CN103286615A - Contactless guide method - Google Patents
Contactless guide method Download PDFInfo
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- CN103286615A CN103286615A CN2012100454804A CN201210045480A CN103286615A CN 103286615 A CN103286615 A CN 103286615A CN 2012100454804 A CN2012100454804 A CN 2012100454804A CN 201210045480 A CN201210045480 A CN 201210045480A CN 103286615 A CN103286615 A CN 103286615A
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- solenoid
- electromagnetic force
- force arrangement
- shaped
- shaped electromagnetic
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Abstract
The invention relates to a contactless guide method which is characterized by comprising the steps as follows: a contactless guide device is arranged on a machine tool moving platform, that is, a plurality of U-shaped electromagnetic devices which work cooperatively are arranged on supports on two sides of a moving part respectively, and gaps between the U-shaped electromagnetic devices in the supports and magnetic guide tracks are regulated by aid of current of electromagnetic coils of the U-shaped electromagnetic devices, so that certain gaps are maintained between the moving part and the magnetic guide tracks, and contactless guide is realized. According to the contactless guide method, contact and friction of rolling guide and sliding guide are eliminated, so that contactless guide between the moving part and the guide tracks is realized, the gaps between the moving part and the guide tracks can be monitored and regulated, and the accuracy and the stability of a moving device are improved.
Description
Technical field
the present invention relates to a kind of guidance method of moving component, particularly relate to a kind of contactless guidance method of moving component, belong to the movement control technology field, it is mainly used in the moving component that is subject to the contact guiding and affects its operation stability and accuracy.
Background technology
parts moving linearly generally adopts roll guiding and slide guide device, no matter is roll guiding or slide-and-guide, all has contact and friction.Contact friction can cause the wearing and tearing of contact component naturally, increases the power attenuation of driver part, reduces kinematic accuracy and service life, increases motion artifacts and heating, even may make the precise part distortion, thereby affects control accuracy and the stability of telecontrol equipment.
magnetic levitation technology can be accomplished contactless transmission, thoroughly eliminates friction, effectively suppresses the vibration of telecontrol equipment, without lubricated, improves stationarity and the accuracy of telecontrol equipment.At present, existing being applied in magnetic suspension train and AMB-milling Spindle feed system of the outstanding technology of electromagnetism, in prior art, application and authorized this class patent are a lot, for example have: a kind of " the commercial Application type active magnetic suspension machine tool guide linear motor feeding platform " that the Chinese invention patent application that publication number is CN 1528559 provides, include the guide rail (5) be fixedly attached on support (7), be sleeved on mobile platform (4) and linear electric motors (3) on guide rail (5), it is characterized in that linear electric motors (3) are positioned on the center line of guide rail (5), and the guide rail of its both sides (5) top and bottom arrange carrying electromagnet (2), the two sides of guide rail (5) arrange guiding electromagnet (6), carrying electromagnet (2) is fixedly connected with mobile platform (4) with guiding electromagnet (6), their middle parts all arrange displacement transducer (1), and connect a mobile platform position control system.
a kind of " magnetic suspension feeding platform of liner synchronous motor of digital control machine tool " that the Chinese invention patent application that publication number is CN 101850523A provides; comprise feeding platform and long stator linear synchronous motor; described long stator linear synchronous motor mainly comprises stator core and the mover core that can do relative motion with stator core, and it is characterized in that: described feeding platform is arranged on mover core; Be provided with Exciting Windings for Transverse Differential Protection in described mover core, in described stator core, be provided with thrust winding; Be provided with current vortex sensor on described feeding platform; Be provided with long grating sensor in described stator core; Described Exciting Windings for Transverse Differential Protection and current vortex sensor are connected to magnetic suspension control system; Described thrust winding and long grating sensor are connected to feed control system.
publication number is CN?
