CN103586244B - Glass substrate integrated cleaning device applied to OGS secondary strengthening technology - Google Patents

Glass substrate integrated cleaning device applied to OGS secondary strengthening technology Download PDF

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Publication number
CN103586244B
CN103586244B CN201310577373.0A CN201310577373A CN103586244B CN 103586244 B CN103586244 B CN 103586244B CN 201310577373 A CN201310577373 A CN 201310577373A CN 103586244 B CN103586244 B CN 103586244B
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China
Prior art keywords
cabinet
glass substrate
roll shaft
hydrofluoric acid
reservoir
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Application number
CN201310577373.0A
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Chinese (zh)
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CN103586244A (en
Inventor
蒋新
郑晔
屠金玲
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Suzhou Kzone Equipment Technology Co Ltd
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Suzhou Kzone Equipment Technology Co Ltd
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Priority to CN201310577373.0A priority Critical patent/CN103586244B/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B08B11/04Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02Cleaning by the force of jets or sprays
    • B08B3/022Cleaning travelling work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/041Cleaning travelling work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/08Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B15/00Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form
    • F26B15/10Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions
    • F26B15/12Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions the lines being all horizontal or slightly inclined
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects

Abstract

The invention relates to a glass substrate integrated cleaning device applied to an OGS secondary strengthening technology. The glass substrate integrated cleaning device applied to the OGS secondary strengthening technology comprises a material feeding mechanism used for inputting glass substrates to the cleaning device, a hydrofluoric acid washing mechanism used for carrying out hydrofluoric acid steeping on the glass substrates, an alkali washing mechanism used for carrying out alkali liquid steeping on the glass substrates, a water washing mechanism used for carrying out spraying water washing on the glass substrates, a blow-dry mechanism used for drying the glass substrates in a blowing mode and a material discharging mechanism used for outputting the glass substrates, wherein the material feeding mechanism, the hydrofluoric acid washing mechanism, the alkali washing mechanism, the water washing mechanism, the blow-dry mechanism and the material discharging mechanism are connected in sequence. According to the glass substrate integrated cleaning device applied to the OGS secondary strengthening technology, the hydrofluoric acid washing mechanism, the alkali washing mechanism, the water washing mechanism, the blow-dry mechanism and the like are connected in sequence and form a whole, the leakproofness of the cleaning device can be improved, harm to workers by the hydrofluoric acid can be reduced, a mechanical arm and other extra auxiliary equipment are not needed, the risk of flat breaking of the glass substrates is reduced, production cost is reduced, and the device is suitable for large-scale popularization and utilization.

Description

For the glass substrate integral cleaning equipment of OGS secondary hardening technique
Technical field
The present invention relates to a kind of glass substrate cleaning equipment, relate to a kind of glass substrate integral cleaning equipment for OGS secondary hardening technique particularly.
Background technology
Along with the development of science and technology, OGS(One Glass Solution, i.e. integrated touch-control) become the dominant technology direction of touch-control industry gradually, it has (1) saved one deck glass cost and reduce cost of once fitting, (2) alleviate weight, (3) add the advantages such as light transmittance, therefore, it is possible to meet intelligent terminal ultrathin demand preferably, and promote display effect.
OGS secondary hardening technique generally can be divided into physics mode and chemical mode two kinds, wherein for physics mode, the slight crack finishing of glass-cutting rear end face is the processing procedure utilizing lapping mode to remove to carry out secondary hardening, advantage is that yield is high, and mechanical anti-pressure ability obviously can promote several times, and shortcoming is that production capacity is low, do not possess production, and needing a large amount of manual operation and board equipment, processing procedure is quite time-consuming, at least needs 30 minutes ability output parcels; Comparatively speaking, the strengthening processing procedure of chemical mode is the cutting slight crack utilizing hydrofluoric acid microetching glass section face, and not only production capacity is larger, production is good, and processing time only need 7 ~ 8 minutes can a collection of product of output, meeting the requirement of continuous productive process, is the main mode of production of current glass substrate.
