CN103207045B - Pressure transducer - Google Patents
Pressure transducer Download PDFInfo
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- CN103207045B CN103207045B CN201310016156.4A CN201310016156A CN103207045B CN 103207045 B CN103207045 B CN 103207045B CN 201310016156 A CN201310016156 A CN 201310016156A CN 103207045 B CN103207045 B CN 103207045B
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- pedestal
- pressure
- detecting element
- fairlead
- diaphragm
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Abstract
The present invention provides a kind of pressure transducer, and it has: pressure detecting element；Inner surface is fixed with the pedestal of this pressure detecting element；The load bearing component being oppositely disposed with this pedestal；By described pedestal and the diaphragm of this load bearing component clamping；And enclose the liquid in space between described pedestal and this diaphragm, the pressure in space between described load bearing component and described diaphragm gives described pressure detecting element by described diaphragm and described liquid transfer, in this pressure transducer, on described pedestal, inclosure hole used when enclosing described liquid and multiple fairlead are equally spaced on same circumference, this fairlead is provided with the lead member and seal member electrically connected with described pressure detecting element, and the internal diameter in this inclosure hole is less than the external diameter of this seal member.According to the pressure transducer of the present invention, by realizing simple manufacturing process, it is possible to improve assembling, manufacture efficiency, and improve resistance to pressure and air-tightness.
Description
Technical field
The present invention relates to a kind of pressure transducer, especially relate to a kind of envelope in the pressurized space being accommodated with pressure detecting element
Enter to have the liquid sealing type pressure transducer of liquid.
Background technology
In the past, it has been suggested that various pressure transducers as described below: in the pressurized space of storage pressure detecting element, enclose liquid
Body, by being applied to the pressure of pressure detecting chamber through liquid transfer to pressure detecting element, thus from pressure detecting element from outside
Export the voltage signal corresponding with external pressure.
As an example of aforesaid liquid filled type pressure transducer, in patent documentation 1, record a kind of base plate (below,
Be referred to as " pedestal "), this base plate has: inject in pressurized space carry out after liquid closing an oil sealing hand-hole (below,
Be referred to as in " inclosure hole ") and multiple sealings of being configured on the same circumference centered by sensor chip hole (under
Face, is referred to as " fairlead ").
When manufacturing this pressure transducer, it is formed with inclosure hole and multiple fairlead at pedestal, is provided with at each fairlead and draws
Line pin and the cylinder glass to the sealing that its gap fills, be fixed by heating etc. and close each respectively
Individual hole, after this external inclosure oil, is installed inclosure ball enclosing hole, is sealed it by welding etc., fixes.
Owing to the content in above-mentioned inclosure hole with the sealing operation of fairlead is slightly different, therefore, in the last stage of this sealing operation,
Need to hold enclose hole and fairlead relative to pedestal relative position relationship, pedestal is placed in required relative to fixture
On position.This be by such as formed in the bottom surface of fixture with inclosure hole or the chimeric part of fairlead, make them the most embedding
Close ground and carry out what rotation etc. realized.
Patent documentation 1: Japanese Unexamined Patent Publication 10-122997 publication
But, when being formed on fixture and enclose hole card to pedestal is placed on desired position employing relative to fixture
When the protuberance closed the structure making them be fitted together to, need to enclose with image detection the position in hole, make pedestal rotate according to its result
Deng so that inclosure hole and raised part are fitted together to, being placed in fixture by this pedestal, in this approach, mounting operation is complicated,
Productivity is extremely low.
On the other hand, even with forming the protuberance engaged with fairlead on fixture and making they chimeric structures, due to
Need to insert cylinder glass to be mounted to relative to fairlead to be sustained height, it is therefore desirable to formed on fixture with whole
The identical protuberance of shape of fairlead engaging and the quantity of this protuberance are identical with the quantity of fairlead.
Additionally, in the case of being formed with inclosure hole on the arrangement circumference of fairlead, make to be formed at fixture since it is desired that be placed on
Protuberance not chimeric with enclosing hole and make the protuberance the being formed at fixture position chimeric with whole fairleads, therefore, with formation
One identical with the above-mentioned situation that the protuberance enclosing hole engaging carries out positioning, and pedestal becomes multiple for the mounting operation of fixture
Miscellaneous.