the Chinese invention patent application of 101972933A provides a kind of " the accurate heavy machine tool magnetic suspension movement platform that the bilinear synchronous motor drives ", comprises motion platform and two long stator linear synchronous motors and control system thereof.Described linear synchronized motor mainly comprises stator core and the mover core that can do relative motion with stator core.It is characterized in that: described motion platform is arranged on mover core; Be provided with Exciting Windings for Transverse Differential Protection in described stator core, in described mover core, be provided with thrust winding; Be provided with current vortex sensor on described motion platform; Be provided with long grating sensor on described pedestal; Described Exciting Windings for Transverse Differential Protection and current vortex sensor are connected to magnetic suspension control system; Described thrust winding and long grating sensor are connected to the platform kinetic control system.
what technique scheme provided is that it is integrated suspending with linear drive motor, and the structure of device and control will take into account the functional requirement of two aspects, and performance and the precision that sometimes will sacrifice a side, be difficult to realize global optimization.
Summary of the invention
purpose of the present invention just is to overcome the prior art above shortcomings, has proposed a kind of contactless guidance method of moving component, to overcome the drawback of existing contact guiding, guarantees stability and the accuracy of moving component and device.Simultaneously, overcome the problem that prior art is difficult to realize global optimization.
this contactless guidance method that the present invention provides, be characterized in: contactless guider is set on machine tool motion platform, the U-shaped electromagnetic force arrangement of a plurality of collaborative works is set respectively in the support of moving component both sides, the size of the solenoid current by regulating each U-shaped electromagnetic force arrangement, and then the gap between U-shaped electromagnetic force arrangement and magnetic track in the regulation and control support, make between moving component and magnetic track to keep certain interval to realize the non-contact type guiding.
in order to strengthen the reasonability of such scheme, the present invention also comprises following additional technical feature.
the gap data that gap between described U-shaped electromagnetic force arrangement and magnetic track provides according to the pitch sensors of collaborative work is regulated by the solenoid current that changes U-shaped electromagnetic force arrangement.
the control method in the gap between each U-shaped electromagnetic force arrangement and magnetic track is.
the first U-shaped electromagnetic force arrangement and the second U-shaped electromagnetic force arrangement are collaborative work one group, the spacing δ monitored according to pitch sensors 3
1
the spacing δ monitored with pitch sensors 9
2
if, δ
1
-δ
2
>δ
0
, increase the electric current of solenoid 2 and reduce the electric current of solenoid 8, work as δ
1
-δ
2
<0.2 δ
0
the time, keep solenoid 2 and solenoid 8 electric currents constant; If δ
2
-δ
1
>δ
0
, reduce the electric current of solenoid 2 and the electric current of increase solenoid 8, work as δ
2
-δ
1
<0.2 δ
0
the time, keep solenoid 2 and solenoid 8 electric currents constant.
the 3rd U-shaped electromagnetic force arrangement and the 4th U-shaped electromagnetic force arrangement are collaborative work one group, the spacing δ monitored according to pitch sensors 6
3
the spacing δ monitored with pitch sensors 16
4
if, δ
3
-δ
4
>δ
0
, increase the electric current of solenoid 5 and reduce the electric current of solenoid 15, work as δ
3
-δ
4
<0.2 δ
0
the time, keep solenoid 5 and solenoid 15 electric currents constant; If δ
4
-δ
3
>δ
0
, reduce the electric current of solenoid 5 and the electric current of increase solenoid 15, work as δ
4
-δ
3
<0.2 δ
0
the time, keep solenoid 5 and solenoid 15 electric currents constant.
the 5th U-shaped electromagnetic force arrangement and the 6th U-shaped electromagnetic force arrangement are collaborative work one group, the spacing δ monitored according to pitch sensors 13
5
the spacing δ monitored with pitch sensors 19
6
if, δ
5
-δ
6
>δ
0
, increase the electric current of solenoid 12 and reduce the electric current of solenoid 18, work as δ
5
-δ
6
<0.2 δ
0
the time, keep solenoid 12 and solenoid 18 electric currents constant; If δ
6
-δ
5
>δ
0
, reduce the electric current of solenoid 12 and the electric current of increase solenoid 18, work as δ
6
-δ
5
<0.2 δ
0
the time, keep solenoid 12 and solenoid 18 electric currents constant.
