CN103624776A - Mechanical arm for precisely motion positioning control of testing head in XY plane - Google Patents
Mechanical arm for precisely motion positioning control of testing head in XY plane Download PDFInfo
- Publication number
- CN103624776A CN103624776A CN201310716574.4A CN201310716574A CN103624776A CN 103624776 A CN103624776 A CN 103624776A CN 201310716574 A CN201310716574 A CN 201310716574A CN 103624776 A CN103624776 A CN 103624776A
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- arm
- plane
- section
- measuring head
- joint
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Abstract
The invention discloses a mechanical arm for controlling a testing head to precisely locate motion position in the XY plane. The mechanical arm is composed of three sections which are connected with each other, wherein the first section of the arm is a lifting arm which does linear motion along the Z-axis; the second section of the arm is connected with the first section of the arm; the third section of the arm is connected with the second section of the arm; the second section of the arm and the third section of the arm are slewing arms which move in the X-Y plane; the second section of the arm and the third section of the arm are separately provided with limiting plates and a testing head is arranged at the front end of the third section of the arm. The mechanical arm for controlling the testing head to precisely locate motion position in the XY plane has the advantages that in order to limit the range of the freedom degree in the XY plane, the three sections of the arm are used for controlling the testing head to move and filp, the first section of the arm does linear motion along the Z-axis, the second and third sections of the arm slew to precisely locate the motion position in the XY plane, the operation and the control are easy and the locating precision is high.
Description
Technical field
The present invention relates to a kind of mechanical arm, particularly a kind of mechanical arm of controlling measuring head motion positions in XY plane of control assembly motion.
Background technology
The automatic test of integrated circuit and other electronics wafer, need to coordinate special test processor, with suitable temperature, suitable position, tests.Wafer test itself is exactly a huge and expensive Auto-Test System, and this system comprises that a measuring head is connected with the main body of this device handler.Measuring head has been used the electronic circuit of high-precision frequency control apparatus and data-signal, measuring head must be combined closely with the main body of device handler, realize accurate high speed test, this just must realize measuring head can realize accurately location in the main body of device handler.
Accurately location normally utilizes mechanical arm that measuring head is fixed, and utilizes the movement of mechanical arm to control the position of measuring head, finally realizes measuring head and in the scope of six-freedom degree, carries out movement and the upset in XY plane.Six-freedom degree is respectively: the movement of X-axis, the movement of Y-axis, the movement of Z axis, the rotation of the rotation of X-axis, Y-axis, the rotation of Z axis.
Summary of the invention
Goal of the invention: for the problems referred to above, the object of this invention is to provide a kind of mechanical arm of controlling measuring head accurate motion positions in XY plane.
Technical scheme: a kind of mechanical arm of controlling measuring head accurate motion positions in XY plane, by three joint arms, connected to form, first segment arm is along the straight-line lifting arm of Z axis, second section arm axle is connected in described first segment arm, the 3rd joint arm axle is connected in described second section arm, described second section arm, described the 3rd joint arm are revolution arm mobile in XY plane, on described second section arm, described the 3rd joint arm, be separately installed with limiting plate, measuring head is arranged on described the 3rd joint arm front end.
Also comprise the pedestal being formed by base, guide rail, elevating mechanism, described guide rail is vertically mounted on described base along Z axis, described first segment arm is connected in described guide rail and drives motion by described elevating mechanism, and the range of movement of controlling thus first segment arm is the straight line along Z axis, does not rotate.
Described elevating mechanism comprises fixed pulley, balancing weight, steel wire rope.
Between described the 3rd joint arm and described measuring head, manipulator is also installed, described manipulator axle is connected in described the 3rd joint arm, and described manipulator overturns in perpendicular to XY plane.
The rotating angular range of its moving-limiting of described limiting plate of installing respectively on described second section arm, described the 3rd joint arm is 0 °～180 °.
Described limiting plate is marked with angle index, convenient adjustment and accurate location.
Beneficial effect: compared with prior art, advantage of the present invention is to utilize three joint arms to control movement and the upset of measuring head in XY plane, scope with the free degree in restriction XY plane, first segment arm is along Z axis rectilinear motion, thereby second and third joint arm revolution is accurately positioned at the movement position in XY plane, hold easy operation control, positioning precision is high.