OGS secondary hardening technique needs to wash through hydrofluoric acid, alkali cleaning two steps, thus needs to use corresponding cleaning equipment to clean glass substrate.Existing OGS secondary hardening technique cleaning equipment is respective independently device, when glass substrate transmits to carry out continuous productive process between which, needs to use the servicing units such as manipulator, easily breaks glass substrate into pieces, reduce operating efficiency; And hydrofluoric acid toxicity is comparatively large, uses the sealing that can reduce cleaning equipment during manipulator, be unfavorable for the safety of staff.
Summary of the invention
The present invention seeks to provide a kind of glass substrate integral cleaning equipment for OGS secondary hardening technique to overcome the deficiencies in the prior art.
For achieving the above object, the technical solution adopted in the present invention is: a kind of glass substrate integral cleaning equipment for OGS secondary hardening technique, it comprises for the feeding mechanism to cleaning equipment input glass substrate, hydrofluoric acid for carrying out hydrofluoric acid dips to glass substrate washes mechanism, for carrying out the alkali cleaning mechanism of dipping by lye to glass substrate, for carrying out the water washing mechanism of spray washing to glass substrate, for drying up the dry body of glass substrate, for exporting the discharging mechanism of glass substrate, described feeding mechanism, hydrofluoric acid washes mechanism, alkali cleaning mechanism, water washing mechanism, dry body, discharging mechanism is communicated with connection successively.
Optimally, described hydrofluoric acid washes mechanism and alkali cleaning is inter-agency is also connected with another water washing mechanism.
Further, comprise multiple pan feeding roll shaft, pan feeding sensor, transmission motivation in described feeding mechanism, pan feeding is anxious stops device; Described hydrofluoric acid wash mechanism comprise the first cabinet, be located at the first cabinet internal upper part for hold hydrofluoric acid liquid the first soaking compartment, be located on the first soaking compartment and first build bath roll shaft for what promote hydrofluoric acid liquid liquid level, be located at multiple first roll shafts above the first soaking compartment, be located in the first cabinet bottom for the first reservoir of hydrogen storage fluoric acid liquid, for hydrofluoric acid liquid pump in the first reservoir being entered the first motor in the first soaking compartment; Described alkali cleaning mechanism comprises the second cabinet, be located at the second cabinet internal upper part for hold alkali lye the second soaking compartment, be located on the second soaking compartment for promote alkali lye liquid level second build bath roll shaft, be located at multiple second roll shafts above the second soaking compartment, be located at bottom in the second cabinet for store alkali lye the second reservoir, for alkali lye in the second reservoir being pumped into the second motor in the second soaking compartment; Described water washing mechanism comprises the 3rd cabinet, be located at multiple 3rd roll shafts of the 3rd cabinet, be symmetrically set in the 3rd upper and lower both sides of roll shaft contains numerous delivery port and the water pipe of adjustable angle, to be located in the 3rd cabinet bottom for the 3rd reservoir of stored distilled water, for the 3rd motor by distilled water pump oral siphon in the 3rd reservoir; Described dry body comprising the 4th cabinet, being located at multiple 4th roll shafts of the 4th cabinet, being symmetrically set in the air knife of the 4th upper and lower both sides of roll shaft, for importing the high pressure air pump of pressure-air in air knife; Comprise multiple discharging roll shaft, exit sensors in described discharging mechanism, discharging is anxious stops device;
Described pan feeding roll shaft, the first roll shaft, the second roll shaft, the 3rd roll shaft, the 4th roll shaft and discharging roll shaft are all in same level, the first described cabinet, the second cabinet, the 3rd cabinet are the one be connected with the 4th cabinet, whether described pan feeding sensor and exit sensors are carried normally for responding to glass substrate, described transmission motivation is used for providing power to cleaning equipment, described pan feeding is anxious stop device and discharging anxious stop device be respectively used to pan feeding, discharging abnormal time cleaning equipment brake hard.
Further, it also comprises the first air extractor being located at the first cabinet top, the second air extractor being located at the second cabinet top, is located at the 3rd air extractor at the 4th cabinet top.
Further, be also connected with the first reservoir bottom the first described soaking compartment, be also connected with the second reservoir bottom the second described soaking compartment.