Summary of the invention
Invent problem to be solved:
Therefore, the present invention does to solve the problems referred to above, it is intended that it provides a kind of pressure transducer, and should
Pressure transducer need not the complicated operations such as the position by image detection fairlead, and pedestal more holds for the mounting of fixture
Easily, it is possible to increase productivity.
Means for solving the above:
To achieve these goals, the pressure transducer of the present invention, it has: pressure detecting element；Inner surface is fixed with this
The pedestal of pressure detecting element；The load bearing component being oppositely disposed with this pedestal；By described pedestal and the film of this load bearing component clamping
Sheet；And enclose the liquid in space between described pedestal and this diaphragm, the space between described load bearing component and described diaphragm
Interior pressure gives described pressure detecting element, in this pressure transducer, described by described diaphragm and described liquid transfer
On pedestal, inclosure hole used when enclosing described liquid and multiple fairlead are equally spaced on same circumference, should
Fairlead is provided with the lead member and seal member electrically connected with described pressure detecting element, and the internal diameter in this inclosure hole is than being somebody's turn to do
The external diameter of seal member is little.
In preferred scheme, described seal member is to seal (English: cylinder glass hermetic seal).
According to the present invention, owing to need not consider that the position relationship in fairlead and inclosure hole just can implement the pedestal mounting for fixture
Operation, therefore, when loading pedestal, it is not necessary to carries out enclosing the image detection in hole, for pedestal is inserted into the structure of fixture
The rotation etc. of part, can simplify producing device, can improve the assembling of pressure transducer, manufacture efficiency.
Additionally, because inclosure hole and fairlead are equally spaced formed on same circumference, so the intensity of pedestal and resistance to pressure are whole
Equalization on body, therefore pedestal not cracky, it is possible to increase the resistance to pressure of pressure transducer and air-tightness.
Invention effect:
In sum, according to the present invention, make pedestal for the load of fixture required in enclosing the sealing operation of hole and fairlead
Put and become easy, therefore, it is possible to make the assembling of this pressure transducer, manufacturing operation simplify and improve productivity, and can
Improve resistance to pressure and the air-tightness of this pressure transducer.
Accompanying drawing explanation
Fig. 1 is the figure of an embodiment of the pressure transducer representing the present invention, and Fig. 1 (a) is top view, and Fig. 1 (b) is
The sectional view of the line A-A of Fig. 1 (a).
Fig. 2 is to represent to install lead-in wire pin and the flow chart of seal member on the pedestal of the pressure transducer of the present invention
Figure, upper figure is top view, and figure below is the sectional view of the line B-B of upper figure.Fig. 2 (a) represents the state of only fixture, Fig. 2
B () represents the state in all of hole being fitted together to pedestal on the protuberance of fixture.
Fig. 3 is the figure representing the then flow chart that Fig. 2 is carried out, and Fig. 3 (c) represents that lead-in wire pin is inserted into pedestal and fixture
In state, Fig. 3 (d) represents the state of seal member of being provided with in the fairlead of pedestal.
Symbol description:
1 ... pressure transducer；2 ... pressure detecting element；3 ... flow into pipe；4 ... pedestal；4a ... enclose hole；4b ... fairlead；
4c ... sealing member is (English: hermetic seal)；4d ... upper surface；4e ... and seal member (sheet, English: tablet)；5…
Load bearing component；6 ... diaphragm；7 ... pressurized space；8 ... pressurization space；9 ... spheroid；10 ... tinsel；11 ... lead-in wire pin；
11A ~ 11E ... adjust with lead-in wire pin；11F ~ 11H ... output lead-in wire pin；13 ... fixture；13a ... recess；13b ... protuberance；
13c ... pin-and-hole；14 ... weld part.
Detailed description of the invention
Below, referring to the drawings, to being used for implementing embodiments of the present invention being described in detail.
Fig. 1 represents an embodiment of the pressure transducer of the present invention, this pressure transducer 1 have pressure detecting element 2,
Pedestal 4 and the load bearing component 5 of pedestal 4 relative configuration and the diaphragm 6 that is clamped between pedestal 4 and load bearing component 5
Deng.Pressurized space 7 between pedestal 4 and diaphragm 6 is sealed with liquid (oily).
Detecting element 2 is fixed on pedestal 4 in the inside of pressurized space 7.It is formed with work between load bearing component 5 and diaphragm 6
Import the pressurization space 8 in space for pressure, the inner space flowing into pipe 3 of incoming fluid connects with pressurization space 8.