the contactless guider adopted in the present invention, include machine tool motion platform, moving component, workbench, the first U-shaped electromagnetic force arrangement, the second U-shaped electromagnetic force arrangement, the 3rd U-shaped electromagnetic force arrangement, the 4th U-shaped electromagnetic force arrangement, the 5th U-shaped electromagnetic force arrangement, the 6th U-shaped electromagnetic force arrangement, the first T-shaped magnetic track, the second T-shaped magnetic track, the first support, the second support, wherein the first support, the second support is trench structure, the first U-shaped electromagnetic force arrangement, the second U-shaped electromagnetic force arrangement, the 3rd U-shaped electromagnetic force arrangement is arranged on the both sides madial wall and bottom interior wall of the first support trench structure that is positioned at moving component one side, the 4th U-shaped electromagnetic force arrangement, the 5th U-shaped electromagnetic force arrangement, the 6th U-shaped electromagnetic force arrangement is arranged on the both sides madial wall and bottom interior wall of the second support trench structure that is positioned at the moving component opposite side, the first support, the bottom outer wall of the second support is connected with moving component respectively, with the supporting movement parts not with the first T-shaped magnetic track, the second T-shaped magnetic track contact, the first T-shaped magnetic track, the second T-shaped magnetic track is parallel to be fixed on the lathe bed of lathe, the first support, U-shaped electromagnetic force arrangement on the second support respectively with the first T-shaped magnetic track, leave gap between the second T-shaped magnetic track.
u-shaped electromagnetic force arrangement in described contactless guider consists of U-shaped iron core, solenoid and pitch sensors, and wherein solenoid is wrapped on U-shaped iron core, and pitch sensors is arranged on by the top of the T-shaped magnetic track of U-shaped sensing unshakable in one's determination.
u-shaped electromagnetic force arrangement in described contactless guider is two one group of collaborative works, the the first U-shaped electromagnetic force arrangement U1 and the second U-shaped electromagnetic force arrangement U2 that wherein are positioned on the both sides madial wall of the first support 10 trench structures are one group, the 5th U-shaped electromagnetic force arrangement U5 and the 6th U-shaped electromagnetic force arrangement U6 that are positioned on the both sides madial wall of the second support 20 trench structures are one group, the 4th U-shaped electromagnetic force arrangement U4 that is positioned at the 3rd U-shaped electromagnetic force arrangement U3 on the bottom interior wall of the first support 10 trench structures and is positioned on the bottom interior wall of the second support 20 trench structures is one group.
described contactless guider, the electric current of the solenoid of each U-shaped electromagnetic force arrangement is adjustable, in order to regulate the electromagnetic force size, and then regulates and controls the gap between U-shaped electromagnetic force arrangement and magnetic track.
described contactless guider, a pitch sensors of each U-shaped electromagnetic force arrangement configuration, to detect the gap between U-shaped electromagnetic force arrangement and magnetic track.
described contactless guider, the gap between U-shaped electromagnetic force arrangement and magnetic track, be that the gap data that the pitch sensors according to collaborative work provides is regulated by the solenoid current size that changes U-shaped electromagnetic force arrangement.
compared with prior art, beneficial effect of the present invention is: cancelled contacting and friction of roll guiding and slide-and-guide, realized contactless guiding between moving component and guide rail.
beneficial effect of the present invention also is embodied in: the gap between moving component and guide rail can be monitored in real time and be regulated and controled, and improves accuracy and the stability of telecontrol equipment.
The accompanying drawing explanation
fig. 1 is embodiments of the invention-contactless guider basic structure schematic diagram.
fig. 2 is that embodiments of the invention-contactless guider is for the Grinder bench schematic diagram.
number in the figure is described as follows.
u1, U2, U3, U4, U5, U6 are the first U-shaped electromagnetic force arrangement～the 6th U-shaped electromagnetic force arrangement, 1,4,7,11,14,17 is U-shaped iron core, 2,5,8,12,15,18 is solenoid, 3,6,9,13,16,19 is pitch sensors, 10 is the first support, 20 is the second support, and 21 is the first T-shaped magnetic track, and 22 is the second T-shaped magnetic track, 23 is moving component, 24 is workbench, and 25 is grinder bed, and 26 is table control handle, 27 is the vertical feed handle, 28 is cutting abrasive wheel, and 29 is driving box, and 30 is the traverse feed handle.