Further, the first described roll shaft, the second roll shaft, the 3rd roll shaft, the 4th roll shaft are the multipair roll shaft that is oppositely arranged up and down and middlely form the gap making glass substrate current.
Because technique scheme is used, the present invention compared with prior art has following advantages: the present invention is used for the glass substrate integral cleaning equipment of OGS secondary hardening technique, by hydrofluoric acid being washed mechanism's Connecting groups integrators successively such as mechanism, alkali cleaning mechanism, water washing mechanism, dry body, the sealing of cleaning equipment can be improved on the one hand, reduce hydrofluoric acid to the injury of staff; Do not need on the other hand the auxiliary equipment that manipulator etc. is extra, reduce glass substrate and equal broken risk, reduce production cost, be applicable to large-scale promotion and use.
Accompanying drawing explanation
Accompanying drawing 1 is the glass substrate integral cleaning equipment structural representation of the present invention for OGS secondary hardening technique;
Accompanying drawing 2 is the present invention's feeding mechanism structural representations for the glass substrate integral cleaning equipment of OGS secondary hardening technique;
Accompanying drawing 3 is that the present invention washes mechanism structure schematic diagram for the hydrofluoric acid of the glass substrate integral cleaning equipment of OGS secondary hardening technique;
Accompanying drawing 4 is the present invention's alkali cleaning mechanism structural representations for the glass substrate integral cleaning equipment of OGS secondary hardening technique;
Accompanying drawing 5 is the present invention's water washing mechanism structural representations for the glass substrate integral cleaning equipment of OGS secondary hardening technique;
Accompanying drawing 6 is the present invention's dry body structural representations for the glass substrate integral cleaning equipment of OGS secondary hardening technique;
Accompanying drawing 7 is the present invention's discharging mechanism structural representations for the glass substrate integral cleaning equipment of OGS secondary hardening technique;
Wherein: 1, feeding mechanism; 11, pan feeding roll shaft; 12, pan feeding sensor; 13, transmission motivation; 14, pan feeding is anxious stops device; 2, hydrofluoric acid washes mechanism; 21, the first cabinet; 22, the first soaking compartment; 23, first bath roll shaft is built; 24, the first roll shaft; 25, the first reservoir; 26, the first motor; 27, the first air extractor; 3, alkali cleaning mechanism; 31, the second cabinet; 32, the second soaking compartment; 33, second bath roll shaft is built; 34, the second roll shaft; 35, the second reservoir; 36, the second motor; 37, the second air extractor; 4, water washing mechanism; 41, the 3rd cabinet; 42, the 3rd roll shaft; 43, water pipe; 44, the 3rd reservoir; 45, the 3rd motor; 5, dry body; 51, the 4th cabinet; 52, the 4th roll shaft; 53, air knife; 54, high pressure air pump; 6, discharging mechanism; 61, discharging roll shaft; 62, exit sensors; 63, discharging is anxious stops device.
Detailed description of the invention
Below in conjunction with accompanying drawing, the preferred embodiment of the invention is described in detail.
The glass substrate integral cleaning equipment for OGS secondary hardening technique as shown in Figure 1, comprise the feeding mechanism 1 being communicated with connection successively, hydrofluoric acid washes mechanism 2, alkali cleaning mechanism 3, water washing mechanism 4, dry body 5, discharging mechanism 6, wherein feeding mechanism 1 for inputting glass substrate in cleaning equipment, hydrofluoric acid washes mechanism 2 for carrying out hydrofluoric acid dips to glass substrate, alkali cleaning mechanism 3 is for carrying out dipping by lye to glass substrate, water washing mechanism 4 is for carrying out spray washing to glass substrate, dry body 5 is for drying up the water that glass substrate adheres to, discharging mechanism 6 is for exporting the glass substrate after OGS secondary hardening PROCESS FOR TREATMENT.
In the present embodiment, in order to improve glass substrate clean-up performance, prevent from mutually disturbing between hydrofluoric acid liquid and alkali lye, wash between mechanism 2 and alkali cleaning mechanism 3 at hydrofluoric acid and be also connected with another water washing mechanism 4, to remove the hydrofluoric acid liquid that glass substrate surface attaches; Take up an area space to save, feeding mechanism 1, discharging mechanism 6 are arranged to trapezoid platform, respectively the symmetrical two ends being installed on cleaning equipment.