Pressure detecting element 2 for example, piezoelectric elements, this piezoelectric elements is that the one of ferroele ctric is also referred to as piezoelectricity unit
Part, this piezoelectric elements produces voltage, occurs when being applied in voltage flexible on the contrary when being applied in the power such as vibration, pressure.
Pedestal 4 is formed as lid, and the lower surface at pedestal 4 is fixed with pressure detecting element 2.On this pedestal 4, same
On one circumference and angularly (at equal intervals) it is equipped with one and encloses hole 4a and eight fairlead 4b.That is, one inclosure
Hole 4a and eight fairlead 4b is configured to the interval across 40 °.
Additionally, eight fairlead 4b are entirely formed to identical diameter, it is more smaller than fairlead 4b that inclosure hole 4a is formed as diameter
Some.The internal diameter size of fairlead 4b is configured to seal member 4e described later and can be inserted into.Additionally, enclose the interior of hole 4a
The external diameter that wall is configured to than seal member 4e is little.
The inclosure hole 4a of pedestal 4 is the hole used when liquid (oily) is injected pressurized space 7, after liquid injects,
Spheroid 9 is utilized to close its peristome by welding etc..Fairlead 4b, after inserting lead-in wire pin (lead member) 11, passes through
Sealing member 4c seals, and is confined to liquid (oily) and does not leaks.
Lead-in wire pin 11(11A ~ 11H) including: during manufacture voltage correction with etc. used adjustment lead-in wire sell 11A ~ 11E,
And according to the pressure detected by pressure detecting element 2, voltage signal is sold to the output lead-in wire of outside output etc.
11F~11H。
Each lead-in wire pin 11A ~ 11H is electrically connected with pressure detecting element 2 by tinsel in its bottom.Although additionally, omitting
Illustrating, but output lead-in wire pin 11F ~ 11H end thereon is connected with substrate, substrate is defeated with socket and outside further
Go out and connect with lead-in wire.
Load bearing component 5 is formed as the plate-like of upper opening, and the weldering of the center portion thereof tap-hole bar is fixed with inflow pipe 3.
The edge, periphery of diaphragm 6 is sandwiched between the flange part of pedestal 4 and the flange part of load bearing component 5, these three parts 4 ~ 6
The outer peripheral edge portion that the edge, periphery of diaphragm 6 is exposed by laser welding etc. carry out welding simultaneously (weld part 14), one
Body.
There is the pressure transducer 1 of said structure by making pressurization space 8 from the pressure change flowing into the fluid that pipe 3 flows into
Pressure changes, and makes diaphragm 6 deform.Made to be sealing into the liquid (oily) of the inside of pressurized space 7 by the deformation of diaphragm 6
Pressure changes, and the change of this pressure is delivered to pressure detecting element 2.The pressure detected by pressure detecting element 2 is converted into
Voltage, now, implements the voltage correction of the regulation corresponding with the characteristic of pressure transducer 1.Revised voltage signal passes through
Output lead-in wire pin 11F ~ 11H, substrate and socket send outside output lead-in wire to.
Below, with reference to Fig. 2 and Fig. 3, lead-in wire pin 11 is installed and by close to the pedestal 4 of the pressure transducer 1 of the present invention
Sealing 4c carries out the method sealed, and is described in detail.Pedestal 4 is being supplied in fixture by (a) ~ (d) expression of two figures
And implement rotate wait after, until on pedestal 4 install lead-in wire pin 11 and sealing seal member 4e till each work
Sequence.
As shown in Figure 2 (a) shows, fixture 13 has multiple recess 13a(and the most only illustrates a recess 13a), this is recessed
Portion 13a have storage pedestal 4 outer peripheral face and will not click click ring cylindrical space.On the bottom surface of this recess 13a,
The most i.e. across 40 ° of compartment of terrains difference shapes on the circumference corresponding with the circumference that inclosure hole 4a and fairlead 4b is arranged
Cheng Youjiu columned protuberance 13b, these nine protuberance 13b the most equal and have can be chimeric with enclosing hole 4a outer diameter ruler
Very little.The central part of each protuberance 13b is hollowly provided with the pin-and-hole 13c inserting lead-in wire pin 11.
Then, for fixture 13, pedestal 4 is put by upper surface 4d shown in Fig. 1 (b) down and not with confirming angle
Enter the recess 13a of fixture 13.In this stage, enclosing hole 4a and fairlead 4b may not be chimeric with the protuberance 13b of fixture 13.