Accompanying drawing explanation
Fig. 1 is perspective view of the present invention;
Fig. 2 is front view of the present invention.
The specific embodiment
Below in conjunction with the drawings and specific embodiments, further illustrate the present invention, should understand these embodiment is only not used in and limits the scope of the invention for the present invention is described, after having read the present invention, those skilled in the art all fall within the application's claims limited range to the modification of the various equivalent form of values of the present invention.
As shown in accompanying drawing 1,2, a kind of mechanical arm of controlling measuring head accurate motion positions in XY plane, by pedestal, three joint arms, formed, pedestal comprises base 5, guide rail 6, elevating mechanism, elevating mechanism comprises fixed pulley 7, balancing weight 8, steel wire rope 9, base 5 is positioned at XY plane, and guide rail 6 is vertically mounted on base 5 along Z axis.
First segment arm 1 is connected on guide rail 6 by linear bearing, thrust bearing, and steel wire rope 9 is walked around 7, one, fixed pulley and connected 8, one connection first segment arms 1 of balancing weight, by elevating mechanism, drives first segment arm 1 along guide rail 6 oscilaltion campaigns.
Second section arm 2 is connected in first segment arm 1 by axle, deep groove ball bearing, thrust ball bearing, the 3rd joint arm 3 is connected in second section arm 2 by axle, deep groove ball bearing, thrust ball bearing, spheric roller bearing, second section arm 2 and the 3rd joint arm 3 are all mobile in revolution in XY plane, on second section arm 2 and the 3rd joint arm 3, be separately installed with limiting plate 4, the rotating angular range of moving-limiting is 0 °～180 °, the moving range that can reach is all to take the circular arc that arm length is radius separately, limiting plate 4 is marked with angle index, to accurately locate.
Before the 3rd joint arm 3, manipulator 10 is also installed, measuring head is arranged on manipulator 10 front ends.Manipulator 10 axles are connected in the 3rd joint arm 3, and manipulator 10 can overturn in perpendicular to XY plane.Because the volume of manipulator 10 is larger, when second section arm 2 moves to 0 ° or 180 °, the moving range of the 3rd joint arm 3 becomes the region of 45 °～180 ° or 0 °～135 °.
After arm 3 is adjusted between two angles by second section arm 2 and the 3rd joint, then carry out the fine setting in single angle, finally reach completely and coordinate.
Claims (6)
1. control measuring head accurate mechanical arm of motion positions in XY plane for one kind, it is characterized in that: by three joint arms, connected to form, first segment arm (1) is along the straight-line lifting arm of Z axis, second section arm (2) axle is connected in described first segment arm (1), the 3rd joint arm (3) axle is connected in described second section arm (2), described second section arm (2), described the 3rd joint arm (3) is revolution arm mobile in XY plane, described second section arm (2), on described the 3rd joint arm (3), be separately installed with limiting plate (4), measuring head is arranged on described the 3rd joint arm (3) front end.
2. control measuring head according to claim 1 accurate mechanical arm of motion positions in XY plane, it is characterized in that: also comprise the pedestal being formed by base (5), guide rail (6), elevating mechanism, it is upper that described guide rail (6) is vertically mounted on described base (5) along Z axis, and described first segment arm (1) is connected in described guide rail (6) and drives motion by described elevating mechanism.
3. the mechanical arm of control measuring head according to claim 2 accurate motion positions in XY plane, is characterized in that: described elevating mechanism comprises fixed pulley (7), balancing weight (8), steel wire rope (9).
4. control measuring head according to claim 1 accurate mechanical arm of motion positions in XY plane, it is characterized in that: between described the 3rd joint arm (3) and described measuring head, manipulator (10) is also installed, described manipulator (10) axle is connected in described the 3rd joint arm (3), and described manipulator (10) overturns in perpendicular to XY plane.
5. the mechanical arm of control measuring head according to claim 1 accurate motion positions in XY plane, is characterized in that: the rotating angular range of its moving-limiting of described limiting plate (4) of installing respectively on described second section arm (2), described the 3rd joint arm (3) is 0 °～180 °.