The specific embodiment
further narrate content of the present invention below in conjunction with Figure of description and embodiment.
one embodiment of the present of invention are a kind of machine tool motion platform, and its basic structure as shown in Figure 1, includes machine tool motion platform, moving component 23, workbench 24, the first U-shaped electromagnetic force arrangement U1, the second U-shaped electromagnetic force arrangement U2, the 3rd U-shaped electromagnetic force arrangement U3, the 4th U-shaped electromagnetic force arrangement U4, the 5th U-shaped electromagnetic force arrangement U5, the 6th U-shaped electromagnetic force arrangement U6, the first T-shaped magnetic track 21, the second T-shaped magnetic track 22, the first support 10, the second support 20, wherein the first support 10, the second support 20 is trench structure, the first U-shaped electromagnetic force arrangement U1, the second U-shaped electromagnetic force arrangement U2, the 3rd U-shaped electromagnetic force arrangement U3 is arranged on the both sides madial wall and bottom interior wall of the first support 10 trench structures that are positioned at moving component 23 1 sides, the 4th U-shaped electromagnetic force arrangement U4, the 5th U-shaped electromagnetic force arrangement U5, the 6th U-shaped electromagnetic force arrangement U6 is arranged on the both sides madial wall and bottom interior wall of the second support 20 trench structures that are positioned at moving component 23 opposite sides, the first support 10, the bottom outer wall of the second support 20 is connected with moving component 23 respectively, with supporting movement parts 23 not with the first T-shaped magnetic track 21, the second T-shaped magnetic track 22 contacts, the first T-shaped magnetic track 21, the second T-shaped magnetic track 22 is parallel to be fixed on the lathe bed 25 of lathe, the first support 10, U-shaped electromagnetic force arrangement on the second support 20 respectively with the first T-shaped magnetic track 21, leave gap between the second T-shaped magnetic track 22.
the installation situation when embodiment of the present invention is used for Grinder bench as shown in Figure 2.
one embodiment of the present of invention are a kind of machine tool motion platform, and its cross section structure as shown in Figure 1.
the first U-shaped electromagnetic force arrangement U1 is comprised of U-shaped unshakable in one's determination 1, solenoid 2 and pitch sensors 3, regulates the size of current of solenoid 2 and can adjust the spacing δ between the first U-shaped electromagnetic force arrangement U1 and the first magnetic track 21
1
, the spacing δ between pitch sensors 3 monitoring the first U-shaped electromagnetic force arrangement U1 and the first magnetic track 21
1
.
the second U-shaped electromagnetic force arrangement U2 is comprised of U-shaped unshakable in one's determination 7, solenoid 8 and pitch sensors 9, regulates the size of current of solenoid 8 and can adjust the spacing δ between the second U-shaped electromagnetic force arrangement U2 and the first magnetic track 21
2
, the spacing δ between pitch sensors 9 monitoring the second U-shaped electromagnetic force arrangement U2 and the first magnetic track 21
2
.
the 3rd U-shaped electromagnetic force arrangement U3 is made into by U-shaped unshakable in one's determination 4, solenoid 5 and pitch sensors 6, regulates the size of current of solenoid 5 and can adjust the spacing δ between the 3rd U-shaped electromagnetic force arrangement U3 and the first magnetic track 21
3
, the spacing δ between pitch sensors 3 monitoring the 3rd U-shaped electromagnetic force arrangement U3 and the first magnetic track 21
3
.
the 4th U-shaped electromagnetic force arrangement U4 is comprised of U-shaped unshakable in one's determination 14, solenoid 15 and pitch sensors 16, regulates the size of current of solenoid 15 and can adjust the spacing δ between the 4th U-shaped electromagnetic force arrangement U4 and the second magnetic track 22
4
, the spacing δ between pitch sensors 16 monitoring the 4th U-shaped electromagnetic force arrangement U4 and the second magnetic track 22
4
.