Additionally, do not consider direction of rotation, the anglec of rotation etc., press the upper surface of pedestal 4 by workpiece and utilize its frictional force
Make pedestal 4 rotate, or make fixture 13 rotate in the horizontal direction or vibrate, in the recess 13a of fixture 13, force base
Seat 4 rotates.By the rotation of this pedestal 4, make the inclosure hole 4a and fairlead 4b of pedestal 4 and whole protuberances of fixture 13
13b is fitted together to (Fig. 2 (b)).In the example of Fig. 2 (b), pedestal 4 is oriented to enclose hole 4a and is positioned at left side.
In this case, the most chimeric with protuberance 13b simply enclose hole 4a, fairlead 4b keep certain interval ground to load
To protuberance 13b, the size of the recess 13a of fixture 13 is formed as the degree that the outer peripheral face click click of pedestal 4 will not be made to ring,
Therefore, only just can overall location pedestal 4 by the chimeric of inclosure hole 4a.Additionally, the position of pedestal 4 be only positioned to every
Nine protuberance 13b that the interval of 40 ° formed to be fitted together to, and be not positioned to enclose the most convex of hole 4a and fixture 13
Portion 13b is fitted together to (that is, pedestal 4 is in ad-hoc location all the time relative to fixture 13).
Then, as shown in Figure 3 (c), all of pin-and-hole 13c inserts lead-in wire pin 11, then to whole fairleads
The glass that 4b and inclosure hole 4a carries out sealing (is formed with the cylindric sheet glass in the hole inserting lead-in wire pin 11, hereinafter referred to as
For " seal member ") 4e(with reference to Fig. 3 (d)) insertion operation.That is, seal member 4e insert operation execution with
The hole that should insert is that fairlead 4b or inclosure hole 4a is unrelated, additionally, the execution of this insertion makes lead-in wire pin 11 be inserted into sealing
The inner peripheral portion of parts 4e.
Here, the internal diameter enclosing hole 4a is less than fairlead 4b, and it is little to be designed to the external diameter than seal member 4e, therefore,
Seal member 4e is not inserted into enclosing hole 4a, when seal member 4e to be inserted into inclosure hole 4a limpingly, then
Such as the insertion jig of seal member 4e can be applied the load of regulation.If load during this insertion being detected by sensor etc.
Lotus, then can determine the position enclosing hole 4a, it is possible to stops the seal member 4e insertion operation for this inclosure hole 4a.
So, just carry out the installation exercise of seal member 4e also have no relations even if whether nonrecognition is fairlead 4b, energy
Enough carry out operation (Fig. 3 (d)) just for fairlead 4b.
Consequently, it is possible to after seal member 4e completes for the insertion of all of fairlead 4e, by lead-in wire pin 11 from inserting
The inclosure hole 4a entering seal member 4e extracts, and makes the seal member 4e of fairlead 4b melt and form sealing member 4c(reference
Fig. 1).Accordingly, because fairlead 4b with lead-in wire pin 11 gap be completely enclosed, so being sealing in pressurized space 7
Liquid (oily) will not ooze out from this gap, may not flow into the side, space of storage substrate, outside output lead etc. (figure not
Illustrate).
In sum, use the pedestal 4 constituted as described above to make pressure transducer 1, then to pedestal 4, lead-in wire is being installed
Need not consider when pin 11 and seal member 4e that direction of rotation and angle thereof just can carry out the pedestal 4 mounting work for fixture 13
Industry, therefore, flow chart is simplified, and improves the assembling of pressure transducer 1, manufactures efficiency.Additionally, due to enclose
Hole 4a and fairlead 4b is equally spaced formed on same circumference, so the intensity of pedestal 4 and resistance to pressure are the most impartial,
Pedestal is difficult to breakage, therefore improves the resistance to pressure of pressure transducer 1, air-tightness.
Additionally, in the present embodiment, illustrate to be formed at the situation that recess 13a is cylindrical space of fixture 13, but,
The present invention is not limited thereto, as long as pedestal 4 is accommodated pedestal 4 outer peripheral face will not click click ring space,
Space rectangular when can also be to overlook.