Below glass substrate integral cleaning equipment Each part feature the present invention being used for OGS secondary hardening technique is described in detail:
Wherein, as shown in Figure 2, be provided with multiple pan feeding roll shaft 11, pan feeding sensor 12, transmission motivation 13 and pan feeding in feeding mechanism 1 and suddenly stop device 14, pan feeding roll shaft 11 is in same level, to guarantee that glass substrate is in formation state, glass substrate can be driven upon its rotation to move forward; Whether pan feeding sensor 12 is normal for detecting glass substrate translational speed, position etc., suddenly stopping device 14 carries out brake hard can to use pan feeding when glass substrate conveying is abnormal, transmission motivation 13 is for providing power to cleaning equipment, relative position between them is not particularly limited, as long as realize its function.
Hydrofluoric acid washes mechanism 2 as shown in Figure 3, mainly comprises the first cabinet 21, first soaking compartment 22, first roll shaft 24, first reservoir 25.First soaking compartment 22 is located at the first cabinet 21 inner upper, for holding hydrofluoric acid liquid; First builds bath roll shaft 23 is located on the first soaking compartment 22, for promoting hydrofluoric acid liquid height in the first soaking compartment 22, making hydrofluoric acid liquid not have glass substrate on the first roll shaft 24, carrying out OGS secondary hardening technique; First roll shaft 24 is made up of the multipair roll shaft be oppositely arranged up and down, the gap making glass substrate current is formed between roll shaft, wherein the first roll shaft 24 of below is concordant with pan feeding roll shaft 11, to ensure that glass substrate enters hydrofluoric acid by feeding mechanism 1 reposefully and washes mechanism 2 and continue steadily to move forward; First reservoir 25 is located at the first cabinet 21 lower inside, and for hydrogen storage fluoric acid liquid, hydrofluoric acid liquid pump is entered in the first soaking compartment 22 by first motor 26 that can be arranged by side.In order to reduce the pollution of hydrofluoric acid liquid to environment, improve its utilization rate, also be connected with the first reservoir 25 bottom first soaking compartment 22, for the hydrofluoric acid liquid in the first soaking compartment 22 is imported the first reservoir 25, preferably in the first reservoir 25, the pump output of hydrofluoric acid liquid and import volume balance, and make whole hydrofluoric acid wash mechanism 2 and are in stable duty.And first cabinet 21 top be provided with the first air extractor 27, the hydrofluoric acid concentration in workshop can be reduced further, improve the safety coefficient of staff.
Alkali cleaning mechanism 3 as shown in Figure 4, mainly comprises the second cabinet 31, second soaking compartment 32, second and builds bath roll shaft 33, second reservoir 35.Second soaking compartment 32 is located at the second cabinet 31 inner upper, for holding alkali lye; Second builds bath roll shaft 33 is located on the second soaking compartment 32, for promoting alkali lye liquid level in the second soaking compartment 32, making alkali lye not have glass substrate on the second roll shaft 34, carrying out OGS secondary hardening technique; Second roll shaft 34 is made up of the multipair roll shaft be oppositely arranged up and down, the gap making glass substrate current is formed between roll shaft, wherein the second roll shaft 34 of below is concordant with pan feeding roll shaft 11, to ensure that glass substrate is washed mechanism 2 by hydrofluoric acid reposefully and entered alkali cleaning mechanism 3 and continue steadily to move forward; Second reservoir 35 is located at the second cabinet 31 lower inside, and for storing alkali lye, alkali lye is pumped in the second soaking compartment 32 by second motor 36 that can be arranged by side.In order to improve the utilization rate of alkali lye, also be connected with the second reservoir 35 bottom second soaking compartment 32, for the alkali lye in the second soaking compartment 32 is imported the second reservoir 35, preferably in the second reservoir 35, the pump output of alkali lye and import volume balance, and make whole alkali cleaning mechanism 3 be in stable duty.And second cabinet 31 top be provided with the second air extractor 37, to reduce the chemical concentration in workshop.