6. the mechanical arm of controlling according to claim 1 or 5 measuring head accurate motion positions in XY plane, is characterized in that: described limiting plate (4) is marked with angle index.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310716574.4A CN103624776A (en) | 2013-12-23 | 2013-12-23 | Mechanical arm for precisely motion positioning control of testing head in XY plane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310716574.4A CN103624776A (en) | 2013-12-23 | 2013-12-23 | Mechanical arm for precisely motion positioning control of testing head in XY plane |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103624776A true CN103624776A (en) | 2014-03-12 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310716574.4A Pending CN103624776A (en) | 2013-12-23 | 2013-12-23 | Mechanical arm for precisely motion positioning control of testing head in XY plane |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103624776A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104355149A (en) * | 2014-10-28 | 2015-02-18 | 苏州巨康缝制机器人有限公司 | Label clamping turnover mechanism |
| CN106826882A (en) * | 2017-02-24 | 2017-06-13 | 捷开通讯(深圳)有限公司 | Air-actuated turnover lifting device |
| CN108297064A (en) * | 2018-04-27 | 2018-07-20 | 阜阳盛东智能制造技术研发有限公司 | A kind of box body pick-and-place manipulator |
| WO2021253629A1 (en) * | 2020-06-16 | 2021-12-23 | 大连理工大学 | Multi-arm robot for realizing sitting and lying posture switching and carrying of user |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0102217A1 (en) * | 1982-08-25 | 1984-03-07 | InTest Corporation | Electronic test head positioner for test systems |
| US4527942A (en) * | 1982-08-25 | 1985-07-09 | Intest Corporation | Electronic test head positioner for test systems |
| US20060001416A1 (en) * | 2002-04-15 | 2006-01-05 | West Christopher L | Test head positioner system |
| CN2915405Y (en) * | 2005-12-01 | 2007-06-27 | 费斯托合资公司 | Mechanical arm for renewing positioning of parts |
| CN203738787U (en) * | 2013-12-23 | 2014-07-30 | 镇江艾科半导体有限公司 | Mechanical arm with testing heads controlled to accurately move and be positioned in XY plane |
-
2013
- 2013-12-23 CN CN201310716574.4A patent/CN103624776A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0102217A1 (en) * | 1982-08-25 | 1984-03-07 | InTest Corporation | Electronic test head positioner for test systems |
| US4527942A (en) * | 1982-08-25 | 1985-07-09 | Intest Corporation | Electronic test head positioner for test systems |
| US20060001416A1 (en) * | 2002-04-15 | 2006-01-05 | West Christopher L | Test head positioner system |
| CN2915405Y (en) * | 2005-12-01 | 2007-06-27 | 费斯托合资公司 | Mechanical arm for renewing positioning of parts |
| CN203738787U (en) * | 2013-12-23 | 2014-07-30 | 镇江艾科半导体有限公司 | Mechanical arm with testing heads controlled to accurately move and be positioned in XY plane |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104355149A (en) * | 2014-10-28 | 2015-02-18 | 苏州巨康缝制机器人有限公司 | Label clamping turnover mechanism |
| CN106826882A (en) * | 2017-02-24 | 2017-06-13 | 捷开通讯(深圳)有限公司 | Air-actuated turnover lifting device |
| CN108297064A (en) * | 2018-04-27 | 2018-07-20 | 阜阳盛东智能制造技术研发有限公司 | A kind of box body pick-and-place manipulator |
| CN108297064B (en) * | 2018-04-27 | 2020-09-25 | 江苏卓燃工程咨询有限公司 | Box body taking and placing manipulator |
| WO2021253629A1 (en) * | 2020-06-16 | 2021-12-23 | 大连理工大学 | Multi-arm robot for realizing sitting and lying posture switching and carrying of user |
| US11701781B2 (en) | 2020-06-16 | 2023-07-18 | Dalian University Of Technology | Multi-arm robot for realizing conversion between sitting and lying posture of patients and carrying patients to different positions |
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|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20140312 |