CN103561907B - 具有其上包括离散突起的均质主体的抛光垫 - Google Patents
具有其上包括离散突起的均质主体的抛光垫 Download PDFInfo
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- CN103561907B CN103561907B CN201280024792.5A CN201280024792A CN103561907B CN 103561907 B CN103561907 B CN 103561907B CN 201280024792 A CN201280024792 A CN 201280024792A CN 103561907 B CN103561907 B CN 103561907B
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- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
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- 238000009966 trimming Methods 0.000 description 2
- ITRNXVSDJBHYNJ-UHFFFAOYSA-N tungsten disulfide Chemical compound S=[W]=S ITRNXVSDJBHYNJ-UHFFFAOYSA-N 0.000 description 2
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
- B29C39/02—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor for making articles of definite length, i.e. discrete articles
- B29C39/12—Making multilayered or multicoloured articles
- B29C39/123—Making multilayered articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2075/00—Use of PU, i.e. polyureas or polyurethanes or derivatives thereof, as moulding material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2009/00—Layered products
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2031/00—Other particular articles
- B29L2031/736—Grinding or polishing equipment
Abstract
Description
Claims (28)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/113,655 US20120302148A1 (en) | 2011-05-23 | 2011-05-23 | Polishing pad with homogeneous body having discrete protrusions thereon |
US13/113,655 | 2011-05-23 | ||
PCT/US2012/038212 WO2012162066A1 (en) | 2011-05-23 | 2012-05-16 | Polishing pad with homogeneous body having discrete protrusions thereon |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103561907A CN103561907A (zh) | 2014-02-05 |
CN103561907B true CN103561907B (zh) | 2017-05-31 |
Family
ID=46147792
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201280024792.5A Active CN103561907B (zh) | 2011-05-23 | 2012-05-16 | 具有其上包括离散突起的均质主体的抛光垫 |
Country Status (7)
Country | Link |
---|---|
US (2) | US20120302148A1 (zh) |
EP (2) | EP2714331B1 (zh) |
JP (3) | JP5657178B2 (zh) |
KR (2) | KR101621789B1 (zh) |
CN (1) | CN103561907B (zh) |
TW (2) | TWI504479B (zh) |
WO (1) | WO2012162066A1 (zh) |
Families Citing this family (53)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120302148A1 (en) | 2011-05-23 | 2012-11-29 | Rajeev Bajaj | Polishing pad with homogeneous body having discrete protrusions thereon |
KR101532990B1 (ko) * | 2011-09-22 | 2015-07-01 | 도요 고무 고교 가부시키가이샤 | 연마 패드 |
US9067298B2 (en) * | 2011-11-29 | 2015-06-30 | Nexplanar Corporation | Polishing pad with grooved foundation layer and polishing surface layer |
EP2785496B1 (en) * | 2011-11-29 | 2021-11-24 | CMC Materials, Inc. | Polishing pad with foundation layer and polishing surface layer |
US9067297B2 (en) * | 2011-11-29 | 2015-06-30 | Nexplanar Corporation | Polishing pad with foundation layer and polishing surface layer |
KR102100654B1 (ko) * | 2012-04-02 | 2020-04-14 | 토마스 웨스트 인코포레이티드 | 폴리머 연마패드의 원심주조를 위한 방법 및 시스템 및 상기 방법으로 만들어진 연마패드 |
US10022842B2 (en) | 2012-04-02 | 2018-07-17 | Thomas West, Inc. | Method and systems to control optical transmissivity of a polish pad material |