the 5th U-shaped electromagnetic force arrangement U5 is comprised of U-shaped unshakable in one's determination 11, solenoid 12 and pitch sensors 13, regulates the size of current of solenoid 12 and can adjust the spacing δ between the 5th U-shaped electromagnetic force arrangement U5 and the second magnetic track 22
5
, the spacing δ between pitch sensors 13 monitoring the 5th U-shaped electromagnetic force arrangement U5 and the second magnetic track 22
5
.
the 6th U-shaped electromagnetic force arrangement U6 is comprised of U-shaped unshakable in one's determination 17, solenoid 18 and pitch sensors 19, regulates the size of current of solenoid 18 and can adjust the spacing δ between the 6th U-shaped electromagnetic force arrangement U6 and the second magnetic track 22
6
, the spacing δ between pitch sensors 19 monitoring the 6th U-shaped electromagnetic force arrangement U6 and the second magnetic track 22
6
.
one embodiment of the present of invention are a kind of machine tool motion platform, and as shown in Figure 1, the first U-shaped electromagnetic force arrangement U1 and the second U-shaped electromagnetic force arrangement U2 are collaborative works to its cross section structure, the spacing δ monitored according to pitch sensors 3
1
the spacing δ monitored with pitch sensors 9
2
if, δ
1
-δ
2
>δ
0
, increase the electric current of solenoid 2 and reduce the electric current of solenoid 8, work as δ
1
-δ
2
<0.2 δ
0
the time, keep solenoid 2 and solenoid 8 electric currents constant; If δ
2
-δ
1
>δ
0
, reduce the electric current of solenoid 2 and the electric current of increase solenoid 8, work as δ
2
-δ
1
<0.2 δ
0
the time, keep solenoid 2 and solenoid 8 electric currents constant.
one embodiment of the present of invention are a kind of machine tool motion platform, and as shown in Figure 1, the 3rd U-shaped electromagnetic force arrangement U3 and the 4th U-shaped electromagnetic force arrangement U4 are collaborative works to its cross section structure, the spacing δ monitored according to pitch sensors 6
3
the spacing δ monitored with pitch sensors 16
4
if, δ
3
-δ
4
>δ
0
, increase the electric current of solenoid 5 and reduce the electric current of solenoid 15, work as δ
3
-δ
4
<0.2 δ
0
the time, keep solenoid 5 and solenoid 15 electric currents constant; If δ
4
-δ
3
>δ
0
, reduce the electric current of solenoid 5 and the electric current of increase solenoid 15, work as δ
4
-δ
3
<0.2 δ
0
the time, keep solenoid 5 and solenoid 15 electric currents constant.
one embodiment of the present of invention are a kind of machine tool motion platform, and as shown in Figure 1, the 5th U-shaped electromagnetic force arrangement U5 and the 6th U-shaped electromagnetic force arrangement U6 are collaborative works to its cross section structure, the spacing δ monitored according to pitch sensors 13
5
the spacing δ monitored with pitch sensors 19
6
if, δ
5
-δ
6
>δ
0
, increase the electric current of solenoid 12 and reduce the electric current of solenoid 18, work as δ
5
-δ
6
<0.2 δ
0
the time, keep solenoid 12 and solenoid 18 electric currents constant; If δ
6
-δ
5
>δ
0
, reduce the electric current of solenoid 12 and the electric current of increase solenoid 18, work as δ
6
-δ
5
<0.2 δ
0
the time, keep solenoid 12 and solenoid 18 electric currents constant.
in above embodiment explanation, δ
0
for the uniform gap between each U-shaped electromagnetic force arrangement and guide rail, the factors such as load of apparent motion parts, δ
0
for 0.5mm-1.5mm.
critical component in embodiment, U-shaped iron core can adopt the silicon steel sheet punching press that this area 0.5mm commonly used is thick also to build up after japanning; Solenoid can adopt this area electromagnetic enamel-covered wire commonly used to be coiled into, and soaks insulated paint and drying and processing; T-shaped guide rail can adopt magnetic stainless steel to make as SUS430.