Water washing mechanism 4 as shown in Figure 5, comprises the 3rd cabinet 41, multiple 3rd roll shafts 42 be located in the 3rd cabinet 41, is symmetrically set in the 3rd roll shaft about 42 both sides and contains numerous delivery port and the water pipe 43 of adjustable angle, to be located in the 3rd cabinet 41 bottom for the 3rd reservoir 44 of stored distilled water, for the 3rd motor 45 by distilled water pump oral siphon 43 in the 3rd reservoir 44.3rd roll shaft 42 is made up of the multipair roll shaft be oppositely arranged up and down, the gap making glass substrate current is formed between roll shaft, wherein the 3rd roll shaft 42 of below is concordant with pan feeding roll shaft 11, to ensure that glass substrate enters water washing mechanism 4 by alkali cleaning mechanism 3 reposefully and continues steadily to move forward.In order to saving water resource, can collect with the 3rd reservoir 44 water sprayed.
Dry body 5 as shown in Figure 6, comprising the 4th cabinet 51, is located at multiple 4th roll shafts 52 of the 4th cabinet 51, being symmetrically set in the air knife 53 of the 4th roll shaft about 52 both sides, for importing the high pressure air pump 54 of pressure-air in air knife 53.4th roll shaft 52 is made up of the multipair roll shaft be oppositely arranged up and down, the gap making glass substrate current is formed between roll shaft, wherein the 3rd roll shaft 52 of below is concordant with pan feeding roll shaft 11, to ensure that glass substrate enters dry body 5 by water washing mechanism 4 reposefully and continues steadily to move forward.4th cabinet 5 top is provided with the 3rd air extractor 55, and the air pressure in balance dry body 5, takes away steam wherein simultaneously, ensures the glass substrate after process does not attach steam.
Discharging mechanism 6 as shown in Figure 6, comprises multiple discharging roll shaft 61, exit sensors 62, discharging is anxious stops device 63.Discharging roll shaft 61 is concordant with pan feeding roll shaft 11, to ensure that glass substrate enters discharging mechanism 6 with complete operation technique by dry body 5 reposefully; Whether exit sensors 62 is normal for detecting glass substrate translational speed, position etc., and suddenly stopping device 63 carries out brake hard can to use discharging when glass substrate conveying is abnormal.
In fact, regulate the chemical reagent stored in cleaning equipment, different technique can be applied to.Such as, and be similar to the thin slice of glass substrate, monocrystalline silicon piece, silica thin slice etc., be also suitable for the cleaning equipment in the present invention.
Above-described embodiment, only for technical conceive of the present invention and feature are described, its object is to person skilled in the art can be understood content of the present invention and implement according to this, can not limit the scope of the invention with this.All equivalences done according to Spirit Essence of the present invention change or modify, and all should be encompassed within protection scope of the present invention.

Claims (4)

1. the glass substrate integral cleaning equipment for OGS secondary hardening technique, it is characterized in that: it comprises for the feeding mechanism (1) to cleaning equipment input glass substrate, hydrofluoric acid for carrying out hydrofluoric acid dips to glass substrate washes mechanism (2), for carrying out the alkali cleaning mechanism (3) of dipping by lye to glass substrate, for carrying out the water washing mechanism (4) of spray washing to glass substrate, for drying up the dry body (5) of glass substrate, for exporting the discharging mechanism (6) of glass substrate, described feeding mechanism (1), hydrofluoric acid washes mechanism (2), alkali cleaning mechanism (3), water washing mechanism (4), dry body (5), discharging mechanism (6) is communicated with connection successively, described hydrofluoric acid is washed between mechanism (2) and alkali cleaning mechanism (3) and is also connected with another water washing mechanism (4), multiple pan feeding roll shaft (11) is comprised in described feeding mechanism (1), pan feeding sensor (12), transmission motivation (13), pan feeding is anxious stops device (14),