Claims (2)
1. a pressure transducer,
Have: pressure detecting element；
Inner surface is fixed with the pedestal of this pressure detecting element；
The load bearing component being oppositely disposed with this pedestal；
By described pedestal and the diaphragm of this load bearing component clamping；And
Enclose the liquid in space between described pedestal and this diaphragm,
The pressure in space between described load bearing component and described diaphragm by described diaphragm and described liquid transfer to institute
State pressure detecting element,
This pressure transducer is characterised by,
On described pedestal, inclosure hole used when enclosing described liquid and multiple fairlead are equally spaced same
On circumference, this fairlead is provided with the lead member and seal member electrically connected with described pressure detecting element, this inclosure hole
Internal diameter less than the external diameter of this seal member.
Pressure transducer the most according to claim 1, it is characterised in that described seal member is the cylindrical shape sealed
Glass.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-006675 | 2012-01-17 | ||
| JP2012006675A JP5833936B2 (en) | 2012-01-17 | 2012-01-17 | Pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103207045A CN103207045A (en) | 2013-07-17 |
| CN103207045B true CN103207045B (en) | 2016-11-23 |
Family
ID=48754339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310016156.4A Active CN103207045B (en) | 2012-01-17 | 2013-01-16 | Pressure transducer |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP5833936B2 (en) |
| CN (1) | CN103207045B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106595804A (en) * | 2017-02-07 | 2017-04-26 | 浙江众邦机电科技有限公司 | Industrial sewing machine and fuel quantity detection system applied to same, and ceramic pressure sensing apparatus |
| JP7079485B2 (en) | 2018-07-10 | 2022-06-02 | 株式会社不二工機 | Pressure detection unit, its manufacturing method, pressure sensor using the pressure detection unit, and its manufacturing method |
| CN109890161B (en) * | 2019-04-12 | 2024-04-16 | 威廉姆斯(苏州)控制系统有限公司 | Sensor |
| CN112247957B (en) * | 2020-08-28 | 2022-01-25 | 浙江大学 | Multi-dimensional force sensor and self-adaptive flexible exoskeleton man-machine interface thereof |
| CN113218565A (en) * | 2021-05-27 | 2021-08-06 | 南京特敏传感技术有限公司 | Pressure measurement sensitive assembly |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5551303A (en) * | 1993-12-14 | 1996-09-03 | Envec Mess-Und Regeltechnik Gmbh + Co. | Pressure-measuring arrangement with conductive foil shielding |
| US6116092A (en) * | 1996-09-10 | 2000-09-12 | Fujikin Incorporated | Fluid pressure detector using a diaphragm |
| CN1319181A (en) * | 1999-08-05 | 2001-10-24 | 株式会社富士金 | Pressure detector mounting structure |
| CN1726385A (en) * | 2002-12-12 | 2006-01-25 | 丹福斯有限公司 | A pressure sensor |
| CN201772968U (en) * | 2010-07-15 | 2011-03-23 | 蚌埠富源电子科技有限责任公司 | Sealing base of pressure sensor |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6167537U (en) * | 1984-10-11 | 1986-05-09 | ||
| JPH10122997A (en) * | 1996-10-18 | 1998-05-15 | Nippon Seiki Co Ltd | Pressure detector |
| JP2003287472A (en) * | 2002-03-28 | 2003-10-10 | Fuji Koki Corp | Pressure sensor |
-
2012
- 2012-01-17 JP JP2012006675A patent/JP5833936B2/en active Active
-
2013
- 2013-01-16 CN CN201310016156.4A patent/CN103207045B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5551303A (en) * | 1993-12-14 | 1996-09-03 | Envec Mess-Und Regeltechnik Gmbh + Co. | Pressure-measuring arrangement with conductive foil shielding |
| US6116092A (en) * | 1996-09-10 | 2000-09-12 | Fujikin Incorporated | Fluid pressure detector using a diaphragm |
| CN1319181A (en) * | 1999-08-05 | 2001-10-24 | 株式会社富士金 | Pressure detector mounting structure |
| CN1726385A (en) * | 2002-12-12 | 2006-01-25 | 丹福斯有限公司 | A pressure sensor |
| CN201772968U (en) * | 2010-07-15 | 2011-03-23 | 蚌埠富源电子科技有限责任公司 | Sealing base of pressure sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5833936B2 (en) | 2015-12-16 |
| CN103207045A (en) | 2013-07-17 |
| JP2013148350A (en) | 2013-08-01 |
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