amici prism (10a), and the 4th Amici prism (10d) is positioned on the reflected light path of the 3rd Amici prism (10c); Described stage body attitude photoelectric detector (7) comprises the first photoelectric detector (7a), the second photoelectric detector (7b), the 3rd photoelectric detector (7c) and the 4th photoelectric detector (7d), wherein the first photoelectric detector (7a) and the second photoelectric detector (7b) lay respectively in the transmission and reflected light path of the second Amici prism (10b), and the 3rd photoelectric detector (7c) and the 4th photoelectric detector (7d) lay respectively in the transmission and reflected light path of the 4th Amici prism (10d); Described laser collimation system (2) is by laser bundle-enlarging collimation system (11), convex lens (12), flat floating with the angle floated detection photoelectric detector (13), light beam adjusting mechanism (14), flat floating with the angle floated detection Amici prism (15) formation, wherein light beam adjusting mechanism (14) is positioned at that laser bundle-enlarging collimation system (11) peace is floated and the angle is floated and detected between the Amici prism (15), convex lens (12) are positioned at flat float and the angle is floated and detected that Amici prism (15) peace is floated and the angle is floated and detected between the photoelectric detector (13), and light beam adjusting mechanism (14) comprises the angle of wedge prism A (14a) of capable of regulating relative position spacing and angle, angle of wedge prism B (14b); Described zero reference device (3) comprises that zero reference photoelectric detector mounting platform (3a) and natural frequency are lower than the passive damper (3b) of 0.5Hz, zero reference photoelectric detector mounting platform (3a) is installed on the pedestal (5) by passive damper (3b), and is positioned on the downside refractive light paths of laser collimation system (2); Float detection photoelectric detector (13) with the angle and be packed on the zero reference photoelectric detector mounting platform (3a) of zero reference device (3) by flat flat floating of floating that photoelectric detector (13a) and angle float that photoelectric detector (13b) consists of, its initial position, direction of motion is vertical respectively with separately for each is flat floats, photoelectric detector is floated at the angle (13a, 13b) receiving plane, and the receiving plane center overlaps with corresponding beam center.
2. the gas magnetic vibration-isolating platform of measuring based on air supporting zero reference and laser auto-collimation according to claim 1 is characterized in that described stage body attitude photoelectric detector (7) peace floats to float with the angle to detect photoelectric detector (13) and comprise position sensitive detector PSD, CCD, 4 quadrant detector QPD and silicon photocell.
3. the gas magnetic vibration-isolating platform based on air supporting zero reference and laser auto-collimation measurement according to claim 1 it is characterized in that described passive damper (3b) adopts air floating structure, and passive damper (3b) is the zero stiffness vibration damper.
4. the gas magnetic vibration-isolating platform of measuring based on air supporting zero reference and laser auto-collimation according to claim 1, it is characterized in that described vertical deviation actuator (8) adopts the linear pattern voice coil motor of vertical placement, the linear pattern voice coil motor mover (8a) of vertical deviation actuator (8) is connected with gas magnetic vibration-isolating platform stage body (6), and the linear pattern voice coil motor stator (8b) of vertical deviation actuator (8) is configured on the vibration isolator bearing (4b); Described horizontal shift actuator (9) adopts the linear pattern voice coil motor of horizontal positioned, the linear pattern voice coil motor mover (9a) of horizontal shift actuator (9) is connected with gas magnetic vibration-isolating platform stage body (6), and the linear pattern voice coil motor stator (9b) of horizontal shift actuator (9) is configured on the vibration isolator bearing (4b).
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103292130A (en) * | 2013-05-20 | 2013-09-11 | 哈尔滨工业大学 | Multi-shaft support air floatation platform leveling method |
| WO2014187237A1 (en) * | 2013-05-20 | 2014-11-27 | 哈尔滨工业大学 | Measurement control system for multi-shaft supported air floatation platform |
| CN105157573A (en) * | 2015-10-14 | 2015-12-16 | 中国人民解放军国防科学技术大学 | High precision static pressure guide rail geometrical error holographic detection method |
| CN117072561A (en) * | 2023-10-18 | 2023-11-17 | 无锡星微科技有限公司 | Combinable multi-shaft structure and linear motion platform with same |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103292130A (en) * | 2013-05-20 | 2013-09-11 | 哈尔滨工业大学 | Multi-shaft support air floatation platform leveling method |
| WO2014187237A1 (en) * | 2013-05-20 | 2014-11-27 | 哈尔滨工业大学 | Measurement control system for multi-shaft supported air floatation platform |
| CN103292130B (en) * | 2013-05-20 | 2015-03-04 | 哈尔滨工业大学 | Multi-shaft support air floatation platform leveling method |
| CN105157573A (en) * | 2015-10-14 | 2015-12-16 | 中国人民解放军国防科学技术大学 | High precision static pressure guide rail geometrical error holographic detection method |
| CN105157573B (en) * | 2015-10-14 | 2017-08-25 | 中国人民解放军国防科学技术大学 | A kind of high-precision static pressure guide rail Form and position error holographic measuring method |
| CN117072561A (en) * | 2023-10-18 | 2023-11-17 | 无锡星微科技有限公司 | Combinable multi-shaft structure and linear motion platform with same |
| CN117072561B (en) * | 2023-10-18 | 2023-12-19 | 无锡星微科技有限公司 | Combinable multi-shaft structure and linear motion platform with same |
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| CN103064431B (en) | 2015-06-17 |
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