Described hydrofluoric acid is washed mechanism (2) and is comprised the first cabinet (21), be located at the first cabinet (21) internal upper part for holding first soaking compartment (22) of hydrofluoric acid liquid, be located on the first soaking compartment (22) for promote hydrofluoric acid liquid liquid level first build bath roll shaft (23), be located at multiple first roll shafts (24) of the first soaking compartment (22) top, be located at the first reservoir (25) that the first cabinet (21) interior bottom is used for hydrogen storage fluoric acid liquid, for hydrofluoric acid liquid pump in the first reservoir (25) being entered the first motor (26) in the first soaking compartment (22),
Described alkali cleaning mechanism (3) comprises the second cabinet (31), be located at the second cabinet (31) internal upper part for holding second soaking compartment (32) of alkali lye, be located on the second soaking compartment (32) for promote alkali lye liquid level second build bath roll shaft (33), be located at multiple second roll shafts (34) of the second soaking compartment (32) top, be located at the second cabinet (31) interior bottom for storing second reservoir (35) of alkali lye, for alkali lye in the second reservoir (35) being pumped into the second motor (36) in the second soaking compartment (32),
Described water washing mechanism (4) comprises the 3rd cabinet (41), multiple 3rd roll shafts (42) be located in the 3rd cabinet (41), be symmetrically set in the 3rd roll shaft (42) up and down both sides contain numerous delivery port and the water pipe of adjustable angle (43), be located at the 3rd cabinet (41) interior bottom be used for stored distilled water the 3rd reservoir (44), for the 3rd motor (45) by middle for the 3rd reservoir (44) distilled water pump oral siphon (43);
Described dry body (5) comprises the 4th cabinet (51), multiple 4th roll shafts (52) be located in the 4th cabinet (51), be symmetrically set in the 4th roll shaft (52) up and down both sides air knife (53), for importing the high pressure air pump (54) of pressure-air in air knife (53);
Comprise multiple discharging roll shaft (61), exit sensors (62) in described discharging mechanism (6), discharging is anxious stops device (63);
Described pan feeding roll shaft (11), first roll shaft (24), second roll shaft (34), 3rd roll shaft (42), 4th roll shaft (52) and discharging roll shaft (61) are all in same level, described the first cabinet (21), second cabinet (31), 3rd cabinet (41) and the 4th cabinet (51) one for being connected, whether described pan feeding sensor (12) and exit sensors (62) are carried normally for responding to glass substrate, described transmission motivation (13) is for providing power to cleaning equipment, described pan feeding is anxious to stop device (14) and discharging urgency and stops device (63) and be respectively used to pan feeding, the brake hard of cleaning equipment when discharging is abnormal.
2. the glass substrate integral cleaning equipment for OGS secondary hardening technique according to claim 1, is characterized in that: it also comprises the first air extractor (27) being located at the first cabinet (21) top, the second air extractor (37) being located at the second cabinet (31) top, is located at the 3rd air extractor (55) at the 4th cabinet (51) top.
3. the glass substrate integral cleaning equipment for OGS secondary hardening technique according to claim 1, it is characterized in that: described the first soaking compartment (22) bottom is also connected with the first reservoir (25), described the second soaking compartment (32) bottom is also connected with the second reservoir (35).
4. the glass substrate integral cleaning equipment for OGS secondary hardening technique according to claim 1, is characterized in that: described the first roll shaft (23), the second roll shaft (33), the 3rd roll shaft (42), the 4th roll shaft (52) are the multipair roll shaft that is oppositely arranged up and down and middlely form the gap making glass substrate current.
CN201310577373.0A 2013-11-15 2013-11-15 Glass substrate integrated cleaning device applied to OGS secondary strengthening technology Active CN103586244B (en)

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CN107755340A (en) * 2017-10-20 2018-03-06 贰陆光学(苏州)有限公司 A kind of cleaning method of optical mirror slip
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US6301930B1 (en) * 1999-06-14 2001-10-16 Guardian Industries Corporation Apparatus for washing curved sheets of glass and corresponding method
CN1344590A (en) * 2000-06-29 2002-04-17 株式会社D.M.S Multi-functional cleaning module and cleaning apparatus using the module
CN1805118A (en) * 2004-12-16 2006-07-19 日本网目版制造株式会社 Substrate treating apparatus and method
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