CN103575392B - W-shaped optical fiber bundle and semiconductor film optical measuring system using same - Google Patents
W-shaped optical fiber bundle and semiconductor film optical measuring system using same Download PDFInfo
- Publication number
- CN103575392B CN103575392B CN201210281679.7A CN201210281679A CN103575392B CN 103575392 B CN103575392 B CN 103575392B CN 201210281679 A CN201210281679 A CN 201210281679A CN 103575392 B CN103575392 B CN 103575392B
- Authority
- CN
- China
- Prior art keywords
- sub
- optical fibre
- optical
- optical fiber
- port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
The invention discloses a W-shaped optical fiber bundle which comprises a first sub optical fiber, a second sub optical fiber, a third sub optical fiber and a fourth sub optical fiber. The first sub optical fiber and the second sub optical fiber share an input port, the third sub optical fiber and the fourth sub optical fiber share an output port, an output port of the second sub optical fiber and an input port of the third sub optical fiber are in bonded connection to form an input/output port, the other end of the first sub optical fiber and the other end of the fourth sub optical fiber are respectively connected with an optical fiber port, and the first sub optical fiber, the second sub optical fiber, the third sub optical fiber and the fourth sub optical fiber form the W-shaped optical fiber bundle. The invention further discloses a semiconductor film optical measuring system using the W-shaped optical fiber bundle. The W-shaped optical fiber bundle can reduce the number of system light sources and the number of spectrometers, improves measuring accuracy and meanwhile achieves the effect on reducing system cost.
Description
Technical field
The present invention relates to optical technical field, particularly the semiconductive thin film optical measuring system of a kind of W-type fiber bundle and use W-type fiber bundle.
Background technology
Along with the fast development of semicon industry, utilize optical measuring technique accurately to measure the critical dimension (Critical Dimension) of the three-dimensional structure that single or multiple lift film on wafer is formed, space pattern and material behavior and become very important.In order to make measurement result more effective, measuring system used with high accuracy should be able to measure thickness and/or film is formed.In order to accurately measure sample, such as, measure thickness and optical parametric, usually integrated multiple optical measuring device in the optical measuring system of a compound of sample thin film, namely utilize spectrophotometer and the second optical measuring device to measure sample (see US Patent No. 5608526) simultaneously.In general, the measuring system more complicated of integrated multiple optical measuring device, and need multiple wideband light source and sniffer, cost is higher.If as described in US Patent No. 6417921B2, beam splitter is adopted to be coupled multi beam light path, although minimizing light source can be reached, the requirement reduced costs, but in actual applications, optical path adjusting also not easily realizes, and, light splitting is carried out with when closing light by beam splitter, it is lower that its light leads to efficiency, after passing twice through spectroscope, the theoretical throughput of two-beam, only up to 25%, therefore thisly comprises the second optical measuring device and spectrophotometric optical measuring system is not extensively promoted in actual applications.
Be that circular many identical optical fiber are arranged in parallel along fibre length direction by xsect, and be placed in sleeve pipe and can form fibre bundle.Fibre bundle is by multiple optical fiber bunchy and carries out processing binding to its end and form, and fibre bundle is simple because fibre bundle makes, and beam Propagation efficiency is high, and the uniform feature of emergent light, is widely used in various optical device.But in prior art, fibre bundle general structure is fairly simple, can not be applicable to the needs of light beam coupling in complicated optical system.Such as, existing fiber bundle major part can only carry out the one-way transmission of light beam, for the spectral reflectance instrument or the second optical measuring device that impinge perpendicularly on sample surfaces, because it impinges perpendicularly on the characteristic of sample surfaces, returned by the detection Guang Jiangyanyuan road that sample surfaces reflects, be then difficult to the collection and the coupling that realize light beam when not using beam splitter.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of W-type fiber bundle of the light beam coupling realized in two optical measuring devices and uses the semiconductive thin film optical measuring system of W-type fiber bundle.
According to an aspect of the present invention, a kind of W-type fiber bundle is provided, comprises:
I sub-optical fibre, II sub-optical fibre, III sub-optical fibre and IV sub-optical fibre;
Described I sub-optical fibre and described II sub-optical fibre shared input mouth;
Described III sub-optical fibre and described IV sub-optical fibre common output mouth;
The output port of described II sub-optical fibre is connected with the input port binding of described III sub-optical fibre, forms input/output port;
Described I sub-optical fibre is connected a fiber port respectively with the other end of the IVth sub-optical fibre;
Described I sub-optical fibre, II sub-optical fibre, III sub-optical fibre and IV sub-optical fibre form W-type fiber bundle.