Claims (5)
1. a contactless guidance method, it is characterized in that arranging contactless guider on machine tool motion platform, the U-shaped electromagnetic force arrangement of a plurality of collaborative works is set respectively in the support of moving component both sides, the size of the solenoid current by regulating each U-shaped electromagnetic force arrangement, and then the gap between U-shaped electromagnetic force arrangement and magnetic track in the regulation and control support, make between moving component and magnetic track to keep certain interval to realize the non-contact type guiding.
2. contactless guidance method according to claim 1, is characterized in that the gap data that gap between described U-shaped electromagnetic force arrangement and magnetic track provides according to the pitch sensors of collaborative work is regulated by the solenoid current that changes U-shaped electromagnetic force arrangement.
3. contactless guidance method according to claim 2, it is characterized in that: the control method in the gap between each U-shaped electromagnetic force arrangement and magnetic track is:
The first U-shaped electromagnetic force arrangement U1 and the second U-shaped electromagnetic force arrangement U2 are collaborative work one group, the spacing δ monitored according to pitch sensors (3)
1and the spacing δ that monitors of pitch sensors (9)
2if, δ
1-δ
2>δ
0, increase the electric current of solenoid (2) and reduce the electric current of solenoid (8), work as δ
1-δ
2<0.2 δ
0the time, keep solenoid (2) and solenoid (8) electric current constant; If δ
2-δ
1>δ
0, reduce the electric current of solenoid (2) and the electric current of increase solenoid (8), work as δ
2-δ
1<0.2 δ
0the time, keep solenoid (2) and solenoid (8) electric current constant;
The 3rd U-shaped electromagnetic force arrangement U3 and the 4th U-shaped electromagnetic force arrangement U4 are collaborative work one group, the spacing δ monitored according to pitch sensors (6)
3and the spacing δ that monitors of pitch sensors (16)
4if, δ
3-δ
4>δ
0, increase the electric current of solenoid (5) and reduce the electric current of solenoid (15), work as δ
3-δ
4<0.2 δ
0the time, keep solenoid (5) and solenoid (15) electric current constant; If δ
4-δ
3>δ
0, reduce the electric current of solenoid (5) and the electric current of increase solenoid (15), work as δ
4-δ
3<0.2 δ
0the time, keep solenoid (5) and solenoid (15) electric current constant;
The 5th U-shaped electromagnetic force arrangement U5 and the 6th U-shaped electromagnetic force arrangement U6 are collaborative work one group, the spacing δ monitored according to pitch sensors (13)
5and the spacing δ that monitors of pitch sensors (19)
6if, δ
5-δ
6>δ
0, increase the electric current of solenoid (12) and reduce the electric current of solenoid (18), work as δ
5-δ
6<0.2 δ
0the time, keep solenoid (12) and solenoid (18) electric current constant; If δ
6-δ
5>δ
0, reduce the electric current of solenoid (12) and the electric current of increase solenoid (18), work as δ
6-δ
5<0.2 δ
0the time, keep solenoid (12) and solenoid (18) electric current constant.