US10722997B2 (en) | 2012-04-02 | 2020-07-28 | Thomas West, Inc. | Multilayer polishing pads made by the methods for centrifugal casting of polymer polish pads |
US9597769B2 (en) | 2012-06-04 | 2017-03-21 | Nexplanar Corporation | Polishing pad with polishing surface layer having an aperture or opening above a transparent foundation layer |
US9649742B2 (en) | 2013-01-22 | 2017-05-16 | Nexplanar Corporation | Polishing pad having polishing surface with continuous protrusions |
US10160092B2 (en) * | 2013-03-14 | 2018-12-25 | Cabot Microelectronics Corporation | Polishing pad having polishing surface with continuous protrusions having tapered sidewalls |
US20150038066A1 (en) * | 2013-07-31 | 2015-02-05 | Nexplanar Corporation | Low density polishing pad |
KR102350350B1 (ko) * | 2014-04-03 | 2022-01-14 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 폴리싱 패드 및 시스템과 이의 제조 및 사용 방법 |
JP6295807B2 (ja) * | 2014-04-28 | 2018-03-20 | 株式会社リコー | 研磨具、及び、研磨装置 |
US9238294B2 (en) * | 2014-06-18 | 2016-01-19 | Nexplanar Corporation | Polishing pad having porogens with liquid filler |
US9649741B2 (en) * | 2014-07-07 | 2017-05-16 | Jh Rhodes Company, Inc. | Polishing material for polishing hard surfaces, media including the material, and methods of forming and using same |
US9873180B2 (en) * | 2014-10-17 | 2018-01-23 | Applied Materials, Inc. | CMP pad construction with composite material properties using additive manufacturing processes |
WO2016061585A1 (en) * | 2014-10-17 | 2016-04-21 | Applied Materials, Inc. | Polishing pads produced by an additive manufacturing process |
US10875145B2 (en) * | 2014-10-17 | 2020-12-29 | Applied Materials, Inc. | Polishing pads produced by an additive manufacturing process |
US10821573B2 (en) | 2014-10-17 | 2020-11-03 | Applied Materials, Inc. | Polishing pads produced by an additive manufacturing process |
US11745302B2 (en) | 2014-10-17 | 2023-09-05 | Applied Materials, Inc. | Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process |
CN113579992A (zh) * | 2014-10-17 | 2021-11-02 | 应用材料公司 | 使用加成制造工艺的具复合材料特性的cmp衬垫建构 |
US10875153B2 (en) * | 2014-10-17 | 2020-12-29 | Applied Materials, Inc. | Advanced polishing pad materials and formulations |
US9776361B2 (en) | 2014-10-17 | 2017-10-03 | Applied Materials, Inc. | Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles |
US10399201B2 (en) * | 2014-10-17 | 2019-09-03 | Applied Materials, Inc. | Advanced polishing pads having compositional gradients by use of an additive manufacturing process |
JP6476924B2 (ja) | 2015-01-30 | 2019-03-06 | 株式会社リコー | 研磨シート、研磨具、及び、研磨方法 |
US10092998B2 (en) * | 2015-06-26 | 2018-10-09 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Method of making composite polishing layer for chemical mechanical polishing pad |
WO2017019906A1 (en) * | 2015-07-30 | 2017-02-02 | Jh Rhodes Company, Inc. | Polymeric lapping materials, media and systems including polymeric lapping material, and methods of forming and using same |
CN108136568B (zh) * | 2015-10-16 | 2020-10-09 | 应用材料公司 | 使用增材制造工艺形成先进抛光垫的方法和设备 |
JP6940495B2 (ja) * | 2015-10-30 | 2021-09-29 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 所望のゼータ電位を有する研磨用物品を形成するための装置及び方法 |
CN105500183B (zh) * | 2015-11-26 | 2018-08-10 | 上海集成电路研发中心有限公司 | 一种研磨垫及其使用周期检测方法 |
CN105598866B (zh) * | 2015-12-28 | 2017-07-21 | 郑州磨料磨具磨削研究所有限公司 | 一种电镀超硬材料砂轮的制造方法 |