According to an aspect of the present invention, use the semiconductive thin film optical measuring system of W-type fiber bundle, comprising:
First optical measuring device, the second optical measuring device and light source;
The input port that the light that described light source sends is shared by described I sub-optical fibre and described II sub-optical fibre is transferred to described I sub-optical fibre and described II sub-optical fibre respectively;
Described I sub-optical fibre by the light that receives by described second optical measuring device oblique incidence to sample;
Described II sub-optical fibre by the light that receives successively by described input/output port, described first optical measuring device and the second optical measuring device vertical incidence to sample;
Described sample by the extremely described IV sub-optical fibre of the beam reflection from described I sub-optical fibre, and is incident in spectrometer by described output port;
Described sample by extremely described first optical measuring device of the beam reflection from described II sub-optical fibre, and is incided in spectrometer by described input/output port, described III sub-optical fibre and described output port successively.
W-type fiber bundle provided by the invention, light beam from same light source can be divided into two bundles, enter two different optical measuring devices, the detecting light beam simultaneously exported from different optical measurement mechanism is coupled into a branch of, enter in same spectrometer and detect, be conducive to the integrated of optical measuring system, reduce the quantity of system source and spectrometer, while improving measuring accuracy, reduce the effect of system cost.
Accompanying drawing explanation
The structural representation of the W-type fiber bundle that Fig. 1 provides for the embodiment of the present invention;
Fig. 2 a is the structural representation that in Fig. 1, I sub-optical fibre and II sub-optical fibre arrange at fibre bundle port 2;
Fig. 2 b is the structural representation that in Fig. 1, II sub-optical fibre and III sub-optical fibre arrange at fibre bundle port 3;
Fig. 2 c is the structural representation that in Fig. 1, III sub-optical fibre and IV sub-optical fibre arrange at fibre bundle port 4;
Fig. 3 is the structural representation of the semiconductive thin film optical measuring system using W-type fiber bundle;
Fig. 4 is the light path schematic diagram that light beam enters III sub-optical fibre.
Embodiment
See Fig. 1, the W-type fiber bundle that the embodiment of the present invention provides comprises the Ith sub-optical fibre, the IIth sub-optical fibre, the IIIth sub-optical fibre and the IVth sub-optical fibre.Wherein, the Ith sub-optical fibre and the IIth sub-optical fibre common optical fiber beam port 2(and shared input mouth); The other end of the IIth sub-optical fibre and the IIIth sub-optical fibre common optical fiber beam port 3(and input/output port), the other end of the IIIth sub-optical fibre and the IVth sub-optical fibre common optical fiber beam port 4(and common output mouth), in addition, the other end of the Ith sub-optical fibre is connected with fibre bundle port one, and the other end of the IVth sub-optical fibre is connected with fibre bundle port 5.Wherein, the length of every section of fibre bundle sub-optical fibre is about 1m.
The port of W-type fiber bundle is made up of sleeve pipe and optical fiber, and optical fiber is arranged in sleeve pipe.Ith sub-optical fibre, the IIth sub-optical fibre, the IVth sub-optical fibre only comprise an optical fiber, and the IIIth sub-optical fibre comprises six roots of sensation optical fiber.In order to realize higher coupling efficiency, fiber port can be arranged as follows: at port 2 place, the Ith sub-optical fibre, and the IIth sub-optical fibre xsect forms close-packed configuration arranged side by side, as shown in Figure 2 a.At port 3 place, the IIth sub-optical fibre is positioned at centre, and the six roots of sensation optical fiber forming the IIIth sub-optical fibre arranges around it symmetrically, forms a regular hexagon, as shown in Figure 2 b.At port 4 place, the six roots of sensation optical fiber forming the IIIth sub-optical fibre and the optical fiber forming the IVth sub-optical fibre are that yi word pattern is put side by side, and the IVth sub-optical fibre is in middle, the six roots of sensation optical fiber forming the IIIth sub-optical fibre is divided into two parts, distribute in its symmetria bilateralis, as shown in Figure 2 c, then from the light beam of port 4 outgoing, can enter in spectrometer with greater efficiency and detect.