4. contactless guidance method according to claim 1, is characterized in that described contactless guider includes machine tool motion platform, moving component (23), workbench (24), the first U-shaped electromagnetic force arrangement (U1), the second U-shaped electromagnetic force arrangement (U2), the 3rd U-shaped electromagnetic force arrangement (U3), the 4th U-shaped electromagnetic force arrangement (U4), the 5th U-shaped electromagnetic force arrangement (U5), the 6th U-shaped electromagnetic force arrangement (U6), the first T-shaped magnetic track (21), the second T-shaped magnetic track (22), the first support (10), the second support (20), wherein the first support (10), the second support (20) is trench structure, the first U-shaped electromagnetic force arrangement (U1), the second U-shaped electromagnetic force arrangement (U2), the 3rd U-shaped electromagnetic force arrangement (U3) is arranged on the both sides madial wall and bottom interior wall of the first support (10) trench structure that is positioned at moving component (23) one sides, the 4th U-shaped electromagnetic force arrangement (U4), the 5th U-shaped electromagnetic force arrangement (U5), the 6th U-shaped electromagnetic force arrangement (U6) is arranged on the both sides madial wall and bottom interior wall of the second support (20) trench structure that is positioned at moving component (23) opposite side, the first support (10), the bottom outer wall of the second support (20) is connected with moving component (23) respectively, with supporting movement parts (23) not with the first T-shaped magnetic track (21), the second T-shaped magnetic track (22) contact, the first T-shaped magnetic track (21), the parallel lathe bed (25) that is fixed on lathe of the second T-shaped magnetic track (22) is gone up, the first support (10), U-shaped electromagnetic force arrangement on the second support (20) respectively with the first T-shaped magnetic track (21), leave gap between the second T-shaped magnetic track (22).
5. contactless guidance method according to claim 4, it is characterized in that the U-shaped electromagnetic force arrangement in contactless guider consists of U-shaped iron core, solenoid and pitch sensors, wherein solenoid is wrapped on U-shaped iron core, and pitch sensors is arranged on by the top of the T-shaped magnetic track of U-shaped sensing unshakable in one's determination.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100454804A CN103286615A (en) | 2012-02-27 | 2012-02-27 | Contactless guide method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100454804A CN103286615A (en) | 2012-02-27 | 2012-02-27 | Contactless guide method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103286615A true CN103286615A (en) | 2013-09-11 |
Family
ID=49088425
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012100454804A Pending CN103286615A (en) | 2012-02-27 | 2012-02-27 | Contactless guide method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103286615A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5196745A (en) * | 1991-08-16 | 1993-03-23 | Massachusetts Institute Of Technology | Magnetic positioning device |
| US5327060A (en) * | 1989-10-05 | 1994-07-05 | U.S. Philips Corporation | Positioning device using Lorentz forces |
| CN1528559A (en) * | 2003-10-16 | 2004-09-15 | 上海大学 | Industrial-application type active magnetic suspension machine tool guide linear motor feeding platform |
| CN1544991A (en) * | 2003-11-13 | 2004-11-10 | 上海交通大学 | Magnetic suspension precise work bench of integrated circuit photolithography equipment |
| CN101024270A (en) * | 2006-12-12 | 2007-08-29 | 大连交通大学 | Numerical-control machine tool magnetic suspension linear feeding system |
| CN101136601A (en) * | 2007-08-17 | 2008-03-05 | 南通大学 | Intelligent magnetic suspension linear feeding unit |
| CN101900952A (en) * | 2010-08-02 | 2010-12-01 | 中南大学 | Mask aligner mask platform adopting magnetic suspension technology |
-
2012
- 2012-02-27 CN CN2012100454804A patent/CN103286615A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5327060A (en) * | 1989-10-05 | 1994-07-05 | U.S. Philips Corporation | Positioning device using Lorentz forces |
| US5196745A (en) * | 1991-08-16 | 1993-03-23 | Massachusetts Institute Of Technology | Magnetic positioning device |
| CN1528559A (en) * | 2003-10-16 | 2004-09-15 | 上海大学 | Industrial-application type active magnetic suspension machine tool guide linear motor feeding platform |
| CN1544991A (en) * | 2003-11-13 | 2004-11-10 | 上海交通大学 | Magnetic suspension precise work bench of integrated circuit photolithography equipment |
| CN101024270A (en) * | 2006-12-12 | 2007-08-29 | 大连交通大学 | Numerical-control machine tool magnetic suspension linear feeding system |
| CN101136601A (en) * | 2007-08-17 | 2008-03-05 | 南通大学 | Intelligent magnetic suspension linear feeding unit |
| CN101900952A (en) * | 2010-08-02 | 2010-12-01 | 中南大学 | Mask aligner mask platform adopting magnetic suspension technology |
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Application publication date: 20130911 |