US10391605B2 (en) | 2016-01-19 | 2019-08-27 | Applied Materials, Inc. | Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process |
US10456886B2 (en) | 2016-01-19 | 2019-10-29 | Applied Materials, Inc. | Porous chemical mechanical polishing pads |
JP7193221B2 (ja) | 2016-01-25 | 2022-12-20 | 富士紡ホールディングス株式会社 | 研磨パッド及びその製造方法、並びに、研磨加工品の製造方法 |
TWI629297B (zh) * | 2016-07-05 | 2018-07-11 | 智勝科技股份有限公司 | 研磨層及其製造方法以及研磨方法 |
US10195713B2 (en) | 2016-08-11 | 2019-02-05 | 3M Innovative Properties Company | Lapping pads and systems and methods of making and using the same |
US10596763B2 (en) | 2017-04-21 | 2020-03-24 | Applied Materials, Inc. | Additive manufacturing with array of energy sources |
US11471999B2 (en) | 2017-07-26 | 2022-10-18 | Applied Materials, Inc. | Integrated abrasive polishing pads and manufacturing methods |
US11072050B2 (en) | 2017-08-04 | 2021-07-27 | Applied Materials, Inc. | Polishing pad with window and manufacturing methods thereof |
WO2019032286A1 (en) | 2017-08-07 | 2019-02-14 | Applied Materials, Inc. | ABRASIVE DISTRIBUTION POLISHING PADS AND METHODS OF MAKING SAME |
AU2019200390B2 (en) | 2018-01-31 | 2024-04-11 | Dow Global Technologies Llc | Coating formulation with a poly(oxyalkylene-urethane) associative thickener modified with a hydrophobic oligomer |
CN110815037B (zh) * | 2018-08-08 | 2021-07-30 | 湖北鼎龙控股股份有限公司 | 抛光垫及其制备方法、应用 |
JP7299970B2 (ja) | 2018-09-04 | 2023-06-28 | アプライド マテリアルズ インコーポレイテッド | 改良型研磨パッドのための配合物 |
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2011
- 2011-05-23 US US13/113,655 patent/US20120302148A1/en not_active Abandoned
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2012
- 2012-05-16 EP EP12723065.4A patent/EP2714331B1/en active Active
- 2012-05-16 KR KR1020137029736A patent/KR101621789B1/ko active IP Right Grant
- 2012-05-16 CN CN201280024792.5A patent/CN103561907B/zh active Active
- 2012-05-16 KR KR1020157029108A patent/KR101831909B1/ko active IP Right Grant
- 2012-05-16 EP EP14198969.9A patent/EP2857145B1/en active Active
- 2012-05-16 JP JP2014511502A patent/JP5657178B2/ja active Active
- 2012-05-16 WO PCT/US2012/038212 patent/WO2012162066A1/en unknown
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- 2014-10-31 US US14/530,534 patent/US9296085B2/en active Active
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- 2016-04-19 JP JP2016083450A patent/JP6309559B2/ja active Active
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EP2857145B1 (en) | 2018-12-26 |
JP2016135542A (ja) | 2016-07-28 |
KR101621789B1 (ko) | 2016-05-17 |
JP5965453B2 (ja) | 2016-08-03 |
KR20150122806A (ko) | 2015-11-02 |
TW201309419A (zh) | 2013-03-01 |
TWI630067B (zh) | 2018-07-21 |
US9296085B2 (en) | 2016-03-29 |
KR20130138841A (ko) | 2013-12-19 |
CN103561907A (zh) | 2014-02-05 |
JP2014515319A (ja) | 2014-06-30 |
EP2714331A1 (en) | 2014-04-09 |
US20120302148A1 (en) | 2012-11-29 |
EP2714331B1 (en) | 2015-04-01 |
JP5657178B2 (ja) | 2015-01-21 |
JP2015006731A (ja) | 2015-01-15 |
TWI504479B (zh) | 2015-10-21 |
JP6309559B2 (ja) | 2018-04-11 |
EP2857145A1 (en) | 2015-04-08 |
WO2012162066A1 (en) | 2012-11-29 |
KR101831909B1 (ko) | 2018-02-26 |
US20150056900A1 (en) | 2015-02-26 |
TW201538274A (zh) | 2015-10-16 |
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