As seen from the above description, if incident beam enters fibre bundle by fibre bundle port 2, then this light beam is by the Ith sub-optical fibre, two-beam is divided into after IIth sub-optical fibre, this two-beam is respectively from fibre bundle port one, 3 outgoing, can respectively as the detecting light beam of different optical measuring systems, such as, from detecting light beam as the spectroscopic ellipsometers of oblique incidence of the light beam of fibre bundle port one outgoing, from the light beam of fibre bundle port 3 outgoing as vertical incidence to the spectrophotometric detecting light beam of sample surfaces measurement of reflectivity, then the folded light beam of sample surfaces will return port 3 along former road, III sub-optical fibre is entered by the detecting light beam of sample reflection by port 3 by impinging perpendicularly on sample surfaces if make, make to be entered IV sub-optical fibre by the detecting light beam of sample reflection by port 5 by the oblique sample surfaces that is mapped to of spectroscopic ellipsometers simultaneously, then respectively by different optical measuring devices, the two bundle detecting light beams comprising specimen material optical characteristics information will from the outgoing of same fibre bundle port 4, only spectrometer need be aimed at optical fiber beam port 4, namely can realize same spectrometer and detect different detecting light beams.In actual measurement process, in order to make to impinge perpendicularly on sample surfaces, when being returned optical fiber beam port 3 by the detecting light beam that sample surfaces reflects, the IIIth sub-optical fibre can be entered with greater efficiency, can by regulating the condenser lens L before micro-regulation sample or fibre bundle port 3, make the light beam focusing on sample surfaces slightly out of focus, the optical fiber in outside in the spectrophotometer detection light entry port 3 that Ze Yanyuan road returns, namely in the IIIth sub-optical fibre, as shown in Figure 4, concrete methods of realizing can see Chinese patent application 201110005913.9 for its light path.
In addition, each cross-talk optical fiber forming W-type fiber bundle as above also can be the fibre bundle be made up of multiple beams of optical fiber close-packed arrays.In addition, if be coupled a root optical fiber again at port 4 place, then this fibre bundle may be used for the reception of the detecting light beam of other optical measuring devices in system, such as, by the reception of the transmitted light beam of sample in spectrophotometer.
W-type fiber bundle of the present invention shown in Figure 3 is used for the embodiment of optical measuring system, and the integrated spectrophotometric of this optical measuring system takes into account spectroscopic ellipsometers.The port 2 of W-type fiber bundle is connected with light source SO, the Ith sub-optical fibre that the light warp that then light source SO sends is connected with port 2, after IIth sub-optical fibre transmission, become two-beam, a branch of detection light exports from port one, after a plane mirror M1 reflects, the polarizer P successively in ellipsometer, wave plate C retreads and incides sample surfaces.This detecting light beam by after sample reflection, then by analyzer A, reflexes to the port 5 of W-type fiber bundle, then after the transmission of the IVth sub-optical fibre, enters in the spectrometer SP be connected with port 4 through plane mirror M2; Another bundle detection light, through the transmission of the IIth sub-optical fibre, to export and by light focusing unit, as condenser lens 6 impinges perpendicularly on sample surfaces, then after sample surfaces reflection, Yan Yuanlu returns (namely inciding port 3 by condenser lens 6) from port 3.By the condenser lens 6 before micro-regulation sample or fibre bundle port 3, make the light beam focusing on sample surfaces slightly out of focus, can in the detection light entry port 3 that returns of Shi Yanyuan road outside optical fiber in, its light path is as shown in Figure 4.By the transmission of the IIIth sub-optical fibre, detecting light beam can be made to enter in the spectrometer SP be connected with port 4.In above-mentioned light path element, light source SO, condenser lens 7, and spectrometer SP can form a spectrophotometer.In above-mentioned light path element, light source SO, polarizer P, wave plate C, analyzer A, and spectrometer SP, can form a spectroscopic ellipsometers.
Because the spectrophotometer in system and spectroscopic ellipsometers share a light source and spectrometer, then these two measurement mechanisms can not be measured simultaneously, can arrange diaphragm in respective light path, can realize the quick switching of measurement mechanism by controlling diaphragm.
In the present embodiment, the uvioresistant that fibre bundle sub-optical fibre can be 200-1100nm for wavelength coverage changes (solarization resistant) optical fiber.
In the present embodiment, use the fibre bundle of W type of the present invention, comprise spectroscopic ellipsometers and spectrophotometric semiconductive thin film optical measuring system to same sample is measured can be made to share a spectrometer and light source, greatly reduce cost.
In addition, the optical measuring device described in the present invention is not limited to the spectroscopic ellipsometers described in the present invention and spectrophotometer, can also be spectropolarimeter (polarimeter) etc.
It should be noted last that, above embodiment is only in order to illustrate technical scheme of the present invention and unrestricted, although with reference to example to invention has been detailed description, those of ordinary skill in the art is to be understood that, can modify to technical scheme of the present invention or equivalent replacement, and not departing from the spirit and scope of technical solution of the present invention, it all should be encompassed in the middle of right of the present invention.
Claims (9)
1. a W-type fiber bundle, is characterized in that, comprising:
I sub-optical fibre, II sub-optical fibre, III sub-optical fibre and IV sub-optical fibre;
Described I sub-optical fibre and described II sub-optical fibre shared input mouth;
Described III sub-optical fibre and described IV sub-optical fibre common output mouth;
The output port of described II sub-optical fibre is connected with the input port binding of described III sub-optical fibre, forms input/output port;
Described I sub-optical fibre is connected a fiber port respectively with the other end of the IVth sub-optical fibre;
Described I sub-optical fibre, II sub-optical fibre, III sub-optical fibre and IV sub-optical fibre form W-type fiber bundle; At described input/output port place, described II sub-optical fibre is positioned at centre, described III sub-optical fibre is made up of six roots of sensation optical fiber, and the described six roots of sensation optical fiber forming described III sub-optical fibre arranges around described II sub-optical fibre symmetrically, forms a regular hexagon.
2. W-type fiber bundle according to claim 1, it is characterized in that, at described input port place, I sub-optical fibre and II sub-optical fibre form close-packed configuration arranged side by side.
3. W-type fiber bundle according to claim 1, is characterized in that, at described output port place, described III sub-optical fibre and described IV sub-optical fibre are that yi word pattern is put side by side; Described IV sub-optical fibre is in middle, and the described six roots of sensation optical fiber forming described III sub-optical fibre is divided into two parts, distributes in described IV sub-optical fibre symmetria bilateralis.
4. W-type fiber bundle according to claim 1, is characterized in that, the uvioresistant change optical fiber of described sub-optical fibre to be wavelength coverage be 200-1100nm; Described port comprises sleeve pipe and optical fiber, and described optical fiber is arranged in sleeve pipe.
5. use the semiconductive thin film optical measuring system of W-type fiber bundle described in any one of claim 1-4, it is characterized in that, comprising:
First optical measuring device, the second optical measuring device and light source;
The input port that the light that described light source sends is shared by described I sub-optical fibre and described II sub-optical fibre is transferred to described I sub-optical fibre and described II sub-optical fibre respectively;
Described I sub-optical fibre by the light that receives by described second optical measuring device oblique incidence to sample;
Described II sub-optical fibre by the light that receives by vertical incidence after described first optical measuring device to sample;
Described sample by the extremely described IV sub-optical fibre of the beam reflection from described I sub-optical fibre, and is incident in spectrometer by described output port;
Described sample by extremely described first optical measuring device of the beam reflection from described II sub-optical fibre, and is incided in spectrometer by described input/output port, described III sub-optical fibre and described output port successively.
6. system according to claim 5, is characterized in that, described first optical measuring device comprises:
Condenser lens and spectrometer;
The light received is impinged perpendicularly on sample surfaces by described condenser lens by described II sub-optical fibre, and incides described spectrometer by III sub-optical fibre described in described condenser lens, described input/output port and described output port successively through the light of sample surfaces reflection.
7. system according to claim 5, is characterized in that, described second optical measuring device comprises:
The polarizer, wave plate and analyzer;
Light from described I sub-optical fibre is retreaded by the described polarizer, wave plate successively and incides sample surfaces, after being reflected, incides described spectrometer successively by described IV sub-optical fibre, described output port by sample surfaces.
8. system according to claim 7, is characterized in that, also comprises:
First plane mirror;
Between the port that described first plane mirror is arranged on described I sub-optical fibre and the described polarizer.
9. system according to claim 7, is characterized in that, also comprises:
Second plane mirror;
Described second plane mirror is arranged between described analyzer and the port of IV sub-optical fibre.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210281679.7A CN103575392B (en) | 2012-08-09 | 2012-08-09 | W-shaped optical fiber bundle and semiconductor film optical measuring system using same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210281679.7A CN103575392B (en) | 2012-08-09 | 2012-08-09 | W-shaped optical fiber bundle and semiconductor film optical measuring system using same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103575392A CN103575392A (en) | 2014-02-12 |
| CN103575392B true CN103575392B (en) | 2015-05-20 |
Family
ID=50047665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210281679.7A Expired - Fee Related CN103575392B (en) | 2012-08-09 | 2012-08-09 | W-shaped optical fiber bundle and semiconductor film optical measuring system using same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103575392B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2088248U (en) * | 1990-12-21 | 1991-11-06 | 东南大学 | Double diaphragm optical fiber differential pressure pickup |
| US5608526A (en) * | 1995-01-19 | 1997-03-04 | Tencor Instruments | Focused beam spectroscopic ellipsometry method and system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6278519B1 (en) * | 1998-01-29 | 2001-08-21 | Therma-Wave, Inc. | Apparatus for analyzing multi-layer thin film stacks on semiconductors |
-
2012
- 2012-08-09 CN CN201210281679.7A patent/CN103575392B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2088248U (en) * | 1990-12-21 | 1991-11-06 | 东南大学 | Double diaphragm optical fiber differential pressure pickup |
| US5608526A (en) * | 1995-01-19 | 1997-03-04 | Tencor Instruments | Focused beam spectroscopic ellipsometry method and system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103575392A (en) | 2014-02-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10082425B2 (en) | Integrated chromatic confocal sensor | |
| US8830463B2 (en) | Rotating-element ellipsometer and method for measuring properties of the sample using the same | |
| CN103162832B (en) | Vertical-incidence broadband polarization spectrograph containing reference beams and optical measuring system | |
| US20190137776A1 (en) | Methods of manufacturing vertical semiconductor devices | |
| CN103528797B (en) | A kind of new system detected for optical system eyeglass transmitance and reflectance | |
| CN103162831B (en) | Broadband polarization spectrograph and optical measurement system | |
| US11043239B2 (en) | Magneto-optic Kerr effect metrology systems | |
| CN104568765A (en) | Miniature spectroscopic ellipsometer device and measuring method | |
| CN103471992A (en) | Light intensity smoothing device and method of xenon lamp light sources in spectrum ellipsometer | |
| CN101443647A (en) | Optical measurement system with simultaneous multiple wavelengths, multiple angles of incidence and angles of azimuth | |
| CN103512864A (en) | Optical measuring system for measuring reflectivity and transmittivity of substrate by utilizing parallel light | |
| US20020024669A1 (en) | Spectral ellipsometer having a refractive illuminating optical system | |
| CN103528679A (en) | Micro hybrid light splitting device | |
| KR102281621B1 (en) | Systems and methods for semiconductor wafer inspection and metrology | |
| CN103575661A (en) | Optical measurement system with vertical and oblique incidence measurement functions | |
| CN102589692A (en) | Vertical incidence broadband polarization spectrometer for splitting optical fiber bundle and optical measurement system | |
| CN103575392B (en) | W-shaped optical fiber bundle and semiconductor film optical measuring system using same | |
| KR20220120588A (en) | Combined OCD and Optical Reflection Modulation Method and System | |
| CN103575662B (en) | optical measuring system | |
| CN105954286A (en) | Visibility measuring instrument based on rotary-light-filter monochromator | |
| US2849912A (en) | Optical arrangement for determining the ratio of two light fluxes | |
| KR100395442B1 (en) | Ultra high speed spectroscopic ellipsometer | |
| JP2001091357A (en) | Simultaneous analysis method of multiple optical spectrum | |
| CN103575230B (en) | Optics no color differnece focusing system | |
| CN103162830B (en) | Vertical-incidence spectrograph containing reference beams and optical measuring system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150520 Termination date: 20180809 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |